CN115973562B - Semiconductor material ventilation storage equipment - Google Patents
Semiconductor material ventilation storage equipment Download PDFInfo
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- CN115973562B CN115973562B CN202211633681.6A CN202211633681A CN115973562B CN 115973562 B CN115973562 B CN 115973562B CN 202211633681 A CN202211633681 A CN 202211633681A CN 115973562 B CN115973562 B CN 115973562B
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- wall
- cabinet body
- fixedly connected
- rod
- filter screen
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 27
- 239000000463 material Substances 0.000 title claims abstract description 19
- 238000009423 ventilation Methods 0.000 title claims abstract description 8
- 230000007246 mechanism Effects 0.000 claims abstract description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000001914 filtration Methods 0.000 claims abstract description 13
- 238000007789 sealing Methods 0.000 claims abstract description 8
- 239000000428 dust Substances 0.000 claims description 47
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 6
- 238000002955 isolation Methods 0.000 claims 3
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 4
- 238000000926 separation method Methods 0.000 description 17
- 244000309464 bull Species 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 210000003437 trachea Anatomy 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention discloses a semiconductor material ventilation storage device, which relates to the technical field of semiconductor storage and comprises a cabinet body, wherein the front side of the cabinet body is hinged with a cabinet door, the side wall of the cabinet body is fixedly connected with a nitrogen machine, the output end of the nitrogen machine is communicated with the interior of the cabinet body, the lower side of the cabinet body is provided with an air outlet, the inner wall of the air outlet is fixedly connected with a first filter screen, the rear side of the outer wall of the cabinet body is positioned at the height of the first filter screen and is slidably connected with a sealing cover, the outer wall of the sealing cover is fixedly connected with an electric push rod, the other end of the electric push rod is fixedly connected with the inner wall of the cabinet body, and the side wall of the cabinet body is also provided with a filtering mechanism.
Description
Technical Field
The invention relates to the technical field of semiconductor storage, in particular to semiconductor material ventilation storage equipment.
Background
The semiconductor refers to a material with conductivity between a conductor and an insulator at normal temperature, the semiconductor is applied to the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, illumination, high-power conversion and the like, for example, a diode is a device manufactured by the semiconductor, the importance of the semiconductor is very huge from the viewpoint of technology or economic development, most of electronic products, such as core units in computers, mobile phones or digital recorders, are very closely related to the semiconductor, common semiconductor materials are silicon, germanium, gallium arsenide and the like, silicon is one of the most influencing materials in various semiconductor material applications, a chip is firstly placed on a hot plate, then the chip is fixed on the hot plate by a pressing plate, and finally the bonding wire machine is started to operate;
the conventional temporary storage device for semiconductor processing with the publication number of CN216859681U can solve the problem of avoiding dust influence during semiconductor storage, but the filter screen can cause poor filtering effect for a long time or the condition that the filter device is blocked by dust can not be found if the filter device is not checked in time, so that a device is needed to prevent the ventilation effect from being influenced by dust during use; the practicality is poor. Therefore, it is necessary to design a semiconductor material ventilated storage device having high practicability.
Disclosure of Invention
The present invention is directed to a semiconductor material ventilated storage device that solves the problems set forth in the background art above.
In order to solve the technical problems, the invention provides the following technical scheme: the utility model provides a semiconductor material ventilation storage equipment, includes the cabinet body, the front side of the cabinet body articulates there is the cabinet door, the lateral wall fixedly connected with nitrogen gas machine of the cabinet body, the output of nitrogen gas machine sets up with the inside intercommunication of the cabinet body, the air exit has been seted up to the downside of the cabinet body, the first filter screen of inner wall fixedly connected with of air exit, the outer wall rear side of the cabinet body is located the high department sliding connection of first filter screen has the closing cap, the outer wall fixedly connected with electric putter of closing cap, the other end of electric putter and the inner wall fixed connection of the cabinet body, still be equipped with filtering mechanism on the lateral wall of the cabinet body.
According to the technical scheme, filtering mechanism includes the intake pipe, the air intake has been seted up to the lateral wall of the cabinet body, the one end and the air intake intercommunication setting of intake pipe, just the outer wall of intake pipe and the inner wall fixed connection of the cabinet body, the inner wall fixedly connected with mount of intake pipe, the inner wall fixedly connected with fan of mount, the inside wall of the cabinet body still fixedly connected with temperature detect switch.
