CN117080150B - Mounting head structure with replaceable suction nozzle and die bonder - Google Patents
Mounting head structure with replaceable suction nozzle and die bonder Download PDFInfo
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- CN117080150B CN117080150B CN202311252303.8A CN202311252303A CN117080150B CN 117080150 B CN117080150 B CN 117080150B CN 202311252303 A CN202311252303 A CN 202311252303A CN 117080150 B CN117080150 B CN 117080150B
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- suction nozzle
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- accommodating groove
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- 238000005266 casting Methods 0.000 claims abstract description 33
- 238000007789 sealing Methods 0.000 claims description 17
- 210000001503 joint Anatomy 0.000 claims description 4
- 239000000696 magnetic material Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67121—Apparatus for making assemblies not otherwise provided for, e.g. package constructions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a mounting head structure with a replaceable suction nozzle, which comprises: a mounting plate; a first casting; a second casting; the driving plate is connected with the second casting through a cylindrical linear motor, and is connected with the third sliding block; the dispensing mechanism is arranged in the driving plate through a first driving cylinder; the image pickup mechanism is arranged in the driving plate through a second driving cylinder; the suction nozzle mechanism is arranged in the driving plate in a lifting manner; the suction nozzle mechanism comprises an upper head and a plurality of suction nozzles of different types, and the suction nozzles are detachably arranged in the bottom of the upper head in a magnetic suction connection mode. The invention also discloses a die bonder. Through the mode, the suction nozzles of the mounting head structure disclosed by the invention are connected in a magnetic connection mode, so that the suction nozzles of different types can be replaced according to the needs, and the flexibility is high.
Description
Technical Field
The invention relates to the technical field of die bonders, in particular to a mounting head structure with a replaceable suction nozzle and the die bonder.
Background
The die bonding is an important process of the packaging flow in the semiconductor industry and the electronic industry, and the die bonder is equipment designed for the production of semiconductor components, mainly bonds a silicon-based semiconductor wafer on a frame made of copper, and bases on the bonding wire and packaging of the rear section. In general, the die bonder is provided with a mounting head structure for dispensing, grabbing wafer die pads and welding operations.
However, in the conventional method, the suction nozzle of the mounting head of the wafer machine on the market is fixed, and cannot be replaced, so that the flexibility is low.
Disclosure of Invention
(one) solving the technical problems
Aiming at the defects of the prior art, the invention provides a mounting head structure with a replaceable suction nozzle and a die bonder, which can solve the technical problems.
(II) technical scheme
In order to solve the technical problems, the invention provides the following technical scheme: a mounting head structure of a replaceable suction nozzle, comprising: the device comprises a mounting plate, wherein a first sliding rail is arranged in the mounting plate along a first direction, and a first sliding block is arranged in the first sliding rail in a sliding manner; the first casting is connected with the mounting plate through a first linear motor, wherein the first casting is connected with the first sliding block, a second sliding rail is arranged on the first casting along a second direction, and a second sliding block is arranged in the second sliding rail in a sliding manner; the second casting is connected with the first casting through a second linear motor, wherein the second casting is connected with the second sliding block, a third sliding rail is arranged on the second casting along a third direction, and a third sliding block is arranged in the third sliding rail in a sliding manner; the driving plate is connected with the second casting through a cylindrical linear motor, and the driving plate is connected with the third sliding block; the dispensing mechanism is arranged in the driving plate through a first driving cylinder; the image pickup mechanism is arranged in the driving plate through a second driving cylinder; the suction nozzle mechanism is arranged in the driving plate in a lifting manner; the suction nozzle mechanism comprises an upper head part and a plurality of suction nozzles of different types, and the suction nozzles are detachably arranged in the bottom of the upper head part in a magnetic suction connection mode.
Further, a plurality of magnets are arranged at intervals at the bottom of the upper head part, the suction nozzle comprises a suction nozzle body, the suction nozzle body is made of magnetic materials, and the magnetic force of the plurality of magnets and the suction nozzle body is larger than the weight of the suction nozzle.
Further, the suction nozzle further comprises a suction nozzle head, the upper head comprises a lower suction cylinder, a first accommodating groove is formed in the center of the bottom of the lower suction cylinder, a first suction hole communicated with the first accommodating groove is formed in the lower suction cylinder along the length direction of the lower suction cylinder, a plurality of second accommodating grooves are formed in the outer side of the first accommodating groove in a surrounding mode at intervals in the bottom of the lower suction cylinder, the magnet is arranged in the second accommodating groove, a first extension part used for accommodating the suction nozzle body in the first accommodating groove is arranged at the top end of the suction nozzle body in an extending mode, a second extension part is arranged at the bottom of the suction nozzle body in the extending mode, a third accommodating groove is formed in the second extension part, a second suction hole which penetrates through the first extension part and is communicated with the third accommodating groove is further formed in the suction nozzle body, and a third suction hole corresponding to the second suction hole is formed in the suction nozzle head along the length direction of the suction nozzle head.
Further, the suction nozzle further comprises a clamping portion and a fixing piece, wherein the clamping portion and the fixing piece are arranged below the suction nozzle body, an annular clamping groove is formed in the outer wall of the clamping portion, a first accommodating through hole is formed in the center of the clamping portion, the second extending portion penetrates through the first accommodating through hole, external threads are formed in the outer wall, close to the top end of the suction nozzle body, of the second extending portion, the fixing piece is provided with a second accommodating through hole used for accommodating the second extending portion, the fixing piece comprises a cylindrical first fixing piece and a polygonal second fixing piece which is in a three-dimensional shape and is located below the first fixing piece, the second accommodating through hole penetrates through the first fixing piece and the second fixing piece, and internal threads in threaded connection with the external threads of the second extending portion are formed in the inner wall of the second accommodating through hole in the first fixing piece.
Further, the bottom end of the second extending portion far away from the suction nozzle body is in a truncated cone shape, the outer diameter of the bottom end of the second extending portion is gradually reduced towards the direction far away from the suction nozzle body, a plurality of slots are formed in the bottom end of the second extending portion at intervals along the length direction of the bottom end of the second extending portion so as to divide the bottom end of the second extending portion into a plurality of clamping pieces, the outer diameter of the center of the bottom end of the second extending portion is equal to the aperture of a second accommodating through hole of the second fixing piece, the suction nozzle head is cylindrical, and the outer diameter of the suction nozzle head is equal to the aperture of the third accommodating groove; in addition, the mounting head structure of the replaceable suction nozzle further comprises a clamping piece for clamping the clamping groove of the clamping part.
Further, a fourth accommodating groove which is communicated with the first suction hole and has a smaller aperture than the first accommodating groove is further formed in the first accommodating groove, the upper head further comprises a butt joint which is positioned in the fourth accommodating groove and corresponds to the first extension part, the butt joint is provided with a fourth suction hole which is communicated with the first suction hole and corresponds to the second suction hole, the upper head further comprises a sealing piece which is circular and is arranged in the first accommodating groove, the bottom of the lower suction cylinder is further provided with a sealing groove which is circular and is positioned outside the second accommodating grooves, and a sealing ring is arranged in the sealing groove.
Further, the upper head part further comprises an upper suction cylinder and a suction arm arranged in the upper suction cylinder, the bottom end of the suction arm is exposed out of the bottom of the upper suction cylinder, a connector is arranged at the bottom end of the suction arm, a fifth accommodating groove connected with a through hole of the suction arm is formed in the connector, a third extension part clamped in the fifth accommodating groove is arranged at the top end of the lower suction cylinder in an extending mode, and a fifth suction hole which is communicated with the first suction hole and corresponds to the through hole of the suction arm is formed in the third extension part.
Further, the third extension portion is cylindric, the external diameter of third extension portion equals the aperture of fifth accepting groove, the height of third extension portion equals the degree of depth of fifth accepting groove, the outer wall of third extension portion is equipped with ring seal, wherein the both ends of the inner chamber of upper suction cylinder are equipped with first bearing and second bearing respectively, the suction arm wears to establish and fix and set up in first bearing and the second bearing, just the third extension portion is first magnet, the connector is the second magnet that attracts with first magnet.
Further, the outer wall of the upper suction cylinder is provided with a connecting frame, a grating ruler is arranged in the connecting frame, the suction nozzle mechanism further comprises a setting plate arranged in the driving plate, the setting plate is provided with an extension top plate in an extending mode, a voice coil motor and a grating sensor used for identifying the grating ruler are arranged in the setting plate, a rotor of the voice coil motor is connected with the connecting frame, and the top end of the connecting frame is connected with the extension top plate through a buffer spring.
In order to solve the technical problems, the invention provides another technical scheme as follows: a die bonder comprising the suction nozzle-replaceable mounting head structure of any one of the above.
(III) beneficial effects
Compared with the prior art, the invention provides a mounting head structure with a replaceable suction nozzle and a die bonder, which have the following beneficial effects: the invention discloses a mounting head structure capable of replacing a suction nozzle, which comprises a mounting plate, a first casting, two castings, a driving plate, a dispensing mechanism, a camera shooting mechanism and a suction nozzle mechanism, wherein the suction nozzle mechanism can be arranged in the driving plate in a lifting manner, the suction nozzle mechanism comprises an upper head part and a plurality of suction nozzles of different types, and the suction nozzles are detachably arranged in the bottom of the upper head part in a magnetic suction connection manner. Through the mode, the suction nozzles of the mounting head structure disclosed by the invention are connected in a magnetic connection mode, so that the suction nozzles of different types can be replaced according to the needs, and the flexibility is high.
Drawings
FIG. 1 is a schematic view of a mounting head structure of a replaceable suction nozzle according to the present invention;
FIG. 2 is a schematic diagram of the camera mechanism of FIG. 1;
FIG. 3 is a first partial schematic view of the camera mechanism of FIG. 2;
FIG. 4 is a second partial schematic view of the camera mechanism of FIG. 2;
FIG. 5 is a schematic view of the lower suction barrel of the camera mechanism of FIG. 4;
FIG. 6 is a schematic view of the lower suction barrel of FIG. 5 in cross-section;
FIG. 7 is a schematic view of a third partial structure of the camera mechanism of FIG. 2;
FIG. 8 is a schematic view of a fourth partial structure of the camera mechanism of FIG. 2;
FIG. 9 is a schematic view of the upper suction barrel of FIG. 7;
FIG. 10 is a schematic view of the abutment of FIG. 4;
FIG. 11 is a first schematic view of the suction nozzle of the camera mechanism of FIG. 2;
FIG. 12 is a second schematic view of the suction nozzle of the camera mechanism of FIG. 2;
FIG. 13 is a schematic view of a nozzle body of the nozzle of the camera mechanism of FIG. 2;
FIG. 14 is a schematic view of a clamping portion of a suction nozzle of the camera mechanism of FIG. 2;
FIG. 15 is a schematic view of a mounting of a suction nozzle of the camera mechanism of FIG. 2;
fig. 16 is a schematic structural view of a nozzle head of the nozzle of the image pickup mechanism of fig. 2.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention discloses a die bonder, which comprises a mounting head structure with a replaceable suction nozzle. Referring to fig. 1 to 16, the nozzle-replaceable mounting head structure includes a mounting plate 10, a first casting 11, a second casting 12, a driving plate 13, a dispensing mechanism 14, an imaging mechanism 15, and a nozzle mechanism 16.
A first sliding rail is arranged in the mounting plate 10 along a first direction, wherein a first sliding block is slidably arranged in the first sliding rail. It should be appreciated that the mounting plate 10 is for placement within a die bonder.
The first casting 11 is connected to the mounting plate 10 by a first linear motor, wherein the first casting 11 is connected to the first slide such that the first casting 11 is slidable in the first direction in the first slide rail.
Preferably, the first casting 11 is provided with a second slide rail in the second direction, in which a second slider is slidably arranged.
The second casting 12 is connected to the first casting 11 by a second linear motor such that the second casting 12 is slidable in a second direction in a second slide rail.
Preferably, the second casting 12 is connected to the second slider, and the second casting 12 is provided with a third slide rail along a third direction, and the third slider is slidably disposed in the third slide rail.
Further, the first direction is perpendicular to the second direction, the second direction is perpendicular to the third direction, and the first direction is perpendicular to the third direction.
