CN206559258U - A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force - Google Patents
A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force Download PDFInfo
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- CN206559258U CN206559258U CN201720065487.0U CN201720065487U CN206559258U CN 206559258 U CN206559258 U CN 206559258U CN 201720065487 U CN201720065487 U CN 201720065487U CN 206559258 U CN206559258 U CN 206559258U
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Abstract
The utility model is related to a kind of accurate piezoelectric actuator of the adjustable parasitic inertia motion formula of pretightning force, belongs to Precision Machining field.Mainly it is made up of accurate pretightning force adjustment unit, piezoelectricity fold stack driver unit, linear motion unit.By way of adjusting pretightning force position of platform manually, the pretightning force completed between driver and driven object is finely tuned, and by way of piezoelectric stack two paths of signals and clock signal are combined, piezoelectric stack is set to complete elongation, contractive action according to specified sequential, to realize the stepwise motion of driven object.The utility model can be applied to microscopic biological technology, large scale integrated circuit manufacture, micro-/to receive the fields such as micromanipulation robot, MEMS.Have the advantages that structure novelty, working stability, control efficiency are high, delivery stroke is big, output accuracy is high.
Description
Technical field
The utility model is related to a kind of accurate piezoelectric actuator, more particularly to a kind of adjustable parasitic inertia motion formula of pretightning force
Accurate piezoelectric actuator, can be applied to microscopic biological technology, large scale integrated circuit manufacture, micro-/to receive micromanipulation robot, micro-
The fields such as Mechatronic Systems.
Background technology
In recent years, with the development of science and technology, research of the mankind to microscopic fields is more and more deeper.Micro mechanical technology, it is micro-/
Nano measurement technology has become the hot topic of nowadays high-technology field, and is driven with micro-/piezoelectricity of rank positioning precision received
Dynamic technology is even more this core that/receive processing, micro-/is received in many high sophisticated technology fields such as operation, precision optics, Aero-Space slightly
Heart technology, the development of these fields rapidly proposes higher requirement to its core technology.Researcher goes all out in research performance
More excellent high-precision drive device, makes it realize the other movement output of micro/nano level in less space, but these
Drive device often because the delivery stroke of piezoelectric element is smaller, seriously limits piezoelectric driving technology in more Piezoelectric Driving skills
The application in art field.In addition, for some traditional inertial piezoelectric drive devices, often because of drive device and driven object
Between pretightning force it is unadjustable, and can not efficiently meet tribology principle driving requirement.Therefore, design one kind can have concurrently it is micro-/receive
The other height output precision of meter level and larger displacement output stroke characteristic, and driver and the adjustable piezoelectricity of driven object pretightning force can be realized
Drive device is considerable.
The content of the invention
The purpose of this utility model is to provide a kind of adjustable parasitic inertia motion formula of pretightning force accurate piezoelectric actuator, solved
The above mentioned problem that prior art of having determined is present.The utility model is that a kind of structure is novel, and delivery stroke is big, output accuracy is high, tool
There is the friction inertia drive of pretightning force adjustable function between driver and driven object.The utility model can be by adjusting manually
The mode of pretightning force position of platform is saved, the pretightning force completed between driver and driven object is finely tuned, and can pass through piezoelectric stack
The mode that two paths of signals and clock signal are combined, makes piezoelectric stack complete elongation, contractive action according to specified sequential, with reality
The stepwise motion of existing driven object.
To achieve the above object, the utility model provides a kind of adjustable parasitic inertia motion formula of pretightning force accurate Piezoelectric Driving
Device.Including accurate pretightning force adjustment unit, piezoelectricity fold stack driver unit, linear motion unit；Wherein, accurate pretightning force adjustment
Platform is fixed by screws on pedestal 1, and piezoelectricity fold stack driver unit is arranged on cushion block 2 by screw, and linear motion is single
Member is connected by screw, on pedestal 1.
Described accurate pretightning force adjustment unit, adjusts handle 5, linear ball guide rail 3, translation stage 4 by micrometer and constitutes；
Described micrometer adjustment handle 5 is connected by screw thread pair with linear ball guide rail 3；Described linear ball guide rail 3 passes through spiral shell
Line pair is engaged with translation stage 4, can drive translation stage 4 along horizontal direction easy motion；Described translation stage 4 is locked by screw
The tight top surface for being arranged on linear ball guide rail 3；Accurate pretightning force adjustment unit adjusts handle 5 by adjusting micrometer, drives flat
The easy motion of moving stage 4 realizes that the fine setting to pretightning force is acted on.
