CN1134322C - Material shaping device with laser beam which is injected into stream of liquid - Google Patents
Material shaping device with laser beam which is injected into stream of liquid Download PDFInfo
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- CN1134322C CN1134322C CNB998075752A CN99807575A CN1134322C CN 1134322 C CN1134322 C CN 1134322C CN B998075752 A CNB998075752 A CN B998075752A CN 99807575 A CN99807575 A CN 99807575A CN 1134322 C CN1134322 C CN 1134322C
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- liquid
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- jet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/122—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in a liquid, e.g. underwater
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention relates to a method and device for shaping material of work pieces (45) using a laser beam which is injected into a stream of liquid (25). The liquid which is to be formed into a stream (25) by a nozzle channel (29) is fed to the nozzle channel opening (28) such that the flow does not swirl, especially without flow components which are tangential to the nozzle channel axis (32). The laser irradiation is focused on the channel entry plane (30) and the liquid is fed to the channel opening (28) in such a way that a liquid retention space is avoided in the beam focussing ball (38) and in the immediate surroundings thereof.
Description
The present invention relates to a kind of employing and incorporate material processing method and a kind of materials processing device of the workpiece of the laser beam in the liquid jet into, this device has a lasing source and a liquid jet that utilizes the nozzle passage of a nozzle block and form, and the laser beam of lasing source can be incorporated in this liquid jet.
Prior art
The technology that adopts laser beam to carry out materials processing has been widely used for cutting, perforation, welding, marking, and is generally used for the material grinding.In order to begin to carry out the material grinding, must on processed material surface, reach predetermined laser emission intensity.This high laser emission intensity is former to be reached by the focal focusing of laser beam before this.Its shortcoming then is that focus still has very little axial expansion (beam spoke degree), and above-mentioned high laser emission intensity reaches in this axial expansion.If profoundly cut or perforation deeply, the position that must keep focus very exactly, perhaps even also must homing guidance.Laser beam taperedly is dwindled towards focus gradually, that is to say, particularly when profoundly cutting, must constantly machine away so many material from material surface, makes the laser beam of taper also can all the way move forward to processing stand.Therefore, profoundly cut or deeply the perforation must always have oblique sidewall.
For fear of above-mentioned Focus tracking guidance, with narrow cutting and narrow perforation in order to have the near normal sidewall, in US-A5 773791, EP-A 0515983, DE-A 3643284 and WO 95/32834, propose following suggestion, be about to laser beam and be incorporated in the liquid jet as the aligning workpiece to be machined of optical conductor.
In DE-A 3643284, laser beam utilizes a glass fibre to carry.The termination of this glass fibre is by a water jet institute washing-round of aiming at workpiece to be machined.The shortcoming of this known devices is: the diameter of water jet must not be less than the diameter of the glass fibre of transmission laser bundle.Its another shortcoming is because cause a slough of glass termination below, and this slough also can produce interference in water jet, thus finally cause water jet be dispersed into water droplet rapidly.
EP-A 0515983 once attempted to overcome above-mentioned shortcoming, for this reason, had designed Optical devices of being furnished with the nozzle block that forms water jet.There is a hydropexis chamber front at the nozzle that forms water jet, and there are a water inlet and a condenser lens in this retained chamber, and these lens the stagnant chamber of above-mentioned water at the nozzle entrance place to face closure, to be used for the focusing of laser beam.The position of condenser lens and focal length are so to select, and make the focus of laser beam just in time be in the interior axial centre of nozzle passage.Prove in process operation: nozzle is subjected to the infringement of laser beam especially soon, thereby the laser beam that can not reentry perfect is shaped.
Improved laser beam and incorporate method in the liquid jet in WO 95/32834, the focus of laser beam that exactly will be to be incorporated into places the plane of jet hole, and eliminated the hydropexis chamber of jet hole front.The nozzle that forms liquid jet is in one here in the liquid supply chamber of nozzle-axis according to radially extension, has a plurality of axial fluid passage that coaxially distribute to import in the aforesaid liquid supply chamber.Even according to this layout, in the materials processing operation, also can cause damage to nozzle.
Task of the present invention
Task of the present invention provides material processing method and the materials processing device that the laser beam in the liquid jet is incorporated in a kind of employing into, utilizes this method and apparatus, can guarantee to realize materials processing under the very long machine service life prerequisite.Only just have resting of process operation in the time at predetermined maintenance interval.Got rid of unpredictalbe disruption, particularly owing to the impaired disruption that causes of nozzle block that forms liquid jet.
Technical scheme
Should note according to the present invention: on the one hand, the laser beam of incorporating in the liquid jet will focus in the nozzle entrance plane of the nozzle passage that forms liquid jet; On the other hand, the liquid that flows to nozzle entrance will flow fast (no liquid retained chamber) and not have the liquid vortex.According to three related requests recited above, finished the respective design of following Optical devices.
Device of the present invention is what a short as far as possible nozzle passage length, it is preferably less than the twice of nozzle diameter, the nozzle passage outlet has an exit portion that is designed to taper, the subtended angle of this exit portion is greater than the beam splitting of a laser beam that is merged in that occurs owing to unstability from liquid jet, be preferably in its wavelength in 150nm to 1100nm scope under the special laser emission situation in 190nm to 920nm and 1040nm to 1080nm scope, this subtended angle greater than 60 ° particularly greater than 80 °.
In device of the present invention, the jet expansion that is designed to taper has applied reflectance coating to laser emission, at the wavelength of used lasing source in 150nm to 1100nm scope under the special situation in 1040nm to 1080nm scope, the most handy quartz of nozzle block is made, and particularly makes with diamond.
Embodiments of the invention
The embodiment of the device that proposes of the method that the present invention is proposed and the present invention elaborates below with reference to accompanying drawings.Other advantage of the present invention is the expository writing text of face as follows.Accompanying drawing is represented:
The cross-sectional view of the Optical devices of the materials processing device that Fig. 1 the present invention proposes,
The skiagraph of Optical devices shown in Fig. 2 Fig. 1 amplifies the liquid supply line that illustrates to the nozzle block that forms liquid jet,
The skiagraph that remains on the nozzle block in the nozzle carrier shown in Fig. 3 Fig. 2,
Fig. 4 is along the cross-sectional view of IV-IV line among Fig. 2,
The enlarged drawing of part shown in Fig. 5 Fig. 3, it represents the formation and the guiding of liquid jet in the nozzle passage especially.
The Optical devices 1 of the materials processing device that the present invention who represents with the cross section among Fig. 1 proposes Utilize a beam conductor 3 through a beam conductor plug 5 and with a lasing source 6 phases Connect. Lasing source 6 just symbolically is shown in the drawings. It is a superpower laser, Nd:YAG laser instrument for example. By the beam 7 that comes out in the beam conductor 3 in the plug 5 Utilize a collimation to be collimated into beam 10 for 9. Beam 10 is guided to a beam hole enlargement Device 11. Utilize this expander 11, the diameter of the beam 10 that enters can be changed into namely and expand The diameter of the beam 13 that greatly comes out. For the hole enlargement of beam, provided 2 to 8 here A diameter quotient. This hole enlargement ratio allows change laser beam 13 described below Beam width 15 (diameter of focus). The beam hole enlargement coefficient of beam expander is to adopt electricity Flowing mode is by the (" motorized that changes of the signal of unshowned adjusting device in the drawings The beam Expending device "). By hole enlargement beam 13 utilize then a plane deviation mirror 17 Turn to 90 °, and utilize another plane deviation mirror 21 with adjusting device 19 to redirect to one On the individual focus lamp group 23 as focusing arrangement. The working method of adjusting device 19 and application will Introduced below.
What must be pointed out a bit is, the theoretical focal point of focus lamp group 23 might not with focus on The beam width 15 of laser beam 13 coincides. The deviation of above-mentioned two positions is because laser The beam divergence of beam 13 causes, and this beam divergence also can be utilized the beam expander 11 modulate.
For the formation of liquid jet 25, use a nozzle block 27 with a nozzle passage 29.Focus lamp group 23 and beam expander 11 are so to set up or install, and the beam width 15 of the feasible beam 13 that has focused on just in time is in the nozzle passage plane of inlet 30 of nozzle passage mouth 28.The surface that nozzle passage plane of inlet 30 continues to enter in both sides nozzle block 27.Fig. 2 to 5 expresses round the direct zone of the inlet that enters the nozzle passage 29 that forms liquid jet.In compare the part shown in Figure 3 that is enlarged again with Fig. 2, expressed nozzle block 27.Nozzle passage 29 be designed to cylindraceous.Nozzle block 27 is with for example quartzy the making of a kind of material transparent to laser emission (wavelength that here has is 1.06 microns), that mechanicalness is hard.But because it designs especially for a short time, so it also can be made with diamond.The nozzle block made from diamond 27 is compared with having longer service life with the quartzy nozzle block of making, wherein the latter stage in service life can by one after short liquid jet length the liquid jet 25 of beading display.
In order to make full use of the condition of the total reflection on the nozzle passage wall, nozzle block is not necessarily made the laser emission material transparent with a kind of.It also can be made with a kind of material opaque, that absorb radiation, as long as the nozzle passage wall has the coating of one deck energy reflected laser radiation, this coating should have resistance to corrosion to liquid jet.Under the situation of using opaque nozzle block material; the nozzle block surface also in addition reflectance coating (shield; when correction error occurring); also has also coating (for the radiation proof protection, this radiation reflexes on the workpiece from workpiece or plasma cloud) in addition of nozzle block downside.
Address as the front, the nozzle passage 29 of formation liquid jet is designed to cylindric here, and its diameter for example is 150 microns, and length is about 300 microns.The length of nozzle passage 29 should be not more than the twice of nozzle passage diameter.What link to each other with the outlet of nozzle passage 29 is the aperture 26 of a tapered expansion.The drift angle of awl here is 80 °.The inner surface 35 stepless terrace lands of this awl extend in the nozzle carrier 33.
The conical design of inner surface 35 is convenient to apply a kind of reflecting layer, will never hinder liquid jet, and since its gradient so, can strengthen any from liquid jet 25 because of mechanical heterogeneity (though the pollution impurity that shock wave is still brought into after filtration ...) and the reflex behavior of the beam that comes out.The size of cone angle is so to select, and makes the beam that comes out from liquid jet can or only not meet it under a very flat angle.
Supplying with to the liquid of nozzle passage 29 is to realize through a narrow discoidal inner room 36, and the height of this inner room roughly is equivalent to half of diameter of nozzle passage 29.The diameter of inner room 36 is equivalent to the diameter of nozzle carrier 33.Article 20, by the axis 32 of 37 pairs of nozzle passages 29 of the supply pipeline with round cross section of star arrangement according to radially importing in this inner room 36, the adjacent sidewall of these pipelines just merges in importing inner room 36 time each other.This layout of supply pipeline 37 is being supported to carry to (radially) liquid of the no vortex of nozzle passage 27.Settled a vacuum filter 39 at the entrance side of supply pipeline 37.What link to each other with this filter 39 is a doughnut 40, and this doughnut is supplied to liquid through a supply pipeline 41.The effect of filter 39 is the fluid pressures that produce homogeneous in 20 supply pipelines 37, thereby the liquid stream of a symmetry is provided to nozzle entrance.Because supply pipeline 41 only together, so there is not filter 39, the supply pipeline 37 adjacent with supply pipeline 41 has higher pressure compared with the supply pipeline on opposite.Therefore position at nozzle passage mouth 28 can not form tangential shunting.In order to allow laser beam can arrive nozzle entrance, one of discoidal inner room 36 usefulness are to the transparent lid 43 impenetrable liquid ground capping in addition of used laser beam.
