CN112703646B - Ionizer including waterproof module easy to disassemble and assemble - Google Patents
Ionizer including waterproof module easy to disassemble and assemble Download PDFInfo
- Publication number
- CN112703646B CN112703646B CN202080002322.3A CN202080002322A CN112703646B CN 112703646 B CN112703646 B CN 112703646B CN 202080002322 A CN202080002322 A CN 202080002322A CN 112703646 B CN112703646 B CN 112703646B
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- Prior art keywords
- waterproof
- waterproof module
- housing
- module
- coupled
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Links
- 230000000903 blocking effect Effects 0.000 claims abstract description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000000741 silica gel Substances 0.000 claims abstract description 8
- 229910002027 silica gel Inorganic materials 0.000 claims abstract description 8
- 230000008878 coupling Effects 0.000 claims description 32
- 238000010168 coupling process Methods 0.000 claims description 32
- 238000005859 coupling reaction Methods 0.000 claims description 32
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 239000010445 mica Substances 0.000 claims description 4
- 229910052618 mica group Inorganic materials 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- 230000003647 oxidation Effects 0.000 abstract description 3
- 238000007254 oxidation reaction Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 28
- 239000004065 semiconductor Substances 0.000 description 12
- 230000005611 electricity Effects 0.000 description 7
- 230000003068 static effect Effects 0.000 description 7
- 229920001296 polysiloxane Polymers 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004078 waterproofing Methods 0.000 description 4
- 229910052790 beryllium Inorganic materials 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 239000000110 cooling liquid Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 150000001572 beryllium Chemical class 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/06—Carrying-off electrostatic charges by means of ionising radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
Landscapes
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Elimination Of Static Electricity (AREA)
Abstract
The present invention relates to an ion generator capable of easily assembling and disassembling a waterproof module, which can fundamentally prevent leakage caused by corrosion and oxidation and is installed in a relatively narrow space for use, and is characterized by comprising: a housing; a soft X-ray tube coupled to the housing, including a head projecting outside the housing; a waterproof module including a main body detachably coupled to a periphery of the soft X-ray tube and having a window formed therethrough, and a waterproof blocking film disposed outside the main body so as to cover the window, the waterproof blocking film releasing X-rays generated by the head to the outside and preventing moisture from flowing into the head from the outside; and the silica gel pad can be detachably combined on the side surface of the shell to enable the shell to be insulated.
Description
Technical Field
The present invention relates to an ionizer including a waterproof module that is easily disassembled.
Background
In a manufacturing process of a semiconductor chip package, a process of separating a wafer, which has been subjected to an Electrical characteristic inspection (EDS), into individual semiconductor chips is generally called a die cutting process, and this wafer cutting process is generally connected to a process of directly attaching the individual semiconductor chips to a lead frame, that is, a die bonding process.
More specifically, the wafer cutting process includes: a first step of attaching an ultraviolet film (UV tape) to a surface of a wafer; a second step of cutting the wafer into individual semiconductor chips by means of rotation of the blade; a third step of removing the ultraviolet film attached to the wafer; in a second step, a cooling liquid is supplied to the blade for cooling of the blade.
In this case, in the second step, during the dicing of the wafer by the blade, static electricity is generated due to friction between the blade and the ultraviolet film, and there is a problem that residues and impurities generated by the dicing of the wafer adhere to the semiconductor chips.
When the semiconductor chip package is assembled in a state where the residue and the impurities are attached to the semiconductor chip as described above, a protective layer (Passivation layer) on the surface of the semiconductor chip package is broken to cause a reliability failure, and metal wiring on the surface of the semiconductor chip package is connected or cut to cause an electrical characteristic failure, an assembly failure and a characteristic failure, which not only lowers a process yield, but also greatly hinders improvement of productivity, and therefore, it is necessary to remove static electricity generated when the wafer is cut into individual semiconductor chips.
As a method for removing static electricity generated when a wafer is cut into individual semiconductor chips, there are a method of performing grounding, a method based on humidification, a method using an antistatic agent or a charging tool, a method using an ionizer, and the like. In the above method, the ionizer is a device for feeding positive ions and negative ions obtained by discharging a high voltage to a material to neutralize and eliminate the positive ions and negative ions to have opposite polarities to the charged static electricity, and a soft X-ray static electricity removing device can be used as a device for removing the static electricity from the semiconductor chip.
