CN118441264A - Spray header with phase-change heat dissipation function and manufacturing method - Google Patents
Spray header with phase-change heat dissipation function and manufacturing method Download PDFInfo
- Publication number
- CN118441264A CN118441264A CN202410443474.7A CN202410443474A CN118441264A CN 118441264 A CN118441264 A CN 118441264A CN 202410443474 A CN202410443474 A CN 202410443474A CN 118441264 A CN118441264 A CN 118441264A
- Authority
- CN
- China
- Prior art keywords
- evaporation
- condensation
- condensing
- liquid suction
- suction core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007921 spray Substances 0.000 title claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 230000017525 heat dissipation Effects 0.000 title claims abstract description 24
- 238000001704 evaporation Methods 0.000 claims abstract description 129
- 230000008020 evaporation Effects 0.000 claims abstract description 115
- 239000007788 liquid Substances 0.000 claims abstract description 110
- 238000009833 condensation Methods 0.000 claims abstract description 103
- 230000005494 condensation Effects 0.000 claims abstract description 103
- 230000008859 change Effects 0.000 claims abstract description 22
- 230000002093 peripheral effect Effects 0.000 claims abstract description 5
- 229910052751 metal Inorganic materials 0.000 claims description 54
- 239000002184 metal Substances 0.000 claims description 54
- 239000000843 powder Substances 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 27
- 238000005245 sintering Methods 0.000 claims description 24
- 230000008569 process Effects 0.000 claims description 23
- 238000005507 spraying Methods 0.000 claims description 16
- 238000011049 filling Methods 0.000 claims description 13
- 238000002347 injection Methods 0.000 claims description 13
- 239000007924 injection Substances 0.000 claims description 13
- 238000004140 cleaning Methods 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 238000001035 drying Methods 0.000 claims description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 8
- 239000008367 deionised water Substances 0.000 claims description 8
- 229910021641 deionized water Inorganic materials 0.000 claims description 8
- 238000003801 milling Methods 0.000 claims description 8
- 238000002360 preparation method Methods 0.000 claims description 8
- 229910052783 alkali metal Inorganic materials 0.000 claims description 6
- 150000001340 alkali metals Chemical class 0.000 claims description 6
- 238000005429 filling process Methods 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 4
- 238000005553 drilling Methods 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 2
- 238000010030 laminating Methods 0.000 abstract description 6
- 230000000149 penetrating effect Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 23
- 239000012071 phase Substances 0.000 description 22
- 238000006243 chemical reaction Methods 0.000 description 20
- 239000000463 material Substances 0.000 description 9
- 239000010935 stainless steel Substances 0.000 description 8
- 229910001220 stainless steel Inorganic materials 0.000 description 8
- 239000007791 liquid phase Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 230000009471 action Effects 0.000 description 5
- 238000009835 boiling Methods 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 230000005514 two-phase flow Effects 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 239000012459 cleaning agent Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010892 electric spark Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910001182 Mo alloy Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000407 epitaxy Methods 0.000 description 2
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
The application discloses a spray header with phase change heat dissipation and a manufacturing method thereof, wherein the spray header comprises a condensing part evaporation part, an evaporation liquid suction core and a condensation liquid suction core, a plurality of air inlets axially penetrating the condensing part are arranged on the condensing part, a plurality of groups of condensation micro-channels which are distributed in a staggered manner with the air inlets are embedded in the condensing part, a liquid inlet and a liquid outlet which are communicated with the micro-channels are arranged on the condensing part, the evaporation part is connected with the condensing part to form a sealed vacuum cavity, and heat exchange working media are arranged in the cavity; the evaporation portion is close to the support column that the coaxial setting of inlet port is furnished with a plurality of and inlet port in the one side terminal surface of evaporation portion, be equipped with in the support column with the inlet port intercommunication spray the hole, the lateral part of evaporation portion is furnished with the evacuation notes liquid pipe and evaporates, evaporation wick laminating is close to the one side terminal surface of condensation portion and laminating with the outer peripheral face of support column at the evaporation portion, condensation wick laminating is close to the one side terminal surface of evaporation portion at the condensation portion, all be provided with the through-hole that corresponds with the support column on condensation wick and the evaporation wick, this shower head has even high-efficient radiating ability.
Description
Technical Field
The application relates to the field of Chemical Vapor Deposition (CVD) equipment, in particular to a spray header with phase-change heat dissipation and a manufacturing method thereof.
Background
The high-end gas phase epitaxy growth equipment is characterized in that gas which participates in thermal decomposition reaction, such as organic compounds, gaseous elements, carrier gas and the like, is fed into a reaction cavity, and the gas flows through the surface of a substrate which is heated to the reaction temperature to carry out chemical reaction, so that a layer of monocrystalline film material which has certain requirements and is matched with the crystal orientation of the substrate is epitaxially grown. In order to obtain a high-quality monocrystalline film material with larger area, more uniform thickness and more uniform doping, a substrate rotating at a high speed in a reaction cavity is placed in a temperature field and a flow field with better uniformity and consistency;
In view of this, the gas supply system is required to uniformly and controllably supply the reaction gas into the reaction chamber. The reaction cavity spray header is used as an important component part of the equipment and is mainly used for spraying the reaction gas into the reaction cavity, so that the design of spray holes influences the spatial distribution, the diffusion speed and the like of the reaction gas in the reaction cavity; in addition, when the equipment works normally, heat generated by the reaction cavity heating system is radiated to the air outlet surface of the spray header, so that the design of the cooling and heat dissipation flow passage in the spray header can influence the pre-reaction of reaction gas, the deposition growth of particles on the air outlet surface of the spray header, the high-temperature thermal deformation of the spray header and the like.