Described piezoelectricity fold stack driver unit is by Performance of Right-Angle Flexure Hinge 6, piezoelectric stack I7, right circular flexure hinge 8, piezoelectricity
II9 compositions are stacked, wherein described Performance of Right-Angle Flexure Hinge 6 and right circular flexure hinge 8 is symmetrical structure, are fixed by screws in
On cushion block 2；Described piezoelectric stack I7 and piezo stack II9 is respectively embedded into installed in Performance of Right-Angle Flexure Hinge 6 and right circular flexure hinge
In 8, and by scale copper pretension, when piezoelectric stack II9, which is powered, to be extended, right circular flexure hinge 8 deforms, produce along
The hunt effect of the Central Symmetry direction of principal axis of Performance of Right-Angle Flexure Hinge 6, while when piezoelectric stack I7 is powered and extended, Performance of Right-Angle Flexure Hinge
6 are deformed, and pull right circular flexure hinge 8 and piezoelectric stack II9 to be moved together along symmetrical direction of principal axis, and realization is posted simple chain
The enlarging function of raw movement output displacement, passes through the sequential to piezoelectric stack I7 and piezo stack II9 drive signals and two paths of signals
Control, realizes big displacement, high response frequency, the output of high speed.
Described linear motion unit is by line slideway 13 and corresponding guide rail slide block 12, brake pad 10, reflector block
11 compositions, wherein described line slideway 13 is fixed by screws on pedestal 1；Described guide rail slide block 12 is fixed by screw
On line slideway 13, brake pad 10 can be driven to move；Described brake pad 10 is connected by screw with guide rail slide block 10, is passed through
The side-friction force that piezoelectric actuator unit is produced to it, is moved along line slideway 13；It is stained with described reflector block 11 flat
Face mirror, is easy to laser displacement sensor 14 to receive reflection light and monitored in real time to its movement effects, reflector block 11 passes through
Screw is fixed on brake pad 10, as brake pad 10 is moved horizontally along line slideway 13 together.
The another object of utility model is to provide a kind of adjustable parasitic inertia motion formula of pretightning force accurate piezoelectric actuator
Method of testing, piezoelectric stack I7 and piezo stack II9 are respectively embedded into installed in Performance of Right-Angle Flexure Hinge 6 and right circular flexure hinge 8
Interior, when piezoelectric stack II9, which is powered, to be extended, straight round flexible hinge 8 deforms along the piezoelectric stack II9 directions extended,
So as to produce clamping action to brake pad 10, straight round flexible hinge 8 will also produce one along the direction of line slideway 13 simultaneously
Hunt effect, direction of the driving brake pad 10 along line slideway 13 is moved；In addition, when piezoelectric stack I7 is powered and extended,
Performance of Right-Angle Flexure Hinge 6 will deform along the piezoelectric stack I7 directions extended, pull right circular flexure hinge 8 and piezoelectric stack
II9 is moved along the direction of piezoelectric stack I7 energization elongations together, while brake pad 10 is produced using right circular flexure hinge 8
Frictional force so that brake pad 10 takes place along the movement of guide rail direction.
Described piezoelectric stack I7 and piezo stack II9, is used as drive signal, in conjunction with two by sawtooth voltage signal
The SECO of road signal, realizes that the big stroke of brake pad 10 moves along a straight line, and its theoretical stroke depends on the row of line slideway 13
Journey, realizes that the concrete operation step of driven object stepwise motion is as follows：
A. micrometer adjustment handle 5 is manually adjusted, makes translation stage 4 drive piezoelectricity fold stack driver unit slowly close to friction
Block 13, until brake pad 10 on the circular arc driving contact of the one end of right circular flexure hinge 8；
B. piezoelectric stack I7 and piezo stack II9 is powered and slowly extended, and piezo stack II7 produces clamping action to brake pad 10,
Because elastic deformation occurs for Performance of Right-Angle Flexure Hinge 6, piezoelectric stack I7 energization elongation pulls on right circular flexure hinge 8 and piezoelectricity
II9 is stacked to move along the direction of piezoelectric stack I7 energization elongations together, and brake pad 10 is produced using piezo stack II9
Clamping action, drawing friction block 10 moves a small step-length along line slideway 13；
C. piezoelectric stack I7 and the quick dead electricity of piezo stack II9 and initial position is retracted into, in the presence of inertia force, friction
Block 10 substantially remains in the position driven when piezoelectric stack I7 and piezo stack II9 maximum elongations；
D. repeat the above steps, realize the big stroke linear motion of brake pad (13) step-by-step movement.
The beneficial effects of the utility model are：Driving can be realized by way of adjusting pretightning force position of platform manually
Between device and driven object pretightning force fine setting, and can by way of piezoelectric stack two paths of signals and clock signal are combined,
Piezoelectric stack is set to complete elongation, contractive action according to specified sequential, can to realize the stepwise motion of driven object big displacement
Applied to microscopic biological technology, large scale integrated circuit manufacture, micro-/to receive the fields such as micromanipulation robot, MEMS.This
Utility model is micro- to China/receive processing, micro-/receives the development in many high sophisticated technology fields such as operation, precision optics, Aero-Space
There is extremely important reference significance.
Brief description of the drawings
Accompanying drawing described herein as is used for providing further understanding to of the present utility model, constitutes the part of the application, this
The illustrative example of utility model and its illustrate be used for explain the utility model, do not constitute to improper limit of the present utility model
It is fixed.
Fig. 1 is overall structure diagram of the present utility model；
Fig. 2 is flexible hinge structure schematic diagram of the present utility model；
Fig. 3 is that flexible hinge of the present utility model deforms schematic diagram；
Fig. 4 is laser displacement operation principle schematic diagram of the present utility model；
In figure：1st, pedestal；2nd, cushion block；3rd, linear ball guide rail；4th, translation stage；5th, micrometer adjustment handle；6th, right angle is soft
Property hinge；7th, piezoelectric stack I；8th, right circular flexure hinge；9th, piezoelectric stack II；10th, brake pad；11st, reflector block；12nd, guide rail is slided
Block；13rd, line slideway；14th, laser displacement sensor
Embodiment
Detailed content of the present utility model and its embodiment are further illustrated below in conjunction with the accompanying drawings.
Referring to shown in Fig. 1 to Fig. 4, the utility model provides a kind of accurate piezoelectricity of the adjustable parasitic inertia motion formula of pretightning force and driven
Dynamic device.Including accurate pretightning force adjustment unit, piezoelectricity fold stack driver unit, linear motion unit；Wherein, accurate pretightning force is adjusted
Leveling platform is fixed by screws on pedestal 1, and piezoelectricity fold stack driver unit is arranged on cushion block 2 by screw, linear motion
Unit is connected by screw, on pedestal 1.
Described accurate pretightning force adjustment unit, adjusts handle 5, linear ball guide rail 3, translation stage 4 by micrometer and constitutes；
Described micrometer adjustment handle 5 is connected by screw thread pair with linear ball guide rail 3；Described linear ball guide rail 3 passes through spiral shell
Line pair is engaged with translation stage 4, can drive translation stage 4 along horizontal direction easy motion；Described translation stage 4 is locked by screw
The tight top surface for being arranged on linear ball guide rail 3；Accurate pretightning force adjustment unit adjusts handle 5 by adjusting micrometer, drives flat
The easy motion of moving stage 4 realizes that the fine setting to pretightning force is acted on.
It is shown in Figure 3, described piezoelectricity fold stack driver unit by Performance of Right-Angle Flexure Hinge 6, piezoelectric stack I7, directly justify soft
Property hinge 8, piezoelectric stack II9 compositions, wherein described Performance of Right-Angle Flexure Hinge 6 and right circular flexure hinge 8 is symmetrical structure, lead to
Screw is crossed to be fixed on cushion block 2；Described piezoelectric stack I7 and piezo stack II9 is respectively embedded into installed in the He of Performance of Right-Angle Flexure Hinge 6
In right circular flexure hinge 8, and pass through scale copper pretension.When piezoelectric stack II9, which is powered, to be extended, right circular flexure hinge 8 becomes
Shape, produces the hunt effect along the Central Symmetry direction of principal axis of Performance of Right-Angle Flexure Hinge 6, while when piezoelectric stack I7 is powered and extended,
Performance of Right-Angle Flexure Hinge 6 deforms, and pulls right circular flexure hinge 8 and piezoelectric stack II9 to be moved together along symmetrical direction of principal axis, real
Now to the enlarging function of simple chain hunt effect output displacement, by piezoelectric stack I7 and piezo stack II9 drive signals and two
The SECO of road signal, realizes big displacement, high response frequency, the output of high speed.
Shown in Figure 4, described linear motion unit is by line slideway 13 and corresponding guide rail slide block 12, friction
Block 10, reflector block 11 are constituted, wherein described line slideway 13 is fixed by screws on pedestal 1；Described guide rail slide block 12
It is fixed by screws on line slideway 13, brake pad 10 can be driven to move；Described brake pad 10 is slided by screw and guide rail
Block 12 is connected, and the side-friction force produced by piezoelectric actuator unit to it is moved along line slideway 13；Described is reflective
Level crossing is stained with block 11, is easy to laser displacement sensor 14 to receive reflection light and monitored in real time to its movement effects,
Reflector block 11 is fixed by screws on brake pad 10, as brake pad 10 is moved horizontally along line slideway 13 together.
Preferred embodiment of the present utility model is the foregoing is only, the utility model is not limited to, for ability
For the technical staff in domain, the utility model can have various modifications and variations.All any modifications made to the utility model,
Equivalent substitution, improvement etc., should be included within protection domain of the present utility model.
Claims (4)
1. a kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force, it is characterised in that：Adjusted including accurate pretightning force
Whole unit, piezoelectricity fold stack driver unit, linear motion unit；Wherein, accurate pretightning force adjustment platform is fixed by screws in
On pedestal (1), piezoelectricity fold stack driver unit is arranged on cushion block (2) by screw, and linear motion unit is connected by screw,
On pedestal (1).
2. a kind of accurate piezoelectric actuator of the adjustable parasitic inertia motion formula of pretightning force according to claim 1, its feature exists
In：Described accurate pretightning force adjustment unit, handle (5), linear ball guide rail (3), translation stage (4) group are adjusted by micrometer
Into；Described micrometer adjustment handle (5) is connected by screw thread pair with linear ball guide rail (3)；Described linear ball guide rail
(3) it is engaged by screw thread pair with translation stage (4), translation stage (4) can be driven along horizontal direction easy motion；Described translation
Platform (4) is arranged on the top surface of linear ball guide rail (3) by screw lock；Accurate pretightning force adjustment unit is by adjusting micrometer
Handle (5) is adjusted, drives translation stage (4) easy motion to realize that the fine setting to pretightning force is acted on.
3. a kind of accurate piezoelectric actuator of the adjustable parasitic inertia motion formula of pretightning force according to claim 1, its feature exists
In：Described piezoelectricity fold stack driver unit is by Performance of Right-Angle Flexure Hinge (6), piezoelectric stack I (7), right circular flexure hinge (8), pressure
Electricity stacks II (9) compositions, wherein described Performance of Right-Angle Flexure Hinge (6) and right circular flexure hinge (8) is symmetrical structure, passes through spiral shell
Nail is fixed on cushion block (2)；Described piezoelectric stack I (7) and piezo stack II (9) is respectively embedded into installed in Performance of Right-Angle Flexure Hinge
(6) and in right circular flexure hinge (8), and by scale copper pretension, when piezoelectric stack II (9), which is powered, to be extended, flexible hinge is directly justified
Chain (8) deforms, and produces the hunt effect along right circular flexure hinge (8) Central Symmetry direction of principal axis, while as piezoelectric stack I
(7) during energization elongation, Performance of Right-Angle Flexure Hinge (6) deforms, and pulls right circular flexure hinge (8) and piezoelectric stack II (9) together
Moved along symmetrical direction of principal axis, the enlarging function to simple chain hunt effect output displacement is realized, by piezoelectric stack I (7)
With the SECO of piezo stack II (9) drive signals and two paths of signals, big displacement, high response frequency, the output of high speed are realized.
4. a kind of accurate piezoelectric actuator of the adjustable parasitic inertia motion formula of pretightning force according to claim 1, its feature exists
In：Described linear motion unit is by line slideway (13) and corresponding guide rail slide block (12), brake pad (10), reflector block
(11) constitute, wherein described line slideway (13) is fixed by screws on pedestal (1)；Described guide rail slide block (12) passes through
Screw is fixed on line slideway (13), and brake pad (10) can be driven mobile；Described brake pad (10) passes through screw and guide rail
Sliding block (12) is connected, the side-friction force produced by piezoelectric actuator unit to it, is moved along line slideway (13)；It is described
Reflector block (11) on be stained with level crossing, be easy to laser displacement sensor (14) receive reflection light and to its movement effects carry out
Monitoring in real time, reflector block (11) is fixed by screws on brake pad (10), as brake pad (10) is together along line slideway
(13) move horizontally.
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| CN201720065487.0U CN206559258U (en) | 2017-01-19 | 2017-01-19 | A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force |
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| CN201720065487.0U CN206559258U (en) | 2017-01-19 | 2017-01-19 | A kind of accurate piezoelectric actuator of adjustable parasitic inertia motion formula of pretightning force |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107834896A (en) * | 2017-12-25 | 2018-03-23 | 吉林大学 | Pre- frictional force regulates and controls the apparatus and method of parasitic principle piezoelectric actuator output performance |
| CN109194191A (en) * | 2018-07-20 | 2019-01-11 | 吉林大学 | With the quantitatively adjustable adaptive big load Piexoelectric actuator for pre-tightening function |
| CN109655112A (en) * | 2019-01-25 | 2019-04-19 | 嘉兴学院 | Adjustable measuring device that is a kind of while measuring piezoelectric actuator load and output displacement |
| CN109756148A (en) * | 2019-03-20 | 2019-05-14 | 唐金岩 | The apparatus and method of active suppression parasitic motion principle piezoelectric actuator rollback movement |
| CN109814029A (en) * | 2019-03-22 | 2019-05-28 | 吉林大学 | For the test device and method of stick-slip type linear piezoelectric actuator |
| CN109921680A (en) * | 2019-04-25 | 2019-06-21 | 宁波大学 | A kind of stick-slip inertia linear actuator becoming pretightning force |
| CN110011564A (en) * | 2019-05-05 | 2019-07-12 | 中国人民解放军陆军工程大学 | Clamp type giant magnetostrictive linear driving device |
| CN110061654A (en) * | 2019-04-25 | 2019-07-26 | 宁波大学 | A kind of change pretightning force stick-slip inertia linear actuator of abnormity texture friction regulation |
| CN110829882A (en) * | 2019-07-25 | 2020-02-21 | 浙江师范大学 | T-shaped piezoelectric driving device |
| CN110829880A (en) * | 2019-07-25 | 2020-02-21 | 浙江师范大学 | T-shaped creeping type piezoelectric driving platform |
| CN112865596A (en) * | 2021-03-30 | 2021-05-28 | 吉林大学 | Large-stroke piezoelectric inertia driving platform |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107834896A (en) * | 2017-12-25 | 2018-03-23 | 吉林大学 | Pre- frictional force regulates and controls the apparatus and method of parasitic principle piezoelectric actuator output performance |
| CN109194191B (en) * | 2018-07-20 | 2023-12-26 | 吉林大学 | Large-load piezoelectric driving device with quantitative adjustable self-adaptive pre-tightening function |
| CN109194191A (en) * | 2018-07-20 | 2019-01-11 | 吉林大学 | With the quantitatively adjustable adaptive big load Piexoelectric actuator for pre-tightening function |
| CN109655112A (en) * | 2019-01-25 | 2019-04-19 | 嘉兴学院 | Adjustable measuring device that is a kind of while measuring piezoelectric actuator load and output displacement |
| CN109756148A (en) * | 2019-03-20 | 2019-05-14 | 唐金岩 | The apparatus and method of active suppression parasitic motion principle piezoelectric actuator rollback movement |
| CN109814029A (en) * | 2019-03-22 | 2019-05-28 | 吉林大学 | For the test device and method of stick-slip type linear piezoelectric actuator |
| CN110061654A (en) * | 2019-04-25 | 2019-07-26 | 宁波大学 | A kind of change pretightning force stick-slip inertia linear actuator of abnormity texture friction regulation |
| CN109921680A (en) * | 2019-04-25 | 2019-06-21 | 宁波大学 | A kind of stick-slip inertia linear actuator becoming pretightning force |
| CN110011564A (en) * | 2019-05-05 | 2019-07-12 | 中国人民解放军陆军工程大学 | Clamp type giant magnetostrictive linear driving device |
| CN110011564B (en) * | 2019-05-05 | 2023-10-03 | 中国人民解放军陆军工程大学 | Clamp type giant magnetostrictive linear driving device |
| CN110829882A (en) * | 2019-07-25 | 2020-02-21 | 浙江师范大学 | T-shaped piezoelectric driving device |
| CN110829880A (en) * | 2019-07-25 | 2020-02-21 | 浙江师范大学 | T-shaped creeping type piezoelectric driving platform |
| CN110829880B (en) * | 2019-07-25 | 2024-02-20 | 浙江师范大学 | T-shaped crawling piezoelectric driving platform |
| CN110829882B (en) * | 2019-07-25 | 2024-04-26 | 浙江师范大学 | T-shaped piezoelectric driving device |
| CN112865596A (en) * | 2021-03-30 | 2021-05-28 | 吉林大学 | Large-stroke piezoelectric inertia driving platform |
| CN112865596B (en) * | 2021-03-30 | 2024-04-12 | 吉林大学 | Large-stroke piezoelectric inertia driving platform |
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