CN1618532A - Vacuum cleaner - Google Patents
Vacuum cleaner Download PDFInfo
- Publication number
- CN1618532A CN1618532A CN200410095339.0A CN200410095339A CN1618532A CN 1618532 A CN1618532 A CN 1618532A CN 200410095339 A CN200410095339 A CN 200410095339A CN 1618532 A CN1618532 A CN 1618532A
- Authority
- CN
- China
- Prior art keywords
- workpiece
- mentioned
- dust
- side cleaning
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims abstract description 115
- 239000000428 dust Substances 0.000 claims abstract description 60
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 14
- 230000032258 transport Effects 0.000 claims description 12
- 230000000712 assembly Effects 0.000 claims description 3
- 238000000429 assembly Methods 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 abstract description 7
- 238000009434 installation Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 229920005549 butyl rubber Polymers 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
Images
Landscapes
- Cleaning In General (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Liquid Crystal (AREA)
- Cleaning Implements For Floors, Carpets, Furniture, Walls, And The Like (AREA)
Abstract
The present invention relates to a dust removing apparatus capable of removing dust stuck to plate-shaped workpiece. Said dust removing apparatus has certain of side cleaning units exclusively removing dust stuck to side faces of a workpiece. Said side cleaning unit has a pushing and pressing mechanism contacting with the side of the workpiece reliably, each side cleaning unit is configured around the rotating mechanism of the side cleaning part of said unit, and said unit can be replaced easily.
Description
Technical field
The present invention relates to be used to remove dust arrester, specifically, relate to the dust arrester that also can remove attached to the dust of side surface of workpiece attached to the dust on the plate workpieces such as circuit substrate.
Background technology
The substrate that tellite, crystal liquid substrate etc. are accurate, in order to improve its yield rate, before the precise operation of operation of firing circuitous pattern and assembling operation etc., remove as best one can attached to the (dust: the various foreign matters that produce when comprising the cutting of liquid crystal board etc.) of the dust on the workpiece.For this reason, in prior art, proposed to be exclusively used in the dust arrester of removing attached to the dust on this plate workpiece.
This dust arrester, the dust arrester that for example has Japanese kokai publication hei 6-296945 communique to disclose, in this dust arrester, in the zone of passing through that is placed on the workpiece that is transported on the conveyer belt, the cleaning roller of rotating brush or Roller for sticking dust etc. is set, when workpiece passed through cleaning roller, the dust on the workpiece was removed by cleaning roller.
But up to now, cleaning roller almost can only clean the main region (top and bottom surface) of workpiece, also is not exclusively used in the edge of cleaning workpiece and the cleaning agency of side.
At present, often will clean the thicker workpiece of thickness of slab such as liquid crystal board, therefore, in order to improve yield rate, also requirement can be removed the micro-dust attached to the side.
Summary of the invention
The present invention makes in order to address the above problem, and its objective is provides a kind of dust arrester that also can remove attached to the dust of side surface of workpiece.
To achieve these goals, the present invention has following feature.
At first, the dust arrester of technical scheme 1 record, have the cleaning assembly of removing attached to the dust on the plate workpiece, with the cleaning roller that is located in the above-mentioned cleaning assembly, remove attached to the dust on the above-mentioned workpiece, it is characterized in that, have and be exclusively used in the side cleaning assembly of removing attached to the dust on the above-mentioned side surface of workpiece.
The dust arrester of technical scheme 2 records, it is characterized in that, above-mentioned side cleaning assembly, have the package base of the side cleaning roller that can be installed with contiguously, the above-mentioned side of supporting cleaning roller along the side of above-mentioned workpiece, with above-mentioned side cleaning roller always towards the dipper crowding gear of above-mentioned side surface of workpiece pushing.
The dust arrester of technical scheme 3 records is characterized in that the direction of principal axis length of above-mentioned side cleaning roller, set to such an extent that the thickness of slab than above-mentioned workpiece is big at least, above-mentioned side cleaning roller, the center of its direction of principal axis length is with respect to the face that transports of the above-mentioned workpiece assigned position that staggers.
