CN115973562A - Ventilation storage equipment for semiconductor material - Google Patents
Ventilation storage equipment for semiconductor material Download PDFInfo
- Publication number
- CN115973562A CN115973562A CN202211633681.6A CN202211633681A CN115973562A CN 115973562 A CN115973562 A CN 115973562A CN 202211633681 A CN202211633681 A CN 202211633681A CN 115973562 A CN115973562 A CN 115973562A
- Authority
- CN
- China
- Prior art keywords
- wall
- cabinet body
- fixedly connected
- rod
- filter screen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 35
- 239000000463 material Substances 0.000 title claims abstract description 22
- 238000003860 storage Methods 0.000 title claims abstract description 22
- 238000009423 ventilation Methods 0.000 title abstract description 5
- 230000007246 mechanism Effects 0.000 claims abstract description 23
- 238000001914 filtration Methods 0.000 claims abstract description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000000428 dust Substances 0.000 claims description 41
- 238000000926 separation method Methods 0.000 claims description 32
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 6
- 238000007789 sealing Methods 0.000 abstract description 5
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 5
- 238000003466 welding Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Images
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention discloses a semiconductor material ventilation storage device, which relates to the technical field of semiconductor storage and comprises a cabinet body, wherein a cabinet door is hinged to the front side of the cabinet body, a nitrogen machine is fixedly connected to the side wall of the cabinet body, the output end of the nitrogen machine is communicated with the inside of the cabinet body, an air outlet is formed in the lower side of the cabinet body, a first filter screen is fixedly connected to the inner wall of the air outlet, a sealing cover is slidably connected to the rear side of the outer wall of the cabinet body at the height of the first filter screen, an electric push rod is fixedly connected to the outer wall of the sealing cover, the other end of the electric push rod is fixedly connected with the inner wall of the cabinet body, and a filtering mechanism is further arranged on the side wall of the cabinet body.
Description
Technical Field
The invention relates to the technical field of semiconductor storage, in particular to a semiconductor material ventilation storage device.
Background
The semiconductor refers to a material with electric conductivity between a conductor and an insulator at normal temperature, and has applications in the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power conversion and the like, for example, a diode is a device manufactured by using the semiconductor, and the importance of the semiconductor is very huge from the viewpoint of science and technology or economic development, most electronic products, such as a computer, a mobile phone or a digital recorder, have very close association with the semiconductor in a core unit, common semiconductor materials include silicon, germanium, gallium arsenide and the like, silicon is the most influential one of various semiconductor material applications, when a general welding wire machine for packaging the semiconductor performs welding wire operation, a chip is firstly placed on a hot plate, then the chip is fixed on the hot plate by using a pressing plate, and finally the welding wire machine is started to perform welding wire operation, and when the semiconductor is processed, a storage device needs to be temporarily placed for the semiconductor, but the existing storage effect is not good, and after the storage device is placed in the storage device, dust cannot be guaranteed to be generated in the storage device, and the subsequent processing of the semiconductor can not be seriously influenced, so that certain loss of the semiconductor can be caused;
the temporary storage device for semiconductor processing disclosed in the prior publication No. CN216859681U can solve the problem of avoiding dust influence when storing semiconductors, but because the filter screen of the temporary storage device has a poor filtering effect for a long time or the filtering device is blocked by dust, the situation can not be found if the situation is not detected in time, and a device is needed to prevent the effect of ventilation from being influenced by dust when in use; the practicability is poor. Therefore, it is necessary to design a semiconductor material storage device with strong practicability.
Disclosure of Invention
The present invention is directed to a semiconductor material ventilated storage apparatus that solves the problems set forth in the background above.
In order to solve the technical problems, the invention provides the following technical scheme: semiconductor material ventilates and deposits equipment, the intelligent cabinet temperature adjusting device comprises a cabinet body, the front side of the cabinet body articulates there is the cabinet door, the lateral wall fixedly connected with nitrogen gas machine of the cabinet body, the output of nitrogen gas machine and the inside intercommunication setting of the cabinet body, the air exit has been seted up to the downside of the cabinet body, the first filter screen of inner wall fixedly connected with of air exit, the outer wall rear side of the cabinet body is located the high sliding connection of department of first filter screen and has the closing cap, the outer wall fixedly connected with electricity push rod of closing cap, the other end of electricity push rod and the inner wall fixed connection of the cabinet body, still be equipped with filtering mechanism on the lateral wall of the cabinet body.