Invention of the invention
To overcome the above drawbacks, the present application aims to: the spray header with the phase-change heat dissipation function and the manufacturing method thereof are provided, and the spray header can timely and controllably take away the heat radiated upwards in the reaction cavity uniformly and efficiently, so that the spray header can safely, efficiently and reliably operate for a long time in a proper temperature range.
In order to achieve the above purpose, the application adopts the following technical scheme:
a showerhead with phase change heat dissipation, the showerhead comprising:
the condensing part is provided with a plurality of air inlets which axially penetrate through the condensing part, a plurality of groups of condensing micro-channels are embedded in the condensing part, the air inlets and the condensing micro-channels are distributed in a staggered mode, and the condensing part is respectively provided with a liquid inlet and a liquid outlet which are communicated with the micro-channels;
the evaporation part is connected with the condensation part to form a sealed and vacuum cavity, and the cavity is filled with heat exchange working medium;
The evaporation part is provided with a plurality of support columns close to the end face of one side of the condensation part, each support column is internally provided with a spray hole communicated with the air inlet hole, the support columns and the air inlet hole are coaxially arranged, and the side part of the evaporation part is provided with a vacuumizing liquid injection pipe;
The liquid suction core group comprises an evaporation liquid suction core and a condensation liquid suction core, wherein the evaporation liquid suction core is attached to one side end face of the evaporation part, which is close to the condensation part, and is attached to the outer peripheral face of the support column, the condensation liquid suction core is attached to one side end face of the condensation part, which is close to the evaporation part, and through holes corresponding to the support column and/or the air inlet holes are formed in the condensation liquid suction core and the evaporation liquid suction core.
In one embodiment, the condensing part is provided with a condensing surface close to the evaporating part and an air inlet surface opposite to the condensing surface;
The air inlet hole is provided with a first opening positioned on the air inlet surface and a second opening positioned on the condensation surface, and the diameter of the first opening is larger than or equal to that of the second opening.
In one embodiment, the evaporation part is provided with an inner concave surface close to the condensation part and an air outlet surface opposite to the inner concave surface, and the air outlet surface is a smooth plane;
The spraying hole is provided with a third opening communicated with the air inlet hole and a fourth opening positioned on the air outlet surface;
the inside of the spraying hole is provided with a narrow part, the diameter of the spraying hole close to the third opening is larger than the diameter of the narrow part, and/or the diameter of the spraying hole close to the fourth opening is larger than the diameter of the narrow part.
In one embodiment, the distance from the narrow portion to the fourth opening increases stepwise from the center to the edge of the evaporation portion;
or the distance from the narrow part to the fourth opening gradually decreases from the center to the edge of the evaporation part;
or the distance from the narrow part to the fourth opening is set in the form of a wave crest and wave trough.
In an embodiment, the plurality of air inlet holes are uniformly distributed on the condensing part in an array manner, and the plurality of support columns are uniformly distributed on the evaporating part in an array manner;
The condensing micro-channels are arranged in parallel at intervals, each group of the condensing micro-channels comprises a plurality of condensing micro-channels which are arranged at intervals, and the distance between every two adjacent condensing micro-channels is 3-5mm.
In an embodiment, a rectangular groove is formed on one side, away from the condensation liquid suction core, of the condensation micro-channel, and one side, close to the condensation liquid suction core, of the condensation micro-channel is in the shape of an arc, a rectangle, a dovetail or the like.
In one embodiment, the evaporation liquid suction core and the condensation liquid suction core are porous structures sintered by powder, the thickness of the evaporation liquid suction core and the thickness of the condensation liquid suction core are 0.5-2.5 mm, and the porosity is 30% -60%;
the powder is high-temperature resistant metal powder, and the particle size of the high-temperature resistant metal powder is 25-200 mu m.
In one embodiment, the heat exchange medium is one of deionized water, ethanol or liquid alkali metal.
The embodiment of the application also provides a manufacturing method of the spray header with phase-change heat dissipation, which comprises the following steps:
the manufacturing stage of the evaporation part, namely providing a first metal plate, forming a plurality of support columns on the first metal plate based on a milling process, and forming spray holes on the support columns based on a drilling process;
The manufacturing stage of the condensing part comprises the steps of providing a second metal plate, forming an embedded micro-channel on the second metal plate based on a wire cutting process, and forming a plurality of air inlets on the second metal plate based on a milling process;
A cleaning and drying stage, namely cleaning the evaporation part and the condensation part based on an ultrasonic cleaning process, and drying the evaporation part and the condensation part after cleaning;
In the preparation stage of the liquid suction core, an evaporation liquid suction core is formed on one side end surface of the cleaned evaporation part corresponding to the support column based on a high-temperature sintering process, and a condensation liquid suction core is formed on one side end surface of the cleaned condensation part based on the high-temperature sintering process;
And in the installation and combination stage, one end face of the evaporation part with the evaporation liquid suction core and one end face of the condensation part with the condensation liquid suction core are connected based on a vacuum diffusion welding process to form a closed cavity, the cavity is vacuumized by using a vacuumized liquid injection pipe to form a closed and vacuum cavity, a heat exchange working medium is filled into the cavity by using the vacuumized liquid injection pipe, and the vacuumized liquid injection pipe is sealed after filling is completed.
In one embodiment, the high temperature sintering process comprises:
and (3) a mould preparation stage: manufacturing a first graphite mold matched with the evaporation part and manufacturing a second mold matched with the condensation part; the second mold and the condensing part are assembled and overlapped to form a second cavity;
Filling: assembling and superposing the first mold and the evaporation part to form a first cavity, filling high-temperature-resistant metal powder into the first cavity in a non-pressure state, and intermittently vibrating the first mold in the filling process until the first cavity is filled with the high-temperature-resistant metal powder;
The second mold and the condensing part are assembled and overlapped to form a second cavity; and filling high-temperature-resistant metal powder into the second cavity in a non-pressure state, and intermittently vibrating the second die in the filling process until the second cavity is filled with the high-temperature-resistant metal powder.
And (3) sintering: placing the first die filled with the high-temperature-resistant metal powder, the evaporation part, the second die filled with the high-temperature-resistant metal powder and the condensation part in a box-type vacuum atmosphere resistance furnace together for high-temperature sintering;
demolding: and after sintering, respectively removing the first die and the second die to obtain an evaporation part with an evaporation liquid suction core and a condensation part with a condensation liquid suction core. .
Advantageous effects
The spray header has the advantages of higher heat conductivity coefficient, excellent temperature uniformity, quick hot start, simple structure, no need of additional electric drive and the like, and can uniformly and efficiently take away the heat radiated upwards in the reaction cavity in a timely and controllable manner, so that the spray header can safely, efficiently and reliably operate for a long time in a proper temperature range;
The condensing part, the evaporating part and the liquid suction core are integrally designed on the main structure of the spray header, so that the spray header has the capability of uniformly and efficiently radiating heat, the air inlet temperature is effectively reduced, and the pre-reaction is reduced; in addition, the temperature of the gas flowing out of the spray holes is lower, more uniform and controllable, the deposition growth of the gas surface reactant of the spray header and the thermal deformation of the spray header are reduced, and the thickness and doping uniformity of the epitaxial growth film material are further improved;
When the heat in the reaction cavity is conducted to the air outlet surface of the evaporation part, the heat exchange working medium in the cavity is evaporated in the vacuum environment to generate gas phase, the heat exchange working medium is converted from liquid phase to gas phase to quickly expand the volume of absorbed heat, when the heat exchange working medium in the gas phase encounters the condensation part with a condensation channel, the heat exchange working medium is converted from the gas phase to the liquid phase to release carried heat, the heat exchange working medium in the liquid phase flows back to the evaporation part under the action of the liquid absorption core group, the phase change process is repeatedly performed in the sealed and vacuum cavity, and the heat is uniformly and efficiently transferred in a circulating way;
The condensing surface of the condensing part is a condensing micro-channel conducting surface and can be also called a heat exchange surface, so that the heat resistance of a layer of interface is reduced by the condensing part, the heat absorbed by the condensing surface of the condensing part can be more rapidly conducted to liquid (specifically, condensed water) flowing in the condensing micro-channel, thereby realizing efficient heat exchange, and the condensed water (such as deionized water) introduced into the condensing micro-channel absorbs heat and can be boiled at a relatively low temperature to generate phase change, so that two-phase flow boiling heat exchange is realized; the condensing micro-flow channel two-phase flow boiling heat exchange has high-efficiency heat exchange capacity, and the condensing micro-flow channel has anti-blocking capacity; and is more beneficial to the temperature uniformity required by each region of the spray header.
Drawings
The accompanying drawings are included to provide an understanding of the technical aspects of the present disclosure, and are incorporated in and constitute a part of this specification, illustrate the technical aspects of the present disclosure and together with the embodiments of the disclosure, not to limit the technical aspects of the present disclosure. The shapes and sizes of the various components in the drawings are not to scale, and are intended to illustrate the present application only.
FIG. 1 is an exploded view of a showerhead with phase change heat dissipation according to an embodiment of the present application;
FIG. 2 is a cross-sectional view of a showerhead with phase change heat dissipation according to an embodiment of the present application;
Fig. 3 is a cross-sectional view of a condensing portion and a condensing wick provided in an embodiment of the present application;
FIG. 4 is an enlarged schematic view of portion A of FIG. 3;
fig. 5 is a cross-sectional view of an evaporation section and evaporation wick provided in accordance with a first aspect of an embodiment of the application;
Fig. 6 is a cross-sectional view of an evaporation section and evaporation wick provided in accordance with a second aspect of an embodiment of the application;
FIG. 7 is a cross-sectional view of an evaporation section and an evaporation wick according to a third aspect of an embodiment of the application
FIG. 8 is a flow chart of a method for manufacturing a showerhead with phase change heat dissipation according to an embodiment of the present application;
fig. 9 is a cross-sectional view of evaporation wick powder sintering on an evaporation section;
fig. 10 is a cross-sectional view of a condensed wick powder sinter on a condensing portion;
Fig. 11 is a schematic illustration of a wick structure of an evaporation wick or a condensation wick.
Detailed Description
The above-described aspects are further described below in conjunction with specific embodiments. It should be understood that these examples are illustrative of the present application and are not intended to limit the scope of the present application. The implementation conditions employed in the examples may be further adjusted as in the case of the specific manufacturer, and the implementation conditions not specified are typically those in routine experiments.
Unless defined otherwise, technical or scientific terms used in the embodiments of the present disclosure should be given the ordinary meaning as understood by one of ordinary skill in the art to which the present application pertains. The terms "first," "second," and the like, as used in embodiments of the present disclosure, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. In this context, "electrically connected" includes the case where constituent elements are connected together by an element having some electric action. The "element having a certain electric action" is not particularly limited as long as it can transmit and receive an electric signal between the constituent elements connected. The "element having some kind of electrical action" may be, for example, an electrode or a wiring, or a switching element such as a transistor, or other functional element such as a resistor, an inductor, or a capacitor. "upper", "lower", "left", "right", etc. are used merely to indicate relative positional relationships, which may also be changed when the absolute position of the object to be described is changed.
In the present application, the azimuth or positional relationship indicated by the terms "upper", "lower", "inner", "middle", etc., are based on the azimuth or positional relationship shown in the drawings. These terms are only used to better describe the present application and its embodiments and are not intended to limit the scope of the indicated devices, elements or components to the particular orientations or to configure and operate in the particular orientations.
The application discloses a spray header with phase change heat dissipation and a manufacturing method thereof, wherein the spray header comprises a condensing part evaporation part, an evaporation liquid suction core and a condensation liquid suction core, a plurality of air inlets axially penetrating the condensing part are arranged on the condensing part, a plurality of groups of condensation micro-channels which are distributed in a staggered manner with the air inlets are embedded in the condensing part, a liquid inlet and a liquid outlet which are communicated with the micro-channels are arranged on the condensing part, the evaporation part is connected with the condensing part to form a sealed vacuum cavity, and heat exchange working media are arranged in the cavity; the evaporation portion is close to the support column that the coaxial setting of inlet port is furnished with a plurality of and inlet port in the one side terminal surface of evaporation portion, be equipped with in the support column with the inlet port intercommunication spray the hole, the lateral part of evaporation portion is furnished with the evacuation notes liquid pipe and evaporates, evaporation wick laminating is close to the one side terminal surface of condensation portion and laminating with the outer peripheral face of support column at the evaporation portion, condensation wick laminating is close to the one side terminal surface of evaporation portion at the condensation portion, all be provided with the through-hole that corresponds with the support column on condensation wick and the evaporation wick, this shower head has even high-efficient radiating ability.
Next, fig. 1 to 8 are combined to describe a showerhead with phase change heat dissipation according to an embodiment of the present application, where the showerhead timely and controllably carries away heat radiated upward in a reaction chamber uniformly and efficiently, so as to ensure safe, efficient and long-term reliable operation of the showerhead in a suitable temperature range.
The spray header comprises a condensation part 10, an evaporation part 40 and a liquid absorption core group, wherein the spray header is mainly made of a high-temperature-resistant metal material, the high-temperature-resistant metal material is preferably stainless steel, the specific condensation part 10 and the evaporation part 40 are both round metal plates, and the liquid absorption core group is of a sintered porous structure;
The condensing part 10 is provided with a plurality of air inlets 13 penetrating through the condensing part in the axial direction, a plurality of groups of condensing micro-channels 14 are embedded in the condensing part 10, the air inlets 13 and the condensing micro-channels 14 are distributed in a staggered manner, and the condensing part 10 is respectively provided with a liquid inlet (not shown in the drawing) and a liquid outlet (not shown in the drawing) which are communicated with the condensing micro-channels 14;
the evaporating part 40 is connected with the condensing part to form a sealed and vacuum cavity, the cavity is filled with heat exchange working medium,
The evaporation part is provided with a plurality of support columns 43 near the end face of one side of the condensation part, each support column is internally provided with a spray hole 44 communicated with the air inlet hole 13, the support columns 43 and the air inlet hole 13 are coaxially arranged, and the side part of the evaporation part 40 is provided with a vacuumizing liquid injection pipe 45;
The liquid suction core group comprises an evaporation liquid suction core 30 and a condensation liquid suction core 20, wherein the evaporation liquid suction core 30 is attached to one side end face of the evaporation part close to the condensation part 10 and is attached to the outer peripheral face of the supporting column 43, the condensation liquid suction core 20 is attached to one side end face of the condensation part 10 close to the evaporation part 40, and through holes (not marked in the drawing) corresponding to the supporting column 43 and/or the air inlet holes 13 are formed in the condensation liquid suction core 40 and the evaporation liquid suction core 30.
It should be noted that, when the main body of the spray header is in a vacuum environment at the top of the reaction cavity, after the heat in the reaction cavity is conducted to the air outlet surface of the evaporation part, the heat exchange working medium in the cavity is evaporated in the vacuum environment to generate a gas phase, the heat exchange working medium is converted from a liquid phase to a gas phase to quickly expand the volume of absorbed heat, when the heat exchange working medium in the gas phase encounters the condensation part with a condensation channel, the heat exchange working medium is converted into the liquid phase, the carried heat is released from the gas phase to the liquid phase, the heat exchange working medium in the liquid phase flows back to the evaporation part under the action of the liquid absorption core group, the phase change process is repeatedly performed in the sealed and vacuum cavity, and the heat is uniformly and efficiently transferred in such a circulation manner;
The condensing surface of the condensing part is a condensing micro-channel conducting surface and can be also called a heat exchange surface, so that the heat resistance of an interface layer of the condensing part is reduced, the heat absorbed by the condensing surface of the condensing part can be more rapidly conducted to liquid flowing in the condensing micro-channel, thereby realizing efficient heat exchange, and the condensed water (deionized water) introduced into the condensing micro-channel absorbs heat and can be boiled at a relatively low temperature to generate phase change (the deionized water can be boiled at a temperature lower than 100 ℃ in a vacuum environment), so that two-phase flow boiling heat exchange is realized; the condensing micro-flow channel two-phase flow boiling heat exchange has high-efficiency heat exchange capacity, and the condensing micro-flow channel has anti-blocking capacity; and is more beneficial to the temperature uniformity required by each region of the spray header.
