CN113376857B - High-precision optical path debugging device and method - Google Patents
High-precision optical path debugging device and method Download PDFInfo
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Abstract
The invention discloses a high-precision optical path debugging device and a debugging method thereof, wherein the device comprises a light source module and a receiving module, the light source module is used for providing reference light and receiving feedback signals in the debugging process, and the receiving module is used for testing the position and the pointing angle of light beams before and after optical path debugging; the light source module comprises an adjusting bracket, an optical fiber collimator, a reference light source and a first spectroscope, wherein light output by the reference light source is input into the optical module to be debugged through the optical fiber collimator and the first spectroscope; the receiving module comprises a partial reflection beam splitter, a second beam splitter, a coaxial focusing lens, a first facula machine and a second facula machine, light output by the optical module to be debugged is respectively emitted to the first facula machine and the coaxial focusing lens after passing through the second beam splitter, and the light focused after passing through the coaxial focusing lens is input to the second facula machine. The invention can accurately control and monitor the relation between the front incident light of the optical module and the rear emergent light of the optical module, provides a visual debugging scheme and has high debugging efficiency.
Description
Technical Field
The invention relates to the technical field of optical light paths, in particular to a high-precision optical light path debugging device and a high-precision optical light path debugging method.
Background
The optical path debugging is a core process in the field of optical machine assembly and laser application. In many optical tuning applications, such as laser cavity tuning, optical fiber coupling, space communication tuning, etc., such applications often require that the positions of the output light and the input light of the module coincide, and the included angle between the two needs to satisfy <10 "(0.05 mrad), so how to implement high-precision optical path tuning is a problem that must be considered in the field of optomechanical assembly.
Because in a complex optical path system, the optical path reference light is often not visible light, in order to facilitate high-precision adjustment, some auxiliary visible light and visualization devices, such as a beam analyzer, a spectrometer, a photoelectric detector and the like, are usually used in the adjustment process, and are matched with optical instruments and devices such as diaphragms, reflectors and the like to measure the optical path position and the pointing angle. Due to the influence of precision and stability of the measuring instrument equipment, or due to possible deviation of machining and positioning of mechanical accessories, and the problems of easy attenuation of intensity, positioning and pointing errors between the auxiliary light source and actual reference light, or due to the added auxiliary measuring instrument equipment, the debugging precision is difficult to reach the precision required by the system, or the debugging needs to be corrected and debugged for a long time to reach the installation precision.
Disclosure of Invention
In order to solve the problems, the invention aims to provide a high-precision optical path debugging device and a debugging method thereof, wherein the device can be used for assembling and debugging a multi-turn refractive path with a complex shafting, can ensure that incident light and emergent light before and after the optical module is debugged have high-precision consistency in position and direction angle, does not need to add auxiliary visible light in a system as indication light, has high visualization degree in a debugging process, and is rapid and reliable in debugging operation.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the high-precision optical path debugging device comprises a light source module and a receiving module, wherein the light source module is used for providing reference light used for debugging and feedback signals in the debugging process, and the receiving module is used for testing the position and the pointing angle of light beams before and after optical path debugging; the light source module comprises an adjusting bracket, an optical fiber collimator, a reference light source and a first spectroscope, wherein the optical fiber collimator is arranged on the five-dimensional adjusting bracket, and a light source output by the reference light source is reflected by the optical fiber collimator and the first spectroscope and then is input into the optical module to be debugged; the receiving module comprises a partial reflection beam splitter, a second beam splitter, a coaxial focusing lens, a first facula machine and a second facula machine, wherein the partial reflection beam splitter is arranged on the optical frame, light output by the optical module to be debugged is respectively emitted to the first facula machine and the coaxial focusing lens after passing through the second beam splitter, and focused light is input to the second facula machine after passing through the coaxial focusing lens.
Further, the first facula machine is arranged on the sliding guide rail and is used for monitoring the position of the light beam; the second facula machine is arranged on the focal plane of the coaxial focusing lens and is used for monitoring the light beam pointing angle.
Further, the optical module to be debugged is provided with a first adjustable aperture diaphragm and a second adjustable aperture diaphragm respectively, and the first aperture diaphragm and the second aperture diaphragm are used for coarse adjustment of the invisible light path.
Furthermore, one side of the first spectroscope is provided with an auto-collimator, the auto-collimator is connected with a camera capable of receiving the reference light wavelength, and the auto-collimator is used for receiving the return light reflected by the partial reflection spectroscope.
Further, the auto-collimator is arranged on an adjusting frame, and the adjusting frame is used for adjusting the pitching and swinging angles of the auto-collimator.
Further, an optical circulator is arranged in the reference light source, a first interface of the optical circulator is connected with the light source, a second interface of the optical circulator is connected with the optical fiber collimator, and a third interface of the optical circulator is connected with the power meter.
Furthermore, the optical module optical output port to be debugged is provided with an angle calibration reflector which is the partial reflection lens.
Further, the debugging method based on the high-precision optical path debugging device comprises the following steps:
s1, calibrating a light source module: the first spectroscope is fixed at a corresponding position of incident light of the light path at 45 degrees; fixing a part of reflection light splitting sheet arranged on the optical frame at a corresponding position of emergent light of the light path; the auto-collimator is arranged on the adjusting frame, and the angles of the auto-collimator and the partial reflection light-splitting sheet are adjusted, so that the light emitted by the light source of the auto-collimator is received by the camera of the auto-collimator after being reflected by the partial reflection light-splitting sheet; placing an optical fiber collimator on an optical five-dimensional adjusting bracket, wherein the front end of the incident light is connected with a reference light source; the pitching and deflection positions of the optical fiber collimator are regulated, so that the reference light can be coupled and received by the optical fiber collimator through the first spectroscope after being partially reflected by the partial reflection beam splitting sheet, and the reference light is vertically incident or reflected to the partial reflection beam splitting sheet and is parallel to the light source of the auto-collimator; when the coupling efficiency of the optical fiber collimator reaches the highest, taking an imaging point of the reference light as a new reference point;
s2, calibrating a receiving module: adding a second beam splitter placed at 45 degrees into the light path, dividing the transmitted reference light into two beams, respectively striking the first light spot machine and the second light spot machine, and adjusting the installation positions of the first light spot machine and the second light spot machine to cause light spots to strike the center position of imaging software of the light spot machine; adjusting the front and back positions of the second facula machine, finding out the focus of the focusing facula, monitoring whether the position of the light beam deviates by comparing the central position of the facula of the first facula machine, and monitoring whether the pointing angle of the light beam changes by comparing the central position of the facula of the second facula machine;
s3, debugging a system light path: before an optical module to be debugged is added, recording the central coordinates of light spots on a first light spot machine and a second light spot machine, and taking the central coordinates as a reference before the optical path module is debugged; adding an optical module to be debugged into a set area between a light source module and a receiving module, adjusting the optical module to be debugged to enable light returned along an original path after reference light passes through a partial reflection beam splitter to be re-imaged on a display interface of an auto-collimator, continuously fine-adjusting the optical module to be debugged to move an imaging point to a reference point position according to the imaging point on the auto-collimator, reading out an energy value of coupled light by using a power meter, ensuring that emergent light of a system added into the optical module to be debugged is mutually perpendicular to the partial reflection beam splitter, and calculating change of the emergent light angle of the optical module to be debugged by the position deviation of a second facula machine facula; then continuously adjusting the optical module to be debugged according to the deviation condition between the central position of the light spot on the first light spot machine and the initial value, and adjusting the central position of the light spot displayed on the first light spot machine to the position before the light spot is put into the optical path module; and when the central positions of the light spot images on the first light spot machine and the second light spot machine are adjusted to be consistent with the positions before the optical module to be debugged is placed in, completing debugging.
The invention has the following beneficial effects:
1. the invention can accurately control and monitor the relation between the front incident light of the optical module and the rear emergent light of the optical module by arranging the light source module and the receiving module in front and behind the optical module to be debugged, provides a visual debugging scheme, has high debugging precision and efficiency, can be used for assembly debugging with a complex shafting and a multi-rotation refractive path, can ensure the high-precision consistency of the incident light and the emergent light before and after the optical module is debugged in position and in a direction angle, does not need to add auxiliary visible light in the system as indicating light, has high visualization degree in the debugging process, and is rapid and reliable in debugging operation.
2. Compared with the prior art, the invention is not limited by whether the light is visible light or not during the light path debugging, and meanwhile, the switching between the visible light and the invisible light in the light path system is not needed.
3. The light source module is provided with the adjusting bracket, the optical fiber collimator, the reference light source and the first spectroscope, the light source output by the reference light source is input into the optical module to be debugged through the optical fiber collimator and the spectroscope, the reference light source is accurate in positioning, convenient and reliable in position adjustment, and the high-precision testing principle of echo coupling is utilized, and meanwhile, the debugging precision and the operation difficulty are both considered by combining the light visualization of the auto-collimator.
4. The receiving module is provided with a reflecting mirror beam splitter, a second beam splitter, a coaxial focusing lens, a first facula machine and a second facula machine, wherein the first facula machine is used for monitoring the position of a light beam; the second facula machine is used for monitoring the light beam pointing angle, can accurately measure in the light path debugging process, is fixedly installed during debugging, and avoids errors caused by the use of a mobile platform in the traditional method.
Drawings
FIG. 1 is a schematic diagram of one of the high-precision optical path adjustment devices of the present invention.
FIG. 2 is a schematic diagram of a second optical path adjusting device with high precision according to the present invention.
Reference numerals illustrate:
1. a light source module; 11. adjusting the bracket; 12. an optical fiber collimator; 13. a reference light source; 14. a first spectroscope; 15. an autocollimator; 16. an adjusting frame; 17. a power meter; 2. a receiving module; 21. a partially reflective beam splitter; 22. a second beam splitter; 23. a coaxial focusing lens; 24. a first facula machine; 25. a second facula machine; 26. an optical frame; 27. a sliding guide rail; 3. an optical module to be debugged; 4. a first aperture stop; 5. a second aperture stop; 6. the mirrors are angularly aligned.
Detailed Description
The invention is described in further detail below with reference to the attached drawings and specific examples:
referring to fig. 1, a high-precision optical path debugging device comprises a light source module 1 and a receiving module 2, wherein the light source module 1 is used for providing reference light used for debugging and feedback signals in a debugging process, and the receiving module 2 is used for testing the position and the pointing angle of a light beam before and after the optical path is debugged; the light source module 1 comprises an adjusting bracket 11, an optical fiber collimator 12, a reference light source 13 and a first spectroscope 14, wherein the optical fiber collimator 12 is arranged on the optical five-dimensional adjusting bracket 11, and light output by the reference light source 13 is input into the optical module 3 to be debugged through the optical fiber collimator 12 and the first spectroscope 14 and is used as a reference light source for debugging an optical light path; the receiving module 2 comprises a partial reflection beam splitter 21, a second beam splitter 22, a coaxial focusing lens 23, a first facula machine 24 and a second facula machine 25, wherein the partial reflection beam splitter 21 is arranged on an optical frame 26, light output by the optical module 3 to be debugged is respectively emitted to the first facula machine 24 and the coaxial focusing lens 23 after passing through the second beam splitter 22, and the light focused after passing through the coaxial focusing lens 23 is input to the second facula machine 25.
The first facula machine 24 is arranged on the sliding guide rail 27 and is used for monitoring the position of the light beam; the second flare apparatus 25 is disposed on the focal plane of the coaxial focusing lens 23, and is used for detecting the pointing angle of the light beam.
The optical module 3 to be debugged is respectively provided with a first adjustable aperture diaphragm 4 and a second adjustable aperture diaphragm 5, and the first aperture diaphragm 4 and the second aperture diaphragm 5 are used for coarse adjustment of the invisible light path.
An auto-collimator 15 is arranged at one side of the first spectroscope 14, the auto-collimator 15 is connected with a camera capable of receiving the reference light wavelength, and the auto-collimator 15 is used for receiving the return light reflected by the partial reflection spectroscope. The auto-collimator 15 is arranged on an adjusting frame 16, and the adjusting frame 16 is used for adjusting the pitching and swaying angles of the auto-collimator 15. The reference light source 13 is provided with an optical circulator, a first interface of the optical circulator is connected with the light source, a second interface of the optical circulator is connected with the optical fiber collimator 12, and a third interface of the optical circulator is connected with the power meter 17. When the return light is completely parallel to the light path of the light emitted by the original collimator and the positions of the return light and the light path are coincident, the light energy received by the power meter 17 is the maximum. When the optical fiber used by the optical fiber collimator 12 is a single mode fiber, the accuracy of the optical path is adjusted to the second level by using the coupling mode.
As shown in fig. 2, the light outlet of the optical module 3 to be commissioned is provided with an angle-collimating mirror 6, which is partially reflective. When the incident/emergent light has a deflection/angle, the light path of the light module can be debugged according to actual requirements by only adding one or a plurality of angle calibration reflectors 6 which are calibrated in advance at the light emergent module.
The debugging method based on the high-precision optical path debugging device comprises the following steps of:
s1, calibrating a light source module 1: the first spectroscope 14 is fixed at a corresponding position of incident light of the light path at 45 degrees; the partial reflection beam splitter 21 arranged on the optical frame 26 is fixed at a corresponding position of the emergent light of the optical path, the partial reflection beam splitter 21 is plated with a partial reflection film, partial reference light can be reflected, and the partial reflection beam splitter 21 can adjust pitching and deflection; the auto-collimator 15 is arranged on the adjusting frame 16, the auto-collimator 15 itself contains a coaxial light source (the light source is visible light), and the camera of the auto-collimator 15 can receive the coaxial light and the reference light at the same time, the angles of the auto-collimator 15 and the partial reflection beam splitter 21 are adjusted, so that the light emitted by the light source of the auto-collimator 15 is received by the camera of the auto-collimator 15 after being reflected by the partial reflection beam splitter 21 (a cross image is displayed on the auto-collimator 15 software, the cross image is adjusted to the center position of the auto-collimator 15 camera software, and the image is taken as the reference image, and at the moment, the light source of the auto-collimator 15 is vertically incident or reflected to the partial reflection beam splitter 21);
the optical fiber collimator 12 is arranged on an optical five-dimensional adjusting bracket 11, and the front end of the incident light is connected with the reference light source 13; the pitching and swaying positions of the optical fiber collimator 12 are regulated, so that the reference light can be coupled and received by the optical fiber collimator 12 through the first spectroscope 14 after being partially reflected by the partial reflection beam splitter 21, and the reference light is vertically incident or reflected to the partial reflection beam splitter 21 and is parallel to the light source of the auto-collimator 15; because errors may exist in the system, the two may not be completely overlapped, at this time, the pitch and the yaw of the optical fiber collimator 12 are finely adjusted, so that when the coupling efficiency of the optical fiber collimator 12 reaches the highest (the energy of the return light is detected by the power meter 17, and the energy displayed by the power meter 17 is the largest), an imaging point of the reference light is taken as a new reference point (the imaging point is taken as a reference point by using the self-contained image recognition positioning function of the auto-collimator 15, and the reference point can be taken as a reference in the subsequent optical path debugging process, and the reference point also represents the position with the highest coupling efficiency of the optical fiber collimator 12, by the method, the debugging difficulty can be reduced); in the debugging process, the first aperture diaphragm 4 and the second aperture diaphragm 5 play roles in limiting the position of the light beam and facilitating rough adjustment;
s2, calibrating a receiving module 2: a second beam splitter 22 placed at 45 degrees is added in the light path, the transmitted reference light is divided into two beams to be respectively directed to a first facula machine 24 and a second facula machine 25, and the installation positions of the first facula machine 24 and the second facula machine 25 are adjusted to make the facula strike at the central position of the facula machine imaging software; the front and back positions of the second facula machine 25 are adjusted to find the focus of the focusing facula (when in debugging, if the focus energy is large, the facula machine has the condition of overexposure, the intensity of a reference light source can be properly adjusted or an attenuation sheet is placed in front of the facula machine), whether the position of a light beam deviates is monitored by comparing the central position of the facula of the first facula machine 24, and whether the pointing angle of the light beam changes is monitored by comparing the central position of the facula of the second facula machine 25; automatic data processing software can be developed later to convert the position coordinates displayed by the first and second spot machines 24 and 25 into the position offset and the angle offset of the light beam in real time.
S3, debugging a system light path: before the optical module 3 to be debugged is added, the central coordinates of light spots on the first light spot machine 24 and the second light spot machine 25 are recorded and used as the reference before the optical path module is debugged; adding the optical module 3 to be debugged into a set area between the light source module 1 and the receiving module 2 (when the debugging is not completed, the indication numbers on the two first facula machines 24 and the second facula machines 25 are changed (or the facula is completely invisible), the indication numbers are not received by the power meter 17, the position change (or disappearance) of a reference light reflection imaging point on the imaging surface of the auto-collimator 15 is also generated), the optical module 3 to be debugged is regulated, the reference light returns along the original path after passing through the partial reflection light splitting sheet 21 is re-imaged on the display interface of the auto-collimator 15, the imaging point on the auto-collimator 15 is used as a reference, the fine adjustment of the optical module 3 to be debugged is continued, the imaging point is moved to the reference point position, the energy value of the coupling light is read by the power meter 17, the system emergent light after the optical module 3 to be debugged is ensured to be mutually perpendicular to the partial reflection light splitting sheet 21 (namely, the emergent light angle is not changed before and after the optical module 3 to be debugged is added, the emergent light is mutually parallel), and the change of the optical module 3 to be debugged can be calculated according to the position deviation of the facula angle of the second facula machines 25; the optical module 3 to be debugged is continuously adjusted according to the deviation condition between the central position of the light spot on the first light spot machine 24 and the initial value, and the central position of the light spot displayed on the first light spot machine 24 is adjusted to the position before being put into the optical path module (note that the angle of the light beam is possibly changed in the process of adjusting the position of the light beam, and the angle is also required to be adjusted in time, and the adjustment can be also performed by referring to the central positions of the reference light image on the autocollimator 15 and the focusing image on the second light spot machine 25); and when the central positions of the spot images on the first spot machine 24 and the second spot machine 25 are adjusted to be consistent with the positions before the optical module 3 to be debugged is placed, completing debugging.
In the debugging process, the return light imaging and return loss energy values on the auto-collimator 15 and the spot center positions on the first spot machine 24 and the second spot machine 25 are all actually readable values, and the accurate effect parameters of the optical module debugging can be obtained by substituting the values and the optical paths into calculation.
In practical application, according to the debugging complexity of the optical module 3 to be debugged, a similar receiving module 21 can be added to the rest positions of the system, so that the step-by-step adjustment of the complex optical path module can be performed. The receiving module 2 and the partial reflection beam splitter 21 can be used as a movable integral module, and the movable integral module can be placed at any light-emitting position, so that the distribution adjustment is convenient.
The foregoing description is only specific embodiments of the present invention and is not intended to limit the scope of the invention, and all equivalent structural changes made by the present invention and the accompanying drawings, or direct or indirect application in other related technical fields, are included in the scope of the present invention.
Claims (1)
1. A debugging method of a high-precision optical path debugging device is characterized in that: the light source module (1) is used for providing reference light used for debugging and feedback signals in the debugging process, and the receiving module (2) is used for testing the position and the pointing angle of light beams before and after the light path is debugged; the light source module (1) comprises an adjusting bracket (11), an optical fiber collimator (12), a reference light source (13) and a first spectroscope (14), wherein the optical fiber collimator (12) is arranged on the adjusting bracket (11), and light output by the reference light source (13) is input into the optical module (3) to be debugged through the optical fiber collimator (12) and the first spectroscope (14) and is used as a reference light source for debugging an optical light path; the receiving module (2) comprises a partial reflection beam splitter (21), a second beam splitter (22), a coaxial focusing lens (23), a first facula machine (24) and a second facula machine (25), wherein the partial reflection beam splitter (21) is arranged on an optical frame (26), light output by the optical module (3) to be debugged is respectively emitted to the first facula machine (24) and the coaxial focusing lens (23) after passing through the second beam splitter (22), and the light focused by the coaxial focusing lens (23) is input to the second facula machine (25); the first facula machine (24) is arranged on the sliding guide rail (27) and is used for monitoring the position of the light beam; the second facula machine (25) is arranged on the focal plane of the coaxial focusing lens (23) and is used for monitoring the light beam pointing angle; the optical module (3) to be debugged is provided with a first adjustable aperture diaphragm (4) and a second adjustable aperture diaphragm (5) respectively, wherein the first aperture diaphragm (4) and the second aperture diaphragm (5) are used for coarsely adjusting the invisible light path; an auto-collimator (15) is arranged on the return light reflection side of the first spectroscope (14), and the auto-collimator (15) is connected with a camera capable of receiving reference light wavelength; the auto-collimator (15) is arranged on an adjusting frame (16), and the adjusting frame (16) is used for adjusting the pitching and swinging angles of the auto-collimator (15); an optical circulator is arranged in the reference light source (13), a first interface of the optical circulator is connected with the light source, a second interface of the optical circulator is connected with the optical fiber collimator (12), and a third interface of the optical circulator is connected with the power meter (17);
the debugging method comprises the following steps:
s1, calibrating a light source module (1): the first spectroscope (14) is fixed at a corresponding position of incident light of the light path at 45 degrees; fixing a part of reflection beam splitting sheet (21) arranged on an optical frame (26) at a corresponding position of light emitted by an optical path; the auto-collimator (15) is arranged on the adjusting frame (16), and the angles of the auto-collimator (15) and the partial reflection beam splitter (21) are adjusted, so that the light emitted by the light source of the auto-collimator (15) is received by the camera of the auto-collimator (15) after being reflected by the partial reflection beam splitter (21); the optical fiber collimator (12) is arranged on an optical five-dimensional adjusting bracket (11), and the front end of the incident light is connected with the reference light source (13); the pitching and swaying positions of the optical fiber collimator (12) are regulated, so that the reference light can be partially reflected by the partial reflection beam splitter (21) and then is coupled and received by the optical fiber collimator (12) through the first spectroscope (14), and the reference light is vertically incident or reflected to the partial reflection beam splitter (21) and is parallel to the light source of the auto-collimator (15); when the coupling efficiency of the optical fiber collimator (12) reaches the highest, taking an imaging point of the reference light as a new reference point;
s2, calibrating a receiving module (2): a second beam splitter (22) which is placed at 45 degrees is added in the light path, the transmitted reference light is divided into two beams which are respectively directed to a first facula machine (24) and a second facula machine (25), and the installation positions of the first facula machine (24) and the second facula machine (25) are adjusted to make the facula strike at the central position of the facula machine imaging software; adjusting the front and back positions of the second facula machine (25), finding out the focus of the focusing facula, monitoring whether the position of the light beam is deviated or not by comparing the central position of the facula of the first facula machine (24), and monitoring whether the pointing angle of the light beam is changed or not by comparing the central position of the facula of the second facula machine (25);
s3, debugging a system light path: before an optical module (3) to be debugged is added, the central coordinates of light spots on a first light spot machine (24) and a second light spot machine (25) are recorded and used as a reference before the optical path module is debugged; adding the optical module (3) to be debugged into a set area between the light source module (1) and the receiving module (2), adjusting the optical module (3) to be debugged to enable the reference light to be re-imaged on a display interface of the auto-collimator (15) along the original path after passing through the partial reflection beam splitter (21), continuously fine-adjusting the optical module (3) to be debugged to move an imaging point to a reference point position according to the imaging point on the auto-collimator (15), reading out the energy value of the coupling light by using the power meter (17), ensuring that the system emergent light added into the optical module (3) to be debugged is mutually perpendicular to the partial reflection beam splitter (21), and calculating the change of the optical module (3) to be debugged on the emergent light angle through the position deviation of a second facula machine (25); then, according to the deviation condition between the light spot center position on the first light spot machine (24) and the initial value, continuously adjusting the optical module (3) to be debugged, and adjusting the light spot center position displayed on the first light spot machine (24) to the position before the light path module is placed; and when the central positions of the light spot images on the first light spot machine (24) and the second light spot machine (25) are adjusted to be consistent with the positions before the optical module (3) to be debugged is placed, completing debugging.
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