CN213903318U - Micro-spectrum imaging test system suitable for low-temperature strong magnetic field environment - Google Patents
Micro-spectrum imaging test system suitable for low-temperature strong magnetic field environment Download PDFInfo
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- CN213903318U CN213903318U CN202022759281.2U CN202022759281U CN213903318U CN 213903318 U CN213903318 U CN 213903318U CN 202022759281 U CN202022759281 U CN 202022759281U CN 213903318 U CN213903318 U CN 213903318U
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Abstract
The utility model provides a micro-spectrum imaging test system suitable for under low temperature high-intensity magnetic field environment belongs to the micro-spectrum imaging field. The device comprises a sample rod, a switching cavity, a camera, an illumination light source, a first optical module, a second optical module, a laser and a spectrometer; the sample rod is of a hollow structure, one end of the sample rod is connected with the three-dimensional displacement table, and the other end of the sample rod is connected with the first optical module through the switching cavity; and the interior of the sample rod is also provided with a microscope objective, and the object space of the microscope objective faces one side of the sample platform. The utility model discloses in introducing the sample pole with the free space light path, the defocus problem that the expend with heat and contract with cold of having solved traditional optic fibre arouses further utilizes micro-imaging system, has solved the blind problem of sweeping in the optic fibre sample pole, can carry out real-time micro-imaging in spectral detection, carries out the accurate positioning to the spectral measurement position of sample, obtains the corresponding relation of spectrum and sample surface position.
Description
Technical Field
The utility model relates to a micro-spectrum imaging field especially relates to a micro-spectrum imaging test system suitable for under low temperature high-intensity magnetic field environment.
Background
Optical testing has a plurality of advantages of non-contact, no damage, high sensitivity and the like, is a common means in material characterization, and a plurality of technologies such as absorption spectrum, infrared Fourier spectrum, Raman spectrum, fluorescence spectrum, optical coherence tomography, optical microscopic imaging and the like are widely applied to the structural, component and morphology characterization of materials. In addition, when light interacts with a magnetic medium, various magneto-optical effects such as magneto-optical rotation, magneto-birefringence, Kerr magnetic effect, Saiman effect and the like can also occur, so that the optical test can be applied to characterization of magnetic materials, and the application range of the optical test is further expanded. In recent years, with the development of extreme physics, scientists find that under the condition of low-temperature strong magnetic field, the material can show different properties from the conventional conditions, such as low-temperature superconductivity and quantum hall effect, which provides a possibility for finding new phenomena, synthesizing new materials and designing new devices.
In order to introduce optical tests into the environment of low temperature and strong magnetic field, there is currently a method of directly placing a sample rod integrated with an optical transmission system into a cavity of low temperature and strong magnetic field (CN 105911029B, CN 104181341B, CN 103529407B). Optical fibers are used for optical transmission in most optical test sample rods, but in the test process, the optical fibers can directly enter the environment of a low-temperature strong magnetic field, and the optical fibers expand with heat and contract with cold to cause the defocusing between the optical fibers and the collimating mirror to reduce the coupling efficiency of light, so that the intensity of optical signals is seriously influenced. In addition, the existing optical fiber sample rod cannot realize accurate positioning of a test position, is difficult to test a specific area, and is difficult to judge the relation between the image plane of the microscope objective and the sample position, so that the spectrum excitation intensity and the spectrum collection efficiency are influenced.
Disclosure of Invention
In order to solve the technical problem, the utility model provides a micro-spectrum imaging test system suitable for under low temperature high-intensity magnetic field environment, in introducing the sample pole with the free space light path, the defocus problem that the expend with heat and contract with cold of having solved traditional optic fibre arouses, further utilize micro-imaging system, the blind problem of sweeping in the optic fibre sample pole has been solved, can carry out real-time micro-imaging in spectral detection, carry out the accurate positioning to the spectral measurement position of sample, obtain the corresponding relation of spectrum and sample surface position.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a micro-spectrum imaging test system suitable for a low-temperature high-intensity magnetic field environment comprises a sample rod, a switching cavity, a camera, an illumination light source, a first optical module, a second optical module, a laser and a spectrometer;
the sample rod is of a hollow structure, one end of the sample rod is connected with the three-dimensional displacement table, the sample table is fixed on the side surface, located inside the sample rod, in the three-dimensional displacement table, and the other end of the sample rod is connected with the first optical module through the switching cavity; a microscope objective is further arranged in the sample rod, and the object space of the microscope objective faces one side of the sample table;
the laser and the spectrometer are respectively connected with a second optical module, and the second optical module comprises a box body, a transmission light path and a laser emergent port; the laser emergent port is connected with a laser beam inlet of the first optical module through a multimode optical fiber;
the first optical module comprises a box body, a second beam splitter, a second reflector, a first collimating mirror, a first reflector, a first beam splitter and a first lens, wherein the first collimating mirror, the first reflector, the first beam splitter and the first lens are fixed in the box body; the incident optical axis of the first lens and the incident optical axis of the laser beam of the first beam splitter are distributed at 90 degrees; the second beam splitter is coaxially arranged on one side of the image space of the microscope objective, and the beam splitting surface of the second beam splitter and the central axis of the sample rod are distributed at 45 degrees; the second reflecting mirror is fixed on the inner side surface of the sample rod.
Preferably, the incident optical axis of the illumination beam of the second reflecting mirror is parallel to the central axis of the sample rod.
Preferably, the adapter cavity is provided with an illumination light source access port and an electrical interface, and illumination light beams emitted by the illumination light source are introduced into the sample rod through the illumination light source access port; and a control line of the three-dimensional displacement table passes through the electrical interface to be connected with the three-dimensional displacement table.
Preferably, the sample rod is connected with the adapter cavity through a flange interface.
Preferably, a connecting plate with a transparent window is arranged at the joint of the switching cavity and the first optical module, and the connecting plate is connected with the switching cavity in a sealing manner.
Preferably, the microscope objective is mounted inside the sample rod through an adjustable fixing member, and the adjustable fixing member can move along the central axis direction of the sample rod.
Preferably, an optical filter is arranged at the connection interface of the second optical module and the spectrometer.
Preferably, an optical filter, a second lens and a second collimating mirror are arranged on a transmission light path of the second optical module; after the laser beam enters the second optical module, the laser beam is reflected by the optical filter and then vertically enters the second collimating mirror, and then the laser beam is emitted from the laser emitting port after passing through the second collimating mirror.
Compared with the prior art, the utility model has the advantages that:
(1) adopt optic fibre directly to introduce the technical means on sample surface with laser in traditional test to compare, the utility model discloses an integrated one has real-time micro-imaging's first optical module in the sample pole that uses under low temperature magnetic field environment, can realize the accurate positioning of test position, obtained normal position spectral detection and the micro-imaging ability under the low temperature magnetic field, be convenient for observe and fix a position and normal position detection the surface of test sample, avoided the optical fiber sample pole in the defocus with blind the problem of sweeping.
(2) The utility model discloses an use the optical module that a multimode fiber was drawed with the spectral signal with the optical module in the sample pole to be connected, avoided incident laser in the full free space light path to be difficult to with the problem that the inside light path of sample pole was aimed at, realized the flexible coupling between optical detection instrument and the sample pole simultaneously, the sample pole of being convenient for put into and take out in magnetic field system, the removal of the spectrum appearance of also being convenient for and laser instrument.
Drawings
FIG. 1 is a schematic view of the connection relationship and structure of a low-temperature high-intensity magnetic field optical test sample rod, a switching cavity and an optical module;
FIG. 2 is a schematic diagram of a spectral test in a low-temperature high-intensity magnetic field environment in the present embodiment;
in the figure: 1 a first optical module; 101, 102, 103, 104, 105, 106, 107 and 107; 2, adapting a cavity; a flange interface 201, a connecting plate 202, a transparent window 2021, a lighting source access port 203, an electrical interface 204 and a control line 205; 3, a sample rod; 301 three-dimensional displacement table, 302 sample table, 303 microscope objective and 304 adjustable fixing piece; 4, a camera; 5 an illumination light source; 501, a fiber bundle; 6 a second optical module; 601 box body, 602 optical filter, 603 second lens, 604 second collimating lens; 7, a laser; 8, a spectrometer; 9 a multimode optical fiber.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
The utility model provides a micro-spectrum imaging test system suitable for under low temperature high-intensity magnetic field environment. The sample rod with special design is placed into the low-temperature high-intensity magnetic field vacuum cavity at the front end, the micro-spectral imaging sample rod can be used for carrying out tests such as micro-Raman spectral imaging, micro-fluorescence spectral imaging, micro-photocurrent imaging and the like under low-temperature and high-intensity magnetic field environments, has the capability of carrying out real-time micro-imaging while carrying out in-situ spectral detection, and is suitable for measuring the photoelectric properties of semiconductor micro-nano photoelectric materials and devices, two-dimensional materials, quantum materials and other novel materials under extreme environments.
An external laser light source is introduced into a sample rod through a multimode fiber, and is incident to the surface of a sample from a microscope objective through a plurality of optical elements to generate fluorescence and Raman signals, then the microscope objective reflects the collected Raman and fluorescence signals back to the multimode fiber according to an original light path, and the reflected optical signals are filtered and introduced into a spectrometer for spectral analysis, so that Raman and fluorescence spectra of the sample can be obtained; meanwhile, an illumination light source enters a microscope through an optical fiber bundle to illuminate the sample, and the surface of the sample is subjected to microscopic imaging on a camera through a microscopic imaging light path; in addition, the position of the sample can be adjusted through the three-dimensional displacement table, so that focusing, scanning measurement and surface imaging can be realized.
In one embodiment of the present invention, the structure of the system for testing microspectroscopic imaging in a low-temperature and high-intensity magnetic field environment is shown in fig. 1 and fig. 2, and includes a sample rod 3, a transfer cavity 2, a camera 4, an illumination light source 5, a first optical module 1, a second optical module 6, a laser 7 and a spectrometer 8;
the sample rod 3 is of a hollow structure, one end of the sample rod is connected with the three-dimensional displacement platform 301, a sample platform 302 is fixed on the side surface of the three-dimensional displacement platform 301, which is positioned in the sample rod, and the other end of the sample rod 3 is connected with the first optical module 1 through the switching cavity 2; a microscope objective 303 is also arranged in the sample rod 3, and the object space of the microscope objective faces to one side of the sample table; in a specific embodiment of the present invention, the sample stage 302 is an open structure, for example, a window may be disposed on the sample rod 3, which facilitates the replacement of the sample.
The laser 7 and the spectrometer 8 are respectively connected with the second optical module 6, and the second optical module 6 comprises a box body, a transmission light path and a laser emergent port; the laser emergent port is connected with a laser beam inlet of the first optical module through a multimode optical fiber 9;
the first optical module 1 comprises a box body, a second beam splitter 102, a second reflector 103, a first collimating mirror 104, a first reflector 105, a first beam splitter 106 and a first lens 107 which are fixed in the box body; the incident optical axis of the first lens 107 and the incident optical axis of the laser beam of the first beam splitter 106 are distributed at 90 degrees; the second beam splitter 102 is coaxially arranged on the image side of the microscope objective 303, and the beam splitting surface of the second beam splitter 102 and the central axis of the sample rod 3 are distributed at 45 degrees; the second mirror 103 is fixed to the inner side of the sample rod 3.
The first collimating lens 104 is positioned at a laser beam inlet of the first optical module 1, a laser beam enters the first optical module 1 through the first collimating lens 104, is transmitted along the central axis direction of the sample rod after being reflected by the first reflecting lens 105, sequentially passes through the first beam splitter 106 and the second beam splitter 102, then vertically enters the microscope objective 303, and finally is focused by the microscope objective 303 and enters the sample to excite the sample to emit light; an illumination beam emitted by the illumination light source 5 enters the sample rod 3 and then is transmitted along the inner side surface, is reflected by the second reflecting mirror 103 and the second beam splitter 102 in sequence and then vertically enters the microscope objective 303, and finally is focused by the microscope objective 303 and enters a sample; an optical signal sent by a sample is collected by a microscope objective, simultaneously carries microscope imaging information and spectral information, is divided into two parts after sequentially passing through the microscope objective 303, the second beam splitter 102 and the first beam splitter 106, two beams of light simultaneously carry the spectral information and the microscope imaging information, wherein one beam of light vertically passes through the first beam splitter 106 and then exits from the first optical module 1, and then only the light carrying the spectral information is reserved after shaping and filtering processing and enters a spectrometer for analysis; microscopic imaging information in the other beam of light is imaged in the camera 4 through the first lens 107.
In one embodiment of the present invention, the incident optical axis of the illumination beam of the second reflecting mirror 103 is parallel to the central axis of the sample rod 3. Specifically, an illumination light source access port 203 may be formed in the adapter cavity, an illumination light beam emitted by the illumination light source 5 is introduced into the sample rod through the illumination light source access port 203, for example, is introduced through an optical fiber bundle 501, one end of the optical fiber bundle is connected with an external illumination light source, and the other end of the optical fiber bundle is close to the second reflecting mirror; the optical fiber bundle is arranged close to the inner side surface of the sample rod and is parallel to the central axis of the sample rod, and the interface of the optical fiber bundle extending into the switching cavity is sealed.
The utility model discloses an in the implementation, in order to adapt to more test sample, the utility model discloses a three-dimensional displacement platform and micro objective can all remove, wherein for the control of realizing three-dimensional displacement platform, still set up the electricity interface 204 of control line on the switching chamber, and the control line 205 of three-dimensional displacement platform passes electricity interface 204 and is connected with three-dimensional displacement platform. To achieve the movement of the microscope objective, the microscope objective may be mounted inside the sample shaft by an adjustable mount 304, wherein the adjustable mount 304 is capable of moving along the central axis of the sample shaft.
In order to realize the sealing connection between the sample rod and the low-temperature high-intensity magnetic field vacuum cavity, a flange interface is arranged at the connection position of the sample rod and the adapter cavity. In order to realize the sealing inside the testing chamber and the optical signal can enter and exit the sample rod, in one embodiment of the present invention, a connecting plate with a transparent window 2021 is disposed at the connection position of the switching chamber and the first optical module, the transparent window, the connecting plate and the switching chamber need to be connected in a sealing manner, wherein the transparent window 2021 is preferably a transparent quartz glass window.
As shown in fig. 1, an optical filter 602 is disposed at the connection interface of the second optical module 6 and the spectrometer 8. Specifically, an optical filter 602, a second lens 603, and a second collimating mirror 604 are disposed on a transmission light path of the second optical module 6; after being incident to the second optical module, the laser beam is reflected by the optical filter 602, then is vertically incident to the second collimating mirror 604, and then is emitted from the laser exit port after passing through the second collimating mirror 604.
FIG. 2 shows a schematic diagram of a sample rod for spectroscopic testing in a low temperature high magnetic field environment:
the laser 7, the spectrometer 8 and the second optical module 6 can be freely collocated according to different test requirements, including the wavelength of the laser, the spectrum test range of the spectrometer, the processing of optical signals to be tested and the like; the vacuum cavity of the low-temperature strong magnetic field is provided by other equipment, when the spectrum test of the low-temperature strong magnetic field is carried out, a sample needs to be fixed on a sample table at the front end of a sample rod, and then the front end of the sample rod is placed into the vacuum cavity of the low-temperature strong magnetic field and is fixed on the vacuum cavity through a vacuum flange.
The laser, the spectrometer and the second optical module can be respectively fixed on the optical platform, and can also be integrated together for input/output through an optical fiber interface; the first optical module and the second optical module are connected through a multimode optical fiber; the first optical module, the switching cavity, the flange interface and the sample rod are connected through screws.