According to the application, the condensing part, the evaporating part and the liquid suction core group are integrally designed on the main body structure of the spray header, so that the spray header has the capability of uniformly and efficiently radiating heat, the air inlet temperature is effectively reduced, and the pre-reaction is reduced; in addition, the temperature of the gas flowing out of the spray holes is lower, more uniform and controllable, the deposition growth of the gas surface reactant of the spray head and the thermal deformation of the spray head are reduced, and the thickness and doping uniformity of the epitaxial growth film material are further improved.
Referring to fig. 3, in the present embodiment, the condensing portion has a condensing surface 12 near the evaporating portion, and an air intake surface 11 disposed opposite to the condensing surface; the air inlet hole 13 is provided with a first opening 131 positioned on the air inlet surface and a second opening 132 positioned on the condensation surface 12, the diameter of the first opening 131 is larger than that of the second opening 132, the diameter R1 of the first opening 131, the diameter R2 of the second opening 132, R1 is larger than R2, wherein R1 is 10-16mm, R2 is 5-8mm, and the distance from the first opening 131 to the second opening 132 of the air inlet hole 13 is B, and B is 6-12mm.
Referring to fig. 1 and 5, in the present embodiment, the evaporation portion 40 has an inner concave surface 41 adjacent to the condensation portion, and an air outlet surface 42 disposed opposite to the inner concave surface 41, the air outlet surface 42 being in a smooth plane; it should be noted that, in this embodiment, the air outlet surface is the evaporation surface of the evaporation portion, and the air outlet surface 42 is formed into a smooth plane by the electropolishing process, and since the heat absorbed by the air outlet surface 42 can be conducted uniformly and efficiently, and the temperature is controllable, the particles deposited and grown on the air outlet surface 42 of the evaporation portion can be significantly reduced, which is beneficial to improving the quality of the epitaxial growth film material of the substrate affected by the falling of the particles.
The spray holes 43 have a third opening 441 communicating with the air inlet holes 13 and a fourth opening 442 located at the air outlet face; the inside of the spraying hole is provided with a narrow part 443, the diameter of the spraying hole close to the third opening is larger than that of the narrow part, and/or the diameter of the spraying hole 44 close to the fourth opening 442 is larger than that of the narrow part 443, so that the diameter of the spraying hole 44 is two large and small, gas enters from the third opening 441, the flow rate of the gas is accelerated when passing through the narrow part 443, the flow rate of the gas is gradually reduced when flowing into the fourth opening 442 from the narrow part 443, and the gas with a faster flow rate is prevented from being directly sprayed onto the substrate by the design, so that the uniformity of epitaxial growth of film materials in different areas is controlled.
Further, referring to fig. 5-7, the distance D from the narrow portion 443 to the fourth opening 442 is D, wherein the distance D from the narrow portion 443 to the fourth opening located at the center of the evaporation portion 40 is 2-4 mm, and as shown in fig. 5, in the first aspect, the distance D from the narrow portion 443 to the fourth opening 442 increases stepwise from the center to the edge of the evaporation portion; the gradient increased each time is 1-2 mm, so that the gas flow rate of the spray header from the center to the edge can be relatively gradually reduced, and the gas flow distribution in the reaction cavity can be finely regulated and controlled finally, so that the utilization rate of the reaction gas can be improved, the gas flow is easier to uniformly spread on the surface of the substrate, the uniformity and consistency of the flow field of the epitaxial growth surface of the substrate are facilitated, the thickness and doping uniformity of the epitaxial growth film material are further improved, in the second aspect, as shown in fig. 6, the distance D2 from the narrow part 443 to the fourth opening 442 is gradually reduced from the center to the edge of the evaporation part, and the spray header can be relatively gradually increased from the center to the edge; in the third aspect, as shown in fig. 7, a distance D3 from the narrow portion 443 to the fourth opening 442 is set in the form of "peak-and-trough", where the distance is 2 to 4mm, and where the distance is 7 to 9mm.
Referring to fig. 1 to 4, in the present embodiment, the plurality of air intake holes 13 are uniformly distributed on the condensing portion 10 in an array, and the plurality of support columns 43 are uniformly distributed on the evaporating portion 40 in an array; the plurality of groups of condensation micro-channels 14 are arranged at intervals in parallel, each group of condensation micro-channels 14 comprises a plurality of condensation micro-channels 141 which are arranged at intervals, the distance between every two adjacent condensation micro-channels 141 is 3-5mm, further, one side of each condensation micro-channel 141, which is far away from the condensation liquid suction core 20, is a first groove 1411, the cross section of each condensation micro-channel 141, which is close to the condensation liquid suction core 20, is rectangular, one side of each condensation micro-channel 141, which is communicated with the first groove 1411, is a second groove 1412, the cross section of each second groove 1412, which is circular arc-shaped, rectangular, dovetail-shaped and the like, specifically, the width of each first groove 1411 is C (C is 1-2 mm), the diameter of each second groove 1412 is phi is 2-4 mm, the distance from the top of each first groove 1411 to the center of each second groove 1412 is E, E is 3-6 mm, the effective heat exchange area of each condensation micro-channel 141 is effectively increased, the effective heat exchange area of each condensation micro-channel 14 is effectively increased, in practical application, the liquid inlet and the condensation micro-channels 14 are connected with a forced drive pump to form a convection pump, and the condensate liquid flows out of the micro-channel from the outside, and the condensate liquid flows into the micro-channel, and the main body is fully cooled by the heat exchange, and the condensate liquid flows out of the liquid from the outside.
