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CN1557967A - Encapsulation method for plastic micro-flow control analysis chip - Google Patents

Encapsulation method for plastic micro-flow control analysis chip Download PDF

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Publication number
CN1557967A
CN1557967A CNA2004100162318A CN200410016231A CN1557967A CN 1557967 A CN1557967 A CN 1557967A CN A2004100162318 A CNA2004100162318 A CN A2004100162318A CN 200410016231 A CN200410016231 A CN 200410016231A CN 1557967 A CN1557967 A CN 1557967A
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Prior art keywords
plastic
microchannel
substrate
sheet
plastic substrate
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CNA2004100162318A
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CN1271215C (en
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李建华
陈迪
刘景全
朱军
李以贵
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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Abstract

The packing method for plastic chip for micro flow control includes copying the micro channel pattern via micro-copying process to plastic substrate, mixing dimethyl siloxane pre-polymer and curing agent in certain ratio, vacuum deairing, casting and curing to form polydimethyl siloxane set on the plastic substrate; painting ultraviolet cured adhesive around the substrate, adhering one layer of plastic sheet to constitute three-layer structure with raised packing strength; and irradiating with ultraviolet ray to complete the package of plastic chip. The present invention has simple technological process, less micro channel deformation, no jamming and very high packing strength.

Description

The method for packing of plastic micro-fluidic analysis chip
Technical field
The present invention relates to a kind of method for packing of plastic micro-fluidic analysis chip, utilize the natural affinity between polydimethylsiloxane (PDMS:Polydimethylsiloxane) and the plastics, need not caking agent and finish the encapsulation of chip, belong to MEMS (micro electro mechanical system) (MEMS:Micro Electro Mechanical Systems) and technical field of analysis and detection.
Background technology
Microfluidic analysis (Microfluidic analysis) is called chip lab (Lab on a chip) again, is a kind of differential compartment analysis method that emerges rapidly in recent years.The core technology of this novel method is the preparation of microfluidic analysis chip.Early stage people mainly adopt some inorganic materials (as silicon, quartz, glass and pottery etc.), utilize photoetching and chemical etch technique prepare microfluidic analysis chip (Seiler K., et al, Anal.Chem., 1993,65,1481-1488.).This chip cooling and good in optical property, the separation efficiency height has been used for dna sequence analysis, polypeptide and protein analysis, medicine and environmental pollutant analysis.But inorganic matrix chip preparation process is various, and channel shape and size are difficult to control accurately, and encapsulation difficulty is big, not can manufacture, so cost an arm and a leg.In recent years, people prepare material with microfluidic analysis chip and turn to macromolecular compound (as polymethylmethacrylate, polycarbonate, polystyrene and silicon rubber etc.), mainly utilize little replica technique (as hot pressing and casting etc.) preparation chip (Martynova L., et al., Anal.Chem., 1997,69,4783-4789.; Duffy DC., et al., Anal.Chem., 1998,70,4974-4984.).
The plastic material low price has good insulation performance, can apply high electric field and realize sharp separation, be shaped easily, it is low to produce cost in batches, easily obtains the microstructure of high aspect ratio, and the pH value of electroosmotic flow and solution is irrelevant substantially, has broad application prospects, and has caused both at home and abroad to pay close attention to greatly.But the microchannel distortion is still the difficult problem of the fine solution of failing after its heat-seal, though can adopt adhering method, caking agent easily stops up the microchannel.
The relevant patent that at present existing silicon rubber (PDMS) and glass encapsulate is as " preparation method of silicon rubber-glass permanent adhesive type microfluidic analysis chip " (Ren Jicun etc., Chinese invention patent application number: 02 1 45102.8).This invention does not use any tackiness agent to realize silicon rubber-glass-chip permanent adhesive, and it is simple to have preparation technology, and microchannel fidelity of reproduction height such as can manufacture at characteristics.But the PDMS micro flow chip adopts the casting process preparation, and its tooling cost and process-cycle all are higher than thermoplastic material.
Summary of the invention
The object of the present invention is to provide a kind of method for packing of plastic micro-fluidic analysis chip, with the problem that overcomes present heat-seal method microchannel distortion and the microchannel blockage problem of adhering method.
For achieving the above object, the present invention at first utilizes little replica technique that the microchannel pattern on the template is copied on the thermoplastics sheet, polydimethylsiloxane (PDMS) performed polymer and solidifying agent are mixed in proportion, through vacuum outgas, casting is made the PDMS thin slice after solidifying, utilize the natural affinity between polydimethylsiloxane and the plastics then, the plastic substrate and the PDMS sheet that have duplicated the microchannel are fitted, after ultraviolet curing adhesive is coated in the plastic substrate periphery, paste a slice plastic sheet composition three-decker again and strengthen package strength, behind ultraviolet lighting, finish the encapsulation of plastic chip, obtain the plastic microfluidic chip of permanent involution.
Method of the present invention specifically comprises the steps:
1, microchannel pattern is duplicated:
The silicon or the metal die that will contain the protruding figure in microchannel are installed on the moulding press, place the thick plastic substrate of a slice 0.8-2mm on the substrate, the size on every limit of plastic substrate is greater than mould 8-10mm, be warming up to 140-170 ℃, the pressure that applies 1-5kN carries out mold pressing to thermoplastics, keeps 60-120 second, be cooled to the 40-80 ℃ of demoulding, the plastic substrate of microchannel figure is duplicated in taking-up, holes in the corresponding position according to microchannel pattern then, obtains having the plastic substrate of through hole and microchannel pattern.
The thermoplastics that the present invention adopts can be polymethylmethacrylate (PMMA:Polymethylene methacrylate), polystyrene (PS:Polystyrene), polyvinyl chloride (PVC:Polyvinylene chloride), polycarbonate materials such as (PC:Polycarbonate).
2, the preparation of polydimethylsiloxane (PDMS) sheet:
PDMS performed polymer and solidifying agent are pressed 10-15: 1 mixed after the vacuum outgas, is cast on the stainless steel mould, compress a slice sheet glass, 65-80 ℃ down solidify 2-3 hour after, the PDMS sheet after solidifying is taken off from stainless steel mould, cut into that to be slightly less than the mould size standby.
3, encapsulation:
The plastic sheet that will contain microchannel pattern cleans, drying, be positioned over the PDMS thin slice on the plastic substrate then and remove bubble, coat ultraviolet curing adhesive in the plastic substrate periphery, and then paste a slice plastic sheet and form three-decker and fixing, after ultraviolet lighting 5-10 minute, finish the encapsulation of plastic chip.
Technology of the present invention is simple, owing at room temperature encapsulate microchannel fidelity of reproduction height, the metamorphism that does not have the microchannel, PDMS thin slice have stoped tackiness agent to enter the microchannel again both as sealing material, no microchannel latch up phenomenon, the plastic microfluidic chip that obtains has very high package strength.
Embodiment
Below by several specific embodiments technical scheme of the present invention is further described.
Embodiment 1:
(1) microchannel pattern duplicates
The silicon or the metal die that will contain the protruding figure in microchannel are installed in moulding press top, thick polymethylmethacrylate (PMMA) substrate of 0.8mm is placed in the bottom, the size on every limit of PMMA substrate is greater than mould 8mm, elevated temperature to 150 ℃ at first, under 1000N pressure, kept 60 seconds, cooling then, the demoulding when being cooled to 60 ℃, open cavity, the PMMA substrate of microchannel figure is duplicated in taking-up, hole in the corresponding position according to microchannel pattern then, obtain having the PMMA substrate of through hole and microchannel pattern.
(2) preparation of PDMS sheet
(Rhodia produces with the PDMS performed polymer, V-3040A) press 10: 1 mixed with solidifying agent (V-3040B), after the vacuum outgas, be cast on the stainless steel mould, compress a slice sheet glass, after solidifying 3 hours under 65 ℃ of degree, the PDMS sheet after solidifying is taken off from stainless steel mould, cut into that to be slightly less than the mould size standby, the thickness of PDMS sheet is about 0.6mm.
(3) encapsulation
With duplicate the PMMA substrate of microchannel and PDMS sheet with acetone, alcohol, washed with de-ionized water clean after, dry, then the PDMS thin slice is placed on the PMMA substrate, (PMMA substrate periphery) coats ultraviolet curing adhesive on the PMMA substrate beyond the PDMS thin slice again, a slice PMMA sheet is attached to top sandwich structure consisting, and use clamp, and place under the low pressure mercury lamp (6mW) and shone 5 minutes, finish the chip involution.
Embodiment 2:
(1) microchannel pattern duplicates
The silicon or the metal die that will contain the protruding figure in microchannel are installed in moulding press top, and thick polystyrene (PS) substrate of 1.2mm is placed in the bottom, and the size on every limit of PS substrate is greater than mould 9mm.At first elevated temperature to 140 ℃ applies 2000N power and kept the demoulding when being cooled to 50 ℃ then 90 seconds, open cavity, the PS substrate of microchannel figure is duplicated in taking-up, holes in the corresponding position according to microchannel pattern then, obtains having the PS substrate of through hole and microchannel pattern.
(2) preparation of PDMS sheet
(Rhodia produces with the PDMS performed polymer, V-3040A) press 12: 1 mixed with solidifying agent (V-3040B), after the vacuum outgas, be cast on the stainless steel mould, compress a slice sheet glass, after solidifying 2.5 hours under 70 ℃, the PDMS sheet after solidifying is taken off from stainless steel mould, cut into that to be slightly less than the mould size standby, the thickness of PDMS sheet is about 0.8mm.
(3) encapsulation
With duplicate the PS substrate of microchannel and with alcohol, washed with de-ionized water clean after, dry, then the PDMS thin slice is placed on the PS substrate, coat ultraviolet curing adhesive in PS substrate periphery again, PS is attached to top sandwich structure consisting with another sheet, and use clamp, and place under the low pressure mercury lamp (6mW) and shone 7 minutes, finish the chip involution.
Embodiment 3:
(1) microchannel pattern duplicates
The silicon or the metal die that will contain the protruding figure in microchannel are installed in moulding press top, and thick polycarbonate (PC) substrate of 1.5mm is placed in the bottom, and the size on every limit of PC substrate is greater than mould 10mm.At first elevated temperature to 170 ℃ applies 5000N power and kept the demoulding when being cooled to 80 ℃ then 120 seconds, open cavity, the PC substrate of microchannel figure is duplicated in taking-up, holes in the corresponding position according to microchannel pattern then, obtains having the PC substrate of through hole and microchannel pattern.
(2) preparation of PDMS sheet
(Rhodia produces with the PDMS performed polymer, V-3040A) press 15: 1 mixed with solidifying agent (V-3040B), after the vacuum outgas, be cast on the stainless steel mould, compress a slice sheet glass, after solidifying 2 hours under 80 ℃, the PDMS sheet after solidifying is taken off from stainless steel mould, cut into that to be slightly less than the mould size standby, the thickness of PDMS sheet is about 0.5mm.
(3) encapsulation
With duplicate the PC substrate of microchannel and with alcohol, washed with de-ionized water clean after, dry, then the PDMS thin slice is placed on the PC substrate, coat ultraviolet curing adhesive in PC substrate periphery again, PC is attached to top sandwich structure consisting with another sheet, and use clamp, and place under the low pressure mercury lamp (6mW) and shone 10 minutes, finish the chip involution.
Embodiment 4:
(1) microchannel pattern duplicates
The silicon or the metal die that will contain the protruding figure in microchannel are installed in moulding press top, and thick polyvinyl chloride (PVC) substrate of 2mm is placed in the bottom, and the size on every limit of PVC substrate is greater than mould 10mm.At first elevated temperature to 140 ℃ kept 80 seconds under 2000N pressure, then cooling, cavity is opened in the demoulding when being cooled to 40 ℃, takes out the PVC substrate that duplicates the microchannel figure, hole in the corresponding position according to microchannel pattern then, obtain having the PVC substrate of through hole and microchannel pattern.
(2) preparation of PDMS sheet
(Rhodia produces with the PDMS performed polymer, V-3040A) press 13: 1 mixed with solidifying agent (V-3040B), after the vacuum outgas, be cast on the stainless steel mould, compress a slice sheet glass, after solidifying 2.5 hours under 75 ℃ of degree, the PDMS sheet after solidifying is taken off from stainless steel mould, cut into that to be slightly less than the mould size standby, the thickness of PDMS sheet is about 0.7mm.
(3) encapsulation
With duplicate the PVC substrate of microchannel and PDMS sheet with acetone, alcohol, washed with de-ionized water clean after, dry, then the PDMS thin slice is placed on the PVC substrate, coat ultraviolet curing adhesive in PVC substrate periphery again, a slice PVC sheet is attached to top sandwich structure consisting, and use clamp, and place under the low pressure mercury lamp (6mW) and shone 8 minutes, finish the chip involution.

Claims (2)

1, a kind of method for packing of plastic micro-fluidic analysis chip is characterized in that comprising the steps:
1) microchannel pattern is duplicated: the silicon or the metal die that will contain the protruding figure in microchannel are installed on the moulding press, place the thick plastic substrate of a slice 0.8-2mm on the substrate, the size on every limit of plastic substrate is greater than mould 8-10mm, be warming up to 140-170 ℃, the pressure that applies 1-5kN carries out mold pressing to thermoplastics, keep 60-120 second, be cooled to the 40-80 ℃ of demoulding then, the plastic substrate of microchannel figure is duplicated in taking-up, hole in the corresponding position according to microchannel pattern then, and clean with the deionized water ultrasonic cleaning, the plastic substrate that obtains having through hole and microchannel pattern;
2) preparation of polydimethylsiloxane sheet: polydimethylsiloxane performed polymer and solidifying agent are pressed 10-15: 1 mixed, after the vacuum outgas, be cast on the stainless steel mould, compress a slice sheet glass, after solidifying 2-3 hour under 65-80 ℃, polydimethylsiloxane sheet after solidifying is taken off from stainless steel mould, cut into that to be slightly less than die size standby;
3) encapsulation: the plastic sheet that will contain microchannel pattern cleans, drying, be positioned over the polydimethylsiloxane sheet on the plastic substrate then and remove bubble, coat ultraviolet curing adhesive in the plastic substrate periphery, and then paste a slice plastic sheet and form three-decker and fixing, after ultraviolet lighting 5-10 minute, finish the encapsulation of plastic chip.
2, the method for packing of plastic micro-fluidic analysis chip as claimed in claim 1 is characterized in that described thermoplastics is polymethylmethacrylate, polystyrene, polyvinyl chloride or polycarbonate.
CN 200410016231 2004-02-12 2004-02-12 Encapsulation method for plastic micro-flow control analysis chip Expired - Fee Related CN1271215C (en)

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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100406888C (en) * 2006-02-28 2008-07-30 东北大学 Method for producing passive micro-mixer and micro-reactor in micro-flow control chip
CN100420622C (en) * 2005-12-28 2008-09-24 哈尔滨工业大学 Secondary template duplicating process method based on dimethyl silicone polymer mini component
CN101510518B (en) * 2009-03-31 2011-03-23 中国科学院化学研究所 Method for sealing micro-fluidic chip and use thereof
CN102001615A (en) * 2010-09-02 2011-04-06 浙江大学 Method for preparing high polymer nanofluidic chip
CN102171576A (en) * 2008-10-05 2011-08-31 爱科来株式会社 Analytic instrument and method for manufacturing same
CN102452639A (en) * 2010-11-01 2012-05-16 香港理工大学 Bonding method of plastic microfluidic chip and plastic microfluidic chip
CN106040325A (en) * 2016-05-24 2016-10-26 苏州含光微纳科技有限公司 Method and device for manufacturing glass microfluidic chip through mould pressing technology
CN106475161A (en) * 2016-11-28 2017-03-08 重庆大学 A kind of simple quick bonding method of micro-fluidic chip
CN106544705A (en) * 2016-10-31 2017-03-29 常州瑞丰特科技有限公司 The manufacture method of the micro- replica metal micro structure of precise electrotyping
US10099218B2 (en) 2015-11-19 2018-10-16 Capitalbio Corporation Method for manufacturing and/or packaging a chip
CN110898867A (en) * 2019-12-04 2020-03-24 中国科学院长春光学精密机械与物理研究所 Preparation method of micro-fluidic chip template
WO2021057274A1 (en) * 2019-09-27 2021-04-01 上海新微技术研发中心有限公司 Microfluidic control chip and substance detection method
US11758548B2 (en) 2006-06-20 2023-09-12 Nec Corporation Communication system

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CN101823686B (en) * 2010-04-21 2012-07-04 大连理工大学 Sealing method of thermoplastic polymer multi-layer micro-fluidic chips

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100420622C (en) * 2005-12-28 2008-09-24 哈尔滨工业大学 Secondary template duplicating process method based on dimethyl silicone polymer mini component
CN100406888C (en) * 2006-02-28 2008-07-30 东北大学 Method for producing passive micro-mixer and micro-reactor in micro-flow control chip
US11758548B2 (en) 2006-06-20 2023-09-12 Nec Corporation Communication system
CN102171576A (en) * 2008-10-05 2011-08-31 爱科来株式会社 Analytic instrument and method for manufacturing same
CN101510518B (en) * 2009-03-31 2011-03-23 中国科学院化学研究所 Method for sealing micro-fluidic chip and use thereof
CN102001615A (en) * 2010-09-02 2011-04-06 浙江大学 Method for preparing high polymer nanofluidic chip
CN102001615B (en) * 2010-09-02 2012-05-09 浙江大学 Preparation method of high polymer nanofluidic chip
CN102452639A (en) * 2010-11-01 2012-05-16 香港理工大学 Bonding method of plastic microfluidic chip and plastic microfluidic chip
US10099218B2 (en) 2015-11-19 2018-10-16 Capitalbio Corporation Method for manufacturing and/or packaging a chip
CN106040325A (en) * 2016-05-24 2016-10-26 苏州含光微纳科技有限公司 Method and device for manufacturing glass microfluidic chip through mould pressing technology
CN106544705A (en) * 2016-10-31 2017-03-29 常州瑞丰特科技有限公司 The manufacture method of the micro- replica metal micro structure of precise electrotyping
CN106475161A (en) * 2016-11-28 2017-03-08 重庆大学 A kind of simple quick bonding method of micro-fluidic chip
WO2021057274A1 (en) * 2019-09-27 2021-04-01 上海新微技术研发中心有限公司 Microfluidic control chip and substance detection method
CN110898867A (en) * 2019-12-04 2020-03-24 中国科学院长春光学精密机械与物理研究所 Preparation method of micro-fluidic chip template
CN110898867B (en) * 2019-12-04 2021-04-06 中国科学院长春光学精密机械与物理研究所 Preparation method of micro-fluidic chip template

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