A positive-electrode transmission X-ray tube of a soft X-ray neutralization apparatus is used in which a thin beryllium plate is coated with a metallic substance such as tungsten (W). As a technique related to such a soft X-ray neutralization apparatus, korean patent No. 1656781 discloses an X-ray ionizer that facilitates replacement of a soft X-ray tube, comprising: a plurality of X-ray tube modules including an X-ray tube, a first connector connected to the X-ray tube, and a coupling bolt formed at a position facing the first connector with reference to the center thereof, selectively coupled to a female screw hole of a main body, formed with a concave-convex portion at the outer periphery of a head, and rotated by an operator through manual operation; a plurality of voltage generating modules including a voltage generating part receiving a supplied external voltage to generate a high voltage, a mold formed to accommodate the voltage generating part therein and having a module insertion groove at one side into which the X-ray tube module is inserted, and a second connector exposed to the inside of the module insertion groove to transmit the high voltage by physical attachment and detachment with the first connector, thereby providing a physical coupling force; and a body which is a strip-shaped housing accommodating the voltage generating assembly therein in a spaced manner, and which has a plurality of module through holes formed therethrough at positions corresponding to the module insertion grooves. The conventional technique described above is equipped with a beryllium plate for releasing soft X-rays generated by the X-ray tube to the outside, and this beryllium plate has a problem of being corroded and oxidized by a cooling liquid supplied to the blade during dicing of the wafer, and thus leaking.
Disclosure of Invention
The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide an ionizer including a waterproof module that is easily attached and detached, which can fundamentally prevent leakage due to corrosion and oxidation.
Another object of the present invention is to provide an ionizer that can easily attach and detach a waterproof module without a separate bolt tightening process for an ionizer installed and used in a relatively narrow space.
An ionizer according to the present invention including a waterproof module which is easily attached and detached is characterized by comprising: a housing; a soft X-ray tube coupled to the housing, including a head projecting outside the housing; a waterproof module including a main body portion detachably coupled to a periphery of the soft X-ray tube and having a window formed therethrough, and a waterproof blocking film disposed outside the main body portion so as to cover the window, the waterproof blocking film releasing X-rays generated by the head to the outside and preventing moisture from flowing into the head from the outside; and the silica gel pad can be detachably combined on the side surface of the shell to enable the shell to be insulated.
In addition, the waterproof blocking film is a mica plate.
Further, the waterproof blocking film is formed to have a thickness of 0.020mm to 0.025 mm.
In addition, it is characterized by further comprising: and the side cover is used for placing the silica gel pad between the side cover and combining the side surface of the shell to fix the silica gel pad.
In addition, the waterproof module further includes a first O-ring disposed around the soft X-ray tube on a surface of the housing and between the body portion and the housing.
Additionally, the flashing module further includes a second O-ring mounted to the window.
Further, the waterproof module may further include a cover coupled to a front of the main body so as to cover the waterproof blocking film.
Further, it is characterized in that the waterproof module and the housing are combined with each other by tightening bolts.
In addition, it is characterized by further comprising: a rail formed at an upper side of the housing; a sliding portion that moves forward or backward of the housing along the rail; and a first extension member extending forward of the slide portion; the waterproof module further includes a second extension member extended upward from an upper end of the main body, and coupled to a front end of the first extension member in a hinge manner.
Further, the waterproof module is removed from the front of the housing, is rotated about a portion where the first extension member and the second extension member are coupled to each other in a hinge manner, and is then moved along the rail toward the rear of the housing so as to be accommodated in the rail.
In addition, the waterproof module is characterized by further comprising a sliding assistance member formed at a side surface and inserted into the rail.
Further, it is characterized in that the housing includes a first coupling auxiliary portion formed at a periphery of the soft X-ray tube and coupled with the waterproof module.
Further, the first auxiliary coupling portion protrudes forward from the front surface of the housing, and has a screw thread formed on an inner peripheral surface thereof, and the main body portion has a screw thread formed on an outer peripheral surface thereof and is screwed with the first auxiliary coupling portion.