Referring to fig. 1 and 2, in the present embodiment, the evaporation wick 30 and the condensation wick 20 are both porous structures sintered with powder, the thickness of each of the evaporation wick and the condensation wick is 0.5 to 2.5mm, and the porosity is 30% to 60%. Further, the powder is high temperature resistant metal powder with the particle size of 25-200 μm, preferably, the high temperature resistant metal powder is stainless steel, the evaporation liquid suction core and the condensation liquid suction core are sintered by high temperature solid phase, metallurgical bonding is completed between the powder and the inner wall of the metal plate, and a liquid suction core structure with a large number of micro-scale pores is formed.
In this embodiment, the heat exchange working medium is one of deionized water, ethanol or liquid alkali metal, preferably, the heat exchange working medium is liquid alkali metal, and when the temperature of the epitaxy process reaches 1800 ℃, the temperature of the reaction chamber radiating heat to the spray head can reach about 1000 ℃, at this time, the temperature of the heat exchange working medium loses the cooling effect due to the low boiling point of the deionized water or ethanol, and the phase change temperature of the liquid alkali metal is relatively high, for example, liquid potassium can be used in the temperature range of 400 ℃ to 1100 ℃, liquid sodium can be used in the temperature range of 500 ℃ to 1200 ℃, liquid lithium can be used in the temperature range of 1000 ℃ to 1500 ℃, different heat exchange mediums can be selected according to different working temperature ranges, and meanwhile, in the use process, the compatibility problem of the liquid alkali metal and the metal plate material also needs to be paid attention, wherein the stainless steel, the nickel base alloy, the tantalum base alloy, the tungsten or the molybdenum and the alloy meet the requirements.
Next, a method for manufacturing a showerhead with phase change heat dissipation according to an embodiment of the present application is described with reference to fig. 8 to 11, which specifically includes an evaporation portion manufacturing stage, a condensation portion manufacturing stage, a cleaning and drying stage, a wick manufacturing stage, and a combined mounting stage.
The preparation stage of the evaporation part: providing a first metal plate, forming a plurality of support columns on the first metal plate based on a milling process, forming spray holes on the support columns based on a drilling process, and reserving a vacuumizing liquid injection pipe at the side part of an evaporation part;
Specifically, the first metal plate is a first circular metal plate, the material of the first metal plate is a high-melting-point metal material, such as stainless steel, tungsten-molybdenum alloy and the like, a spraying hole is formed through milling, forming a taper hole cutter, electric spark punching or wire cutting and the like, specifically, the diameter of the spraying hole close to the first opening is larger than the diameter of the narrow part, and/or the diameter of the spraying hole close to the second opening is larger than the diameter of the narrow part;
forming a smooth plane on the air outlet surface of the evaporation part based on an electrolytic polishing process;
and a condensation part manufacturing stage: providing a second metal plate, forming an embedded micro-channel on the second metal plate based on a wire cutting process, and forming a plurality of air inlets on the second metal plate based on a milling process;
Specifically, the second metal plate is specifically a second circular metal plate; the second metal plate is made of high-melting-point metal material such as stainless steel, tungsten-molybdenum alloy and the like, and a guide through hole with the diameter of 3mm is formed in the circumferential surface of the second metal plate through a deep hole drilling machine or an electric spark puncher; then, a condensation micro-channel is processed by wire-cut electric discharge machining; forming an air inlet hole through milling, forming a taper hole cutter, electric spark punching or wire cutting and the like, wherein the diameter of a first opening of the air inlet hole is larger than that of a second opening;
Cleaning and drying: cleaning the evaporation part and the condensation part based on an ultrasonic cleaning process, and drying the evaporation part and the condensation part after cleaning;
Specifically, the evaporating part and the condensing part are firstly placed into diluted alkaline cleaning agent, ultrasonically cleaned for 3-12 min, then placed into acidic cleaning agent, ultrasonically cleaned for 3-12 min, stains and rust on the surface of the metal plate are removed, the cleaning agent remained on the surface of the metal plate is washed by deionized water, and finally the metal plate is placed into a drying box for drying, so that the evaporating part and the condensing part after cleaning and drying are obtained.
The preparation stage of the liquid suction core: forming an evaporating liquid suction core on one side end surface of the cleaned evaporating part corresponding to the supporting column based on a high-temperature sintering process, and forming a condensing liquid suction core on one side end surface of the cleaned condensing part based on the high-temperature sintering process;
Specifically, the high-temperature sintering process specifically comprises a mold preparation stage, a filling stage, a sintering stage and a demolding stage,
And (3) a mould preparation stage: manufacturing a first die matched with the evaporation part and manufacturing a second die matched with the condensation part;
specifically, the first mold and the second mold in this embodiment are each preferably a high purity graphite mold.
Referring to fig. 9-10, the fill phase: assembling and superposing the first mold and the evaporation part to form a first cavity, filling high-temperature-resistant metal powder into the first cavity in a non-pressure state, and intermittently vibrating the first mold in the filling process until the first cavity is filled with the high-temperature-resistant metal powder;
the second mold and the condensing part are assembled and overlapped to form a second cavity; filling high-temperature-resistant metal powder into the second cavity in a non-pressure state, and intermittently vibrating the second die in the filling process until the second cavity is filled with the high-temperature-resistant metal powder;
Further, in order to reduce the mold release resistance, a layer of a mold release agent may be coated on the inner surfaces of the first mold and the second mold.
