CN220825765U - Material transfer device and chamfering machine comprising same - Google Patents

Abstract

The utility model relates to the technical field of processing equipment, in particular to a material transfer device and a chamfering machine comprising the same. The utility model aims to solve the problem of low working efficiency of the existing material transfer device. The material transfer device comprises a first translation driving mechanism, a second translation driving mechanism, a first horizontal sliding seat, a second horizontal sliding seat, a first manipulator fixedly arranged on the first horizontal sliding seat and a second manipulator fixedly arranged on the second horizontal sliding seat, wherein the first translation driving mechanism can drive the first horizontal sliding seat to move, and the second translation driving mechanism can drive the second horizontal sliding seat to move. Through two manipulators can be very big improvement work burden rate, through installing on first horizontal slide and second horizontal slide, stability is better, through making first horizontal slide and second horizontal slide distribute along its direction of movement, the overall arrangement is more reasonable.

Description

Material transfer device and chamfering machine comprising same

Technical Field

The utility model relates to the technical field of processing equipment, in particular to a material transfer device and a chamfering machine comprising the same.

Background

Semiconductor wafers are very important materials in various fields such as aerospace, optical fibers, and the like. During processing of wafers, if lapping is directly performed after the wafers are cut from the ingot, chipping is likely to occur, causing wafer scrap, and therefore chamfering of the wafers is required before lapping.

In addition to silicon wafers, silicon carbide wafers, sapphire wafers and the like, the existing chamfering machine needs to transfer the wafers among devices through a material transfer device in the chamfering process of the wafers, however, the existing material transfer device is low in working efficiency, and the use experience of users is affected.

Accordingly, there is a need in the art for a new solution to the above-mentioned problems.

Disclosure of utility model

In order to solve at least one of the problems in the prior art, namely, the technical problem of low working efficiency of the existing material transfer device.

In a first aspect, the application provides a material transfer apparatus comprising a fixed member and a first translational drive mechanism, a second translational drive mechanism, a first horizontal slide, a second horizontal slide, a first manipulator fixedly mounted on the first horizontal slide and a second manipulator fixedly mounted on the second horizontal slide mounted on the fixed member,

The first translation driving mechanism is connected with the first horizontal sliding seat and can drive the first horizontal sliding seat to move along a first horizontal direction, the second translation driving mechanism is connected with the second horizontal sliding seat and can drive the second horizontal sliding seat to move along the first horizontal direction, the first horizontal sliding seat and the second horizontal sliding seat are distributed along the first horizontal direction,

In a preferred embodiment of the above material transfer apparatus, the material transfer apparatus further includes a guide mechanism mounted between the fixing member and the first and second horizontal slides for guiding the first and second horizontal slides when the first and second horizontal slides move relative to the fixing member.

In the preferred technical scheme of the material transferring device, the guiding mechanism comprises a first guiding member arranged on the first horizontal sliding seat, a second guiding member arranged on the second horizontal sliding seat and a third guiding member arranged on the fixing member, wherein the first guiding member is matched with the third guiding member to guide the first horizontal sliding seat, and the second guiding member is matched with the third guiding member to guide the second horizontal sliding seat.

In the preferred technical scheme of the material transferring device, the number of the third guiding members is two and the third guiding members are distributed at intervals along the second horizontal direction, the first translational driving mechanism and the second translational driving mechanism are located between the two third guiding members, the second horizontal direction is perpendicular to the first horizontal direction, the number of the first guiding members is at least two and is matched with the corresponding third guiding members respectively, and the number of the second guiding members is at least two and is matched with the corresponding third guiding members respectively.

In the preferred technical scheme of the material transfer device, the first guide member is a first guide block, the second guide member is a second guide block, the third guide member is a horizontal guide rail extending along the first horizontal direction, and the first guide block and the second guide block are both matched with the horizontal guide rail.

In the preferable technical scheme of the material transfer device, the first manipulator comprises a first lifting driving mechanism fixedly connected with the first horizontal sliding seat, a rotary driving mechanism, a first connecting arm horizontally arranged and a first sucker for taking materials,

The first lifting driving mechanism is connected with the rotary driving mechanism and can drive the rotary driving mechanism to move vertically, the rotary driving mechanism is connected with one end of the first connecting arm and can drive the first connecting arm to rotate around a vertical axis, and the first sucker is installed at the other end of the first connecting arm.

In the preferred technical scheme of the material transfer device, the first manipulator further comprises a first limit stop member and a second limit stop member, wherein the first limit stop member and the second limit stop member are connected with the rotary driving mechanism, the first limit stop member can block the first connecting arm so that the first sucker on the first connecting arm stops at a discharging position, and the second limit stop member can block the first connecting arm so that the first sucker on the first connecting arm stops at a discharging position.

In the preferable technical scheme of the material transfer device, the second manipulator comprises a second lifting driving mechanism fixedly connected with the second horizontal sliding seat, a second connecting arm horizontally arranged, a second sucker and a third sucker,

The second lifting driving mechanism is connected with one end of the second connecting arm and can drive the second connecting arm to move vertically, and the second sucker and the third sucker are both installed at the other end of the second connecting arm.

In the preferred technical scheme of the material transfer device, the second sucker is located below the third sucker, the adsorption surface of the second sucker is arranged downwards, and the adsorption surface of the third sucker is arranged upwards.

In the preferred technical scheme of the material transferring device, the first translation driving mechanism comprises a first translation motor, a first horizontal screw rod and a first sliding block arranged on the first horizontal screw rod, the first sliding block is fixedly connected with or integrally arranged with the first horizontal sliding seat, the first translation motor is used for driving the first horizontal screw rod to rotate, and the first sliding block moves horizontally along the length direction of the first horizontal screw rod along with the rotation of the first horizontal screw rod; and/or

The second translation driving mechanism comprises a second translation motor, a second horizontal screw rod and a second sliding block arranged on the second horizontal screw rod, wherein the second sliding block is fixedly connected with or integrally arranged with the second horizontal sliding seat, the second translation motor is used for driving the second horizontal screw rod to rotate, and the second sliding block horizontally moves along the length direction of the second horizontal screw rod along with the rotation of the second horizontal screw rod.

In a second aspect, the application also provides a chamfering machine, which comprises the material transferring device.

Under the condition of adopting the technical scheme, the material transfer device disclosed by the utility model can greatly improve the work material rate by arranging the two mechanical arms capable of independently moving to transfer the wafer, is better in stability by respectively arranging the first mechanical arm and the second mechanical arm on the first horizontal sliding seat and the second horizontal sliding seat, is better in reliability by guiding the first horizontal sliding seat and the second horizontal sliding seat through the guiding mechanism, and is more reasonable in layout by distributing the first horizontal sliding seat and the second horizontal sliding seat along the moving direction of the first horizontal sliding seat and the second horizontal sliding seat.

Furthermore, the material transfer device guides the first horizontal sliding seat and the second horizontal sliding seat through the guide mechanism, so that the reliability is better.

Furthermore, the material transfer device of the utility model enables the structure to be simplified by enabling the first horizontal sliding seat and the second horizontal sliding seat to share the third guide member, and is beneficial to optimizing the overall layout.

Still further, the material transfer device of the utility model guides the first horizontal sliding seat and the second horizontal sliding seat together by arranging the two third guide members, so that the guiding accuracy is better, and in addition, the first translation driving mechanism and the second translation driving mechanism are arranged between the two third guide members, so that the layout is more reasonable, and the occupied space is smaller.

Furthermore, the first manipulator is additionally provided with the rotary driving mechanism on the basis of the first translation driving mechanism and the first lifting driving mechanism, and the first sucker can be driven to rotate around the vertical axis through the rotary driving mechanism, so that the first manipulator is more flexible and convenient to arrange.

Still further, the first manipulator provided by the utility model carries out limit stop on the first connecting arm by arranging the first limit stop component and the second limit stop component, so that the first sucker on the first connecting arm can be accurately stopped at the discharging position and the material taking position, the material taking and placing operation can be successfully completed, and the improvement of the working efficiency is facilitated.

Drawings

The technical scheme of the present application is described below with reference to the accompanying drawings. In the accompanying drawings:

FIG. 1 is a schematic view of a material transfer apparatus according to the present utility model;

FIG. 2 is a schematic view of a portion of a material transferring apparatus according to the present utility model;

FIG. 3 is a schematic diagram of a portion of a material transfer apparatus according to the present utility model;

FIG. 4 is a schematic structural diagram of a first manipulator according to the present utility model;

FIG. 5 is a second schematic structural diagram of the first manipulator according to the present utility model;

FIG. 6 is a schematic diagram of a third embodiment of a first manipulator according to the present utility model;

FIG. 7 is a schematic diagram of a first manipulator according to the present utility model;

FIG. 8 is a schematic diagram of a second manipulator according to the present utility model;

Fig. 9 is a schematic structural diagram of a second manipulator according to the present utility model.

List of reference numerals

1. A fixing member; 11. fixing the column; 12. a bar-shaped fixing block; 121. a receiving groove;

21. A first translational drive mechanism; 211. a first translation motor; 212. a first horizontal lead screw; 213. a first slider;

22. A second translational drive mechanism; 221. a second translation motor; 222. the second horizontal lead screw;

31. A first horizontal slider; 311. a first through hole; 312. a third through hole;

32. A second horizontal slider; 321. a second through hole; 322. a fourth through hole;

41. A first guide member; 42. a second guide member; 43. a third guide member;

5. A first manipulator; 51. a first lifting driving mechanism; 52. a rotary driving mechanism; 53. a first connecting arm; 54. a first suction cup; 55. a first limit bolt; 56. a first lock nut; 57. the second limit bolt; 58. a vertical guide rail; 59. lifting the guide block; 511. a first lifting seat; 512. a first lifting cylinder; 521. a mounting base; 522. a rotary cylinder; 5111. an upper buffer; 5112. a lower buffer;

6. a second manipulator; 61. a second lifting driving mechanism; 62. a second connecting arm; 63. a second suction cup; 64. a third suction cup; 611. a bracket; 612. a second lifting cylinder;

71. a first dust-proof member; 72. a second dust-proof member;

81. a first limit member; 82. a second limit member;

9. And (3) a wafer.

Detailed Description

Preferred embodiments of the present utility model are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are merely for explaining the technical principles of the present utility model, and are not intended to limit the scope of the present utility model. For example, although the embodiments described below are described in connection with chamfering machines, the technical solution of the present utility model is equally applicable to other types of processing equipment, such as thinning machines, etc., and such adjustments and changes to the application object do not depart from the principle and scope of the present utility model, and should be limited to the scope of the present utility model.

It should be noted that, in the description of the present application, terms such as "upper", "lower", "left", "right", and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, which are merely for convenience of description, and do not indicate or imply that the apparatus or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Furthermore, it should be noted that, in the description of the present application, unless explicitly specified and limited otherwise, the terms "mounted," "configured," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those skilled in the art according to the specific circumstances.

Specifically, the utility model provides a chamfering machine for chamfering and grinding a wafer 9, which comprises a material transfer device for transferring the wafer 9 between the devices of the chamfering machine. For example, the wafer 9 may be transferred from the inspection device to the carrier device by the material transfer device, and then the carrier device brings the wafer 9 close to the grinding device to perform chamfer grinding, and the ground wafer 9 is transferred from the material transfer device to the cleaning device to be cleaned.

As shown in fig. 1 and 2, the material transfer apparatus of the present utility model includes a fixed member 1, and a first translational driving mechanism 21, a second translational driving mechanism 22, a first horizontal slide 31, a second horizontal slide 32, a guiding mechanism, a first robot 5 fixedly mounted on the first horizontal slide 31, and a second robot 6 fixedly mounted on the second horizontal slide 32 mounted on the fixed member 1.

Wherein the first translation driving mechanism 21 is connected to the first horizontal slide 31 and is capable of driving the first horizontal slide 31 to move in a first horizontal direction (X direction shown in fig. 1), the second translation driving mechanism 22 is connected to the second horizontal slide 32 and is capable of driving the second horizontal slide 32 to move in the first horizontal direction, the first horizontal slide 31 and the second horizontal slide 32 are distributed in the first horizontal direction, and a guiding mechanism is installed between the fixing member 1 and the first horizontal slide 31 and the second horizontal slide 32 for guiding the first horizontal slide 31 and the second horizontal slide 32 when the first horizontal slide 31 and the second horizontal slide 32 move relative to the fixing member 1.

Through setting up two manipulators that can independently remove and carrying out the transfer work of wafer 9, improvement work burden rate that can be very big, for example, can carry out the material loading through first manipulator 5, carry out the unloading through second manipulator 6, through install first manipulator 5 and second manipulator 6 respectively on first horizontal slide 31 and second horizontal slide 32, stability is better, and carry out the direction to first horizontal slide 31 and second horizontal slide 32 through guiding mechanism, the reliability is better, in addition, make first horizontal slide 31 and second horizontal slide 32 distribute along its direction of movement, the overall arrangement is more reasonable.

Preferably, as shown in fig. 2 and 3, the guide mechanism of the present utility model includes a first guide member 41 provided to the first horizontal slider 31, a second guide member 42 provided to the second horizontal slider 32, and a third guide member 43 provided to the fixing member 1, the first guide member 41 being engaged with the third guide member 43 for guiding the first horizontal slider 31, and the second guide member 42 being engaged with the third guide member 43 for guiding the second horizontal slider 32.

That is, the first horizontal slider 31 and the second horizontal slider 32 share the third guide member 43, so that the structure is simplified more, which is advantageous in optimizing the overall layout.

Preferably, as shown in fig. 2 and 3, the number of the third guide members 43 is two and is spaced apart along a second horizontal direction (Y direction shown in fig. 2), the first translational driving mechanism 21 and the second translational driving mechanism 22 are located between the two third guide members 43, the second horizontal direction is perpendicular to the first horizontal direction, the number of the first guide members 41 is at least two and is respectively engaged with the corresponding third guide members 43, and the number of the second guide members 42 is at least two and is respectively engaged with the corresponding third guide members 43.

By arranging two third guide members 43 together for guiding the first horizontal slide 31 and the second horizontal slide 32, the guiding accuracy is better, and in addition, by arranging the first translation driving mechanism 21 and the second translation driving mechanism 22 between the two third guide members 43, the layout is more reasonable and the occupied space is smaller.

It should be noted that the specific structural forms of the first guide member 41, the second guide member 42 and the third guide member 43 are not limited, for example, a structure in which a guide rail is matched with a guide block may be provided, a structure in which a guide groove is matched with a guide plate may be provided, a structure in which a guide post is matched with a guide hole may be provided, and the like, which are flexibly adjusted and changed without departing from the principle and scope of the present utility model, and are all limited in the scope of protection of the present utility model.

