CN203622673U - Diamond scroll saw device for cutting off monocrystalline silicon stick - Google Patents
Diamond scroll saw device for cutting off monocrystalline silicon stick Download PDFInfo
- Publication number
- CN203622673U CN203622673U CN201320870190.3U CN201320870190U CN203622673U CN 203622673 U CN203622673 U CN 203622673U CN 201320870190 U CN201320870190 U CN 201320870190U CN 203622673 U CN203622673 U CN 203622673U
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- Prior art keywords
- diamond
- cutting
- single crystal
- monocrystalline silicon
- silicon single
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- Expired - Lifetime
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 66
- 239000010432 diamond Substances 0.000 title claims abstract description 66
- 238000005520 cutting process Methods 0.000 title claims abstract description 41
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 33
- 229910052710 silicon Inorganic materials 0.000 claims description 33
- 239000010703 silicon Substances 0.000 claims description 33
- 239000013078 crystal Substances 0.000 claims description 31
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 238000003754 machining Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The utility model discloses a diamond scroll saw device for cutting off a monocrystalline silicon stick. The diamond scroll saw device for cutting off the monocrystalline silicon stick comprises a diamond scroll saw for cutting off the monocrystalline silicon stick, the diamond scroll saw comprises two or more annular diamond saw blades, the annular diamond saw blades are tensioned by different guiding wheel sets to form two or more cutting faces, the cutting faces are parallel with each other, the distance between the cutting faces can be adjusted, cutting segments, cut by the annular diamond saw blades, of the monocrystalline silicon stick are located on the same plane parallel with the axis of the monocrystalline silicon stick, and guiding wheels are arranged on the annular diamond saw blades at the two ends of each cutting segment. The diamond scroll saw device for cutting off the monocrystalline silicon stick uses the multiple annular diamond saw blades in parallel to simultaneously cut the monocrystalline silicon stick into multiple segments, makes full use of the characteristics that the annular diamond saw blades operate in single direction, are free of inertia force and move at high speed, and can improve the machining efficiency by three to five times compared with a diamond scroll saw with a single saw blade.
Description
(1) technical field:
The utility model relates to crisp hard nonmetallic materials process equipment, is specially a kind of silicon single crystal rod and blocks diamond wire saw device.
(2) background technology:
Silicon single crystal rod draws after moulding, and length can reach 1.5 meters～2 meters, silicon rod need be blocked into certain length (200 millimeters～300 millimeters), to facilitate following process such as carrying out orientation section.
At present, the technology that is used for blocking silicon single crystal rod has band-saw diamond cutting and diamond fretsaw to cut.Along with the progress of monocrystalline silicon production technology, the diameter of silicon rod is increasing, and maximum gauge can reach 450 millimeters at present.
Silicon single crystal rod blocks and the most generally uses band-saw diamond, and its cutting speed is fast, and cutting efficiency is high, long service life.But band-saw diamond is because saw body has certain width, and when cutting major diameter single crystal silicon rod, saw body easily rocks, and causes cutting surfaces out-of-flatness, has obviously darker ripple glaze, need to carry out surperficial plain grinding processing and just can enter next process.
Diamond fretsaw cutting is the cutting mode of rising in recent years, the long several hundred kilometers of diamond wire, and motion mode is reciprocating, cutting speed is less than 15 metre per second (m/s)s.
Silicon single crystal rod blocks diamond fretsaw and mostly is diamond single line saw, is divided into again normal reciprocating diamond single line saw and waves reciprocating diamond single line saw.
When normal reciprocating diamond fretsaw cutting major diameter single crystal silicon rod, because cutting wire is thinner, cutting speed is lower, and cut surface is large, and the pressure that cutting wire surface diamond particle is carved into monocrystalline silicon is inadequate, occurs the situation that cutting is motionless, until cutting wire disconnects.
And wave the sawing of reciprocating diamond single line while cutting, and cutting wire back and forth movement on the one hand, linear velocity is about 5 metre per second (m/s)s; On the other hand with mainframe oscillating motion, cutting wire cuts monocrystalline silicon in the mode of a contact all the time, under the condition of suitable cutting parameter, wave reciprocating diamond fretsaw and can realize blocking of major diameter single crystal silicon rod, but because cutting wire comes and goes and oscillating motion, cleavage plane surface still has small ripple glaze, and naked eyes can be identified, and cutting efficiency is also lower.
