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CN118603400A - Pressure sensor - Google Patents

Pressure sensor Download PDF

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Publication number
CN118603400A
CN118603400A CN202410852034.7A CN202410852034A CN118603400A CN 118603400 A CN118603400 A CN 118603400A CN 202410852034 A CN202410852034 A CN 202410852034A CN 118603400 A CN118603400 A CN 118603400A
Authority
CN
China
Prior art keywords
pressure
pressure sensor
spiral
spiral plate
ventilation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202410852034.7A
Other languages
Chinese (zh)
Inventor
王小平
曹万
杨军
梁世豪
洪鹏
吴林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan Finemems Inc
Original Assignee
Wuhan Finemems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan Finemems Inc filed Critical Wuhan Finemems Inc
Priority to CN202410852034.7A priority Critical patent/CN118603400A/en
Publication of CN118603400A publication Critical patent/CN118603400A/en
Pending legal-status Critical Current

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Abstract

A pressure sensor, comprising: the shell is internally provided with a mounting cavity and a pressure introducing channel, the upper end of which is communicated with the mounting cavity so as to introduce a pressure medium to be tested into the mounting cavity; the shell comprises a side part and a bottom part, wherein the side part comprises a first part positioned on the upper side and a second part positioned on the lower side, the outer wall of the first part is circular, and a first outer spiral plate is arranged on the outer wall of the first part; the housing further includes an electrical connector disposed on the second portion; a pressure sensing assembly; a plurality of terminals disposed on the electrical connector; the cup cover is inversely arranged outside the first part and comprises a main body part and a first cylinder part formed by downward extension of the edge of the main body part, and a first inner spiral plate which is matched with the first outer spiral plate and surrounds a first spiral ventilation channel is arranged on the inner wall of the first cylinder part; the upper ends of the main body part and the main shell are provided with ventilation gaps communicated with the upper ends of the first spiral ventilation channels. Which is well resistant to liquid intrusion when effectively connected to the environment.

Description

Pressure sensor
Technical Field
The application relates to the technical field of sensors, in particular to a pressure sensor.
Background
Pressure sensors, particularly gauge pressure sensors, require that the pressure sensitive element of the sensor lumen be in communication with the environment to measure the relative pressure with respect to the environment. Existing pressure sensors are typically effective in connecting the lumen to the environment by using a cap-like element disposed on the upper cover as shown in fig. 1 of CN101910813 a. However, since the gap between the lower end of the cap-shaped element and the upper cover is small, when a liquid such as bright water exists, the liquid is easily absorbed in the gap due to the existence of surface tension to form a liquid seal, so that the relative deviation from the ambient atmosphere is caused, and the gauge pressure value measured by the sensor is deviated; in addition, when the sensor cavity is cooled, the liquids sealed in the gaps can be sucked to the waterproof and breathable film, and when harmful components (dissolved salt or insoluble particles) are contained in the liquids, the waterproof and breathable film is likely to be polluted, partially or completely blocked.
Disclosure of Invention
In response to the deficiencies of the prior art, the present application provides a pressure sensor that increases its resistance to intrusion of liquid when the pressure sensor lumen is effectively connected to the environment.
In order to achieve the above purpose, the present application provides the following technical solutions: a pressure sensor, comprising:
A housing having a mounting chamber therein, and a pressure introduction passage having an upper end connected to the mounting chamber to introduce a pressure medium to be measured into the mounting chamber; the shell comprises a side part and a bottom part, wherein the side part comprises a first part positioned on the upper side and a second part positioned on the lower side, the outer wall of the first part is round, and a first outer spiral plate is arranged on the outer wall of the first part; the housing further includes an electrical connector disposed on the second portion;
The pressure sensing component is arranged in the mounting cavity and comprises a pressure sensitive element which is arranged at the upper end of the pressure introducing channel in a sealing way;
a plurality of terminals arranged on the electric connector, wherein one end of the inner side of each terminal inwards extends into the mounting cavity and is electrically connected to the pressure sensing component;
The cup cover is inversely arranged outside the first part and comprises a main body part and a first cylinder part formed by downward extension of the edge of the main body part, and a first inner spiral plate which is matched with the first outer spiral plate and surrounds a first spiral ventilation channel is arranged on the inner wall of the first cylinder part; the main body part and the upper end of the main shell are provided with ventilation gaps communicated with the upper end of the first spiral ventilation channel; the lower part of the first spiral ventilation channel is communicated with the environment.
Preferably, the lower end of the first cylinder part is downward abutted against the main shell.
Preferably, the lower end of the first barrel portion is downwardly abutted against the electrical connector.
Preferably, the main housing further comprises a mechanical connection provided on the second portion.
Preferably, the lower end of the first barrel portion is abutted against the mechanical connecting portion downwards.
Preferably, the body portion extends horizontally.
Preferably, the lower portion of the first spiral ventilation channel is communicated to the environment through a hole or a notch arranged at the lower portion of the first inner spiral plate or a gap arranged between the first inner spiral plate and the main shell.
Preferably, an opening is arranged at the top of the shell, an upper cover is arranged on the opening, and a waterproof and breathable film is arranged on a ventilation hole formed in the upper cover.
Preferably, the upper cover is arched upwards to form an arched part, and the air holes are arranged on the arched part.
Preferably, the pressure sensing component comprises a substrate fixed on the upper end of the pressure introducing channel in a sealing way and a processing circuit arranged on the upper side surface of the substrate, a pressure via hole with the lower end communicated with the pressure introducing channel is arranged on the substrate, the pressure sensitive element is fixed on the upper end of the pressure via hole in a sealing way and is electrically connected with the processing circuit, and the processing circuit is electrically connected to one end of the inner side of the terminal.
Drawings
FIG. 1 is a schematic structural view of a pressure sensor according to a first embodiment;
FIG. 2 is a schematic diagram of a pressure sensor according to a second embodiment;
FIG. 3 is a schematic structural view of a pressure sensor according to a third embodiment;