The drive plate 13 is connected to the second casting 12 by a cylindrical linear motor, wherein the drive plate 13 is connected to a third slide such that the drive plate 13 can slide in a third direction in a third slide rail.
It should be understood that the cylindrical linear motor, the first linear motor and the second linear motor of this embodiment are high in accuracy and good in stability, so that the accuracy of product processing can be improved.
The dispensing mechanism 14 is provided in the drive plate 13 by a first drive cylinder such that the dispensing mechanism 14 can be driven to slide relative to the drive plate 13 by the first drive cylinder. It should be appreciated that the dispensing mechanism 14 is used to dispense the adhesive to the location where the mounting is desired.
The image pickup mechanism 15 is provided in the drive plate by a second drive cylinder, so that the image pickup mechanism 15 can be driven to slide with respect to the drive plate 13 by the second drive cylinder. It should be understood that the image pickup mechanism 15 is used to clearly recognize the mounting range and determine the mounting position.
The suction nozzle mechanism 16 is provided in the drive plate 13 so as to be liftable.
In the present embodiment, the suction nozzle mechanism 16 includes an upper head portion 161 and a plurality of different types of suction nozzles 162, wherein the suction nozzles 162 are detachably provided in the bottom portion of the upper head portion 161 by means of magnetic suction connection. It should be appreciated that, since the suction nozzle 162 is detachably disposed at the bottom of the upper head 161 by means of magnetic connection, the suction nozzles of different types can be flexibly replaced as required to accommodate different product processing operations.
It should be noted that, the suction nozzle mechanism 16 of the present embodiment further includes a housing frame for housing a plurality of suction nozzles 162 of different types, and when the suction nozzles 162 need to be replaced, the original suction nozzles below the upper head 161 are removed by a manual or mechanical hand, and the upper head 161 is controlled to move into the housing frame and suck the suction nozzles 162 in the housing frame by a magnetic attraction manner, so that the purpose of replacing the suction nozzles can be achieved.
Preferably, a plurality of magnets 1611 are provided at intervals at the bottom of the upper head 161, wherein the suction nozzle 162 includes a suction nozzle body 1621, and the suction nozzle body 1621 is composed of a magnetic material such that the magnets 1611 may attract the suction nozzle body 1621.
It should be noted that the magnetic force between the plurality of magnets 1611 and the nozzle body 1621 of the present embodiment is greater than the weight of the nozzle 162 (e.g., the magnetic force between the plurality of magnets 1611 and the nozzle body 1621 is 3-10 times the weight of the nozzle 162), so that the plurality of magnets 1611 can quickly attract the nozzle body 1621 when the upper head 161 approaches (e.g., is in the range of 1-10 mm) the nozzle body 1621, thereby realizing quick replacement of the nozzle 162.
In this embodiment, the suction nozzle 162 further includes a nozzle head 1620, the upper head 161 includes a lower suction tube 1612, wherein a first accommodating recess 1613 is disposed at a bottom center of the lower suction tube 1612, a first suction hole 1614 communicating with the first accommodating recess 1613 is disposed in the lower suction tube 1612 along a length direction thereof, a plurality of second accommodating recesses 1615 disposed outside the first accommodating recess 1613 are further spaced apart from the bottom of the lower suction tube 1612, and the magnet 1611 is disposed in the second accommodating recess 1615.
Further, the top end of the nozzle body 1621 is extended with a first extension portion 1622 for being received in the first receiving groove 1613, the bottom of the nozzle body 1621 is extended with a second extension portion 1623, the second extension portion 1623 is provided with a third receiving groove, the nozzle body 1621 is further provided with a second suction hole 1624 passing through the first extension portion 1622 and communicating with the third receiving groove, the nozzle head 1620 is disposed in the third receiving groove, and a third suction hole 162a corresponding to the second suction hole 1624 is disposed in the nozzle head 1620 along the length direction thereof, so that a negative pressure is generated in the third suction hole 162a to suck the wafer.
It should be understood that, when the first extension portion 1622 is received in the first receiving recess 1613, the second suction hole 1624 of the first extension portion 1622 corresponds to and is connected with the first suction hole 1614 of the lower suction tube 1612, so that when the wafer needs to be sucked, a negative pressure is generated in the first suction hole 1614, so that the second suction hole 1624 and the third suction hole 162a generate a negative pressure, thereby sucking the wafer (the wafer can be sucked without a large negative pressure in this embodiment).
