CN113606949A - Vacuum pumping system of multi-station degassing furnace - Google Patents
Vacuum pumping system of multi-station degassing furnace Download PDFInfo
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- CN113606949A CN113606949A CN202110866687.7A CN202110866687A CN113606949A CN 113606949 A CN113606949 A CN 113606949A CN 202110866687 A CN202110866687 A CN 202110866687A CN 113606949 A CN113606949 A CN 113606949A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B11/00—Bell-type furnaces
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
- F27D2007/066—Vacuum
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Abstract
The application relates to a vacuumizing system of a multi-station degassing furnace, which comprises a main vacuumizing system and an auxiliary vacuumizing system, wherein the main vacuumizing system is simultaneously connected with each quartz bell jar, the auxiliary vacuumizing system is simultaneously connected with each quartz bell jar, the main vacuumizing system comprises a main vacuum pump, a main connecting pipeline and a main switch valve, the main connecting pipeline is positioned between an air inlet of the main vacuum pump and each quartz bell jar, the main switch valve is arranged on each main connecting pipeline and used for controlling the on-off of the main connecting pipeline, each main connecting pipeline is connected with an air inlet pipeline communicated with the external atmosphere, and each air inlet pipeline is provided with a first switch valve for controlling the on-off of the air inlet pipeline; the auxiliary vacuum pumping system comprises an auxiliary vacuum pump and auxiliary connecting pipelines connected between an air inlet of the auxiliary vacuum pump and each quartz bell jar, and each auxiliary connecting pipeline is provided with an auxiliary switch valve for controlling the auxiliary connecting pipeline to be switched on and off. The quartz bell jar can replace workpieces in any quartz bell jar at any time in the process of processing the workpieces, the flexibility during processing is increased, and the working efficiency is improved.
Description
Technical Field
The application relates to the field of vacuum degassing furnaces, in particular to a vacuumizing system of a multi-station degassing furnace.
Background
At present, when some workpieces are subjected to heat treatment, the workpieces need to be heated in a vacuum state, and the used equipment is to improve a vacuum environment for the workpieces through a vacuum degassing furnace and then heat the workpieces through a heating device, so that the purpose of heating the workpieces in the vacuum environment is achieved.
The vacuum degassing furnace used at present is provided with a plurality of stations, each station is a quartz bell jar used for placing a workpiece, a system for vacuumizing the degassing furnace is directly connected with the quartz bell jars, vacuumizing operation is carried out on the insides of the quartz bell jars through a vacuumizing system, and meanwhile, the workpieces inside each quartz bell jar are sequentially subjected to vacuum-isolated heating through a heating device. And after the workpiece is processed, connecting the inside of the quartz bell jar with the outside air, and replacing a new workpiece for processing.
With respect to the related art in the above, the inventors consider that: when the plurality of quartz bell jars are vacuumized, the plurality of quartz bell jars need to be vacuumized at the same time, then the heating device is used for heating the workpiece in each quartz bell jar in turn, and after all the workpieces in the quartz bell jars are processed, all the quartz bell jars can be replaced together, so that the operation is very troublesome, and the working efficiency is low.
Disclosure of Invention
In order to realize that the workpiece in any quartz bell jar can be replaced at any time in the process of processing the workpiece, the flexibility in the processing process is increased, and the working efficiency is improved, the application provides a vacuum pumping system of a multi-station degassing furnace.
The application provides a vacuum pumping system of multistation degasification stove adopts following technical scheme:
a vacuumizing system of a multi-station degassing furnace comprises a main vacuumizing system and an auxiliary vacuumizing system, wherein the main vacuumizing system is simultaneously connected with each quartz bell jar, the auxiliary vacuumizing system is simultaneously connected with each quartz bell jar, the main vacuumizing system comprises a main vacuum pump, a main connecting pipeline and a main switch valve, the main connecting pipeline is located between an air inlet of the main vacuum pump and each quartz bell jar, the main switch valve is installed on each main connecting pipeline and used for controlling the on-off of the main connecting pipeline, each main connecting pipeline is connected with an air inlet pipeline communicated with the external atmosphere, and each air inlet pipeline is provided with a first switch valve for controlling the on-off of the air inlet pipeline; the auxiliary vacuum pumping system comprises an auxiliary vacuum pump and auxiliary connecting pipelines connected between an air inlet of the auxiliary vacuum pump and each quartz bell jar, and each auxiliary connecting pipeline is provided with an auxiliary switch valve for controlling the auxiliary connecting pipeline to be switched on and off.
By adopting the technical scheme, when the workpiece needs to be processed, the workpiece to be processed can be directly placed in the quartz bell jar, then the main switch valve is opened, the main vacuum pump performs vacuumizing processing on the inside of the quartz bell jar, and then the workpiece in the quartz bell jar is subjected to space heating through the heating device, so that the requirement of heating processing of the workpiece in a vacuum environment is met. And after the workpiece in one quartz bell jar is processed, moving the heating device to heat the other quartz bell jar. At the moment, a worker can close a main switch valve connected with the quartz bell jar after treatment and open a first switch valve to connect the treated workpiece with the external atmosphere, the worker can take out the workpiece in the quartz bell jar and replace the workpiece with a new one, and after the replacement is finished, an auxiliary switch valve communicated with the quartz bell jar is opened to carry out vacuum pumping treatment on the quartz bell jar through an auxiliary vacuum pump until the vacuum degree in the quartz bell jar meets the requirement. And finally, closing the auxiliary switch valve communicated with the quartz bell jar and opening the main switch valve communicated with the quartz bell jar, so that the workpiece in one quartz bell jar is replaced.
Optionally, a vacuum chamber is provided between the main vacuum pump and each main connecting pipe.
Through adopting above-mentioned technical scheme for every main connecting line can both obtain the pipe diameter unanimous with the main vacuum pump import, and need not to reduce the pipe diameter of main connecting line in order to be connected main vacuum pump and a plurality of main connecting line, guarantees higher evacuation efficiency.
Optionally, the main vacuum pump includes a first molecular pump with an air inlet connected to the main connecting pipeline, a first dry pump with an air inlet connected to the air outlet of the first molecular pump, and a first control valve installed at the air inlet of the first dry pump.
By adopting the technical scheme, the vacuum degree and the air suction quantity of the first dry pump can be improved by the first dry pump, so that the required vacuum requirement can be met inside the quartz bell jar, and the first dry pump can ensure the normal work of the first dry pump.
Optionally, a first bellows is connected between the first molecular pump and the first dry pump.
Through adopting above-mentioned technical scheme for be the flexible coupling between first molecular pump and the first dry pump, the installation accuracy requires lowerly, and it is more convenient to install.
Optionally, an air release pipeline is communicated between the first molecular pump and the first dry pump, and an air release valve is installed on the air release pipeline.
By adopting the technical scheme, after all the workpieces in the quartz bell jar are replaced, when the interior of the quartz bell jar needs to be vacuumized again by the main vacuum pump, the air release valve can be opened, so that the main switch valve and the first molecular pump are communicated with the outside atmosphere, at the moment, the pressure on the two sides of the main switch valve is constant, the main switch valve can be conveniently opened by a worker, and the first molecular pump can be directly communicated with the quartz bell jar.
Optionally, the main connecting pipeline is communicated with a nitrogen pipeline with one end connected with nitrogen, and the nitrogen pipeline is provided with a second switch valve.
Through adopting above-mentioned technical scheme, when the work piece in the needs change quartz bell jar, can directly open the nitrogen gas pipeline, the nitrogen gas pipeline can be for the inside nitrogen gas that provides of quartz bell jar, and the protection work piece is anti-oxidation, still can improve the cooling speed for the work piece cooling simultaneously.
