CN111591763A - Accurate correction walking trolley device and position correction method thereof - Google Patents
Accurate correction walking trolley device and position correction method thereof Download PDFInfo
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- CN111591763A CN111591763A CN202010519147.7A CN202010519147A CN111591763A CN 111591763 A CN111591763 A CN 111591763A CN 202010519147 A CN202010519147 A CN 202010519147A CN 111591763 A CN111591763 A CN 111591763A
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- rotating shaft
- arm body
- joint arm
- support
- base plate
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- 238000000034 method Methods 0.000 title claims abstract description 11
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 4
- 230000005012 migration Effects 0.000 claims description 2
- 238000013508 migration Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 15
- 239000004973 liquid crystal related substance Substances 0.000 description 13
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/041—Camera
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a precise correction walking trolley device and a position correction method thereof, the precise correction walking trolley device comprises a moving trolley, a lifting assembly which is arranged at the top of the moving trolley and is formed by mutually connecting a plurality of joint arm bodies into a foldable lifting mode, a main rotating shaft arranged at the top of the lifting assembly, a base plate connected with the main rotating shaft, a support arranged on the base plate, a plurality of supporting hands arranged at the side edge of the support and used for bearing a product, and a vision sensor arranged on the support and used for detecting the position information of the product, wherein the joint arm bodies which are mutually connected in a shaft mode are symmetrically arranged between the base plate and the support, and the plurality of joint arm bodies rotate around the base plate to drive the support to horizontally move at two sides of the base plate. The invention realizes that the trolley avoids generating vibration deviation and accurately corrects the lifting distance and the rotating angle.
Description
Technical Field
The invention belongs to the technical field of mobile transportation devices, and particularly relates to a precise correction walking trolley device and a position correction method thereof.
Background
The liquid crystal substrate running carriage uses a robot to suck the liquid crystal substrates from the wafer cassette in which the plurality of layers of liquid crystal substrates are arranged, and performs an operation of arranging the liquid crystal substrates in the working area. In a wafer cassette in which a liquid crystal substrate is arranged, although the substrate is arranged at a predetermined position, in practice, rotational misalignment or lateral misalignment occurs in the wafer cassette, causing a robot to take out the liquid crystal substrate including a placement error, and causing an error in a subsequent drawing or exposure process performed in a work area, resulting in a defective product.
In recent years, liquid crystal substrates have been becoming larger in size, and a minute rotational shift or lateral shift has also been more greatly affected by the larger size of the liquid crystal substrates. On the other hand, as the liquid crystal substrate is increased in size, the inertia of the transported object increases, and it is also important to control the tact time. Therefore, the liquid crystal substrate running carriage is required to have a structure having high rigidity and being less likely to vibrate.
Although some conventional liquid crystal substrate running carriages can correct the substrate position, when a detection sensor is mounted on a support arm provided in a connection portion, a robot hand of a liquid crystal substrate having a large inertia moves to generate a reaction force on the connection portion, and residual vibration is generated due to low rigidity of the support arm.
Disclosure of Invention
The invention aims to solve the technical problems and provides a device for accurately correcting a running trolley and a position correction method thereof, so that the trolley is prevented from vibrating and deviating, and the lifting distance and the rotating angle are accurately corrected. In order to achieve the purpose, the technical scheme of the invention is as follows:
accurate correction walking trolley device, including the mobile station car, locate the mobile station car top and become collapsible lift's lifting unit by the mutual coupling of multisection knuckle arm body, locate the main rotation axis at lifting unit top, connect the base plate of main rotation axis, locate the support on the base plate, locate a plurality of support hands that are used for bearing the weight of the product of support side and locate the visual sensor who is used for detecting product position information on the support, the symmetry is equipped with the knuckle arm body of multisection mutual coupling between base plate and the support, and multisection knuckle arm body drives support horizontal migration in the both sides of base plate around the base plate rotation.
