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CN203498075U - Micro-flow-rate deuterium and helium gas separation device - Google Patents

Micro-flow-rate deuterium and helium gas separation device Download PDF

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Publication number
CN203498075U
CN203498075U CN201320620518.6U CN201320620518U CN203498075U CN 203498075 U CN203498075 U CN 203498075U CN 201320620518 U CN201320620518 U CN 201320620518U CN 203498075 U CN203498075 U CN 203498075U
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deuterium
gas
helium
condensation plate
refrigerator
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曹曾
黄向玫
许正华
蔡潇
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Southwestern Institute of Physics
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Abstract

本实用新型涉及一种微流量氘、氦气体分离的装置,其特征在于:它包括壳体(2),壳体(2)为双开口的T字通道结构,壳体(2)内T字型的垂直方向封装有制冷机(1),壳体(2)内T字型的水平方向内设有冷凝板(4),端口设有障板(5),上端设有上辐射屏(6),障板(5)与制冷机(1)的一级冷头连接,冷凝板(4)与二级冷头连接,下辐射屏(3)套装在制冷机(1)上。所述的冷凝板(4)采用多片非直线流导结构,冷凝板(4)上设有控温组件(7)。本实用新型的优点是,由低温冷凝板把所通过微流量残余气体中的氘气冷凝,而对氦气又不产生吸附作用以达到氘、氦混合气体分离的目的。

Figure 201320620518

The utility model relates to a device for separating deuterium and helium gas with a micro-flow rate, which is characterized in that it includes a shell (2), which is a T-shaped channel structure with double openings, and the T-shaped channel structure inside the shell (2) is A refrigerator (1) is packaged in the vertical direction of the housing (2), a condensation plate (4) is provided in the horizontal direction of the T shape in the housing (2), a baffle (5) is provided at the port, and an upper radiation screen (6) is provided at the upper end ), the baffle (5) is connected to the primary cold head of the refrigerator (1), the condensation plate (4) is connected to the secondary cold head, and the lower radiation shield (3) is set on the refrigerator (1). The condensation plate (4) adopts a multi-piece non-linear conduction structure, and a temperature control component (7) is arranged on the condensation plate (4). The utility model has the advantage that the deuterium gas in the passed micro-flow residual gas is condensed by the low-temperature condensation plate, and does not generate adsorption to the helium gas so as to achieve the purpose of separating the deuterium and helium mixed gas.

Figure 201320620518

Description

一种微流量氘、氦气体分离的装置A device for separating micro-flow deuterium and helium gas

技术领域technical field

本发明属于一种微流量气体分离的装置,具体涉及一种核聚变装置真空检漏技术领域氘、氦混合气体分离的装置。The invention belongs to a micro-flow gas separation device, in particular to a deuterium-helium mixed gas separation device in the technical field of nuclear fusion device vacuum leak detection.

背景技术Background technique

现代托卡马克聚变装置运行中要求严格的实时泄漏检测,由于真空检漏所使用的示踪气体氦与实验工作气体氘的质量数十分接近,通用的氦质谱检漏仪不能分辨两者。托卡马克装置真空室的残余气体中的氘流量一般为10-5-10-8Pa.m3S-1,在这样的本底下用氦检漏仪检测装置的微小真空泄漏将极为困难。为提高检漏系统的灵敏度,需采用选择性抽气和压缩采样技术来抑制托卡马克装置残余气体中的氢同位素本底。低温抽气是一种可能的选择性抽气方法。目前,商用低温泵主要采用涂敷吸附剂的方法来实现低质量数气体(H2,He)的抽除,这种泵对氦气也具有一定抽速,不能实现氘气和氦气的分离。基于以上原因,设计一种不带吸附剂的低温冷凝装置,利用氦气和氘气具有不同的沸点(氘:23.6K,氦:4.2K)的特性,控制装置处于某一温度使氘气凝结而氦气不冷凝,实现氘、氦混合气体的分离来提高托卡马克装置真空检漏系统的灵敏度。Strict real-time leak detection is required in the operation of modern tokamak fusion devices. Since the mass numbers of the tracer gas helium used in vacuum leak detection and the experimental working gas deuterium are very close, the general-purpose helium mass spectrometer leak detector cannot distinguish between the two. The flow rate of deuterium in the residual gas of the vacuum chamber of the tokamak device is generally 10 -5 -10 -8 Pa.m 3 S -1 , under such a background, it will be extremely difficult to detect tiny vacuum leaks of the device with a helium leak detector. In order to improve the sensitivity of the leak detection system, selective pumping and compression sampling techniques are required to suppress the hydrogen isotope background in the residual gas of the tokamak device. Cryogenic pumping is a possible selective pumping method. At present, commercial cryopumps mainly use the method of coating adsorbents to realize the pumping of low-mass gases (H 2 , He). This pump also has a certain pumping speed for helium, and cannot separate deuterium and helium. . Based on the above reasons, a low-temperature condensation device without adsorbent is designed, using the characteristics that helium and deuterium have different boiling points (deuterium: 23.6K, helium: 4.2K), and the control device is at a certain temperature to condense deuterium And helium does not condense, and the separation of deuterium and helium mixed gas is realized to improve the sensitivity of the vacuum leak detection system of the tokamak device.

发明内容Contents of the invention

本发明的目的是提供一种微流量氘、氦气体分离的装置,它能够提高托卡马克装置氘气本底下的氦质谱检漏灵敏度。The object of the present invention is to provide a device for separating deuterium and helium gas with micro-flow, which can improve the sensitivity of helium mass spectrometry leak detection under the background of deuterium gas in a tokamak device.

本发明是这样实现的,一种微流量氘、氦气体分离的装置,它包括壳体,壳体为双开口的T字通道结构,壳体内T字型的垂直方向封装有制冷机,壳体内T字型的水平方向内设有冷凝板,端口设有障板,上端设有上辐射屏,障板与制冷机的一级冷头连接,冷凝板与二级冷头连接,下辐射屏套装在制冷机上。The present invention is realized in this way, a device for separating deuterium and helium gas with micro-flow, which includes a shell, the shell is a T-shaped channel structure with double openings, a refrigerator is packaged in the vertical direction of the T-shaped inside the shell, and the inside of the shell is The T-shaped horizontal direction is equipped with a condensation plate, the port is equipped with a baffle, and the upper end is equipped with an upper radiation screen. The baffle is connected to the primary cold head of the refrigerator, the condensation plate is connected to the secondary cold head, and the lower radiation screen is set. on the refrigerator.

所述的冷凝板采用多片非直线流导结构,冷凝板上设有控温组件。The condensation plate adopts a multi-piece non-linear conduction structure, and a temperature control component is arranged on the condensation plate.

本发明的优点是,由低温冷凝板把所通过微流量残余气体中的氘气冷凝,而对氦气又不产生吸附作用以达到氘、氦混合气体分离的目的。The advantage of the present invention is that the deuterium gas in the passing micro-flow residual gas is condensed by the low-temperature condensation plate, and the helium gas is not adsorbed so as to achieve the purpose of separating the deuterium-helium mixed gas.

附图说明Description of drawings

图1为本发明所提供的一种微流量氘、氦气体分离的装置示意图;Fig. 1 is a kind of microflow deuterium provided by the present invention, the device schematic diagram of helium gas separation;

图2为冷凝板结构示意图。Figure 2 is a schematic diagram of the structure of the condensation plate.

图中:1制冷机,2壳体,3下辐射屏,4冷凝板,5障板,6上辐射屏,7控温组件。In the figure: 1 refrigerator, 2 shell, 3 lower radiation screen, 4 condensation plate, 5 baffle plate, 6 upper radiation screen, 7 temperature control components.