According to the ionizer including the waterproof module of the present invention which is easily disassembled and assembled as described above, the soft X-ray tube is sealed by the waterproof type blocking film, so that the airtightness and waterproofness of the soft X-ray tube are maximized, and the occurrence of leakage due to corrosion and oxidation can be fundamentally blocked.
In addition, according to the present invention, the waterproof module for waterproofing the soft X-ray tube can be easily attached and detached, the waterproof module can be easily attached and detached in a process requiring waterproofing, and convenience of an operator who needs to attach and detach the waterproof module in a relatively narrow space can be maximized.
In addition, according to the present invention, in a non-waterproof process in which waterproofing is not required, the waterproof module can be accommodated in the rail mounted on the upper portion of the housing, and convenience of an operator can be further maximized.
Drawings
Fig. 1 is a partially exploded perspective view of an ionizer including a waterproof module that is easily disassembled and assembled according to a first embodiment of the present invention.
Fig. 2 is a partially enlarged view of fig. 1.
Fig. 3 is a combined perspective view of an ionizer including a waterproof module that is easily disassembled and assembled according to a first embodiment of the present invention.
Fig. 4 is a combined perspective view of an ionizer including a waterproof module that is easily disassembled and assembled in accordance with a second embodiment of the present invention.
Fig. 5 to 7 are perspective views illustrating a process of receiving a waterproof module in an ionizer including the waterproof module that is easily disassembled and assembled according to a second embodiment of the present invention.
Fig. 8 is an exploded perspective view of an ionizer including a waterproof module that is easily disassembled and assembled in accordance with a third embodiment of the present invention.
Fig. 9 is a combined perspective view of an ionizer including a waterproof module that is easily disassembled and assembled according to a third embodiment of the present invention.
Reference numerals
11. 12: screw thread
100: outer casing
200: soft X-ray tube
210: head with a rotatable shaft
300: waterproof module
310: main body part
311: window opening
312: sliding auxiliary member
320: waterproof blocking film
321: first O-ring
322: second O-ring
330: cover
340: second extension member
400: silica gel pad
500: side cover
610: track
620: sliding part
630: first extension member
B1: module bolt
B2: bolt for cover
Detailed Description
Hereinafter, preferred embodiments of an ionizer including a waterproof module that is easily disassembled and assembled according to the present invention will be described in detail with reference to the accompanying drawings.
[ first embodiment ]
Fig. 1 illustrates a state in which the composition of an ionizer including a waterproof module that is easily attached and detached according to a first embodiment of the present invention is disassembled.
As shown in fig. 1, the ionizer including the waterproof module that is easily disassembled and assembled according to the first embodiment of the present invention may include a housing 100, a soft X-ray tube 200, a waterproof module 300, a silicone pad 400, and a side cover 500.
The housing 100 is a portion corresponding to the basic body of the ionizer including the waterproof module of the first embodiment of the present invention, which is easily detachable, and can be fixed to a peripheral structure (e.g., an inner wall of a building). The fixing method of the housing 100 may have various methods such as an adhesive or a bolt. Referring to fig. 1, the other surfaces of the housing 100 except the front surface (the surface on which the soft X-ray tube 200 is mounted) and the peripheral structures are bonded to each other, and thus the housing 100 can be fixed.
Although not shown in fig. 1, a plurality of guide grooves may be formed in the front of the housing 100, and a soft X-ray tube 200, which will be described later, may be mounted in each guide groove. Therefore, the shape of the guide groove may be a shape corresponding to the rear of the soft X-ray tube 200.
Inside the housing 100, a voltage generation module may be housed. The voltage generation module is an electric device that generates a high voltage, and a control PCB (not shown) that controls the voltage generated by the voltage generation module and a power PCB (not shown) that electrically connects the voltage generation module to each other may be mounted inside the case 100 in addition to the voltage generation module.
As described above, the soft X-ray tube 200 shown in fig. 1 may be mounted to a guide groove (not shown) formed in the front of the housing 100.
Fig. 2 illustrates the soft X-ray tube 200 of fig. 1 in an enlarged manner.
