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DE69525607D1 - Poliervorrichtung - Google Patents

Poliervorrichtung

Info

Publication number
DE69525607D1
DE69525607D1 DE69525607T DE69525607T DE69525607D1 DE 69525607 D1 DE69525607 D1 DE 69525607D1 DE 69525607 T DE69525607 T DE 69525607T DE 69525607 T DE69525607 T DE 69525607T DE 69525607 D1 DE69525607 D1 DE 69525607D1
Authority
DE
Germany
Prior art keywords
polisher
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69525607T
Other languages
English (en)
Inventor
Fumihiko Hasegawa
Yasuyoshi Kuroda
Toshihiro Tsuchiya
Koichiro Ichikawa
Yasuo Inada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikoshi Machinery Corp
Original Assignee
Fujikoshi Machinery Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikoshi Machinery Corp filed Critical Fujikoshi Machinery Corp
Application granted granted Critical
Publication of DE69525607D1 publication Critical patent/DE69525607D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
DE69525607T 1994-12-13 1995-12-12 Poliervorrichtung Expired - Lifetime DE69525607D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6332682A JPH08168946A (ja) 1994-12-13 1994-12-13 ウェーハ外周部の研磨装置

Publications (1)

Publication Number Publication Date
DE69525607D1 true DE69525607D1 (de) 2002-04-04

Family

ID=18257708

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69525607T Expired - Lifetime DE69525607D1 (de) 1994-12-13 1995-12-12 Poliervorrichtung

Country Status (4)

Country Link
US (1) US5766065A (de)
EP (1) EP0720891B1 (de)
JP (1) JPH08168946A (de)
DE (1) DE69525607D1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW303487B (de) * 1995-05-29 1997-04-21 Shinetsu Handotai Co Ltd
JPH11156684A (ja) * 1997-11-28 1999-06-15 Komatsu Koki Kk 半導体ウエハの鏡面加工装置
US6685539B1 (en) 1999-08-24 2004-02-03 Ricoh Company, Ltd. Processing tool, method of producing tool, processing method and processing apparatus
US6514423B1 (en) 2000-02-22 2003-02-04 Memc Electronic Materials, Inc. Method for wafer processing
JP4846915B2 (ja) 2000-03-29 2011-12-28 信越半導体株式会社 貼り合わせウェーハの製造方法
KR100789205B1 (ko) * 2000-03-29 2007-12-31 신에쯔 한도타이 가부시키가이샤 실리콘 웨이퍼 및 에스오아이 웨이퍼의 제조방법, 그리고그 에스오아이 웨이퍼
US9492910B2 (en) 2012-07-25 2016-11-15 Ebara Corporation Polishing method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2209538A (en) * 1937-07-30 1940-07-30 Porsche Kg Means and method for producing cams
US3753321A (en) * 1971-07-19 1973-08-21 Newall Eng Cam grinders
US4796387A (en) * 1987-11-19 1989-01-10 Johnson James N Micro-abrasive finishing device
JP2686141B2 (ja) * 1989-05-07 1997-12-08 豊田工機株式会社 位相割出し方法
JPH02303759A (ja) * 1989-05-16 1990-12-17 Toshiba Ceramics Co Ltd ウェハ周縁部の研磨方法
JP2719855B2 (ja) * 1991-05-24 1998-02-25 信越半導体株式会社 ウエーハ外周の鏡面面取り装置
FR2699445B1 (fr) * 1992-12-18 1995-03-03 Essilor Int Procédé pour le contrôle sur une meuleuse de l'adéquation, à une monture de lunettes, d'un verre à meuler.
JP2832138B2 (ja) * 1993-09-30 1998-12-02 信越半導体株式会社 ウェーハ外周部の研磨装置
JP2837342B2 (ja) * 1993-12-13 1998-12-16 日本ミクロコーティング株式会社 研磨装置

Also Published As

Publication number Publication date
JPH08168946A (ja) 1996-07-02
EP0720891A1 (de) 1996-07-10
EP0720891B1 (de) 2002-02-27
US5766065A (en) 1998-06-16

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Legal Events

Date Code Title Description
8332 No legal effect for de