The dust arrester of technical scheme 4 records is characterized in that above-mentioned side cleaning roller along the carriage direction of above-mentioned workpiece, is provided with 2 at least on the said modules pedestal.
The dust arrester of technical scheme 5 records is characterized in that also have rotary components, this rotary components has the feathering axis parallel with the face that transports of above-mentioned workpiece, on above-mentioned rotary components, is provided with several above-mentioned side cleaning assemblies.
The dust arrester of technical scheme 6 records is characterized in that, above-mentioned side cleaning assembly is the center with above-mentioned feathering axis, with 90 ° interval, is arranged on 4 positions on the above-mentioned rotary components.
According to the invention of technical scheme 1 record, be exclusively used in the side cleaning assembly of removing attached to the dust on the above-mentioned side surface of workpiece owing to have, so, can remove effectively attached to the dust on side surface of workpiece and the edge.
According to the invention of technical scheme 2 record, because the side cleaning roller side of contact workpiece effectively, so the side cleaning roller moves along the shape of side surface of workpiece, even also can remove dust effectively to the workpiece of complicated shape.
Invention according to technical scheme 3 records, because half part of the pact of workpiece and side cleaning roller contacts, so, when the side cleaning roller dirty the time, make 180 ° of side cleaning roller counter-rotatings, the original part of workpiece and second half is contacted, can obtain 2 cleaning faces with 1 side cleaning roller.
According to the invention of technical scheme 4 records, owing to be provided with 2 side cleaning rollers at carriage direction, so, can remove more effectively attached to the dust on the workpiece.
According to the invention of technical scheme 5 record, the side cleaning roller in using is dirty and when needing to change, as long as rotary components is rotated, just original side cleaning roller can be presented on the zone of passing through of workpiece, so, needn't interrupt cleaning work, just can safeguard the roller after the use.
Invention according to technical scheme 6 records, because assembly is cleaned in the side is located at 4 positions, not only maintainability is better, and can be according to the kind of workpiece, change the form of side cleaning assembly, can carry out cleaning work to different types of workpiece continuously with 1 dust arrester.
Description of drawings
Fig. 1 is the stereogram of the dust arrester of the present invention's one example.
Fig. 2 is the in-built sectional drawing of dust arrester of the above-mentioned example of expression.
Fig. 3 is the stereogram that the side cleaning assembly of the dust arrester of the above-mentioned example of expression is constructed.
Fig. 4 is the sectional drawing of side cleaning installation structure that is used to illustrate the dust arrester of above-mentioned example.
Fig. 5 A is the front elevation of the roll assembly in the above-mentioned side cleaning assembly, and Fig. 5 B is the sectional drawing of above-mentioned roll assembly.
Fig. 6 is the exploded perspective view of above-mentioned roll assembly.
Fig. 7 is the ideograph of the installation form of the above-mentioned side cleaning of explanation assembly.
The specific embodiment
Below, with reference to description of drawings dust arrester of the present invention.Fig. 1 be the present invention's one example the stereogram of dust arrester.Fig. 2 is its in-built sectional drawing of expression.
This dust arrester 1 has the side cleaning agency 1a of main cleaning side surface of workpiece W1, at the discharge oral-lateral (downstream side) of side cleaning agency 1a, has the common cleaning agency 1b of main cleaning workpiece planarization W2.
Among the present invention, side surface of workpiece W1 is meant along the end face of the workpiece W of workpiece W carriage direction.Workpiece planarization W2 is meant the top and bottom surface of workpiece W.In addition, in this example, side cleaning agency 1a is provided in a side of the upstream side of workpiece W carriage direction, still, also can be arranged on the downstream side of common cleaning agency 1b.
Among the present invention, the common cleaning agency 1b of cleaning workpiece planarization W2 can adopt any structure, and the cleaning agency of the dust arrester of the same race of applicable usefulness before.Therefore, only illustrate and the relevant part of side cleaning agency 1a that it specifies and is omitted below.
As shown in Figure 2, side cleaning agency 1a has framework 2, and this framework 2 portion within it has the conveying channel 21 of workpiece W.At the upstream side (left surface side among Fig. 2) of conveying channel 21, flatly be provided with to be used for workpiece W is transported to and transporting carriage 22 in the cleaning agency 1a of side.
Transporting on the carriage 22, setting up conveyer belt 221 abreast along the carriage direction of workpiece W, the workpiece W that is placed on this conveyer belt 221 is transported in the conveying channel 21.
In conveying channel 21, be provided with a pair of roller that transports up and down by the drive mechanism do not shown of figure, from transporting the workpiece W that carriage 22 comes out, by this transport roller keeping flat-hand position ground in conveying channel 21 from left to moving to right.Only show the gear that drives usefulness among Fig. 2.
In this example, the driving mechanism utilization is located at the rotary driving force that the motor M in the common cleaning agency 1b produces, and they is transmitted the gear (see figure 2) by several be delivered to conveyer belt 221 or transport roller.
In addition, also can not utilize the driving force of the motor M of common cleaning agency 1b, and in the cleaning agency 1a of side, independent driving mechanisms is set.Driving mechanism can be electronic, also can be manual, can take any among the present invention.
The invention is characterized in, clip a pair of side cleaning portion 3,3 that conveying channel 21 ground are disposed at both sides in opposite directions.Each side cleaning portion 3,3 clips workpiece W ground and is disposing in opposite directions in the two sides of framework 2, the configuration space of each side cleaning portion 3,3 is narrower than the width of workpiece W.
In addition, also governor motion can be set, this governor motion can at random change the distance in opposite directions of each side cleaning portion 3,3 according to the size of workpiece W when the different workpiece W of width is cleaned.
In this example, the structure of each side cleaning portion 3,3 is identical, and left and right symmetrically is disposing.Therefore, in the following description, a side side cleaning portion 3 only is described, has omitted explanation the opposing party's side cleaning portion 3.
Fig. 3 is the stereogram of side cleaning portion 3.Fig. 4 is its in-built sectional drawing of expression.Side cleaning portion 3 has rotary components 4 and side cleaning assembly 5.Rotary components 4 is the center rotation to be parallel to the feathering axis L1 that workpiece W transports face.Cleaning assembly 5 in side is provided with several with respect to rotary components 4 with the angle of stipulating.
Rotary components 4, having with feathering axis L1 is the rotation framework 41 of center rotation and the rotating shaft 42 that is being provided with coaxially along feathering axis L1 from the center of this rotation framework 41.Rotation framework 41 is made of foursquare plate body roughly, in its each side end face, is provided with the screw (figure does not show) that is used to install side cleaning assembly 5.
In addition, in this example, rotation framework 41 for the side cleaning assembly 5 at 4 positions is installed, forms the square shape with 4 end faces.But its end face can clean the number of assembly 5 and change arbitrarily (for example triangle etc.) according to the side.At this moment, the distance from rotating shaft 42 to each end face (radius of turn) must be identical.
Rotating shaft 42 stretches out towards both sides from the center of rotation framework 41, is provided with dead eye 421,421 in the both ends of the surface of rotating shaft 42, and this dead eye 421,421 is being propped up by 231,231 of the bolsters that is located at installation frame 23 (see figure 4)s on the framework 2.
The following describes side cleaning assembly 5.Each side cleaning assembly 5 is identical construction, so, a side cleaning assembly 5 only is described below.
As shown in Figure 3, cleaning assembly 5 in side has the pedestal 51 that is installed on the rotary components 4 and is installed in roll assembly 52 on this pedestal 51 integratedly.
In 4 blocks of side plates 512, have on the side plate 512 (biside plate 512 about among Fig. 4 being) with the face of the axis direction orthogonal of rotating shaft 42, be provided with blocked hole 513.This blocked hole 513 is as the maintaining body that each side cleaning assembly 5 is remained on an entopic side with respect to the side W1 of workpiece W.
As shown in Figure 4, be located at the clamping protuberance 241 of the Access Division 24 on the aftermentioned installation frame 23, engage, like this, limited the side that is installed on the rotary components 4 and cleaned moving of assembly 5 with this blocked hole 513.
As Fig. 5 A, Fig. 5 B and shown in Figure 6, roll assembly 52, have spiral shell solid at the roller pedestal 53 on the pedestal 51, be installed in side cleaning roller 54 on this roller pedestal 53, with side cleaning roller 54 always towards the dipper crowding gear 55 of workpiece W pushing.
Installing plate 531, as shown in Figure 6, the two ends approximate right angle ground bending with a metallic plate forms the コ font.At the basal part (above among Fig. 6) of installing plate 531, be provided with 4 and be used for installing plate 531 is installed in installing hole 531a on the pedestal 51, installing plate 531 is solid on pedestal 51 by this installing hole 531a spiral shell.
At the basal part of installing plate 531, also be provided with the receiving hole 531b that anti-avulsion axle bush 553 is installed.This receiving hole 531b is located in the substantial middle of basal part, is used for fixing anti-avulsion axle bush 553, and this anti-avulsion axle bush 553 is used for the anti-avulsion of the sliding axle 551 that dipper crowding gear 55 comprised.
On each side plate of installing plate 531, form the guide groove 531c of U font respectively from its front end towards basal part.Guide groove 531c is used to guide the deflector roll 533 that is installed on the roller support plate 532, when deflector roll 533 moves along guide groove 531c, side cleaning roller 54 is slided in the direction that is orthogonal to side surface of workpiece W1.
On each side plate of roller support plate 532, wearing the support holes 532b that is used to support deflector roll 533.Deflector roll 533 is rotatably installed on this support holes 532b.Deflector roll 533 is made of plastic spool roll, forms the disc that can move along above-mentioned guide groove 531c.
On each side plate of roller support plate 532, also formed dead eye 532c, this dead eye 532c is propping up the side cleaning roller 54 rotatable earth's axis.As shown in Figure 6, side cleaning roller 54 has and contacts with side surface of workpiece W1 and remove the roller body 541 of dust and pass the roller rotating shaft 542 at roller body 541 centers.
The direction of principal axis length of roller body 541 is greater than the thickness of workpiece W, preferably more than 2 of workpiece W thickness times at least.
Like this, as described later, originally 541 2 cleaning faces can be obtained, roller body 541 (see figure 7)s can be used more economically with a roller.
The following describes dipper crowding gear 55.As shown in Figure 6, dipper crowding gear 55 has sliding axle 551 and compression spring 552.One end of sliding axle 551 is installed on the fixing hole 532a of roller support plate 532, and the other end is slidably mounted on the installing plate 531 by anti-avulsion axle bush 553.Compression spring 552 is that center configuration is around it with this sliding axle 551.
Sliding axle 551 is made of metal rounding bar, and one distolateral (lower end among Fig. 6) is fixed on the basal part of roller support plate 532.In the upper end side of sliding axle 551, formed the embeded slot 551a that is used for chimeric anti-avulsion usefulness C shape ring 554.
When being installed to side cleaning roller 54 on the installing plate 531, will compressing spring 552 earlier and be inserted in from the upper end side of sliding axle 551, the front end with sliding axle 551 inserts in the anti-avulsion axle bush 553 that is installed on the installing plate 531 again.
Then, at the opposition side of anti-avulsion axle bush 553, pushing sliding axle 551, the front end of sliding axle 551 is exposed after, C shape ring 554 is entrenched in the embeded slot 551a, be assembled into one.Like this, just, finished roll assembly 52.
As shown in Figure 3, in this example, on a pedestal 51, be provided with 2 roll assemblies 52.Each roll assembly 52 is being provided with abreast along the carriage direction of workpiece W.
In this example, roll assembly 52 is arranged on 2 positions on the pedestal 51, but it can be arbitrarily that number is set, but will be provided with 1 at least.In addition, in this example, roll assembly 52 is set to the rotary axis with the carriage direction orthogonal of workpiece W, but also can tilt.
As shown in Figure 7, side cleaning portion 3, assigned position is departed from respect to the face that the transports L2 of workpiece W in the center of the direction of principal axis length of its roller body 541.That is, the center of side cleaning portion 3 is axis L1 of the rotating shaft 42 of rotary components 4, and this axis L1 departs from and transports face L2.
Like this, as shown in Figure 7, because workpiece W contacts with the position of the misalignment of the roller body 541 that cleans assembly 52 from the side, so half cleaning face of available pact cleans workpiece W.
In addition, when cleaning face dirty the time, unload roll assembly 52, it is reversed up and down, can clean with the cleaning face of original part, can obtain 2 cleaning faces with a roller body 541.
When using this dust arrester, make the distance in opposite directions of each side cleaning portion 3,3 narrower earlier,, workpiece W is put into transporting on the carriage 22 of side cleaning agency 1a at this state than the width of workpiece W.This workpiece W is transmitted and is with 221 to be transported to cleaning agency 1a inside, side.
After workpiece W is transported and, on the roller body 541 of the roll assembly 52 by being configured in framework 2 sides.At this moment, the side surface of workpiece W1 of roller body 541 contact workpiece W can will remove attached to the dust on the side surface of workpiece W1.
Workpiece W after dust on the W1 of side is removed is transported to adjacent common cleaning agency 1b, similarly, after workpiece planarization W2 is cleaned, is discharged to and transports on the carriage, has finished a series of cleaning works.
In cleaning process, 541 dirty when roller body, when the cleaning ability has reduced, the part rotation of assembly 52 being cleaned in the side with hand, like this, and rotary components 4 rotations, original side cleaning assembly 52 is configured to and transports on the road 22.
In the above-mentioned example, be to make rotary components 4 rotations, still, special-purpose rotary drive mechanism can be set also, rotary components 4 is automatically rotated stop with hand.
In addition, in this example, dust arrester 1 makes up side cleaning agency 1a and common cleaning agency 1b and constitutes, and still, also can side cleaning agency 1a be assembled in the common cleaning agency 1b integratedly, also can only use side cleaning agency 1a.Have the various modified examples of above-mentioned grown form, all be included in the present invention.
Claims (6)
1. dust arrester, this dust arrester has the cleaning assembly of removing attached to the dust on the plate workpiece, with the cleaning roller that is located in the above-mentioned cleaning assembly, remove attached to the dust on the above-mentioned workpiece, it is characterized in that, have and be exclusively used in the side cleaning assembly of removing attached to the dust on the above-mentioned side surface of workpiece.
2. dust arrester as claimed in claim 1, it is characterized in that, above-mentioned side cleaning assembly, have the package base of the side cleaning roller that can be installed with contiguously, the above-mentioned side of supporting cleaning roller along the side of above-mentioned workpiece, with above-mentioned side cleaning roller always towards the dipper crowding gear of above-mentioned side surface of workpiece pushing.
3. dust arrester as claimed in claim 1 or 2 is characterized in that, the direction of principal axis length of above-mentioned side cleaning roller, set longlyer than the thickness of slab of above-mentioned workpiece at least, above-mentioned side cleaning roller, the center of its direction of principal axis length is with respect to the face that transports of the above-mentioned workpiece assigned position that staggers.
4. as claim 1,2 or 3 described dust arresters, it is characterized in that above-mentioned side cleaning roller along the carriage direction of above-mentioned workpiece, is provided with 2 at least on the said modules pedestal.
5. as each described dust arrester in the claim 1 to 4, it is characterized in that also have rotary components, this rotary components has the feathering axis parallel with the face that transports of above-mentioned workpiece, on above-mentioned rotary components, be provided with several above-mentioned side cleaning assemblies.
6. dust arrester as claimed in claim 5 is characterized in that, above-mentioned side cleaning assembly is the center with above-mentioned feathering axis, with 90 ° interval, is arranged on 4 positions on the above-mentioned rotary components.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP392058/2003 | 2003-11-21 | ||
| JP2003392058A JP2005152717A (en) | 2003-11-21 | 2003-11-21 | Dust removing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1618532A true CN1618532A (en) | 2005-05-25 |
Family
ID=34718892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200410095339.0A Pending CN1618532A (en) | 2003-11-21 | 2004-11-19 | Vacuum cleaner |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2005152717A (en) |
| CN (1) | CN1618532A (en) |
| TW (1) | TW200531755A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102447012A (en) * | 2011-12-28 | 2012-05-09 | 苏州幸福新能源科技有限责任公司 | Solar backboard surface cleaning mechanism |
| CN106540892A (en) * | 2015-09-17 | 2017-03-29 | 杨家军 | Battery pole piece banding machine bistrichiasis brush roll dedusting mechanism |
| CN113000439A (en) * | 2021-03-10 | 2021-06-22 | 苏州晶洲装备科技有限公司 | Substrate side surface cleaning device and cleaning method |
| WO2022099866A1 (en) * | 2020-11-10 | 2022-05-19 | 北京飞狐鱼智能科技有限公司 | Terminal device cleaning machine |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014232574A (en) * | 2013-05-28 | 2014-12-11 | 東レエンジニアリング株式会社 | End surface cleaning device |
| JP6932040B2 (en) * | 2017-08-07 | 2021-09-08 | Ｍｍｃリョウテック株式会社 | Rotary die cutter |
| CN112246807A (en) * | 2020-09-25 | 2021-01-22 | 湖南省俊华箱包制造有限公司 | Dust collector is used in case and bag production |
| CN114867225B (en) * | 2021-02-03 | 2024-05-28 | 济南职业学院 | Chip mounting device for integrated circuit processing |
| CN115582354A (en) * | 2022-09-29 | 2023-01-10 | 合肥国轩高科动力能源有限公司 | Can not shut down and change electric core pole piece cleaning device of dust-binding roller |
| CN117066179B (en) * | 2023-10-13 | 2024-01-23 | 国网山东省电力公司荣成市供电公司 | Equipment for removing dirt on surface of power supply facility |
-
2003
- 2003-11-21 JP JP2003392058A patent/JP2005152717A/en active Pending
-
2004
- 2004-11-05 TW TW093133871A patent/TW200531755A/en unknown
- 2004-11-19 CN CN200410095339.0A patent/CN1618532A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102447012A (en) * | 2011-12-28 | 2012-05-09 | 苏州幸福新能源科技有限责任公司 | Solar backboard surface cleaning mechanism |
| CN102447012B (en) * | 2011-12-28 | 2013-07-03 | 苏州幸福新能源科技有限责任公司 | Mechanism for cleaning surface of solar back board |
| CN106540892A (en) * | 2015-09-17 | 2017-03-29 | 杨家军 | Battery pole piece banding machine bistrichiasis brush roll dedusting mechanism |
| CN106540892B (en) * | 2015-09-17 | 2019-10-18 | 杨家军 | Battery pole piece banding machine bistrichiasis brush roll dedusting mechanism |
| WO2022099866A1 (en) * | 2020-11-10 | 2022-05-19 | 北京飞狐鱼智能科技有限公司 | Terminal device cleaning machine |
| CN113000439A (en) * | 2021-03-10 | 2021-06-22 | 苏州晶洲装备科技有限公司 | Substrate side surface cleaning device and cleaning method |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200531755A (en) | 2005-10-01 |
| JP2005152717A (en) | 2005-06-16 |
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