As shown in fig. 2, the soft X-ray tube 200 includes a head 210 exposed to the outside and generating X-rays, and the head generates the X-rays by means of a high voltage transmitted from a voltage generation module. The X-rays generated by head 210 may be soft X-rays (soft X-ray). The soft X-ray tube 200 may be bolted to the front of the housing 100.
The waterproof module 300 is installed to cover the soft X-ray tube 200 as shown in fig. 2 in order to prevent moisture or foreign substances from flowing into the soft X-ray tube 200, and more specifically, the inflow head 210. The waterproof module 300 may include a body part 310, a waterproof blocking film 320, a cover 330, a first O-ring 321, and a second O-ring 322, which are coupled to each other.
The body 310 is a structure that constitutes most of the waterproof module 300, and is coupled to the front surface of the housing 100 so as to cover a part of the soft X-ray tube 200. Even if the main body 310 is coupled to the front surface of the casing 100 so as to cover a part of the soft X-ray tube 200, the X-rays generated from the head 210 of the soft X-ray tube 200 are released to the outside, and therefore, the window 311 is formed in the central portion of the main body 310 so that the head 210 can be exposed. As shown in fig. 2, the main body part 310 and the housing 100 may be coupled to each other by the module bolt B1, but the coupling manner of the main body part 310 and the housing 100 is not limited to the coupling manner by the module bolt B1 in the present invention, and the main body part 310 and the housing 100 may be coupled to each other in various manners. The body 310 may be formed of a material that is insulating, waterproof, easy to manufacture, and has a strength greater than a predetermined level. As a representative material forming the body portion 310, there may be a synthetic resin such as plastic.
As shown in fig. 2, a first O-ring 321 may be disposed between the body portion 310 and the front surface of the housing 100. The first O-ring 321 is made of a material having elasticity and being used for waterproofing, such as rubber or silicone, and may be disposed on the front surface of the housing 100 so as to surround the periphery of the soft X-ray tube 200. As described above, the body part 310 is coupled to the front surface of the housing 100 by the module bolt B1, and in the process, the first O-ring 321 is compressed between the body part 310 and the housing 100 to form a watertight structure, so that it is possible to prevent moisture from flowing into the inside of the head 210 or the inside of the housing 100.
In fig. 2, the first O-ring 321 is disposed on the flat front surface of the housing 100, but the present invention does not limit the disposed portion of the first O-ring 321 to a flat surface, and other embodiments are possible, such as forming a mounting groove corresponding to the shape of the first O-ring 321 on the front surface of the housing 100, or forming a mounting groove corresponding to the shape of the first O-ring 321 on the rear surface of the body 310, and disposing the first O-ring 321 in the mounting groove. The depth of the seating grooves formed in the front of the housing 100 or in the rear of the body part 310 (when the seating grooves are formed only in one side of the housing and the body part) may be formed to be smaller than the diameter of the cross-section of the first O-ring 321, and when the respective seating grooves are formed in the front of the housing 100 and in both sides of the rear of the body part 310, the sum of the depths of the seating grooves may be formed to be smaller than the diameter of the cross-section of the first O-ring 321.
As shown in fig. 2, a waterproof blocking film 320 may be disposed on the front surface of the main body 310. More specifically, the waterproof blocking film 320 may be disposed in front of the body 310 so as to block the window 311. As the name implies, the waterproof blocking film 320 may be made of Mica plate (Mica sheet) to prevent moisture from flowing into the interior of the head 210 or the interior of the housing 100 through the window 311 formed in the body 310. The waterproof type blocking film 320 may be formed in a thickness of 0.020mm to 0.025 mm.
As shown in fig. 2, the cover 330 may be coupled to the main body 310 with the waterproof type blocking film 320 interposed therebetween in front of the waterproof type blocking film 320. The cover 330 is coupled to the main body 310 by a cover bolt B2. However, the present invention is not limited to the manner of coupling the cover 330 and the body part 310 using the cover bolt B2, and the cover 330 and the body part 310 may be coupled in various manners. As shown in fig. 2, the second O-ring 322 may be disposed on an inner circumferential surface of the window 311 formed in the body 310. This is to further improve the airtightness and waterproofness of the waterproof module 300.
The waterproof module 300 having the above-described configuration is coupled to the front surface of the case 100 in such a manner as to cover the soft X-ray tube 200, so that airtightness and waterproofness can be maximized and the soft X-ray tube 200 can be prevented from being abnormally operated.
As shown in fig. 1, the silicone pad 400 may be coupled to a side surface of the case 100 to improve insulation, airtightness, and waterproofness of the case 100. The silicone pad 400 may be coupled to both side surfaces of the case 100 by means of the side covers 500, and the case 100, the silicone pad 400, and the side covers 500 may be coupled to each other by tightening bolts.
Fig. 3 illustrates a state in which the case 100, the soft X-ray tube 200, the waterproof module 300, the silicone pad 400, and the side cover 500, which are exploded from each other in fig. 1 and 2, are coupled to each other.
As shown in fig. 3, the soft X-ray tube 200 can improve airtightness and waterproofness by the waterproof module 300 without being exposed to the outside.
The ionizer including the waterproof module according to the first embodiment of the present invention shown in fig. 1 to 3, which is easily attached and detached, is configured such that the waterproof module 300 is coupled to the front surface of the housing 100 when the waterproof operation is performed, and the waterproof module 300 is detached from the housing 100 when the waterproof operation, that is, the non-waterproof operation is not performed, so that the problem of the weak intensity of the X-ray generated from the soft X-ray tube 200 when the waterproof module 300 is attached can be solved.
[ second embodiment ]
An ionizer including a waterproof module that is easily disassembled and assembled according to a second embodiment of the present invention will be described in detail with reference to the accompanying drawings.
In the ionizer including the waterproof module that is easily attached and detached according to the first embodiment of the present invention described above, the waterproof module 300 is attached and detached to and from the front surface of the housing 100, and therefore, an operator needs to store the waterproof module 300 in a separate place during the non-waterproof process. Due to the characteristics of the static electricity removing process, since a plurality of soft X-ray tubes 200 are mounted on the front surface of the housing 100, a plurality of waterproof modules 300 are also required, and thus, a relatively large volume of waterproof module storage space is required. In addition, since different waterproof modules 300 may be used depending on the type of the soft X-ray tube 200 mounted in front of the housing 100, there is a problem in that an operator needs to search for a waterproof module 300 that matches the soft X-ray tube 200 at any time. The ionizer including the waterproof module of the second embodiment of the present invention, which is easily disassembled and assembled, is developed to receive the waterproof module 300 in a specific portion of the case 100 in order to solve the above-mentioned problems.
Fig. 4 illustrates a state in which a waterproof module 300 is coupled to the front of a housing 100 in an ionizer including a waterproof module that is easily disassembled and assembled according to a second embodiment of the present invention.
As shown in fig. 4, the ionizer including the waterproof module that is easily attached and detached according to the second embodiment of the present invention is additionally configured to the ionizer including the waterproof module that is easily attached and detached according to the first embodiment of the present invention described above. Therefore, only the added configurations and the configurations related thereto will be described, and the other configurations will be regarded as the same as the first embodiment and the second embodiment.
The ionizer including the waterproof module of the second embodiment of the present invention, which is easily disassembled and assembled, may further include a rail 610, a sliding part 620, and a first extension member 630, and the waterproof module 300 may further include a second extension member 340.
As shown in fig. 4, a rail 610 may be formed at an upper side of the housing 100. More specifically, two rails 610 may be disposed at a predetermined interval from each other on the upper side of the housing 100, and both ends of the sliding portion 620 may be inserted into the pair of rails 610 and may move forward or backward of the housing 100. The first extension member 630 is extended from the center of the sliding portion 620 toward the front of the housing 100, and moves along the sliding portion 620.
As shown in fig. 4, the second extension member 340 is formed to extend upward from the upper end of the body part 310. The upper end of the second extension member 340 is hinge-coupled to the front end of the first extension member 630. That is, the waterproof module 300 can be rotated about a portion where the first extension member 630 and the second extension member 340 are hingedly coupled to each other as an axis after being removed from the front of the housing 100.
