CN115112572B - Automatic testing device for micro-area angle resolution poincare sphere - Google Patents
Automatic testing device for micro-area angle resolution poincare sphere Download PDFInfo
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Abstract
The invention discloses an automatic testing device for distinguishing Poincare spheres in a micro-area angle, which comprises a shimming light source, a microscope, a spectrum detection system and a control system, wherein the microscope comprises a sample stage and an objective lens; the spectrum detection system comprises an angle-resolved receiving light path, a spectrometer, a plurality of first translation stages and an automatic adjusting device for rotation adjustment; the angle-resolved receiving light path comprises an aperture diaphragm, a lens component, a quarter glass slide, a half glass slide and a linear polaroid, and the objective lens collects light of a sample to be detected on the sample stage and sequentially passes through the aperture diaphragm, the lens component, the quarter glass slide, the half glass slide and the linear polaroid and then is detected by the spectrometer; the invention can obtain multiple groups of linear polarization and circular polarization data for a long time under unmanned operation conditions, avoids errors and complicated manual operation caused by traditional manual adjustment, and brings convenience for testing the micro-angle resolution poincare sphere.
Description
Technical Field
The invention relates to the technical field of information optics. In particular to an automatic testing device for distinguishing poincare balls in micro-zone angles.
Background
In recent years, with the development of micro-nano material science, particularly, the deep research on the micro-nano structure optical field makes people put higher demands on the precision of test equipment and the automation experimental operation. The test of distinguishing the polarization state of the Poincare sphere by utilizing the microscopic angle has important theoretical and practical significance for researching the basic property of condensed state physics, mastering the dispersion relation of a special electromagnetic mode in a micro-nano structure and researching and developing a micro-photoelectric device. In the optical field, polarization state distribution plays a key role in the process analysis of the interaction of light with matter as an inherent property of light. Conventional polarization states include linear polarization, circular polarization, elliptical polarization, and these different polarization state types can be unified with poincare spheres. The polarization state represented by the north pole of the poincare sphere is right-handed circular polarization; the polarization state represented by the south pole is left-hand circular polarization; the polarization states of the equator are all linear polarizations. The polarization state represented by each point is uniquely determined, and each polarization state can also be represented by finding a point on the poincare sphere. Classical vector states of polarization-radial (S1, S2) and angular (S3) polarization-both belong to the first order poincare sphere states of polarization. The high-order poincare sphere polarized light has more complex polarization state distribution, and researchers obtain full poincare vector light fields by superposing different orthogonal polarized light and the like, and the full poincare vector light fields are applied to high-tech fields such as polarization generators, optical capturing, optical communication and the like.
At present, the generation means of the poincare vector beam mainly uses a quarter wave plate, a half wave plate, a combined wave plate and the like to realize the generation of the vector beam, but a polarizer and the combined wave plate are required to be rotated or replaced when the vector beam is regulated. The micro-area test of the poincare sphere light field is also limited to manual control, so that the test time is too long and the loss of manpower and material resources is caused, and unavoidable errors are brought to experiments.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to provide an automatic testing device for automatically detecting the micro-area spectrum and the angle-resolved spectrum of the micro-nano scale area and automatically detecting the micro-area angle-resolved poincare sphere of the stokes parameter test in the sample poincare sphere.
In order to solve the technical problems, the invention provides the following technical scheme:
the automatic testing device for the micro-area angle resolution Poincare sphere comprises a shimming light source, a microscope, a spectrum detection system and a control system, wherein the microscope comprises a sample stage and an objective lens; the spectrum detection system comprises an angle-resolved receiving light path, a spectrometer, a plurality of first translation stages and an automatic adjusting device for rotation adjustment;
The angle-resolved receiving light path comprises an aperture diaphragm, a lens component, a quarter glass slide, a half glass slide and a linear polaroid, and the objective lens collects light of a sample to be detected on the sample stage and sequentially passes through the aperture diaphragm, the lens component, the quarter glass slide, the half glass slide and the linear polaroid and then is detected by the spectrometer;
The automatic adjusting device provided with the quarter slide, the half slide or the linear polaroid is respectively arranged on an independent automatic adjusting device, the automatic adjusting device provided with the quarter slide, the half slide or the linear polaroid is respectively arranged on an independent first translation stage, the translation directions of the quarter slide, the half slide and the linear polaroid are parallel to the plane of an incident slit of the spectrometer, and the first translation stage and the automatic adjusting device are controlled by a control system.
Furthermore, the microscope also comprises a beam splitter and a microscope inner lens, and the light of the sample to be detected sequentially passes through the objective lens, the beam splitter and the microscope inner lens and then reaches the aperture diaphragm.
Further, the lens assembly comprises a first lens, a second lens and a third lens, and the light beam passing through the aperture diaphragm sequentially passes through the first lens, the second lens and the third lens to reach a quarter glass slide; the first focal point of the first lens is aligned with the aperture diaphragm, the second lens is placed at a position where the k-space image of the first lens is one time focal length away from the first lens, the third lens is placed at a position where the k-space image of the second lens is one time focal length away from the second lens, and the entrance slit of the spectrometer is arranged at the focal plane of the third lens, so that the k-space image of the third lens appears at the position of the entrance slit of the spectrometer.
Further, the angle-resolved receiving optical path further comprises a light guide piece and a CCD imaging device, the light guide piece is a half-mirror, the light guide piece is arranged between the second lens and the third lens, and light in k space of the second lens is reflected to the CCD imaging device through the light guide piece.
Further, the third lens is mounted on another first translation stage, and the translation direction of the third lens is parallel to the plane of the incident slit of the spectrometer.
Further, the first lens and the second lens are arranged on a second translation stage, the second translation stage is a manual two-dimensional translation stage, the second translation stage is controlled by two micrometer in the x and y directions, the straightness is 0.005mm, and the sensitivity is 0.002-0.003mm.
Further, the first translation stage comprises a base, a guide rail arranged on the base, a sliding table arranged on the guide rail in a sliding manner, a screw rod arranged on the base and driving the sliding table to slide and a first motor for driving the screw rod to rotate; the minimum movement precision of the sliding table is 0.0001mm; an auxiliary shifting block is arranged on the screw rod;
The automatic adjusting device comprises a supporting rod arranged on the sliding table, a mounting plate arranged at the top end of the supporting rod, a lens fixing ring rotatably arranged on the mounting plate, an automatic rotating knob and a second motor in driving connection with the automatic rotating knob, wherein the periphery of the lens fixing ring is provided with a tooth part, and the automatic rotating knob is meshed with the periphery of the lens fixing ring.
Further, a parameter module, an analysis module and an external control module are arranged in the control system; the parameter module comprises a system setting parameter and a plurality of groups of test parameters, wherein the system setting parameter comprises a range for collecting data center wavelength, the collection times of each group of data and corresponding exposure time, the test parameters comprise the wavelength of a uniform field light source, the translation parameter of a first translation stage, the rotation degree of a linear polaroid, a quarter glass slide and a half glass slide, and each time one group of data is collected, another group of test parameters is automatically used for testing; the analysis module is used for analyzing the collected data of the integrated spectrometer, and the external control module is used for sending an action instruction to the action executing mechanism according to the test parameters.
Further, when the automatic test of the micro-area angle resolution poincare sphere is carried out, a to-be-tested sample device containing a micro-nano structure is placed on a sample stage, a focal plane of the to-be-tested sample is found by a microscope, light emitted by the surface of the to-be-tested sample is led to a slit of a spectrometer through a lens assembly and is led to a CCD imaging device through a light guide piece, the range of a light spot collecting area is controlled by controlling the aperture of an aperture diaphragm, when data collection is started, the light spot is adjusted to be tangential with the slit of the spectrometer to the left, test parameters are sequentially used for carrying out automatic adjustment of a light path until the right of a circular light spot is automatically stopped after the right of the circular light spot is tangential with the slit of the spectrometer, and an analysis module analyzes angle information of k space carried by the whole circular light spot area according to the collected data of the spectrometer, namely, pixel points of a plane photon dispersion relation can be formed in two directions of kx and ky can be spliced under each wavelength.
Further, the poincare sphere polarization state test includes a test step of poincare sphere polarization states S1 and S2 and a test step of poincare sphere polarization state S3;
The testing steps of the Poincare sphere polarization states S1 and S2 are as follows: the position of the linear polaroid is adjusted to be aligned with the slit of the spectrometer through the first translation table, the linear polarization angle is kept to be 0 degrees, and only light in the direction parallel to the slit of the spectrometer is allowed to pass through; the method comprises the steps of adjusting a half slide to a position aligned with a slit of a spectrometer through a first translation table, wherein the half slide and a linear polaroid are arranged on an optical path, adjusting the rotation angle of the half slide through an automatic adjusting device, respectively measuring linear polarization data of 0 DEG, 45 DEG, 90 DEG and 135 DEG, and obtaining a Poincare sphere three-dimensional linear polarization spectrum dispersion relation according to a Poincare sphere polarization state calculation formula;
The testing steps of the Galai sphere polarization state S3 are as follows: and (3) maintaining the linear polarization angle to be 0 DEG, adjusting the quarter glass slide to a position aligned with a slit of a spectrometer through a first translation stage, wherein the quarter glass slide, the half glass slide and the linear polarizer are arranged on the optical path, adjusting the rotation of the quarter glass slide by 0 DEG and 45 DEG through an automatic adjusting device, respectively measuring the left-handed and right-handed circular polarization data, and obtaining the Poincare sphere three-dimensional circular polarization spectral dispersion relation according to the Poincare sphere polarization state calculation formula.
The technical scheme of the invention has the following beneficial technical effects:
The invention realizes the automatic adjustment of the detection range of angle information carried by light spots, and can obtain a plurality of groups of linear polarization and circular polarization data under unmanned operation conditions for a long time, thereby piecing up the dispersion relation of three-dimensional information of sample light, meeting the requirement of researchers for observing the transformation trend between wave vectors of the sample under different wave bands, being beneficial to the researchers to deduce the meaningful interaction of photons from the dispersion relation of special electromagnetic modes in the micro-nano structure and providing a practical and convenient automatic testing device for the optical research of the micro-nano structure;
The position of the light spot relative to the slit of the spectrometer can be automatically and accurately adjusted through the action of the automatic first translation stage, and the range of the light spot acquisition area is controlled by controlling the size of the aperture diaphragm.
After the rotation angles and rotation modes of the polaroid and the slide are set in the test parameters, the polaroid and the slide can automatically rotate to the rotation angles of the linear polaroid and the slide which are required by the next experiment after the last group of data are tested, the automatic test under the long-time unmanned operation is completely realized, the simultaneous detection of the micro-area spectrum and the angle-resolved spectrum of the micro-nano scale area of the material is realized, the calculation of the Poincare sphere polarization state by the control system can effectively obtain the clear and real change of photon linear polarization and circular polarization in different wavelengths, and the efficient detection condition is provided for the exploration of the photon three-dimensional dispersion relation; the automatic test can avoid the trouble of environmental interference and complicated manual operation regulation caused by manual regulation, and provides a practical and convenient test tool for researching the optical exploration and three-dimensional optical dispersion relation of the Poncare sphere polarization states of the micro-nano structure organic-inorganic crystal and the photonic crystal.
Drawings
FIG. 1 is a schematic view of an optical path according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an automated polarizer adjustment apparatus according to an embodiment of the present invention;
fig. 3 is a schematic view showing a polarizer and a wave plate mounting position according to an embodiment of the present invention.
The reference numerals in the drawings are as follows: 1-sample stage, 2-objective lens, 3-aperture stop, 4-first lens, 5-second lens, 6-light guide, 7-third lens, 8-first translation stage, 9-spectrometer, 10-automatic rotation knob, 11-lens fixing ring, 12-mounting plate 13-base, 14-sliding table, 15-screw rod, 16-guide rail, 17-quarter slide, 18-half slide, 19-linear polarizer, 20-beam splitter, 21-microscope inner lens, 22-CCD imaging device.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
As shown in fig. 1 to 3, the automated testing apparatus of the micro-area angular resolution poincare sphere comprises a shimming light source, a microscope, a spectrum detection system and a control system, wherein the microscope comprises a sample stage 1, an objective lens 2, a beam splitter 20 and a microscope inner lens 21; the spectrum detection system is used for measuring light intensities I (kx,ky) of different wavelengths corresponding to each pixel on a micro-nano structure sample of a device to be detected, kx is defined as a horizontal axis direction, and ky is defined as a vertical axis direction, and comprises an angle resolution receiving light path, a spectrometer 9, a plurality of first translation stages 8 and an automatic adjusting device for rotation adjustment; the lens assembly comprises a first lens 4, a second lens 5 and a third lens 7; the shimming light source adopts a Kohler illumination system, can uniformly illuminate a sample, and particularly adopts a lower light inlet mode for measurement;
The angle-resolved receiving optical path is used for converging and amplifying k-space angle information of the internal lens 21 of the microscope to the spectrum detection mechanism, the angle-resolved receiving optical path comprises an aperture diaphragm 3, a lens component, a quarter glass slide 17, a half glass slide 18 and a linear polarizer 19, and the objective lens 2 collects light of a sample to be detected on the sample stage 1 and sequentially passes through the beam splitter 20, the internal lens 21 of the microscope, the aperture diaphragm 3, the first lens 4, the second lens 5, the third lens 7, the quarter glass slide 17, the half glass slide 18 and the linear polarizer 19 and then is detected by the spectrometer 9; the focal plane at one end of the objective lens 2 is aligned with the micro-nano structure sample in the sample to be detected; the image plane of the microscope is an optical conjugate plane formed by the micro-nano structure sample through the objective lens 2; the microscope inner lens 21 converts the converged light of k-space of the back focal plane into parallel light while the real space presents a real space image outside the microscope; the aperture diaphragm 3 is positioned at an imaging point in real space, and the size of a micro-area acquisition area can be controlled by the size of the aperture diaphragm;
The quarter slide 17, the half slide 18 and the linear polarizer 19 are respectively arranged on independent automatic adjusting devices, the automatic adjusting devices provided with the quarter slide 17, the half slide 18 or the linear polarizer 19 are respectively arranged on independent first translation stages 8, and the translation directions of the quarter slide 17, the half slide 18 and the linear polarizer 19 are parallel to the plane of an incident slit of the spectrometer 9; the first translation stage 8 performs automatic translation control by a control system by uniformly adopting a Labview editing program, the rotation angles of the polaroid 20, the quarter glass slide 17 and the half glass slide 18 are automatically adjusted by the control system by the automatic adjusting device, and the required linear polarization detection angles and circular polarization detection angles are combined, so that polarized light with any angle and controllable state can be automatically generated by the polaroid 20 and the glass slide 20;
The construction of the angle-resolved receiving optical path is realized mainly according to the real space and the conjugate plane between k; two concepts that are most important in microscopic angular resolution: real space and k space (reciprocal space), which together form reciprocal space-periodic real space of the crystal is transformed into periodic reciprocal space by fourier transform; the objective lens 2 of the microscope can be used as a Fourier transform device to decompose the emitted light of the micro-nano structure sample at different angles to different space positions, and the emitted light of the micro-nano structure sample at each angle is presented to the slit of the spectrometer 9 through the convergence and re-amplification of the angle-resolved receiving light path; the positioning spectrum detection of the sample is realized through the light splitting of the spectrometer 9;
Parallel light of each angle of k space coming out of the micro-nano structure sample surface is converged on a back focal plane through the objective lens 2, so that the back focal plane carries k space information, namely angle information, but because the focal length of the objective lens 2 is extremely short, the back focal plane is basically positioned in the objective lens 2, data of the back focal plane cannot be intuitively obtained, an additionally arranged microscope inner lens 21 and a first lens 4 are needed to display an image of the back focal plane, and the angle information of the k space can be imaged to a real space through Fourier optical transformation on the back focal plane of the objective lens 2, so that simultaneous detection of a micro-region spectrum and an angle-resolved spectrum of a micro-nano scale region of a material is realized.
Further, as shown in fig. 1 and 3, the first focal point of the first lens 4 is aligned with the aperture stop 3, the second lens 5 and the third lens 7 are both disposed at a position of a real space image (or k space image) which is twice as far as the front lens, and the entrance slit of the spectrometer 9 is disposed at the focal plane of the third lens 7; the second lens 5 and the third lens 7 are utilized to amplify the k-space information once, the third lens 7 is placed at a position of a real space image (or k-space image) which is twice the focal length of the second lens 5, so as to ensure that the real space and the k-space are emergent in parallel, and the focal length ratio of the third lens and the second lens is the amplification factor of k-space angle information; finding a lens of the proper focal length can cause k-space information to occupy the entire CCD panel of CCD imaging device 22, so that CCD imaging device 22 exhibits maximum efficiency while the angular resolution is maximized. Preferably, in order to facilitate the adjustment of the optical path, the first lens 4 and the second lens 5 are mounted on a second translation stage, the second translation stage is a manual two-dimensional translation stage, the second translation stage is controlled by two micrometer in the x and y directions, the straightness is 0.005mm, and the sensitivity is 0.002-0.003mm; the third lens 7 is mounted on the other first translation stage 8 through a lens holder, the translation direction of the third lens 7 is parallel to the plane where the incident slit of the spectrometer 9 is located, and high-precision movement of the third lens 7 and movement of a moving light spot relative to the slit position of the spectrometer 9 are realized through the first translation stage 8.
Further, as shown in fig. 1, the angle-resolved receiving optical path further includes a light guide 6 and a CCD imaging device 22, the light guide 6 is a half-mirror, the light guide 6 is disposed between the second lens 5 and the third lens 7, light in the second lens 5k space is reflected to the CCD imaging device 22 by the light guide 6, and the light guide 6 presents a real space image on the CCD imaging device 22, so that real space image is observed in real time, and the CCD imaging device 22 can use a WAT-221sCCD camera.
Further, as shown in fig. 3, the first translation stage 8 includes a base 13, a guide rail 16 mounted on the base 13, a sliding table 14 slidably mounted on the guide rail 16, a screw 15 mounted on the base 13 and driving the sliding table 14 to slide, and a first motor driving the screw 15 to rotate; the minimum movement accuracy of the sliding table 14 is 0.0001mm, and a program is set to enable the translation table to acquire one group of data every 0.1 mm; the third lens 7 can be finely adjusted through the first translation stage 8, the quarter glass slide 17, the half glass slide 18 and the linear polaroid 19 are aligned with the optical axis, specifically, after the positions of the quarter glass slide 17, the half glass slide 18 and the polaroid 19 are adjusted before testing, the third lens 7 does not need to be moved again, and a light spot of the third lens 7 can be horizontally moved from right to left in the translation process. The device avoids manual adjustment, and can effectively improve the accuracy of measurement data; the position adjustment of the third lens 7 can realize the three-dimensional integrated light spot micro-area control; an auxiliary shifting block is fixedly arranged on the screw rod 15, and the manual rotation of the screw rod 15 can be realized by manually shifting the auxiliary shifting block to rotate, so that the manual translation of the sliding table 14 is realized;
As shown in fig. 2 to 3, the automatic adjusting device comprises a support bar arranged on the sliding table 14, a mounting plate 12 arranged at the top end of the support bar, a lens fixing ring 11 rotatably mounted on the mounting plate 12, an automatic rotation knob 10 and a second motor in driving connection with the automatic rotation knob 10, wherein the periphery of the lens fixing ring 11 is provided with a tooth part, the automatic rotation knob 10 is meshed with the periphery of the lens fixing ring 11, a linear polarizer 19, a half glass 18 and a quarter glass 17 are respectively fixed on one lens fixing ring 11, and the second motor drives a lens 20 to rotate to a programmed angle at a constant angular speed in a clockwise direction through the lens fixing ring 11, so that polarized light with any angle and controllable state is generated; further, the rotation angles of the linear polarizer 19, the half glass 18 and the quarter glass 17 are monitored by a detector, and after detecting the rotation of the corresponding polarization angles, a command is given to stop the rotation of the motor, specifically, the detector obtains the rotation angle of the lens fixing ring 11 by including a meter wheel engaged with the lens fixing ring 11 and by the rotation distance of the meter wheel.
Further, a parameter module, an analysis module and an external control module are arranged in the control system; the parameter module is a storage unit for storing setting data, the inside of the parameter module comprises system setting parameters and a plurality of groups of test parameters, the system setting parameters comprise a range for collecting data center wavelength, the collection times of each group of data and corresponding exposure time, the test parameters comprise the wavelength of a uniform field light source, the translation parameters of the first translation stage 8 and the rotation degrees of the linear polaroid 19, the quarter glass slide 17 and the half glass slide 18, and each time one group of data is collected, another group of test parameters is automatically used for testing; the analysis module is used for analyzing the collected data of the integrated spectrometer 9, and the external control module is used for sending an action instruction to the action executing mechanism according to the test parameters;
When the micro-area angle resolution poincare sphere is automatically tested, a sample device to be tested containing a micro-nano structure is placed on a sample table 1, a microscope is used for finding the focal plane of the sample to be tested, light emitted by the surface of the sample to be tested is led to a slit of a spectrometer 9 through a lens assembly and is led to a CCD imaging device 22 through a light guide 6, and the range of a light spot collecting area is controlled by controlling the size of the aperture of an aperture diaphragm 3; the emitted light is converted into parallel light through the first lens 4, meanwhile, the parallel light in k space is converged into one point at the position of one focal length of the first lens 4, the second lens 5 is aligned with the position of one focal length of the first lens 4, the second lens 5 is used for ensuring that the real space and the k space are emitted in parallel, the position of the third lens 7 is closely related to the second lens 5, and the ratio of the focal lengths of the two lenses is the magnification of k space angle information; when data collection is started, the circular light spot is adjusted to the left side from the outside of the slit of the spectrometer 9 and is tangent to the right side of the slit of the spectrometer 9, namely, the circular light spot is about to enter the position of the slit range from the right end of the slit, then test parameters are sequentially used for automatically adjusting the light path, the center wavelength of the adopted wavelength range is set to be +/-130 nm, after the system starts collection, the light spot moves from right to left until the right side of the circular light spot is tangent to the leftmost side of the slit of the spectrometer 9, and then the collection system automatically stops, so that collection of a group of data is completed. According to program setting of test parameters, the first translation stage 8 is automatically translated after each group of data is picked up, the initial position is returned, the rotation angles of the linear polaroid 19, the quarter glass slide 17 and the half glass slide 18 are automatically adjusted until all the set required data are picked up, the system is automatically stopped according to the program requirements, the analysis module analyzes the angle information of k space carried by the whole circular light spot area according to the collected data of the spectrometer 9, and a polarization state distribution diagram of light with different wavelengths, which is expressed by a Poincare sphere representation method, in two-dimensional k space can be obtained. The testing device can obtain multiple groups of linear polarization and circular polarization data under the unmanned operation condition for a long time, and can simultaneously construct the dispersion relation of the wave vector plane of photons along with the change of wavelength in the three-dimensional space
The Poincar sphere polarization state test comprises a Poincar sphere polarization state S1 and S2 test step and a Poincar sphere polarization state S3 test step;
The test steps of the Poincare sphere polarization states S1 and S2 are as follows: the position of the linear polaroid 19 is adjusted to be aligned with the slit of the spectrometer 9 through the first translation table 8, the linear polarization angle is kept to be 0 degrees, and only light in the direction parallel to the slit of the spectrometer 9 is allowed to pass through; the first translation stage 8 is used for adjusting the sliding of the half slide 18 to a position aligned with the slit of the spectrometer 9, at this time, the half slide 18 and the linear polarizer 19 are arranged on the optical path, the initial position of the half slide 18 is perpendicular to the optical path, the rotation angle of the half slide 18 is adjusted by the automatic adjusting device, the half slide 18 needs to be respectively rotated to 0 °, 22.5 °, 45 °, 67.5 ° to respectively measure linear polarization data of 0 °, 45 °, 90 ° and 135 °, and according to the poincare sphere polarization state calculation formula: Wherein I is the spectrum intensity, and the Poncare sphere three-dimensional linearly polarized spectrum dispersion relation is obtained;
the test steps of the poincare sphere polarization state S3 are: maintaining the linear polarization angle at 0 °, adjusting the quarter glass slide 17 to a position aligned with the slit of the spectrometer 9 by the first translation stage 8, wherein the quarter glass slide 17, the half glass slide 18 and the linear polarizer 19 are arranged on the optical path, adjusting the rotation of the quarter glass slide 17 by 0 ° and 45 ° by the automatic adjusting device, respectively measuring the left-handed and right-handed circular polarization data, and calculating the formula according to the poincare sphere polarization state: wherein I is the spectrum intensity, and the Poincare sphere three-dimensional circular polarized light spectrum dispersion relation is obtained.
In the invention, the test of Stokes parameters in a sample Poincare sphere is realized by an automatic test device, wherein the Poincare sphere is a sphere with radius P taking the origin of a three-dimensional Cartesian coordinate system as the center, mutually orthogonal axes S1, S2 and S3 represent corresponding Stokes parameters of a light field, and the radius P represents optical power
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While the obvious variations or modifications which are extended therefrom remain within the scope of the claims of this patent application.
Claims (10)
1. The automatic testing device for the micro-area angle resolution Poincare sphere is characterized by comprising a shimming light source, a microscope, a spectrum detection system and a control system, wherein the microscope comprises a sample table (1) and an objective lens (2); the spectrum detection system comprises an angle-resolved receiving light path, a spectrometer (9), a plurality of first translation stages (8) and an automatic adjusting device for rotation adjustment;
The angle-resolved receiving optical path comprises an aperture diaphragm (3), a lens component, a quarter glass slide (17), a half glass slide (18) and a linear polaroid (19), wherein the objective lens (2) collects light of a sample to be detected on the sample stage (1) and sequentially passes through the aperture diaphragm (3), the lens component, the quarter glass slide (17), the half glass slide (18) and the linear polaroid (19) and then is detected by the spectrometer (9);
The automatic adjustment device is characterized in that the quarter slide (17), the half slide (18) and the linear polaroid (19) are respectively arranged on independent automatic adjustment devices, the automatic adjustment devices provided with the quarter slide (17), the half slide (18) or the linear polaroid (19) are respectively arranged on independent first translation stages (8), the translation directions of the quarter slide (17), the half slide (18) and the linear polaroid (19) are parallel to the plane of an incident slit of the spectrometer (9), and the first translation stages (8) and the automatic adjustment devices are controlled by a control system.
2. The automated testing apparatus of the microcell angle-resolved poincare sphere according to claim 1, wherein the microscope further comprises a beam splitter (20) and a microscope inner lens (21), and the light of the sample to be tested reaches the aperture stop (3) after passing through the objective lens (2), the beam splitter (20) and the microscope inner lens (21) in order.
3. The automated testing apparatus of micro-segment angle resolved poincare spheres according to claim 2, wherein the lens assembly comprises a first lens (4), a second lens (5) and a third lens (7), the light beam passing through the aperture stop (3) passing through the first lens (4), the second lens (5) and the third lens (7) in sequence to a quarter slide (17); the first focus of the first lens (4) is aligned with the aperture stop (3), the second lens (5) is placed at a position where the k-space image of the first lens (4) is doubled from the first lens (4), the third lens (7) is placed at a position where the k-space image of the second lens (5) is doubled from the second lens (5), and the entrance slit of the spectrometer (9) is arranged at the focal plane of the third lens (7) so that the k-space image of the third lens (7) appears at the position of the entrance slit of the spectrometer (9).
4. An automated testing device for micro-segment angle-resolved poincare spheres according to claim 3, wherein the angle-resolved reception optical path further comprises a light guide (6) and a CCD imaging device (22), the light guide (6) is a half mirror, the light guide (6) is arranged between the second lens (5) and the third lens (7), and light in k space of the second lens (5) is reflected onto the CCD imaging device (22) through the light guide (6).
5. The automated testing apparatus of a microcell angle-resolved poincare sphere according to claim 4, wherein the third lens (7) is mounted on a further first translation stage (8), the translation direction of the third lens (7) being parallel to the plane of the entrance slit of the spectrometer (9).
6. The automated testing apparatus of micro-segment angle resolved poincare spheres according to claim 4, wherein the first lens (4) and the second lens (5) are mounted on a second translation stage, the second translation stage is a manual two-dimensional translation stage, the second translation stage has two micrometer controls in x and y directions, the straightness is 0.005mm, and the sensitivity is 0.002-0.003mm.
7. The automated testing apparatus of a microcell angle-resolved poincare sphere according to claim 1, wherein the first translation stage (8) comprises a base (13), a guide rail (16) mounted on the base (13), a sliding table (14) slidably mounted on the guide rail (16), a screw (15) mounted on the base (13) driving the sliding table (14) to slide, and a first motor driving the screw (15) to rotate; the minimum movement precision of the sliding table (14) is 0.0001mm; an auxiliary shifting block is arranged on the screw rod (15);
The automatic adjusting device comprises a supporting rod arranged on the sliding table (14), a mounting plate (12) arranged at the top end of the supporting rod, a lens fixing ring (11) rotatably arranged on the mounting plate (12), an automatic rotating knob (10) and a second motor in driving connection with the automatic rotating knob (10), wherein a tooth part is arranged on the periphery of the lens fixing ring (11), and the automatic rotating knob (10) is meshed with the periphery of the lens fixing ring (11).
8. The automated testing device of the microcell angle-resolved poincare sphere according to claim 1, wherein a parameter module, an analysis module and an external control module are arranged in the control system; the parameter module comprises a system setting parameter and a plurality of groups of test parameters, wherein the system setting parameter comprises a range for collecting data center wavelength, the collection times of each group of data and corresponding exposure time, the test parameters comprise the wavelength of a uniform field light source, the translation parameters of a first translation table (8) and the rotation degrees of a linear polaroid (19), a quarter glass (17) and a half glass (18), and each group of data is collected, and another group of test parameters is automatically used for testing; the analysis module is used for analyzing the collected data of the integrated spectrometer (9), and the external control module is used for sending an action instruction to the action executing mechanism according to the test parameters.
9. The automated testing device for micro-area angle resolution poincare sphere according to claim 8, wherein when the automated testing of micro-area angle resolution poincare sphere is performed, a to-be-tested sample device containing a micro-nano structure is placed on a sample stage (1), a focal plane of the to-be-tested sample is found by a microscope, light emitted by the surface of the to-be-tested sample is led to a slit of a spectrometer (9) through a lens component and led to a CCD imaging device (22) through a light guide (6), the range of a light spot collecting area is controlled by controlling the size of an aperture diaphragm (3), when data collection is started, the light spot is adjusted to be tangent to the slit of the spectrometer (9) to the left, and the automatic adjustment of a light path is performed sequentially by using testing parameters until the rightmost light spot is tangent to the slit of the spectrometer (9), and an analysis module analyzes angle information of k space carried by the whole circular light spot area according to the collected data of the spectrometer (9), namely, pixel points of which are in a plane covering photon dispersion relation can be spliced in two directions of kx and ky.
10. The automated testing apparatus of claim 8, wherein the poincare sphere polarization state testing is performed by a testing step of poincare sphere polarization states S1, S2 and a testing step of poincare sphere polarization state S3;
The testing steps of the Poincare sphere polarization states S1 and S2 are as follows: the position of the linear polaroid (19) is adjusted to be aligned with the slit of the spectrometer (9) through the first translation table (8), the linear polarization angle is kept to be 0 DEG, and only light in the direction parallel to the slit of the spectrometer (9) is allowed to pass through; the method comprises the steps of adjusting a half slide (18) to slide to a position aligned with a slit of a spectrometer (9) through a first translation table (8), adjusting the rotation angle of the half slide (18) through an automatic adjusting device, respectively measuring linear polarization data of 0 DEG, 45 DEG, 90 DEG and 135 DEG, and obtaining a Poincare sphere three-dimensional linear polarization spectrum dispersion relation according to a Poincare sphere polarization state calculation formula;
The testing steps of the Galai sphere polarization state S3 are as follows: the linear polarization angle is kept to be 0 degree, a quarter slide (17) is adjusted to a position aligned with a slit of a spectrometer (9) through a first translation table (8), at the moment, a quarter slide (17), a half slide (18) and a linear polarizer (19) are arranged on a light path, rotation 0 degree and 45 degrees of the quarter slide (17) are adjusted through an automatic adjusting device, left-handed and right-handed circular polarization data are respectively measured, and a Poincare sphere three-dimensional circular polarization spectrum dispersion relation is obtained according to a Poincare sphere polarization state calculation formula.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007014213A2 (en) * | 2005-07-25 | 2007-02-01 | Massachusetts Institute Of Technology | Tri modal spectroscopic imaging |
| CN101410691A (en) * | 2006-02-24 | 2009-04-15 | 通用医疗公司 | Methods and systems for performing angle-resolved Fourier-domain optical coherence tomography |
| CN104266968A (en) * | 2014-09-05 | 2015-01-07 | 中国地质大学（武汉） | Automatic high-precision polarization bidirectional reflection measuring instrument |
| CN113777049A (en) * | 2021-08-11 | 2021-12-10 | 华中科技大学 | Angle-resolved snapshot ellipsometer and measuring system and method thereof |
-
2022
- 2022-07-15 CN CN202210835489.9A patent/CN115112572B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007014213A2 (en) * | 2005-07-25 | 2007-02-01 | Massachusetts Institute Of Technology | Tri modal spectroscopic imaging |
| CN101410691A (en) * | 2006-02-24 | 2009-04-15 | 通用医疗公司 | Methods and systems for performing angle-resolved Fourier-domain optical coherence tomography |
| CN104266968A (en) * | 2014-09-05 | 2015-01-07 | 中国地质大学（武汉） | Automatic high-precision polarization bidirectional reflection measuring instrument |
| CN113777049A (en) * | 2021-08-11 | 2021-12-10 | 华中科技大学 | Angle-resolved snapshot ellipsometer and measuring system and method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 面阵CCD探测的全自动椭圆偏振光谱系统研究;游海洋, 贾建虎, 陈剑科, 韩涛, 倪卫明, 王松有, 李晶, 杨月梅, 陈良尧;红外与毫米波学报;20030225(01);全文 * |
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