CN1922087A - Base plate output-input device and base plate output-input method - Google Patents
Base plate output-input device and base plate output-input method Download PDFInfo
- Publication number
- CN1922087A CN1922087A CNA2004800421768A CN200480042176A CN1922087A CN 1922087 A CN1922087 A CN 1922087A CN A2004800421768 A CNA2004800421768 A CN A2004800421768A CN 200480042176 A CN200480042176 A CN 200480042176A CN 1922087 A CN1922087 A CN 1922087A
- Authority
- CN
- China
- Prior art keywords
- pallet
- substrate
- supporting plate
- input
- lifting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D21/00—Nestable, stackable or joinable containers; Containers of variable capacity
- B65D21/02—Containers specially shaped, or provided with fittings or attachments, to facilitate nesting, stacking, or joining together
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Stacking Of Articles And Auxiliary Devices (AREA)
- De-Stacking Of Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A substrate carrying in/out device (100) and a substrate carrying in/out method for taking out a substrate from a tray or storing the substrate in the tray, the method comprising the steps of positioning a pallet (101) at a specified position on a conveyor (103), holding and lifting the untreated trays located on the upper stage of the treated tray among the multiple stages of trays (102) placed on the pallet by a tray chuck (107), and allowing lift pins (105) to pass lift pin pass holes (102a) formed in the pallet and the tray while the untreated trays are raised and a sufficient space is secured above the treated tray so that the operation of the lift pins can be controlled such that the tips of the lift pins can be separated a specified distance from the treated tray. Thus the substrate (108) can be carried in and out.
Description
Technical field
The present invention relates to a kind of base plate output-input device, particularly relate to a kind of be used for from be stacked in pallet on the supporting plate take out substrate so that will handle after substrate carry base plate output-input device on the pallet once more.
Background technology
In the past, the scheme of various base board delivery devices has been proposed, and realize, the pallet shelf that it possesses a plurality of pallets of supporting, it can be come in and gone out, to take out and supply to plate working machine from stacked workpiece on the pallet of pallet shelf output, and, take out processed workpiece and be stacked on other pallets from plate working machine.
For example, existing base board delivery device has the spy to open in the flat 12-246552 communique to put down in writing device.Fig. 1 is the instruction diagram that existing base board delivery device represented in summary, and Fig. 2 is that the main portion of Fig. 1 is amplified instruction diagram.Base board delivery device 10 is arranged on the lateral location that plate working machine is laser machine (not shown), as shown in Figure 1, the left side possesses to the right successively from figure: stacked 14 in pallet-changing portion 11, individual base material taking-up portion 12, processing machine Liaison Division 13, product.
Pallet-changing portion 11 has: base material pallet receiver 17, and it takes in to multilayer the base material pallet 16 that mounting has the preceding sheet material of processing up and down; With base material conveyor pallet structure 18, it will be accommodated in base material pallet 16 in the base material pallet receiver 17 and be transported to base material extracting position on the lower position that is arranged on base material pallet receiver 17.
Individual base material taking-up portion 12 possesses the base material unloading device 21 that takes out the base material from the base material pallet 16 that is transported to base material extracting position.Processing machine Liaison Division 13 possess and laser machine between the intermediate processing tray 23 that moves back and forth, sheet material is carried out following actions, that is, and sheet material input laser machine before will processing under the state of mounting on intermediate processing tray 23, and, will process back sheet material and export from laser machine.Stacked 14 of product possesses the product lifter 15 that moves up and down, and carries out following actions, that is, will be displaced on the product tray 19 of mounting on the product lifter 15 from sheet material after the processing of processing machine Liaison Division 13 taking-ups.
And, the upper position that individual base material taking-up portion 12, processing machine Liaison Division 13 and product are stacked 14 is provided with transfer mechanism 24, sheet material was transplanted on processing machine Liaison Division 13 from individual base material taking-up portion 12 before described transfer mechanism 24 will be processed, and will process back sheet material and be transplanted on stacked 14 of product from processing machine Liaison Division 13.
Transfer mechanism 24 possesses fork 25, and described fork 25 is suspended in from individual base material taking-up portion 12 to stacked 14 horizontally disposed track of product, can move by CD-ROM drive motor.Fork 25 possess moving direction one side by cantilever support, along many arm 25a of moving direction elongation, the back sheet material of sheet material or processing before the mounting processing on arm 25a, and can transferring.
The sheet material mounting is as described below to the method on the product tray 19 after will being transplanted on the processing of stacked 14 of product by this fork 25, promptly, product lifter 15 is risen from the below of fork 25, as shown in Figure 2, the height and position that more projects upwards than the arm 25a of fork 25 of the inhibition plate 20 that rises to product tray 19.The inhibition plate 20 of product tray 19 is arranged on the side end of processing machine Liaison Division side of product tray 19, and be arranged on can be by on the position between the arm 25a.
Then, make fork 25 to processing machine Liaison Division 13 side shiftings.Thus, be positioned in the processing on the arm 25a of fork 25 after sheet material have with the trend of fork 25 to processing machine Liaison Division 13 side shiftings, but it moves by suppressing plate 20 and suppresses, thereby resides in stacked 14 of the product.Therefore, only fork 25 moves in processing machine Liaison Division 13, and processing back sheet material is transferred on the product tray 19 from arm 25a.
But, be glass substrate when being easy to damaged material like that at the base material that takes out with above-mentioned base board delivery device 10, should be noted that operation.That is, in existing base board delivery device, before taking out substrate during in, the distance that substrate is moved is longer, it move complexity, so the danger of damaged substrate is halfway arranged.Need eliminate this danger as far as possible.
And, in base board delivery device 10, be stacked trays in pallet receiver 17, so under the generation out-of-position situation, the position of the base material (substrate) of Qu Chuing is not positioned on the former center that should be in sometimes in that the laminating method of pallet is undesirable.Particularly,, in above-mentioned prior art, such mechanism is not set so need correct to the offset that these reasons cause because pallet in use can produce strain gradually because of friction or heat.
Under the situation that has such offset, also can impact the processing of base material.That is,, then can not make uniform product if under the out-of-position state, directly the base material is handled.
And, although consider that the situation of carrying out this location in processing equipment is also arranged, have when multiple at processing equipment, must all in processing equipment, accurately position at every turn, thereby have to be provided with the detent mechanism that is suitable for this processing equipment, be very much trouble.Therefore, be to position exactly in the base board delivery device if can manage the relaying place of device throughout, then very convenient, help to realize the reduction of cost and the miniaturization of device.
Summary of the invention
The present invention mainly makes in order to solve the problem that above-mentioned prior art has, its purpose is to provide a kind of base plate output-input device, even if the substrate of noting for action need, also can successfully take out, and can efficiently the substrate after the processing be carried on the pallet once more from pallet.
In addition, the object of the present invention is to provide a kind of base plate output-input device, it can accurately be positioned in substrate on the assigned position on the pallet simply to because the substrate position skew of the generations such as strain of pallet is corrected.
The present invention makes in order to achieve the above object, is a kind of base plate output-input device, is used to carry out the taking-up of substrate from pallet, perhaps to aforementioned pallet input substrate, it is characterized in that possessing: conveyer, it is used to make the supporting plate that is stacked with the multilayer pallet to move; The supporting plate detent mechanism, it carries out the location of aforementioned supporting plate on the assigned position of aforementioned conveyor apparatus; Lift pin, its under the state of aforementioned supporting plate having been located by aforementioned detent mechanism, by be arranged on aforementioned supporting plate and the aforementioned pallet pass through to use be used for aforesaid base plate is held up from pallet in the hole; The pallet elevator structure, it is used for aforementioned multilayer pallet stacked on the aforementioned supporting plate is separated into and comprises and handle the object pallet and be positioned at the first pallet group of lower floor and be positioned at the second pallet group on upper strata than aforementioned processing object pallet than it, makes aforementioned lift pin and the aforementioned first pallet group lifting relatively; The pallet lifting control mechanism, it controls the action of aforementioned pallet elevator structure; Aforementioned control mechanism is controlled the position relation between aforementioned lift pin and the aforementioned processing object pallet, make when between aforementioned first pallet group and the aforementioned second pallet group, guaranteeing to have living space by aforementioned pallet elevator structure, the end-to-end distance aforementioned processing object pallet of aforementioned lift pin has predetermined distance, makes that aforesaid base plate taking-up or input can be carried out.
In addition, base plate output-input device of the present invention is used for taking out substrate from pallet, perhaps substrate is input in the pallet, it is characterized in that possessing: conveyer, and it is used to make the supporting plate that is stacked with the multilayer pallet to move; The supporting plate detent mechanism, it carries out the location of aforementioned supporting plate on the assigned position of aforementioned conveyor apparatus; Mechanism is prepared in substrate input, and it is separated into the aforementioned multilayer pallet on the aforementioned supporting plate and handles object pallet and non-processing object pallet under the state of aforementioned supporting plate having been located by aforementioned detent mechanism, for the input action of aforesaid base plate ready; Control mechanism, the action of mechanism is prepared in its control aforesaid base plate input; Position adjusting mechanism, it is adjusted the position that is disposed at the aforesaid base plate on the aforementioned pallet under situation about aforesaid base plate being input in the aforementioned pallet.
And then base plate output-input method of the present invention is used for taking out substrate from pallet, perhaps substrate is input in the pallet, it is characterized in that possessing: the supporting plate mobile process, and it moves the supporting plate that is stacked with the multilayer pallet by conveyer; The supporting plate positioning process, it carries out the location of aforementioned supporting plate on the assigned position of aforementioned conveyor apparatus; Pallet lifting operation, it is used for being separated into and comprising and handle the object pallet and be positioned at the first pallet group of lower floor and be positioned at the second pallet group on upper strata than aforementioned processing object pallet than it being stacked in aforementioned multilayer pallet on the aforementioned supporting plate, is used in lift pin and the aforementioned first pallet group lifting relatively that aforesaid base plate is held up from aforementioned processing object pallet; Pallet lifting control operation, it is controlled the relative lifting action in the aforementioned pallet lifting operation; In aforementioned control operation, position relation to aforementioned lift pin and aforementioned processing object pallet is controlled, so that when between aforementioned first pallet group and the aforementioned second pallet group, guaranteeing to have living space reliably utilizing aforementioned pallet lifting operation, the end-to-end distance aforementioned processing object pallet of aforementioned lift pin has predetermined distance, makes that aforesaid base plate taking-up or input can be carried out.
Structure more specifically of the present invention will become clear by following preferred implementation that is used to carry out an invention and accompanying drawing.
Description of drawings
Fig. 1 is the figure that existing base plate output-input device represented in summary.
Fig. 2 is the main portion enlarged drawing of existing base plate output-input device.
Fig. 3 is the pie graph that base plate output-input device of the present invention represented in summary.
Fig. 4 A to Fig. 4 C is used for the figure that the supporting plate location action to base plate output-input device of the present invention describes.
Fig. 5 is used for the figure that structure and action to first positioning component 112 describe.
Fig. 6 is used for the figure that structure and action to second positioning component 113 describe.
Fig. 7 is used for the diagram of circuit that the action when taking out substrate from pallet describes.
Fig. 8 A to Fig. 8 C is used for the figure that the action to pallet grippers 107 describes.
Fig. 9 is used for the figure that the structure to pallet describes.
Figure 10 A to Figure 10 C is used for the figure that the structure to pallet grippers describes.
Figure 11 is used for the diagram of circuit that the action to will process metacoxal plate and be input on the pallet time describes.
Figure 12 A to Figure 12 C is used for the figure that the structure to position regulating member 1005 describes.
Figure 13 is used for the position of position regulating member 1005 and pallet grippers 107 is concerned the figure that describes.
Figure 14 is the figure that the action when being used for pallet-changing describes.
The specific embodiment
Below, with reference to accompanying drawing the embodiment of having used base plate output-input device of the present invention is described.
Fig. 3 is expression base plate output-input device 100 single-piece External views of the present invention.Base plate output-input device 100 has following function,, take out glass substrate 108 from pallet successively under a plurality of pallets 102 that are stacked and placed on supporting plate 101, and then the substrate after will handling carries on the pallet once more that is.In addition, in all pallets, all be written under the situation of substrate, take out glass substrate 108 successively from undermost pallet.In addition, for example, the pallet of the pallet lower floor of certain one deck all empty situation under, can be with this layer as handling object from pallet taking-up glass substrate 108, perhaps in pallet, import.In the pallet of all layers, all be equipped with under the situation of glass substrate 108, take out glass substrate from the below successively, in addition, under the situation of input glass substrate in the pallet of being had time, carry out input action from the superiors.Be elaborated in the back for these taking-up/input actions.
In Fig. 3, the 103rd, be used for having the supporting plate 101 of stacked pallet 102 to locate and be transported to first conveyer of the extracting position of glass substrate 108 mounting.In addition, the 104th, be used for supporting plate 101 and pallet 102 are passed out to second conveyer on first conveyer 103.First conveyer 103 and second conveyer 104 are connected in the mode that the face that is provided with (ground) of distance device has sustained height.And, second conveyer 104 possess be used to make supporting plate 101 to the mobile driving of directions X (positive and negative two directions) with roller 104a and be used for free roller 104b from below supporting splint 101.In the present embodiment, be provided with driving at the both ends of first conveyer 103 and use roller, and free roller is not set in conveyor surface central authorities.
The 105th, the flexible lift pin of the mirror of looking in the distance (Telescopic), by the hole 102a that is provided with on the pallet 102 with glass substrate 108 from pallet lifting specified altitude.This lift pin 105, as long as can make that glass substrate 108 is stable, its number can be any.In addition, the end of lift pin 105 also can cover with soft materials such as rubber, so that can not damage glass substrate 108.
The 106th, the pallet grippers drive division possesses pallet grippers 107.Utilize the pallet 102 of 107 pairs of necessary numbers of plies of pallet grippers to suppress from its Y direction both sides, this pallet grippers 107 is by pallet grippers drive division 106 and knee-action under this state.On pallet grippers 107, be provided with fastener (the controlling pawl) 107a that card ends each layer pallet 102.
The 109th, be used for the robot that has the glass substrate 108 of specified altitude to take out apart from pallet 102 with being lifted to by lift pin 105.In addition, the 110th, the コ font arm of robot 109, this arm extend into glass substrate 108 belows by lift pin 105 liftings, keep the back to hold up glass substrate 108 absorption, thereby it is accessed from lift pin 105.
On the other hand, this base plate output-input device 100 also can carry out following actions, that is, the glass substrate 108 of taking-up is carried the glass substrate after this processing 108 (product) on the pallet 102 once more by not shown processing equipment processing.In this case, carry substrate processing successively from the superiors of pallet 102.
Based on Fig. 4 A to Fig. 4 C the action of base board delivery device 100 with above-mentioned formation is described below.
(location action of supporting plate 101)
Fig. 4 A to Fig. 4 C is the skeleton diagram that the location action when being used for the pallet 102 with mounting on the supporting plate 101 is transported to conveyer and makes it arrive glass substrate and take out assigned position of action describes.
At first, in Fig. 4 A, following control, promptly, there is the supporting plate 101 of pallet 102 to carry mounting from updrift side (positive dirction of the X-axis) downstream (negative direction of X-axis) of conveyer, with the situation of locating piece 111 butts that are arranged on first conveyer, 103 1 ends (end in downstream) under, conveyer 103 is stopped.In addition, conveyer 103 stop the action following in the present embodiment carrying out, that is, the positioning actuator 101a that is provided with supporting plate 101 abuts to the not shown sensor that locating piece 111 these situations detect.This sensor only stops conveyer 103 during to the contacting of supporting plate 101 and locating piece 111.In addition,, except sensor is set, also can adopt following mechanism, that is, when supporting plate 101 butt locating pieces 111, mechanical switch be connected as this conveyer method of shutting down.
After first conveyer 103 stops, shown in Fig. 4 B, first positioning component 112 is outstanding below conveyer 103 from the end direction of supporting plate 101 with respect to direct of travel, supporting plate 103 is clamped into and locating piece 111 between, direct of travel (X-direction) is positioned and fixing supporting plate.In addition, about the more detailed structure of this first positioning component 112, use Fig. 5 to describe in the back.
And conveyer 103 at both endss are provided with driving (for example chain driving) roller, and conveyor surface central authorities are empty, thus the lifting assembly 114 shown in Fig. 4 D from conveyer 103 below with supporting plate 101 lifting numbers centimetre.At this moment, first positioning component 112 also along with the lifting of lifting assembly 114 action will with the bearing surface 112a of supporting plate 101 also lifting number centimetre (describing in detail in the back).In addition, above the lifting assembly 114 free roller (hand of rotation is a Y direction), so supporting plate 101 moves in horizontal surface easily.
After finish location on the X-direction, then such shown in Fig. 4 C, second positioning component 113 is outstanding from the Width (X-direction) of conveyer 103 respectively, from the both sides of the Y direction (Width) of conveyer 103 with supporting plate 101 (though another assembly diagram not, but outstanding in the side of opposition side) sandwich, thus carry out the location of Y direction.In addition, shown in Fig. 4 C since supporting plate 101 by lifting assembly 114 from the below lifting, so bearing surface (roller portion) 111a of the structure locating piece 111 identical with first positioning component 112 also rises several centimetres thereupon.
And, by location action as described above, be positioned at supporting plate 101 on the position that is suitable for taking out glass substrate 108 after, at first, second positioning component 113 leaves from supporting plate 101.And lifting assembly 114 descends, the output input action of beginning glass substrate 108.In addition, lifting assembly 114 is provided with lower limited sensor, and when descending once more after rising, sensor is connected, and produces the energizing signal that is used to begin next substrate output input action thus.
In addition, the supporting plate holding action that carries out of the locating piece 111 and first positioning component 112 lasts till that always the glass substrate 108 that is positioned on all pallets 102 all is removed.
Fig. 5 is the figure of the details of expression first positioning component 112.Be configured in position W when as shown in Figure 5, first positioning component 112 is in readiness for action.In addition, the service portion 115a of pressure cylinder 115 also is configured on the W of position.In addition, when detecting supporting plate 101, pressure cylinder 115 is sent control signal with this situation of locating piece 111 butts.Corresponding to this control signal, make service portion 115a move to position S1 by pressure cylinder, so that on the position S1 of the position W with first positioning component 112 during when being set to positioning states from readiness for action from position W.
In addition, in Fig. 5, first positioning component 112 carries out via roller 112a to the butt of supporting plate 101, and then this roller 112a is a central slide with axle 112b.That is, as previously mentioned, to supporting plate 101 after positioning on the direct of travel on the conveyer (X-direction), by lifting assembly 114 with supporting plate 101 lifting below conveyer.Then, after supporting plate 101 is lifted, carry out the location on the X-direction, this moment, roller 112a slided with respect to center shaft 112b, so that roller 112a can be with supporting plate 101 actions.In order to make this slip to carry out, the axle of center shaft 112b has extended to a certain degree.
Fig. 6 is the figure of the details of expression second positioning component 113.Be configured on the W of position when as shown in Figure 6, second positioning component 113 is in readiness for action.And the service portion 116a of pressure cylinder 116 also is configured on the W of position.Then, by lifting assembly 114 with behind the supporting plate 101 lifting numbers centimetre, send control signal to pressure cylinder 115.Corresponding to this control signal, make service portion 116a move to position S2 by pressure cylinder, so that on the position S2 of the position W with second positioning component 113 during when being set to positioning states from readiness for action from position W.This second positioning component positions supporting plate 101 in the mode of clamping being carried out in the Y direction side from both sides, for this reason, is separately positioned on the two ends of conveyer 103.
(the taking-up action of glass substrate 108)
Then, for the action that each pallet 102 with mounting on the supporting plate 101 of glass substrate 108 behind the location takes out, use Fig. 7 to Fig. 9 to describe.
Fig. 7 is used for diagram of circuit that the taking-up of glass substrate 108 action is described.Fig. 8 A to Fig. 8 C is the figure of the action when representing the pallet lifting.Fig. 9 is the figure of the structure of expression pallet 102.
With reference to Fig. 7, in step S701, carry out the location action of above-mentioned supporting plate, after finished the location, step S702 was transferred in action.
In step S702, set k=1 for.That is, at first, be starting point to take out glass substrate 108 from undermost pallet, begin action.
Then, in step S703, remaining undermost pallet, from the pallet more than lower floor's second layer by pallet grippers 107 liftings.Take out successively under the situation of glass substrate 108 setting for from undermost pallet, pallet grippers 107 also set for under second layer pallet hold up.Pallet grippers 107 has fastener (controlling pawl) 107a, and this fastener (controlling pawl) 107a card ends on extension (by the fastener) 102a of pallet 102, only will block the pallet that ends and hold up.After the vertical motion of controlling action and being undertaken of having confirmed 107 pairs of pallets 102 of pallet grippers, handle and transfer to step S704 by pallet grippers drive division 106.
Then, in step S704, lift pin 105 rises, and from the ground floor pallet glass substrate 108 is held up.This lift pin 105 is set for all the time and is risen with constant stroke.This upward stroke is the thickness of a pallet, for example sets 30mm for.Then, confirm lift pin risen the predetermined stroke set and stop after, handle and transfer to step S705.
In step S705, the robots arm 110 of robot 109 takes out glass substrate 108.In this case, the taking-up of regarding glass substrate according to the posture changing signal of robot 109 as finishes, and handles and transfers to step S706.
In step S706, take out glass substrate after, the lift pin 105 that rises in step S704 descends, confirm that this down maneuver finishes after, and then pallet grippers 107 also descends.That is, temporarily make pallet 102 return to original state (states of all tray stacks).In addition, the descending stroke of lift pin is set for example 95mm for.So, lift pin 105 minimum arrival pallet below 15mm.Set 95mm for for initial rising, so that after taking out substrate, descend 95mm.Descending stroke is set 95mm all the time for, but upward stroke is first sub-value 95mm+ (30mm * rising number of times) all the time.
Then, in step S707, whether judgment processing number of plies k equals the number of plies n of pallet 102,, judges whether whole glass substrates 108 all have been removed that is, if all substrate all is removed, then finishes to take out action.Under the situation of the pallet that is not removed in addition, handle and transfer to step S708, for following one deck pallet is prepared, and then, carry out processing repeatedly from step S703 to step S706.For the pallet below the 3rd layer, pallet grippers 107 makes to rise overally 30mm and begin once more to control after the pallet 102 that will temporarily descend returns to original state.
In addition, taking out under the situation of glass substrate 108,,, only should cover picking-up so on n layer pallet, have under the situation of lid owing to do not exist in the pallet that is lifted among the step S703 from last (the n layer) pallet layer.If lid not, then what does not hold up, and becomes all pallets and all is stacked in state on the supporting plate 101.
In addition, only taking out under the situation of glass substrate 108 from the pallet of certain one deck, about the action of the diagram of circuit of Fig. 7, is to carry out with the order of step S703 → S704 → S705 → S706 → end.Should be noted in the discussion above that in this case that as mentioned above the pallet that is positioned at as the pallet lower floor that handles object must be empty.
(action of pallet grippers 107)
Use Fig. 8 A to Fig. 8 C that the action of pallet grippers 107 is specifically described.
Usually, be successively pallet 102 to be handled, but all make all pallets return to original state (state that all pallets are stacked) after each the processing, remove controlling of pallet grippers 107 from orlop.Then, pallet grippers 106 rising 30mm, the then remaining pallet that should handle is controlled the pallet of its top and is held up.This is the fundamental operation of pallet grippers 106.
In Fig. 8 A to Fig. 8 C, pallet grippers 106 is divided into three parts, for example can control 20 layers of pallet respectively and with its picking-up.Here, 60 layers of pallet can be controlled and hold up to pallet grippers integral body, but after per 20 layers of processing end, each pallet grippers just becomes readiness for action.That is, after finishing from the processing of 20 layers of pallet down, the pallet grippers 107d of lower floor becomes readiness for action, and after finishing from 21 layers of processing of playing 40 layers pallet, the pallet grippers 107c in middle level becomes readiness for action.
At this, Fig. 8 A represents (that is, to take out action under the situation of glass substrates 108 from down several the 20th layer of pallet 102 in n=60) from whole 60 layers of pallet.At this moment, pallet grippers 107 controls 40 layers of pallet 102, and with its picking-up.After the output of glass substrate 108 (input) finished, pallet grippers descended and temporarily makes pallet return to original state.
Then, shown in Fig. 8 B, pallet grippers 107 integral body drop to the position of the layering (be also referred to as and control action releasing or pallet separating action) that begins to carry out pallet 102.The so-called position that begins to carry out this layering is meant after the stacked processing position of the superiors' pallet in the pallet.
On using before this/in/the pallet grippers 107b to 107d of lower floor controls and holds up action, finished the processing of 20 layers of initial pallet, so shown in Fig. 8 C, lower tray anchor clamps 107d transfers to readiness for action, only uses pallet grippers 107b at the middle and upper levels and 107c controls and the picking-up of pallet action.Why like this pallet grippers 107 being divided into three assemblies, is in order to reduce device single-piece height as much as possible.That is, reason is, if three pallet grippers are moved up and down, then under situation about handling near 60 layers of pallet, needs roughly device height at double, thereby can not satisfy the requirement of equipment miniaturization.With respect to this, under situation about as present embodiment pallet grippers 107 being cut apart, if can handle for example device of 60 layers of pallet, then only needing roughly, the height of (60+20) layer gets final product.In addition, the number that pallet grippers is cut apart is not limited to three, and being divided into several parts technically can.
(structure of pallet grippers 107)
Figure 10 A to Figure 10 C is the figure of the structure of expression pallet grippers 107.Figure 10 A is that the master of pallet grippers looks synoptic map, and Figure 10 B is the side-looking synoptic map of pallet grippers, and Figure 10 C is the enlarged drawing that pallet grippers is controlled the drive part P of action.
In Figure 10 A, pallet grippers 107 keeps body 1004 to be arranged on the pallet grippers drive division 106 via pallet grippers, for example is divided into three assembly 107b to 107d, possess respectively 20 layers control pawl 107a (among Figure 10 A not diagram).In addition, each assembly 107b to 107d possesses 4 vertical columns 1003 that link with first bar 1001.
In addition, shown in Figure 10 B and Figure 10 C, second bar 1002 and first bar 1001 of fixing (fixing by connecting block 1006) to keep body 1004 outstanding modes to be provided with from pallet grippers link via guide rail 1009 and sliding part 1010.In addition, keep being fixed with pressure cylinder axle 1007, the first bars 1001 on the body 1004 in pallet grippers and be provided with pressure cylinder operating member 1008.Therefore, first bar 1001 is along direction (Y direction of Fig. 3) action of arrow G.Each assembly 107b to 107d on first bar 1001, is fixed with the vertical column 1003 that assembly 107b to 107d is installed, so by this action, also along the action of arrow G direction, thus, can carry out the action of controlling of pallet.
In addition, shown in Figure 10 B, ball-screw 1011 rotates by being arranged on the servomotors 1012 in the pallet grippers drive division 106, and thus, pallet grippers keeps body 1004 to be controlled and along H direction up-and-down movement.
In addition, position regulating member 1005 is arranged on second bar 1002, and this is used in especially with handling the occasion that metacoxal plate is encased in pallet, describes in the back for its action.This position regulating member 1005 is arranged on each assembly 107b to 107d.
(handling the action of packing into of back glass substrate)
Figure 11 is used for glass substrate 108 is taken out from pallet 102, and will handle the diagram of circuit that the action when afterwards glass substrate 108 is encased in the pallet 102 describes after handling by not shown predetermined processing device again.
In step S1101, the supporting plate 101 that at first will be stacked with empty pallet 102 is arranged on the assigned position of first conveyer 103.Here, pallet from following successively the note do 1 layer, 2 layers ... the n layer.
Then, in step S1102, supporting plate 101 is positioned.For this location action, the location action (the step S701 of Fig. 7) when taking out action with aforementioned glass substrate is identical, so omit explanation here.
After in step S1102, finishing the location, begin successively to handle from the pallet of the superiors.And (k only is the parameter of using on handling to setup parameter k=1 in step S1103, rather than expression is from the following pallet number of plies.On the other hand, k is pallets of which layer from another kind of meaning expression from the superiors).
In step S1104, control and hold up the lid that covers the superiors' (n layer) pallet with pallet grippers 107.Control by this pallet grippers 107 and vertical motion and confirm to rise stopping after, handle and transfer to step S1105.
In step S1105, lift pin 105 rises, and is outstanding from the pallet of the superiors' (so n layer, current k=1 is n-k+ 1=n).In addition, set for, the substrate delivery/reception in substrate when input all the time on pallet assigned position (for example 80mm) carry out.Therefore, initial lift pin 105 upward stroke L are 30mm * 60 layer+80mm=1880mm.If more vague generalization ground expression, the then layer+80mm of upward stroke L=30mm * (n-k+1).At this, 30mm is equivalent to the height of pallet, is ascending amount once.Then, confirm that lift pin 105 has risen after the setting path increment, handles and transfers to step S1106.In addition, outside the situation that the pallet the superiors is handled, lift pin 105 rising 80mm+15mm=95mm.The meaning about 15mm will be described hereinafter.
In step S1106, hold the pallet top that the robots arm 110 who handles back glass substrate 108 enters into the superiors.This robots arm 110 stops after arriving predefined position (position of pallet top 80mm).After confirming to stop, handling and transfer among the step S1107.
In step S1107, the maintenance action of being undertaken by robots arm 110 keeps switching to the come-up maintenance of being undertaken by blowing gas from absorption.Substrate-levitating this moment number formulary millimeter to the distance arm, its purpose are the destruction that prevents that aftermentioned position adjustment action (location of substrate 108) from causing substrate.The air that affirmation is carried out from robots arm 110 is handled and is transferred to step S1108 after attracting to switch to air blown.
In step S1108, keeping under the state of substrate-levitating by robots arm 110, position regulating member 1005 is approaching from the four direction of substrate 108, and (location) adjusted in the position of at first carrying out on the long side direction.What position regulating member 1005 contacted at first is not substrate 108, but pallet 102.That is, the tray position of position regulating member 1005 is confirmed roller 1203a (with reference to Figure 11) contact pallet 102, at first its position that is parallel to the limit (long limit) of X-axis is confirmed.Then, adjust roller 1202a, adjust the X-direction position of (location) substrate 108 in the mode of the position of imitating pallet 102 by substrate position.In step S1109, confirm by the position that roller 1203b to the minor face of pallet 102, promptly is parallel to the limit of Y-axis.And then, adjust roller 1202b by substrate position, adjust the Y direction position of (location) substrate 108 in the mode of the position of imitating pallet 102.That is, shown in Figure 12 A, import with the mode that the center-point O of pallet 102 coincide all the time with the center-point of glass substrate 108.In addition, owing to be four jiaos of states that engage that tray position is confirmed roller 1203a, 1203b and pallet 102, so can not act on unnecessary power to substrate 108 from roller 1202a, 1202b.In addition, the time set that location adjustment component 905 is advanced and retreat becomes specified time, through behind this specified time, handles and transfers to step S1110.
In step S1110, robots arm 110 is handed off to substrate 108 on the lift pin 105, and then, in step S1111, lift pin 105 descends, and substrate 108 is accommodated in the pallet 102.In addition, descending stroke is 125mm (80mm+30mm+15mm) in the present embodiment.The existence of 15mm is to make lift pin 105 15mm place standby below pallet 102 in order to set for.
And then in step S1112, pallet grippers 107 descends, all pallets that hold up the lid that comes and handle object pallet upper strata by pallet grippers 107 all turn back to the empty pallet top and mounting to supporting plate 101.That is, temporarily all pallets are turned back on the supporting plate.Finish the input action of first substrate like this, carry out above action, substrate to the last later on successively repeatedly.
Then, in step S1113, judge whether k=n, that is, all be transfused to substrate 108 on all pallets that judge whether to handle.All pallets all processed situation under, finish a series of input and handle, under the situation that untreated pallet remnants are arranged, handle and transfer to step S1114.
In step S1114, for substrate 108 being input to next the processing in the object pallet, the pallet that pallet grippers 107 will be covered and the n-k+ 1 layer is above holds up.Now, because k=1, so in step S1114, n layer (the superiors) and lid are held up.
In step S1115, in order to prepare following processing, the parameter k of next time is set at this parameter k+1 (that is Xia Ci parameter k=2: from last the second layer).
More than such input action be to carry out repeatedly basically, finish up to the processing of orlop pallet.
In such input action, carry out the operation that the position is adjusted by setting, even a little strain or crooked the generation are arranged, also can on the assigned position of pallet, accurately take in (centering) substrate 108 all the time on pallet.
In addition, also may be controlled to, glass substrate is input in the pallet of random layer.In this case, about the action of the diagram of circuit of Figure 11, move as long as establish k=i (expression is from the superiors' random layer) in step S1103, the end input action gets final product step S1112 finishes after.But, also same in this case with the action of taking out substrate from random layer, need to make that the pallet that is positioned at as the pallet lower floor that handles object is empty.
(structure of position regulating member)
Use Figure 12 A to Figure 12 C and Figure 13 that the structure of position regulating member 1005 is described.
Figure 12 A is the figure that observes substrate taking-up/input assigned position from the top.At this, be illustrated in the state that glass substrate 108 is through with in the pallet 102.
From Figure 12 A and Figure 10 A to Figure 10 C also as can be known, position regulating member 1005 is fixed on the two ends of second bar 1002.Therefore, on each pallet grippers assembly 107b to 107d, respectively be provided with one group.
Figure 12 B is the enlarged drawing of position regulating member 1005.This position regulating member 1005 possesses: centering parts 1201, setting two tray positions are in its lower section confirmed with roller 1203a, 1203b and superincumbent two substrate position adjustment roller 1202a, 1202b are set, move on X-direction by pressure cylinder 1204, on Y direction, move by pressure cylinder 1205.
Figure 12 C is the cutaway view of position regulating member 1005.Utilize Figure 12 B and Figure 12 C in addition clear and definite to the position of each roller relation.
Figure 13 is the enlarged drawing of the structure of expression pallet grippers 107 (1 components).Can understand the relation of position regulating member 1005 and pallet grippers 107 well from Figure 13.An assembly below the two ends of second bar 1002 on, be provided with position regulating member 1005.By like this an assembly below position regulating member 1005 is set, can be corresponding with the object pallet 102 of answering input substrate 108 rightly.And the structure by like this pallet grippers 107 and position regulating member 1005 being made of one also helps the miniaturization of implement device.
In addition, as mentioned above, position regulating member 1005 is fixed on second bar via making its pressure cylinder that moves 1204,1205 all around.And, as also having illustrated among the above-mentioned steps S1108, by the long side direction position of the front and back confirming operation pallet of pressure cylinder 1204, and as also having illustrated among the step S1109, by the short side direction position of the front and back confirming operation pallet of pressure cylinder 1205.What as previously mentioned, the location confirmation of this pallet is worked is that tray position is confirmed to confirm to use roller 1204b with roller 1203a and tray position.
(action during the pallet input)
Use Figure 14, the object lesson of the action when being input to stacked pallet 102 on the supporting plate 101 in the present embodiment describes.
Among Figure 14, in order to carry out pallet input efficiently, also be provided with on the base plate output-input device shown in Figure 3 supporting plate sorter 1401, with the sorting belt 1402 of motion before and after Y-axis is abreast on the supporting plate sorter and relaying with conveyer 1403.
Now, suppose that all pallets on first conveyer 103 have been finished taking-up/input handles the standby on sorting belt 1402 of new pallet.
Mounting has the supporting plate of handling the pallet be through with to move to second conveyer 104 from first conveyer 103, stops after with conveyer 1403 consigning to relaying.Then, take over pallet after the processing from the shift action of second conveyer 104 to relaying conveyer 1403, the supporting plate that mounting has a new pallet is configured on the assigned position of first conveyer 103 via second conveyer 104 from the position SB of sorting belt 1402.Afterwards, sorting belt 1402 moves to end 1401a by supporting plate sorter 1401, access pallet after the processing with conveyer 1403 from relaying after, sorting belt 1402 turns back to position SB once more, the pallet after output is handled.Then, transfer to foregoing location action, substrate taking-up action or processing metacoxal plate input action.
(effect of present embodiment)
As described above, according to present embodiment, first and second conveyer 103 and 104 height are fixed, by making lift pin 105 liftings with glass substrate 108 picking-ups and with its taking-up/input, so, do not need to make first and second conveyer 103 and 104 self lifting, simplicity that can the implement device action, and space that can implement device is saved, particularly under height-limited situation effectively.Promptly, under the situation that makes conveyer self lifting, because pin is fixed, so as MIN device, at first need pin long (with the cooresponding length of the pallet number of plies), and then also need and the cooresponding height of the pallet number of plies as absolute length, and in the present embodiment, owing to make the lift pin lifting, be the twice of the pallet number of plies so do not need to make the device height.Although the independent weight of pallet and little is very big if stacked a lot of layers of weight also can become one by one.In this case, it is very important that the up-and-down movement self of this weight is restricted to required Min., can realize this point in the present embodiment.
In addition, in the present embodiment, the taking-up or the input action of a glass substrate 108 of every end, lift pin 105 is turned back under the superiors' pallet (as the pallet of handling object), even so unclamped controlling of pallet grippers 107 because of carelessness, needn't worry that also lift pin 105 penetrates the glass substrate 108 that is accommodated in the pallet that is untreated, and can significantly reduce the danger of glass substrate 108 breakages.The easy imagination, when pin fixedly the time, if pallet grippers throws off, the possibility that breakage takes place the major part that then is accommodated in the glass substrate in the pallet of being controlled is bigger.
And then, in the present embodiment, in the stage of finishing to the processing of whole pallets, become on first conveyer 103 all pallets all mounting in the state of supporting plate 101.Therefore, after finishing, processing can enter into the action that has the supporting plate of the pallet that next should handle to exchange with mounting rapidly, so, can shorten the processing time that substrate is carried on the whole, can realize carrying efficiently.And, in the present embodiment, provide a kind of structure that realizes the effective action that supporting plate is changed as shown in Figure 14, change so can more successfully carry out supporting plate.
In addition, in the present embodiment, particularly under the situation of processing back glass substrate of packing into once more, be provided with the position adjusting mechanism 1005 (with reference to Figure 12 A to Figure 12 C) of pallet and glass substrate, so, even exist between used life in the pallet to be produced because the strain that wearing and tearing cause, also can be all the time the allocation position of pallet upper substrate be kept constant.
And then, in the present embodiment, pallet grippers 107 is divided into three parts and be provided with structure and identical three assemblies of effect, so finished the stage that pallet is handled on for example 20 layers of 20 layers of ground, can reduce the assembly that carries out holding action, so height of devices can be suppressed to Min., can the implement device miniaturization.In addition, the quantity of cutting apart of pallet grippers is not limited to three, and the tray number that assembly can be controlled also is not limited to 20 layers.
The present invention is not limited to above-mentioned embodiment, can carry out various changes and modification not breaking away from the spirit and scope of the invention.Therefore, the present invention is not limited to specific embodiment except that by the additional claim definition.
Claims (14)
1. a base plate output-input device is used to carry out the taking-up of substrate from pallet, perhaps to described pallet input substrate, it is characterized in that possessing:
Conveyer, it is used to make the supporting plate that is stacked with the multilayer pallet to move;
The supporting plate detent mechanism, it carries out the location of described supporting plate on the assigned position of described conveyer;
Lift pin, its under the state of described supporting plate having been located by described detent mechanism, by be arranged on described supporting plate and the described pallet pass through to use be used for described substrate is held up from pallet in the hole;
The pallet elevator structure, it is used for described multilayer pallet stacked on the described supporting plate is separated into and comprises and handle the object pallet and be positioned at first pallet group of lower floor and the second pallet group that more described processing object pallet is positioned at the upper strata than it, makes described lift pin and the described first pallet group lifting relatively; And
The pallet lifting control mechanism, it controls the action of described pallet elevator structure;
Described control mechanism is controlled the position relation between described lift pin and the described processing object pallet, make when between described first pallet group and the described second pallet group, having guaranteed the space by described pallet elevator structure, the described processing object of the end-to-end distance of described lift pin pallet has predetermined distance, makes that described substrate taking-up or input can be carried out.
2. base plate output-input device as claimed in claim 1 is characterized in that, described lift pin is retractile pin,
And then, be provided with the lift pin control mechanism, described lift pin control mechanism is controlled the action of described lift pin, make described pallet elevator structure make the described second pallet group lifting and at described processing object pallet top belay the space during, the described processing object of the end-to-end distance of described lift pin pallet has predetermined distance.
3. base plate output-input device as claimed in claim 1, it is characterized in that, described pallet lifting control mechanism is controlled in the following manner, that is, make described pallet elevator structure keep handling the object pallet than next and be positioned at the pallet group on upper strata and make its lifting.
4. base plate output-input device as claimed in claim 1 is characterized in that described control mechanism is controlled in the following manner, that is, make described pallet elevator structure keep the described second pallet group and make its lifting.
5. base plate output-input device as claimed in claim 1 is characterized in that, described pallet elevator structure has the identical respectively lifting assembly of a plurality of structures,
Described pallet lifting control mechanism is controlled described pallet elevator structure, makes when every pallet processing in the regulation number of plies finishes, and the quantity of the described lifting assembly that uses as described lifting mechanism is reduced.
6. base plate output-input device as claimed in claim 1, it is characterized in that, taking out from described pallet under the situation of described substrate, described control mechanism is controlled the action of described pallet elevator structure and described lift pin, so that take out described substrate successively from the orlop of described multilayer pallet.
7. base plate output-input device as claimed in claim 1, it is characterized in that, under accepting described substrate and being input to situation in the described pallet, described pallet lifting control mechanism is controlled the action of described pallet elevator structure, so that import described substrate successively from the superiors of described multilayer pallet.
8. base plate output-input device as claimed in claim 7, it is characterized in that, also possess position adjusting mechanism, described position adjusting mechanism is adjusted the position that is configured in the described substrate on the described pallet under accepting described substrate and being input to situation in the described pallet.
9. base plate output-input device as claimed in claim 7 is characterized in that, described position adjusting mechanism is installed on the described pallet elevator structure.
10. base plate output-input device as claimed in claim 7 is characterized in that, described pallet elevator structure has the identical respectively lifting assembly of a plurality of structures,
Described position adjusting mechanism is installed on each of described a plurality of lifting assemblies.
11. base plate output-input device as claimed in claim 1 is characterized in that, also possesses the supporting plate sorter, described supporting plate sorter makes the input path of described supporting plate different with outgoing route.
12. a base plate output-input device is used for taking out substrate from pallet, perhaps substrate is input in the pallet, it is characterized in that possessing:
Conveyer, it is used to make the supporting plate that is stacked with the multilayer pallet to move;
The supporting plate detent mechanism, it carries out the location of described supporting plate on the assigned position of described conveyer;
Mechanism is prepared in substrate input, and it is separated into the described multilayer pallet on the described supporting plate and handles object pallet and non-processing object pallet under the state of described supporting plate having been located by described detent mechanism, for the input action of described substrate ready;
Control mechanism, it controls the action that mechanism is prepared in described substrate input;
Position adjusting mechanism, it is adjusted the position that is disposed at the described substrate on the described pallet under situation about described substrate being input in the described pallet.
13. base plate output-input device as claimed in claim 12 is characterized in that, the input of described substrate is prepared mechanism and is possessed the described non-processing object pallet of maintenance and make the pallet elevator structure of its lifting and the lift pin of knee-action elastically;
Described control mechanism is controlled the action of described lift pin, so that make described non-processing object pallet between the rising stage at described pallet elevator structure, the described processing object of the end-to-end distance of described lift pin pallet has predetermined distance, carries out the preparation of described substrate input.
14. a base plate output-input method is used for taking out substrate from pallet, perhaps substrate is input in the pallet, it is characterized in that possessing:
The supporting plate mobile process, it moves the supporting plate that is stacked with the multilayer pallet by conveyer;
The supporting plate positioning process, it carries out the location of described supporting plate on the assigned position of described conveyer;
Pallet lifting operation, it is used for being separated into and comprising and handle the object pallet and be positioned at first pallet group of lower floor and the second pallet group that more described processing object pallet is positioned at the upper strata than it being stacked in described multilayer pallet on the described supporting plate, is used in lift pin and the described first pallet group lifting relatively that described substrate is held up from described processing object pallet;
Pallet lifting control operation, it is controlled the relative lifting action in the described pallet lifting operation;
In described control operation, position relation to described lift pin and described processing object pallet is controlled, so that when between described first pallet group and the described second pallet group, having guaranteed the space reliably utilizing described pallet lifting operation, the described processing object of the end-to-end distance of described lift pin pallet has predetermined distance, makes that described substrate taking-up or input can be carried out.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2004/002471 WO2005082751A1 (en) | 2004-03-01 | 2004-03-01 | Substrate carrying in/out device and method of carrying in/out substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1922087A true CN1922087A (en) | 2007-02-28 |
Family
ID=34897937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2004800421768A Pending CN1922087A (en) | 2004-03-01 | 2004-03-01 | Base plate output-input device and base plate output-input method |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4516067B2 (en) |
| CN (1) | CN1922087A (en) |
| WO (1) | WO2005082751A1 (en) |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011011954A1 (en) * | 2009-07-29 | 2011-02-03 | 东莞宏威数码机械有限公司 | Apparatus with nested support pin assemblies |
| CN102275744A (en) * | 2010-06-12 | 2011-12-14 | 王一田 | Automatic pallet loading and unloading machine |
| CN101419928B (en) * | 2007-10-22 | 2012-02-15 | 株式会社迪思科 | Receiving and converying device of workpiece and cutting device with the same |
| CN101772463B (en) * | 2007-08-02 | 2012-06-06 | 平田机工株式会社 | Component transfer apparatus and method |
| CN103029988A (en) * | 2011-09-28 | 2013-04-10 | 株式会社安川电机 | Manipulator and substrate transfer device |
| CN103508214A (en) * | 2013-10-11 | 2014-01-15 | 武汉人天包装技术有限公司 | Automatic tray separating machine |
| CN105336651A (en) * | 2014-06-10 | 2016-02-17 | 北大方正集团有限公司 | Wafer transposition system |
| CN107150906A (en) * | 2016-03-04 | 2017-09-12 | 株式会社长冈制作所 | Workpiece piece-rate system and workpiece separation method |