具体实施方式Detailed ways

下面结合附图和实施例对本发明进行详细介绍:The present invention is described in detail below in conjunction with accompanying drawing and embodiment:

如图1和图2所示,一种微流量氘、氦气体分离的装置包括壳体2,制冷机1,辐射屏,障板5,冷凝板4,控温组件7等部件;壳体2为双开口的T字通道结构,气流从进气口端引入,它的通径为¢150的双开口T字型通道结构壳体2,水平方向为进、出气口,可以与其他管道或真空系统串联。依次通过障板5、冷凝板4,从出气口端流出。障板5与制冷机1的一级冷头连接,冷凝板4与二级冷头连接。冷凝4板采用多片非直线流导结构,气体流既可以通过也能被冷凝。冷凝板4上安装温度控制点,配置加热组件,冷凝板温度可以精确控制。冷凝板4上不涂敷吸附剂,在6K-16K范围,所通过气体流中的氘气被凝结,而氦气不被凝结。As shown in Figures 1 and 2, a device for separating deuterium and helium gas at a micro-flow rate includes a housing 2, a refrigerator 1, a radiation shield, a baffle 5, a condensation plate 4, and a temperature control assembly 7; the housing 2 It is a double-opening T-shaped channel structure, and the airflow is introduced from the air inlet. Its diameter is a double-opening T-shaped channel structure shell 2 of ¢150, and the horizontal direction is the air inlet and outlet. It can be connected with other pipes or vacuum The system is connected in series. Pass through the baffle plate 5 and the condensation plate 4 in turn, and flow out from the gas outlet. The baffle plate 5 is connected with the primary cold head of the refrigerator 1, and the condensation plate 4 is connected with the secondary cold head. The condensing plate adopts a multi-piece non-linear conduction structure, and the gas flow can pass through and be condensed. A temperature control point is installed on the condensing plate 4, and a heating assembly is configured so that the temperature of the condensing plate can be precisely controlled. The condensation plate 4 is not coated with adsorbent, and in the range of 6K-16K, the deuterium gas in the passing gas flow is condensed, but the helium gas is not condensed.

采用冷源采用4.2K制冷机1,冷头封装在壳体2内T字型的垂直方向,其一级作为下辐射屏3、上辐射屏6和障板5的冷源,提供77K温度,二级作为低温冷凝板4的冷源,最低温度5K。The cold source adopts a 4.2K refrigerator 1, and the cold head is packaged in the vertical direction of the T shape in the shell 2, and its first stage is used as a cold source for the lower radiation screen 3, the upper radiation screen 6 and the baffle plate 5, providing a temperature of 77K. The second stage is used as the cold source of the low-temperature condensation plate 4, and the minimum temperature is 5K.

冷凝板4由5片平行的直径为¢120、厚度2毫米的镀亮镍无氧铜板组成,并列安装在传热板上,总面积为1130cm2。传热板位于T型水平中平面,与二级冷头直接接触。铜板上开若干¢3的通气孔,且每两片板的通气孔错位排列,以形成非直线型流导结构。由于气体为微流量,不考虑流导对气流的影响。多片错孔的设计用来增大氘气与冷凝板的接触几率,提高冷凝效率。The condensation plate 4 is composed of 5 parallel bright nickel-plated oxygen-free copper plates with a diameter of ¢120 and a thickness of 2 mm, which are installed side by side on the heat transfer plate, with a total area of 1130 cm 2 . The heat transfer plate is located in the T-shaped horizontal mid-plane and is in direct contact with the secondary cold head. A number of ¢3 air holes are opened on the copper plate, and the air holes of every two plates are staggered to form a non-linear conduction structure. Since the gas is a micro-flow rate, the influence of the conductance on the airflow is not considered. The design of multi-piece staggered holes is used to increase the contact probability of deuterium gas with the condensation plate and improve the condensation efficiency.