Because the height of inner room 36 is very little, thereby make liquid obtain high flow velocity.Because of high flow rate so, got rid of liquid in focusing cone 38 because of by the heated phenomenon of its laser beam (perhaps reducing this heating greatly).Discoidal inner room 36 makes can not form the liquid holdup chamber especially in the radiation focusing cone 38 of laser beam that it preferentially can absorb the formation that promotes thermal lens by radiation because the design of addressing previously is.It is impossible that center (axis 32) thing that thermal lens can make laser beam stably focus on nozzle passage mouth 28 with improving becomes.The existence of thermal lens can cause the inferior of laser beam to focus on, and this is because thermal lens plays a part dispersing lens.Laser beam can touch jet hole edge and/or nozzle surface, thereby damages them.In addition, the thermal lens that forms owing to the heating of liquid is the neither one settling position.At this moment, laser beam just no longer can be incorporated in the liquid jet 25 best.
(radially) layout of star by supply pipeline 37, by the inlet of supply pipeline 37 and the vacuum filter 39 between the doughnut 40, the rounding of small (chamfering radius＜5 μ m) by no step transition region 34 in the liquid flow zone between nozzle block 27 and the nozzle carrier 33 and the edge 31, liquid inlet place by entering nozzle, this has just obtained flowing of no vortex, with the required prerequisite of the liquid jet 25 as large stream length.In addition, the particulate in the degasification of liquid and the removing liquid also plays a part sure for producing big jet length.What must attach equal importance to is: the supply of liquid does not have pressure fluctuation.The cylinder form of free fluid jet is exactly unsettled.Liquid is because the event of its surface tension always attempts to become another kind of shape, just spheroid form.Like this, after certain expansion length, liquid jet just can split into to loose and drip.An infinitesimal radially disturbance of liquid jet can strengthen rapidly when jet is shaped, thereby may produce the jet shrinkage phenomenon that jet is destroyed.In addition, the air round liquid jet that is brought by friction also can be strengthened above-mentioned effect.Has only measure, the liquid jet that could obtain to have big jet length for realizing that undisturbed liquid jet is taked by addressing previously.
Proof astoundingly in addition: touching one at liquid jet 25 still just has a shock wave begin to move in this jet up during the surface of the work of undressed mistake.Because this shock wave is, liquid jet no longer is a laminar flow, and a part of incorporating the laser beam in the liquid jet 25 in the porch of jet hole into just shoots out from liquid jet 25, and this is because the inhomogeneity that is caused by shock wave appears at due to the inner surface of liquid jet.The above-mentioned that part of beam that shoots out may be run into nozzle block 27, and then runs into the metallic walls of nozzle carrier 33 by this nozzle block.Under the local heat condition, beam can be absorbed herein.The result of fusing or vaporization takes place in the material that nozzle carrier 33 at this moment may occur, thus the destruction that causes nozzle block 7 and nozzle carrier 33.In order to prevent the generation of above-mentioned phenomenon, inwall 35 is designed to taper, and applies reflectance coating.Like this, that part of laser beam that shoots out owing to the inhomogeneity on the liquid jet inner surface just is reflected at this, thereby can not pass nozzle block 27 and reach absorbent material always.In case when workpiece 45 is holed or is cut off, just can not produce shock wave, perhaps only produce the shock wave that only has least energy.
Though be arranged long service life in the described here layout of nozzle block 27, but settle to such an extent that be easy to change.Joint 46 need only be back-outed during replacing to get final product.
In order to detect the purpose of compactness, the joint 48 that is holding transparent cover 43 on its outer surface, have one around the line of rabbet joint 54, this line of rabbet joint imports and detects in hole 50.In other words, if in detecting hole 50, liquid is arranged, so just prove that sealing ring 58a is not tight.If sealing ring 58b is not tight yet, then have the surface 60 that liquid reaches transparent cover 43, this will cause producing strong infringement in the focusing of laser beam and guiding.For fear of above-mentioned point, one must in time change sealing ring 58a and 58b when having recorded liquid in detection hole 50.
