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CN1982897B - Microcurrent tester - Google Patents

Microcurrent tester Download PDF

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Publication number
CN1982897B
CN1982897B CN200510111586XA CN200510111586A CN1982897B CN 1982897 B CN1982897 B CN 1982897B CN 200510111586X A CN200510111586X A CN 200510111586XA CN 200510111586 A CN200510111586 A CN 200510111586A CN 1982897 B CN1982897 B CN 1982897B
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CN
China
Prior art keywords
circuit
test
current
zeroing
satisfy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200510111586XA
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Chinese (zh)
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CN1982897A (en
Inventor
聂纪平
陆衡周
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Beiling Co Ltd
Original Assignee
Shanghai Beiling Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to CN200510111586XA priority Critical patent/CN1982897B/en
Publication of CN1982897A publication Critical patent/CN1982897A/en
Application granted granted Critical
Publication of CN1982897B publication Critical patent/CN1982897B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)

Abstract

A micro-current test device consists of a conversion circuit for testing current polarity which is used to test the input or output leakage current of a specific pin and satisfy the symmetry and sensitivity in micro-electronics circuit; a multi-level filter circuit which is used to ensure the anti-jamming capability and satisfy the test precision; a zero-setting compensation module including a zero-setting circuit and a leakage compensation circuit connected with the zero-setting circuit, which is used to satisfy the zero-setting and leakage compensation in testing of the tested piece and ensure the limited sensivity of the test; and a pico-ampere current amplifier module, which is used to ensure the input stability of test. The present invention solves the problems in high-presion static test of micro-current in intergrated circuit and the invention is characterized in simple calibration, convenient use, small power consumption, and hign precision which reaches 10-14 ampere and also features in polarity converse test.

Description

A kind of little current testing device
Technical field
The present invention relates to little testing current of integrated circuit (IC)-components and circuit, especially refer to a kind of little current testing device.
Background technology
Along with the fast development of integrated circuit progress, reached very high requirement for the micro current of integrated circuit (IC)-components, sometimes even need precision to be less than 10 -12Ampere.
Traditional little testing current at device, its method is often too loaded down with trivial details, and equipment is also comparatively complicated, need power source special and calibrating installation or the like simultaneously, and power consumption is bigger, is unfavorable for normal use.
And for little current testing device of large scale integrated circuit device, the general current precision and the power consumption of having relatively high expectations simultaneously, and current general equipment is difficult to reach required index, especially can not satisfy design, test and the application need of some special integrated circuit.
Summary of the invention
The object of the present invention is to provide a kind of simple, easy to use, that power consumption is very little, precision is high little current testing device of calibrating.
A kind of little current testing device provided by the present invention, it is characterized in that, comprise multi-stage filter circuit, zeroing compensating module, detect current polarity change-over circuit and the skin peace level electric current amplification module that links to each other with these circuit respectively, described multi-stage filter circuit also links to each other with the zeroing compensating module with described detection current polarity change-over circuit respectively, wherein: detect the current polarity change-over circuit, be used to test the input or the output leakage current of specific pin, satisfy the symmetry and the sensitivity of microelectronic circuit test; Multi-stage filter circuit is used to guarantee antijamming capability, satisfies the precision of test; The zeroing compensating module comprises zeroing circuit and the compensator circuit of electric leakage that is attached thereto, and returns to zero and the compensation of leaking electricity when being used to satisfy the measured piece test, guarantees the limiting snesibility of testing; A skin peace level electric current amplification module is used to guarantee the input stability of testing.
In above-mentioned little current testing device, skin peace level electric current amplification module has adopted amplification circuit and high resistant input.
In above-mentioned little current testing device, detect the current polarity change-over circuit and adopt a selector switch.
In above-mentioned little current testing device, zeroing circuit is made up of some resistance, two diodes, two adjustable resistances and an amplifier.
In above-mentioned little current testing device, compensator circuit of electric leakage is made up of some resistance, adjustable resistance and an amplifier.
Adopted above-mentioned technical solution, promptly the input end at the little current testing device of the present invention adopts special amplification circuit and high resistant input, symmetry and sensitivity have all reached far above general little current tester, and taked the multiple-stage filtering design, make noise objective<0.001mV, adopt compensator circuit of electric leakage simultaneously, made its limiting snesibility can reach 10 -15Ampere, power consumption is 0.1mW only, well below like product.The invention solves little electric current high precision static test of the integrated circuit under some condition, have the calibration simple, easy to use, power consumption is very little, precision has reached 10 -14Ampere, the characteristics that can carry out the reversal of poles test simultaneously.
Description of drawings
Fig. 1 is the circuit block diagram of the little current testing device of the present invention;
Fig. 2 is the schematic diagram of the little current testing device of the present invention.
Embodiment
As shown in Figure 1, the little current testing device of the present invention is connected between measured piece, stabilized voltage supply and Pi An (PA) the level electric current display device, comprise secondary filtering circuit 1, zeroing compensating module 2, detect current polarity change-over circuit 3 and skin peace (PA) the level electric current amplification module 4 that links to each other with these circuit respectively, described secondary filtering circuit 1 also links to each other with zeroing compensating module 2 with described detection current polarity change-over circuit 3 respectively.
Referring to Fig. 2, detect current polarity change-over circuit 3, be used to test the input or the output leakage current of specific pin, satisfy the symmetry and the sensitivity of microelectronic circuit test.Can adopt a selector switch S1 to take on.
Secondary filtering circuit 1 is used to guarantee antijamming capability, satisfies the precision of test.
Zeroing compensating module 2, comprise zeroing circuit and the compensator circuit of electric leakage that is attached thereto, being used to satisfy the measured piece test time returns to zero and leaks electricity compensation, guarantee the limiting snesibility of testing, wherein: zeroing circuit is made up of resistance R 31, R32, R33, R34, R35, R36, diode D1, D2, adjustable resistance W31, W32 and an amplifier U3; Compensator circuit of electric leakage is made up of some resistance R 42, R43, R44, R45, adjustable resistance W41 and an amplifier U4.
Skin peace level electric current amplification module 4 has been used to guarantee the input stability of testing.Adopt the input of special amplification circuit (model INA116) and high resistant, guaranteed the input stability of test.
In sum, the testing feature that the little current testing device of the present invention is primarily aimed at integrated circuit has designed polarity inversion circuit, can test the input or the output leakage current of specific pin easily.Design multi-stage filter circuit simultaneously, guaranteed antijamming capability, satisfied the precision of test.
Though the little current testing device of the present invention is described with reference to current instantiation, but those skilled in the art should be realized that, above example only is to be used for illustrating the present invention, also can make the variation and the modification of various equivalences under the situation that does not break away from spirit of the present invention.Therefore, if in connotation scope of the present invention to the variation of above-mentioned example, modification all will drop in the scope of claims of the present invention.

Claims (5)

1. little current testing device, it is characterized in that, comprise multi-stage filter circuit, zeroing compensating module, detect current polarity change-over circuit and the skin peace level electric current amplification module that links to each other with these circuit respectively, described multi-stage filter circuit also links to each other with the zeroing compensating module with described detection current polarity change-over circuit respectively
Wherein:
Detect the current polarity change-over circuit, be used to test the input or the output leakage current of specific pin, satisfy the symmetry and the sensitivity of microelectronic circuit test;
Multi-stage filter circuit is used to guarantee antijamming capability, satisfies the precision of test;
The zeroing compensating module comprises zeroing circuit and the compensator circuit of electric leakage that is attached thereto, and returns to zero and the compensation of leaking electricity when being used to satisfy the measured piece test, guarantees the limiting snesibility of testing;
A skin peace level electric current amplification module is used to guarantee the input stability of testing.
2. require 1 described little current testing device according to claim, it is characterized in that: described skin peace level electric current amplification module has adopted amplification circuit and high resistant input.
3. require 1 or 2 described little current testing devices according to claim, it is characterized in that: described detection current polarity change-over circuit adopts a selector switch.
4. require 1 described little current testing device according to claim, it is characterized in that: described zeroing circuit is made up of some resistance (R31, R32, R33, R34, R35, R36), two diodes (D1, D2), two adjustable resistances (W31, W32) and an amplifier (U3).
5. require 1 described little current testing device according to claim, it is characterized in that: described compensator circuit of electric leakage is made up of some resistance (R42, R43, R44, R45), an adjustable resistance (W41) and an amplifier (U4).
CN200510111586XA 2005-12-16 2005-12-16 Microcurrent tester Expired - Fee Related CN1982897B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200510111586XA CN1982897B (en) 2005-12-16 2005-12-16 Microcurrent tester

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN200510111586XA CN1982897B (en) 2005-12-16 2005-12-16 Microcurrent tester

Publications (2)

Publication Number Publication Date
CN1982897A CN1982897A (en) 2007-06-20
CN1982897B true CN1982897B (en) 2011-05-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN200510111586XA Expired - Fee Related CN1982897B (en) 2005-12-16 2005-12-16 Microcurrent tester

Country Status (1)

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CN (1) CN1982897B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8098696B2 (en) * 2009-09-04 2012-01-17 Rosemount Inc. Detection and compensation of multiplexer leakage current
CN102098012B (en) * 2010-12-01 2013-06-26 海信科龙电器股份有限公司 Detection and amplification device for micro current
CN109709151B (en) * 2019-01-30 2021-02-09 南通大学 Dielectric film electrical property measuring system

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
晏双龙 等.MA微电流测量仪的研制及应用.《化学传感器》.1998,第18卷(第4期),60-63. *
王国荣.微弱电流的测量与I/F变换电路的设计.核电子学与探测技术25 4.2005,25(4),358-362.
王国荣.微弱电流的测量与I/F变换电路的设计.核电子学与探测技术25 4.2005,25(4),358-362. *

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