Reference numerals illustrate: 100. a pressure sensor; 111a, a second portion; 111b, a first portion; 111c, a first outer spiral plate; 111. a side portion; 112a, a bushing; 112. a mechanical connection; 113. an electrical connector; 114a, pressure introduction channels; 114. a pressure interface; 115. a bottom; 11. a main housing; 120. a pressure sensitive element; 121. a substrate; 122. an electronic component; 12. a pressure sensing assembly; 131. ventilation holes; 13. an upper cover; 151. a main body portion; 152a, a first inner spiral plate; 152. a first cylinder portion; 15. a cup cover; 16a, an inner end; 16. a terminal; 17. a lead wire; 18. a waterproof breathable film; 1a, a mounting cavity; 1b, a first spiral ventilation channel; 1c, a communication structure; 1d, ventilation gaps; 121a, pressure vias; 114b, a seal ring accommodating groove; 114c, a sealing ring; 200. a pressure sensor; 211a, a first portion; 211b, a second portion; 211c, a first outer spiral plate; 211. a side portion; 212a, bushings; 212. a mechanical connection; 213. an electrical connector; 214a, pressure introduction channels; 214. a pressure interface; 215. a bottom; 21. a main housing; 220. a pressure sensitive element; 221. a substrate; 222. an electronic component; 22. a pressure sensing assembly; 231. ventilation holes; 23. an upper cover; 251. a main body portion; 252a, a first inner spiral plate; 252. a first cylinder portion; 25. a cup cover; 26a, an inner end; 26. a terminal; 27. a lead wire; 28. a waterproof breathable film; 2a, a mounting cavity; 2b, a first spiral ventilation channel; 2c, a communication structure; 2d, ventilation gaps; 221a, pressure vias; 253. a second cylinder portion; 254. a bottom cover; 255. a communication hole; 253a, a second outer spiral plate; 253b, a second inner spiral plate; 2e, a second spiral ventilation channel; 214b, a seal ring accommodating groove; 214c, sealing rings.
Detailed Description
The technical solutions of the present application will be clearly and completely described below with reference to the accompanying drawings. The following examples are illustrative only and are not to be construed as limiting the application. In the following description, the same reference numerals are used to designate the same or equivalent elements, and duplicate descriptions are omitted.
In the description of the present application, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "inner", "outer", "left", "right", etc. are based on the directions or positional relationships shown in the drawings, or the directions or positional relationships in which the product of the present application is conventionally put in use, or the directions or positional relationships in which those skilled in the art conventionally understand are merely for convenience of describing the present application and for simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present application.
In addition, the terms "mounted," "connected," "coupled," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood as appropriate by those of ordinary skill in the art.
It should be further understood that the term "and/or" as used in the present description and the corresponding claims refers to any and all possible combinations of one or more of the listed items.
As shown in fig. 1, in a first embodiment of the present application, a pressure sensor 100 includes a housing having a mounting chamber 1 a. The housing comprises a main housing 11. The lower end of the main housing 11 is provided with a pressure port 114, and the pressure port 114 has a pressure introduction passage 114a communicating with the mounting chamber 1a at the upper end. The main housing 11 includes a bottom 115 and a side 111 that form an opening at the top. The side portion 111 includes a first portion 111b located at an upper side and a second portion 111a located at a lower side, and an outer wall of the first portion 111b is circular. The main housing 11 further includes a mechanical connection 112 and an electrical connector 113 provided on the second portion 111 a. The pressure sensing component 12 is disposed in the mounting cavity 1a, the pressure sensing component 12 has a pressure sensing element 120, and the pressure sensing element 120 is hermetically connected to the upper end of the pressure introducing channel 114a to receive the pressure of the pressure medium to be measured in the pressure introducing channel 114a. The electrical connector 113 is provided with a plurality of terminals 16, one end of the outer side of the terminals 16 extends into the electrical connector 113, one end 16a of the inner side of the terminals 16 extends into the mounting cavity 1a, and is electrically connected to the pressure sensing component 12 through the lead wires 17. The mechanical connection portion 112 may be provided with a mounting hole (not labeled), and a bushing 112a is fixedly disposed in the mounting hole. In other aspects, the mechanical connection 112 may be omitted.
The pressure sensor 100 further includes a cup cover 15 reversely covered outside the first portion 111 b. The cap 15 includes a main body 151 that is preferably horizontally disposed and a first barrel 152 that extends downwardly from a rim of the main body 151. The first inner spiral plate 152a is provided on the inner side of the first tube 152, and the first outer spiral plate 111c that mates with the first inner spiral plate 152a is formed on the outer side of the first portion 111 b. The lower end of the first tube 152 is abutted against the main housing 11. A first spiral ventilation channel 1b is left between the first inner spiral plate 152a and the first outer spiral plate 111c. The lower portion of the first cylinder 152 is provided with a communication structure 1c that allows the first spiral ventilation channel 1b to communicate laterally to the environment. The communication structure 1c may be a hole provided in the lower portion of the first tube 152, a notch provided in the lower portion of the first tube 152, or a gap left between the lower end of the first tube 152 and the main casing 11. The lower end of the first barrel 152 preferably abuts against the mechanical connection portion 112 and/or the electrical connector 113 downward, so that the mechanical connection portion 112 and/or the electrical connector 113 can form a certain shielding for the communication structure 1c. A substantially horizontally extending ventilation gap 1d is left between the main body 151 and the top of the main casing 11. The upper end of the first spiral ventilation passage 1b communicates to the ventilation gap 1d.
The pressure sensor of the present embodiment can increase the communication section between the installation cavity 1a and the environment through the first spiral ventilation channel 1b formed between one cup cover 15 and the side portion 111. Preferably, the number of lines of the first inner spiral plate 152a and the first outer spiral plate 111c may be multi-threaded, thereby further increasing the communication section between the installation cavity 1a and the environment. Wherein the cap 15 may be screwed onto the main housing 11 without being otherwise secured to the main housing 11.
In other embodiments, preferably, an upper cover 13 is provided on the top opening of the main housing 11, an air hole 131 is provided on the upper cover 13, and a waterproof and breathable film 18 may be covered on the inner side or the outer side of the air hole 131. More preferably, the hole may be provided on an arch portion formed by upwardly arching the upper cover 13, so as to provide a certain protection for the waterproof and breathable film 18, i.e., to prevent liquid from accumulating at the waterproof and breathable film 18.
Illustratively, the pressure sensing assembly 12 may include a substrate 121, and the substrate 121 may be a ceramic plate. The upper side surface of the substrate 121 is provided with a processing circuit including an electronic component 122, and the lower side surface of the substrate 121 is bonded to a horizontal mounting surface formed on the inner side of the bottom 115 to seal the upper end of the pressure introducing passage 114 a. The substrate 121 is provided with a pressure via 121a. The pressure sensitive element 120 is fixedly plugged at the upper end of the pressure via hole 121a and electrically connected to the processing circuit, a first pressure receiving side thereof is communicated to the pressure introducing passage 114a through the pressure via hole 121a, and a second pressure receiving side opposite to the first pressure side thereof is exposed to the mounting chamber 1a. Pressure sensitive element 120 may be a semiconductor pressure sensitive element or any other suitable type of pressure sensitive element. The processing circuit also has a pad electrically connected to the inner end 16a of the terminal 16 through the above-mentioned lead 17. A ring of concave sealing ring accommodating groove 114b can be formed on the outer wall of the lower part of the pressure port 114, and a sealing ring 114c is arranged in the sealing ring accommodating groove 114 b.
In a second embodiment of the application, as shown in fig. 2, a pressure sensor 200 comprises a housing having a mounting cavity 2a. The housing includes a main housing 21 and an upper cover 23. The lower end of the main housing 21 is provided with a pressure port 214, and the pressure port 214 has a pressure introduction passage 214a communicating with the mounting chamber 2a at the upper end. The main housing 21 includes a bottom 215 and sides 211 that form an opening at the top, and an upper cover 23 sealingly covers the top opening of the main housing 21. The main housing 21 includes a first portion 211a located at an upper side and a second portion 211b located at a lower side, and an outer wall of the second portion 211b is circular. The main housing 21 further includes a mechanical connection 212 provided on the first portion 211a and an electrical connector 213. The mounting chamber 2a is provided with a pressure sensing component 22, the pressure sensing component 22 is provided with a pressure sensing element 220, and the pressure sensing element 220 is communicated with the upper end of the pressure introducing channel 214a in a sealing manner so as to receive the pressure of the pressure medium to be measured in the pressure introducing channel 214a. The electrical connector 213 is provided with a plurality of terminals 26, an outer end of the terminals 26 extends into the electrical connector 213, and an inner end 26a of the terminals 26 extends into the mounting cavity 2a and is electrically connected to the pressure sensing component 22 through the leads 27. The mechanical connection portion 212 may be provided with a mounting hole (not labeled), and a bushing 212a is fixedly disposed in the mounting hole. In other aspects, the mechanical connection 212 may be omitted.
Wherein the pressure sensor 200 further comprises a cup cover 25 covering the outer side of the second portion 211b upwards. The cap 25 includes a main body portion 251 that is preferably horizontally disposed and a first barrel portion 252 that extends upwardly from a rim of the main body portion 251. The first inner spiral plate 252a is provided on the inner side of the first tube 252, and the first outer spiral plate 211c is formed on the outer side of the second portion 211b to be matched with the first inner spiral plate 252 a. Wherein the upper end of the first cylinder 252 abuts against the main housing 21. The first inner spiral plate 252a and the first outer spiral plate 211c enclose a first spiral ventilation channel 2b therebetween. The lower portion of the first cylinder portion 252 is provided with a communication structure 2c that allows the first spiral ventilation passage 2b to communicate to the environment. The upper end of the first barrel 252 preferably abuts against the mechanical connection portion 212 and/or the electrical connector 213. A substantially horizontally extending ventilation gap 2d is left between the main body 251 and the bottom of the bottom 215 of the main housing 21. The lower end of the first spiral ventilation passage 2b communicates to the ventilation gap 2d. Wherein, the communication structure 2c may be a relief hole provided on the main body 251, which allows the lower end of the pressure port 214 to protrude downward.
The pressure sensor of the present embodiment can increase the communication section between the installation cavity 2a and the environment through the first spiral ventilation channel 2b formed between one cup cover 25 and the side portion 211. Preferably, the number of lines of the first inner spiral plate 252a and the first outer spiral plate 211c may be multi-threaded, thereby further increasing the communication section between the installation cavity 2a and the environment. Wherein the cap 15 may be screwed onto the main housing 11 without being otherwise secured to the main housing 11.
In other aspects, the second portion 211b preferably extends outwardly and generally horizontally relative to the first portion 211a to cover the top end of the first barrel portion 252, and preferably abuts the top end of the first barrel portion 252, in addition to the mechanical connection 212 and the electrical connector 213.
In other embodiments, it is preferable that the side portion 211 is provided with a ventilation hole 231, and an outer end of the ventilation hole 231 is connected to an upper portion of the first spiral ventilation channel 2b, and an inner end of the ventilation hole 231 is connected to the installation cavity 2a. The inside of the ventilation hole 231 may be covered with a waterproof and breathable film 28.
Illustratively, the pressure sensing assembly 22 may include a ceramic substrate 221, an upper side surface of the substrate 221 being provided with a processing circuit including an electronic component 222, and a lower side surface of the substrate 221 being adhered to an inner side surface of the bottom 215 to seal an upper end of the pressure introduction passage 214 a. The substrate 221 is provided with a pressure via 221a. The pressure sensitive element 220 is fixedly plugged at the lower end of the pressure via hole 221a, a first pressure receiving side thereof is communicated to the mounting cavity 2a through the pressure via hole 221a, a second pressure receiving side opposite to the first pressure side thereof is exposed in the pressure introducing passage 214a and is electrically connected to an electrical contact portion provided at the lower side surface of the substrate 221 through a gold wire, and the electrical contact portion is electrically connected to a processing circuit at the upper side surface of the substrate 221 through a metallized via hole provided inside the substrate 221. Pressure sensitive element 220 may be a semiconductor pressure sensitive element or any other suitable type of pressure sensitive element. The processing circuit also has a pad electrically connected to the inner end 26a of the terminal 26 through the above-mentioned lead 27. Wherein, the upper portion of the pressure introduction channel 214a may be filled with a protective gel (not labeled) covering the gold wire and the pressure sensitive element 220. A ring of concave sealing ring accommodating groove 214b can be formed on the outer wall of the lower part of the pressure interface 214, and a sealing ring 214c is arranged in the sealing ring accommodating groove 214 b.
As shown in fig. 3, in the second embodiment, the edge of the relief hole of the third embodiment of the present application protrudes downward to form a second cylinder 253, and a second outer spiral plate 253a is formed on the inner wall of the second cylinder 253; the upper outer wall of the pressure port 214 is circular, and a second inner spiral plate 253b is formed thereon to be fitted with the second outer spiral plate 253a, and a second spiral ventilation passage 2e is defined between the second outer spiral plate 253a and the second inner spiral plate 253 b. The upper end of the second spiral ventilation passage 2e communicates to the ventilation gap 2d. The lower end of the second spiral ventilation passage 2e communicates with the environment, specifically, the lower portion of the second cylinder 253 is provided with a communication hole 255 communicating with the environment. The bottom of the second barrel 253 may be capped with a bottom closure 254. In this way, the ambient pressure can be sequentially communicated to the installation cavity 2a through the communication hole 255, the second spiral ventilation passage 2e, the ventilation gap 2d, the first spiral ventilation passage 2b, and the ventilation hole 231.
The scope of the present disclosure is defined not by the detailed description but by the claims and their equivalents, and all modifications within the scope of the claims and their equivalents are to be construed as being included in the present disclosure.

Claims (10)

1. A pressure sensor, comprising:
A housing having a mounting chamber (1 a) therein, and a pressure introduction passage (114 a) having an upper end communicating with the mounting chamber (1 a) to introduce a pressure medium to be measured into the mounting chamber (1 a); the shell main shell (11), the main shell (11) comprises a side part (111) and a bottom part (115), the side part (111) comprises a first part (111 b) positioned at the upper side and a second part (111 a) positioned at the lower side, the outer wall of the first part (111 b) is circular, and a first outer spiral plate (111 c) is arranged on the outer wall of the first part; the housing further comprises an electrical connector (113) arranged on the second portion (111 a);
a pressure sensing assembly (12) disposed inside the installation cavity (1 a) and including a pressure sensing element (120) sealingly disposed at an upper end of the pressure introduction passage (114 a);
a plurality of terminals (16) provided on the electrical connector (113), with inner ends (16 a) thereof extending inwardly into the mounting cavity (1 a) and electrically connected to the pressure sensing assembly (12);
The cup cover (15) is inversely arranged outside the first part (111 b) and comprises a main body part (151) and a first cylinder part (152) formed by downward extension of the edge of the main body part (151), and a first inner spiral plate (152 a) which is matched with the first outer spiral plate (111 c) and surrounds a first spiral ventilation channel (1 b) is arranged on the inner wall of the first cylinder part (152); an air-permeable gap (1 d) communicated with the upper end of the first spiral air-permeable channel (1 b) is reserved between the main body part (151) and the upper end of the main shell (11); the lower part of the first spiral ventilation channel (1 b) is communicated with the environment.
2. The pressure sensor according to claim 1, characterized in that the lower end of the first cylinder (152) is directed downwards against the main housing (11).
3. The pressure sensor of claim 2, wherein a lower end of the first barrel portion (152) is downwardly directed against the electrical connector (113).
4. The pressure sensor according to claim 2, characterized in that the main housing (11) further comprises a mechanical connection (112) provided on the second portion (111 a).
5. The pressure sensor of claim 4, wherein a lower end of the first barrel portion (152) is downwardly directed against the mechanical connection (112).
6. The pressure sensor of claim 1, wherein the body portion (151) extends horizontally.
7. Pressure sensor according to claim 1, characterized in that the lower communication of the first spiral ventilation channel (1 b) is communicated to the environment through holes or notches provided in the lower part of the first inner spiral plate (152 a) or through a gap provided between the main housing (11).
8. Pressure sensor according to any of claims 1 to 7, characterized in that the top of the main housing (11) is provided with an opening, the opening being covered with an upper cover (13), a waterproof and breathable membrane (18) being covered on a ventilation hole (131) provided in the upper cover (13).
9. Pressure sensor according to claim 8, characterized in that the upper cover (13) arches upwards forming an arch, the ventilation holes (131) being provided on the arch.
10. The pressure sensor according to any one of claims 1 to 7, wherein the pressure sensing element (12) comprises a substrate (121) sealingly fixed to an upper end of the pressure introduction passage (114 a) and a processing circuit provided on an upper side surface of the substrate (121), a pressure via (121 a) having a lower end communicating to the pressure introduction passage (114 a) is provided on the substrate (121), and the pressure sensitive element (120) is sealingly fixed to an upper end of the pressure via (121 a) and electrically connected to the processing circuit, and the processing circuit is electrically connected to an inner side end (16 a) of the terminal (16).
CN202410852034.7A 2024-06-28 2024-06-28 Pressure sensor Pending CN118603400A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202410852034.7A CN118603400A (en) 2024-06-28 2024-06-28 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202410852034.7A CN118603400A (en) 2024-06-28 2024-06-28 Pressure sensor

Publications (1)

Publication Number Publication Date
CN118603400A true CN118603400A (en) 2024-09-06

Family

ID=92551680

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202410852034.7A Pending CN118603400A (en) 2024-06-28 2024-06-28 Pressure sensor

Country Status (1)

Country Link
CN (1) CN118603400A (en)

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