According to the technical scheme, the filter mechanism comprises an air inlet pipe, the air inlet is formed in the side wall of the cabinet body, one end of the air inlet pipe is communicated with the air inlet, the outer wall of the air inlet pipe is fixedly connected with the inner wall of the cabinet body, the inner wall of the air inlet pipe is fixedly connected with a fixing frame, the inner wall of the fixing frame is fixedly connected with a fan, and the inner side wall of the cabinet body is fixedly connected with a temperature control switch.
According to the technical scheme, the filtering mechanism further comprises a dust separation box, the outer wall of the dust separation box is fixedly connected with the outer wall of the cabinet body, the filtering mechanism further comprises a rotating rod, one end of the rotating rod is located inside the cabinet body, the other end of the rotating rod extends to the outer side of the cabinet body, the outer wall of the rotating rod penetrating through the cabinet body is connected with the inner wall of the cabinet body through a torsion spring, the rotating rod is located at one end of the outer side of the cabinet body and fixedly connected with a connecting rod, the other end of the connecting rod is fixedly connected with an inserting block, the inserting block is inserted into the dust separation box, the outer wall of the inserting block is in contact with the inner wall of the dust separation box, two fixing holes and two fixing holes are formed in the inserting block, the inner walls of the fixing holes are fixedly connected with a second filter screen and a third filter screen respectively, the fixing holes where the second filter screen are located are communicated with the air inlet, the dust separation box is provided with the opening, the inner wall of the third filter screen is in threaded connection with the dust separation box, the lower side of the dust separation box is fixedly connected with an air pipe, the outer wall of the dust separation box is communicated with the outer wall of the dust separation box, the outer wall of the rotating rod, and the rotating rod is provided with a threaded rod, and one end of the rotating rod is provided with a whistle mechanism.
According to the technical scheme, the replacing mechanism comprises a limiting rod, the outer wall of the limiting rod is fixedly connected with the outer wall of one end, located inside the cabinet body, of the rotating rod, the outer wall of the limiting rod is not in contact with the inner wall of the cabinet body, one side, far away from the rotating rod, of the outer wall of the limiting rod is not in contact with the inner wall of the cabinet body, an air cavity is fixedly connected to the lower side of the limiting rod, a sliding plate is connected to the inner wall of the air cavity in a sliding mode, a supporting rod is fixedly connected to the upper side of the sliding plate, the upper end of the supporting rod extends to the upper side of the limiting rod and is in contact with a limiting ball, a spring is fixedly connected to the outer wall of the limiting ball, a spring groove is formed in the side wall of the cabinet body, the spring is located inside the spring groove, the other end of the spring is fixedly connected with the inner wall of the spring groove, and the half of the volume of the limiting ball is located inside the spring groove.
According to the technical scheme, the radius of the limiting ball is larger than the distance between the outer wall of the limiting rod at the limiting ball and the inner wall of the cabinet body, and the outer wall of the limiting rod is in contact with the outer wall of the limiting ball.
According to the technical scheme, the diameter of threaded rod is greater than the diameter of third filter screen, just the downside outer wall of inserted block and the inner wall downside that separates the dirt box contactless, it is unanimous with the diameter of second filter screen to separate the upside opening part of dirt box.
According to the technical scheme, when the limiting rod is located at the lower side of the limiting ball, the torsion spring at the joint of the outer wall of the rotating rod and the inner wall of the cabinet body is in a tightening state.