| CN107572256A (en) * | 2017-10-27 | 2018-01-12 | 惠州市齐力建筑工程有限公司 | A kind of blanking machine being used for advertisement glass cutting stock |
| CN107585583A (en) * | 2017-10-11 | 2018-01-16 | 佛山市三水区精联自动化设备有限公司 | A kind of pallet stacking streamline |
| CN108820795A (en) * | 2018-07-13 | 2018-11-16 | 广州精陶机电设备有限公司 | A kind of positioning frame and localization method of wide format printer |
| CN109051684A (en) * | 2018-09-19 | 2018-12-21 | 赤壁市万皇智能设备有限公司 | A kind of circuit board turning machine for circuit board printing |
| WO2020077902A1 (en) * | 2018-10-18 | 2020-04-23 | 深圳市华星光电半导体显示技术有限公司 | Substrate transporting apparatus |
| CN111337511A (en) * | 2020-04-21 | 2020-06-26 | 佛山市海协科技有限公司 | Automatic detection line of integrated circuit board |
| CN112340490A (en) * | 2020-11-03 | 2021-02-09 | 徐州亮华包装制品有限公司 | Continuous automatic paper taking device of packaging carton and working method thereof |
| CN112534343A (en) * | 2018-09-28 | 2021-03-19 | 应用材料公司 | Method for rapid loading of substrates in a flat panel tool |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100820755B1 (en) | 2006-12-04 | 2008-04-11 | 주식회사 신성이엔지 | Multi-transfer apparatus of substrates |
| CN103896057B (en) * | 2014-04-16 | 2016-01-20 | 苏州博众精工科技有限公司 | A kind of Full-automatic blanking mechanism |
| CN106348024B (en) * | 2016-11-04 | 2019-01-08 | 广州莱因自动化设备有限公司 | A kind of disc stack machine |
| WO2020170547A1 (en) * | 2019-02-19 | 2020-08-27 | 村田機械株式会社 | Transport system |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2913439B2 (en) * | 1993-03-18 | 1999-06-28 | 東京エレクトロン株式会社 | Transfer device and transfer method |
| JP3964736B2 (en) * | 2002-05-22 | 2007-08-22 | 富士通株式会社 | Parts supply device |
| JP4270434B2 (en) * | 2002-11-29 | 2009-06-03 | シャープ株式会社 | Substrate transfer device, substrate removal method, and substrate storage method |
| JP4003882B2 (en) * | 2003-09-26 | 2007-11-07 | シャープ株式会社 | Substrate transfer system |
-
2004
- 2004-03-01 CN CNA2004800421768A patent/CN1922087A/en active Pending
- 2004-03-01 JP JP2006510368A patent/JP4516067B2/en not_active Expired - Fee Related
- 2004-03-01 WO PCT/JP2004/002471 patent/WO2005082751A1/en active Application Filing
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101772463B (en) * | 2007-08-02 | 2012-06-06 | 平田机工株式会社 | Component transfer apparatus and method |
| CN101419928B (en) * | 2007-10-22 | 2012-02-15 | 株式会社迪思科 | Receiving and converying device of workpiece and cutting device with the same |
| WO2011011954A1 (en) * | 2009-07-29 | 2011-02-03 | 东莞宏威数码机械有限公司 | Apparatus with nested support pin assemblies |
| CN102275744A (en) * | 2010-06-12 | 2011-12-14 | 王一田 | Automatic pallet loading and unloading machine |
| CN102275744B (en) * | 2010-06-12 | 2015-05-20 | 王一田 | Automatic pallet loading and unloading machine |
| CN103029988A (en) * | 2011-09-28 | 2013-04-10 | 株式会社安川电机 | Manipulator and substrate transfer device |
| CN103508214A (en) * | 2013-10-11 | 2014-01-15 | 武汉人天包装技术有限公司 | Automatic tray separating machine |
| CN105336651A (en) * | 2014-06-10 | 2016-02-17 | 北大方正集团有限公司 | Wafer transposition system |
| CN107150906B (en) * | 2016-03-04 | 2020-08-07 | 株式会社长冈制作所 | Workpiece separation system and workpiece separation method |
| CN107150906A (en) * | 2016-03-04 | 2017-09-12 | 株式会社长冈制作所 | Workpiece piece-rate system and workpiece separation method |
| CN107585583A (en) * | 2017-10-11 | 2018-01-16 | 佛山市三水区精联自动化设备有限公司 | A kind of pallet stacking streamline |
| CN107572256A (en) * | 2017-10-27 | 2018-01-12 | 惠州市齐力建筑工程有限公司 | A kind of blanking machine being used for advertisement glass cutting stock |
| CN108820795A (en) * | 2018-07-13 | 2018-11-16 | 广州精陶机电设备有限公司 | A kind of positioning frame and localization method of wide format printer |
| CN108820795B (en) * | 2018-07-13 | 2024-04-09 | 广州精陶机电设备有限公司 | Positioning rack and positioning method for large-format printer |
| CN109051684A (en) * | 2018-09-19 | 2018-12-21 | 赤壁市万皇智能设备有限公司 | A kind of circuit board turning machine for circuit board printing |
| CN112534343A (en) * | 2018-09-28 | 2021-03-19 | 应用材料公司 | Method for rapid loading of substrates in a flat panel tool |
| CN112534343B (en) * | 2018-09-28 | 2024-02-23 | 应用材料公司 | Method for rapid loading of substrates in a flat panel tool |
| US12061422B2 (en) | 2018-09-28 | 2024-08-13 | Applied Materials, Inc. | Method for fast loading substrates in a flat panel tool |
| WO2020077902A1 (en) * | 2018-10-18 | 2020-04-23 | 深圳市华星光电半导体显示技术有限公司 | Substrate transporting apparatus |
| CN111337511A (en) * | 2020-04-21 | 2020-06-26 | 佛山市海协科技有限公司 | Automatic detection line of integrated circuit board |
| CN111337511B (en) * | 2020-04-21 | 2020-10-27 | 渭南高新区木王科技有限公司 | Automatic detection line of integrated circuit board |
| CN112340490A (en) * | 2020-11-03 | 2021-02-09 | 徐州亮华包装制品有限公司 | Continuous automatic paper taking device of packaging carton and working method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2005082751A1 (en) | 2005-09-09 |
| JPWO2005082751A1 (en) | 2008-01-17 |
| JP4516067B2 (en) | 2010-08-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1922087A (en) | Base plate output-input device and base plate output-input method | |
| CN1100478C (en) | Electronic-parts mounting apparatus | |
| CN1258312C (en) | Device for transfering/holding sheetlike member and its method | |
| CN101861090B (en) | Tray supply apparatus | |
| WO2015063934A1 (en) | Component-mounting device | |
| KR102043984B1 (en) | System and method for separating workpieces | |
| JP6650651B2 (en) | Pallet transfer device and pallet transfer method using the same | |
| JP2012171057A (en) | Cutting apparatus | |
| CN1887669A (en) | Glass plate unpacking system and method | |
| JP2001048350A (en) | Transfer error preventing device for work | |
| JP4893176B2 (en) | Conveying apparatus and conveying method | |
| EP3255979B1 (en) | Lift assembly for processing eggs | |
| JP5662839B2 (en) | Electronic component mounting apparatus and electronic component mounting method | |
| KR100917001B1 (en) | Tray supplying and collecting apparatus for test handler and tray transferring method using the same | |
| US20150291373A1 (en) | Workpieces stacking apparatus | |
| CN111106052B (en) | Conveying device, film forming device, system and method for manufacturing organic EL element | |
| JP6374344B2 (en) | Transport method and transport system | |
| EP3685934A1 (en) | Workpiece conveying system, conveyed workpiece number detector, and control method for the workpiece conveying system | |
| JP6130500B2 (en) | Work processing system | |
| KR100828699B1 (en) | Substrate carrying in/out device and method of carrying in/out substrate | |
| CN113148655A (en) | Glass processing production line and loading attachment thereof | |
| JP4923752B2 (en) | Board processing system | |
| JP5064181B2 (en) | Substrate cutting device | |
| KR100567848B1 (en) | A Memory Device Handler | |
| KR102576514B1 (en) | Tray multi-process conveying system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| AD01 | Patent right deemed abandoned |
Effective date of abandoning: 20070228 |
|
| C20 | Patent right or utility model deemed to be abandoned or is abandoned |