CN113983925A - Coordinate calculation system, method and device of multi-axis laser interferometer - Google Patents
Coordinate calculation system, method and device of multi-axis laser interferometer Download PDFInfo
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Abstract
The application discloses a coordinate calculation system, a method and a device of a multi-axis laser interferometer, which comprise the following steps: the system comprises a first processing chip, a second processing chip and a plurality of laser interferometer demodulation cards; the second processing chip and the plurality of laser interferometer demodulation cards are connected to the first parallel bus; the second processing chip and the plurality of laser interferometer demodulation cards are connected to a second parallel bus; the first processing chip is used for managing and controlling the operation of the plurality of laser interferometer demodulation cards through the first parallel bus; the laser interferometer demodulation card is used for acquiring coordinate data of a corresponding workpiece table; the second processing chip is used for acquiring coordinate data acquired by the plurality of laser interferometer demodulation cards through a second parallel bus; performing coordinate calculation based on the obtained coordinate data to obtain comprehensive coordinate data; and reporting the comprehensive coordinate data to the control system. By adopting the scheme, the efficiency of coordinate calculation for the multi-axis laser interferometer is improved.
Description
Technical Field
The application relates to the technical field of precision motion control, in particular to a coordinate calculation system, a coordinate calculation method and a coordinate calculation device of a multi-axis laser interferometer.
Background
In the precision motion control technology, it is often necessary to control a multi-axis parallel motion mechanism, and during the control, it is necessary to position the position of the multi-axis parallel motion mechanism, for example, using a multi-path position feedback sensor, where a multi-axis laser interferometer is a kind of multi-path position feedback sensor that is often used.
In practical application, the multi-axis parallel motion mechanism usually comprises a plurality of degrees of freedom workpiece tables, and a laser interferometer demodulation card is arranged for each workpiece table, and the laser interferometer demodulation card can acquire coordinate data of the workpiece table through a reflection mirror surface and an optical path so as to position the position of the workpiece table and further control the motion of the workpiece table based on the position.
In practical application, coordinate calculation is often required to be performed on a plurality of coordinate data acquired by a plurality of laser interferometer demodulation cards to obtain comprehensive coordinate data, the comprehensive coordinate data are uploaded to a control system to serve as closed-loop position feedback, and the control system controls a workpiece platform based on the received comprehensive coordinate data.
Because the system for calculating the coordinates belongs to a complex computer system and needs to precisely control the motion of the multi-axis parallel motion mechanism, the requirement on transmission delay is higher in the processes of coordinate data acquisition, transmission, coordinate calculation and reporting.
At present, the problem of low efficiency exists in coordinate calculation aiming at a multi-axis laser interferometer.
Disclosure of Invention
The embodiment of the application provides a coordinate calculating system, a coordinate calculating method and a coordinate calculating device of a multi-axis laser interferometer, which are used for solving the problem that the efficiency is low when the multi-axis laser interferometer is used for carrying out coordinate calculation in the prior art.
The embodiment of the application provides a coordinate calculation system of a multi-axis laser interferometer, which comprises: the system comprises a first processing chip, a second processing chip and a plurality of laser interferometer demodulation cards;
the first processing chip, the second processing chip and the plurality of laser interferometer demodulation cards are connected to a first parallel bus;
the second processing chip and the plurality of laser interferometer demodulation cards are connected to a second parallel bus;
the first processing chip is used for managing and controlling the operation of the plurality of laser interferometer demodulation cards through the first parallel bus;
the laser interferometer demodulation card is used for acquiring coordinate data of a corresponding workpiece platform;
the second processing chip is used for acquiring the coordinate data acquired by the plurality of laser interferometer demodulation cards through the second parallel bus; performing coordinate calculation based on the obtained coordinate data to obtain comprehensive coordinate data; and reporting the comprehensive coordinate data to a control system.
Further, the first processing chip is further configured to configure a synchronization timing sequence for the plurality of laser interferometer demodulation cards, and send the configured synchronization timing sequence to the second processing chip through the first parallel bus;
the second processing chip is further configured to send a synchronization signal to the multiple laser interferometer demodulation cards through the second parallel bus according to the synchronization timing sequence;
the laser interferometer demodulation card is specifically used for acquiring coordinate data of a workpiece table corresponding to the laser interferometer demodulation card according to the received synchronous signals and latching the acquired coordinate data.
Further, the second processing chip is further configured to send a synchronization instruction to the control system according to the synchronization timing after receiving the synchronization timing.
Further, the first parallel BUS is a VME BUS, and the second parallel BUS is a P2 BUS.
Further, the first processing chip is a CPU chip, and the second processing chip is a DSP chip.
The embodiment of the application also provides a coordinate calculation method of the multi-axis laser interferometer, which is applied to a second processing chip of a coordinate calculation system of the multi-axis laser interferometer, wherein the coordinate calculation system of the multi-axis laser interferometer further comprises a first processing chip and a plurality of laser interferometer demodulation cards; the first processing chip, the second processing chip and the plurality of laser interferometer demodulation cards are connected to a first parallel bus; the second processing chip and the plurality of laser interferometer demodulation cards are connected to a second parallel bus; the first processing chip is used for managing and controlling the operation of the plurality of laser interferometer demodulation cards through the first parallel bus;
the method comprises the following steps:
acquiring coordinate data acquired by the plurality of laser interferometer demodulation cards through the second parallel bus, wherein the coordinate data is data of a workpiece platform acquired by each laser interferometer demodulation card;
performing coordinate calculation based on the obtained coordinate data to obtain comprehensive coordinate data;
and reporting the comprehensive coordinate data to a control system.
Further, before the obtaining the coordinate data collected by the multiple laser interferometer demodulation cards through the second parallel bus, the method further includes:
receiving a synchronous time sequence sent by the first processing chip through the first parallel bus, wherein the synchronous time sequence is configured by the first processing chip for the plurality of laser interferometer demodulation cards;
and sending a synchronization signal to the plurality of laser interferometer demodulation cards through the second parallel bus according to the synchronization time sequence, so that the laser interferometer demodulation cards acquire coordinate data of the corresponding workpiece tables according to the received synchronization signal and latch the acquired coordinate data.
Further, after receiving the synchronization timing sent by the first processing chip through the first parallel bus, the method further includes:
and sending a synchronization instruction to the control system according to the synchronization time sequence.
Further, the first parallel BUS is a VME BUS, and the second parallel BUS is a P2 BUS.
Further, the first processing chip is a CPU chip, and the second processing chip is a DSP chip.
The embodiment of the application also provides a coordinate calculating device of the multi-axis laser interferometer, which is applied to a second processing chip of a coordinate calculating system of the multi-axis laser interferometer, wherein the coordinate calculating system of the multi-axis laser interferometer further comprises a first processing chip and a plurality of laser interferometer demodulation cards; the first processing chip, the second processing chip and the plurality of laser interferometer demodulation cards are connected to a first parallel bus; the second processing chip and the plurality of laser interferometer demodulation cards are connected to a second parallel bus; the first processing chip is used for managing and controlling the operation of the plurality of laser interferometer demodulation cards through the first parallel bus;
the apparatus, comprising:
the data acquisition module is used for acquiring coordinate data acquired by the plurality of laser interferometer demodulation cards through the second parallel bus, wherein the coordinate data is data of a workpiece platform acquired by each laser interferometer demodulation card and corresponding to the laser interferometer demodulation card;
the coordinate calculation module is used for carrying out coordinate calculation based on the obtained coordinate data to obtain comprehensive coordinate data;
and the data reporting module is used for reporting the comprehensive coordinate data to the control system.
Further, the method also comprises the following steps:
the time sequence receiving module is used for receiving a synchronous time sequence sent by the first processing chip through the first parallel bus before the data acquiring module acquires the coordinate data acquired by the plurality of laser interferometer demodulation cards through the second parallel bus, wherein the synchronous time sequence is configured by the first processing chip for the plurality of laser interferometer demodulation cards;
and the signal sending module is further configured to send a synchronization signal to the plurality of laser interferometer demodulation cards through the second parallel bus according to the synchronization timing sequence, so that the laser interferometer demodulation cards acquire coordinate data of the workpiece tables corresponding to the laser interferometer demodulation cards according to the received synchronization signal, and latch the acquired coordinate data.
Further, the signal sending module is further configured to send a synchronization instruction to the control system according to the synchronization timing after the timing receiving module receives the synchronization timing sent by the first processing chip through the first parallel bus.
Further, the first parallel BUS is a VME BUS, and the second parallel BUS is a P2 BUS.
Further, the first processing chip is a CPU chip, and the second processing chip is a DSP chip.
Embodiments of the present application further provide an electronic device, including a processor and a machine-readable storage medium storing machine-executable instructions executable by the processor, the processor being caused by the machine-executable instructions to: the coordinate calculation method of any multi-axis laser interferometer is realized.
An embodiment of the present application further provides a computer-readable storage medium, where a computer program is stored in the computer-readable storage medium, and when the computer program is executed by a processor, the computer program implements the coordinate calculation method of any one of the above-mentioned multi-axis laser interferometers.
Embodiments of the present application further provide a computer program product containing instructions, which when run on a computer, cause the computer to execute any one of the coordinate calculation methods of the multi-axis laser interferometer described above.
The beneficial effect of this application includes:
in the scheme provided by the embodiment of the application, the coordinate calculation system comprises a first processing chip, a second processing chip and a plurality of laser interferometer demodulation cards; the second processing chip and the plurality of laser interferometer demodulation cards are connected to the first parallel bus; the second processing chip and the plurality of laser interferometer demodulation cards are connected to a second parallel bus; the first processing chip is used for managing and controlling the operation of the multiple laser interferometer demodulation cards through the first parallel bus, and the second processing chip is used for acquiring coordinate data acquired by the multiple laser interferometer demodulation cards through the second parallel bus; performing coordinate calculation based on the obtained coordinate data to obtain comprehensive coordinate data; and reporting the comprehensive coordinate data to the control system. The system comprises two processing chips and two parallel buses, the operation control of the multiple laser interferometer demodulation cards and the transmission and coordinate calculation of coordinate data acquired by the multiple laser interferometer demodulation cards are realized through the different parallel buses and the different processing chips respectively, so that the influence on the transmission and coordinate calculation of the coordinate data on the laser interferometer demodulation cards is reduced, and the efficiency of the coordinate calculation on the multi-axis laser interferometer is improved.
Additional features and advantages of the application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the application. The objectives and other advantages of the application may be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
The accompanying drawings are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the principles of the application and not to limit the application. In the drawings:
FIG. 1 is a schematic structural diagram of a coordinate calculation system of a multi-axis laser interferometer according to an embodiment of the present disclosure;
FIG. 2 is a flowchart of a coordinate calculation method of a multi-axis laser interferometer according to an embodiment of the present disclosure;
FIG. 3 is a flowchart of a coordinate calculation method of a multi-axis laser interferometer according to another embodiment of the present application;
FIG. 4-1 is a schematic structural diagram of a coordinate calculating device of a multi-axis laser interferometer according to an embodiment of the present disclosure;
FIG. 4-2 is a schematic structural diagram of a coordinate calculating device of a multi-axis laser interferometer according to another embodiment of the present application;
fig. 5 is a schematic structural diagram of an electronic device according to an embodiment of the present application.
Detailed Description
In order to provide an implementation scheme for improving the efficiency of coordinate calculation for a multi-axis laser interferometer, embodiments of the present application provide a coordinate calculation system, a method and a device for a multi-axis laser interferometer, and the following description is made in conjunction with the accompanying drawings of the specification for describing preferred embodiments of the present application, it should be understood that the preferred embodiments described herein are only used for illustrating and explaining the present application, and are not used for limiting the present application. And the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
The embodiment of the application provides a coordinate calculation system of a multi-axis laser interferometer, as shown in fig. 1, including: a first processing chip 11, a second processing chip 12, a plurality of laser interferometer demodulation cards 13;
the first processing chip 11, the second processing chip 12 and a plurality of laser interferometer demodulation cards 13 are connected to a first parallel bus;
the second processing chip 12 and the multiple laser interferometer demodulation cards 13 are connected to a second parallel bus;
the first processing chip 11 is used for managing and controlling the operation of the multiple laser interferometer demodulation cards 13 through a first parallel bus;
the laser interferometer demodulation card 13 is used for acquiring coordinate data of a corresponding workpiece table;
the second processing chip 12 is configured to obtain coordinate data acquired by the multiple laser interferometer demodulation cards 13 through a second parallel bus; performing coordinate calculation based on the obtained coordinate data to obtain comprehensive coordinate data; and reporting the comprehensive coordinate data to the control system.
In the above-mentioned coordinate calculating system that this application embodiment provided, including two processing chips and two parallel buses, manage and control the operation of a plurality of laser interferometer demodulation cards, and solve the transmission and the coordinate of the coordinate data that a plurality of laser interferometer demodulation cards gathered, realize through different parallel buses and different processing chips respectively, thereby reduced the operation management and control to laser interferometer demodulation card, influence to the transmission of coordinate data and coordinate are solved, and then improved the efficiency of solving the coordinate to the multiaxis laser interferometer.
Correspondingly, the embodiment of the application also provides a coordinate calculation method of the multi-axis laser interferometer, which is applied to a second processing chip of a coordinate calculation system of the multi-axis laser interferometer, wherein the coordinate calculation system of the multi-axis laser interferometer also comprises a first processing chip and a plurality of laser interferometer demodulation cards; the second processing chip and the plurality of laser interferometer demodulation cards are connected to the first parallel bus; the second processing chip and the plurality of laser interferometer demodulation cards are connected to a second parallel bus; the first processing chip is used for managing and controlling the operation of the plurality of laser interferometer demodulation cards through the first parallel bus;
as shown in fig. 2, the method includes:
step 22, performing coordinate calculation based on the obtained coordinate data to obtain comprehensive coordinate data;
and step 23, reporting the comprehensive coordinate data to the control system.
In the coordinate calculating method provided by the embodiment of the application, the coordinate calculating system comprises two processing chips and two parallel buses, the operation of the multiple laser interferometer demodulation cards is controlled, the transmission and the coordinate calculation of the coordinate data acquired by the multiple laser interferometer demodulation cards are realized through the different parallel buses and the different processing chips, so that the operation control of the laser interferometer demodulation cards is reduced, the influence on the transmission of the coordinate data and the influence on the coordinate calculation are reduced, and the efficiency of the coordinate calculation of the multi-axis laser interferometer is improved.
The coordinate calculation method of the multi-axis laser interferometer provided by the embodiment of the present application is described in detail below with reference to the coordinate calculation system of the multi-axis laser interferometer provided by the embodiment of the present application.
Another embodiment of the present application provides a coordinate calculation method of a multi-axis laser interferometer, which is applied to the coordinate calculation system of the multi-axis laser interferometer, as shown in fig. 3, and includes the following steps:
and 31, configuring a synchronous time sequence for the plurality of laser interferometer demodulation cards by the first processing chip.
In the configuration, the synchronization timing may be configured based on the characteristics of each of the plurality of laser interferometer demodulation cards.
In this embodiment of the application, the first processing chip is further configured to manage and control the operation of the multiple laser interferometer demodulation cards through the first parallel bus, and a specific management and control strategy that is adopted may be flexibly set based on the needs of practical application, which is not described herein in an example.
And step 32, the first processing chip sends the configured synchronous time sequence to the second processing chip through the first parallel bus.
And step 33, after receiving the synchronization timing sequence, the second processing chip sends a synchronization signal to the multiple laser interferometer demodulation cards through the second parallel bus according to the synchronization timing sequence.
And step 34, after receiving the synchronization time sequence, the second processing chip may also send a synchronization instruction to the control system according to the synchronization time sequence, so that after receiving the synchronization instruction, the control system may obtain the time for the multiple laser interferometer demodulation cards to acquire the coordinate data, and may control the acquisition time of other related data, so that after receiving the integrated coordinate data, the integrated coordinate data may be combined with other data to perform more accurate control on the multi-axis parallel motion mechanism corresponding to the laser interferometer.
And step 35, after each laser interferometer demodulation card receives the synchronous signals, acquiring coordinate data of the corresponding workpiece table according to the synchronous signals, and latching the obtained coordinate data.
And step 36, the second processing chip acquires coordinate data acquired by the plurality of laser interferometer demodulation cards through the second parallel bus, and a plurality of coordinate data can be acquired in total.
And step 37, the second processing chip performs coordinate calculation based on the acquired coordinate data to obtain comprehensive coordinate data.
The second processing chip can be a multi-core processing chip, and the speed of coordinate calculation is further improved.
And step 38, the second processing chip reports the comprehensive coordinate data to the control system.
A high-speed optical fiber communication interface can be adopted between the second processing chip and the control system, and uploading of the calculated comprehensive coordinate data to the control system is further promoted.
By adopting the coordinate calculation method of the multi-axis laser interferometer shown in fig. 3 provided by the embodiment of the application, the operation control of the demodulation cards of the plurality of laser interferometers and the transmission and coordinate calculation of the coordinate data acquired by the demodulation cards of the plurality of laser interferometers are realized through different parallel buses and different processing chips respectively, so that the influence on the operation control of the demodulation cards of the laser interferometers, the transmission of the coordinate data and the coordinate calculation is reduced, and the efficiency of the coordinate calculation of the multi-axis laser interferometers is improved.
Further, in the coordinate calculation system and method, the first parallel bus may be a vme (versamodule eurocard) bus, so that the first parallel bus is more suitable for the first processing chip to manage and control the operation of the plurality of laser interferometer demodulation cards; and the second parallel BUS can be a P2BUS BUS, so that the second parallel BUS is more suitable for the second processing chip to acquire the acquired coordinate data from the multiple laser interferometer demodulation cards, thereby further reducing transmission delay and improving the efficiency of coordinate calculation.
Further, in the coordinate calculation system and method, the first Processing chip may be a Central Processing Unit (CPU) chip, the second Processing chip may be a Digital Signal Processing (DSP) chip, and a high-speed optical fiber communication interface is used between the second Processing chip and the control system, so as to further promote uploading of the calculated comprehensive coordinate data to the control system.
In practical applications, the first processing chip may be located in an SBC (Single Board Computer), the second processing chip may be located in a PDA (Position DATA Analysis) card, and the collected coordinate DATA may be directly transmitted to a Memory of the DSP chip according to DMA (Direct Memory Access), so as to effectively reduce transmission time.
And the second processing chip directly captures and reads coordinate data acquired by the laser interferometer demodulation card by adopting a second parallel bus, and the multi-core processor of the second processing chip completes rapid coordinate calculation, can reach 50uS calculation speed, and can accurately delay the transmission of the system to uS level in practical application.
Based on the same inventive concept, according to the coordinate calculation method of the multi-axis laser interferometer provided by the embodiment of the present application, correspondingly, another embodiment of the present application further provides a coordinate calculation device of the multi-axis laser interferometer, which is applied to a second processing chip of a coordinate calculation system of the multi-axis laser interferometer, wherein the coordinate calculation system of the multi-axis laser interferometer further comprises a first processing chip and a plurality of laser interferometer demodulation cards; the second processing chip and the plurality of laser interferometer demodulation cards are connected to the first parallel bus; the second processing chip and the plurality of laser interferometer demodulation cards are connected to a second parallel bus; the first processing chip is used for managing and controlling the operation of the plurality of laser interferometer demodulation cards through the first parallel bus; the schematic structural diagram is shown in fig. 4-1, and specifically comprises:
the data acquisition module 41 is configured to acquire coordinate data acquired by the multiple laser interferometer demodulation cards through the second parallel bus, where the coordinate data is data of a workpiece stage corresponding to each laser interferometer demodulation card acquired by the laser interferometer demodulation card;
the coordinate calculation module 42 is used for performing coordinate calculation based on the acquired coordinate data to obtain comprehensive coordinate data;
and a data reporting module 43, configured to report the comprehensive coordinate data to the control system.
Further, as shown in fig. 4-2, the method further includes:
the timing sequence receiving module 44 is configured to receive a synchronous timing sequence sent by the first processing chip through the first parallel bus before the data obtaining module 41 obtains the coordinate data collected by the multiple laser interferometer demodulation cards through the second parallel bus, where the synchronous timing sequence is a synchronous timing sequence configured by the first processing chip for the multiple laser interferometer demodulation cards;
the signal sending module 45 is further configured to send a synchronization signal to the multiple laser interferometer demodulation cards through the second parallel bus according to the synchronization timing sequence, so that the laser interferometer demodulation cards collect coordinate data of the workpiece tables corresponding to the laser interferometer demodulation cards according to the received synchronization signal, and latch the obtained coordinate data.
Further, the signal sending module 45 is further configured to send a synchronization instruction to the control system according to the synchronization timing after the timing receiving module 44 receives the synchronization timing sent by the first processing chip through the first parallel bus.
Further, the first parallel BUS is a VME BUS, and the second parallel BUS is a P2BUS BUS.
Further, the first processing chip is a CPU chip, and the second processing chip is a DSP chip.
The functions of the above modules may correspond to the corresponding processing steps in the flows shown in fig. 2 and fig. 3, and are not described herein again.
The coordinate calculation device of the multi-axis laser interferometer provided by the embodiment of the application can be realized by a computer program. It should be understood by those skilled in the art that the above-mentioned module division is only one of many module division, and if the division is performed into other modules or not, it is within the scope of the present application as long as the wall painting and printing apparatus has the above-mentioned functions.
Based on the same inventive concept, according to the coordinate calculation method of the multi-axis laser interferometer provided in the foregoing embodiment of the present application, correspondingly, another embodiment of the present application further provides an electronic device, whose structural schematic diagram is shown in fig. 5, and includes a processor 51 and a machine-readable storage medium 52, where the machine-readable storage medium 52 stores machine-executable instructions that can be executed by the processor 51, and the processor 51 is caused by the machine-executable instructions to: the coordinate calculation method of any multi-axis laser interferometer is realized.
The processor 51 corresponds to the second processing chip.
An embodiment of the present application further provides a computer-readable storage medium, in which a computer program is stored, and when the computer program is executed by a processor, the coordinate calculation method of any one of the foregoing multi-axis laser interferometers is implemented.
Embodiments of the present application further provide a computer program product containing instructions, which when run on a computer, cause the computer to execute any one of the coordinate calculation methods of the multi-axis laser interferometer described above.
The machine-readable storage medium in the electronic device may include a Random Access Memory (RAM) and a Non-Volatile Memory (NVM), such as at least one disk Memory. Optionally, the memory may also be at least one memory device located remotely from the processor.
The Processor may be a general-purpose Processor, including a Central Processing Unit (CPU), a Network Processor (NP), and the like; but also Digital Signal Processors (DSPs), Application Specific Integrated Circuits (ASICs), Field Programmable Gate Arrays (FPGAs) or other Programmable logic devices, discrete Gate or transistor logic devices, discrete hardware components.
All the embodiments in the present specification are described in a related manner, and the same and similar parts among the embodiments may be referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the apparatus, the electronic device, the computer-readable storage medium, and the computer program product embodiment, since they are substantially similar to the method embodiment, the description is relatively simple, and for the relevant points, reference may be made to the partial description of the method embodiment.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.
Claims (10)
1. A coordinate calculation system of a multi-axis laser interferometer, comprising: the system comprises a first processing chip, a second processing chip and a plurality of laser interferometer demodulation cards;
the first processing chip, the second processing chip and the plurality of laser interferometer demodulation cards are connected to a first parallel bus;
the second processing chip and the plurality of laser interferometer demodulation cards are connected to a second parallel bus;
the first processing chip is used for managing and controlling the operation of the plurality of laser interferometer demodulation cards through the first parallel bus;
the laser interferometer demodulation card is used for acquiring coordinate data of a corresponding workpiece platform;
the second processing chip is used for acquiring the coordinate data acquired by the plurality of laser interferometer demodulation cards through the second parallel bus; performing coordinate calculation based on the obtained coordinate data to obtain comprehensive coordinate data; and reporting the comprehensive coordinate data to a control system.
2. The system of claim 1, wherein the first processing chip is further configured to configure synchronization timing for the plurality of laser interferometer demodulation cards and send the configured synchronization timing to the second processing chip via the first parallel bus;
the second processing chip is further configured to send a synchronization signal to the multiple laser interferometer demodulation cards through the second parallel bus according to the synchronization timing sequence;
the laser interferometer demodulation card is specifically used for acquiring coordinate data of a workpiece table corresponding to the laser interferometer demodulation card according to the received synchronous signals and latching the acquired coordinate data.
3. The system of claim 2, wherein the second processing chip is further configured to send a synchronization instruction to the control system according to the synchronization timing after receiving the synchronization timing.
4. The system of claim 1, wherein the first parallel BUS is a VME BUS and the second parallel BUS is a P2 BUS.
5. The system of claim 1, wherein the first processing chip is a CPU chip and the second processing chip is a DSP chip.
6. The coordinate calculation method of the multi-axis laser interferometer is characterized by being applied to a second processing chip of a coordinate calculation system of the multi-axis laser interferometer, wherein the coordinate calculation system of the multi-axis laser interferometer further comprises a first processing chip and a plurality of laser interferometer demodulation cards; the first processing chip, the second processing chip and the plurality of laser interferometer demodulation cards are connected to a first parallel bus; the second processing chip and the plurality of laser interferometer demodulation cards are connected to a second parallel bus; the first processing chip is used for managing and controlling the operation of the plurality of laser interferometer demodulation cards through the first parallel bus;
the method comprises the following steps:
acquiring coordinate data acquired by the plurality of laser interferometer demodulation cards through the second parallel bus, wherein the coordinate data is data of a workpiece platform acquired by each laser interferometer demodulation card;
performing coordinate calculation based on the obtained coordinate data to obtain comprehensive coordinate data;
and reporting the comprehensive coordinate data to a control system.
7. The method as in claim 6, wherein prior to said acquiring coordinate data collected by said plurality of laser interferometer demodulation cards via said second parallel bus, further comprising:
receiving a synchronous time sequence sent by the first processing chip through the first parallel bus, wherein the synchronous time sequence is configured by the first processing chip for the plurality of laser interferometer demodulation cards;
and sending a synchronization signal to the plurality of laser interferometer demodulation cards through the second parallel bus according to the synchronization time sequence, so that the laser interferometer demodulation cards acquire coordinate data of the corresponding workpiece tables according to the received synchronization signal and latch the acquired coordinate data.
8. The method of claim 7, wherein after said receiving the synchronization timing transmitted by the first processing chip over the first parallel bus, further comprising:
and sending a synchronization instruction to the control system according to the synchronization time sequence.
9. The method of claim 6, wherein the first parallel BUS is a VME BUS and the second parallel BUS is a P2BUS BUS.
10. The method of claim 6, wherein the first processing chip is a CPU chip and the second processing chip is a DSP chip.
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