And (3) sintering: the first die and the evaporation part filled with the high-temperature-resistant metal powder (stainless steel powder), and the second die and the condensation part filled with the high-temperature-resistant metal powder (stainless steel powder) are placed in a box-type vacuum atmosphere resistance furnace together for high-temperature sintering;
The specific steps of sintering the high temperature resistant metal powder (stainless steel powder) are as follows:
Firstly, vacuumizing a box-type vacuum atmosphere resistance furnace; introducing nitrogen or argon as protective sintering atmosphere, running a temperature rise program, and keeping the highest sintering temperature of 1100-1300 ℃ and the temperature curve for about 240min; and cooling the vacuum sintering furnace to room temperature.
Demolding: and after sintering, removing the first die and the second die respectively to obtain an evaporation part with an evaporation liquid suction core and a condensation part with a condensation liquid suction core.
In this embodiment, the evaporating wick and the condensing wick are sintered at a high temperature and a metallurgical bond is completed between the powders and the inner wall of the metal plate, so as to form a wick structure with a large number of micro-scale pores (as shown in fig. 11);
and (3) an installation and combination stage: the method comprises the steps of connecting one surface of an evaporation part with an evaporation liquid suction core with one surface of a condensation part with a condensation liquid suction core based on a vacuum diffusion welding process to form a closed cavity, vacuumizing the cavity by using a vacuumizing liquid injection pipe to form a closed and vacuum cavity, filling heat exchange working medium into the cavity by using the vacuumizing liquid injection pipe, and sealing the vacuumizing liquid injection pipe after filling is completed.
The above embodiments are provided to illustrate the technical concept and features of the present application, and are intended to enable those skilled in the art to understand the present application and implement the same according to the present application, not to limit the scope of the present application. All equivalent changes or modifications made by the spirit of the application are intended to be covered by the scope of the application.
Claims (10)
1. A showerhead with phase change heat dissipation comprising:
the condensing part is provided with a plurality of air inlets which axially penetrate through the condensing part, a plurality of groups of condensing micro-channels are embedded in the condensing part, the air inlets and the condensing micro-channels are distributed in a staggered mode, and the condensing part is respectively provided with a liquid inlet and a liquid outlet which are communicated with the micro-channels;
the evaporation part is connected with the condensation part to form a sealed and vacuum cavity, and the cavity is filled with heat exchange working medium;
The evaporation part is provided with a plurality of support columns close to the end face of one side of the condensation part, each support column is internally provided with a spray hole communicated with the air inlet hole, the support columns and the air inlet hole are coaxially arranged, and the side part of the evaporation part is provided with a vacuumizing liquid injection pipe;
The liquid suction core group comprises an evaporation liquid suction core and a condensation liquid suction core, wherein the evaporation liquid suction core is attached to one side end face of the evaporation part, which is close to the condensation part, and is attached to the outer peripheral face of the support column, the condensation liquid suction core is attached to one side end face of the condensation part, which is close to the evaporation part, and through holes corresponding to the support column and/or the air inlet holes are formed in the condensation liquid suction core and the evaporation liquid suction core.
2. The showerhead with phase change heat dissipation of claim 1,
The condensing part is provided with a condensing surface close to the evaporating part and an air inlet surface opposite to the condensing surface;
The air inlet hole is provided with a first opening positioned on the air inlet surface and a second opening positioned on the condensation surface, and the diameter of the first opening is larger than or equal to that of the second opening.
3. The showerhead with phase change heat dissipation of claim 1,
The evaporation part is provided with an inner concave surface close to the condensation part and an air outlet surface opposite to the inner concave surface, and the air outlet surface is smooth;
The spraying hole is provided with a third opening communicated with the air inlet hole and a fourth opening positioned on the air outlet surface;
the inside of the spraying hole is provided with a narrow part, the diameter of the spraying hole close to the third opening is larger than the diameter of the narrow part, and/or the diameter of the spraying hole close to the fourth opening is larger than the diameter of the narrow part.
4. A showerhead with phase change heat dissipation as defined in claim 3,
The distance from the narrow part to the fourth opening gradually increases from the center to the edge of the evaporation part;
or the distance from the narrow part to the fourth opening gradually decreases from the center to the edge of the evaporation part;
or the distance from the narrow part to the fourth opening is set in the form of a wave crest and wave trough.
5. The showerhead with phase change heat dissipation of claim 1,
The air inlets are uniformly distributed on the condensing part in an array mode, and the supporting columns are uniformly distributed on the evaporating part in an array mode;
The condensing micro-channels are arranged in parallel at intervals, each group of the condensing micro-channels comprises a plurality of condensing micro-channels which are arranged at intervals, and the distance between every two adjacent condensing micro-channels is 3-5mm.
6. The showerhead with phase change heat dissipation of claim 5,
The side of the condensation micro-channel, which is far away from the condensation liquid suction core, is a rectangular groove, and the side of the condensation micro-channel, which is close to the condensation liquid suction core, is one of arc, rectangle, dovetail and the like.
7. The showerhead with phase change heat dissipation of claim 1,
The evaporation liquid suction core and the condensation liquid suction core are of porous structures sintered by powder, the thickness of the evaporation liquid suction core and the thickness of the condensation liquid suction core are 0.5-2.5 mm, and the porosity is 30% -60%;
the powder is high-temperature resistant metal powder, and the particle size of the high-temperature resistant metal powder is 25-200 mu m.
8. The showerhead with phase change heat dissipation of claim 1,
The heat exchange working medium is one of deionized water, ethanol or liquid alkali metal.
9. The manufacturing method of the spray header with the phase-change heat dissipation is characterized by comprising the following steps of:
the manufacturing stage of the evaporation part, namely providing a first metal plate, forming a plurality of support columns on the first metal plate based on a milling process, and forming spray holes on the support columns based on a drilling process;
The manufacturing stage of the condensing part comprises the steps of providing a second metal plate, forming an embedded micro-channel on the second metal plate based on a wire cutting process, and forming a plurality of air inlets on the second metal plate based on a milling process;
A cleaning and drying stage, namely cleaning the evaporation part and the condensation part based on an ultrasonic cleaning process, and drying the evaporation part and the condensation part after cleaning;
In the preparation stage of the liquid suction core, an evaporation liquid suction core is formed on one side end surface of the cleaned evaporation part corresponding to the support column based on a high-temperature sintering process, and a condensation liquid suction core is formed on one side end surface of the cleaned condensation part based on the high-temperature sintering process;
And in the installation and combination stage, one end face of the evaporation part with the evaporation liquid suction core and one end face of the condensation part with the condensation liquid suction core are connected based on a vacuum diffusion welding process to form a closed cavity, the cavity is vacuumized by using a vacuumized liquid injection pipe to form a closed and vacuum cavity, a heat exchange working medium is filled into the cavity by using the vacuumized liquid injection pipe, and the vacuumized liquid injection pipe is sealed after filling is completed.
10. The method for manufacturing a showerhead with phase change heat dissipation of claim 9, wherein the high temperature sintering process comprises:
and (3) a mould preparation stage: manufacturing a first graphite mold matched with the evaporation part and manufacturing a second mold matched with the condensation part; the second mold and the condensing part are assembled and overlapped to form a second cavity;
Filling: assembling and superposing the first mold and the evaporation part to form a first cavity, filling high-temperature-resistant metal powder into the first cavity in a non-pressure state, and intermittently vibrating the first mold in the filling process until the first cavity is filled with the high-temperature-resistant metal powder;
The second mold and the condensing part are assembled and overlapped to form a second cavity; and filling high-temperature-resistant metal powder into the second cavity in a non-pressure state, and intermittently vibrating the second die in the filling process until the second cavity is filled with the high-temperature-resistant metal powder.
And (3) sintering: placing the first die filled with the high-temperature-resistant metal powder, the evaporation part, the second die filled with the high-temperature-resistant metal powder and the condensation part in a box-type vacuum atmosphere resistance furnace together for high-temperature sintering;
demolding: and after sintering, respectively removing the first die and the second die to obtain an evaporation part with an evaporation liquid suction core and a condensation part with a condensation liquid suction core.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410443474.7A CN118441264A (en) | 2024-04-12 | 2024-04-12 | Spray header with phase-change heat dissipation function and manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410443474.7A CN118441264A (en) | 2024-04-12 | 2024-04-12 | Spray header with phase-change heat dissipation function and manufacturing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN118441264A true CN118441264A (en) | 2024-08-06 |
Family
ID=92316623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410443474.7A Pending CN118441264A (en) | 2024-04-12 | 2024-04-12 | Spray header with phase-change heat dissipation function and manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN118441264A (en) |
-
2024
- 2024-04-12 CN CN202410443474.7A patent/CN118441264A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6997245B2 (en) | Vapor chamber with sintered grooved wick | |
| US6945317B2 (en) | Sintered grooved wick with particle web | |
| US20100328896A1 (en) | Article including thermal interface element and method of preparation | |
| CN108682662B (en) | Preparation method of diamond micro-channel heat sink for heat dissipation with ultrahigh heat flow density | |
| CN105716461A (en) | Temperature equalizing plate with gradient porous capillary cores in plane direction and manufacturing method for temperature equalizing plate | |
| CN111725144A (en) | High-temperature electronic packaging substrate material device based on gas-liquid phase change and preparation method thereof | |
| CN112071817A (en) | Immersion cooling heat dissipation structure, radiator, heat dissipation system and manufacturing method thereof | |
| CN114025562A (en) | Vapor chamber with gradient liquid absorption core structure and preparation method thereof | |
| CN212587492U (en) | Immersion cooling radiator and immersion cooling radiating system | |
| CN109411431A (en) | A kind of heat exchange structure and preparation method thereof | |
| US20230052246A1 (en) | Composite vc heat sink containing copper/diamond composite wick structure and method for preparing same | |
| CN115752063A (en) | Manifold type diamond-carbon nanotube micro-channel radiator and preparation method thereof | |
| CN118441264A (en) | Spray header with phase-change heat dissipation function and manufacturing method | |
| CN108418545A (en) | A kind of micro jet flow coldplate and its manufacturing method that porous heating surface is added | |
| CN111383885B (en) | Substrate mounting table capable of improving temperature control precision and plasma processing equipment | |
| US11920782B2 (en) | Streamlined vaporizer cores | |
| CN112414189B (en) | Flat evaporator suitable for cast capillary core | |
| CN113161307B (en) | Preparation method of closed type full-diamond micro-channel heat sink | |
| KR20200087874A (en) | Improved ampoule evaporator and container | |
| CN113976886B (en) | Porous structure, temperature equalizing plate, manufacturing method and application thereof | |
| CN115443048A (en) | Loop heat pipe structure and electronic product | |
| KR102126935B1 (en) | Method for vapor chamber wick manufacturing using cut wire and metal powder and The structure thereof | |
| US20240213052A1 (en) | Plug, method of manufacturing plug, and member for semiconductor manufacturing apparatus | |
| CN216592927U (en) | Heat pipe | |
| CN212573417U (en) | Ultrathin heat conduction patch and electronic equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |