CN104362890B - Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement - Google Patents
Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement Download PDFInfo
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- CN104362890B CN104362890B CN201410719608.XA CN201410719608A CN104362890B CN 104362890 B CN104362890 B CN 104362890B CN 201410719608 A CN201410719608 A CN 201410719608A CN 104362890 B CN104362890 B CN 104362890B
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Abstract
The invention discloses an inertia stick-slip trans-scale precision movement platform capable of achieving the bidirectional movement. The platform comprises a base plate, a supporting module positioned on the base plate, and two movement modules symmetrically arranged at two sides of the supporting module, wherein each movement module comprises a balancing block, a piezoelectric ceramic actuator and a main mass block; the piezoelectric ceramic actuator comprises a positive electrode and a negative electrode which are used for being in connection with driving signals; the driving signals are a combination of a linear voltage and a nonlinear voltage, and the change rate of the nonlinear voltage is gradually increased. The inertia stick-slip multi-scale precision movement platform disclosed by the invention has a simple structure, can quickly achieve the precision positioning of large travel as well as multi-degree-of-freedom driving, and a special position retainer is not required.
Description
Technical field
The present invention relates to precise motion technical field, more particularly to a kind of inertia stick-slip formula realizing bidirectional-movement is across chi
Degree precision movement platform.
Background technology
With the fast development of micro-/ nano technology, in optical engineering, micro-electronic manufacturing, aeronautical and space technology, ultraprecise machine
The research of the technical fields such as tool manufactures, Micro-Robot operation, biomedical and genetic engineering all in the urgent need to Asia/micron order, micro-/
Nano level Ultraprecise drive mechanism.
There is nanometer-scale motions resolution ratio, across the yardstick precise motion technology with grade movement travel is micro- at present
Key technology in driving field.Because inertia stick-slip drives the driving principle with respect to other classes across yardstick motion type of drive
Simply, conveniently, control simple, and have that range of movement is big, simple, the easy microminiaturization of high resolution, structure and be accurately positioned etc. excellent
It is to apply a kind of more mode in current across the yardstick driving occurring that point, therefore inertia stick-slip drive.Inertia stick-slip drives
Operation principle is mainly using frictional force as driving source, realizes the minute movement of driven member, specifically, quilt using stick-slip effect
Driving body relies on the difference between the sound frictional force that the asymmetric vibration of saw-tooth voltage excitation piezoelectric vibrator is formed to come
Realize across yardstick precise motion eventually.
The present invention adopts piezoelectric actuator as the driving means of precise positioning work table, and piezoelectric actuator is
The new micrometric displacement device growing up in recent years, it is so that small volume, driving force be big, high resolution, easily controllable the advantages of make
It is widely used in the middle of precision optical machinery for driving element.Piezoelectric ceramics be using piezoelectric inverse piezoelectric effect come work
Make, the size only relying on extra electric field can be realized as driving.Piezoelectric ceramics overcame in the past mechanical, fluid pressure type, pneumatic
The actuator inertia such as formula, electromagnetic type is big, the deficiency such as low-response, complex structure, poor reliability, has small volume, compact conformation, no
Mechanical friction, gapless, high resolution, response be fast, no heating, be not subject to magnetic interference, can use under low temperature, vacuum environment
The advantages of, it is widely used in micro- location technology, this controlled precision micro-displacement actuator will be in many technology from now on
Effect difficult to the appraisal is played in field.Although it has the advantages that high-accuracy displacement output, its output displacement is suitable simultaneously
Small have larger micrometric displacement to export the application scenario requiring it is impossible to meet, and usually needs in actual applications to cause piezoelectric ceramics
The output displacement of dynamic device is added up, to meet the needs of big stroke high precision positioning.Therefore this patent adopts inertia stick-slip formula
Principle is solving the less problem of piezoelectric actuator output displacement.Precise driving device according to piezoelectric ceramics construction at present
Working method according to them can be largely classified into: direct drive, lever amplification formula, oval amplifying type and rhombus amplifying type and
Inchworm type precisely locating platform.