As shown in fig. 4, a sliding assistance member 312 may be formed on a side surface of the body part 310, and the sliding assistance member 312 may be inserted into the rail 610 when the waterproof module 300 is received, so that the body part 310 may be more easily slid.
Fig. 5 to 7 illustrate a process in which the waterproof module 300 shown in fig. 4 is removed from the front of the housing 100 and is received in the rail 610 installed on the upper portion of the housing 100.
First, as shown in fig. 5, the module bolt B1 once coupled to the body 310 is released, and the waterproof module 300 is moved forward. In this process, the sliding portion 620 connected to the waterproof module 300 and the first extension member 630 also move forward together. Then, as shown in fig. 6, the waterproof module 300 is rotated by 90 degrees with a portion where the first extension member 630 and the second extension member 340 are hinge-coupled to each other as an axis. Then, as shown in fig. 7, the waterproof module 300 is moved rearward of the housing 100 together with the slide part 620. In this process, the sliding assistance member 312 formed at the side of the main body part 310 may be inserted into the rail 610 so that the main body part 310 moves along the rail 610 more easily, and through the above process, the waterproof module 300 may be received in the rail 610 formed at the upper side of the housing 100.
The processes shown in fig. 5 to 7 are processes for removing the waterproof module 300 and then storing the module in order to apply the present invention to a non-waterproof process, and are performed in reverse order when an operator attaches the waterproof module 300 to the front of the housing 100 in order to apply the present invention to a waterproof process.
[ third embodiment ]
An ionizer including a waterproof module that is easily disassembled and assembled according to a third embodiment of the present invention will be described in detail with reference to the accompanying drawings.
Fig. 8 illustrates an ionizer including a waterproof module that is easily disassembled and assembled in accordance with a third embodiment of the present invention.
The ionizer including the waterproof module easy to disassemble and assemble according to the third embodiment of the present invention shown in fig. 8 is identical to the ionizer including the waterproof module easy to disassemble and assemble according to the first embodiment of the present invention except for a portion where the housing 100 and the waterproof module 300 are combined with each other and a portion where the shape of the soft X-ray tube 200 is changed, and thus the first and third embodiments of the present invention are considered to be identical to each other with respect to the configuration not described below.
As shown in fig. 8, a first coupling auxiliary part 220 is formed at the front of the housing 100 to protrude toward the waterproof module 300, i.e., toward the waterproof module 300. The first coupling auxiliary part 220 is used to easily couple with the waterproof module 300, has a ring-shaped cross section, and may have a screw thread 11 formed on an inner circumferential surface thereof.
As shown in fig. 8, the main body 310 of the waterproof module 300 is different from the main body 310 of the ionizer including the waterproof module of the first embodiment of the present invention, which is described above, in that the sectional shape may be a circle, the screw thread 12 may be formed on the outer peripheral surface, and the waterproof blocking film 320 and the cover 330 may be coupled to the front of the main body 310 in the same manner as the first embodiment described above. When the operator needs to couple the waterproof module 300, the waterproof module 300 in a state in which the main body portion 310, the waterproof type blocking film 320, and the cover 330 are coupled to each other may be screwed with the first coupling auxiliary portion 220, so that the waterproof module 300 may be coupled to the front surface of the case 100 without a separate tool.
Fig. 9 illustrates a state in which the waterproof module 300 and the housing 100 are coupled to each other in the present embodiment.
As shown in fig. 9, the front length of the waterproof module 300 may be formed longer than the depth of the first coupling auxiliary part 220. This is because, when the front length of the waterproof module 300 and the depth of the first coupling auxiliary part 220 are the same as each other, the waterproof module 300 can be completely inserted into the first coupling auxiliary part 220 and cannot be pulled out. Also, although not shown in the drawings, in the present embodiment, in order to more easily remove/couple the waterproof module 300 by screwing with the first coupling auxiliary portion 220, an auxiliary member is formed to protrude forward of the waterproof module 300 so that a user can more easily combine or remove the waterproof module 300. In addition, in an embodiment, the main body 310 may be formed with a second auxiliary coupling portion extending rearward, a screw thread may be formed on an outer circumferential surface of the second auxiliary coupling portion, and the second auxiliary coupling portion may be inserted into the first auxiliary coupling portion 220 and screwed with each other. In the embodiment in which the second coupling auxiliary portion is formed in the body portion 310, the user only needs to grip the body portion 310 and not the second coupling auxiliary portion to rotate, so that the waterproof module 300 can be more easily detached from and coupled to the housing 100.
In the present embodiment, the first auxiliary coupling portion 220 is formed to protrude from the front surface of the housing 100, but the present invention is not limited thereto, and there may be an embodiment in which the first auxiliary coupling portion is formed to be recessed in the housing 100, a screw is formed on an inner circumferential surface of the recess, and the second auxiliary coupling portion of the main body portion is inserted into the first auxiliary coupling portion and screwed.
In the above-described embodiment of the present invention, the waterproof module is coupled to the front surface of the housing by screwing. However, the present invention is not limited thereto, and the operator may more easily couple the waterproof module to the housing by a predetermined other means, and as some examples thereof, the waterproof module 300 may be attached to or detached from the front of the housing 100 using a magnet, and the waterproof module 300 may be attached to or detached from the front of the housing 100 using a groove-and-hook structure. In the case of the groove-and-hook structure, in the ionizer including the waterproof module that is easily attached and detached according to the third embodiment of the present invention shown in fig. 8, no screw thread may be formed on the outer circumferential surface of the main body part 310 and the inner circumferential surface of the first coupling auxiliary part 220, a protrusion formed to protrude outward may be formed on the outer circumferential surface of the main body part 310, and a groove may be formed on the inner circumferential surface of the first coupling auxiliary part 220 so that the protrusion can be inserted. The groove may be divided into three sections in total, a first section of the groove may be formed in the rotation axis direction of the first coupling assistance part 220, a second section may be connected to the first section, and may be an inclined section moving in the rotation axis direction while rotating in the circumferential direction of the first coupling assistance part 220, and a third section may be connected to an end portion of the second section, and may be formed in the circumferential direction. That is, the body part 310 moves in the direction of the housing 100 while rotating along the second section after the protrusion is inserted into the first section of the groove, and presses the first O-ring and is seated in the third section, so that the waterproof module 300 can be coupled to the housing 100 without additional screw-fastening or additional tools.
The present invention is not limited to the above-described embodiments, and the application range is various, and various modifications can be made without departing from the gist of the present invention claimed in the claims.
Claims (12)
1. An ionizer including a waterproof module that is easily disassembled and assembled, comprising:
a housing;
a soft X-ray tube coupled to the housing, including a head projecting outside the housing;
a waterproof module including a main body detachably coupled to a periphery of the soft X-ray tube and having a window formed therethrough, and a waterproof blocking film disposed outside the main body so as to cover the window, the waterproof blocking film releasing X-rays generated by the head to the outside and preventing moisture from flowing into the head from the outside; and
a silica gel pad detachably combined with the side surface of the shell to insulate the shell,
wherein the ionizer further comprises: a rail formed at an upper side of the housing; a sliding portion that moves forward or backward of the housing along the rail; and
a first extension member formed to extend forward of the slide portion; the waterproof module further includes a second extension member extended upward from an upper end of the main body, and coupled to a front end of the first extension member in a hinge manner.
2. The ionizer including a waterproof module that is easily disassembled and assembled according to claim 1,
the waterproof blocking film is a mica plate.
3. The ionizer including a waterproof module that is easily disassembled and assembled according to claim 2,
the waterproof blocking film is formed in a thickness of 0.020mm to 0.025 mm.
4. The ionizer including a waterproof module easy to disassemble and assemble according to claim 1,
further comprising: and the side cover is used for placing the silica gel pad between the side covers and combining the side surfaces of the shell to fix the silica gel pad.
5. The ionizer including a waterproof module that is easily disassembled and assembled according to claim 1,
the waterproof module further includes a first O-ring disposed around the soft X-ray tube at a surface of the housing and between the body portion and the housing.
6. The ionizer including a waterproof module that is easily disassembled and assembled according to claim 1,
the waterproof module further includes a second O-ring mounted to the window.
7. The ionizer including a waterproof module easy to disassemble and assemble according to claim 1,
the waterproof module further includes a cover coupled to a front of the main body so as to cover the waterproof blocking film.
8. The ionizer including a waterproof module that is easily disassembled and assembled according to claim 1,
the waterproof module and the housing are coupled to each other by tightening bolts.
9. The ionizer including a waterproof module that is easily disassembled and assembled according to claim 1,
the waterproof module is removed from the front of the housing, is rotated about a portion where the first extension member and the second extension member are coupled to each other in a hinge manner, and then moves to the rear of the housing along the rail, and can be stored in the rail.
10. The ionizer including a waterproof module that is easily disassembled and assembled according to claim 1,
the waterproof module further includes a sliding assistance member formed at a side surface and inserted into the rail.
11. The ionizer including a waterproof module that is easily disassembled and assembled according to claim 1,
the housing includes a first coupling assistant part formed at a periphery of the soft X-ray tube and coupled with the waterproof module.
12. The ionizer including a waterproof module that is easily disassembled and assembled according to claim 11,
the first auxiliary coupling part protrudes forward from the front surface of the housing and has a screw thread formed on an inner circumferential surface,
the main body portion has a screw thread formed on an outer peripheral surface thereof and is screwed with the first auxiliary coupling portion.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020190100843A KR20210021669A (en) | 2019-08-19 | 2019-08-19 | Ionizer including waterproof module for easy removal |
KR10-2019-0100843 | 2019-08-19 | ||
PCT/KR2020/010993 WO2021034085A1 (en) | 2019-08-19 | 2020-08-18 | Ionizer comprising easily detachable waterproof module |
Publications (2)
Publication Number | Publication Date |
---|---|
CN112703646A CN112703646A (en) | 2021-04-23 |
CN112703646B true CN112703646B (en) | 2022-10-21 |
Family
ID=74660599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202080002322.3A Expired - Fee Related CN112703646B (en) | 2019-08-19 | 2020-08-18 | Ionizer including waterproof module easy to disassemble and assemble |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR20210021669A (en) |
CN (1) | CN112703646B (en) |
WO (1) | WO2021034085A1 (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100680760B1 (en) * | 2005-04-19 | 2007-02-08 | (주)선재하이테크 | A flexible soft X-ray ionizer |
KR100823990B1 (en) * | 2007-03-19 | 2008-04-22 | (주)선재하이테크 | A photo ionizer |
KR101609620B1 (en) * | 2014-04-29 | 2016-04-06 | (주) 브이에스아이 | Ionization apparatus |
KR101656781B1 (en) * | 2016-02-05 | 2016-09-12 | (주)선재하이테크 | X-ray Ionizer |
KR20190001992A (en) * | 2017-06-29 | 2019-01-08 | (주)선재하이테크 | Ionizer having removable waterproof soft X-ray tube module |
-
2019
- 2019-08-19 KR KR1020190100843A patent/KR20210021669A/en active IP Right Grant
-
2020
- 2020-08-18 CN CN202080002322.3A patent/CN112703646B/en not_active Expired - Fee Related
- 2020-08-18 WO PCT/KR2020/010993 patent/WO2021034085A1/en active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100680760B1 (en) * | 2005-04-19 | 2007-02-08 | (주)선재하이테크 | A flexible soft X-ray ionizer |
KR100823990B1 (en) * | 2007-03-19 | 2008-04-22 | (주)선재하이테크 | A photo ionizer |
KR101609620B1 (en) * | 2014-04-29 | 2016-04-06 | (주) 브이에스아이 | Ionization apparatus |
KR101656781B1 (en) * | 2016-02-05 | 2016-09-12 | (주)선재하이테크 | X-ray Ionizer |
KR20190001992A (en) * | 2017-06-29 | 2019-01-08 | (주)선재하이테크 | Ionizer having removable waterproof soft X-ray tube module |
Also Published As
Publication number | Publication date |
---|---|
WO2021034085A1 (en) | 2021-02-25 |
KR20210021669A (en) | 2021-03-02 |
CN112703646A (en) | 2021-04-23 |
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