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DE502006001352D1 - Device and method for separating and transporting substrates - Google Patents

Device and method for separating and transporting substrates

Info

Publication number
DE502006001352D1
DE502006001352D1 DE502006001352T DE502006001352T DE502006001352D1 DE 502006001352 D1 DE502006001352 D1 DE 502006001352D1 DE 502006001352 T DE502006001352 T DE 502006001352T DE 502006001352 T DE502006001352 T DE 502006001352T DE 502006001352 D1 DE502006001352 D1 DE 502006001352D1
Authority
DE
Germany
Prior art keywords
substrate
separating
support device
transporting
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE502006001352T
Other languages
German (de)
Inventor
Richard Herter
Konrad Kaltenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rena Sondermaschinen GmbH
Original Assignee
Rena Sondermaschinen GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rena Sondermaschinen GmbH filed Critical Rena Sondermaschinen GmbH
Publication of DE502006001352D1 publication Critical patent/DE502006001352D1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)

Abstract

The device has a support device (104) arranged within a fluid, where an individual substrate (102) is arranged in transverse direction (105) sequentially staying behind one another in form of a stack of the substrate. A removing device (107) is for separating and transporting of the substrate. The removing device has a gripper (108) with units, where the substrate is held and is drive away from the support device. A flow device (117) for fan out of a part of a stack substrate (103), and a contact pressure element (122) that counteracts the fan out substrates. An independent claim is also included for a method for fanning out, separating and transporting disk-shaped formed substrates, which involves arranging a support device within a fluid.
DE502006001352T 2006-12-15 2006-12-15 Device and method for separating and transporting substrates Expired - Fee Related DE502006001352D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06026054A EP1935599B1 (en) 2006-12-15 2006-12-15 Device and method for the separation and the transport of substrates

Publications (1)

Publication Number Publication Date
DE502006001352D1 true DE502006001352D1 (en) 2008-09-25

Family

ID=37946339

Family Applications (1)

Application Number Title Priority Date Filing Date
DE502006001352T Expired - Fee Related DE502006001352D1 (en) 2006-12-15 2006-12-15 Device and method for separating and transporting substrates

Country Status (6)

Country Link
EP (1) EP1935599B1 (en)
AT (1) ATE404341T1 (en)
DE (1) DE502006001352D1 (en)
ES (1) ES2313535T3 (en)
PL (1) PL1935599T3 (en)
TW (1) TW200842014A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2122676B1 (en) * 2006-12-19 2013-02-27 REC Wafer Pte. Ltd. Method and device for separation of silicon wafers
WO2011063988A1 (en) * 2009-11-30 2011-06-03 Amb Apparate + Maschinenbau Gmbh Separation device
DE102012221452A1 (en) 2012-07-20 2014-01-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for separating wafers
CN115626488A (en) * 2022-09-08 2023-01-20 安徽兰迪节能玻璃有限公司 Piece device is got to vacuum glass production line

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5950643A (en) * 1995-09-06 1999-09-14 Miyazaki; Takeshiro Wafer processing system
DE19900671C2 (en) * 1999-01-11 2002-04-25 Fraunhofer Ges Forschung Method and device for separating disk-shaped substrates, in particular for wafer production
DE19904834A1 (en) * 1999-02-07 2000-08-10 Acr Automation In Cleanroom Mechanism for detaching, separating, and storing thin, fragile disc-shaped substrates for solar cells etc. manufacture
DE19950068B4 (en) * 1999-10-16 2006-03-02 Schmid Technology Systems Gmbh Method and device for separating and detaching substrate disks
DE102005045583A1 (en) * 2005-05-20 2006-11-23 Brain, Bernhard Method for separating stacked, disk-shaped elements and separating device

Also Published As

Publication number Publication date
EP1935599A1 (en) 2008-06-25
ES2313535T3 (en) 2009-03-01
PL1935599T3 (en) 2009-01-30
ATE404341T1 (en) 2008-08-15
TW200842014A (en) 2008-11-01
EP1935599B1 (en) 2008-08-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee