CN221898280U - Oven cavity environment improves structure - Google Patents
Oven cavity environment improves structure Download PDFInfo
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- CN221898280U CN221898280U CN202420475726.XU CN202420475726U CN221898280U CN 221898280 U CN221898280 U CN 221898280U CN 202420475726 U CN202420475726 U CN 202420475726U CN 221898280 U CN221898280 U CN 221898280U
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- Prior art keywords
- exhaust pipe
- oven
- oven machine
- side end
- cavity
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- 238000007789 sealing Methods 0.000 claims description 35
- 239000007789 gas Substances 0.000 abstract description 23
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 4
- 239000001301 oxygen Substances 0.000 abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 abstract description 4
- 235000021049 nutrient content Nutrition 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000002425 crystallisation Methods 0.000 description 4
- 230000008025 crystallization Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
Abstract
The utility model discloses an oven cavity environment improvement structure, which relates to the technical field of wafer ovens and comprises an oven machine; a first exhaust pipe is connected to the side end of the oven machine; the side end of the first exhaust pipe is connected with a main exhaust pipe; the other end of the main exhaust pipe is connected with a second exhaust pipe, and the two ends of the main exhaust pipe are connected with a first exhaust pipe and a second exhaust pipe; through the cooperation of No. one blast pipe, no. two blast pipes, traditional design has the exhaust pipe of replacement cavity environment all the way, reform transform into two way replacement gas pipeline now, at the start-up initial stage of oven machine promptly, in order to have discharged cavity oxygen and replace the bad environment in the cavity at the fastest speed, no. one blast pipe, no. two blast pipes open simultaneously, after the nutrient content reaches below the prescribed value, wherein exhaust pipe self-closing all the way only leaves one way to replace gas and organic volatile matter, can effectively, quick replacement oven machine internal environment and organic volatile matter keep oven machine cavity internal clean.
Description
Technical Field
The utility model relates to the technical field of wafer ovens, in particular to an oven cavity environment improvement structure.
Background
A wafer oven is an apparatus used in semiconductor manufacturing for heat treating wafers during semiconductor manufacturing; wafers are the base material for semiconductor chip fabrication, and after a series of process steps, require heat treatment to alter the crystal structure, diffuse impurities, activate dopants, etc.
The wafer needs to be subjected to a developing process in the production process, is baked after being developed in one step, and needs to be put into an anaerobic oven for baking, and the surface of the wafer is provided with photoresist and is organic.
In the prior art, a traditional oven has only one exhaust pipe, the exhaust speed of the exhaust pipe is limited, and organic matters volatilize in the process of baking the photoresist of the wafer at a high temperature, if the photoresist cannot be quickly discharged out of the oven cavity, the photoresist can be crystallized, if the photoresist falls on the surface of the wafer, the yield of products can be lost, and the organic matters can be adsorbed to the inner side wall of the oven, so that the environment improvement structure of the oven cavity is provided.
Disclosure of utility model
The utility model aims to provide an oven cavity environment improvement structure, which solves the technical problems that in the prior art, if the oven cavity cannot be rapidly discharged, crystallization is caused, if the oven cavity falls on the surface of a wafer, the yield of products is lost, and organic matters are adsorbed to the inner side wall of an oven.
The technical problems to be solved by the utility model can be realized by the following technical scheme:
An oven cavity environment improvement structure comprises an oven machine; a first exhaust pipe is connected to the side end of the oven machine; the side end of the first exhaust pipe is connected with a main exhaust pipe; the other end of the main exhaust pipe is connected with a second exhaust pipe, and the two ends of the main exhaust pipe are connected with a first exhaust pipe and a second exhaust pipe; the side end of the oven machine is connected with a first exhaust pipe and a second exhaust pipe; and an electromagnetic valve is arranged on the second exhaust pipe.
As a further scheme of the utility model: a second flange plate is fixedly connected to the side end of the first exhaust pipe; a first flange is fixedly connected to the side end of the main exhaust pipe, and the first flange corresponds to the second flange; the inner side wall of the main exhaust pipe is fixedly connected with a rubber ring.
As a further scheme of the utility model: a first valve is arranged on the second exhaust pipe; and a second valve is arranged on the first exhaust pipe.
As a further scheme of the utility model: a sealing gasket is fixedly connected to the side end of the first exhaust pipe; a plurality of groups of positioning bolts are arranged in the sealing gasket; the rubber locating ring is fixedly connected in the sealing gasket.
As a further scheme of the utility model: a first magnet plate is fixedly connected inside the rubber ring; and the side end of the first magnet plate is connected with a first exhaust pipe.
As a further scheme of the utility model: the inside of the sealing gasket is fixedly connected with a second magnet plate, and the side end of the second magnet plate is connected with an oven machine.
The utility model has the beneficial effects that: through the cooperation of No. one blast pipe, no. two blast pipes, firstly carry the inside organic matter gas of oven machine to No. one blast pipe, no. two blast pipes's inside, then the rethread total blast pipe discharges, switch No. two blast pipes's passageway through the solenoid valve, no. one blast pipe, no. two blast pipes's cooperation can improve the inside gas discharge rate of oven machine, avoid gaseous crystallization or adsorb to the inside wall department of oven machine, traditional design has the exhaust pipe of replacement cavity environment all the way, change into two way replacement gas pipe now, at the start-up initial stage of oven machine, in order to have the fastest exhaust cavity oxygen and replace the bad environment in the cavity, no. one blast pipe, no. two blast pipes open simultaneously, after the fostering the content reaches below the stipulation, wherein one way exhaust pipe self-closing, only keep one way to replace gas and organic volatile, can be effective, quick replacement oven machine cavity internal environment and organic volatile, keep the interior cleanness of oven machine.
Drawings
The utility model is further described below with reference to the accompanying drawings.
FIG. 1 is a schematic view of the overall structure of the present utility model;
FIG. 2 is a schematic diagram of a first flange structure according to the present utility model;
FIG. 3 is a schematic view of the gasket structure of the present utility model;
FIG. 4 is an enlarged view of the utility model at A in FIG. 2;
FIG. 5 is a schematic view of a rubber positioning ring structure in the utility model;
In the figure: 1. an oven machine; 2. a total exhaust pipe; 3. a first exhaust pipe; 4. a second exhaust pipe; 5. an electromagnetic valve; 6. a valve I; 7. a valve II; 8. a first flange plate; 9. a second flange plate; 10. a rubber ring; 11. a first magnet plate; 12. a sealing gasket; 13. positioning bolts; 14. a magnet plate II; 15. a rubber locating ring.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1 to 5, an oven cavity environment improvement structure includes an oven machine 1; the side end of the oven machine 1 is connected with a first exhaust pipe 3; the side end of the first exhaust pipe 3 is connected with a total exhaust pipe 2; the other end of the main exhaust pipe 2 is connected with a second exhaust pipe 4, and the two ends of the main exhaust pipe 2 are connected with a first exhaust pipe 3 and a second exhaust pipe 4; the side end of the oven machine 1 is connected with a first exhaust pipe 3 and a second exhaust pipe 4; and the second exhaust pipe 4 is provided with an electromagnetic valve 5.
Before working, organic gas in the oven machine 1 is firstly conveyed to the first exhaust pipe 3 and the second exhaust pipe 4 through the matching of the first exhaust pipe 3 and the second exhaust pipe 4, then is discharged through the total exhaust pipe 2, the channel of the second exhaust pipe 4 can be opened and closed through the computer control electromagnetic valve 5, the gas discharge speed in the oven machine 1 can be improved through the matching of the first exhaust pipe 3 and the second exhaust pipe 4, gas crystallization is avoided or the gas is adsorbed to the inner side wall of the oven machine 1, an exhaust pipeline which replaces the cavity environment is designed conventionally, the two pipelines are reformed, namely, in the initial starting stage of the oven machine 1, in order to discharge cavity oxygen at the highest speed and replace the bad environment in the cavity, the first exhaust pipe 3 and the second exhaust pipe 4 are simultaneously opened, after the nutrient content reaches below a specified value, one of the exhaust pipelines is automatically closed, only one way of the exhaust pipeline is reserved to replace gas and organic volatile matters, and the cavity environment and the organic volatile matters in the oven machine 1 can be effectively and quickly replaced, and the cavity of the oven machine 1 is kept clean.
A second flange 9 is fixedly connected to the side end of the first exhaust pipe 3; a first flange 8 is fixedly connected to the side end of the main exhaust pipe 2, and the first flange 8 corresponds to a second flange 9; the inner side wall of the main exhaust pipe 2 is fixedly connected with a rubber ring 10.
The long-term work back of No. 3 blast pipe, no. 4 blast pipes need be maintained, guarantee the quality of No. 3 blast pipe, no. 4 operations of No. two blast pipes, reduce the condition of gas leakage, no. 3 blast pipes and total blast pipe 2 are through No. 9, no. 8 fixed connection of a ring flange, no. 8 and No. 9 are connected fixedly through multiunit bolt, no. 3 blast pipe and the inside of total blast pipe 2 all are equipped with rubber ring 10, can make total blast pipe 2 after No. 8 and No. 9 are connected with No. 9, the inside rubber ring 10 of No. 3 blast pipe laminates, can improve the leakproofness each other through rubber ring 10.
A first valve 6 is arranged on the second exhaust pipe 4; and a second valve 7 is arranged on the first exhaust pipe 3.
The exhaust pipe 3 is always in a ventilation state, the exhaust pipe 4 can be switched on and off through the electromagnetic valve 5 according to working requirements, a worker can also manually operate the valve 6 to switch the exhaust pipe 4 according to the working requirements, and the valve 7 is operated to switch the exhaust pipe 3.
The side end of the first exhaust pipe 3 is fixedly connected with a sealing gasket 12; a plurality of groups of positioning bolts 13 are arranged in the sealing gasket 12; a rubber positioning ring 15 is fixedly connected in the sealing gasket 12.
Before working, the first exhaust pipe 3 is arranged at the side end of the oven machine 1, gas in the oven machine 1 can be discharged through the first exhaust pipe 3, the sealing gasket 12 is attached to the side end of the oven machine 1 and is fixedly arranged on the oven machine 1 through a plurality of groups of positioning bolts 13, so that the first exhaust pipe 3 is fixedly arranged at the side end of the oven machine 1, the sealing gasket 12 is made of rubber materials, good sealing performance is achieved, the sealing performance between the first exhaust pipe 3 and the oven machine 1 can be improved through the sealing gasket 12, the rubber positioning ring 15 is arranged at the inner side wall of the sealing gasket 12, the rubber positioning ring 15 is made of rubber materials, the sealing gasket 12 is tightly fixed to the inner side wall of the first exhaust pipe 3 through the elasticity of the rubber positioning ring 15, and the loosening condition is reduced.
A first magnet plate 11 is fixedly connected inside the rubber ring 10; the side end of the first magnet plate 11 is connected with a first exhaust pipe 3.
The inside of total blast pipe 2, blast pipe 3 all is equipped with magnet board 11 No. one, can make magnet board 11 laminating be connected after being connected with No. two ring flanges 8 and No. two ring flanges 9, can assist total blast pipe 2, the inside rubber ring 10 of blast pipe 3 to laminate through magnet attractive force of magnet board 11 and connect to improve the leakproofness between total blast pipe 2, the blast pipe 3.
The inside of the sealing gasket 12 is fixedly connected with a second magnet plate 14, and the side end of the second magnet plate 14 is connected with the oven machine 1.
When the sealing gasket 12 is mounted to the side end of the oven machine 1, the magnet plate No. two 14 is attracted to the oven machine 1 through the attractive force of the magnet, so that the sealing gasket 12 is tightly attached to the side end of the oven machine 1, the sealing performance of the sealing gasket 12 to the oven machine 1 is improved, and the gas leakage is reduced.
The working principle of the utility model is as follows: before working, organic gas in the oven machine 1 is firstly conveyed into the first exhaust pipe 3 and the second exhaust pipe 4 through the matching of the first exhaust pipe 3 and the second exhaust pipe 4, then is discharged through the main exhaust pipe 2, the channel of the second exhaust pipe 4 can be opened and closed through controlling the electromagnetic valve 5 by a computer, the gas discharge speed in the oven machine 1 can be improved through the matching of the first exhaust pipe 3 and the second exhaust pipe 4, gas crystallization is avoided or the gas is adsorbed to the inner side wall of the oven machine 1, a path of exhaust pipeline for replacing the cavity environment is conventionally designed, and the oven machine is transformed into two paths of replacement gas pipelines at the initial starting stage of the oven machine 1, In order to discharge the oxygen in the cavity at the highest speed and replace the bad environment in the cavity, the first exhaust pipe 3 and the second exhaust pipe 4 are simultaneously opened, after the nutrient content is lower than a specified value, one exhaust pipeline is automatically closed, and only one exhaust pipeline is reserved for replacing gas and organic volatile matters, so that the environment and the organic volatile matters in the cavity of the oven machine 1 can be effectively and quickly replaced, and the cavity of the oven machine 1 is kept clean; The first exhaust pipe 3 is always in a ventilation state, the second exhaust pipe 4 can be switched on and off through the electromagnetic valve 5 according to the working requirement, a worker can also manually operate the first valve 6 to switch the second exhaust pipe 4 according to the working requirement, and operate the second valve 7 to switch the first exhaust pipe 3; Before working, the first exhaust pipe 3 is arranged at the side end of the oven machine 1, gas in the oven machine 1 can be discharged through the first exhaust pipe 3, the sealing gasket 12 is attached to the side end of the oven machine 1 and is fixedly arranged on the oven machine 1 through a plurality of groups of positioning bolts 13, so that the first exhaust pipe 3 is fixed at the side end of the oven machine 1, the sealing gasket 12 is made of rubber material, good sealing performance is achieved, the sealing performance between the first exhaust pipe 3 and the oven machine 1 can be improved through the sealing gasket 12, the rubber positioning ring 15 is arranged at the inner side wall of the sealing gasket 12, the rubber positioning ring 15 is made of rubber material, the position of the sealing gasket 12 is tightly fixed at the inner side wall of the first exhaust pipe 3 through the elasticity of the rubber positioning ring 15, Reducing the loosening condition; When the sealing gasket 12 is mounted on the side end of the oven machine 1, the magnet plate number two 14 is adsorbed on the oven machine 1 through the attraction of the magnet, so that the sealing gasket 12 is tightly attached to the side end of the oven machine 1, the sealing property of the sealing gasket 12 to the oven machine 1 is improved, and the gas leakage condition is reduced; the first exhaust pipe 3 and the second exhaust pipe 4 need to be maintained after long-term work, so that the operation quality of the first exhaust pipe 3 and the second exhaust pipe 4 is ensured, the condition of gas leakage is reduced, the first exhaust pipe 3 and the total exhaust pipe 2 are fixedly connected through the second flange 9 and the first flange 8, the first flange 8 and the second flange 9 are fixedly connected through a plurality of groups of bolts, rubber rings 10 are arranged in the first exhaust pipe 3 and the total exhaust pipe 2, the rubber rings 10 in the total exhaust pipe 2 and the first exhaust pipe 3 are attached after the first flange 8 and the second flange 9 are connected, and the sealing performance between the first exhaust pipe and the second exhaust pipe can be improved through the rubber rings 10; The inside of total blast pipe 2, blast pipe 3 all is equipped with magnet board 11 No. one, can make magnet board 11 laminating be connected after being connected with No. two ring flanges 8 and No. two ring flanges 9, can assist total blast pipe 2, the inside rubber ring 10 of blast pipe 3 to laminate through magnet attractive force of magnet board 11 and connect to improve the leakproofness between total blast pipe 2, the blast pipe 3.
The foregoing describes one embodiment of the present utility model in detail, but the description is only a preferred embodiment of the present utility model and should not be construed as limiting the scope of the utility model. All equivalent changes and modifications within the scope of the present utility model are intended to be covered by the present utility model.
Claims (6)
1. An oven cavity environment improvement structure is characterized by comprising an oven machine (1); the side end of the oven machine (1) is connected with a first exhaust pipe (3); the side end of the first exhaust pipe (3) is connected with a total exhaust pipe (2); the other end of the total exhaust pipe (2) is connected with a second exhaust pipe (4), and two ends of the total exhaust pipe (2) are connected with a first exhaust pipe (3) and a second exhaust pipe (4); the side end of the oven machine (1) is connected with a first exhaust pipe (3) and a second exhaust pipe (4); and an electromagnetic valve (5) is arranged on the second exhaust pipe (4).
2. The oven cavity environment improvement structure according to claim 1, characterized in that a second flange (9) is fixedly connected to the side end of the first exhaust pipe (3); a first flange (8) is fixedly connected to the side end of the main exhaust pipe (2), and the first flange (8) corresponds to a second flange (9); the inner side wall of the main exhaust pipe (2) is fixedly connected with a rubber ring (10).
3. The oven cavity environment improvement structure according to claim 2, characterized in that the exhaust pipe No. two (4) is provided with a valve No. one (6); and a second valve (7) is arranged on the first exhaust pipe (3).
4. The oven cavity environment improvement structure according to claim 3, characterized in that a sealing pad (12) is fixedly connected to the side end of the first exhaust pipe (3); a plurality of groups of positioning bolts (13) are arranged in the sealing gasket (12); the inside of the sealing gasket (12) is fixedly connected with a rubber positioning ring (15).
5. The oven cavity environment improvement structure according to claim 4, wherein the rubber ring (10) is fixedly connected with a first magnet plate (11); the side end of the first magnet plate (11) is connected with a first exhaust pipe (3).
6. The oven cavity environment improvement structure according to claim 5, wherein the inside of the gasket (12) is fixedly connected with a No. two magnet plate (14), and a side end of the No. two magnet plate (14) is connected with an oven machine (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202420475726.XU CN221898280U (en) | 2024-03-12 | 2024-03-12 | Oven cavity environment improves structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202420475726.XU CN221898280U (en) | 2024-03-12 | 2024-03-12 | Oven cavity environment improves structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221898280U true CN221898280U (en) | 2024-10-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202420475726.XU Active CN221898280U (en) | 2024-03-12 | 2024-03-12 | Oven cavity environment improves structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221898280U (en) |
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- 2024-03-12 CN CN202420475726.XU patent/CN221898280U/en active Active
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