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DE2158257A1 - Anordnung zum herstellen von einseitig geschlossenen rohren aus halbleitermaterial - Google Patents

Anordnung zum herstellen von einseitig geschlossenen rohren aus halbleitermaterial

Info

Publication number
DE2158257A1
DE2158257A1 DE2158257A DE2158257A DE2158257A1 DE 2158257 A1 DE2158257 A1 DE 2158257A1 DE 2158257 A DE2158257 A DE 2158257A DE 2158257 A DE2158257 A DE 2158257A DE 2158257 A1 DE2158257 A1 DE 2158257A1
Authority
DE
Germany
Prior art keywords
support body
cap
closed
semiconductor material
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE2158257A
Other languages
German (de)
English (en)
Inventor
Wolfgang Dipl Chem Dr Dietze
Andreas Kasper
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE2158257A priority Critical patent/DE2158257A1/de
Priority to BE787577A priority patent/BE787577R/xx
Priority to NL7212471A priority patent/NL7212471A/xx
Priority to AT843372A priority patent/AT324434B/de
Priority to CH1440472A priority patent/CH550609A/xx
Priority to GB5003472A priority patent/GB1370988A/en
Priority to JP47112844A priority patent/JPS5743526B2/ja
Priority to US00306011A priority patent/US3793984A/en
Priority to DK564772A priority patent/DK141557C/da
Priority to SE7215010A priority patent/SE375555B/xx
Priority to FR7241300A priority patent/FR2160903B2/fr
Priority to IT31886/72A priority patent/IT1046828B/it
Priority to DD167018A priority patent/DD105727A6/xx
Publication of DE2158257A1 publication Critical patent/DE2158257A1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/073—Hollow body
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/122—Polycrystalline

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
DE2158257A 1971-11-24 1971-11-24 Anordnung zum herstellen von einseitig geschlossenen rohren aus halbleitermaterial Pending DE2158257A1 (de)

Priority Applications (13)

Application Number Priority Date Filing Date Title
DE2158257A DE2158257A1 (de) 1971-11-24 1971-11-24 Anordnung zum herstellen von einseitig geschlossenen rohren aus halbleitermaterial
BE787577A BE787577R (fr) 1971-11-24 1972-08-14 Agencement pour la fabrication de tubes fermes d'un cote, en matiere
NL7212471A NL7212471A (it) 1971-11-24 1972-09-14
AT843372A AT324434B (de) 1971-11-24 1972-10-02 Anordnung zum herstellen von einseitig geschlossenen rohren aus halbleitermaterial
CH1440472A CH550609A (de) 1971-11-24 1972-10-03 Anordnung zum herstellen von einseitig geschlossenen rohren aus halbleitermaterial.
GB5003472A GB1370988A (en) 1971-11-24 1972-10-31 Production of tubes of semiconductor material closed at one end
JP47112844A JPS5743526B2 (it) 1971-11-24 1972-11-10
US00306011A US3793984A (en) 1971-11-24 1972-11-13 Apparatus for the production of closed end tubes of semiconductor material
DK564772A DK141557C (da) 1971-11-24 1972-11-14 Apparat til fremstilling af ensidigt lukkede roer af halvledermateriale
SE7215010A SE375555B (it) 1971-11-24 1972-11-17
FR7241300A FR2160903B2 (it) 1971-11-24 1972-11-21
IT31886/72A IT1046828B (it) 1971-11-24 1972-11-21 Disposizione per fabbricare tubi di materiale semiconduttore chiusi ad una estrenita
DD167018A DD105727A6 (it) 1971-11-24 1972-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2158257A DE2158257A1 (de) 1971-11-24 1971-11-24 Anordnung zum herstellen von einseitig geschlossenen rohren aus halbleitermaterial

Publications (1)

Publication Number Publication Date
DE2158257A1 true DE2158257A1 (de) 1973-05-30

Family

ID=5826011

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2158257A Pending DE2158257A1 (de) 1971-11-24 1971-11-24 Anordnung zum herstellen von einseitig geschlossenen rohren aus halbleitermaterial

Country Status (13)

Country Link
US (1) US3793984A (it)
JP (1) JPS5743526B2 (it)
AT (1) AT324434B (it)
BE (1) BE787577R (it)
CH (1) CH550609A (it)
DD (1) DD105727A6 (it)
DE (1) DE2158257A1 (it)
DK (1) DK141557C (it)
FR (1) FR2160903B2 (it)
GB (1) GB1370988A (it)
IT (1) IT1046828B (it)
NL (1) NL7212471A (it)
SE (1) SE375555B (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5478787A (en) * 1991-12-26 1995-12-26 Uop Discrete molecular sieve and use
US5453233A (en) * 1993-04-05 1995-09-26 Cvd, Inc. Method of producing domes of ZNS and ZNSE via a chemical vapor deposition technique
WO1999005728A1 (en) 1997-07-25 1999-02-04 Nichia Chemical Industries, Ltd. Nitride semiconductor device
JP3770014B2 (ja) 1999-02-09 2006-04-26 日亜化学工業株式会社 窒化物半導体素子
US6711191B1 (en) 1999-03-04 2004-03-23 Nichia Corporation Nitride semiconductor laser device
TWI362769B (en) * 2008-05-09 2012-04-21 Univ Nat Chiao Tung Light emitting device and fabrication method therefor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB450959A (en) * 1934-10-22 1936-07-22 Robert Calvert Knight Young Electric resistance heaters
US2271838A (en) * 1939-11-06 1942-02-03 Dow Chemical Co Electric furnace resistor element
US2355343A (en) * 1941-07-23 1944-08-08 Ind De L Aluminum Sa Furnace for the electrothermal production of magnesium
US2858403A (en) * 1956-04-23 1958-10-28 Carborundum Co Silicon carbide immersion heating device
US2955566A (en) * 1957-04-16 1960-10-11 Chilean Nitrate Sales Corp Dissociation-deposition unit for the production of chromium
GB944009A (en) * 1960-01-04 1963-12-11 Texas Instruments Ltd Improvements in or relating to the deposition of silicon on a tantalum article
US3451772A (en) * 1967-06-14 1969-06-24 Air Reduction Production of ultrapure titanium nitride refractory articles
US3717439A (en) * 1970-11-18 1973-02-20 Tokyo Shibaura Electric Co Vapour phase reaction apparatus

Also Published As

Publication number Publication date
DK141557B (da) 1980-04-21
DD105727A6 (it) 1974-05-12
US3793984A (en) 1974-02-26
AT324434B (de) 1975-08-25
FR2160903B2 (it) 1976-08-20
DK141557C (da) 1980-09-08
JPS5743526B2 (it) 1982-09-16
NL7212471A (it) 1973-05-28
IT1046828B (it) 1980-07-31
GB1370988A (en) 1974-10-23
BE787577R (fr) 1972-12-01
SE375555B (it) 1975-04-21
CH550609A (de) 1974-06-28
FR2160903A2 (it) 1973-07-06
JPS4863976A (it) 1973-09-05

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Legal Events

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