When the sample rod is used for spectrum testing, the sample rod can be divided into two modules, wherein the first module is used for collecting fluorescence, Raman and other spectra, and the second module is used for microscopic imaging. The working process of the two lights is explained as follows:
the first path of light:
exciting light emitted by the laser is coupled to the multimode optical fiber from the optical fiber port after being shaped and filtered by an external optical path, and enters the first optical module from the first collimating mirror through the transmission of the multimode optical fiber;
the light is reflected by a first reflector placed at an angle of 45 degrees, then vertically enters a microscope objective lens through a glass window, finally enters a sample through the microscope objective lens in a focusing mode, and the sample is excited to generate fluorescence, Raman and the like;
the fluorescence, Raman and other optical signals and the laser reflected by the sample are collected by the microscope objective lens and return according to the original optical path, are reflected by the first reflector, are coupled back to the multimode optical fiber 9 from the first collimating mirror and are emitted from the optical fiber port;
the fluorescence, Raman and other optical signals emitted from the optical fiber port and the laser reflected by the sample enter a spectrometer after being subjected to shaping and filtering treatment;
the spectrometer performs spectral analysis on the collected fluorescence, Raman and other optical signals to obtain fluorescence, Raman and other spectra of the sample to be detected in the low-temperature strong magnetic field environment.
The second path of light:
the illumination light beam is transmitted through the optical fiber beam, the optical fiber beam is arranged close to the inner side face of the sample rod, is reflected by a second reflecting mirror arranged at 45 degrees after being emitted from an optical fiber beam port, then vertically enters the second beam splitting mirror and is reflected again, and the reflected light vertically enters the microscope objective and illuminates the surface of the sample through the microscope objective;
the illuminated sample surface is subjected to microscopic imaging through a micro objective lens, then a microscopic image signal is reflected through a first beam splitter and is imaged on an imaging chip of a camera through a first lens, and finally a microscopic picture of the sample surface can be displayed on a computer through data line transmission.
In addition, in order to realize the focusing and moving of the sample, a control signal of the three-dimensional displacement table can be transmitted to the three-dimensional displacement table through a reserved electrical interface and a cable, and the spectral measurement and the microscopic imaging of the whole sample surface can be realized by combining a fluorescence, Raman and other spectral acquisition systems and a microscopic imaging system.
In a specific embodiment of the present invention, the testing process of the testing system is as follows:
extending a sample rod into a test cavity of a low-temperature strong magnetic field, sealing the test cavity through a flange interface 201, and vacuumizing the interior of the test cavity;
an illumination beam emitted from the illumination light source 5 enters the sample rod and is transmitted along the inner side surface, is reflected by the second reflecting mirror 103 and the second beam splitter 102 in sequence and then vertically enters the microscope objective 303, and finally enters a sample through the microscope objective to illuminate the sample to be measured; the illuminated surface of the sample is subjected to microscopic imaging through a microscope objective, then a microscopic imaging signal passes through the second beam splitter 102 and is reflected by the first beam splitter 106, an image is displayed on an imaging chip of the camera 4 after being imaged through the first lens 107, the state of the sample is observed in real time, and the three-dimensional displacement table 301 is controlled to adjust the position of the sample according to the observed state of the sample, so that the focusing and moving of the sample are realized;
the laser beam emitted from the laser 7 is transmitted to the laser beam inlet of the first optical module through the multimode fiber 9, and enters the first optical module 1 after being collimated by the first collimating mirror 104; then vertically incident to a microscope objective 303 after sequentially passing through a first reflector 105, a first beam splitter 106 and a second beam splitter 102, and finally incident to a sample through the microscope objective for exciting the sample to emit light so as to generate fluorescence and Raman optical signals;
the fluorescence and raman optical signals are collected by the microscope objective 303 and then returned in the original path, are collimated by the first collimating mirror 104, then coupled to the multimode optical fiber 9 and transmitted back to the other end for emission, and enter the spectrometer 8 for analysis after being subjected to shaping and filtering. Specifically, after the fluorescence and raman optical signals are transmitted to the second optical module 6, the fluorescence and raman optical signals are collimated by the second collimating lens 604, and then enter the spectrometer 8 for analysis after passing through the filter 602 and the second lens 603 in sequence.
The foregoing is illustrative of only specific embodiments of this invention. Obviously, the present invention is not limited to the above embodiments, and many modifications are possible. All modifications which can be derived or suggested by a person skilled in the art from the disclosure of the invention should be considered as within the scope of the invention.
Claims (8)
1. A micro-spectrum imaging test system suitable for a low-temperature high-intensity magnetic field environment is characterized by comprising a sample rod (3), a switching cavity (2), a camera (4), an illumination light source (5), a first optical module (1), a second optical module (6), a laser (7) and a spectrometer (8);
the sample rod (3) is of a hollow structure, one end of the sample rod is connected with a three-dimensional displacement table (301), a sample table (302) is fixed on the side surface, located inside the sample rod, in the three-dimensional displacement table (301), and the other end of the sample rod (3) is connected with the first optical module (1) through a switching cavity (2); a microscope objective (303) is also arranged in the sample rod (3), and the object space of the microscope objective faces one side of the sample table;
the laser (7) and the spectrometer (8) are respectively connected with a second optical module (6), and the second optical module (6) comprises a box body, a transmission light path and a laser emergent port; the laser emergent port is connected with a laser beam inlet of the first optical module through a multimode optical fiber (9);
the first optical module (1) comprises a box body, a second beam splitter (102), a second reflector (103), a first collimating mirror (104), a first reflector (105), a first beam splitter (106) and a first lens (107), wherein the first collimating mirror, the first reflector (105), the first beam splitter (106) and the first lens (107) are fixed in the box body; the incident optical axis of the first lens (107) and the incident optical axis of the laser beam of the first beam splitter (106) are distributed at 90 degrees; the second beam splitter (102) is coaxially arranged on the image side of the microscope objective (303), and the beam splitting surface of the second beam splitter (102) and the central axis of the sample rod (3) are distributed at 45 degrees; the second reflecting mirror (103) is fixed on the inner side surface of the sample rod (3).
2. The system of claim 1, wherein the incident optical axis of the illumination beam of the second reflector is parallel to the central axis of the sample rod.
3. The system for testing microspectrum imaging under the environment of low temperature and strong magnetic field according to claim 1, characterized in that the switching cavity (2) is provided with an illuminating light source access port and an electrical interface, and an illuminating light beam emitted by the illuminating light source (5) is introduced into the sample rod through the illuminating light source access port; and a control line of the three-dimensional displacement table passes through the electrical interface to be connected with the three-dimensional displacement table.
4. The system of claim 1, wherein the sample shaft is connected to the adaptor cavity via a flange interface.
5. A micro-spectrum imaging test system suitable for being used in a low-temperature high-intensity magnetic field environment as claimed in claim 1, wherein a connecting plate with a transparent window is arranged at the joint of the switching cavity and the first optical module, and the connecting plate and the switching cavity are connected in a sealing mode.
6. The system of claim 1, wherein the microscope objective is mounted inside the sample shaft by an adjustable mount, and the adjustable mount is capable of moving along the central axis of the sample shaft.
7. A micro-spectral imaging test system suitable for use in a low temperature high magnetic field environment according to claim 1, wherein an optical filter is disposed at a connection interface of the second optical module and the spectrometer.
8. The system according to claim 7, wherein the transmission optical path of the second optical module is provided with an optical filter, a second lens and a second collimating mirror; after the laser beam enters the second optical module, the laser beam is reflected by the optical filter and then vertically enters the second collimating mirror, and then the laser beam is emitted from the laser emitting port after passing through the second collimating mirror.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112577931A (en) * | 2020-11-25 | 2021-03-30 | 江苏度微光学科技有限公司 | Sample rod suitable for microspectroscopic imaging test in low-temperature high-intensity magnetic field environment and test method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112577931A (en) * | 2020-11-25 | 2021-03-30 | 江苏度微光学科技有限公司 | Sample rod suitable for microspectroscopic imaging test in low-temperature high-intensity magnetic field environment and test method thereof |
| CN112577931B (en) * | 2020-11-25 | 2024-04-19 | 江苏度微光学科技有限公司 | Microscopic spectrum imaging test sample rod suitable for low-temperature strong magnetic field environment and test method thereof |
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