Preferably, as shown in fig. 2 and 3, the first guide member 41 is a first guide block, the second guide member 42 is a second guide block, and the third guide member 43 is a horizontal guide rail extending along the first horizontal direction, and both the first guide block and the second guide block are adapted to the horizontal guide rail.

As shown in fig. 2 and 3, the fixing member 1 includes two fixing columns 11 spaced apart along a first horizontal direction and a bar-shaped fixing block 12 extending along the first horizontal direction, the two fixing columns 11 are supported below the bar-shaped fixing block 12, a receiving groove 121 is provided on the bar-shaped fixing block 12, the first translational driving mechanism 21 and the second translational driving mechanism 22 are both installed in the receiving groove 121, two horizontal guide rails are installed on the top surface of the bar-shaped fixing block 12, the two horizontal guide rails are respectively located at two sides of the receiving groove 121, four first guide blocks are installed on the bottom surface of the first horizontal slider 31, the four first guide blocks are divided into two groups, respectively, are slidably engaged with the two horizontal guide rails, each group includes two first guide blocks spaced apart along the first horizontal direction, four second guide blocks are also installed on the bottom surface of the second horizontal slider 32, the four second guide blocks are divided into two groups, respectively, and slidably engaged with the two horizontal guide rails, each group includes two second guide blocks spaced apart along the first horizontal direction.

It should be noted that the number of the first guide blocks is not limited to the above-described four, and for example, the number of the first guide blocks may be set to two or six, or the like, and likewise, the number of the second guide blocks is not limited to the above-described four, and for example, the number of the second guide blocks may be set to two or six, or the like.

Preferably, as shown in fig. 2 and 3, the material transferring apparatus of the present utility model further includes a first dust-proof member 71 and a second dust-proof member 72, wherein the first dust-proof member 71 extends in a first horizontal direction and is located above the first translational driving mechanism 21, and the second dust-proof member 72 extends in the first horizontal direction and is located above the second translational driving mechanism 22.

By arranging the first dust-proof member 71 and the second dust-proof member 72 above the first translational driving mechanism 21 and the second translational driving mechanism 22, respectively, the first dust-proof member 71 and the second dust-proof member 72 can block the powder generated in the process of grinding the wafer 9, reduce the amount of the powder falling onto the first translational driving mechanism 21 and the second translational driving mechanism 22, and be favorable for ensuring the normal operation of the first translational driving mechanism 21 and the second translational driving mechanism 22.

It should be noted that, in practical applications, those skilled in the art may set the first dust-proof member 71 and the second dust-proof member 72 as dust boards, dust covers or dust cloths, etc., and such modifications and changes to the specific structural forms of the first dust-proof member 71 and the second dust-proof member 72 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 2 and 3, the first dust-proof member 71 is a first dust-proof cloth, and the second dust-proof member 72 is a second dust-proof cloth.

The dustproof cloth has good adsorption effect on powder, and the dustproof effect is better.

Preferably, as shown in fig. 2 and 3, the first horizontal slider 31 and the second horizontal slider 32 are provided with a first through hole 311 and a second through hole 321, respectively, through which the first dust-proof member 71 passes, at positions corresponding to the first dust-proof member 71, and the first horizontal slider 31 and the second horizontal slider 32 are provided with a third through hole 312 and a fourth through hole 322, respectively, through which the second dust-proof member 72 passes, at positions corresponding to the second dust-proof member 72. Wherein, the sizes of the first through hole 311 and the second through hole 321 are larger than the first dust-proof member 71 to avoid affecting the movement of the first horizontal sliding seat 31, and the sizes of the third through hole 312 and the fourth through hole 322 are larger than the second dust-proof member 72 to avoid affecting the movement of the second horizontal sliding seat 32.

Illustratively, one end of the first dust-proof member 71 is fixedly connected with one end of the bar-shaped fixing block 12, the other end of the first dust-proof member 71 sequentially passes through the first through hole 311 and the second through hole 321 to be fixedly connected with the other end of the bar-shaped fixing block 12, one end of the second dust-proof member 72 is fixedly connected with one end of the bar-shaped fixing block 12, and the other end of the second dust-proof member 72 sequentially passes through the third through hole 312 and the fourth through hole 322 to be fixedly connected with the other end of the bar-shaped fixing block 12.

Preferably, as shown in fig. 2 and 3, one end of the fixing member 1 is provided with a first limiting member 81, the first limiting member 81 is used for limiting the first horizontal sliding seat 31 by a stop, the other end of the fixing member 1 is provided with a second limiting member 82, and the second limiting member 82 is used for limiting the second horizontal sliding seat 32 by a stop.

Illustratively, the first limiting member 81 includes a first limiting block and a first limiting screw mounted on the first limiting block, the first limiting block is fixedly connected with or integrally provided with the bar-shaped fixed block 12, the first limiting screw is disposed along a first horizontal direction, and one end of the first limiting screw facing the first horizontal sliding seat 31 is used for limiting the first horizontal sliding seat 31 by a stop; the second limiting member 82 includes a second limiting block and a second limiting screw mounted on the second limiting block, the second limiting block is fixedly connected with the bar-shaped fixing block 12 or integrally provided, the second limiting screw is provided along the first horizontal direction, and one end of the second limiting screw, facing the second horizontal sliding seat 32, is used for limiting the second horizontal sliding seat 32.

It should be noted that, the first and second limiting members 81 and 82 of the present utility model are not limited to the above-described structural forms of limiting blocks and limiting screws, for example, may also be provided as limiting plates or limiting columns, and such adjustment and modification of the specific structural forms of the first and second limiting members 81 and 82 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

It should be noted that, in practical applications, those skilled in the art may set the first translation driving mechanism 21 as a motor driving mechanism, a hydraulic driving mechanism, or an air driving mechanism, etc., and such modifications and changes to the specific structural form of the first translation driving mechanism 21 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 2, the first translation driving mechanism 21 of the present utility model includes a first translation motor 211, a first horizontal screw 212, and a first slider 213 mounted on the first horizontal screw 212, where the first slider 213 is fixedly connected to or integrally provided with the first horizontal slide 31, and the first translation motor 211 is used for driving the first horizontal screw 212 to rotate, and the first slider 213 moves horizontally along the length direction of the first horizontal screw 212 along with the rotation of the first horizontal screw 212.

The first sliding block 213 is provided with a threaded hole in threaded connection with the first horizontal screw 212, when the first translation motor 211 drives the first horizontal screw 212 to rotate clockwise, the first sliding block 213 moves horizontally leftwards along the first horizontal screw 212, and when the first translation motor 211 drives the first horizontal screw 212 to rotate anticlockwise, the first sliding block 213 moves horizontally rightwards along the first horizontal screw 212.

Preferably, as shown in fig. 2, the second translation driving mechanism 22 of the present utility model includes a second translation motor 221, a second horizontal screw 222, and a second slider (not shown) mounted on the second horizontal screw 222, the second slider is fixedly connected to or integrally provided with the second horizontal slider 32, the second translation motor 221 is used for driving the second horizontal screw 222 to rotate, and the second slider moves horizontally along the length direction of the second horizontal screw 222 along with the rotation of the second horizontal screw 222.

The second slider is provided with a threaded hole in threaded connection with the second horizontal screw rod 222, when the second horizontal screw rod 222 is driven by the second translation motor 221 to rotate clockwise, the second slider moves horizontally leftwards along the second horizontal screw rod 222, and when the second horizontal screw rod 222 is driven by the second translation motor 221 to rotate anticlockwise, the second slider moves horizontally rightwards along the second horizontal screw rod 222.

Preferably, as shown in fig. 1, 4 to 7, the first manipulator 5 of the present application includes a first lifting driving mechanism 51 fixedly connected with the first horizontal sliding seat 31, a rotation driving mechanism 52, a first connecting arm 53 horizontally arranged, and a first suction cup 54 for taking materials.

The first lifting driving mechanism 51 is connected with the rotation driving mechanism 52, and can drive the rotation driving mechanism 52 to move vertically, the rotation driving mechanism 52 is connected with one end of the first connecting arm 53, and can drive the first connecting arm 53 to rotate around the vertical axis, and the first sucking disc 54 is installed at the other end of the first connecting arm 53.

According to the first manipulator 5, the rotary driving mechanism 52 is additionally arranged to drive the first sucker 54 to rotate around the vertical axis, so that the first manipulator is more flexible and convenient to arrange.

In a specific working process, the first chuck 54 is first driven by the first translational driving mechanism 21 to move the first horizontal sliding seat 31 with the first lifting driving mechanism 51, the rotary driving mechanism 52, the first connecting arm 53 and the first chuck 54 to a first set position, then the rotary driving mechanism 52 drives the first connecting arm 53 to rotate clockwise by 90 degrees with the first chuck 54, so that the first chuck 54 rotates to a material taking position, as shown in fig. 4, at this time, the first chuck 54 is positioned at the material taking position, the first chuck 54 is positioned right above the wafer 9, then the first lifting driving mechanism 51 drives the rotary driving mechanism 52, the first connecting arm 53 and the first chuck 54 to move vertically downwards, when the first chuck 54 approaches the wafer 9, the vacuum generator communicated with the first chuck 54 is started, a negative pressure environment is generated in the first chuck 54, the wafer 9 is adsorbed on the bottom surface of the first chuck 54, then the first lifting driving mechanism 51 drives the rotary driving mechanism 52, the first connecting arm 53, the first chuck 54 and the first chuck 54 are driven by the first lifting driving mechanism 51 to rotate clockwise, as shown in fig. 4, the first chuck 54 is positioned at the material taking position, then the first chuck 54 is driven by the first translational driving mechanism 51 to move vertically downwards with the first chuck 54, and the first chuck 54 is driven by the first translational driving mechanism 51 to move vertically upwards, as shown in the first chuck 54 is positioned vertically, and the first chuck 54 is rotated by the first chuck 54 is positioned vertically, and rotated by the first chuck 54 is positioned vertically, as shown in the first lifting driving mechanism 53, and is positioned vertically, and rotated by the first chuck 54 is positioned to move vertically and rotated by the first connecting arm 54, and is positioned.