为避免冷凝板不受外界的直接热辐射,冷凝板用辐射屏包围起来,在进气口端辐射屏前加上障板5。障板采用百叶窗结构,同时可以对被抽气体进行预冷。In order to prevent the condensing plate from being subjected to direct heat radiation from the outside, the condensing plate is surrounded by a radiation screen, and a baffle 5 is added in front of the radiation screen at the air inlet end. The baffle adopts a louver structure and can pre-cool the pumped gas at the same time.

为了装配的方便,辐射屏采用两级连接方式设计,即设计为上下辐射屏,上辐射屏6装入后与下辐射屏3通过螺钉固定。For the convenience of assembly, the radiation screen adopts a two-level connection design, that is, it is designed as an upper and lower radiation screen, and the upper radiation screen 6 is installed and fixed with the lower radiation screen 3 by screws.

在第一片冷凝板边缘(最靠近冷头)安装一个温度控制点(温度传感器和加热组件),采用温控仪精确采集并控制低温冷凝板4的温度。温度传感器精度为0.1K,最近和最远端的冷凝板温度差小于1K。对冷凝板设定某一温度后,温控仪通过调节加热组件的输出功率,可维持冷凝板温度稳定。冷凝板温度调节范围为:5K-30K,而氘气有效凝结而氦气不凝结的温度范围为:6K-16K。A temperature control point (temperature sensor and heating component) is installed on the edge of the first condensing plate (closest to the cold head), and the temperature of the low-temperature condensing plate 4 is accurately collected and controlled by a temperature controller. The accuracy of the temperature sensor is 0.1K, and the temperature difference between the nearest and the farthest condensation plate is less than 1K. After setting a certain temperature for the condensing plate, the temperature controller can maintain the temperature of the condensing plate stable by adjusting the output power of the heating component. The temperature adjustment range of the condensation plate is: 5K-30K, and the temperature range in which the deuterium gas can effectively condense but the helium gas does not condense is: 6K-16K.

在一个具体实施例中,微流量氘、氦气体分离的装置的进、出口端分别与同口径真空腔室串联,真空腔室上安装有真空计、高分辨四极质谱仪和流量计等测量工具。出口端真空腔室连接分子泵辅助抽气。In a specific embodiment, the inlet and outlet ends of the device for deuterium and helium gas separation at micro-flow are respectively connected in series with a vacuum chamber of the same caliber, and a vacuum gauge, a high-resolution quadrupole mass spectrometer and a flow meter are installed on the vacuum chamber tool. The vacuum chamber at the outlet end is connected to a molecular pump for auxiliary pumping.

将冷凝板温度设定为10K,一个氘氦比例为10:1的混合气体样品从进口端的真空腔室中引入,先通过障板气体样品被预冷,然后再通过冷凝板。每通过一片冷凝板,将有部分氘气被凝结。由于出口端的真空腔室由分子泵抽气,通过冷凝板的气体样本将向出口端的真空腔室运动。测量结果表明通过装置后,该样品氘氦比例变为约1:1,其中氦气流量并没有减小,实现了混合气体中氘气的有效凝结。The temperature of the condensation plate is set to 10K, and a mixed gas sample with a deuterium-helium ratio of 10:1 is introduced from the vacuum chamber at the inlet end, the gas sample is pre-cooled through the baffle plate, and then passed through the condensation plate. Every time it passes through a condensing plate, some deuterium gas will be condensed. Since the vacuum chamber at the outlet end is evacuated by the molecular pump, the gas sample passing through the condensation plate will move toward the vacuum chamber at the outlet end. The measurement results show that after passing through the device, the ratio of deuterium to helium in the sample becomes about 1:1, and the helium flow rate does not decrease, which realizes the effective condensation of deuterium in the mixed gas.

在另一个实施例中,进口端的真空腔室与托卡马克装置真空室连接,出口端分子泵的前级连接了氦检漏仪。将冷凝板温度设定为10K,从托卡马克装置所引入残余气体中质量数为4(氘、氦混合气体)的检漏仪本底信号,由2.7×10-7Pa.m3S-1降低为2.2×10-8Pa.m3S-1,既氦检漏仪的灵敏度提高了一个数量级。In another embodiment, the vacuum chamber at the inlet end is connected to the vacuum chamber of the tokamak device, and the front stage of the molecular pump at the outlet end is connected with a helium leak detector. Set the temperature of the condensing plate to 10K, and the background signal of the leak detector with a mass number of 4 (deuterium and helium mixed gas) in the residual gas introduced by the tokamak device is obtained from 2.7×10 -7 Pa.m 3 S - 1 is reduced to 2.2×10 -8 Pa.m 3 S -1 , which means that the sensitivity of the helium leak detector is increased by an order of magnitude.

Claims (2)

1. the device of a micrometeor deuterium, helium gas separation, it is characterized in that: it comprises housing (2), housing (2) is the T word channel architecture of two openings, the vertical direction of the interior T font of housing (2) is packaged with refrigerator (1), in the horizontal direction of the interior T font of housing (2), be provided with cold plate (4), port is provided with baffle (5), upper end is provided with radiation screen (6), baffle (5) is connected with the one-level cold head of refrigerator (1), cold plate (4) is connected with secondary cold head, and lower radiation screen (3) is sleeved on refrigerator (1).
2. the device of a kind of micrometeor deuterium as claimed in claim 1, helium gas separation, is characterized in that: described cold plate (4) adopts multi-disc non-rectilinear conductance structure, and cold plate (4) is provided with temperature-controlling component (7).
CN201320620518.6U 2013-10-09 2013-10-09 Micro-flow-rate deuterium and helium gas separation device Expired - Lifetime CN203498075U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104555926A (en) * 2013-10-09 2015-04-29 核工业西南物理研究院 Micro-flow deuterium and helium gas separation device
CN107243245A (en) * 2017-07-31 2017-10-13 赣州市恒源科技股份有限公司 A kind of neodymium iron boron waste material reclaims exhaust gas processing device and its control method
CN108163810A (en) * 2017-12-26 2018-06-15 中国工程物理研究院上海激光等离子体研究所 For the deuterium purifying plant and its method of purification of II device of high power laser of God Light
CN108854137A (en) * 2018-08-30 2018-11-23 杭州赛威斯真空技术有限公司 Cold screen, organic matter sublimation purification equipment and its method of purification equipped with the cold screen
CN110652873A (en) * 2019-09-26 2020-01-07 电子科技大学 Tubular hydrogen isotope extraction pump based on barium-zirconium ceramic

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104555926A (en) * 2013-10-09 2015-04-29 核工业西南物理研究院 Micro-flow deuterium and helium gas separation device
CN104555926B (en) * 2013-10-09 2016-08-17 核工业西南物理研究院 The device that a kind of micrometeor deuterium, helium gas separate
CN107243245A (en) * 2017-07-31 2017-10-13 赣州市恒源科技股份有限公司 A kind of neodymium iron boron waste material reclaims exhaust gas processing device and its control method
CN107243245B (en) * 2017-07-31 2023-07-04 赣州市恒源科技股份有限公司 Neodymium iron boron waste recycling tail gas treatment device and control method thereof
CN108163810A (en) * 2017-12-26 2018-06-15 中国工程物理研究院上海激光等离子体研究所 For the deuterium purifying plant and its method of purification of II device of high power laser of God Light
CN108854137A (en) * 2018-08-30 2018-11-23 杭州赛威斯真空技术有限公司 Cold screen, organic matter sublimation purification equipment and its method of purification equipped with the cold screen
CN110652873A (en) * 2019-09-26 2020-01-07 电子科技大学 Tubular hydrogen isotope extraction pump based on barium-zirconium ceramic

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