Specifically, the lifting assembly comprises a first joint arm body coupled to the movable trolley, a second joint arm body coupled to the first joint arm body through a first rotating shaft, and a third joint arm body coupled to the second joint arm body through a second rotating shaft.
Specifically, the first rotating shaft is further sleeved with an auxiliary plate, and a first auxiliary arm body is connected between the auxiliary plate and the mobile trolley; a second auxiliary arm body is connected between the auxiliary plate and the third joint arm body.
Specifically, the top of the third joint arm body is coupled to the main rotating shaft.
Specifically, the top of the base plate is coupled with two third rotating shafts, the third rotating shafts are connected with a fourth joint arm body, the fourth joint arm body is connected with a fifth joint arm body through a fourth rotating shaft, and the end part of the fifth joint arm body is coupled with the side edge of the support.
Specifically, the main rotating shaft, the first rotating shaft, the second rotating shaft, the third rotating shaft and the fourth rotating shaft are connected with driving devices for driving the main rotating shaft, the first rotating shaft, the second rotating shaft, the third rotating shaft and the fourth rotating shaft to rotate respectively.
The method for accurately correcting the position of the walking trolley device comprises the following steps:
1) accurately correcting the position of a bracket on the walking trolley device to carry out angle deviation detection;
2) calculating a correction value for the angular offset based on the vision sensor signal;
3) the control system controls the main rotating shaft to carry out angle adjustment according to the correction value information;
4) moving the product into a support hand on a support;
5) calculating a correction value for the positional offset from the vision sensor signal;
6) and the control system controls the first rotating shaft, the second rotating shaft, the third rotating shaft and the fourth rotating shaft to rotate according to the correction value information, so that the moving distance of the corresponding joint arm body is controlled.
Compared with the prior art, the accurate correction walking trolley device and the position correction method thereof have the beneficial effects that:
through the arrangement of the joint arm body and the rotating shaft which are matched with each other, the displacement control and the angle control of the support are realized, and the problems that the traditional manipulator moves to cause shaking deviation and a sensor cannot accurately detect are solved; carry out angular deviation and detect and rectify the back, carry out the offset correction, the accurate control of furthest assurance stroke, whole device improves conveying efficiency, accurate correction position.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a schematic front view of the present embodiment;
FIG. 3 is a schematic side view of the present embodiment;
FIG. 4 is a schematic top view of the present embodiment;
the figures in the drawings represent:
the robot system comprises a movable trolley 1, a main rotating shaft 11, a base plate 12, a bracket 13, a hand supporting 14, a vision sensor 15, a first joint arm 2, a first rotating shaft 21, an auxiliary plate 22, a second joint arm 3, a second rotating shaft 31, a third joint arm 4, a first auxiliary arm 5, a second auxiliary arm 51, a third rotating shaft 6, a fourth joint arm 7, a fourth rotating shaft 71 and a fifth joint arm 8.
Detailed Description
The technical solutions in the embodiments of the present invention are described clearly and completely below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments.
Example (b):
referring to fig. 1-4, the present embodiment is a device for precisely calibrating a traveling carriage, which includes a traveling carriage 1, a lifting assembly disposed on the top of the traveling carriage 1 and formed by a plurality of joint arm bodies being coupled to each other to be foldable, a main rotating shaft 11 disposed on the top of the lifting assembly, a base plate 12 connected to the main rotating shaft 11, a bracket 13 disposed on the base plate 12, a plurality of supporting hands 14 disposed on the side of the bracket 13 for supporting a product, and a vision sensor 15 disposed on the bracket 13 for detecting the position information of the product.
A plurality of joint arm bodies which are connected by a shaft are symmetrically arranged between the base plate 12 and the bracket 13, and the plurality of joint arm bodies rotate around the base plate 12 to drive the bracket 13 to horizontally move on two sides of the base plate 12.
The lifting unit includes a first joint arm 2 coupled to the movable carriage 1, a second joint arm 3 coupled to the first joint arm 2 via a first rotation shaft 21, and a third joint arm 4 coupled to the second joint arm 3 via a second rotation shaft 31.
An auxiliary plate 22 is further sleeved on the first rotating shaft 21, and a first auxiliary arm body 5 is connected between the auxiliary plate 22 and the movable trolley 1; a second auxiliary arm 51 is connected between the auxiliary plate 22 and the third joint arm 4.
The top of the third joint arm 4 is journaled to the main rotation shaft 11.
The top of the base plate 12 is coupled to two third rotating shafts 6, the third rotating shafts 6 are connected to fourth joint arm bodies 7, the fourth joint arm bodies 7 are connected to fifth joint arm bodies 8 through fourth rotating shafts 71, and the end parts of the fifth joint arm bodies 8 are coupled to the side edges of the brackets 13. The fourth joint arm body 7 rotates about the third rotation axis 6, and the fifth joint arm body 8 rotates about the fourth rotation axis 71; the fifth articulated arm 8 contracts inward toward the fourth articulated arm 7 and stretches away from the fourth articulated arm 7, so that the process that the bracket 13 moves from one side of the base plate 12 to the other side is realized.
The main rotating shaft 11, the first rotating shaft 21, the second rotating shaft 31, the third rotating shaft 6, and the fourth rotating shaft 71 are connected to a driving device (not shown) for driving the respective shafts to rotate, and the driving device may be a servo motor. Each driving device is connected to the control system, and the control system obtains the product position information that vision sensor sent to control the lift displacement distance and the rotation angle of each rotation axis.
The product to be detected in this embodiment is a liquid crystal substrate.
The method for accurately correcting the position of the walking trolley device comprises the following steps:
1) accurately correcting the position of a bracket 13 on the walking trolley device to carry out angle deviation detection;
2) calculating a correction value for the angular offset from the vision sensor 15 signal;
3) the control system controls the main rotating shaft to carry out angle adjustment according to the correction value information;
4) moving the product into the supporting hand 14 on the support 13;
5) calculating a correction value of the positional deviation from the vision sensor signal 15;
6) the control system controls the first rotation shaft 21, the second rotation shaft 31, the third rotation shaft 6 and the fourth rotation shaft 71 to rotate according to the correction value information, thereby controlling the movement distance of the corresponding joint arm body.
When the embodiment is applied, the displacement control and the angle control of the bracket 13 are realized by arranging the joint arm body and the rotating shaft which are matched with each other, so that the problems that the traditional manipulator moves to cause shaking deviation and the sensor cannot accurately detect are solved; carry out angular deviation and detect and rectify the back, carry out the offset correction, the accurate control of furthest assurance stroke, whole device improves conveying efficiency, accurate correction position.
What has been described above are merely some embodiments of the present invention. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the inventive concept thereof, and these changes and modifications can be made without departing from the spirit and scope of the invention.
Claims (7)
1. Accurate correction walking trolley device, its characterized in that: including the mobile trolley, locate the lifting unit that the mobile trolley top becomes collapsible lift by the mutual coupling of multisection knuckle arm body, locate the main rotation axis at lifting unit top, connect main rotation axis's base plate, locate the support on the base plate, locate a plurality of support hands that are used for bearing the weight of the product of support side and locate the vision sensor that is used for detecting product position information on the support, the symmetry is equipped with the knuckle arm body of multisection mutual coupling between base plate and the support, and multisection knuckle arm body drives support horizontal migration in the both sides of base plate around the base plate rotation.
2. The apparatus according to claim 1, characterized in that: the lifting assembly comprises a first joint arm body coupled with the movable trolley, a second joint arm body coupled with the first joint arm body through a first rotating shaft, and a third joint arm body coupled with the second joint arm body through a second rotating shaft.
3. The precision correcting running carriage device according to claim 2, characterized in that: the first rotating shaft is also sleeved with an auxiliary plate, and a first auxiliary arm body is connected between the auxiliary plate and the mobile trolley; a second auxiliary arm body is connected between the auxiliary plate and the third joint arm body.