Compared with the prior art, the invention has the following beneficial effects: the semiconductor material storage cabinet is provided with the cabinet body, the cabinet door and the nitrogen machine, so that the semiconductor material can be placed and stored in the cabinet body;
the fan can prevent the semiconductor element from performing dust removal and cooling work on the interior of the cabinet body at the initial stage on the inner wall of the cabinet body;
the filtering mechanism can prevent blockage when the device is used for cooling and dedusting the interior of the cabinet body;
through being provided with change mechanism can reach when the unsuitable material of depositing of cabinet body internal environment, change the second filter screen by oneself to remind staff's purpose.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic view of the internal structure of the present invention;
FIG. 3 is a schematic sectional view of the cabinet of the present invention;
FIG. 4 is a schematic structural view of the dust box of the present invention;
FIG. 5 is a schematic view of the structure of the insert of the present invention;
FIG. 6 is a schematic diagram of the structure of A in FIG. 3 according to the present invention;
FIG. 7 is a schematic cross-sectional view of the position limiting ball according to the present invention;
in the figure: 1 cabinet body, 2 cabinet doors, 3 nitrogen machine, 4 first filter screens, 5 covers, 6 electric push rods, 7 filter mechanisms, 701 air inlet pipes, 702 fixing frames, 703 fans, 704 dust isolation boxes, 705 rotating rods, 706 connecting rods, 707 inserting blocks, 708 second filter screens, 709 third filter screens, 710 threaded covers, 711 air pipes, 712 whistles, 713 replacement mechanisms, 714 temperature control switches, 301 limiting rods, 302 air chambers, 303 sliding plates, 304 supporting rods, 305 limiting balls and 306 springs.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Referring to fig. 1-7, the present invention provides the following technical solutions: semiconductor material ventilates and deposits equipment, including the cabinet body 1, the front side of the cabinet body 1 articulates there is cabinet door 2, the lateral wall fixedly connected with nitrogen gas machine 3 of the cabinet body 1, the output of nitrogen gas machine 3 and the inside intercommunication setting of the cabinet body 1, the air exit has been seted up to the downside of the cabinet body 1, the first filter screen 4 of inner wall fixedly connected with of air exit, the high department sliding connection who locates at first filter screen 4 of the outer wall rear side of the cabinet body 1 has closing cap 5, the outer wall fixedly connected with electric push rod 6 of closing cap 5, the other end of electric push rod 6 and the inner wall fixed connection of the cabinet body 1, still be equipped with filter mechanism 7 on the lateral wall of the cabinet body 1.
The filtering mechanism 7 comprises an air inlet pipe 701, an air inlet is formed in the side wall of the cabinet body 1, one end of the air inlet pipe 701 is communicated with the air inlet, the outer wall of the air inlet pipe 701 is fixedly connected with the inner wall of the cabinet body 1, a fixing frame 702 is fixedly connected with the inner wall of the air inlet pipe 701, a fan 703 is fixedly connected with the inner wall of the fixing frame 702, and a temperature control switch 714 is fixedly connected with the inner side wall of the cabinet body 1.
The filtering mechanism 7 further comprises a dust separation box 704, the outer wall of the dust separation box 704 is fixedly connected with the outer wall of the cabinet body 1, the filtering mechanism 7 further comprises a rotating rod 705, one end of the rotating rod 705 is positioned inside the cabinet body 1, the other end of the rotating rod 705 extends to the outer side of the cabinet body 1, the outer wall of the rotating rod 705 penetrating through the cabinet body 1 is connected with the inner wall of the cabinet body 1 through a torsion spring, the outer wall of the rotating rod 705 at the end positioned outside the cabinet body 1 is fixedly connected with a connecting rod 706, the other end of the connecting rod 706 is fixedly connected with an insert block 707, the insert block 707 is inserted inside the dust separation box 704, the outer wall of the insert block 707 is contacted with the inner wall of the dust separation box 704, two fixing holes are formed in the insert block 707, the inner walls of the two fixing holes are respectively and fixedly connected with a second filter screen 708 and a third filter screen 709, the fixing hole where the second filter screen 708 is located is communicated with the air inlet, the position, located at the second filter screen 708, of the dust separation box 704 is provided with an opening, the inner wall, located at the third filter screen 709, of the dust separation box 704 is connected with a threaded rod 710 in a threaded manner, the diameter of the threaded rod 710 is larger than that of the third filter screen 709, the outer wall of the lower side of the insert block 707 is not in contact with the lower side of the inner wall of the dust separation box 704, the opening at the upper side of the dust separation box 704 is consistent with that of the second filter screen 708, an air pipe 711 is fixedly connected to the lower side of the dust separation box 704, the interior of the dust separation box 704 is communicated with the outer side of the dust separation box 704 through the air pipe 711, a whistle 712 is fixedly connected to the inner wall of the air pipe 711, and a replacing mechanism 713 is arranged on the outer wall of one end, located inside the cabinet body 1, of the rotating rod 705.
The replacing mechanism 713 comprises a limiting rod 301, the outer wall of the limiting rod 301 is fixedly connected with the outer wall of one end, located inside the cabinet body 1, of the rotating rod 705, the outer wall of the limiting rod 301 is not in contact with the inner wall of the cabinet body 1, the lower side of the limiting rod 301 is fixedly connected with an air cavity 302, the inner wall of the air cavity 302 is connected with a sliding plate 303 in a sliding mode, the upper side of the sliding plate 303 is fixedly connected with a supporting rod 304, the upper end of the supporting rod 304 extends to the upper side of the limiting rod 301 to be in contact with a limiting ball 305, the radius of the limiting ball 305 is larger than the distance between the outer wall of the limiting rod 301 and the inner wall of the cabinet body 1, the outer wall of the limiting rod 301 is in contact with the outer wall of the limiting ball 305, when the limiting rod 301 is located at the lower side of the limiting ball 305, the torsion spring at the joint of the outer wall of the rotating rod 705 and the inner wall of the cabinet body 1 is in a tightened state, the outer wall of the limiting ball 305 is fixedly connected with a spring 306, the spring groove has been formed in the side wall of the cabinet body 1, the spring 306 is located inside of the spring groove, the spring 306 is located inside the spring groove, the spring 306 is located at the other end of the spring groove, the other end of the spring 306 is fixedly connected with the inner wall of the spring groove, and the spring groove is located in half of the spring groove, and the spring 305.
When the temperature control switch 714 and the fan 703 are used, the electric push rod 6 is electrically connected, the semiconductor material after heat treatment is placed inside the cabinet body 1, then the cabinet door 2 is closed, the temperature control switch 714 can detect high temperature along with the temperature rise inside the cabinet body 1, the electric push rod 6 can be started to shrink, the sealing cover 5 is driven to move out of the area of the first filter screen 4, the sealing of the first filter screen 4 is released, meanwhile, the fan 703 is started to pump outside air into the cabinet body 1, airflow enters the cabinet body 1 after being filtered by the second filter screen 708, then, dust, air and heat inside the cabinet body 1 are driven to be rapidly discharged through the first filter screen 4, the inside of the cabinet body 1 is in an environment suitable for storing semiconductors, then, the electric push rod 6 pushes the sealing cover 5 to reset to seal the first filter screen 4, and meanwhile, the fan 703 is closed;
after long-time use, the filtering capacity of the second filter screen 708 is reduced, and the air flow passing capacity is also reduced, so that dust and heat in the cabinet body 1 cannot be quickly dissipated, air in the air cavity 302 expands to push the limiting ball 305 upwards, the limiting ball 305 retracts into the spring groove under the joint extrusion of the limiting rod 301 and the support rod 304, the limiting rod 301 breaks through the limit of the limiting ball 305, the rotating rod 705 drives the connecting rod 706 to quickly deflect under the elastic force of a torsion spring at the joint of the rotating rod 705 and the cabinet body 1, the connecting rod 706 drives the insert block 707 to move upwards, the third filter screen 709 moves to the position of the second filter screen 708 to continue to perform a filtering function, and the purpose of preventing the filtering position from being blocked is achieved;
when the insert block 707 deflects upwards, the space between the lower side of the insert block 707 and the lower side of the inner wall of the dust separation box 704 is enlarged, so that air is pumped into the dust separation box 704 through the air pipe 711, and the whistle 712 makes a sound to remind a worker to replace and clean the second filter screen 708;
after the second filter screen 708 is replaced, the insert block 707 is only required to be pressed downwards to enable the insert block 707 to be inserted back into the dust separation box 704 again, when the insert block 707 resets, the rotating rod 705 can drive the limiting rod 301 to deflect, the limiting rod 301 is enabled to rotate to reset, the limiting ball 305 can be pressed in the rotating and resetting process of the limiting rod 301 to enable the limiting ball 305 to be retracted into the spring groove, then the limiting rod 301 moves to the lower side of the limiting ball 305, the limiting ball 305 is supported by the elastic force of the spring 306 to reset to limit the limiting rod 301, the second filter screen 708 is fixed and filtered again, then the third filter screen 709 is cleaned and replaced through the rotating opening threaded rod 710, and then the threaded rod 710 is reset.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described above, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. Semiconductor material ventilates and deposits equipment, including the cabinet body (1), the front side of the cabinet body (1) articulates there is cabinet door (2), the lateral wall fixedly connected with nitrogen gas machine (3) of the cabinet body (1), the output of nitrogen gas machine (3) and the inside intercommunication setting of the cabinet body (1), the air exit has been seted up to the downside of the cabinet body (1), the first filter screen of inner wall fixedly connected with (4) of air exit, its characterized in that: the utility model discloses a high filter screen of the cabinet body (1) is characterized in that the outer wall rear side of the cabinet body is located the high sliding connection of department of first filter screen (4) has closing cap (5), the outer wall fixedly connected with electric push rod (6) of closing cap (5), the other end of electric push rod (6) and the inner wall fixed connection of the cabinet body (1), still be equipped with filtering mechanism (7) on the lateral wall of the cabinet body (1).
2. The ventilated semiconductor material storage device of claim 1, wherein: filtering mechanism (7) include intake pipe (701), the air intake has been seted up to the lateral wall of the cabinet body (1), the one end and the air intake intercommunication setting of intake pipe (701), just the outer wall of intake pipe (701) and the inner wall fixed connection of the cabinet body (1), the inner wall fixedly connected with mount (702) of intake pipe (701), the inner wall fixedly connected with fan (703) of mount (702), the inside wall of the cabinet body (1) is fixedly connected with temperature detect switch (714) still.
3. A semiconductor material ventilated storage apparatus according to claim 2, wherein: the filtering mechanism (7) further comprises a dust separation box (704), the outer wall of the dust separation box (704) is fixedly connected with the outer wall of the cabinet body (1), the filtering mechanism (7) further comprises a rotating rod (705), one end of the rotating rod (705) is positioned in the cabinet body (1), the other end of the rotating rod (705) extends to the outer side of the cabinet body (1), the rotating rod (705) penetrates through the outer wall of the cabinet body (1) and is connected with the inner wall of the cabinet body (1) through a torsion spring, the rotating rod (705) is positioned at one end outer wall of the outer side of the cabinet body (1) and is fixedly connected with a connecting rod (706), the other end of the connecting rod (706) is fixedly connected with an insert block (707), the insert block (707) is inserted in the dust separation box (704), the outer wall of the insert block (707) is in contact with the inner wall of the dust separation box (704), two fixing holes are formed in the insert block (707), the inner walls of the two fixing holes are respectively and are fixedly connected with a second filter screen (709) and a third filter screen (708), the fixing hole is communicated with an air inlet (708), and is positioned at the lower side of the dust separation box (708), the interior of the dust separation box (704) and the outer side of the dust separation box (704) are communicated through the air pipe (711), a whistle (712) is fixedly connected to the inner wall of the air pipe (711), and a replacing mechanism (713) is arranged on the outer wall of one end, located inside the cabinet body (1), of the rotating rod (705).
4. A semiconductor material ventilated storage apparatus according to claim 3, wherein: the replacement mechanism (713) comprises a limiting rod (301), the outer wall of the limiting rod (301) is fixedly connected with the outer wall of one end of the cabinet body (1) through a rotating rod (705), one side, away from the rotating rod (705), of the outer wall of the limiting rod (301) is not in contact with the inner wall of the cabinet body (1), the lower side of the limiting rod (301) is fixedly connected with an air cavity (302), the inner wall of the air cavity (302) is connected with a sliding plate (303), the upper side of the sliding plate (303) is fixedly connected with a supporting rod (304), the upper end of the supporting rod (304) extends to the upper side of the limiting rod (301) to be contacted with a limiting ball (305), the outer wall of the limiting ball (305) is fixedly connected with a spring (306), a spring groove is formed in the side wall of the cabinet body (1), the spring (306) is located inside the spring groove, the other end of the spring (306) is fixedly connected with the inner wall of the spring groove, and the half volume of the limiting ball (305) is located inside the spring groove.
5. The ventilated semiconductor material storage device of claim 4, wherein: the radius of the limiting ball (305) is greater than the distance between the outer wall of the limiting rod (301) at the limiting ball (305) and the inner wall of the cabinet body (1), and the outer wall of the limiting rod (301) is in contact with the outer wall of the limiting ball (305).
6. The ventilated semiconductor material storage device of claim 5, wherein: the diameter of threaded rod (710) is greater than the diameter of third filter screen (709), just the downside outer wall of inserted block (707) does not contact with the inner wall downside of dust separation box (704), the diameter of dust separation box (704) upside opening part and second filter screen (708) is unanimous.
7. The ventilated semiconductor material storage device of claim 6, wherein: when the limiting rod (301) is located at the lower side of the limiting ball (305), the torsion spring at the joint of the outer wall of the rotating rod (705) and the inner wall of the cabinet body (1) is in a tightening state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211633681.6A CN115973562B (en) | 2022-12-19 | 2022-12-19 | Semiconductor material ventilation storage equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211633681.6A CN115973562B (en) | 2022-12-19 | 2022-12-19 | Semiconductor material ventilation storage equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115973562A true CN115973562A (en) | 2023-04-18 |
| CN115973562B CN115973562B (en) | 2023-12-19 |
Family
ID=85960702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211633681.6A Active CN115973562B (en) | 2022-12-19 | 2022-12-19 | Semiconductor material ventilation storage equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115973562B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112563917A (en) * | 2021-01-08 | 2021-03-26 | 南京青之白数码科技发展有限公司 | Dust protected heat dissipation switch board device suitable for building site |
| US20210325063A1 (en) * | 2020-04-21 | 2021-10-21 | Samsung Electronics Co., Ltd. | Filter device and air cleaner having the same |
| CN113904236A (en) * | 2021-10-09 | 2022-01-07 | 洛阳瑞宝文保设施科技有限公司 | Novel constant-temperature constant-humidity cabinet and working method thereof |
-
2022
- 2022-12-19 CN CN202211633681.6A patent/CN115973562B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20210325063A1 (en) * | 2020-04-21 | 2021-10-21 | Samsung Electronics Co., Ltd. | Filter device and air cleaner having the same |
| CN112563917A (en) * | 2021-01-08 | 2021-03-26 | 南京青之白数码科技发展有限公司 | Dust protected heat dissipation switch board device suitable for building site |
| CN113904236A (en) * | 2021-10-09 | 2022-01-07 | 洛阳瑞宝文保设施科技有限公司 | Novel constant-temperature constant-humidity cabinet and working method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115973562B (en) | 2023-12-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111525418B (en) | Heat dissipation box and cubical switchboard | |
| CN109412042A (en) | A kind of outdoor intelligent electrical equipment control cabinet and its anti-theft alarm system | |
| CN115973562A (en) | Ventilation storage equipment for semiconductor material | |
| CN207070552U (en) | A kind of erecting device of power supply timing management device | |
| CN211743834U (en) | Novel compact drawer type electric appliance cabinet device | |
| CN114537864B (en) | Electronic product storage box with dampproofing function | |
| CN111952860A (en) | Wireless network intelligent low-voltage electrical control cabinet device | |
| CN214014707U (en) | Chemical instrument regulator cubicle | |
| CN215542935U (en) | Heat dissipation dust collecting equipment for household appliances | |
| CN212812361U (en) | Totally-enclosed control cabinet | |
| CN209845494U (en) | Easy-to-remove-dust and heat-dissipation display shell | |
| CN210386826U (en) | Small electrostatic dust removing box | |
| CN213692825U (en) | Block terminal with drying function | |
| CN207604069U (en) | A kind of group of switches | |
| CN218770849U (en) | Power distribution switch control equipment | |
| CN112469232B (en) | Outdoor intelligent rack of high leakproofness | |
| CN213462589U (en) | Data acquisition device for computer network engineering | |
| CN221574644U (en) | Cooling device of electric control cabinet | |
| CN111564769A (en) | High leakproofness switch board | |
| CN207801271U (en) | A kind of heat radiating type box type metal closed looped network switch equipment | |
| CN217362300U (en) | High-efficient heat dissipation type switch board | |
| CN213989726U (en) | Waterproof distribution box | |
| CN213937732U (en) | High-voltage frequency conversion bypass cabinet with dampproofing function | |
| CN214069947U (en) | Intelligent gateway with backup power supply | |
| CN213214143U (en) | PLC control box with dustproof effect |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Ventilation and storage equipment for semiconductor materials Granted publication date: 20231219 Pledgee: Nantong Jiangsu rural commercial bank Limited by Share Ltd. Pledgor: Jiangsu Chenda Semiconductor Technology Co.,Ltd. Registration number: Y2024980002093 |