Preferably, the nozzle head 1620 has a cylindrical shape, and the outer diameter of the nozzle head 1620 is equal to the aperture of the third receiving groove.
Further, the suction nozzle 162 further includes a clamping portion 20 disposed below the suction nozzle body 1621 and a fixing member 21, wherein an annular clamping groove 201 is disposed on an outer wall of the clamping portion 20, a first accommodating through hole 202 is disposed at a center of the clamping portion 20, a second extending portion 1623 is disposed in the first accommodating through hole 202 in a penetrating manner, an external thread is disposed on an outer wall of the second extending portion 1623, which is close to a top end of the suction nozzle body 1621, and a second accommodating through hole 210 for accommodating the second extending portion 1623 is disposed on the fixing member 21, so that the suction nozzle head 1620 is disposed in a third accommodating groove of the second extending portion 1623 through the fixing member 21.
It should be understood that in some embodiments, the mounting head structure of the replaceable suction nozzle further includes a clamping member for clamping the clamping groove 201 of the clamping portion 20, that is, the clamping member is clamped in the clamping groove 201 of the clamping portion 20, and then the upper head 161 is moved to remove the entire suction nozzle 162 from the upper head 161. Further, the clamping member is disposed in the accommodating frame accommodating the plurality of suction nozzles 162 of different types, so that the suction nozzles 162 can be removed from the upper head 161, and the suction nozzles of different types can be immediately sucked from the accommodating frame, thereby achieving the effect of quickly removing and installing the suction nozzles 162.
Specifically, the fixing piece 21 includes a cylindrical first fixing piece 211 and a second fixing piece 212 that is polygonal and three-dimensional and is located below the first fixing piece 211, wherein the second receiving through hole 210 passes through the first fixing piece 211 and the second fixing piece 212, and an inner wall of the second receiving through hole 210 in the first fixing piece 211 is provided with an internal thread in threaded connection with an external thread of the second extension portion 1623, so that the fixing piece 21 is in threaded connection with the second extension portion 1623, and installation and disassembly are convenient.
In this embodiment, the second extension portion 1623 is in a shape of a truncated cone away from the bottom end of the nozzle body 1621, wherein the outer diameter of the bottom end (i.e. the bottom end in the shape of a truncated cone) of the second extension portion 1623 gradually decreases toward the direction away from the nozzle body 1621.
Further, a plurality of slits 1625 are formed at intervals along the length direction of the bottom end of the second extension portion 1623 to divide the bottom end of the second extension portion 1623 into a plurality of clips 1626, wherein an outer diameter of the center of the bottom end of the second extension portion 1623 (i.e., the center of the bottom end in the vertical direction) is equal to the aperture of the second receiving through hole 210 of the second fixing member 212. It should be appreciated that, due to the threaded connection between the first fixing member 211 and the external thread at the top end of the second extension portion 1623, when the first fixing member 211 is rotated to move the first fixing member 211 upward, the second fixing member 212 will move along with the first fixing member 211, and at this time, the second fixing member 212 will press the plurality of clips 1626 to clamp the nozzle head 1620 in the third receiving recess of the second extension portion 1623.
In the present embodiment, a fourth accommodating groove 1616 communicating with the first suction hole 1614 and having a smaller aperture than the first accommodating groove 1613 is further provided in the first accommodating groove 1613, wherein the upper head 161 further includes an abutment 163 located in the fourth accommodating groove 1616 and corresponding to the first extension portion 1622, and the abutment 163 is provided with a fourth suction hole 1631 communicating with the first suction hole 1614 and corresponding to the second suction hole 1624. That is, when the first extension portion 1622 is positioned in the first receiving groove 1613, the fourth suction hole 1631 of the docking head 163 corresponds to and is connected with the second suction hole 1624 of the first extension portion 1622.
Further, the upper head 161 further includes a sealing plate 164 that is annular and disposed in the first accommodating groove 1613, wherein the bottom of the lower suction tube 1612 is further provided with a sealing groove 1617 that is annular and is disposed outside the plurality of second accommodating grooves, and a sealing ring is disposed in the sealing groove 1617. It should be understood that the sealing plate 164 and the sealing ring are provided mainly for sealing effect.
In this embodiment, the upper head 161 further includes an upper suction barrel 165 and a suction arm 166 disposed within the upper suction barrel 165, wherein the bottom end of the suction arm 166 is exposed outside the bottom of the upper suction barrel 165.
Further, a connection head 167 is disposed at the bottom end of the suction arm 166, the connection head 167 is provided with a fifth receiving groove 1671 connected to the through hole of the suction arm 166, wherein a third extension portion 1618 engaged in the fifth receiving groove 1671 is disposed at the top end of the lower suction tube 1612, and the third extension portion 1618 is provided with a fifth suction hole communicating with the first suction hole 1614 and corresponding to the through hole of the suction arm 166. That is, when the third extension portion 1618 of the lower suction tube 1612 is disposed in the fifth receiving recess 1671, the fifth suction hole of the third extension portion 1618 corresponds to and is connected to the through hole of the suction arm 166.
It should be understood that, when the wafer needs to be suctioned, a negative pressure is generated in the through hole of the suction arm 166, and a negative pressure is also generated in the fifth suction hole of the third extension portion 1618, so that the second suction hole 1624 and the third suction hole 162a generate a negative pressure to suck the wafer.
Preferably, third extension 1618 is cylindrical, the outer diameter of third extension 1618 is equal to the aperture of fifth receiving recess 1671, and the height of third extension 1618 is equal to the depth of fifth receiving recess 1671.
Further, an annular sealing ring is disposed on an outer wall of the third extension portion 1618, wherein a first bearing 1651 and a second bearing 1652 are disposed at two ends of an inner cavity of the upper suction tube 165, and the suction arm 166 is disposed through and fixedly disposed in the first bearing 1651 and the second bearing 1652.
It should be noted that, in some embodiments, in order to increase the stability of the connection between the third extension portion 1618 and the connection head 167, the third extension portion 1618 is a first magnet, and the connection head 167 is a second magnet that attracts the first magnet, so that the third extension portion 1618 and the connection head 167 are attracted by magnetic force. Further, the magnetic force of the first magnet and the second magnet is greater than the weight of the entire lower suction barrel 1612 (all components including the suction nozzle 162), e.g., the magnetic force of the first magnet and the second magnet is 5-20 times greater than the weight of the entire lower suction barrel 1612 (all components including the suction nozzle 162).
In this embodiment, the outer wall of the upper suction cylinder 165 is provided with a connection frame 1653, wherein the connection frame 1653 is provided with a grating ruler 231, and the suction nozzle mechanism 16 further comprises a setting plate 168 disposed in the driving plate 13, the setting plate 168 is provided with an extension top plate 1681 in an extending manner, and the setting plate 168 is provided with a voice coil motor 23 and a grating sensor 24 for identifying the grating ruler 231, further, a mover of the voice coil motor 23 is connected with the connection frame 1653, so that the connection frame 1653 is driven to lift by the voice coil motor 23, thereby realizing the driving of the suction nozzle mechanism 16 to lift. It should be understood that the voice coil motor 23 of the present embodiment is used to control the stroke of the lifting travel of the suction nozzle mechanism 16, and the grating sensor 24 is used to measure the distance actually traveled by the suction nozzle mechanism 16.
Preferably, the top end of the link 1653 is attached to the extension roof 1681 by a buffer spring. It should be understood that the buffer spring mainly plays a role of buffering.
It should be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. A mounting head structure of a replaceable suction nozzle, comprising:
the device comprises a mounting plate, wherein a first sliding rail is arranged in the mounting plate along a first direction, and a first sliding block is arranged in the first sliding rail in a sliding manner;
the first casting is connected with the mounting plate through a first linear motor, wherein the first casting is connected with the first sliding block, a second sliding rail is arranged on the first casting along a second direction, and a second sliding block is arranged in the second sliding rail in a sliding manner;
the second casting is connected with the first casting through a second linear motor, wherein the second casting is connected with the second sliding block, a third sliding rail is arranged on the second casting along a third direction, and a third sliding block is arranged in the third sliding rail in a sliding manner;
the driving plate is connected with the second casting through a cylindrical linear motor, and the driving plate is connected with the third sliding block;
the dispensing mechanism is arranged in the driving plate through a first driving cylinder;
the image pickup mechanism is arranged in the driving plate through a second driving cylinder;
the suction nozzle mechanism is arranged in the driving plate in a lifting manner;
the suction nozzle mechanism comprises an upper head part and a plurality of suction nozzles of different types, and the suction nozzles are detachably arranged in the bottom of the upper head part in a magnetic suction connection mode.
2. The suction nozzle-replaceable mounting head structure according to claim 1, wherein a plurality of magnets are provided at intervals at the bottom of the upper head portion, the suction nozzle comprises a suction nozzle body, wherein the suction nozzle body is made of a magnetic material, and the magnetic force between the plurality of magnets and the suction nozzle body is greater than the weight of the suction nozzle itself.
3. The suction nozzle-replaceable mounting head structure according to claim 2, wherein the suction nozzle further comprises a suction nozzle head, the upper head comprises a lower suction cylinder, a first accommodating groove is formed in the center of the bottom of the lower suction cylinder, a first suction hole communicated with the first accommodating groove is formed in the lower suction cylinder along the length direction of the lower suction cylinder, a plurality of second accommodating grooves are formed in the lower suction cylinder in a surrounding mode outside the first accommodating groove at intervals, the magnet is arranged in the second accommodating grooves, a first extending portion for accommodating the suction nozzle body is formed in the top end of the suction nozzle body in an extending mode, a second extending portion is formed in the bottom of the suction nozzle body in an extending mode, a third accommodating groove is formed in the second extending portion, a second suction hole which penetrates through the first extending portion and is communicated with the third accommodating groove is formed in the suction nozzle body, and a third suction hole corresponding to the second suction hole is formed in the suction nozzle head along the length direction of the suction nozzle body.
4. The suction nozzle-replaceable mounting head structure according to claim 3, wherein the suction nozzle further comprises a clamping portion and a fixing piece, the clamping portion and the fixing piece are arranged below the suction nozzle body, an annular clamping groove is formed in the outer wall of the clamping portion, a first accommodating through hole is formed in the center of the clamping portion, the second extending portion is arranged in the first accommodating through hole in a penetrating mode, external threads are formed in the outer wall, close to the top end of the suction nozzle body, of the second extending portion, a second accommodating through hole for accommodating the second extending portion is formed in the fixing piece, the fixing piece comprises a cylindrical first fixing piece and a polygonal second fixing piece which is arranged below the first fixing piece, the second accommodating through hole penetrates through the first fixing piece and the second fixing piece, and internal threads in threaded connection with the external threads of the second extending portion are formed in the inner wall of the second accommodating through hole in the first fixing piece.
5. The suction nozzle replaceable mounting head structure according to claim 4, wherein the second extending portion is in a truncated cone shape away from the bottom end of the suction nozzle body, the outer diameter of the bottom end of the second extending portion is gradually reduced toward a direction away from the suction nozzle body, a plurality of slits are formed at intervals along the length direction of the bottom end of the second extending portion so as to divide the bottom end of the second extending portion into a plurality of clamping pieces, the outer diameter at the center of the bottom end of the second extending portion is equal to the aperture of the second receiving through hole of the second fixing member, the suction nozzle head is in a cylindrical shape, and the outer diameter of the suction nozzle head is equal to the aperture of the third receiving groove; in addition, the mounting head structure of the replaceable suction nozzle further comprises a clamping piece for clamping the clamping groove of the clamping part.
6. The suction nozzle replaceable mounting head structure according to claim 3, wherein a fourth accommodating groove which is communicated with the first suction hole and has a smaller aperture than the first accommodating groove is further provided in the first accommodating groove, the upper head portion further comprises a butt joint which is positioned in the fourth accommodating groove and corresponds to the first extension portion, the butt joint is provided with a fourth suction hole which is communicated with the first suction hole and corresponds to the second suction hole, the upper head portion further comprises a sealing piece which is annular and is arranged in the first accommodating groove, a sealing groove which is annular and is positioned outside the plurality of second accommodating grooves is further provided at the bottom of the lower suction cylinder, and a sealing ring is provided in the sealing groove.
7. The suction nozzle replaceable mounting head structure according to claim 6, wherein the upper head portion further comprises an upper suction cylinder and a suction arm disposed in the upper suction cylinder, a bottom end of the suction arm is exposed out of a bottom of the upper suction cylinder, a connector is disposed at a bottom end of the suction arm, a fifth accommodating groove connected with a through hole of the suction arm is disposed at the connector, a third extension portion clamped in the fifth accommodating groove is disposed at a top end of the lower suction cylinder in an extending manner, and a fifth suction hole which is communicated with the first suction hole and corresponds to the through hole of the suction arm is disposed at the third extension portion.
8. The suction nozzle replaceable mounting head structure according to claim 7, wherein the third extension portion is cylindrical, the outer diameter of the third extension portion is equal to the aperture of the fifth accommodating groove, the height of the third extension portion is equal to the depth of the fifth accommodating groove, an annular sealing ring is arranged on the outer wall of the third extension portion, a first bearing and a second bearing are respectively arranged at two ends of the inner cavity of the upper suction tube, the suction arm is arranged in the first bearing and the second bearing in a penetrating and fixing manner, the third extension portion is a first magnet, and the connector is a second magnet which is attracted with the first magnet.
9. The suction nozzle replaceable mounting head structure according to claim 8, wherein a connecting frame is provided on an outer wall of the upper suction cylinder, a grating ruler is provided in the connecting frame, the suction nozzle mechanism further comprises a setting plate arranged in the driving plate, the setting plate is provided with an extension top plate in an extending manner, a voice coil motor and a grating sensor for identifying the grating ruler are arranged in the setting plate, a rotor of the voice coil motor is connected with the connecting frame, and a top end of the connecting frame is connected with the extension top plate through a buffer spring.
10. A die bonder comprising the suction nozzle-replaceable mounting head structure of any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311252303.8A CN117080150B (en) | 2023-09-26 | 2023-09-26 | Mounting head structure with replaceable suction nozzle and die bonder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311252303.8A CN117080150B (en) | 2023-09-26 | 2023-09-26 | Mounting head structure with replaceable suction nozzle and die bonder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117080150A CN117080150A (en) | 2023-11-17 |
| CN117080150B true CN117080150B (en) | 2024-01-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311252303.8A Active CN117080150B (en) | 2023-09-26 | 2023-09-26 | Mounting head structure with replaceable suction nozzle and die bonder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117080150B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN215266212U (en) * | 2021-06-17 | 2021-12-21 | 先进光电器材（深圳）有限公司 | Automatic suction nozzle replacing device |
| CN115116904A (en) * | 2022-07-05 | 2022-09-27 | 深圳市大成自动化设备有限公司 | Double-swing-arm crystal arranging device for die bonder |
| CN115410976A (en) * | 2021-12-11 | 2022-11-29 | 微见智能封装技术(深圳)有限公司 | Suction nozzle replacement component, suction nozzle replacement method and die bonder |
| CN218556039U (en) * | 2022-09-30 | 2023-03-03 | 无锡芯智光精密科技有限公司 | Force adjusting structure for welding head of die bonder |
-
2023
- 2023-09-26 CN CN202311252303.8A patent/CN117080150B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN215266212U (en) * | 2021-06-17 | 2021-12-21 | 先进光电器材（深圳）有限公司 | Automatic suction nozzle replacing device |
| CN115410976A (en) * | 2021-12-11 | 2022-11-29 | 微见智能封装技术(深圳)有限公司 | Suction nozzle replacement component, suction nozzle replacement method and die bonder |
| CN115116904A (en) * | 2022-07-05 | 2022-09-27 | 深圳市大成自动化设备有限公司 | Double-swing-arm crystal arranging device for die bonder |
| CN218556039U (en) * | 2022-09-30 | 2023-03-03 | 无锡芯智光精密科技有限公司 | Force adjusting structure for welding head of die bonder |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117080150A (en) | 2023-11-17 |
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