CN1217416C - Structure of complementary MOS image sensor and its production method - Google Patents
Structure of complementary MOS image sensor and its production method Download PDFInfo
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- CN1217416C CN1217416C CN 01122440 CN01122440A CN1217416C CN 1217416 C CN1217416 C CN 1217416C CN 01122440 CN01122440 CN 01122440 CN 01122440 A CN01122440 A CN 01122440A CN 1217416 C CN1217416 C CN 1217416C
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Abstract
The present invention relates to a manufacture method for complementary metal oxide semiconductor image sensors. An isolation layer is formed in a substrate so as to divide the substrate into a diode sensing area and transistor element areas. Secondly, after a grid electrode structure is formed in the transistor element areas, source/drain electrode areas are formed in the transistor element areas at both sides of the grid electrode structure, and simultaneously a doping area is formed in the light diode sensing area. Thirdly, a self-aligned insulation layer is formed on the light diode sensing area, and a protection layer is formed on the substrate. Subsequently, dielectric layers and metal conducting wires are orderly formed on the protection layer, protection layers are formed on the dielectric layers and the metal conducting wires, the layer number of the dielectric layers and the layer number of the metal conducting wires are determined by manufacture techniques, and the protection layers are formed among the dielectric layers.
Description
Technical field
The present invention relates to a kind of optical diode image sensing element (Photodiode image sensor device) and manufacture method thereof, particularly relate to a kind of complementary MOS image sensor (CMOS ImageSensor, CIS) and manufacture method.
Background technology
The optical diode image sensor is present common a kind of image sensing element.Typical optical diode image sensor comprises a reset transistor (Reset transistor) and the formed optical sensing area of diode at least.Is example with N type doped region, the formed diode of P mold base as photosensitive region, and the optical diode image sensor applies a voltage in when operation at the grid of reset transistor, reset transistor is opened after, N/P diode junction electric capacity is charged.After being charged to a high position, turn off reset transistor, make the N/P diode produce partially contrary and the formation exhaustion region.When rayed during at this N/P diode photosensitive area, the electron hole pair of generation can by the electric field of exhaustion region separately make electronics move toward N type doped region, and the current potential of N type doped region is reduced, and then can flow away toward the P mold base as for the hole.
(Charge Coupled Device CCD) has high dynamic range, low dark current (Dark current) to charge coupled cell, and its technical development maturation, therefore is the image sensor of normal use now.Yet, charge coupled cell also have manufacture craft special and cause costing an arm and a leg, drive circuit must make that power consumption (Power dissipation) is very high with high voltage operation, and existence that can't arbitrary access problem points such as (Random access).
And complementary MOS image sensor has high-quantum efficiency (Quantum efficiency), low readout noise (Read noise), high dynamic range (Dynamic range) and random-access characteristic, and it is absolutely compatible with the CMOS (Complementary Metal Oxide Semiconductor) manufacture craft, therefore can on same chip, combine at an easy rate, reach the target of so-called System On a Chip (SOC) with other control circuits, analog and digital circuit (A/D converter) and digital signal processing circuit.Therefore the evolution of complementary MOS image sensor manufacture craft technology can reduce cost, Pixel Dimensions and the consumed power of image sensor significantly.Therefore in recent years in the application in low price field, complementary MOS image sensor has become the substitute of charge coupled cell.
The manufacture method of existing complementary MOS image sensor outlines as follows:
Please refer to Figure 1A, at first, in substrate 100, form field oxide 102, in substrate 100, form the gate oxide 104 and the compound crystal silicon grid 106 of reset transistor 130 again.Then,, utilize ion to implant and drive in manufacture craft, the doped region 112 of formation source/drain region 108 and optical diode sensing area 110 in substrate 100 as implanting mask with field oxide 102 and compound crystal silicon grid 106 with heat.Then, the sidewall at compound crystal silicon grid 106 and grid oxic horizon 104 forms clearance wall 114.Thereafter, and formation one deck autoregistration insulating barrier on optical diode sensing area 110 (Self Align Block, SAB) 116, to form optical diode complementary formula metal oxide semi-image sensing element.
Then, please refer to Figure 1B, carry out the back segment manufacture craft (Backend process) of this optical diode complementary formula metal oxide semi-image sensing element, this back segment manufacture craft for example is to form dielectric layer 118 in substrate 100, on dielectric layer 118, form plain conductor 120 again, then, in substrate, form dielectric layer 122, on dielectric layer 122, form plain conductor 124 again.
Yet this kind exists following problem with the existing resulting complementary MOS image sensor of manufacture method:
When carrying out the back segment manufacture craft, wherein for example be the contact hole/qualification of interlayer hole opening, the qualification of plain conductor etc., inevasible meeting uses method for plasma etching.This plasma etching method has sizable energy and can cause sizable pressure drop (Voltage drop), this pressure drop is not only and can be damaged general transistor unit, also can damage for the surface of optical diode sensing area, particularly more shape is serious in the beak district of this plasma destruction of causing around field oxide, thereby makes the optical diode sensing area more be easy to generate the phenomenon of leakage current.The problem of above-mentioned leakage current will make sensor produce sizable dark current, causes the increase of readout noise.
And, for formed a plurality of sensors on the same wafer, the numerical values recited of the dark current of its single sensor is distributed with one section sizable scope, promptly is that the difference of dark current between each sensor may be quite big, thereby causes the homogeneity of sensor not good.
Summary of the invention
The objective of the invention is to propose a kind of complementary MOS image sensor and manufacture method thereof, between element surface and dielectric layer and dielectric layer form protective layer each other, can prevent the destruction of plasma.
Another object of the present invention is to propose a kind of complementary MOS image sensor and manufacture method thereof, can make that the problem of dark current minimizes in the complementary MOS image sensor.
Another object of the present invention is to propose a kind of complementary MOS image sensor and manufacture method thereof, can improve the homogeneity of complementary MOS image sensor.
The object of the present invention is achieved like this, and a kind of complementary MOS image sensor promptly is provided, and comprises optical diode sensing area, transistor unit district, transistor, autoregistration insulating barrier, dielectric layer and first, second protective layer.Wherein, optical diode sensing area and transistor unit district are disposed among the substrate, and transistor arrangement is on the transistor unit district.The autoregistration insulating barrier is disposed on the optical diode sensing area, and first protective layer disposes on the whole substrate and cover the autoregistration insulating barrier.A plurality of dielectric layers, wherein each dielectric layer distance first protective layer differing heights is arranged on first protective layer.And a plurality of second protective layers, wherein each second protective layer is arranged between each adjacent dielectric layers, and wherein the material of this first protective layer and this each second protective layer comprises the material that prevents that plasma from corroding.
The present invention also provides a kind of manufacture method of making above-mentioned complementary MOS image sensor, and its method forms separator to separate out optical diode sensing area and transistor unit district in substrate.Then, in the transistor unit district, form a grid structure, carry out light ion implantation step again, to form light drain doping region in the transistor unit district and to form light doping section at the optical diode sensing area.Then, form clearance wall, carry out dense ion implantation step again, to form source/drain region in the transistor unit district and to form heavily doped region at the optical diode sensing area at the grid structure sidewall., optical diode sensing area form one deck autoregistration insulating barrier after, again on substrate form layer protective layer to cover whole substrate, and have different refractive indexes between the material of protective layer and autoregistration insulating barrier thereafter.Then; carry out the back segment manufacture craft of this sensor element; this back segment manufacture craft forms dielectric layer, plain conductor in regular turn on protective layer; on dielectric layer and plain conductor, form protective layer again; wherein the number of plies of dielectric layer and plain conductor is looked the manufacture craft decision; and all form protective layer between each dielectric layer, wherein the material of this first protective layer and this each second protective layer comprises the material that prevents that plasma etching from corroding.
In sum; key character of the present invention is because after forming optical diode complementary formula metal oxide semi-image sensing element; in whole substrate, cover layer protective layer; thereafter and in the back segment manufacture craft; between each dielectric layer, also form protective layer; by the effect of this each protective layer, can avoid that employed method for plasma etching damages the optical diode sensing area in the back segment manufacture craft, thereby the generation of dark current can be dropped to minimum.
And this each protective layer covers in the whole substrate, must the optical diode sensing area of protection except mainly, also have its effect of destroying of subject plasma etching process not of protection for other zone.
In addition; a plurality of sensors for same wafer; this respectively forms the sensor of a plurality of protective layers; the distribution size of its dark current numerical value concentrates in the intensive scope; therefore the dark current characteristic of this each sensor is very approaching, promptly is that this each complementary MOS image sensor has suitable favorable uniformity.
And, have different refractive indexes between the material of protective layer and autoregistration insulating barrier and dielectric layer.Because when incident light enters optical diode sensing area surface; refraction via adjacent protective layer and dielectric layer, two kinds of different refractivity materials of autoregistration insulating barrier; and the optical diode sensing area absorbs this, and change the photoelectronic ability of generation via institute after the incident light that reflected preferable, so have higher quantum efficiency.
Description of drawings
Figure 1A to Figure 1B is the cutaway view of existing complementary MOS image sensor;
Fig. 2 A to Fig. 2 F is in the preferred embodiment of the present invention, the flow process cutaway view of the manufacture method of complementary MOS image sensor;
Fig. 3 enters the schematic diagram of the complementary MOS image sensor of preferred embodiment of the present invention for incident light.
The specific embodiment mode
Please refer to Fig. 2 F; complementary MOS image sensor of the present invention comprises optical diode sensing area 260, transistor unit district 270, transistor 250, autoregistration insulating barrier 224, protective layer 228,234,236, dielectric layer 230,234 and plain conductor 232,236.
Above-mentioned optical diode sensing area 260, transistor unit district 270 are arranged in the substrate 200, and separate with separator 202 and to come, and more are formed with the isolated district 204 of passage below separator 202.
The material of gate oxide 204a for example is a silica, and the method for its formation for example is a thermal oxidation method.The group that compound crystal metal silicide that its material of gate conductor layer 206a is for example formed for compound crystal silicon, compound crystal silicon and metal silicide and metal are formed one of them.The method of its formation for example is chemical vapour deposition technique or sputtering method.When gate conductor layer 208a is a compound crystal silicon, also comprise metal silicide layer 226 on preferable transistor 250 its gate conductor layer 208a, the source/drain regions 220, to reduce its sheet resistor.
Optical diode sensing area 260 is made up of heavily doped region 222 and substrate 200.The dopant profile of heavily doped region 222 is identical but different with substrate 200 with source/drain region 220.When the dopant profile of substrate 200 is the p type, the dopant profile of heavily doped region 222 then is the n type; If the dopant profile of substrate 200 is the n type, the dopant profile of heavily doped region 214 then is the p type.
And in said structure, the number of plies of dielectric layer and plain conductor is according to the setting that needs of manufacture craft, and, though the plain conductor that is illustrated in Fig. 2 F is not connected to each other, yet the position of the electrical connection of plain conductor and setting can need and be adjusted according to manufacture craft equally.
The manufacture method of above-mentioned complementary MOS image sensor is shown in Fig. 2 A to Fig. 2 F.
At first, please refer to Fig. 2 A, on matrix 200, form separator 202 to define optical diode sensing area 260 and transistor unit district 270, and below separator 202, be formed with passage and block district 204, wherein separator 202 for example is the field oxide of silica material, and the method for formation for example is to use the thermal oxidation method of regional area.Then, in substrate 200, form insulating barrier 206 and conductor layer 208 in regular turn.Wherein the material of insulating barrier 206 for example is a silica, and the method for formation for example is a thermal oxidation method.The material of conductor layer 208 for example be selected from group that compound crystal metal silicide that compound crystal silicon, compound crystal silicon and metal silicide form and metal organize one of them, the method for its formation for example is chemical vapour deposition technique or magnetic control dc sputtering.
Then, please refer to Fig. 2 B, limit conductor layer 208 and insulating barrier 206, with the gate conductor layer 208a and the gate oxide 206a of 270 formation transistors 250 in the transistor unit district with photoetching and etching step.Then, be mask with separator 202 and gate conductor layer 208a again, a light ion implantation step 210 is carried out in substrate 200, in gate conductor layer 208a and gate oxide 206a substrate on two sides 200, to form light doped drain region 212 and to form shallow doped region 214 in optical diode sensing area 260.Wherein light ion implantation step 210 is looked substrate 200 and is p type or n type, and the impurity of being implanted is for example for the phosphorus of n type or arsenic or be the boron of p type.
Then, please refer to Fig. 2 C, at the sidewall formation clearance wall 216 of gate conductor layer 208a and gate oxide 206a.Wherein the material of clearance wall 216 for example is a silica, and the method for its formation for example is with chemical vapour deposition technique, covers earlier one deck silicon oxide layer (not shown) in substrate 200, again in the mode of anisotropic etch-back in forming clearance wall 216.Then, with separator 202, gate conductor layer 208a and clearance wall 216 is mask, a deep ion implantation step 218 is carried out in substrate 200, form heavily doped region 222 with formation source/drain region 220 in clearance wall 214 substrate on two sides 200 and in optical diode sensing area 260.Wherein deep ion implantation step 218 is looked substrate 200 and is p type or n type, and the impurity of being implanted is for example for the phosphorus of n type or arsenic or be the boron of p type.
Then, please refer to Fig. 2 D, on optical diode sensing area 260, form autoregistration insulating barrier 224, wherein the material of autoregistration insulating barrier 224 for example is a silica, the method of its formation for example is with the plasma enhanced chemical vapor deposition method, forming one deck silicon oxide layer (not shown) in substrate, will be scheduled to form the zone of self-aligned metal silicate then, for example is that the silicon oxide layer in transistor unit district 270 removes.Again the gate conductor layer 208a in transistor unit district 270 and source/drain electrode 220 in form autoregistration metal silicide layer 226 thereafter.
Then, please refer to Fig. 2 E, form protective layer 228 in substrate 200, wherein the overlay area of protective layer 228 comprises optical diode sensing area 260, transistor unit district 270 and not shown peripheral logic circuit region.The material of protective layer 228 for example is a silicon nitride, and the method for formation for example is with the plasma enhanced chemical vapor deposition method, and feeds silicomethane and ammonia to be formed as manufacture craft gas.
Because after forming optical diode complementary formula metal oxide semi-image sensing element; in whole substrate 200, cover layer protective layer 228, therefore can avoid carrying out the follow-up employed method for plasma etching of back segment manufacture craft optical diode sensing area 260 is damaged.
Then, please refer to Fig. 2 F, carry out the back segment manufacture craft of this sensing element; this back segment manufacture craft for example is to cover one dielectric layer 230 in substrate 200; then on dielectric layer 230, form plain conductor 232, then, on dielectric layer 230 and plain conductor 232, form protective layer 234 again.Wherein the material of dielectric layer 230 for example is a silica; the method that forms for example is the plasma enhanced chemical vapor deposition method; the material of plain conductor for example is a compound crystal silicon; aluminium; copper; the group that tungsten is organized one of them; the method that forms for example is to use magnetic control dc sputtering and chemical vapour deposition technique to form layer of metal layer (not shown); limit plain conductor 232 via method for plasma etching again; the material of protective layer 234 for example is a silicon nitride; the method that forms for example is with the plasma enhanced chemical vapor deposition method, and feeds silicomethane and ammonia to be formed as manufacture craft gas.
Thereafter, the method according to identical with above-mentioned formation dielectric layer 230, plain conductor 232, protective layer 234 forms dielectric layer 236, plain conductor 238, protective layer 240 in regular turn on protective layer 234.In above-mentioned back segment manufacture craft, wherein the number of plies of dielectric layer and plain conductor is according to the setting that needs of manufacture craft, and, though the plain conductor that is illustrated in Fig. 2 F is not connected to each other, yet the position of the electrical connection of plain conductor and setting is need and to adjust according to manufacture craft equally.
Because after each formation dielectric layer and plain conductor, just therefore protective mulch on dielectric layer and plain conductor more can guarantee the not destruction of subject plasma etching process of optical diode sensing area 260.
In addition, because the effect of this each protective layer, for a plurality of complementary MOS image sensors on the same wafer, the numerical values recited of dark current that this each element produces concentrates in the scope thick and fast, promptly is that this each element has preferable homogeneity.
Then, please refer to Fig. 3, optical diode sensing area 260 parts that shown in Figure 3 only is among Fig. 2 F.Wherein the material of protective layer 228,234,340 is a silicon nitride, and the material of autoregistration insulating barrier 224, dielectric layer 230,236 is silica, owing to have different refractive indexes between two kinds of adjacent materials.When incident light 300 is injected optical diode sensing area 260 surfaces via protective layer 240, dielectric layer 236, protective layer 234, dielectric layer 230, protective layer 228 and autoregistration insulating barrier 224; optical diode sensing area 260 is when receiving this incident light 300; can obtain preferable conversion and produce photoelectronic ability, promptly be to have higher quantum efficiency.
In sum; key character of the present invention is; because after forming optical diode complementary formula metal oxide semi-image sensing element; in whole substrate, cover layer protective layer; and in back segment manufacture craft, between each dielectric layer, also form protective layer, by the effect of this each protective layer thereafter; can avoid that employed method for plasma etching damages the optical diode sensing area in the back segment manufacture craft, thereby the generation of dark current can be dropped to minimum.
And this each protective layer covers in the whole substrate, must the optical diode sensing area of protection except mainly, also have its effect of destroying of subject plasma etching process not of protection for other zone.
In addition; a plurality of sensors for same wafer; this forms the sensor of a plurality of protective layers; the distribution size of its dark current numerical value concentrates in the intensive scope; therefore; the dark current characteristic of this each sensor is very approaching, promptly is that this each complementary MOS image sensor has suitable favorable uniformity.
And, have different refractive indexes between the material of protective layer and autoregistration insulating barrier and dielectric layer.Because when incident light enters optical diode sensing area surface; refraction via protective layer and dielectric layer, two kinds of different refractivity materials of autoregistration insulating barrier; and the optical diode sensing area absorbs this, and change the photoelectronic ability of generation via institute after the incident light that reflected preferable, so have higher quantum efficiency.
Though disclosed the present invention in conjunction with an above preferred embodiment; yet it is not in order to limit the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; can be used for a variety of modifications and variations, so protection scope of the present invention should be with being as the criterion that the claim protection range is defined.
Claims (18)
1. complementary MOS image sensor, this sensor comprises at least:
One substrate;
One optical diode sensing area is arranged in this substrate;
One transistor unit district is arranged in this substrate, and this optical diode sensing area and this transistor unit district separate with a separator;
One transistor is arranged in this transistor unit district, and this transistor comprises a gate oxide, a gate conductor layer, a clearance wall and one source/drain region;
One autoregistration insulating barrier is arranged on this optical diode sensing area;
One first protective layer is arranged in this substrate, and covers this autoregistration insulating barrier;
A plurality of dielectric layers, wherein each this each dielectric layer is arranged on this first protective layer apart from this first protective layer differing heights; And
A plurality of second protective layers, wherein each this second protective layer is arranged between each this adjacent dielectric layer, and wherein the material of this first protective layer and this each second protective layer comprises the material that prevents that plasma etching from corroding.
2. complementary MOS image sensor as claimed in claim 1 wherein also is included on each this dielectric layer between each this dielectric layer and each this second protective layer a plurality of plain conductors is set.
3. complementary MOS image sensor as claimed in claim 1, wherein the material of this first protective layer and this second protective layer comprises silicon nitride.
4. complementary MOS image sensor as claimed in claim 1, wherein the material of this autoregistration insulating barrier and this each dielectric layer comprises silica.
5. complementary MOS image sensor as claimed in claim 1, wherein this optical diode sensing area comprises a doped region, and the dopant profile of this doped region is identical with this source/drain region.
6. complementary MOS image sensor as claimed in claim 1 comprises that also a metal silicide layer is covered on this gate conductor layer and this source/drain regions.
7. complementary MOS image sensor as claimed in claim 1, wherein this substrate has the doping of p type, and this optical diode sensing area comprises a n type doped region.
8. complementary MOS image sensor as claimed in claim 1, wherein this substrate has the doping of n type, and this optical diode sensing area comprises a p type doped region.
9. the manufacture method of a complementary MOS image sensor, this method comprises the following steps:
(a) provide a substrate;
(b) in this substrate, form a plurality of separators, and this each separator is divided into an optical diode sensing area and a transistor unit district with this basal area;
(c) in this substrate, form a gate oxide, a gate conductor layer;
(d) limit this gate conductor layer and this gate oxide, to form a grid structure in this transistor unit district;
(e) in this transistor unit district of these grid structure both sides, form one source/drain region, and in this optical diode sensing area, form a doped region simultaneously;
(f) on this optical diode sensing area, form an autoregistration insulating barrier;
(g) in this substrate, form one first protective layer;
(h) on this first protective layer, form one first dielectric layer; And
(i) repeat the step of (g)～(h), to form a plurality of second protective layers and a plurality of second dielectric layer on this first dielectric layer, wherein this first protective layer and material that should each second protective layer comprise the material that prevents that plasma etching from corroding.
10. the manufacture method of complementary MOS image sensor as claimed in claim 9; wherein on this first dielectric layer surface between this second protective layer and this first dielectric layer; and on this second dielectric layer surface of this second protective layer and this second dielectric layer, also be formed with a plurality of plain conductors.
11. the manufacture method of complementary MOS image sensor as claimed in claim 9, wherein the material of this first protective layer and this each second protective layer comprises silicon nitride.
12. the manufacture method of complementary MOS image sensor as claimed in claim 11, the method that wherein forms this first protective layer and this each second protective layer comprises a plasma enhanced chemical vapor deposition method.
13. the manufacture method of complementary MOS image sensor as claimed in claim 12, wherein the employed reacting gas source of this plasma enhanced chemical vapor deposition method comprises silicomethane and ammonia.
14. the manufacture method of complementary MOS image sensor as claimed in claim 9, wherein the material of this autoregistration insulating barrier, this first dielectric layer and this each second dielectric layer comprises silica.
15. the manufacture method of complementary MOS image sensor as claimed in claim 9, the method that wherein forms this autoregistration insulating barrier, this first dielectric layer and this each second dielectric layer comprises the plasma enhanced chemical vapor deposition method.
16. the manufacture method of complementary MOS image sensor as claimed in claim 9 wherein also comprises and carries out an autoregistration metal silication manufacture craft, to form a metal silicide at this gate conductor layer and this source/drain region.
17. the manufacture method of complementary MOS image sensor as claimed in claim 9, wherein this substrate has the p type and mixes, and forms the ion that this source/drain region and this doped region implant and comprise that the n type mixes.
18. the manufacture method of complementary MOS image sensor as claimed in claim 9, wherein this substrate has the n type and mixes, and forms the ion that this source/drain region and this doped region implant and comprise that the p type mixes.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 01122440 CN1217416C (en) | 2001-07-06 | 2001-07-06 | Structure of complementary MOS image sensor and its production method |
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| CN 01122440 CN1217416C (en) | 2001-07-06 | 2001-07-06 | Structure of complementary MOS image sensor and its production method |
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| CN1395313A CN1395313A (en) | 2003-02-05 |
| CN1217416C true CN1217416C (en) | 2005-08-31 |
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| CN 01122440 Expired - Lifetime CN1217416C (en) | 2001-07-06 | 2001-07-06 | Structure of complementary MOS image sensor and its production method |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1328763C (en) * | 2003-04-29 | 2007-07-25 | 茂德科技股份有限公司 | Semiconductor structure with partial etching grid and making method thereof |
| CN100346480C (en) * | 2003-06-02 | 2007-10-31 | 友达光电股份有限公司 | Complementary metal oxide semiconductor image sensing element and producing method thereof |
| US7061106B2 (en) * | 2004-04-28 | 2006-06-13 | Advanced Chip Engineering Technology Inc. | Structure of image sensor module and a method for manufacturing of wafer level package |
| US7078779B2 (en) * | 2004-10-15 | 2006-07-18 | Taiwan Semiconductor Manufacturing Co., Ltd | Enhanced color image sensor device and method of making the same |
| KR100672729B1 (en) * | 2005-07-14 | 2007-01-24 | 동부일렉트로닉스 주식회사 | Method for manufacturing of CMMS image sensor |
| US8471316B2 (en) * | 2011-09-07 | 2013-06-25 | Omnivision Technologies, Inc. | Isolation area between semiconductor devices having additional active area |
| CN109509760A (en) * | 2018-09-24 | 2019-03-22 | 深圳市乐夷微电子有限公司 | It is a kind of to be suitble to miniature surface-adhered light sensor chip structure and its processing method |
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