4. The precision correcting running carriage device according to claim 2, characterized in that: the top of the third joint arm body is coupled with the main rotating shaft.
5. The precision correcting running carriage device according to claim 2, characterized in that: the top of the base plate is coupled with two third rotating shafts, the third rotating shafts are connected with a fourth joint arm body, the fourth joint arm body is connected with a fifth joint arm body through a fourth rotating shaft, and the end part of the fifth joint arm body is coupled with the side edge of the support.
6. The precision-correcting running carriage device of claim 5, wherein: and the main rotating shaft, the first rotating shaft, the second rotating shaft, the third rotating shaft and the fourth rotating shaft are connected with driving devices for driving the main rotating shaft, the first rotating shaft, the second rotating shaft, the third rotating shaft and the fourth rotating shaft to rotate respectively.
7. The method for accurately correcting the position of the walking trolley device is characterized by comprising the following steps of:
1) accurately correcting the position of a bracket on the walking trolley device to carry out angle deviation detection;
2) calculating a correction value for the angular offset based on the vision sensor signal;
3) the control system controls the main rotating shaft to carry out angle adjustment according to the correction value information;
4) moving the product into a support hand on a support;
5) calculating a correction value for the positional offset from the vision sensor signal;
6) and the control system controls the first rotating shaft, the second rotating shaft, the third rotating shaft and the fourth rotating shaft to rotate according to the correction value information, so that the moving distance of the corresponding joint arm body is controlled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010519147.7A CN111591763A (en) | 2020-06-09 | 2020-06-09 | Accurate correction walking trolley device and position correction method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010519147.7A CN111591763A (en) | 2020-06-09 | 2020-06-09 | Accurate correction walking trolley device and position correction method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111591763A true CN111591763A (en) | 2020-08-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010519147.7A Pending CN111591763A (en) | 2020-06-09 | 2020-06-09 | Accurate correction walking trolley device and position correction method thereof |
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| Country | Link |
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| CN (1) | CN111591763A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5768125A (en) * | 1995-12-08 | 1998-06-16 | Asm International N.V. | Apparatus for transferring a substantially circular article |
| JP2006088235A (en) * | 2004-09-21 | 2006-04-06 | Hirata Corp | Substrate transfer-loading robot device |
| CN101318328A (en) * | 2007-06-06 | 2008-12-10 | 株式会社安川电机 | Liquid carrying robot and control method thereof |
| CN101590645A (en) * | 2008-05-30 | 2009-12-02 | 株式会社安川电机 | Articulated robot |
| CN105329642A (en) * | 2015-11-09 | 2016-02-17 | 合肥欣奕华智能机器有限公司 | Base plate position deviation detecting and correcting method and control method for base plate carrying system |
| CN212291947U (en) * | 2020-06-09 | 2021-01-05 | 苏州芯慧联半导体科技有限公司 | Accurate correction walking trolley device |
-
2020
- 2020-06-09 CN CN202010519147.7A patent/CN111591763A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5768125A (en) * | 1995-12-08 | 1998-06-16 | Asm International N.V. | Apparatus for transferring a substantially circular article |
| JP2006088235A (en) * | 2004-09-21 | 2006-04-06 | Hirata Corp | Substrate transfer-loading robot device |
| CN101318328A (en) * | 2007-06-06 | 2008-12-10 | 株式会社安川电机 | Liquid carrying robot and control method thereof |
| CN101590645A (en) * | 2008-05-30 | 2009-12-02 | 株式会社安川电机 | Articulated robot |
| CN105329642A (en) * | 2015-11-09 | 2016-02-17 | 合肥欣奕华智能机器有限公司 | Base plate position deviation detecting and correcting method and control method for base plate carrying system |
| CN212291947U (en) * | 2020-06-09 | 2021-01-05 | 苏州芯慧联半导体科技有限公司 | Accurate correction walking trolley device |
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