CN85100146B - 热--湿--气多功能敏感陶瓷元件及其制造方法 - Google Patents
热--湿--气多功能敏感陶瓷元件及其制造方法Info
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Abstract
该多功能敏感陶瓷元件是由Ｂａ（Ｔｉ1-xＳｎx）Ｏ3，ｘ＝０．０５～０．５组成的Ｐ型半导体多孔陶瓷，经加入造孔剂、松装成型和轻度烧结形成三维连通网状结构。本发明利用介电常数与温度剧烈的依赖关系以及水和气体在多孔陶瓷表面吸附导致电阻的显著变化，采用电参量分离、温度分离和频率分离技术，实现对环境气氛的温度、湿度和一些可燃性还原气体进行检测，在热－湿－气三方面都有良好的敏感特性，并具有检测的可分离性好，感度高，响应速度快，滞后小，抗氧化还原和耐热冲击性好等特点，可用于空调机、烘干机和微波灶，粮食和食品仓库，食品、烟草和皮革加工以及纺织、印染和石油化工等生产过程的温度－湿度－还原性气体的检测。
Description
本发明涉及一种能检测温度-湿度-气体的多功能敏感陶瓷元件（或传感器）及其制造方法。
在工农业生产、贮存、运输以及日常办公和生活中，经常需要对周围环境的温度、湿度和各种气体等进行检测和控制，通常都是由几种不同功能的敏感元件完成的。实现由单个元件同时检测温度-湿度-气体，需要提供一种能对周围环境进行检测的多功能敏感陶瓷元件。日本新田恒冶和寺田二郎等人于1978年研制成热-湿两功能的敏感陶瓷元件，1981年报导由BaTiO3-SrTiO3系列敏感陶瓷元件检测温度-湿度（日本公开特许公报（A），特开昭56-110045），由MgCr2O4-TiO2系列敏感陶瓷元件检测湿度-乙醇等还原性气体（日本公开特许公报（A），特开昭56-110044），前者已在空调机、烘干机和微波灶等方面的温度-湿度检测，后者已在微波灶、电烤箱等方面的湿度-还原性气体（乙醇、一氧化碳、硫化氢和氢气等）的检测得到了应用。其后，又在Ba0.5Sr0.5TiO3中掺入MgCr2O4，提高了温度-湿度两功能敏感陶瓷元件的湿度感度和线性度（日本公开特许（A），特开昭58202）。由于BaTiO3-SrTiO3系列的热敏感度不高。而且上述几种两功能敏感陶瓷元件都不能由单个元件同时检测温度-湿度-气体，在使用范围上受到一定限制;同时采用温度-湿度和湿度-气体两套功能敏感装置，又将使成本上升。
本发明的目的在于提供一种新型多功能敏感陶瓷元件。对温度、湿度和还原性气体（例如丙烯、乙烯、乙炔和乙醇等）能同时进行检测。这就要求多功能敏感陶瓷元件对温度、湿度和丙烯、乙烯、乙炔和乙醇等还原气体都能以电信号进行检测;对温度、湿度和还原性气体进行检测的可分离性好、感度高、响应速度快、滞后小;而且抗氧化还原和耐热冲击性好。为此本发明采用电容量的温度变化率大、电阻量的湿度变化率大和电阻量的气体浓度变化率也大的P型金属氧化物陶瓷半导体BaTiO3-BaSnO3作多功能敏感陶瓷元件的基体材料，并且采用电参量分离，频率分离和温度分离技术，实现单个元件对环境气氛的温度-湿度-气体的检测。
附图说明：
图1为多功能敏感陶瓷元件结构示意图。
图2为多功能敏感陶瓷元件的旁热式加热器与支座构造示意图。
图3为多功能敏感陶瓷元件的工艺流程。
图4为多功能敏感陶瓷元件的热敏特性。
图5为多功能敏感陶瓷元件的湿敏特性。
图6为多功能敏感陶瓷元件的电容量、相对湿度和频率关系。
图7为多功能敏感陶瓷元件的电阻量、相对湿度和频率关系。
图8为多功能敏感陶瓷元件的气敏特性。
本发明所述多功能敏感陶瓷元件的构造如图1所示，它是由基片〔1〕、电极〔2〕和〔3〕以及引线〔4〕、〔5〕和〔6〕所组成。基片〔1〕为P型金属氧化物多孔陶瓷半导体Ba（Ti1-xSxO3（简称BTS），x＝0.05～0.5为宜，〔2〕为Au叉指电极，〔3〕为RuO2多孔电极，〔4〕、〔5〕和〔6〕为Pt-Ir引线。多功能敏感陶瓷元件的旁热式加热器和支座构造如图2所示。图中〔7〕为电阻加热器，〔8〕为支座，〔9〕、〔10〕、〔11〕和〔12〕为端线。多功能敏感陶瓷元件的基片〔1〕上的引线〔4〕和〔5〕经支座〔8〕，由端线〔9〕和〔10〕与检测电路相接;基片〔1〕外围的电阻加热器〔7〕经支座〔8〕，由端线〔11〕和〔12〕与电源相通。
本发明是这样实现的：作为基片〔1〕的多孔陶瓷Ba（Ti1-xSnx）O3x＝0.05～0.5由化学纯BaCO3、TiO2和SnO2作为原料，按BaTiO3和BaSnO3分子式分别配制成BaCO3-TiO2和BaCO3-SnO2的混合料，然后进行湿法混合和烘干，在1000kg/cm2压力下压成坯体，在1200～1300℃温度下保温2～5小时分别合成BaTiO3和BaSnO3熔块。粉碎后，将上述两种粉末配制成BTS混合料，进行二次球磨和二次烘干，掺入造孔剂（如甲基纤维素）其含量为BTS混合料的体积含量10～60vol%。当造孔剂与BTS混合料混合均匀后，进行松装成型，制成φ5×0.25mm的生坯（松装成型压力以500～1000kg/cm2为宜），最后经轻度烧结（烧结温度为1200～1350℃，保温时间以0.1～1小时为宜），形成具有一定粒径和孔径而且分布均匀的多孔陶瓷基片〔1〕。这种多孔陶瓷具有三维连通的网状的孔结构，其总孔隙率P＝25～50%、平均粒径ｄK〉＜2μm、平均孔径ｄP＜0.75μm。然后在基片〔1〕的一面丝网印刷并烧制成RuO2多孔电极〔3〕，另一面真空蒸镀金叉指电极〔2〕。从电极〔2〕和〔3〕上焊接Pt-Ir引线〔4〕、〔5〕和〔6〕。组装上电阻加热器〔7〕、支座〔8〕及端线〔9〕、〔10〕、〔11〕和〔12〕后，即可对温度-湿度-气体进行检测。多功能陶瓷元件的工艺流程如图3所示。
为了提高检测参量的可分离性，降低感温和湿度效应和感湿的温度效应可在BTS基料中掺入杂质TiO2（0.1～0.4wt%）和SnO2（1-4wt%）。温度检测频率为高频（≤1MHz），湿度检测频率为低频（≤1KHz）;湿度检测的工作温度小于100℃，气体检测的工作温度为200～550℃。
多功能敏感陶瓷元件的性能参见图4～8和表1所列。
本发明之敏感元件不仅可用于空调机、烘干机和微波灶等温度-湿度检测;而且可对粮食和食品仓库，食品、烟草和皮革加工、纺织、印染，以及石油化工生产过程的温度-湿度-还原性气体进行检测。本发明与现有单功能和双功能敏感陶瓷元件的检测灵敏度相当，可以由单个元件同时检测温度-湿度-还原性气体等三个功能，扩大了应用范围，简化了检测技术，提高了检测效率、降低了检测成本。
实施例：
配比为0.78BaTiO3·0.22BaSnO3，掺入0.2wt%TiO2、1.8wt%SnO2和20vol%的甲基纤维素，研磨混合均匀后，在500kg/cm2压力下松装成型，在空气中1230℃温度下保温10分钟轻度烧结成多孔陶瓷基片〔1〕，在基片〔1〕上制作电极〔2〕和〔3〕，焊接引线〔4〕、〔5〕和〔6〕，即组成多功能敏感陶瓷元件。如再配置电阻加热器〔7〕、支座〔8〕和端线〔9〕、〔10〕、〔11〕和〔12〕后，即可对温度-湿度-气体进行检测。Ba（Ti0.78Sn0.22）O3多孔陶瓷的平均粒径ｄK～1.5μm，平均孔径ｄP～0.5μm，平均比表面积Ｓ～0.8m2/g，总孔隙率P＝35.6%（其中开口孔隙率Pc＝27.6%，闭口孔隙率Pc＝8%），具有三维连通的网状孔结构。BTS多功能敏感陶瓷元件可以在温度为-40℃～150℃范围内（频率为1MHz）检测温度，在相对湿度为1～100%RH范围内（频率为1KHz）检测湿度，在400℃时检测丙烯、乙烯、乙炔和乙醇（检测极限10～10，000ppm）（见表1）。
Claims (6)
1、一种用单个元件能检测温度-湿度-气体的多功能敏感陶瓷元件，它由基片〔1〕，电极〔2〕，〔3〕和引线〔4〕，〔5〕和〔6〕所组成，其特征在于基片〔1〕的基料是由Ba（Ti1-xSnx）O3，x＝0.05～0.5系列的P型金属氧化物多孔陶瓷半导体材料组成。
2、按权利要求1所述的多功能敏感陶瓷元件，其特征在于由多孔陶瓷半导体材料所作的基片〔1〕中，掺入的杂质为TiO2（0.1～0.4wt%）或SnO2（1～4wt%）。
3、按权利要求1所述的多功能敏感陶瓷元件，其特征在于由多孔陶瓷半导体材料所作的基片〔1〕中可掺入杂质TiO2（例如0.2wt%）和SnO2（例如1.8wt%）。
4、按权利要求1、2、3所述的多功能敏感陶瓷元件，其特征在于多孔陶瓷基片〔1〕中掺有造孔剂（例如甲基纤维素），造孔剂的掺入量为BTS混合料体积含量10～60vol%，基片〔1〕具有一定粒径和孔径，而且是分布均匀的三维连通网状结构。
5、一种由基片〔1〕，电极〔2〕，〔3〕和引线〔4〕，〔5〕和〔6〕所组成的多功能敏感陶瓷元件的制造方法，其特征在于制作多孔陶瓷基片〔1〕时，当加入造孔剂（如甲基纤维素）后，再经过松装成型和轻度烧结而成。
6、按权利要求4所述的多功能敏感陶瓷元件的制造方法，其特征在于松装成型压力为500～1000kg/cm2，轻度烧结温度为1200～1350℃。
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN85100146A CN85100146B (zh) | 1985-04-01 | 1985-04-01 | 热--湿--气多功能敏感陶瓷元件及其制造方法 |
| EP86104206A EP0205777A1 (en) | 1985-04-01 | 1986-03-26 | Temperature-humidity-gas multifunctional ceramic sensor and technology |
| US06/846,630 US4794323A (en) | 1985-04-01 | 1986-04-01 | Multifunctional ceramic sensor |
| JP61072648A JPS6340816A (ja) | 1985-04-01 | 1986-04-01 | 温度−湿度−ガス濃度検知多機能セラミツクスセンサ素子用セラミツクス素子及びその製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN85100146A CN85100146B (zh) | 1985-04-01 | 1985-04-01 | 热--湿--气多功能敏感陶瓷元件及其制造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN85100146A CN85100146A (zh) | 1986-07-23 |
| CN85100146B true CN85100146B (zh) | 1987-06-10 |
Family
ID=4790925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN85100146A Expired CN85100146B (zh) | 1985-04-01 | 1985-04-01 | 热--湿--气多功能敏感陶瓷元件及其制造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4794323A (zh) |
| EP (1) | EP0205777A1 (zh) |
| JP (1) | JPS6340816A (zh) |
| CN (1) | CN85100146B (zh) |
Families Citing this family (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3811047A1 (de) * | 1988-03-31 | 1989-10-12 | Draegerwerk Ag | Fuehler zur kapazitiven messung des druckes in gasen |
| US5047214A (en) * | 1989-03-08 | 1991-09-10 | New Cosmos Electric Co., Ltd. | Smell sensing element and smell sensing device |
| GB9306594D0 (en) * | 1993-03-30 | 1993-05-26 | Univ Keele | Sensor |
| KR960029785A (ko) * | 1995-01-24 | 1996-08-17 | 구자홍 | 가스센서 |
| EP0791824A2 (en) * | 1996-02-21 | 1997-08-27 | Osaka Gas Co., Ltd. | Method of manufacturing nitrogen oxide sensor, and nitrogen oxide sensor manufactured by the method and material therefor |
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| DE10065723A1 (de) * | 2000-12-29 | 2002-07-04 | Bosch Gmbh Robert | Anordnung zur Temperaturmessung und -regelung |
| DE60239174D1 (de) * | 2001-05-31 | 2011-03-31 | Ngk Spark Plug Co | Feuchtigkeitssensor |
| DE10335553A1 (de) * | 2003-08-02 | 2005-02-17 | E + E Elektronik Ges.M.B.H. | Verfahren und Anordnung zur Feuchtemessung |
| JP4870938B2 (ja) * | 2005-03-30 | 2012-02-08 | 新コスモス電機株式会社 | 半導体式ガス検知素子の製造方法 |
| US9675109B2 (en) * | 2005-07-19 | 2017-06-13 | J. T. International Sa | Method and system for vaporization of a substance |
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| DE102006053689A1 (de) * | 2006-11-13 | 2008-05-15 | Vishay Bccomponents Beyschlag Gmbh | Sensoranordnung |
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Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1257155A (zh) * | 1969-02-06 | 1971-12-15 | ||
| DE2558560C3 (de) * | 1974-12-27 | 1978-08-24 | Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka (Japan) | Feuchtigkeitssensor mit einem negativen Koeffizienten des elektrischen Widerstandes |
| DE2636178C2 (de) * | 1975-08-19 | 1985-03-07 | Nohmi Bosai Kogyo Co., Ltd., Tokio/Tokyo | Halbleiter-Gasdetektor und Verfahren zu dessen Herstellung |
| US4080564A (en) * | 1975-10-02 | 1978-03-21 | Matsushita Electric Industrial Co., Ltd. | Humidity sensitive resistor device |
| GB1586117A (en) * | 1977-06-22 | 1981-03-18 | Rosemount Eng Co Ltd | Solid state sensor element |
| US4378691A (en) * | 1980-02-04 | 1983-04-05 | Matsushita Electric Industrial Co., Ltd. | Multi-functional sensor |
| US4442422A (en) * | 1982-03-31 | 1984-04-10 | Murata Manufacturing Co., Ltd. | Humidity sensitive resistor |
-
1985
- 1985-04-01 CN CN85100146A patent/CN85100146B/zh not_active Expired
-
1986
- 1986-03-26 EP EP86104206A patent/EP0205777A1/en not_active Withdrawn
- 1986-04-01 JP JP61072648A patent/JPS6340816A/ja active Pending
- 1986-04-01 US US06/846,630 patent/US4794323A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN85100146A (zh) | 1986-07-23 |
| EP0205777A1 (en) | 1986-12-30 |
| JPS6340816A (ja) | 1988-02-22 |
| US4794323A (en) | 1988-12-27 |
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