In the positioned beneath of workpiece to be processed 45 a power sensor 47.The position of this power sensor 47 is selected like this, makes it can send a maximum signal of telecommunication in complete liquid-jet 25 (zero deflection ground) to control device 49 when touching.Power sensor 47 is placed on the geometrical axis 32 of liquid jet 25.Touch a workpiece 45 of processed mistake not as yet if having the liquid jet 25 of the laser beam of incorporating into, just do not have signal, because at first liquid-jet 25 perforation of this workpiece 45.If this workpiece 45 has been perforated or the otch of its existing 25 warp of liquid-jet, just then liquid jet 25 touches joint-cutting sidewall or perforated wall when travelling workpiece 45.In this case, still have only the part of liquid jet 25 to touch power sensor 47.The signal that the signal that sends to control device 49 is sent when touching entirely less than liquid jet 25.Therefore, utilize power sensor 47 just can determine the quantity of material that has been removed.
In addition, control device 49 also links to each other with the shift unit of workpiece 45.This shift unit only represents with two double-head arrow 51a and 51b that point to horizontal direction X and Y symbolically that in Fig. 1 these two two arrows show that displacement can realize in a plane He in the two dimension.At this moment, control device 49 according to one in both direction 51a and 51b predetermined cutting pattern, is controlled the shifting speed of workpiece 45 according to the value of the power sensor 47 of being tried to achieve.Like this, utilize the power sensor 47 just can be, for this reason mobile workpiece 45 just when reaching the enough material amount of eliminating always at the amount of feeding of the meaning adjusted workpiece to be processed 45 of optimized energy.
In addition, control device 49 also links to each other with a radiation source 6.Therefore the power output that also can regulate laser instrument according to the measured value and the workpiece shift speed of power sensor.If under the situation of a laser instrument that is subjected to pulse, for example use a kind of step mode, so before workpiece 45 moves further forward, just laser instrument sends a plurality of pulses on a position for the displacement of workpiece.Step mode for example can be carried out with the step sequence frequency of 100Hz.
Except the beam guiding of above-mentioned laser beam, Optical devices 1 as shown in fig. 1, have such means, can be according to the axis 32 best corrections of nozzle entrance or nozzle passage 29 and the position of monitoring laser beam amplitude (focus of radiation).For this purpose, the radiation 52 of being sent by white light source 53 is overlapped on the laser beam 13 of expansion congruently.This utilizes deviation mirror 17 to realize.Deviation mirror 17 reflects laser emission fully, but the white light radiation 52 of the white light source 53 that is in is thereafter seen through.The radiation of white light source 53 is guided in the focusing arrangement 23 through deviation mirror 21 together with laser emission, and focuses on the position of axis 32 under the correct optical alignment condition in nozzle entrance plane 30.Deviation mirror 21 designs to such an extent that can partly see through white light radiation 52.
Whether correct in order to detect beam alignment, only use the radiation of white light source 53, if without laser beam. there is any correction that error is arranged, just then the peripheral region of nozzle edge 31 or nozzle edge is illuminated in the white light radiation that has focused on focusing arrangement 23.The surperficial peripheral region of nozzle entrance uses a video camera 55 observe through a telescope 56 and the deviation mirror 21 that can partly see through the white light radiation.White light when seeing through deviation mirror 21 because the thickness of this mirror is so can experience the primary beam dislocation.The handy parallel plane glass plate 57 of this beam dislocation is proofreaied and correct.
In order to reach this purpose, can be undertaken by following step: deviation mirror 21 is tilted, till can determining a kind of radiation reflection on the nozzle passage edge 31, subsequently at the measurement inclination angle (
Beam is at the translocation distance on the nozzle passage mouth) condition under tilt in the opposite direction, till also determining a kind of radiation reflection on the nozzle passage edge 31 of face-off mutually, carry out again the motion of inclining of returning with half inclination angle then with same reflected intensity.At this moment, focus just is in the plane that comprises nozzle passage axis 32.On the position that is aligned in passage axis 32, carry out like another second phase the beam axis and set up in being perpendicular to original incline direction.
Can transparent to the radiation of lasing light emitter 6 (about 2%) if deviation mirror 21 is made slightly, just can save white light source 53.Even in this case, the needs that telescope and glass plate 57 also are necessary for laser emission are designed, and must have reflectance coating.Video camera 55 must be equipped with the chip to the laser emission sensitivity.Have in calibration under the situation of error, laser emission just can be reflected by nozzle edge and peripheral region thereof.The laser emission that is reflected is observed with video camera 55 through telescope then, regulated through aforesaid adjusting device 19 and beam spread device 11 simultaneously.For fear of defective nozzle passage and nozzle surface, utilize the laser power that reduces to proofread and correct.Because it may be vicissitudinous that the character of the laser beam character during with smaller power under high laser beam intensity is compared, so will begin to regulate deviation mirror 21 under the situation of laser power and regulate beam spread device 11 in case of necessity improving constantly.
In order to check center adjustment, can so adjust the output lens of beam spread device 11, make the diameter of the beam width of cloth of laser beam 13 obtain increasing, till nozzle passage edge 31 (being nozzle passage mouth 28) is illuminated equably.Only under the condition that evenly illuminates, just can reach the purpose of centrally aligned.So the output lens of beam spread device 11 moves in the opposite direction, till occurring uniform jet hole edge-illuminated once more.The adjusting that optimum focusing is required is guaranteed in position between twice setting at this moment on the nozzle passage plane of inlet, thereby makes the beam that has focused on be symmetrical in nozzle passage axis 32.
Under the situation that adopts the Nd:YAG-laser instrument, the liquid of can water using as liquid jet.The radiation of water absorbs very little in the time of 1.06 microns.Above-mentioned very little absorption still is enough to satisfy the needs that form thermal lens before nozzle entrance.Therefore,, preferably use silicone oil, particularly the silicone oil of from polymethylene siloxanes family, choosing to some purposes.
If use water as liquid, must use it to absorb less than 0.2cm
-1Best laser emission less than 0.15cml.If use radiation, just in liquid jet, there is too much radiant power to be absorbed so with higher absorption.Under the situation that high radiation in liquid absorbs, might produce vapography.Like this, even the formation of thermal lens in the focus before under the optimal conditions that flow, for example also being not enough to be suppressed at nozzle entrance.With water during as used liquid, low absorption value is to be 150nm (nanometer) to 1100nm preferably 190nm to 920nm and (having an absorption peak in the scope about 1000nm) of obtaining under the radiation condition between 1040nm and the 1080nm in its wave-length coverage.Therefore, preferably can use diode laser, YAG-laser instrument, frequency multiplication YAG-laser instrument, excimer laser and copper-vapor laser.The YAG-laser instrument for example has such advantage: can buy this full-fledged class device in market; They also can obtain high mean power.
Radiation can be continuous or pulsation.Under the radiation event of pulsation, liquid can cool off the cutting seamed edge that produces with foregoing method.Simultaneously also can eliminate the heat that produces by the radiation that is absorbed in the liquid jet.Therefore, because glassware for drinking water has very high thermal capacity, so high radiant power can be incorporated in the liquid jet with pulsing.At employing Nd:YAG-laser instrument with under with the situation of water as liquid, can incorporate pulsating power into up to 20kw, its pulsation length is 20 to 500 μ s (microsecond), and mean power is 600W, and pulsation rate reaches 5kHz.
But also can use the Nd:YAG-laser instrument (YAG of Q-switch) of Q-switch, its pulsation length typically is 50 to 250ns (nanoseconds), and mean power 20 is to 120W, and pulsation rate reaches 60kHz.Also can use the laser instrument of pattern coupling, its pulsation length is at femtosecond (10
-15Second) in the scope.
The laser instrument of continuous radiation (for example cw YAG) also can adopt.But, in this case, the restriction that the radiation that mean power is lacked is interrupted.This just can only be incorporated into about 700W radiant power of a Nd:YAG-laser instrument in the water jet of one 80 micron thickness.Under the situation of higher laser power density, water can and be heated to such degree greatly owing to the radiation absorption, so that just can begin vaporization when surpassing certain jet length.Drip so will make water jet begin to split into and loose; Also just no longer include perfect directing radiation.
Claims (14)
1. adopt the material processing method of the workpiece (45) of incorporating the laser beam in the liquid jet (25) into, it is characterized in that: must satisfy three requirements together at this, promptly the first, focus the laser beam on the feeder connection plane (30) that forms nozzle passage (29) liquid jet, that have a ray focusing awl (38); The second, will utilize nozzle passage (29) not carry with the liquid that forms liquid jet (25) with having mobile vortex ground and the tangential shunting of nothing; The 3rd, this liquid is delivered to nozzle passage mouth (28) fast fluidly, no liquid retained chamber and in focusing cone (38) and be close to its peripheral region no liquid retained chamber, liquid stream is divided into for this reason a plurality of identical, according to radial inflow, keep equidistant shunting (37) by angle.
2. by the described method of claim 1, it is characterized in that, below in workpiece (45), existence to the liquid jet on the extended position of nozzle passage axis (32) (25) is surveyed, and the laser power that only ability travelling workpiece (45) and/or change are incorporated under the condition of surveying.
3. by the described method of claim 1, it is characterized in that, nozzle passage mouth (28) and its fringe region display with optical imagery, to focus on the feeder connection plane, do not have the materials processing energy laser beam the ray axis or the beam axis line parallel of an illumination radiation of extending overlappingly with the laser beam congruence moved in nozzle-axis (32), till can determining first radiation reflection with first reflected intensity on first nozzle edge of nozzle passage mouth (28), carrying out the beam axis under the condition of a translocation distance of measurement subsequently in opposite moving direction moves, up to till second radiation reflection that has with the identical reflected intensity of first reflected intensity can be determined in the second nozzle edge zone of the nozzle passage mouth (28) of first nozzle edge face-off, make the beam axis oppositely move half translocation distance again subsequently, carry out like another second phase the beam axis perpendicular to the same parallel nozzle axis of above-mentioned moving direction (32) immediately and set up, so that make laser beam aim at the central authorities of the nozzle passage mouth (28) of the nozzle passage (29) that forms liquid jet.
4. the materials processing device of processing work (45), have a lasing source (6) and a liquid jet (25) that utilizes the nozzle passage (29) of a nozzle block (27) and form, utilize an optical focusing device (23) can produce a focusing cone (38) and incorporate into the laser beam of lasing source (6) in this liquid jet (25) and in this liquid jet the guiding this laser beam, it is characterized in that: the relative nozzle passage of nozzle block (29) has a nozzle passage plane of inlet (30), a nozzle passage mouth (28) of nozzle passage (29) is in this plane, focusing arrangement (23) the relatively design and arranging of the inlet (28) of nozzle passage (29) makes the focus of the laser beam that focuses on focusing unit be in the nozzle passage plane of inlet (30), and there are a plurality of relative nozzle-axis (32) to keep equidistant liquid supply line (36 according to radially extend identical and by angle, 37,39,40), these supply lines are to standing in the laser beam focusing cone (38) on the nozzle passage plane of inlet (30) and be close to its peripheral region no liquid retained chamber ground feed fluid, and also can not allow any liquid vortex generation in the zone of jet hole (28) and nozzle passage (29).
5. by the described materials processing device of claim 4, it is characterized in that: the dish type cup (36) around nozzle passage mouth (28) has a plurality of according to the liquid supply line (37) that radially imports wherein, wherein the height of cup (36) is equivalent to the nozzle passage radius, even so that also make liquid that a flowing velocity is arranged for fear of producing the liquid holdup chamber in the proparea of nozzle passage mouth (28), this speed is only slightly less than the speed in nozzle passage (29), the sidewall of liquid supply line (37) in remittance place that enters cup (36) just mutually and close, liquid supply line (37) is arranged by forms of radiation, wherein, the axis of adjacent liquid supply line (37) all has identical central angle, so that make the liquid that flows to nozzle passage mouth (28) not have tangential shunting according to nozzle passage axis (32).
6. by the described device of claim 4, it is characterized in that: a short as far as possible nozzle passage length, wherein, nozzle passage outlet (26) has an exit portion that is designed to taper, and the subtended angle of this exit portion is greater than the beam splitting of a laser beam that is merged in that occurs owing to unstability from liquid jet (25).
7. by the described device of claim 4, it is characterized in that: a short as far as possible nozzle passage length, less than the twice of nozzle diameter.
8. by the described device of claim 6, it is characterized in that, the subtended angle of the exit portion of nozzle passage outlet (26) under the laser emission situation of wavelength in 150nm to 1100nm scope greater than 60 °.
9. by the described device of claim 4, it is characterized in that: a jet expansion (26) that is designed to taper (35) of nozzle passage (29) has applied reflectance coating to laser emission.
10. by the described device of claim 4, it is characterized in that: under the situation of wavelength in 150nm to 1100nm scope of used lasing source, nozzle block (27) is made with quartz.
11. by the described device of claim 4, it is characterized in that: nozzle block (27) is to make with a kind of material of strong reflection laser emission.
12. by the described device of claim 4, it is characterized in that: on the extended line of the nozzle passage axis (32) below the jet expansion, settled a power sensor (47), workpiece to be processed (45) can be placed on this sensor, sensor (47) is so design, make it can send a signal when liquid jet (25) occurring, can determine whereby: the liquid jet (25) when workpiece (45) is being directed laser beam penetrates according to the nozzle passage axis direction approx.
13. by the described device of claim 4, it is characterized in that: a liquid quantity delivered adjusting device is arranged, this adjusting device can be eliminated the fluid pressure fluctuation in the liquid that is transported to nozzle entrance, preferably liquid degassing particularly can also be removed particulate matter from liquid.
14., it is characterized in that: a finder (21,57,56,55) that is used to observe nozzle passage mouth (28) and peripheral region thereof is arranged by the described device of claim 4; Also have a shift unit (19,21), be used for so moving dropping on the laser beam (13) that has focused on the nozzle passage mouth (28), make this laser beam just in time be in the center of nozzle passage mouth (28).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19819429 | 1998-04-30 | ||
| DE19819429.3 | 1998-04-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1306467A CN1306467A (en) | 2001-08-01 |
| CN1134322C true CN1134322C (en) | 2004-01-14 |
Family
ID=7866347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB998075752A Expired - Lifetime CN1134322C (en) | 1998-04-30 | 1999-04-30 | Material shaping device with laser beam which is injected into stream of liquid |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR100584310B1 (en) |
| CN (1) | CN1134322C (en) |
| CA (1) | CA2330426C (en) |
| WO (1) | WO1999056907A1 (en) |
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- 1999-04-30 WO PCT/CH1999/000180 patent/WO1999056907A1/en active IP Right Grant
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| CN108132511A (en) * | 2017-12-21 | 2018-06-08 | 暨南大学 | A kind of compound camera lens for diamond laser cutting |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1306467A (en) | 2001-08-01 |
| CA2330426C (en) | 2007-11-13 |
| CA2330426A1 (en) | 1999-11-11 |
| WO1999056907A1 (en) | 1999-11-11 |
| KR100584310B1 (en) | 2006-05-26 |
| KR20010043171A (en) | 2001-05-25 |
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