As the Chinese patent of Patent No. cn202695554u, direct drive precisely locating platform is mainly using piezoelectricity pottery
Porcelain directly drives double flat andante compliant mechanism, can eliminate with this mechanism and couple displacement and displacement resolution very in principle
Height, but piezoelectrics deformation very little, so that the movement travel of detent mechanism is very limited, receives the very day of one's doom in practical application
System.
Europe as the Chinese patent of Patent No. cn2587600, cn103111990a, Patent No. ep0624912a1
Patent, the Deutsche Bundespatent of Patent No. de4315238a1, the main purpose of lever amplification formula precisely locating platform is that piezoelectricity is made pottery
The range of movement of porcelain is amplified, and by lever amplification principle, and has the flexure hinge mechanism realization of revolute along fulcrum
Rotation, be amplified by leverage, its multiplication factor can reach 2-3 times.So that the precision by Piezoelectric Ceramic
The range of movement of locating platform effectively improves, but while range of movement amplifies, also due to lever amplify exist micro-
Little angle change, therefore can bring small angular error to the final displacement enlargement realized.
As the Chinese patent of Patent No. cn2628237 and cn2726829, oval amplifying type and rhombus amplifying type are accurate fixed
Bit platform realizes motion amplification using strut buckling principle, and motion amplification mechanism is set based on the strut buckling principle in the mechanics of materials
Meter forms.When piezoelectric ceramics extends, mechanism two ends are subject to thrust from inside to outside, and the curvature of circular arc thin wall becomes
Change, its cambered surface peak moves down, downward displacement is more much greater than the elongation displacement of pottery itself, i.e. displacement quilt
Amplify.But such mechanism circular arc stress is larger, is also easy to produce stress concentration.
As application number number be cn201110245339.4, cn201310202368.1, cn201210475674.8 and
The Chinese patent application of cn201310491303.3, Inchworm type precisely locating platform is because copying living nature reptile motion principle
And gain the name.It is that the microvibration displacement of piezoelectrics can form after certain mode is changed continuous or stepping precision
Displacement drive mechanism.It is by clamp device using so that mechanism is capable of big stroke with the difference of Direct Action Type mechanism
Accurate displacement.Fig. 1 be Inchworm type precisely locating platform structure diagram, wherein 1,3 be can with the piezoelectricity cylinder of radial expansion,
Leave small gap and straight-bar between, 2 can be with the pipe of axial stretching.When controlling drive circuit, 1 contraction is made to be pressed on straight-bar
On, 3 open and 2 elongations simultaneously, and 3 have moved right a step, and then 3 shrink and step up, and 1 opens, 2 shortenings, then 1 moved right one
Step.So by 1,2,3 one-tenth of moving member integrally moved right a step, so move in circles, that is, define continuous precision
Displacement.
Although above-mentioned four kinds of precisely locating platforms are all the drivings using piezoelectric ceramics, realize nano high-precision positioning
's.Although first three is realized different in structure and displacement equations mode one-dimensional, the displacement of such platform is limited to
It is impossible to enough realize the precision positioning across yardstick within hundreds of micron.And Inchworm type precisely locating platform passes through looper principle, will be micro-
Little displacement carries out adding up and realizes nano-precision, the precisely locating platform of grade stroke.But because structure is complex, enter
And lead to the processing of this platform and assembly precision to require higher, the final kinematic accuracy and affecting across yardstick precision movement platform
Cause property, exists therefore in the uniformity when guaranteeing across yardstick precision movement platform mass production for these prior arts and makes work
The technical barriers such as skill complexity Manufacturing cost height.
Therefore, for above-mentioned technical problem it is necessary to provide a kind of across yardstick essence of inertia stick-slip formula realizing bidirectional-movement
Close motion platform.
Content of the invention
In view of this, in order to solve described the problems of the prior art, the invention provides a kind of bidirectional-movement of realizing
Across the yardstick precision movement platform of inertia stick-slip formula, to realize grade stroke, nano grade positioning precision and forward and reverse motion speed
Degree is consistent.Using inertia stick-slip formula driving principle, form, beneficial to inertial impact force, one kind newly side that driving is tectonic movement mechanism
Formula, and inertial impact force is in most cases obtained by mechanical impact, controls relative difficult and easily mechanism is caused
Damage.Fast response time is had due to piezoelectric actuator, energy conversion efficiency is high, structure is simple, be easy to microminaturization etc.
Advantage, therefore piezoelectric element are one of construction preferable dynamical elements of across the yardstick precision movement platform of inertia stick-slip formula.
To achieve these goals, technical scheme provided in an embodiment of the present invention is as follows:
A kind of across yardstick precision movement platform of inertia stick-slip formula realizing bidirectional-movement, described platform includes base plate, is located at
Supporting module on base plate, it is symmetrically arranged on two motion module of supporting module both sides, each described motion module includes joining
Pouring weight, piezoelectric actuator and parenchyma gauge block, described piezoelectric actuator includes positive pole and negative pole, piezoelectric actuator
Positive pole is used for being connected with drive signal with negative pole, and described drive signal is linear voltage and the combination of non-linear voltage, wherein non-
The rate of change of linear voltage is gradually increased.
As a further improvement on the present invention, described balancing weight at least includes the first balancing weight and the second balancing weight, described
First balancing weight and the second balancing weight are different materials and thickness.
As a further improvement on the present invention, inertia is installed between described balancing weight and piezoelectric actuator connect
Block, is provided with the first nut between described parenchyma gauge block and piezoelectric actuator.
As a further improvement on the present invention, described supporting module includes being fixedly installed on base plate lower lock block, it is located at
Upper holder block above lower lock block and the hold down gag above upper holder block, described upper holder block and lower lock block are correspondingly arranged
Fluted.
As a further improvement on the present invention, described hold down gag includes being arranged at spring bearer plate above upper holder block, position
Compression spring between spring bearer plate and upper holder block and compressor arm and the second spiral shell for be fixed and clamped bar and spring bearer plate
Female.
As a further improvement on the present invention, pass through optical axis between described motion module to be connected, described smooth shaft section is circle
Shape, optical axis is installed in the groove between upper holder block and lower lock block, and described optical axis is linear contact lay with upper holder block and lower lock block.
As a further improvement on the present invention, in described motion module, the outside of parenchyma gauge block is provided with the 3rd nut, institute
State motion module and pass through the 3rd nut and optical axis fixed installation.
As a further improvement on the present invention, the two ends correspondence of described upper holder block is provided with pretension jackscrew.
As a further improvement on the present invention, described non-linear voltage is successively decreased with parabola.
The method have the advantages that
Across the yardstick precision movement platform structure of inertia stick-slip formula of the present invention is simple, be capable of the precision of quickly big stroke
Position, easily realize multiple degrees of freedom driving and do not need special position holding device.The present invention is in MEMS, existing
For cell biological engineering, Ultra-precision Turning, stm and afm microscope scanning platform, micro-nano operation, micro robot and life
The fields such as thing microoperation are because of its compact conformation, no electromagnetic interference and gathering around across being accurately positioned of yardstick has wide practical use.
Brief description
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
Have technology description in required use accompanying drawing be briefly described it should be apparent that, drawings in the following description be only this
Some embodiments described in invention, for those of ordinary skill in the art, on the premise of not paying creative work,
Other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of Inchworm type precisely locating platform in prior art；
Fig. 2 is the structural representation of motion module in across the yardstick precision movement platform of inertia stick-slip formula of the present invention；
Fig. 3 realizes the structure of motion module in across the yardstick precision movement platform of inertia stick-slip formula of bidirectional-movement for the present invention
Schematic diagram；
Fig. 4 is drive signal schematic diagram in the embodiment of the invention；
Fig. 5 is that in the embodiment of the invention, inertia stick-slip formula is illustrated across the stereochemical structure of yardstick precision movement platform
Figure；
Fig. 6 is the vertical of motion module in across the yardstick precision movement platform of inertia stick-slip formula in the embodiment of the invention
Body structural representation；
Fig. 7 for upper holder block in across the yardstick precision movement platform of inertia stick-slip formula in the embodiment of the invention and pushes
The structural representation of block.
Specific embodiment
Describe the present invention below with reference to specific embodiment shown in the drawings.But these embodiments are simultaneously
Do not limit the present invention, structure that those of ordinary skill in the art is made, method or functionally according to these embodiments
Conversion is all contained in protection scope of the present invention.
The invention discloses a kind of across yardstick precision movement platform of inertia stick-slip formula realizing bidirectional-movement, this platform includes
Base plate, the supporting module being located on base plate, it is symmetrically arranged on two motion module of supporting module both sides, each motion module bag
Include balancing weight, piezoelectric actuator and parenchyma gauge block, described piezoelectric actuator includes positive pole and negative pole, piezoelectric ceramics causes
Dynamic device positive pole is used for being connected with drive signal with negative pole, and drive signal is linear voltage and the combination of non-linear voltage, wherein non-
The rate of change of linear voltage is gradually increased.
Such mechanism is made up of parenchyma gauge block, balancing weight and piezoelectric ceramics three.When it is applied with the electric signal being mutated, by
The impulsive force of piezoelectric element and inertial mass composition can produce reverse inertial impact force to mechanism body, and works as this reverse impact
When power is more than the frictional force of mechanism itself, mechanism just can produce motion.
As shown in Fig. 2 the motion module in the present invention connects parenchyma gauge block by laminated piezoelectric ceramic actuator two ends
Constituted with balancing weight.The positive and negative interpolar of piezoelectric ceramics apply forward or backwards voltage so as to make small in length direction
Elongate or shorten.
Apply a linear voltage quickly increasing from a to b as shown in Figure 4 first, piezoelectric ceramics rapidly extends, and balancing weight is fast
Speed moves right, and parenchyma gauge block makees tiny movement to the left simultaneously.Then, control voltage is made to successively decrease with parabola from b to c, piezoelectricity
Pottery gradually tapers up, and so that balancing weight is moved to the left and be continuously available acceleration.It is zero in c point voltage, piezoelectric ceramics shrinks suddenly
Pause.According to the law of conservation of momentum, most of momentum of balancing weight will be transferred on parenchyma gauge block in impulsive force mode, make the latter
It is moved to the left certain distance.With this cyclically-varying of voltage, parenchyma gauge block is rapidly transported to the left with fine step-length
Dynamic, thus reaching the purpose accurately moving and positioning.Obviously, as long as frequency, waveform and amplitude by controlling driving voltage,
It is capable of the continuous motion of different step-lengths.
Consistent in order to realize forward and reverse speed, on the premise of above-mentioned operation principle as shown in Figure 3 by a main body, two
Symmetrically arranged piezoelectric ceramics and two balancing weight compositions.
When needing realization to move right, drive signal as shown in Figure 4 connected by piezoelectric ceramics 1.Apply one first from a to b
The quick linear voltage increasing, piezoelectric ceramics 1 rapidly extends, balancing weight 1 quick to left movement, parenchyma gauge block is made to the right carefully simultaneously
Little movement.Then, so that control voltage is successively decreased with parabola from b to c, piezoelectric ceramics 1 gradually tapers up, so that balancing weight is moved to the right
And it is continuously available acceleration.It is zero in c point voltage, piezoelectric ceramics shrinks and pauses suddenly.According to the law of conservation of momentum, balancing weight big
Part momentum will be transferred on parenchyma gauge block in impulsive force mode, so that the latter is moved right certain distance.This with voltage
Cyclically-varying, parenchyma gauge block is rapidly moved to the right with fine step-length, thus reaching the mesh accurately moving and positioning
's.
When needing to realize to left movement, drive signal as shown in Figure 4 connected by piezoelectric ceramics 2.Driving principle is as described above
Parenchyma gauge block is rapidly moved to the left, thus reaching the purpose accurately moving and positioning with fine step-length.Due to
This module to the left and moves right respectively by two Piezoelectric Ceramic, after during driving, two piezoelectric ceramics are all first rapid elongation
Slowly shrink therefore can achieve that forward and reverse speed is consistent.Compared with other type of drive, piezo-electric type inertia stick-slip formula drive mechanism has
Have that structure is simple, be capable of the quickly precision positioning of big stroke, easily realize multiple degrees of freedom drives and do not need special position
The advantages of put holding meanss.
Referring to shown in Fig. 5, Fig. 6 and Fig. 7, in the embodiment of the invention, across the yardstick precise motion of inertia stick-slip formula
Platform includes:
Base plate 4-1, base plate needs grinding machine to refine, and roughness grade should be ensured that in ra0.4 and machine direction will be
On same straight line, base plate needs stamp and be mutually perpendicular to two row's installing holes, be arranged on base plate table to facilitate in agent structure
The minimum direction of surface roughness；
Balancing weight 4-2, in present embodiment, balancing weight includes the first balancing weight (cu) and the second balancing weight (al), joins for two
Pouring weight is different materials (brass and aluminium alloy), different thickness, realizes driving by adjusting balancing weight quality to reach
When inertia force difference；
Inertia contiguous block 4-3, inertia contiguous block can be threaded connection with balancing weight；
Front end nut 4-5 (the first nut), front end nut can be connected with motion parts by screw thread；
Piezoelectric actuator 4-4, piezoelectric actuator passes through epoxide-resin glue and inertia contiguous block and front end nut
It is connected, need cure under pressure after the completion of bonding to reach the switching performance of optimum；
Parenchyma gauge block 4-6, parenchyma gauge block is passed through m3 nut (the 3rd nut) and is mutually clamped with front end nut (the first nut),
It can be prevented stuck in motion process with up-down adjustment, and can play a supporting role and prevent motion platform in motion process
Lead to " tumbling " phenomenon due to crank；
M3 nut 4-7 (the 3rd nut), the effect that m3 nut plays fixing parenchyma gauge block and facilitates parenchyma gauge block to adjust；
Compressor arm 4-8 and compression spring 4-9, compressor arm and compression spring can be by adjusting normal pressure come governor motion in fortune
Frictional force during dynamic；
Optical axis 4-10, optical axis is connected with front end nut, contacts with each other generation frictional force with upper holder block and lower lock block；
Pretension jackscrew 4-11, pretension jackscrew has two upper holder block and lower lock block can be prevented in motion process due to machinery
Gap and the play that exists plays locked purpose；
Upper holder block and lower lock block 4-12, upper holder block and lower lock block are integrated and process last incision, and middle is square
Structure, as shown in fig. 6, being linear contact lay with optical axis, on the one hand can prevent in motion process because contact surface is excessive and stuck another
On the one hand the uniformity of contact portion dynamic friction factor can be improved；
M4 nut 4-13 (the second nut) and spring bearer plate 4-14, makes spring bearer plate compression compression by two m4 nuts
Spring.
In present embodiment, balancing weight 4-2, inertia contiguous block 4-3, piezoelectric actuator 4-4, front end nut 4-5, master
Mass 4-6, m3 nut 4-7 and optical axis 4-10 together constitutes symmetrical motion module, and wherein each balancing weight is not by two
With the first balancing weight and the second balancing weight composition, in other embodiments, the quantity of balancing weight it can also be provided that other
Quantity；Compressor arm 4-8, compression spring 4-9, pretension jackscrew 4-11, upper holder block and lower lock block 4-12, m4 nut 4-13 collectively form
Support meanss, can also adopt other structures in other embodiments.
Operation principle of the present invention is as shown in figure 3, (be equivalent to 2 of two motion module in present embodiment by parenchyma gauge block
Individual parenchyma gauge block and the combination of optical axis), 2 piezoelectric actuators and 2 balancing weight three parts composition.
When needing realization to move right, drive signal as shown in Figure 4 connected by piezoelectric ceramics 1.Apply one first from a to b
The quick linear voltage increasing, piezoelectric ceramics 1 rapidly extends, balancing weight 1 quick to left movement, parenchyma gauge block is made to the right carefully simultaneously
Little movement.Then, so that control voltage is successively decreased with parabola from b to c, piezoelectric ceramics 1 gradually tapers up, so that balancing weight is moved to the right
And it is continuously available acceleration.It is zero in c point voltage, piezoelectric ceramics shrinks and pauses suddenly.According to the law of conservation of momentum, balancing weight big
Part momentum will be transferred on parenchyma gauge block in impulsive force mode, so that the latter is moved right certain distance.This with voltage
Cyclically-varying, parenchyma gauge block is rapidly moved to the right with fine step-length, thus reaching the mesh accurately moving and positioning
's.
When needing to realize to left movement, drive signal as shown in Figure 4 connected by piezoelectric ceramics 2.Driving principle is as described above
Parenchyma gauge block is rapidly moved to the left, thus reaching the purpose accurately moving and positioning with fine step-length.Due to
This mechanism to the left and moves right respectively by two Piezoelectric Ceramic, after during driving, two piezoelectric ceramics are all first rapid elongation
Slow contraction.Therefore can overcome in motion process the difference in raising and lowering for the step signal being produced due to driving power supply with
And positive movement speed that the difference of mechanical response time when piezoelectric actuator rapid elongation and rapid desufflation causes is big
In opposite direction movement velocity.Due to the stroke very little of piezoelectric ceramics, therefore inertia stick-slip platform I obtains several receiving
The step-length of rice, and step-length is with driving voltage continuously adjustabe.
Further, shown in ginseng Fig. 4, drive signal in present embodiment from a to b for linear voltage, for non-from b to c
Linear voltage, and non-linear voltage successively decreases with parabola.In other embodiments, non-linear voltage is not necessarily parabolically
Type, the curve being gradually increased for other rates of change, is such as successively decreased with circular arc.
As can be seen from the above technical solutions, across the yardstick precision movement platform of inertia stick-slip formula that the present invention provides has following
Beneficial effect:
Due to piezoelectric ceramics good, the no electromagnetic interference that has a response characteristic, control accuracy is high, and forward and reverse movement velocity is mutually equal
Feature, designs the drive mechanism producing inertial impact force using the rapid deformation of piezoelectric element, by the design of Circuits System,
Output Asymmetric Electric signal, makes piezoelectric element can produce rapid elongation, slow retraction, or slow elongation, the fortune of fast retractile
Dynamic form, in the presence of alternating electric signal, drive mechanism produces bidirectional-movement macroscopically.On the premise of this motion principle
Have devised Mass adjust- ment mechanism, normal pressure guiding mechanism and can easily change piezoelectric ceramics, regulation parameter is come with this
The optimization realizing inertia stick-slip formula across yardstick precision movement platform exports；
The platform of the present invention is easy to process and is assembled, and then effectively increases stick-slip driving across yardstick precision movement platform
Output performance, simply can effectively guarantee that stick-slip drives kinematic accuracy and the uniformity across yardstick precision movement platform, be suitable for batch
Productionization, is highly suitable for as micro-nano operation, micro robot, biological microoperation, digital product and precision actuation system
Apply etc. having in structure formed, positioning requirements with a wide range of precise every field.
It is obvious to a person skilled in the art that the invention is not restricted to the details of above-mentioned one exemplary embodiment, Er Qie
In the case of the spirit or essential attributes of the present invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, embodiment all should be regarded as exemplary, and be nonrestrictive, the scope of the present invention is by appended power
Profit requires rather than described above limits, it is intended that all in the implication and scope of the equivalency of claim by falling
Change is included in the present invention.Any reference in claim should not be considered as limiting involved claim.
Moreover, it will be appreciated that although this specification is been described by according to embodiment, not each embodiment only wraps
Containing an independent technical scheme, only for clarity, those skilled in the art should for this narrating mode of specification
Using specification as an entirety, the technical scheme in each embodiment can also form those skilled in the art through appropriately combined
Understandable other embodiment.
Claims (7)
1. a kind of across yardstick precision movement platform of inertia stick-slip formula realizing bidirectional-movement is it is characterised in that described platform includes
Base plate, the supporting module being located on base plate, it is symmetrically arranged on two motion module of supporting module both sides, each described motion mould
Block includes balancing weight, piezoelectric actuator and parenchyma gauge block, and described piezoelectric actuator includes positive pole and negative pole, and piezoelectricity is made pottery
Porcelain actuator positive pole is used for being connected with drive signal with negative pole, and described drive signal is linear voltage and the group of non-linear voltage
Close, the rate of change of wherein non-linear voltage is gradually increased；Described supporting module includes lower lock block, the position being fixedly installed on base plate
Upper holder block above the lower lock block and be located at hold down gag above upper holder block, on described upper holder block and lower lock block, correspondence sets
It is equipped with groove；Described hold down gag includes being arranged at spring bearer plate above upper holder block, is located between spring bearer plate and upper holder block
Compression spring and compressor arm and for the second nut of bar and spring bearer plate of being fixed and clamped；Logical between described motion module
Cross optical axis to be connected, optical axis is installed in the groove between upper holder block and lower lock block, described optical axis is line with upper holder block and lower lock block
Contact.
2. across yardstick precision movement platform according to claim 1 is it is characterised in that described balancing weight at least includes first
Balancing weight and the second balancing weight, described first balancing weight and the second balancing weight are different materials and thickness.
3. across yardstick precision movement platform according to claim 1 is it is characterised in that described balancing weight and piezoelectric ceramics cause
Inertia contiguous block is installed between dynamic device, between described parenchyma gauge block and piezoelectric actuator, the first nut is installed.
4. across yardstick precision movement platform according to claim 1 is it is characterised in that described smooth shaft section is circle.
5. across yardstick precision movement platform according to claim 1 is it is characterised in that parenchyma gauge block in described motion module
Outside be provided with the 3rd nut, described motion module is passed through the 3rd nut and optical axis and is fixedly mounted.
6. across yardstick precision movement platform according to claim 1 is it is characterised in that the two ends of described upper holder block correspond to peace
Equipped with pretension jackscrew.
7. across yardstick precision movement platform according to claim 1 is it is characterised in that described non-linear voltage is with parabola
Successively decrease.
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| CN105720858B (en) * | 2016-04-18 | 2017-08-04 | 南京理工大学 | A kind of accurate adjustable impact type Piexoelectric actuator of frictional force |
| CN109676402B (en) * | 2017-10-18 | 2024-08-06 | 南京伶机宜动驱动技术有限公司 | Non-magnetic motion platform and combined structure and control method thereof |
| CN109039146B (en) * | 2018-08-07 | 2020-02-18 | 苏州大学 | Inertial stick-slip driving trans-scale precision motion platform |
| CN111181438A (en) * | 2020-01-14 | 2020-05-19 | 苏州大学 | Method and device for driving piezoelectric ceramic actuator |
| CN112865596B (en) * | 2021-03-30 | 2024-04-12 | 吉林大学 | Large-stroke piezoelectric inertia driving platform |
| CN113078844B (en) * | 2021-04-21 | 2022-03-29 | 吉林大学 | Device and method for expanding inertia force to improve performance of piezoelectric actuator |
| CN113162464B (en) * | 2021-05-16 | 2024-08-23 | 无锡信欧光电科技有限公司 | Nanoscale amplifying actuator |
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| CN101858477A (en) * | 2010-04-20 | 2010-10-13 | 郑福胜 | Two-degree-of-freedom large-stroke high-peed and high-precision positioning platform |
| CN203289350U (en) * | 2013-06-19 | 2013-11-13 | 浙江师范大学 | Asymmetric clamping piezoelectric inertial driver with ploughing effect |
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