Optionally, a first pressure gauge for detecting pressure in the main connecting pipeline is installed on the main connecting pipeline, and the first pressure gauge is located between the main switch valve and the quartz bell jar.
Through adopting above-mentioned technical scheme, first manometer can detect the pressure value in the main connecting tube for the staff can look over the vacuum value in the quartz bell jar, thereby judges whether the vacuum value in the quartz bell jar satisfies the requirement.
Optionally, the auxiliary vacuum pump includes a second molecular pump with an air inlet connected to the auxiliary connecting pipe, a second dry pump with an air inlet connected to an air outlet of the second molecular pump, and a second control valve installed at the air inlet of the second dry pump.
By adopting the technical scheme, the second molecular pump can improve the vacuum degree and the air suction quantity of the second dry pump, so that the inner part of the quartz bell jar meets the required vacuum requirement, and meanwhile, the second dry pump can also ensure the normal work of the second molecular pump.
Optionally, a second bellows is installed between the second molecular pump and the second dry pump.
By adopting the technical scheme, the second molecular pump and the second dry pump are in flexible connection, the installation precision requirement is low, and the installation is more convenient.
Optionally, a second pressure gauge for detecting the pressure in the auxiliary connecting pipeline is installed on the auxiliary connecting pipeline, and the second pressure gauge is located between the auxiliary switch valve and the quartz bell jar.
Through adopting above-mentioned technical scheme, the second manometer can detect the pressure value on assisting the connecting tube for the staff can look over the vacuum value in the quartz bell jar, thereby judges whether the vacuum value in the quartz bell jar satisfies the requirement.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the main vacuum pumping system and the auxiliary vacuum pumping system are matched for use, and the air inlet pipeline is arranged, so that the workpiece in any quartz bell jar can be replaced at any time without influencing the treatment of other workpieces in the process of treating the workpieces in the quartz bell jars, the use is more flexible, and the working efficiency is greatly improved;
2. the arrangement of the vacuum chamber ensures that the pipe diameter of the main connecting pipeline is not reduced while the main vacuum pump is simultaneously connected with a plurality of main connecting pipelines, and keeps higher vacuum pumping efficiency;
3. the arrangement of the first corrugated pipe and the second corrugated pipe can enable the first molecular pump and the first dry pump to be in flexible connection, installation accuracy is reduced, and installation is more convenient.
Drawings
Fig. 1 is a schematic view of the overall structure of the present application.
Description of reference numerals: 1. a main vacuum pumping system; 11. a main vacuum pump; 111. a first molecular pump; 112. a first dry pump; 113. a first control valve; 114. a first bellows; 115. a third pressure gauge; 116. an air bleed duct; 117. a deflation valve; 12. a main connecting pipe; 13. a vacuum chamber; 14. a main switch valve; 15. an air intake duct; 151. a first on-off valve; 16. a nitrogen gas pipeline; 161. a second on-off valve; 17. a first pressure gauge; 2. auxiliary vacuum pumping system; 21. an auxiliary vacuum pump; 211. a second molecular pump; 212. a second dry pump; 213. a second control valve; 214. a second bellows; 215. a fourth pressure gauge; 22. auxiliary connecting pipelines; 23. an auxiliary on-off valve; 24. a second pressure gauge; 3. a quartz bell jar.
Detailed Description
The present application is described in further detail below with reference to the attached drawings.
The embodiment of the application discloses vacuum pumping system of multi-station degassing furnace. Referring to fig. 1, the evacuation system includes a main evacuation system 1 simultaneously connected to each quartz bell jar 3 and a sub evacuation system 2 simultaneously connected to each quartz bell jar 3.
Referring to fig. 1, the main vacuum pumping system 1 comprises a main vacuum pump 11 and a plurality of main connecting pipelines 12 connected between an air inlet of the main vacuum pump 11 and each quartz bell jar 3, when a workpiece needs to be processed, the workpiece to be processed is directly placed in the quartz bell jar 3, then air in the quartz bell jar 3 is pumped away through the main vacuum pump 11, so that the inside of the quartz bell jar 3 is in a vacuum state, and then the workpiece in the quartz bell jar 3 is subjected to vacuum insulation heating through a heating device, so that the heat processing work of the workpiece under the vacuum condition is realized.
Wherein, still be provided with vacuum chamber 13 between main vacuum pump 11 and every main connecting line 12, a plurality of main connecting lines 12 all are connected with main vacuum pump 11 through vacuum chamber 13 for main connecting line 12's pipe diameter can be unanimous with the pipe diameter of main vacuum pump 11 inlet end, guarantees higher evacuation efficiency, and can not be because main vacuum pump 11 is connected with a plurality of main connecting lines 12 simultaneously, and makes main connecting line 12's pipe diameter reduce, reduces evacuation efficiency.
Referring to fig. 1, the main vacuum pump 11 includes a first molecular pump 111 having an air inlet communicated with the vacuum chamber 13 and a first dry pump 112 having an air inlet connected to an air outlet of the first molecular pump 111, a first control valve 113 is further installed at the air inlet of the first dry pump 112, the first control valve 113 may be an electromagnetic valve, the on-off state of the air inlet of the first dry pump 112 may be controlled by the first control valve 113, the vacuum degree and the air suction amount of the first dry pump 112 may be increased by the first molecular pump 111, so that the required vacuum requirement may be met inside the quartz bell jar 3, and the first dry pump 112 may ensure the normal operation of the first molecular pump 111.
The first bellows 114 is disposed between the first molecular pump 111 and the first dry pump 112, so that the first molecular pump 111 and the first dry pump 112 are in flexible connection, the mounting accuracy between the first molecular pump 111 and the first dry pump 112 can be reduced, and the mounting is more convenient.
And install third manometer 115 between first molecular pump 111 and first dry pump 112, third manometer 115 can select the resistance gauge, and it can detect the vacuum degree between first molecular pump 111 and first dry pump 112, and the people of being convenient for carries out corresponding operation according to the numerical value that detects.
Referring to fig. 1, the auxiliary vacuum pumping system 2 includes an auxiliary vacuum pump 21 and auxiliary connecting pipes 22 connected between an air inlet of the auxiliary vacuum pump 21 and each quartz bell jar 3, the auxiliary vacuum pump 21 can be connected with each quartz bell jar 3 through the auxiliary connecting pipes 22, an auxiliary switch valve 23 for controlling on/off of each auxiliary connecting pipe 22 is installed on each auxiliary connecting pipe 22, a main switch valve 14 for controlling on/off of each main connecting pipe 12 is installed on each main connecting pipe 12, wherein the main switch valve 14 can be a gate valve, and the auxiliary switch valve 23 can be an electromagnetic valve.
Meanwhile, each main connecting pipeline 12 is also connected with an air inlet pipeline 15, one end, far away from the main connecting pipeline 12, of the air inlet pipeline 15 is connected with the outside atmosphere, a first switch valve 151 is arranged on the air inlet pipeline 15, and the on-off of the air inlet pipeline 15 can be controlled through the first switch valve 151, so that the main connecting pipeline 12 is in a closed state or is connected with the outside atmosphere.
In a normal state, the main on-off valve 14 is in an open state, and the auxiliary on-off valve 23 is in a closed state. When the quartz bell jar vacuum pump is used, a workpiece to be processed is directly placed in each quartz bell jar 3, then the main vacuum pump 11 is started, and the inner part of each quartz bell jar 3 is vacuumized through the main vacuum pump 11, so that the inner part of each quartz bell jar 3 is in a vacuum state. Then, the workpiece in one of the quartz bell jars 3 can be directly heated outside through the heating device, and the requirement of vacuum heating of the workpiece is met.
Referring to fig. 1, taking the placement position relationship of the figure as an example, four quartz bell jars 3 are provided, and the main connecting pipe 12 and the auxiliary connecting pipe 22 set to communicate with each quartz bell jar 3 from left to right are collectively referred to as a first station circuit, a second station circuit, a third station circuit, and a fourth station circuit. After the heating device is used for heating the workpiece in the quartz bell jar 3 in the first station loop, the position of the heating device is moved, so that the heating device can heat the workpiece in any one of the other quartz bell jars 3. In the process, the workpiece in the quartz bell jar 3 in the first station loop which is processed can be replaced according to the requirement. The specific process is that the main switch valve 14 in the first station loop is closed, and the first switch valve 151 is opened, so that the outside air enters the quartz bell jar 3 of the first station loop through the main connecting pipe 12, and then the worker can directly open the quartz bell jar 3 to replace the workpiece in the quartz bell jar 3. After the replacement is finished, the first switch valve 151 is closed, the auxiliary switch valve 23 is opened, the quartz bell jar 3 in the first station loop is vacuumized by the auxiliary vacuum pump 21 until the vacuum degree in the quartz bell jar 3 reaches the requirement, and at the moment, the auxiliary switch valve 23 is closed and the main switch valve 14 is opened, so that the replacement of the workpiece in the quartz bell jar 3 can be finished. In the process of replacement, the outside air can not enter the rest of the quartz bell jar 3 to influence the workpieces in the rest of the quartz bell jar 3, the heating device can also normally heat the workpieces in the rest of the quartz bell jar 3, continuous equipment operation is realized, the work is more flexible, and the work efficiency is greatly improved.
Wherein, in order to make things convenient for people to look over the vacuum degree that quartz bell jar 3 reached after vacuum pumping through assisting vacuum pump 21, install second manometer 24 on assisting connecting tube 22, ionization gauge can be selected for use to second manometer 24, and second manometer 24 is located between quartz bell jar 3 and the supplementary ooff valve 23, can carry out real-time detection to the vacuum value in assisting connecting tube 22, when detecting that the vacuum degree in supplementary connecting tube 22 and the main connecting tube 12 is close, close supplementary ooff valve 23, open main ooff valve 14.
Wherein, in order to reduce when taking out the work piece, the work piece and external gas contact and oxidation phenomenon appear, still be provided with nitrogen gas pipeline 16 on every main connecting line 12, the one end that nitrogen gas pipeline 16 kept away from main connecting line 12 is connected with nitrogen gas jar or nitrogen gas source, installs second ooff valve 161 on nitrogen gas pipeline 16, can control the break-make of nitrogen gas pipeline 16 through second ooff valve 161. When the first switch valve 151 is opened to communicate the quartz bell jar 3 with the outside air, the second switch valve 161 is also opened, so that the outside nitrogen can enter the main connecting pipeline 12 through the nitrogen pipeline 16 and enter the quartz bell jar 3 to provide anti-oxidation protection for the workpiece in the quartz bell jar 3, and simultaneously, the heated workpiece can be cooled, and the cooling speed is increased.
Referring to fig. 1, each main connecting pipe 12 is further provided with a first pressure gauge 17 for detecting the pressure in each main connecting pipe 12, the first pressure gauge 17 can be a pressure gauge, and the first pressure gauge 17 is located between the main switch valve 14 and the quartz bell jar 3, so that people can conveniently detect the vacuum degree in the main connecting pipe 12 in real time.
Meanwhile, an air release pipeline 116 is further arranged between the first molecular pump 111 and the first dry pump 112, an air release valve 117 is mounted on the air release pipeline 116, and the air release valve 117 can be selected from a solenoid valve. When all the quartz bell jars 3 are communicated with the outside air and the vacuumizing operation needs to be performed on all the quartz bell jars 3 again through the main vacuum pump 11, the deflation valve 117 can be directly opened to communicate the vacuum chamber 13 with the outside air, so that the pressure difference on the two sides of the main switch valve 14 is consistent, and the main switch valve 14 can be conveniently and smoothly opened by a worker. When the pressure difference between the two sides of the main switch valve 14 is small, a worker can directly open the main switch valve 14 and close the air release valve 117, so that the quartz bell jar 3 is connected with the main vacuum pump 11, and the vacuum pumping operation can be performed on the plurality of quartz bell jars 3 through the main vacuum pump 11.
Referring to fig. 1, the auxiliary vacuum pump 21 includes a second molecular pump 211 having an inlet connected to each quartz bell jar 3 through an auxiliary connecting pipe 22, and a second dry pump 212 having an inlet connected to an outlet of the second molecular pump 211, a second control valve 213 is further installed at the outlet of the second dry pump 212, the second control valve 213 can be an electromagnetic valve, the second control valve 213 can control the on/off of the inlet of the second dry pump 212, the second molecular pump 211 can increase the vacuum degree and the air suction amount of the second dry pump 212, so that the required vacuum requirement can be met inside the quartz bell jar 3, and the second dry pump 212 can ensure the normal operation of the second molecular pump 211.
Wherein, a second bellows 214 is arranged between the second molecular pump 211 and the second dry pump 212, so that the second molecular pump 211 and the second dry pump 212 are in flexible connection, the installation accuracy between the second molecular pump 211 and the second dry pump 212 can be reduced, and the installation is more convenient.
And a fourth pressure gauge 215 is further installed between the second molecular pump 211 and the second dry pump 212, and the fourth pressure gauge 215 can select a resistance gauge, which can detect the vacuum value between the second molecular pump 211 and the second dry pump 212, so that people can conveniently perform corresponding operations according to the detected value.
The application principle of the vacuum pumping system of the multi-station degassing furnace is as follows: when the quartz bell jar vacuum heating device is used, the main switch valve 14 is opened, the auxiliary switch valve 23 is closed, the quartz bell jar 3 is vacuumized through the main vacuum pump 11 until the vacuum degree inside the quartz bell jar 3 reaches a required value, and then workpieces in the quartz bell jar 3 are sequentially heated in an air-isolated mode through the heating device outside. In the heating process, the worker can replace the workpiece in the quartz bell jar 3 after heating according to the requirement. During replacement, the main switch valve 14 connected with the quartz bell jar 3 to be replaced is directly closed, and the first switch valve 151 and the second switch valve 161 connected with the main switch valve are opened, so that the quartz bell jar 3 is communicated with outside air, and the nitrogen can also perform anti-oxidation protection and cooling on the workpiece, thereby facilitating the replacement of the workpiece by people; after the replacement is completed, the first on-off valve 151 and the second on-off valve 161 are closed, and the auxiliary on-off valve 23 connected thereto is opened, so that the inside of the quartz bell jar 3 can be evacuated by the auxiliary vacuum pump 21. When the vacuum degree in the quartz bell jar 3 reaches the requirement, the auxiliary switch valve 23 is closed and the main development valve is opened, so that the work piece in the single quartz bell jar 3 can be replaced without closing the heating device, and continuous work is realized. And when the quartz bell jar is replaced, the outside air can not enter the other quartz bell jars 3 to influence the processing of the workpieces in the other quartz bell jars 3, the replacement is more flexible, and the working efficiency is greatly improved.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (10)
1. The utility model provides an evacuation system of multistation degasification stove which characterized in that: the device comprises a main vacuumizing system (1) connected with each quartz bell jar (3) and auxiliary vacuumizing systems (2) connected with each quartz bell jar (3), wherein the main vacuumizing system (1) comprises a main vacuum pump (11), main connecting pipelines (12) located between an air inlet of the main vacuum pump (11) and each quartz bell jar (3) and main switch valves (14) installed on the main connecting pipelines (12) and used for controlling the on-off of the main connecting pipelines (12), each main connecting pipeline (12) is connected with an air inlet pipeline (15) communicated with the outside atmosphere, and each air inlet pipeline (15) is provided with a first switch valve (151) used for controlling the on-off of the air inlet pipeline (15); the auxiliary vacuum pumping system (2) comprises an auxiliary vacuum pump (21) and auxiliary connecting pipelines (22) connected between an air inlet of the auxiliary vacuum pump (21) and each quartz bell jar (3), and each auxiliary connecting pipeline (22) is provided with an auxiliary switch valve (23) for controlling the auxiliary connecting pipeline (22) to be switched on and off.
2. The vacuum-pumping system of a multi-station degassing furnace according to claim 1, characterized in that: a vacuum chamber (13) is arranged between the main vacuum pump (11) and each main connecting pipeline (12).
3. The vacuum-pumping system of a multi-station degassing furnace according to claim 1, characterized in that: the main vacuum pump (11) comprises a first molecular pump (111) with an air inlet connected with the main connecting pipeline (12), a first dry pump (112) with an air inlet connected with an air outlet of the first molecular pump (111), and a first control valve (113) installed at the air inlet of the first dry pump (112).
4. The vacuum-pumping system of a multi-station degassing furnace according to claim 3, characterized in that: a first corrugated pipe (114) is connected between the first molecular pump (111) and the first dry pump (112).
5. The vacuum-pumping system of a multi-station degassing furnace according to claim 3, characterized in that: an air release pipeline (116) is communicated between the first molecular pump (111) and the first dry pump (112), and an air release valve (117) is installed on the air release pipeline (116).
6. The vacuum-pumping system of a multi-station degassing furnace according to claim 1, characterized in that: the main connecting pipeline (12) is communicated with a nitrogen pipeline (16) with one end connected with nitrogen, and the nitrogen pipeline (16) is provided with a second switch valve (161).
7. The vacuum-pumping system of a multi-station degassing furnace according to claim 1, characterized in that: and a first pressure gauge (17) for detecting the pressure in the main connecting pipeline (12) is arranged on the main connecting pipeline (12), and the first pressure gauge (17) is positioned between the main switch valve (14) and the quartz bell jar (3).
8. The vacuum-pumping system of a multi-station degassing furnace according to claim 1, characterized in that: the auxiliary vacuum pump (21) comprises a second molecular pump (211) with an air inlet connected with the auxiliary connecting pipeline (22), a second dry pump (212) with an air inlet connected with an air outlet of the second molecular pump (211), and a second control valve (213) installed at the air inlet of the second dry pump (212).
9. The vacuum-pumping system of a multi-station degassing furnace according to claim 8, characterized in that: a second bellows (214) is installed between the second molecular pump (211) and the second dry pump (212).
10. The vacuum-pumping system of a multi-station degassing furnace according to claim 1, characterized in that: and a second pressure gauge (24) for detecting the pressure in the auxiliary connecting pipeline (22) is arranged on the auxiliary connecting pipeline (22), and the second pressure gauge (24) is positioned between the auxiliary switch valve (23) and the quartz bell jar (3).
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| CN202110866687.7A CN113606949A (en) | 2021-07-29 | 2021-07-29 | Vacuum pumping system of multi-station degassing furnace |
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| CN202110866687.7A CN113606949A (en) | 2021-07-29 | 2021-07-29 | Vacuum pumping system of multi-station degassing furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023179648A1 (en) * | 2022-03-23 | 2023-09-28 | 高景太阳能股份有限公司 | Control system and method for energy-saving and continuous maintenance of vacuum pump |
| WO2023185542A1 (en) * | 2022-03-29 | 2023-10-05 | 北京北方华创微电子装备有限公司 | Vacuumizing system, semiconductor process apparatus and vacuumizing method thereof |
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