DE102005003657A1 - Infrarotstrahlungsdetektor mit Infrarotstrahlunssensor und Gehäuse - Google Patents
Infrarotstrahlungsdetektor mit Infrarotstrahlunssensor und Gehäuse Download PDFInfo
- Publication number
- DE102005003657A1 DE102005003657A1 DE200510003657 DE102005003657A DE102005003657A1 DE 102005003657 A1 DE102005003657 A1 DE 102005003657A1 DE 200510003657 DE200510003657 DE 200510003657 DE 102005003657 A DE102005003657 A DE 102005003657A DE 102005003657 A1 DE102005003657 A1 DE 102005003657A1
- Authority
- DE
- Germany
- Prior art keywords
- infrared
- cap
- sensor
- substrate
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000005855 radiation Effects 0.000 title abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 52
- 238000001514 detection method Methods 0.000 claims abstract description 33
- 239000000463 material Substances 0.000 claims abstract description 32
- 239000012528 membrane Substances 0.000 claims abstract description 31
- 238000010521 absorption reaction Methods 0.000 claims abstract description 24
- 230000008859 change Effects 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 25
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 19
- 230000004044 response Effects 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 238000004026 adhesive bonding Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 230000005678 Seebeck effect Effects 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- HIVGXUNKSAJJDN-UHFFFAOYSA-N [Si].[P] Chemical compound [Si].[P] HIVGXUNKSAJJDN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011796 hollow space material Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
- G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/046—Materials; Selection of thermal materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J2005/065—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Radiation Pyrometers (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004032410A JP2005221483A (ja) | 2004-02-09 | 2004-02-09 | 赤外線検出器 |
| JP2004-32410 | 2004-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102005003657A1 true DE102005003657A1 (de) | 2006-02-09 |
Family
ID=34792623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE200510003657 Withdrawn DE102005003657A1 (de) | 2004-02-09 | 2005-01-26 | Infrarotstrahlungsdetektor mit Infrarotstrahlunssensor und Gehäuse |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2005221483A (ja) |
| DE (1) | DE102005003657A1 (ja) |
| FR (1) | FR2866115B1 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011012682A1 (de) * | 2011-03-01 | 2012-09-06 | Hella Kgaa Hueck & Co. | Gassensor, insbesondere füe automobile Anwendungen |
| DE102013104964A1 (de) * | 2013-05-14 | 2014-11-20 | Micro-Hybrid Electronic Gmbh | Hermetisch gasdichtes optoelektronisches oder elektrooptisches Bauteil sowie Verfahren zu seiner Herstellung |
| DE102014203502B3 (de) * | 2014-02-26 | 2015-03-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Anordnung zur Bestimmung von Temperaturen sowie deren Verwendung |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5206944B2 (ja) * | 2008-02-25 | 2013-06-12 | 富士ゼロックス株式会社 | 光学モジュールおよびそれを用いた医療用光計測システム |
| JP5406082B2 (ja) * | 2010-03-15 | 2014-02-05 | セイコーインスツル株式会社 | サーモパイル型赤外線センサおよびその製造方法 |
| JP5658059B2 (ja) * | 2011-03-03 | 2015-01-21 | 株式会社堀場製作所 | 熱型赤外線センサ |
| FR2999803B1 (fr) | 2012-12-17 | 2018-02-02 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif de detection infrarouge |
| WO2014112392A1 (ja) * | 2013-01-21 | 2014-07-24 | パナソニック株式会社 | 赤外線検出素子、赤外線検出器及び赤外線式ガスセンサ |
| JP6362720B2 (ja) * | 2017-02-16 | 2018-07-25 | 三菱電機株式会社 | センサケース構造、及びそのセンサケース構造を備えた加熱調理器 |
| FR3096461B1 (fr) | 2019-05-23 | 2021-10-29 | Elichens | Dispositif d'émission et de contrôle d'une lumière infra-rouge et capteur de gaz utilisant un tel dispositif |
| CN113049634B (zh) * | 2021-03-19 | 2022-08-23 | 青岛芯笙微纳电子科技有限公司 | 一种基于热效应的微型气体传感器 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5212875A (en) * | 1975-07-19 | 1977-01-31 | Fujitsu Ltd | Electron-cooled type device for detecting rays of radiant light |
| JP2615913B2 (ja) * | 1988-09-26 | 1997-06-04 | 富士通株式会社 | 赤外線光学装置 |
| JPH06347321A (ja) * | 1993-06-11 | 1994-12-22 | Fujitsu Ltd | 赤外線センサ用コールドシールド |
| US5721430A (en) * | 1995-04-13 | 1998-02-24 | Engelhard Sensor Technologies Inc. | Passive and active infrared analysis gas sensors and applicable multichannel detector assembles |
| KR100370001B1 (ko) * | 1998-10-31 | 2003-01-29 | 엘지전자 주식회사 | 온도감지장치 |
| GB0202319D0 (en) * | 2002-02-01 | 2002-03-20 | Calex Electronics Ltd | Apparatus |
-
2004
- 2004-02-09 JP JP2004032410A patent/JP2005221483A/ja active Pending
-
2005
- 2005-01-26 DE DE200510003657 patent/DE102005003657A1/de not_active Withdrawn
- 2005-02-04 FR FR0501161A patent/FR2866115B1/fr not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011012682A1 (de) * | 2011-03-01 | 2012-09-06 | Hella Kgaa Hueck & Co. | Gassensor, insbesondere füe automobile Anwendungen |
| US9255919B2 (en) | 2011-03-01 | 2016-02-09 | Hella Kgaa Hueck & Co. | Gas sensor, in particular for automobile applications |
| DE102013104964A1 (de) * | 2013-05-14 | 2014-11-20 | Micro-Hybrid Electronic Gmbh | Hermetisch gasdichtes optoelektronisches oder elektrooptisches Bauteil sowie Verfahren zu seiner Herstellung |
| US10845047B2 (en) | 2013-05-14 | 2020-11-24 | Micro-Hybrid Electronic Gmbh | Hermetically gastight optoelectronic or electro-optical component and method for producing the same |
| DE102014203502B3 (de) * | 2014-02-26 | 2015-03-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Anordnung zur Bestimmung von Temperaturen sowie deren Verwendung |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005221483A (ja) | 2005-08-18 |
| FR2866115A1 (fr) | 2005-08-12 |
| FR2866115B1 (fr) | 2007-06-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8139 | Disposal/non-payment of the annual fee |