It should be noted that, the rotation angle of the first suction cup 54 from the taking position to the placing position is not limited to the above-mentioned 90 degrees, for example, the rotation angle of the first suction cup 54 from the taking position to the placing position may be 120 degrees or 60 degrees, and the like, and those skilled in the art may flexibly set according to actual requirements in practical applications.

In addition, it should be noted that the number of the first suction cups 54 is not limited in the present utility model, for example, when the size of the wafer is small, only one first suction cup 54 may be provided, and when the size of the wafer is large, a plurality of first suction cups 54 may be provided, and the plurality of first suction cups 54 are distributed along the horizontal direction to commonly suck the wafer.

Preferably, as shown in fig. 4 to 6, the first manipulator 5 of the present utility model further includes a first limit stop member and a second limit stop member connected to the rotation driving mechanism 52, the first limit stop member being capable of blocking the first connecting arm 53 to stop the first suction cup 54 on the first connecting arm 53 at the discharging position, and the second limit stop member being capable of blocking the first connecting arm 53 to stop the first suction cup 54 on the first connecting arm 53 at the discharging position.

Through setting up first limit stop component and second limit stop component and carrying out limit stop to first linking arm 53, can make the first sucking disc 54 on the first linking arm 53 stop in putting the position and get the material position accurately for the operation of getting of putting of wafer 9 can accomplish smoothly, is favorable to improving work efficiency.

It should be noted that, in practical applications, those skilled in the art may arrange the first limit stop member and the second limit stop member with a stop block, a stop plate, a stop post, or the like, and such adjustments and changes to the specific structural forms of the first limit stop member and the second limit stop member do not deviate from the principle and scope of the present utility model, and should be limited in the protection scope of the present utility model.

Preferably, as shown in fig. 6, the first limit stop member includes a first limit bolt 55 horizontally disposed and a first lock nut 56 mounted on the first limit bolt 55, the rotary driving mechanism 52 is provided with a first threaded hole, the first limit bolt 55 is in threaded connection with the first threaded hole, one end of the first limit bolt 55 is used for stopping and limiting the first connecting arm 53, the other end of the first limit bolt 55 passes through the first threaded hole and is in threaded connection with the first lock nut 56, and the first lock nut 56 is abutted to the rotary driving mechanism 52.

Through setting up first limit stop component as first limit bolt 55 to set up the first screw hole rather than looks adaptation on rotary driving mechanism 52, make first limit bolt 55 can be along the horizontal direction for rotary driving mechanism 52 removes, so be convenient for calibrate the stop position of first linking arm 53, in order to ensure that the stopper through first limit bolt 55 makes the first sucking disc 54 on the first linking arm 53 stop at the material level accurately, after the calibration, locks first limit bolt 55 through first lock nut 56, avoid first limit bolt 55 to take place to remove.

Preferably, as shown in fig. 5 and 6, the second limit stop member includes a second limit bolt 57 disposed horizontally and a second lock nut (not shown in the drawings) mounted on the second limit bolt 57, the rotation driving mechanism 52 is provided with a second threaded hole, the second limit bolt 57 is in threaded connection with the second threaded hole, one end of the second limit bolt 57 is used for stopping the first connecting arm 53, the other end of the second limit bolt 57 passes through the second threaded hole and is in threaded connection with the second lock nut, and the second lock nut is abutted against the rotation driving mechanism 52.

Through setting up the second limit stop component as second limit bolt 57 to set up the second screw hole rather than looks adaptation on rotary driving mechanism 52, make second limit bolt 57 can be along the horizontal direction for rotary driving mechanism 52 removes, so be convenient for calibrate the stop position of first linking arm 53, in order to ensure that the stopper through second limit bolt 57 makes the first sucking disc 54 on the first linking arm 53 stop in getting the material position accurately, after the calibration, lock second limit bolt 57 through the second lock nut, avoid second limit bolt 57 to take place to remove.

It should be noted that, in practical applications, those skilled in the art may set the rotation driving mechanism 52 as a motor driving mechanism or an air pressure driving mechanism, etc., and such modifications and changes of the specific structural form of the rotation driving mechanism 52 are not limited to the principle and scope of the present utility model.

Preferably, as shown in fig. 4 to 6, the rotation driving mechanism 52 of the present utility model includes a mount 521 connected to the first elevation driving mechanism 51 and a rotation cylinder 522 fixed to the mount 521, the rotation cylinder 522 being connected to one end of the first connection arm 53.

Illustratively, a rotary cylinder 522 is fixed on the top surface of the mounting base 521, one end of the first connecting arm 53 is located below the rotary cylinder 522 and needs to be connected by the rotary cylinder 522, and the rotary cylinder 522 drives the first connecting arm 53 to rotate between a material taking position and a material placing position with the first suction cup 54.

The first limit stop member and the second limit stop member described above are disposed on the mounting base 521 of the rotation driving mechanism 52.

It should be noted that, in practical applications, those skilled in the art may set the first lifting driving mechanism 51 as a motor driving mechanism, a hydraulic driving mechanism, or an air driving mechanism, etc., and such modifications and changes to the specific structural form of the first lifting driving mechanism 51 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 1 and 4 to 7, the first lift driving mechanism 51 of the present utility model includes a first lift base 511 connected to the first horizontal slider 31 and a first lift cylinder 512 mounted on the first lift base 511, and the first lift cylinder 512 is connected to the mounting base 521.

Illustratively, the bottom surface of the first lifting seat 511 is fixedly connected with the top surface of the first horizontal sliding seat 31, the first lifting cylinder 512 is fixedly connected with the mounting seat 521 of the rotation driving mechanism 52, and the first lifting cylinder 512 drives the mounting seat 521 to vertically move with the rotation cylinder 522, the first connecting arm 53 and the first suction cup 54.

The first lifting cylinder 512 is preferably a rodless cylinder, and an upper buffer 5111 and a lower buffer 5112 are respectively disposed at the top end and the bottom end of the first lifting seat 511, and the upper buffer 5111 and the lower buffer 5112 are preferably hydraulic buffers.

Preferably, as shown in fig. 4 to 7, the first manipulator 5 of the present utility model further includes a lifting guide block 59 provided on the mounting base 521 and a vertical guide rail 58 provided on the first lifting base 511, and the lifting guide block 59 cooperates with the vertical guide rail 58 to guide the mounting base 521 during the up-and-down movement of the mounting base 521 with respect to the first lifting base 511.

Illustratively, the first lifting base 511 is provided with two vertical guide rails 58 spaced apart in the horizontal direction, and the mounting base 521 is provided with two lifting guide blocks 59 spaced apart in the vertical direction at positions corresponding to each vertical guide rail 58.

Preferably, as shown in fig. 1, 8 and 9, the second manipulator 6 includes a second lifting driving mechanism 61 fixedly connected with the second horizontal sliding seat 32, a second connecting arm 62 horizontally arranged, a second sucking disc 63 and a third sucking disc 64, the second lifting driving mechanism 61 is connected with one end of the second connecting arm 62 and can drive the second connecting arm 62 to move vertically, and the second sucking disc 63 and the third sucking disc 64 are both installed at the other end of the second connecting arm 62.

By providing the second suction cup 63 and the third suction cup 64 to transfer the wafer 9 before cleaning and the wafer 9 after cleaning, respectively, the wafer 9 after cleaning can be prevented from being contaminated.

Specifically, after the wafer 9 is ground by the grinding device, the second horizontal slide base 32 is driven by the second translational driving mechanism 22 to move horizontally to a position close to the wafer 9 with the second suction cup 63, the wafer 9 is removed, then the wafer 9 is placed on the cleaning device for cleaning by the second translational driving mechanism 22 driving the second horizontal slide base 32 to move to the cleaning device with the second suction cup 63 and the wafer 9, and the cleaned wafer 9 is moved to the next process position by the third suction cup 64.

It should be noted that, in practical applications, those skilled in the art may set the second lifting driving mechanism 61 as a motor driving mechanism, a hydraulic driving mechanism, or an air driving mechanism, etc., and such modifications and changes to the specific structural form of the second lifting driving mechanism 61 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

In addition, it should be noted that the number of the second suction cups 63 is not limited, for example, when the size of the wafer is small, only one second suction cup 63 may be provided, when the size of the wafer is large, a plurality of second suction cups 63 may be provided, the plurality of second suction cups 63 are distributed along the horizontal direction and jointly suction the wafer, and similarly, the present utility model does not limit the number of the third suction cups 64, and one or a plurality of third suction cups 64 may be provided according to the size of the wafer.

Preferably, as shown in fig. 1, 8 and 9, the second elevation driving mechanism 61 includes a bracket 611 and a second elevation cylinder 612 mounted on the bracket 611, the bracket 611 being fixedly mounted on the second horizontal slider 32, the second elevation cylinder 612 being connected to one end of the second connection arm 62.

Preferably, as shown in fig. 8 and 9, the second suction cup 63 is located below the third suction cup 64, the suction surface of the second suction cup 63 is disposed downward and the suction surface of the third suction cup 64 is disposed upward.

As shown in fig. 8 and 9, an air suction hole (not shown in the drawings) is formed in the bottom surface of the second suction cup 63, the second suction cup 63 is communicated with a vacuum generator through an air pipe, after the vacuum generator is started, a negative pressure environment is generated in the second suction cup 63, the wafer 9 is firmly adsorbed on the bottom surface of the second suction cup 63, the air suction hole is also formed in the top surface of the third suction cup 64, the third suction cup 64 is also communicated with the vacuum generator through the air pipe, after the vacuum generator is started, a negative pressure environment is generated in the third suction cup 64, the wafer 9 is firmly adsorbed on the top surface of the third suction cup 64, wherein the vacuum generator communicated with the second suction cup 63 and the vacuum generator communicated with the third suction cup 64 are preferably two independent vacuum generators, and each vacuum generator is independently controlled to operate.

Furthermore, those skilled in the art will appreciate that while some embodiments described herein include some features but not others included in other embodiments, combinations of features of different embodiments are meant to be within the scope of the application and form different embodiments. For example, in the claims of the present application, any of the claimed embodiments may be used in any combination.

Thus far, the technical solution of the present application has been described in connection with the preferred embodiments shown in the drawings, but it is easily understood by those skilled in the art that the scope of protection of the present application is not limited to these specific embodiments. Equivalent modifications and substitutions for related technical features may be made by those skilled in the art without departing from the principles of the present application, and such modifications and substitutions will fall within the scope of the present application.

Claims (11)

1. A material transfer device is characterized by comprising a fixed component, a first translation driving mechanism, a second translation driving mechanism, a first horizontal sliding seat, a second horizontal sliding seat, a first manipulator fixedly arranged on the first horizontal sliding seat and a second manipulator fixedly arranged on the second horizontal sliding seat which are arranged on the fixed component,

The first translation driving mechanism is connected with the first horizontal sliding seat and can drive the first horizontal sliding seat to move along a first horizontal direction, the second translation driving mechanism is connected with the second horizontal sliding seat and can drive the second horizontal sliding seat to move along the first horizontal direction, and the first horizontal sliding seat and the second horizontal sliding seat are distributed along the first horizontal direction.

2. The material transfer apparatus of claim 1, further comprising a guide mechanism,

The guide mechanism is installed between the fixed member and the first and second horizontal slides for guiding the first and second horizontal slides as they move relative to the fixed member.

3. The material transfer apparatus of claim 2, wherein the guide mechanism comprises a first guide member provided to the first horizontal slide, a second guide member provided to the second horizontal slide, and a third guide member provided to the fixing member, the first guide member being engaged with the third guide member for guiding the first horizontal slide, the second guide member being engaged with the third guide member for guiding the second horizontal slide.

4. A material transfer unit according to claim 3, wherein the number of third guide members is two and is spaced apart along a second horizontal direction, the first translational drive mechanism and the second translational drive mechanism are located between the two third guide members, the second horizontal direction is perpendicular to the first horizontal direction, the number of first guide members is at least two and is respectively engaged with the corresponding third guide members, and the number of second guide members is at least two and is respectively engaged with the corresponding third guide members.

5. The material transfer apparatus of claim 4, wherein the first guide member is a first guide block, the second guide member is a second guide block, the third guide member is a horizontal rail extending along the first horizontal direction, and both the first guide block and the second guide block are adapted to the horizontal rail.

6. The material transfer apparatus of claim 1, wherein the first manipulator comprises a first lifting drive mechanism fixedly connected with the first horizontal slide, a rotary drive mechanism, a first connecting arm horizontally arranged, and a first suction cup for taking materials,

The first lifting driving mechanism is connected with the rotary driving mechanism and can drive the rotary driving mechanism to move vertically, the rotary driving mechanism is connected with one end of the first connecting arm and can drive the first connecting arm to rotate around a vertical axis, and the first sucker is installed at the other end of the first connecting arm.

7. The material transfer apparatus of claim 6, wherein the first manipulator further comprises a first limit stop member and a second limit stop member coupled to the rotary drive mechanism, the first limit stop member being configured to block the first connecting arm to stop the first suction cup on the first connecting arm at a discharge level, the second limit stop member being configured to block the first connecting arm to stop the first suction cup on the first connecting arm at a discharge level.

8. The material transfer apparatus of claim 1, wherein the second manipulator comprises a second lifting drive mechanism fixedly connected with the second horizontal slide, a second connecting arm horizontally arranged, a second sucking disc and a third sucking disc,

The second lifting driving mechanism is connected with one end of the second connecting arm and can drive the second connecting arm to move vertically, and the second sucker and the third sucker are both installed at the other end of the second connecting arm.

9. The material transfer apparatus of claim 8, wherein a second suction cup is positioned below the third suction cup, the suction side of the second suction cup being positioned downward and the suction side of the third suction cup being positioned upward.

10. The material transfer apparatus according to any one of claims 1 to 9, wherein the first translation driving mechanism includes a first translation motor, a first horizontal screw, and a first slider mounted on the first horizontal screw, the first slider being fixedly connected to or integrally provided with the first horizontal slide, the first translation motor being configured to drive the first horizontal screw to rotate, the first slider being horizontally moved along a length direction of the first horizontal screw with rotation of the first horizontal screw; and/or

The second translation driving mechanism comprises a second translation motor, a second horizontal screw rod and a second sliding block arranged on the second horizontal screw rod, wherein the second sliding block is fixedly connected with or integrally arranged with the second horizontal sliding seat, the second translation motor is used for driving the second horizontal screw rod to rotate, and the second sliding block horizontally moves along the length direction of the second horizontal screw rod along with the rotation of the second horizontal screw rod.

11. A chamfering machine, characterized in that it comprises a material transfer device according to any one of claims 1 to 10.