(3) utility model content:
For the deficiency of existing cutting technique, the utility model proposes a kind of silicon single crystal rod and block diamond wire saw device, can in large-scale silicon single crystal rod truncated process, meet the index requests such as surface quality, efficiency, life-span.
The utility model silicon single crystal rod blocks the technical scheme of diamond wire saw device, comprise the diamond fretsaw of cutting single-crystal silicon bar, difference is that described diamond fretsaw comprises the annular diamond wire of two above (comprising two), each annular diamond wire formed respectively two above (comprising two) cut surfaces by different guide wheel group tensionings, each cut surface be parallel to each other and between distance adjustable.
For meeting the requirement of many annular diamond wire synchronous cutting, each annular diamond wire to the cut length of silicon single crystal rod on the same plane parallel with silicon single crystal rod axis.
For keeping stable cutting, the annular diamond wire at described cut length two ends is provided with directive wheel.
Guide wheel number in each guide wheel group can be made as 2 or be made as 3 or be made as 4, even more.
Described guide wheel comprises a driving wheel and a regulating wheel.
The beneficial effects of the utility model:
1, the utility model silicon single crystal rod blocks many parallel annular diamond wires of diamond wire saw device employing and silicon single crystal rod is blocked to multistage simultaneously, fully effectively utilize the characteristic of annular diamond wire one direction, noninertia power, high-speed motion (30 meter per second～50 meter per second), can make working (machining) efficiency compare diamond single line saw and improve 3～5 times.
2, the utility model can not leave cutting cut at the cutting surfaces of silicon single crystal rod, can obtain better cutting surfaces flatness and roughness.
3, in the utility model, every annular diamond wire strides across two, three or four guide wheels, and is independent tensioning, even fracture of wire does not affect the cutting that remains cutting wire yet in cutting process, also can shut down thread-changing.
4, it is convenient and swift that the utility model is changed diamond wire, and all changing all annular diamond wires only needs a few minutes to complete.
(4) accompanying drawing explanation:
Fig. 1 is the structural representation of a kind of embodiment of the utility model.
Fig. 2 is the structural representation of the another kind of embodiment of the utility model.
Fig. 3 is the structural representation of another embodiment of the utility model.
Figure number mark: 1, diamond wire; 2, guide wheel; 3, directive wheel; 4, silicon single crystal rod.
(5) specific embodiment:
Below in conjunction with accompanying drawing illustrated embodiment, the technical solution of the utility model is described further.
The utility model silicon single crystal rod blocks diamond wire saw device and comprises two above diamond fretsaw unit that silicon single crystal rod 4 is blocked, each diamond fretsaw unit comprises an annular diamond wire 1 and corresponding guide wheel group, each annular diamond wire 1 forms cut surface by described guide wheel group tensioning, more than two cut surface is parallel to each other and perpendicular to the axis of silicon single crystal rod 4, each annular diamond wire 1 to the cut length of silicon single crystal rod 4 on the same plane parallel with silicon single crystal rod 4 axis; Each guide wheel group is arranged on each self-corresponding bracing frame, and the distance between bracing frame can be adjusted by movement between two, realizes the distance adjustment between cut surface between two, thereby obtains the silicon single crystal rod 4 of different length section, as shown in Figure 1, Figure 2, Figure 3 shows.
In the utility model structure, each bracing frame provides separately power.
According to different designs requirement, described guide wheel group has the multiple plan of establishment:
1, as shown in Figure 1, described guide wheel group comprises upper and lower two guide wheels 2, and the guide wheel of below 2 is made as to driving wheel, and the guide wheel of top 2 is made as to regulating wheel, and annular diamond wire 1 is provided with upper and lower two directive wheels 3 to the upper/lower terminal of silicon single crystal rod 4 cut length.
2, as shown in Figure 2, described guide wheel group comprises upper and lower two guide wheels 2 and below a guide wheel 2 of centre above, the guide wheel of below 2 is made as to driving wheel, guide wheel below 2 is made as to regulating wheel, and annular diamond wire 1 is provided with upper and lower two directive wheels 3 to the upper/lower terminal of silicon single crystal rod 4 cut length.
3, as shown in Figure 3, described guide wheel group comprises upper and lower two guide wheels 2 and below upper and lower two guide wheels 2 above, below guide wheel 2 is made as driving wheel below, top guide wheel 2 is made as regulating wheel below, and annular diamond wire 1 is provided with upper and lower two directive wheels 3 to the upper/lower terminal of silicon single crystal rod 4 cut length.
Claims (5)
1. silicon single crystal rod blocks diamond wire saw device, comprise the diamond fretsaw of cutting single-crystal silicon bar (4), it is characterized in that: described diamond fretsaw comprises two above annular diamond wires (1), each annular diamond wire (1) forms plural cut surface by different guide wheel group tensionings respectively, each cut surface be parallel to each other and between distance adjustable.
2. silicon single crystal rod according to claim 1 blocks diamond wire saw device, it is characterized in that: each annular diamond wire (1) to the cut length of silicon single crystal rod (4) on the same plane parallel with silicon single crystal rod (4) axis.
3. silicon single crystal rod according to claim 2 blocks diamond wire saw device, it is characterized in that: the annular diamond wire (1) at described cut length two ends is provided with directive wheel (3).
4. block diamond wire saw device according to the silicon single crystal rod described in any one in claim 1～3, it is characterized in that: the number of guide wheel in each guide wheel group (2) is 2 or is 3 or is 4.
5. silicon single crystal rod according to claim 4 blocks diamond wire saw device, it is characterized in that: described guide wheel (2) comprises a driving wheel and a regulating wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320870190.3U CN203622673U (en) | 2013-12-26 | 2013-12-26 | Diamond scroll saw device for cutting off monocrystalline silicon stick |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320870190.3U CN203622673U (en) | 2013-12-26 | 2013-12-26 | Diamond scroll saw device for cutting off monocrystalline silicon stick |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203622673U true CN203622673U (en) | 2014-06-04 |
Family
ID=50809187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320870190.3U Expired - Lifetime CN203622673U (en) | 2013-12-26 | 2013-12-26 | Diamond scroll saw device for cutting off monocrystalline silicon stick |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203622673U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103753716A (en) * | 2013-12-26 | 2014-04-30 | 中国有色桂林矿产地质研究院有限公司 | Diamond fretsaw device for cutting single crystal silicon rod |
| CN105799067A (en) * | 2016-04-22 | 2016-07-27 | 北京微纳精密机械有限公司 | Novel endless diamond wire saw machine tool |
| CN110802754A (en) * | 2019-09-29 | 2020-02-18 | 扬州荣德新能源科技有限公司 | Adjustable guide wheel cutting method for cast single crystal |
| CN110860731A (en) * | 2019-12-11 | 2020-03-06 | 陆兆飞 | Metal pipeline cutting device for machining |
| CN114454363A (en) * | 2021-07-13 | 2022-05-10 | 青岛高测科技股份有限公司 | Silicon rod cutting method, device and system |
-
2013
- 2013-12-26 CN CN201320870190.3U patent/CN203622673U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103753716A (en) * | 2013-12-26 | 2014-04-30 | 中国有色桂林矿产地质研究院有限公司 | Diamond fretsaw device for cutting single crystal silicon rod |
| CN105799067A (en) * | 2016-04-22 | 2016-07-27 | 北京微纳精密机械有限公司 | Novel endless diamond wire saw machine tool |
| CN110802754A (en) * | 2019-09-29 | 2020-02-18 | 扬州荣德新能源科技有限公司 | Adjustable guide wheel cutting method for cast single crystal |
| CN110860731A (en) * | 2019-12-11 | 2020-03-06 | 陆兆飞 | Metal pipeline cutting device for machining |
| CN114454363A (en) * | 2021-07-13 | 2022-05-10 | 青岛高测科技股份有限公司 | Silicon rod cutting method, device and system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: GUILIN BAIRAY PHOTOELECTRIC TECHNOLOGY Co.,Ltd. Assignor: CHINA NONFERROUS METAL (GUILIN)GEOLOGY AND MINING Co.,Ltd. Contract record no.: 2016450000015 Denomination of utility model: Diamond fretsaw device for cutting single crystal silicon rod Granted publication date: 20140604 License type: Exclusive License Record date: 20160808 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140604 |