According to the technical scheme, filtering mechanism still includes the dust box, the outer wall of dust box and the outer wall fixed connection of the cabinet body, filtering mechanism still includes the bull stick, the one end of bull stick is located the inside of the cabinet body, the other end of bull stick extends to the outside of the cabinet body, the bull stick runs through the outer wall of cabinet body department and passes through the inner wall connection of torsional spring and the cabinet body, the bull stick is located the one end outer wall fixedly connected with connecting rod in the cabinet body outside, the other end fixedly connected with inserted block of connecting rod, the inserted block is pegged graft in the inside of dust box, the outer wall of inserted block and the inner wall contact of dust box, two fixed orifices have been seted up on the inserted block the fixed orifices respectively the inner wall of fixed orifices fixedly connected with second filter screen, third filter screen, the fixed orifices and the air intake intercommunication that the second filter screen is located set up, be located second filter screen department on the dust box and be the opening setting, the inner wall threaded connection that is located third filter screen department on the dust box, the downside fixedly connected with trachea with the trachea of dust box, the trachea will be connected with the inside of dust box with the trachea and the inside of dust box, the fixed part is located the change of the inside of whistle box, the fixed part is located the inside the change of the dust box.
According to the technical scheme, the replacement mechanism comprises a limiting rod, the outer wall of the limiting rod is fixedly connected with one end outer wall of the rotating rod, which is located in the cabinet body, one side, away from the rotating rod, of the outer wall of the limiting rod is not in contact with the inner wall of the cabinet body, the lower side of the limiting rod is fixedly connected with an air cavity, the inner wall of the air cavity is slidably connected with a sliding plate, the upper side of the sliding plate is fixedly connected with a supporting rod, the upper end of the supporting rod extends to the upper side of the limiting rod, a limiting ball is contacted with the upper side of the limiting rod, the outer wall of the limiting ball is fixedly connected with a spring, a spring groove is formed in the side wall of the cabinet body, the spring is located in the spring groove, the other end of the spring is fixedly connected with the inner wall of the spring groove, and one half of the limiting ball is located in the spring groove.
According to the technical scheme, the radius of the limiting ball is larger than the distance from the outer wall of the limiting rod at the limiting ball to the inner wall of the cabinet body, and the outer wall of the limiting rod is in contact with the outer wall of the limiting ball.
According to the technical scheme, the diameter of the threaded rod is larger than that of the third filter screen, the outer wall of the lower side of the insert block is not contacted with the lower side of the inner wall of the dust separation box, and the opening of the upper side of the dust separation box is consistent with the diameter of the second filter screen.
According to the technical scheme, when the limiting rod is positioned at the lower side of the limiting ball, the torsion spring at the joint of the outer wall of the rotating rod and the inner wall of the cabinet body is in a tightening state.
Compared with the prior art, the invention has the following beneficial effects: according to the invention, the cabinet body, the cabinet door and the nitrogen machine are arranged, so that the semiconductor material can be placed and stored in the cabinet body;
the fan is arranged on the inner wall of the cabinet body to prevent the semiconductor element from dedusting and cooling the interior of the cabinet body in the initial stage;
the filter mechanism is arranged, so that the device has the effect of preventing blockage when the temperature and dust of the cabinet body are reduced;
the second filter screen can be automatically replaced when the internal environment of the cabinet body is not suitable for storing materials through the replacement mechanism, and the purpose of reminding workers is achieved.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the internal structure of the present invention;
FIG. 3 is a schematic cross-sectional view of the cabinet of the present invention;
FIG. 4 is a schematic view of the construction of the dust box of the present invention;
FIG. 5 is a schematic view of the structure of an insert block of the present invention;
FIG. 6 is a schematic diagram of the structure of FIG. 3A in accordance with the present invention;
FIG. 7 is a schematic cross-sectional view of a stop ball of the present invention;
in the figure: 1 cabinet body, 2 cabinet doors, 3 nitrogen machines, 4 first filter screens, 5 sealing covers, 6 electric push rods, 7 filter mechanisms, 701 air inlet pipes, 702 fixing frames, 703 fans, 704 dust separation boxes, 705 rotating rods, 706 connecting rods, 707 inserting blocks, 708 second filter screens, 709 third filter screens, 710 screw thread covers, 711 air pipes, 712 whistles, 713 replacing mechanisms, 714 temperature control switches, 301 limiting rods, 302 air cavities, 303 sliding plates, 304 supporting rods, 305 limiting balls and 306 springs.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-7, the present invention provides the following technical solutions: the utility model provides a semiconductor material ventilation storage equipment, including the cabinet body 1, the front side of the cabinet body 1 articulates there is cabinet door 2, the lateral wall fixedly connected with nitrogen gas machine 3 of the cabinet body 1, the output of nitrogen gas machine 3 and the inside intercommunication setting of the cabinet body 1, the air exit has been seted up to the downside of the cabinet body 1, the first filter screen 4 of inner wall fixedly connected with of air exit, the outer wall rear side of the cabinet body 1 is located the high department sliding connection of first filter screen 4 has closing cap 5, the outer wall fixedly connected with electric putter 6 of closing cap 5, the other end of electric putter 6 and the inner wall fixed connection of the cabinet body 1 still are equipped with filtering mechanism 7 on the lateral wall of the cabinet body 1.
The filtering mechanism 7 comprises an air inlet pipe 701, an air inlet is formed in the side wall of the cabinet body 1, one end of the air inlet pipe 701 is communicated with the air inlet, the outer wall of the air inlet pipe 701 is fixedly connected with the inner wall of the cabinet body 1, the inner wall of the air inlet pipe 701 is fixedly connected with a fixing frame 702, the inner wall of the fixing frame 702 is fixedly connected with a fan 703, and the inner wall of the cabinet body 1 is fixedly connected with a temperature control switch 714.
The filter mechanism 7 further comprises a dust separation box 704, the outer wall of the dust separation box 704 is fixedly connected with the outer wall of the cabinet body 1, the filter mechanism 7 further comprises a rotating rod 705, one end of the rotating rod 705 is located inside the cabinet body 1, the other end of the rotating rod 705 extends to the outer side of the cabinet body 1, the outer wall of the position, penetrating through the cabinet body 1, of the rotating rod 705 is connected with the inner wall of the cabinet body 1 through a torsion spring, one end outer wall of the rotating rod 705 located on the outer side of the cabinet body 1 is fixedly connected with a connecting rod 706, the other end of the connecting rod 706 is fixedly connected with an inserting block 707, the inserting block 707 is inserted into the dust separation box 704, the outer wall of the inserting block 707 is in contact with the inner wall of the dust separation box 704, two fixing holes are formed in the inserting block 707, the inner walls of the two fixing holes are fixedly connected with a second filter screen 708 and a third filter screen 709 respectively, the fixing holes where the second filter screen 708 is located are communicated with an air inlet, the dust separation box 704 is located at an opening, the inner wall of the dust separation box 704 located at the position of the third filter screen 709 is in the position, the inner wall of the dust separation box 704 is in threaded connection with a threaded rod 710, the diameter of the threaded rod 710 is larger than the diameter of the third filter screen, the outer wall of the inserting block 707 is fixedly connected with the inner wall of the dust separation box 704, and the inner wall of the dust separation box is in contact with the dust separation box 704 is in the inner wall of the dust separation box, and the dust separation box is in contact with the dust separation box, and the dust is in the position is in contact with the dust is in the inside and the dust separation box, and has the dust is in the device.
The replacement mechanism 713 comprises a limit rod 301, the outer wall of the limit rod 301 is fixedly connected with the outer wall of one end of the rotary rod 705, which is positioned in the cabinet body 1, one side, away from the rotary rod 705, of the outer wall of the limit rod 301 is not in contact with the inner wall of the cabinet body 1, the lower side of the limit rod 301 is fixedly connected with an air cavity 302, the inner wall of the air cavity 302 is slidably connected with a sliding plate 303, the upper side of the sliding plate 303 is fixedly connected with a supporting rod 304, the upper end of the supporting rod 304 extends to the upper side of the limit rod 301, a limit ball 305 is contacted with the upper side of the limit rod 301, the radius of the limit ball 305 is larger than the distance between the outer wall of the limit rod 301 and the inner wall of the cabinet body 1 at the position of the limit ball 305, when the limit rod 301 is positioned at the lower side of the limit ball 305, a torsion spring at the joint of the outer wall of the rotary rod 705 and the inner wall of the cabinet body 1 is in a tightening state, the outer wall of the limit ball 305 is fixedly connected with a spring 306, a spring groove is arranged on the side wall of the cabinet body 1, the spring 306 is arranged on the side wall of the side of the cabinet body 306, the other end of the spring groove is fixedly connected with the inner wall of the spring groove, and one half volume of the limit ball 305 is positioned in the spring groove.
When the novel heat treatment cabinet is used, the temperature control switch 714 is electrically connected with the fan 703 and the electric push rod 6, the semiconductor material after heat treatment is placed in the cabinet body 1, then the cabinet door 2 is closed, the temperature control switch 714 can detect high temperature along with the increase of the temperature in the cabinet body 1, the electric push rod 6 can be started to shrink to drive the sealing cover 5 to move out of the area of the first filter screen 4, the sealing of the first filter screen 4 is released, meanwhile, the fan 703 is started to pump outside air into the cabinet body 1, air flow is filtered by the second filter screen 708 and enters the interior of the cabinet body 1, then dust, air and heat in the cabinet body 1 are driven to be rapidly discharged through the first filter screen 4, the cabinet body 1 is in an environment suitable for storing semiconductors, and then the electric push rod 6 is pushed to drive the sealing cover 5 to reset to seal the first filter screen 4, and meanwhile the fan 703 is closed;
the filtering capability of the second filter screen 708 is reduced after long-time use, and the air flow passing capability is also reduced, so that dust and heat in the cabinet body 1 cannot be rapidly dissipated, air in the air cavity 302 is expanded to push the limit ball 305 upwards, the limit ball 305 is retracted into the spring groove under the coextrusion of the limit rod 301 and the support rod 304, the limit rod 301 breaks through the limit of the limit ball 305, the connecting rod 706 is driven by the rotating rod 705 to rapidly deflect under the elasticity of a torsion spring at the joint of the rotating rod 705 and the cabinet body 1, the connecting rod 706 drives the plug 707 to move upwards, and the third filter screen 709 is moved to the position of the second filter screen 708 to continuously play a filtering function, so that the purpose of preventing a filtering part from being blocked is achieved;
the space between the lower side of the insert block 707 and the lower side of the inner wall of the dust box 704 is enlarged while the insert block 707 deflects upwards, so that air is pumped into the dust box 704 through the air pipe 711, and the whistle 712 is caused to make a sound to remind a worker to replace and clean the second filter screen 708;
after the second filter screen 708 is replaced, the insert 707 is only required to be pressed downwards to enable the insert 707 to be reinserted into the dust box 704, the insert 707 is reset, meanwhile, the rotating rod 705 drives the limit rod 301 to deflect to enable the limit rod 301 to rotate and reset, the limit ball 305 is extruded to enable the limit ball 305 to retract into the spring groove in the process of rotating and resetting the limit rod 301, then after the limit rod 301 moves to the lower side of the limit ball 305, the limit ball 305 is supported and reset by the elastic force of the spring 306 to limit the limit rod 301, the second filter screen 708 is enabled to be fixed and filtered again, then the third filter screen 709 is cleaned and replaced through rotating the opening threaded rod 710, and then the threaded rod 710 is reset.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present invention, and the present invention is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present invention has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. The utility model provides a semiconductor material ventilation storage equipment, includes the cabinet body (1), the front side of the cabinet body (1) articulates there is cabinet door (2), the lateral wall fixedly connected with nitrogen gas machine (3) of the cabinet body (1), the output of nitrogen gas machine (3) and the inside intercommunication setting of the cabinet body (1), the air exit has been seted up to the downside of the cabinet body (1), the inner wall fixedly connected with first filter screen (4) of air exit, its characterized in that: the novel filter is characterized in that a sealing cover (5) is slidably connected to the rear side of the outer wall of the cabinet body (1) at the height of the first filter screen (4), an electric push rod (6) is fixedly connected to the outer wall of the sealing cover (5), the other end of the electric push rod (6) is fixedly connected with the inner wall of the cabinet body (1), and a filtering mechanism (7) is further arranged on the side wall of the cabinet body (1);
the filtering mechanism (7) comprises an air inlet pipe (701), an air inlet is formed in the side wall of the cabinet body (1), one end of the air inlet pipe (701) is communicated with the air inlet, the outer wall of the air inlet pipe (701) is fixedly connected with the inner wall of the cabinet body (1), the inner wall of the air inlet pipe (701) is fixedly connected with a fixing frame (702), the inner wall of the fixing frame (702) is fixedly connected with a fan (703), and the inner wall of the cabinet body (1) is fixedly connected with a temperature control switch (714);
the filter mechanism (7) further comprises a dust isolation box (704), the outer wall of the dust isolation box (704) is fixedly connected with the outer wall of the cabinet body (1), the filter mechanism (7) further comprises a rotating rod (705), one end of the rotating rod (705) is located inside the cabinet body (1), the other end of the rotating rod (705) extends to the outer side of the cabinet body (1), the rotating rod (705) penetrates through the outer wall of the cabinet body (1) and is connected with the inner wall of the cabinet body (1) through a torsion spring, one end outer wall of the rotating rod (705) located the outer side of the cabinet body (1) is fixedly connected with a connecting rod (706), the other end of the connecting rod (706) is fixedly connected with an inserting block (707), the outer wall of the inserting block (707) is in contact with the inner wall of the dust isolation box (704), two fixing holes are formed in the inserting block (707), the inner walls of the two fixing holes are fixedly connected with a second filter screen (708) and a third filter screen (709) respectively, the second filter screen (708) is fixedly connected with the inner wall of the second filter screen (708) and the second filter screen (708) at the position of the air inlet (709) and the position at the position of the air inlet (710) is fixedly connected with the threaded box (710), the inside of the dust box (704) is communicated with the outside of the dust box (704) through the air pipe (711), a whistle (712) is fixedly connected to the inner wall of the air pipe (711), and a replacement mechanism (713) is arranged on the outer wall of one end of the rotating rod (705) positioned in the cabinet body (1);
the replacement mechanism (713) comprises a limit rod (301), the outer wall of the limit rod (301) is fixedly connected with the outer wall of one end of the inner part of the cabinet body (1) and the rotating rod (705), one side of the outer wall of the limit rod (301) away from the rotating rod (705) is not contacted with the inner wall of the cabinet body (1), the lower side of the limit rod (301) is fixedly connected with an air cavity (302), the inner wall of the air cavity (302) is slidably connected with a sliding plate (303), the upper side of the sliding plate (303) is fixedly connected with a supporting rod (304), the upper end of the supporting rod (304) extends to the upper side of the limit rod (301) and is contacted with a limit ball (305), the outer wall of the limit ball (305) is fixedly connected with a spring (306), a spring groove is formed in the side wall of the cabinet body (1), the spring (306) is positioned in the inner part of the spring groove, the other end of the spring (306) is fixedly connected with the inner wall of the spring groove, and one half of the volume of the limit ball (305) is positioned in the inner part of the spring groove.
2. The semiconductor material ventilated storage device of claim 1, wherein: the radius of the limiting ball (305) is larger than the distance between the outer wall of the limiting rod (301) at the limiting ball (305) and the inner wall of the cabinet body (1), and the outer wall of the limiting rod (301) is in contact with the outer wall of the limiting ball (305).
3. The semiconductor material ventilated storage device of claim 2, wherein: the diameter of the threaded rod (710) is larger than that of the third filter screen (709), the outer wall of the lower side of the insert block (707) is not contacted with the lower side of the inner wall of the dust box (704), and the opening of the upper side of the dust box (704) is consistent with the diameter of the second filter screen (708).
4. A semiconductor material ventilated storage device according to claim 3, wherein: when the limiting rod (301) is positioned at the lower side of the limiting ball (305), the torsion spring at the joint of the outer wall of the rotating rod (705) and the inner wall of the cabinet body (1) is in a tightening state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211633681.6A CN115973562B (en) | 2022-12-19 | 2022-12-19 | Semiconductor material ventilation storage equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211633681.6A CN115973562B (en) | 2022-12-19 | 2022-12-19 | Semiconductor material ventilation storage equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115973562A CN115973562A (en) | 2023-04-18 |
| CN115973562B true CN115973562B (en) | 2023-12-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211633681.6A Active CN115973562B (en) | 2022-12-19 | 2022-12-19 | Semiconductor material ventilation storage equipment |
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| Country | Link |
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| CN (1) | CN115973562B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112563917A (en) * | 2021-01-08 | 2021-03-26 | 南京青之白数码科技发展有限公司 | Dust protected heat dissipation switch board device suitable for building site |
| CN113904236A (en) * | 2021-10-09 | 2022-01-07 | 洛阳瑞宝文保设施科技有限公司 | Novel constant-temperature constant-humidity cabinet and working method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210129887A (en) * | 2020-04-21 | 2021-10-29 | 삼성전자주식회사 | Air cleaner having filter assembly unit |
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- 2022-12-19 CN CN202211633681.6A patent/CN115973562B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112563917A (en) * | 2021-01-08 | 2021-03-26 | 南京青之白数码科技发展有限公司 | Dust protected heat dissipation switch board device suitable for building site |
| CN113904236A (en) * | 2021-10-09 | 2022-01-07 | 洛阳瑞宝文保设施科技有限公司 | Novel constant-temperature constant-humidity cabinet and working method thereof |
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| Publication number | Publication date |
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| CN115973562A (en) | 2023-04-18 |
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Denomination of invention: Ventilation and storage equipment for semiconductor materials Granted publication date: 20231219 Pledgee: Nantong Jiangsu rural commercial bank Limited by Share Ltd. Pledgor: Jiangsu Chenda Semiconductor Technology Co.,Ltd. Registration number: Y2024980002093 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |