CN213515125U - Integrated temperature control device for process furnace - Google Patents
Integrated temperature control device for process furnace Download PDFInfo
- Publication number
- CN213515125U CN213515125U CN202022713646.8U CN202022713646U CN213515125U CN 213515125 U CN213515125 U CN 213515125U CN 202022713646 U CN202022713646 U CN 202022713646U CN 213515125 U CN213515125 U CN 213515125U
- Authority
- CN
- China
- Prior art keywords
- temperature
- control device
- pid
- electrically connected
- zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Control Of Temperature (AREA)
Abstract
The utility model relates to an integrated temperature control device for a process furnace, a plurality of temperature zones are arranged in the process furnace, the integrated temperature control device comprises a main control device and a plurality of PID control devices, all the PID control devices are electrically connected with the main control device, the PID control devices are the same in number and are matched with the temperature zones one by one and are used for controlling the temperature of each temperature zone; the PID control device includes: the high-precision temperature sensor is arranged in the temperature zone and used for acquiring the actual temperature of the temperature zone; the first PID controller is electrically connected with the high-precision temperature sensor and is used for outputting a temperature control signal of the temperature zone according to the actual temperature of the temperature zone and the set temperature of the temperature zone; and the heater control device is electrically connected with the first PID controller and is used for controlling the heater in the temperature zone to work according to the temperature control signal. Through the arrangement, a series of furnace temperature control problems of poor temperature control precision, poor furnace gas uniformity and the like in the furnace in the prior art can be solved.
Description
Technical Field
The utility model relates to a temperature control device technical field, concretely relates to integrated temperature control device for technology stove.
Background
At present, a series of temperature control problems such as poor temperature control precision, poor furnace gas uniformity and the like generally exist in a process heat treatment furnace or a process furnace. The main factors influencing the furnace temperature are summarized as follows:
firstly, the length of the constant temperature area of the furnace body determines the quantity of products which can be put in. When only one heater is used in the furnace, the temperature distribution in the furnace is similar to the temperature distribution of a parabola, namely the middle temperature is high, the temperatures at two sides are low, and at the moment, a constant temperature area does not exist in the furnace theoretically, so that the actual production requirement cannot be met. Therefore, in practical production application, the furnace is generally divided into a plurality of temperature zones, and a plurality of groups of heaters are used for heating respectively, so that a constant temperature zone is ensured in the middle of the furnace chamber.
Secondly, the product can form large temperature interference to each temperature zone in the process of entering and exiting the furnace. Meanwhile, in the actual process of feeding and discharging the product, the temperature disturbance of each temperature zone from the furnace mouth to the furnace tail is different. Therefore, the temperature rise of the material or product in and out of the furnace in the temperature preparation area needs to be comprehensively considered.
And thirdly, the plurality of temperature zones can interfere with each other during heating. The higher the heat preservation performance, the longer the recovery time required after the temperature is too high, which not only has adverse effect on the product quality, but also seriously affects the production efficiency.
Fourth, generally speaking, the temperature control process in the furnace is a relatively typical large hysteresis process, and therefore, the control response needs to be adjusted or compensated accordingly.
And fifthly, regarding the thermocouple in the furnace, the thermocouple self error, the compensation lead error, the cold end compensation error, the thermocouple aging and other influence factors exist, and the overall measurement accuracy is influenced by the factors. Therefore, it is essential to perform system interconnection and multipoint correction on the thermocouple at regular intervals.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, an object of the utility model is to provide an integrated temperature control device for process furnace for solve a series of furnace temperature control problems such as poor, the furnace gas homogeneity of temperature control precision among the present process furnace.
In order to achieve one of the purposes of the utility model, an embodiment of the utility model provides an integrated temperature control device for a process furnace, a plurality of temperature zones are arranged in the process furnace, the integrated temperature control device comprises a main control device and a plurality of PID control devices, all the PID control devices are electrically connected with the main control device, and the PID control devices are the same in number and are matched with the temperature zones one by one and are used for controlling the temperature of each temperature zone;
the PID control device includes:
the high-precision temperature sensor is arranged in the temperature zone and used for acquiring the actual temperature of the temperature zone;
the first PID controller is electrically connected with the high-precision temperature sensor and is used for outputting a temperature control signal of the temperature zone according to the actual temperature of the temperature zone and the set temperature of the temperature zone;
and the heater control device is electrically connected with the first PID controller and is used for controlling the heater in the temperature zone to work according to the temperature control signal.
As a further improvement of an embodiment of the present invention, the PID controller is a cascade PID controller, the cascade PID controller includes a second PID controller, and the first PID controller is electrically connected to the second PID controller.
As a further improvement of an embodiment of the present invention, the PID control device further includes:
and the parameter setting device is electrically connected with the first PID controller and is used for setting each group of control parameters by a user.
As a further improvement of an embodiment of the present invention, the PID controller is a feedforward compensation PID controller.
As a further improvement of an embodiment of the present invention, the PID controller is a differential advanced PID controller.
As a further improvement of an embodiment of the present invention, the main control device includes a cooperative control device, the cooperative control device is electrically connected to all PID control devices for controlling the PID control devices to work in cooperation.
As a further improvement of an embodiment of the present invention, the integrated temperature control device further includes:
and the alarm device is electrically connected with the main control device and is used for giving an alarm prompt when the temperature of each temperature zone is unbalanced.
As a further improvement of an embodiment of the present invention, the integrated temperature control device further includes:
and the data recording device is electrically connected with the main control device and is used for recording temperature control data.
Compared with the prior art, the beneficial effects of the utility model reside in that: a plurality of temperature zones are arranged in the process furnace, and an integrated temperature control device is designed to integrally control the temperature of all the temperature zones; the integrated temperature control device comprises a plurality of PID control devices, and all the PID control devices are matched with the temperature zones one by one. In the PID control device, the actual temperature of each temperature zone in the furnace is accurately measured through a high-precision temperature sensor, the actual temperature and the set temperature are input into a first PID controller together, the first PID controller can output temperature control signals of the corresponding temperature zones, and the heater control device controls the heaters in the corresponding temperature zones to work according to the temperature control signals, so that the actual temperature of the corresponding temperature zones is accurately controlled, the integral temperature control precision in the furnace is finally improved, and the temperature balance of each temperature zone in the furnace is ensured.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the embodiments or the description of the prior art will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
Fig. 1 is a block diagram of an integrated temperature control device according to an embodiment of the present invention;
fig. 2 is a flowchart of an integrated temperature control method according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the following will combine the embodiments of the present invention and the corresponding drawings to clearly and completely describe the technical solutions of the present invention. It is to be understood that the described embodiments are merely exemplary of some, and not necessarily all, embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work all belong to the protection scope of the present invention.
The embodiments described below with reference to the accompanying drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
As shown in fig. 1, an embodiment of the present invention provides an integrated temperature control device for a process furnace, wherein a plurality of temperature zones are disposed in the process furnace, the integrated temperature control device includes a main control device and a plurality of PID control devices, all the PID control devices are electrically connected to the main control device, and the PID control devices are the same in number and are matched with the temperature zones one by one, and are used for controlling the temperature of each temperature zone;
the PID control device includes:
the high-precision temperature sensor is arranged in the temperature zone and used for acquiring the actual temperature of the temperature zone;
the first PID controller is electrically connected with the high-precision temperature sensor and is used for outputting a temperature control signal of the temperature zone according to the actual temperature of the temperature zone and the set temperature of the temperature zone;
and the heater control device is electrically connected with the first PID controller and is used for controlling the operation of the heater in the temperature zone according to the temperature control signal.
Specifically, a plurality of temperature zones are arranged in the process furnace, and an integrated temperature control device is designed to integrally control the temperature of all the temperature zones; the integrated temperature control device comprises a plurality of PID control devices, and all the PID control devices are matched with the temperature zones one by one.
In the PID control device, the actual temperature of each temperature zone in the furnace is accurately measured through a high-precision temperature sensor, and the PID control device is adopted for accurate temperature control. The first PID controller can output temperature control signals of the corresponding temperature zone, and the heater control device controls the heater in the corresponding temperature zone to work according to the temperature control signals. Therefore, the actual temperature of the corresponding temperature zone can be accurately controlled, the overall temperature control precision in the furnace is finally improved, and the temperature balance of each temperature zone in the furnace is ensured.
Furthermore, the PID control device is a cascade PID control device, the cascade PID control device comprises a second PID controller, and the first PID controller is electrically connected with the second PID controller.
In actual use, a cascade PID control device is adopted, so that the overall anti-interference performance and stability of the control device can be enhanced, and the temperature control precision is improved.
Further, the PID control device further includes:
and the parameter setting device is electrically connected with the first PID controller and is used for setting each group of control parameters by a user.
In specific operation, the PID control device also has a formula function, namely, a user can freely define a plurality of groups of control parameters, so that the PID control device has various control effects, and the overall control performance is improved.
Further, the PID control device is a feedforward compensation PID control device.
Generally, furnace temperature control is a relatively typical large hysteresis control process. Therefore, certain feedforward compensation can be carried out on the control response so as to improve the control response performance of the current large-lag temperature control process and improve the temperature control accuracy or precision.
Further, the PID controller is a differential advanced PID controller.
Further, the PID control means may be provided in a differential advance control manner. Therefore, the control mode of the PID control device is flexible and changeable, and a user can freely define the control mode or the expert system mode, so that the use feeling of the user can be improved.
Furthermore, the main control device comprises a cooperative control device which is electrically connected with all the PID control devices and is used for controlling the cooperative work of more than two PID control devices.
In order to achieve better furnace gas temperature uniformity, a cooperative control device is arranged for cooperative control. The cooperative control device can control more than two PID control devices to work cooperatively according to the actual heating requirements of each temperature zone, so that the corresponding temperature zones are heated cooperatively and heated, and the temperature balance of each temperature zone in the furnace is ensured.
Further, the integrated temperature control device further comprises:
and the alarm device is electrically connected with the main control device and is used for giving an alarm prompt when the temperature of each temperature zone is unbalanced.
Further, the integrated temperature control device further comprises:
and the data recording device is electrically connected with the main control device and is used for recording the temperature control data.
In actual use, the integrated temperature control device is also provided with an alarm function, so that a user or a worker can know the temperature balance condition of each temperature zone in time, and temperature control adjustment can be performed in time.
Meanwhile, a data recording function is set, the past data are stored, and a user or a worker can conveniently look up the operation data of the integrated temperature control device and the temperature control state of the process furnace.
As shown in fig. 2, the integrated temperature control method according to an embodiment of the present invention is based on the integrated temperature control device according to any one of the above embodiments, and the integrated temperature control method includes the steps of:
step b: collecting the actual temperature of the temperature zone;
step c: outputting a temperature control signal of the temperature zone according to the actual temperature of the temperature zone and the set temperature of the temperature zone;
step d: and controlling the heater in the temperature zone to work according to the temperature control signal.
Specifically, based on the PID control device, the actual temperature of each temperature zone in the furnace is accurately measured through the high-precision temperature sensor, and the PID control device is adopted for accurate temperature control.
The actual temperature and the set temperature are input into the first PID controller, and the first PID controller can output temperature control signals of the corresponding temperature zones. The heater control device controls the heater in the corresponding temperature zone to work according to the temperature control signal.
Therefore, the actual temperature of the corresponding temperature zone can be accurately controlled, the overall temperature control precision in the furnace is finally improved, and the temperature balance of each temperature zone in the furnace is ensured.
Further, the method further comprises:
step a: and controlling more than two PID control devices to work cooperatively.
In order to achieve better furnace gas temperature uniformity, a cooperative control device is arranged for cooperative control. The cooperative control device can control more than two PID control devices to work cooperatively according to the actual heating requirements of each temperature zone, so that the corresponding temperature zones are heated cooperatively and heated, and the temperature balance of each temperature zone in the furnace is ensured.
It should be understood that although the present description refers to embodiments, not every embodiment contains only a single technical solution, and such description is for clarity only, and those skilled in the art should make the description as a whole, and the technical solutions in the embodiments can also be combined appropriately to form other embodiments understood by those skilled in the art.
The above list of details is only for the feasible embodiments of the present invention, and is not intended to limit the scope of the present invention, and all equivalent embodiments or modifications that do not depart from the technical spirit of the present invention are intended to be included within the scope of the present invention.
Claims (8)
1. An integrated temperature control device for a process furnace, wherein a plurality of temperature zones are arranged in the process furnace, and the integrated temperature control device is characterized by comprising a main control device and a plurality of PID control devices, wherein all the PID control devices are electrically connected with the main control device, and the PID control devices are the same in number and are matched with the temperature zones one by one and are used for controlling the temperature of each temperature zone;
the PID control device includes:
the high-precision temperature sensor is arranged in the temperature zone and used for acquiring the actual temperature of the temperature zone;
the first PID controller is electrically connected with the high-precision temperature sensor and is used for outputting a temperature control signal of the temperature zone according to the actual temperature of the temperature zone and the set temperature of the temperature zone;
and the heater control device is electrically connected with the first PID controller and is used for controlling the heater in the temperature zone to work according to the temperature control signal.
2. The integrated temperature control device for a process furnace of claim 1, wherein the PID control device is a cascade PID control device comprising a second PID controller, the first PID controller being electrically connected to the second PID controller.
3. The integrated temperature control device for a process furnace of claim 1, wherein the PID control device further comprises:
and the parameter setting device is electrically connected with the first PID controller and is used for setting each group of control parameters by a user.
4. The integrated temperature control device for a process furnace of claim 3, wherein the PID control device is a feed forward compensation PID control device.
5. The integrated temperature control device for a process furnace of claim 3, wherein the PID control device is a differential look ahead PID control device.
6. The integrated temperature control device for a process furnace of claim 1, wherein the master control device comprises a cooperative control device electrically connected to all PID control devices for controlling two or more PID control devices to cooperatively operate.
7. The integrated temperature control device for a process furnace of claim 1, further comprising:
and the alarm device is electrically connected with the main control device and is used for giving an alarm prompt when the temperature of each temperature zone is unbalanced.
8. The integrated temperature control device for a process furnace of claim 1, further comprising:
and the data recording device is electrically connected with the main control device and is used for recording temperature control data.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022713646.8U CN213515125U (en) | 2020-11-20 | 2020-11-20 | Integrated temperature control device for process furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022713646.8U CN213515125U (en) | 2020-11-20 | 2020-11-20 | Integrated temperature control device for process furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213515125U true CN213515125U (en) | 2021-06-22 |
Family
ID=76424836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022713646.8U Active CN213515125U (en) | 2020-11-20 | 2020-11-20 | Integrated temperature control device for process furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213515125U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114452671A (en) * | 2022-02-28 | 2022-05-10 | 中国科学院长春应用化学研究所 | Temperature adjustment system and purification equipment |
| CN118567416A (en) * | 2024-07-24 | 2024-08-30 | 湖南超弦科技股份有限公司 | PLC balance temperature control method and related equipment for silicon wafer production tube furnace |
-
2020
- 2020-11-20 CN CN202022713646.8U patent/CN213515125U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114452671A (en) * | 2022-02-28 | 2022-05-10 | 中国科学院长春应用化学研究所 | Temperature adjustment system and purification equipment |
| CN118567416A (en) * | 2024-07-24 | 2024-08-30 | 湖南超弦科技股份有限公司 | PLC balance temperature control method and related equipment for silicon wafer production tube furnace |
| CN118567416B (en) * | 2024-07-24 | 2024-10-18 | 湖南超弦科技股份有限公司 | PLC balance temperature control method and related equipment for silicon wafer production tube furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN213515125U (en) | Integrated temperature control device for process furnace | |
| CN100534766C (en) | Temperature control device of heating system in hot-forming machine for plastic sheet | |
| US20140364994A1 (en) | Method and device for controlling furnace temperature of burning heating furnace | |
| WO2001079942A1 (en) | Controller, temperature regulator and heat treatment apparatus | |
| JP2020521268A (en) | Vacuum sintering furnace capable of controlling heating element and multi-region temperature | |
| CN204595644U (en) | Based on the aluminum-bar heating furnace temperature of combustion automaton of neural network | |
| CN109298735A (en) | The feed-forward and feedback composite control method of differential scanning calorimeter constant heating rates sintering process | |
| CN107145174A (en) | One kind heat treatment vacuum drying oven zone temperature control system | |
| CN203305489U (en) | Mould temperature control system | |
| CN112284152A (en) | Integrated temperature control device and integrated temperature control method for process furnace | |
| CN104049649A (en) | Model control method of heating furnace temperature | |
| JP4533337B2 (en) | Temperature control method for injection molding machine | |
| CN212515496U (en) | Heating temperature control device of CVD equipment | |
| JP3757809B2 (en) | air conditioner | |
| CN110211872B (en) | Diffusion process debugging method capable of improving over-temperature phenomenon of low-pressure diffusion furnace | |
| CN107765730A (en) | A kind of fluidized-bed temperature control method and control device | |
| CN216852386U (en) | Customized temperature field dynamic stable heating module based on electric heating tube array | |
| JPH0422688B2 (en) | ||
| CN203287798U (en) | Multi-temperature-zone temperature control system and reaction chamber | |
| JP2012218418A (en) | Device for correcting temperature distribution of injection molding machine | |
| CN206975521U (en) | Multistage oil temperature balance control device in a kind of heating furnace | |
| CN107877823B (en) | Die head temperature adjustment control system | |
| CN215856460U (en) | Furnace tube temperature control device for oxidation process | |
| CN214528697U (en) | Heating plate and heating device for 3D glass hot bending machine and 3D glass hot bending machine | |
| JPS6035082A (en) | Method for controlling combustion in coke oven |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |