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CN115683576A - A detection device and method for an optical coupling device - Google Patents

A detection device and method for an optical coupling device Download PDF

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CN115683576A
CN115683576A CN202211687687.1A CN202211687687A CN115683576A CN 115683576 A CN115683576 A CN 115683576A CN 202211687687 A CN202211687687 A CN 202211687687A CN 115683576 A CN115683576 A CN 115683576A
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optical
coupling device
test light
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CN115683576B (en
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赵欣瑞
于彪
朱洪波
董一甲
宁永强
林星辰
刘云
王立军
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

本发明涉及一种光耦合器件检测装置及方法,光耦合器件的检测装置包括光耦合器、第一透镜、第二透镜、光束质量分析仪以及处理单元;光耦合器用于产生测试光,第一透镜用于对测试光进行准直,第二透镜用于对经过准直后的测试光进行收束;光束质量分析仪用于获取收束后的测试光在不同光路位置处的远场光分布图,并发送至处理单元;处理单元用于对多张不同光路位置处的远场光分布图进行计算,得到测试光在远场传播中的角功率变化率。利用角功率变化率对光耦合器件中发生的模式转换过程进行定量评估,无需分析内部切面,从而为光耦合器件的光束整形能力提供一个定量评估标准,也为光耦合器件输出模式的控制提供了更多参考信息。

Figure 202211687687

The invention relates to a detection device and method for an optical coupling device. The detection device of the optical coupling device includes an optical coupler, a first lens, a second lens, a beam quality analyzer and a processing unit; the optical coupler is used to generate test light, and the first The lens is used to collimate the test light, and the second lens is used to condense the collimated test light; the beam quality analyzer is used to obtain the far-field light distribution of the condensed test light at different optical path positions and send it to the processing unit; the processing unit is used to calculate the far-field light distribution maps at different optical path positions to obtain the angular power change rate of the test light in the far-field propagation. The angular power change rate is used to quantitatively evaluate the mode conversion process in the optical coupling device, without analyzing the internal section, so as to provide a quantitative evaluation standard for the beam shaping ability of the optical coupling device, and also provides a basis for the control of the output mode of the optical coupling device. More reference information.

Figure 202211687687

Description

一种光耦合器件的检测装置及方法A detection device and method for an optical coupling device

技术领域technical field

本申请涉及半导体激光耦合领域,具体涉及一种光耦合器件的检测装置及方法。The present application relates to the field of semiconductor laser coupling, in particular to a detection device and method for an optical coupling device.

背景技术Background technique

以光子灯笼为代表的光耦合器与光波导耦合器件在光合束与光整形领域得到了广泛的应用。在利用光耦合器件得到大功率激光时,一般都伴随对激光模式的整形,以提高期待的模式在输出光中的功率占比。在实际研究中,一般通过评价光束质量或光束轮廓来评估光耦合器件的模式整形性能。在此过程中,由于功率增大导致的非线性效应与横模震荡是评估光耦合器件中发生的能量转换过程的一个严重阻碍。而通过单纯评价输出光质量的方式来评估光耦合器件的性能,其性能对环境与弯曲扭曲条件影响较为敏感,并且对光耦合器件中的模式转换过程缺乏关注。Optical couplers and optical waveguide coupling devices represented by photonic lanterns have been widely used in the fields of light combining and light shaping. When using an optical coupling device to obtain a high-power laser, it is generally accompanied by shaping the laser mode to increase the power ratio of the expected mode in the output light. In practical research, the mode shaping performance of optical coupling devices is generally evaluated by evaluating beam quality or beam profile. In this process, nonlinear effects and transverse mode oscillations due to power increase are a serious obstacle to evaluate the energy conversion process occurring in optocoupler devices. However, the performance of the optical coupling device is evaluated by simply evaluating the quality of the output light, and its performance is sensitive to the influence of the environment and bending and twisting conditions, and the mode conversion process in the optical coupling device lacks attention.

因此,亟需一种基于对输出光的分析实现对光耦合器中发生的光耦合过程进行评估的方案,该方案能够很好的描述光耦合器件的模式转换性能,表征光耦合器件的模式整形潜力。将降低光耦合器性能优化难度,为提高光耦合器件模式转化效率提供更多可能。Therefore, there is an urgent need for a scheme based on the analysis of the output light to realize the evaluation of the optical coupling process in the optocoupler. This scheme can well describe the mode conversion performance of the optocoupler device and characterize the mode shaping of the optocoupler device. potential. It will reduce the difficulty of optocoupler performance optimization and provide more possibilities for improving the mode conversion efficiency of optocoupler devices.

发明内容Contents of the invention

鉴于上述问题,本申请提供了一种光耦合器件的检测装置及方法,解决了现有技术中单纯评价输出光质量,对光耦合器件中的模式转换过程缺乏评估的问题。In view of the above problems, the present application provides a detection device and method for an optical coupling device, which solves the problem in the prior art that simply evaluates the output light quality and lacks evaluation of the mode conversion process in the optical coupling device.

为实现上述目的,在第一方面,本发明提供了一种光耦合器件的检测装置,包括光耦合器、第一透镜、第二透镜、光束质量分析仪、滑动组件以及处理单元;光耦合器具有输出端,光束质量分析仪具有接收端,滑动组件包括滑槽以及滑块,光束质量分析仪设置于滑块上,滑块可在滑槽内移动;光耦合器、第一透镜、第二透镜、光束质量分析仪沿光路方向依次设置,且光耦合器的输出端的中心点、第一透镜的中心点、第二透镜的中心点以及光束质量分析仪的接收端的中心点位于同一中心轴线上,滑槽的槽向轴线与中心轴线位于同一竖直平面内,处理单元与光束质量分析仪电连接;To achieve the above object, in a first aspect, the present invention provides a detection device for an optical coupling device, including an optical coupler, a first lens, a second lens, a beam quality analyzer, a sliding assembly and a processing unit; the optical coupler has an output end, the beam quality analyzer has a receiving end, the sliding assembly includes a chute and a slider, the beam quality analyzer is arranged on the slider, and the slider can move in the chute; the optical coupler, the first lens, the second The lens and the beam quality analyzer are arranged in sequence along the direction of the optical path, and the center point of the output end of the optical coupler, the center point of the first lens, the center point of the second lens and the center point of the receiving end of the beam quality analyzer are located on the same central axis , the trough axis of the chute is located in the same vertical plane as the central axis, and the processing unit is electrically connected to the beam quality analyzer;

光耦合器用于产生测试光,测试光经由光耦合器的输出端发出;第一透镜用于对测试光进行准直,第二透镜用于对经过准直后的测试光进行收束;光束质量分析仪用于获取收束后的测试光在不同光路位置处的远场光横模图案分布图,并将多张不同光路位置处的远场光分布图发送至处理单元;处理单元用于对多张不同光路位置处的远场光分布图进行计算,得到测试光在远场传播中的角功率变化率。The optical coupler is used to generate test light, and the test light is sent out through the output end of the optical coupler; the first lens is used to collimate the test light, and the second lens is used to converge the collimated test light; the beam quality The analyzer is used to obtain the far-field light transverse mode pattern distribution diagram of the beamed test light at different optical path positions, and send multiple far-field light distribution diagrams at different optical path positions to the processing unit; the processing unit is used to analyze The far-field light distribution diagrams at different optical path positions are calculated to obtain the angular power change rate of the test light in the far-field propagation.

在一些实施例中,第一透镜的中心点与光耦合器的输出端的距离在第一预设范围内。In some embodiments, the distance between the center point of the first lens and the output end of the optical coupler is within a first preset range.

在一些实施例中,滑槽的外侧壁上还设有多个刻度线,相邻的两个刻度线的间距沿光路传播方向按照第一预设梯度逐渐增大,刻度线用于标记光束质量分析仪在滑槽中的位置。In some embodiments, a plurality of scale marks are provided on the outer wall of the chute, and the distance between two adjacent scale marks gradually increases along the propagation direction of the optical path according to the first preset gradient, and the scale marks are used to mark the beam quality. The position of the analyzer in the chute.

在一些实施例中,光耦合器的输出端与滑槽上距离最近的刻度线之间的距离在第二预设范围内;和/或,距离光耦合器的输出端最远的一侧的刻度线与第二透镜之间距离为第二透镜的焦距。In some embodiments, the distance between the output end of the optical coupler and the nearest scale mark on the chute is within a second preset range; and/or, the distance between the output end of the optical coupler and the farthest side The distance between the scale line and the second lens is the focal length of the second lens.

在一些实施例中,检测装置还包括法兰固定平台以及法兰接头,光耦合器的输出端通过法兰接头固定在法兰固定平台上。In some embodiments, the detection device further includes a flange fixing platform and a flange joint, and the output end of the optical coupler is fixed on the flange fixing platform through the flange joint.

在第二方面,本发明还提供一种光耦合器件的检测方法,应用于第一方面所述的光耦合器件的检测装置,方法包括以下步骤:In the second aspect, the present invention also provides a detection method of an optical coupling device, which is applied to the detection device of the optical coupling device described in the first aspect, and the method includes the following steps:

光耦合器的输出端发出测试光;The output terminal of the optocoupler emits test light;

第一透镜对测试光进行准直;The first lens collimates the test light;

第二透镜对经过准直后的测试光进行收束;The second lens converges the collimated test light;

光束质量分析仪获取收束后的测试光在不同光路位置处的远场光分布图,并将多张不同光路位置处的远场光分布图发送至处理单元;The beam quality analyzer obtains the far-field light distribution diagrams of the converged test light at different optical path positions, and sends multiple far-field light distribution diagrams at different optical path positions to the processing unit;

处理单元对多张不同光路位置处的远场光分布图进行计算,得到测试光在远场传播中的角功率变化率。The processing unit calculates the far-field light distribution diagrams at different optical path positions, and obtains the angular power change rate of the test light in the far-field propagation.

在一些实施例中,处理单元对多张不同光路位置处的远场光分布图进行计算,得到测试光在远场传播中的角功率变化率,具体包括以下步骤:In some embodiments, the processing unit calculates the far-field light distribution diagrams at different optical path positions to obtain the angular power change rate of the test light in the far-field propagation, which specifically includes the following steps:

获取远场光分布图;Obtain the far-field light distribution map;

对远场光分布图进行图像灰度处理,获得全图灰度值分布矩阵;Perform image grayscale processing on the far-field light distribution map to obtain the gray value distribution matrix of the whole image;

对全图灰度值分布矩阵进行第一计算,获得角功率分布方差;Perform the first calculation on the gray value distribution matrix of the whole image to obtain the variance of the angular power distribution;

利用角功率分布方差进行第二计算,获得角功率变化率。The second calculation is performed by using the variance of the angular power distribution to obtain the rate of change of the angular power.

在一些实施例中,第一计算由公式(1)得到,公式(1)如下:In some embodiments, the first calculation is obtained by formula (1), which is as follows:

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(1)
Figure 564557DEST_PATH_IMAGE001
(1)

其中,

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为角功率分布方差,
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为不同位置(i)处的远场光分布图的角功率分布方差,
Figure 700506DEST_PATH_IMAGE004
为读取出的灰度矩阵中的数值元素,
Figure 787410DEST_PATH_IMAGE005
为读取出的灰度矩阵中的数值元素平均值,
Figure 402063DEST_PATH_IMAGE006
为灰度值
Figure 574418DEST_PATH_IMAGE007
在灰度矩阵中出现的概率,L为灰度矩阵中元素数目。in,
Figure 70624DEST_PATH_IMAGE002
is the variance of the angular power distribution,
Figure 21263DEST_PATH_IMAGE003
is the angular power distribution variance of the far-field light distribution pattern at different positions (i),
Figure 700506DEST_PATH_IMAGE004
is the numerical element in the read grayscale matrix,
Figure 787410DEST_PATH_IMAGE005
is the average value of the numerical elements in the read grayscale matrix,
Figure 402063DEST_PATH_IMAGE006
is the gray value
Figure 574418DEST_PATH_IMAGE007
The probability of appearing in the grayscale matrix, L is the number of elements in the grayscale matrix.

在一些实施例中,第二计算由公式(2)得到,公式(2)如下:In some embodiments, the second calculation is obtained by formula (2), which is as follows:

Figure 995035DEST_PATH_IMAGE008
(2)
Figure 995035DEST_PATH_IMAGE008
(2)

其中,

Figure 264342DEST_PATH_IMAGE009
为所求输出光在远场传播中的角功率变化率,l、1.5l、2.5l、3.5l为沿光路方向不同位置所对应的相邻刻度线之间的间距,其中l为预设单位距离,
Figure 112213DEST_PATH_IMAGE010
为不同位置(i)处的远场光分布图的角功率分布方差。in,
Figure 264342DEST_PATH_IMAGE009
is the angular power change rate of the output light in the far-field propagation, l , 1.5 l , 2.5 l , and 3.5 l are the distances between adjacent scale marks corresponding to different positions along the optical path direction, where l is the preset unit distance,
Figure 112213DEST_PATH_IMAGE010
is the angular power distribution variance of the far-field light distribution map at different positions (i).

区别于现有技术,上述技术方案通过在不同位置获取不同的远场光分布图,再根据多张远场光分布图计算出角功率变化率,利用角功率变化率对光耦合器件中发生的模式转换过程进行定量评估,定量评估具体包括通过CCD获取不同位置处的远场光斑,对光斑进行灰度处理后求解角功率分布方差(按公式(1)计算)数值。计算多个位置处的角功率分布方差,除以距离差,计算角功率分布方差随距离的变化率,得到的参数可以表征光耦合器件中发生的模式转换过程,数值越大,则高阶模占比越高,而且模式更不稳定,即该光耦合器件实现光耦合得到基模光的能力越差。无需分析内部切面,内部切面具体表示光耦合器件内部不同位置。无需分析内部切面即不需要在光耦合器件内部不同位置处探测光场分布来分析光耦合过程,直接通过远场光场角功率分布方差变化率就可以表征这一过程发生的程度。变化率越大,该光耦合器件进行光耦合得到基模光的能力越差。从而为光耦合器件的光束整形能力提供一个定量评估标准,也为光耦合器件输出模式的控制提供了更多参考信息。Different from the existing technology, the above technical solution obtains different far-field light distribution diagrams at different positions, and then calculates the angular power change rate according to multiple far-field light distribution diagrams, and uses the angular power change rate to analyze the optical coupling device. The mode conversion process is quantitatively evaluated. The quantitative evaluation specifically includes obtaining the far-field spots at different positions through the CCD, and calculating the variance of the angular power distribution (calculated according to formula (1)) after grayscale processing of the spots. Calculate the variance of the angular power distribution at multiple positions, divide it by the distance difference, and calculate the rate of change of the variance of the angular power distribution with the distance. The obtained parameters can represent the mode conversion process that occurs in the optical coupling device. The larger the value, the higher the proportion of the higher-order mode The higher the value is, the more unstable the mode is, that is, the poorer the ability of the optical coupling device to achieve optical coupling to obtain fundamental mode light. There is no need to analyze internal cut planes, which specifically represent different positions inside the optocoupler device. There is no need to analyze the internal section, that is, it is not necessary to detect the optical field distribution at different positions inside the optical coupling device to analyze the optical coupling process, and the degree of this process can be characterized directly by the variance change rate of the far-field optical field angular power distribution. The greater the rate of change, the worse the ability of the optical coupling device to perform optical coupling to obtain fundamental mode light. So as to provide a quantitative evaluation standard for the beam shaping ability of the optical coupling device, and also provide more reference information for the control of the output mode of the optical coupling device.

上述发明内容相关记载仅是本申请技术方案的概述,为了让本领域普通技术人员能够更清楚地了解本申请的技术方案,进而可以依据说明书的文字及附图记载的内容予以实施,并且为了让本申请的上述目的及其它目的、特征和优点能够更易于理解,以下结合本申请的具体实施方式及附图进行说明。The relevant descriptions of the above-mentioned content of the invention are only an overview of the technical solution of the present application. In order to allow those skilled in the art to understand the technical solution of the application more clearly, it can be implemented according to the text of the description and the content recorded in the drawings, and in order to let those skilled in the art The above purpose and other purposes, features and advantages of the present application can be more easily understood, and will be described below in conjunction with specific implementation methods and accompanying drawings of the present application.

附图说明Description of drawings

附图仅用于示出本发明具体实施方式以及其他相关内容的原理、实现方式、应用、特点以及效果等,并不能认为是对本申请的限制。The accompanying drawings are only used to illustrate the principles, implementations, applications, features and effects of specific embodiments of the present invention and other related content, and should not be considered as limiting the present application.

在说明书附图中:In the accompanying drawings of the manual:

图1为本发明一具体实施方式所述光耦合器件检测装置示意图;Fig. 1 is a schematic diagram of an optical coupling device detection device according to a specific embodiment of the present invention;

图2为本发明第一示例性实施例所述检测方法步骤图;Fig. 2 is a step diagram of the detection method described in the first exemplary embodiment of the present invention;

图3为本发明第二示例性实施例所述检测方法步骤图。Fig. 3 is a step diagram of the detection method according to the second exemplary embodiment of the present invention.

其中的附图标记包括:1、光耦合器;2、第一透镜;3、第二透镜;4、光束质量分析仪;51、滑槽;511、刻度;52、滑块;6、法兰固定平台;D1、第一预设范围;D2、第二预设范围;D3、第二透镜的焦距;A1、第一间距;A2、第二间距;A3、第三间距;A4、第四间距。The reference signs include: 1, optical coupler; 2, first lens; 3, second lens; 4, beam quality analyzer; 51, chute; 511, scale; 52, slider; 6, flange Fixed platform; D1, the first preset range; D2, the second preset range; D3, the focal length of the second lens; A1, the first distance; A2, the second distance; A3, the third distance; A4, the fourth distance .

具体实施方式Detailed ways

在下文中,将参考附图描述本发明的实施例。在下面的描述中,相同的模块使用相同的附图标记表示。在相同的附图标记的情况下,它们的名称和功能也相同。因此,将不重复其详细描述。Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, the same blocks are denoted by the same reference numerals. With the same reference numerals, their names and functions are also the same. Therefore, its detailed description will not be repeated.

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及具体实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅用以解释本发明,而不构成对本发明的限制。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

请参阅图1,在第一方面,本发明提供了一种光耦合器1的检测装置,包括光耦合器1、第一透镜2、第二透镜3、光束质量分析仪4、滑动组件以及处理单元;光耦合器1具有输出端,光束质量分析仪4具有接收端,滑动组件包括滑槽51以及滑块52,光束质量分析仪4设置于滑块52上,滑块52可在滑槽51内移动;光耦合器1、第一透镜2、第二透镜3、光束质量分析仪4沿光路方向依次设置,且光耦合器1的输出端的中心点、第一透镜2的中心点、第二透镜3的中心点以及光束质量分析仪4的接收端的中心点位于同一中心轴线上,滑槽51的槽向轴线与中心轴线位于同一竖直平面内,处理单元与光束质量分析仪4电连接;光耦合器1用于产生的测试光,测试光经由光耦合器1的输出端发出;第一透镜2用于对测试光进行准直,第二透镜3用于对经过准直后的测试光进行收束;光束质量分析仪4用于获取收束后的测试光在不同光路位置处的远场光分布图,并将多张不同光路位置处的远场光分布图发送至处理单元;处理单元用于对多张不同光路位置处的远场光分布图进行计算,得到测试光在远场传播中的角功率变化率。Please refer to Fig. 1, in a first aspect, the present invention provides a detection device of an optical coupler 1, comprising an optical coupler 1, a first lens 2, a second lens 3, a beam quality analyzer 4, a sliding assembly and a processing Unit; the optical coupler 1 has an output end, the beam quality analyzer 4 has a receiving end, the sliding assembly includes a chute 51 and a slider 52, the beam quality analyzer 4 is arranged on the slider 52, and the slider 52 can be placed on the chute 51 Inward movement; the optical coupler 1, the first lens 2, the second lens 3, and the beam quality analyzer 4 are sequentially arranged along the optical path direction, and the center point of the output end of the optical coupler 1, the center point of the first lens 2, the second The central point of the lens 3 and the central point of the receiving end of the beam quality analyzer 4 are located on the same central axis, the groove axis of the chute 51 and the central axis are located in the same vertical plane, and the processing unit is electrically connected to the beam quality analyzer 4; The optical coupler 1 is used to generate the test light, and the test light is sent out through the output end of the optical coupler 1; the first lens 2 is used to collimate the test light, and the second lens 3 is used to collimate the test light after collimation Converging; the beam quality analyzer 4 is used to obtain far-field light distribution diagrams of the converged test light at different optical path positions, and send multiple far-field light distribution diagrams at different optical path positions to the processing unit; processing The unit is used to calculate the far-field light distribution diagrams at different optical path positions, and obtain the angular power change rate of the test light in the far-field propagation.

第一透镜2与第二透镜3均为非球面凸透镜,并且,第一透镜2的口径要大于测试光的光场直径,第二透镜3的口径要大于准直后的测试光的光场直径。光耦合器1是用于产生激光束的设备,光耦合器1可以是光纤耦合器,也可以是其他类型的光耦合器件,只要保证输入光平行入射第一透镜2即可。光耦合器1的输出端的中心点、第一透镜2的中心点、第二透镜3的中心点、光束质量分析仪4的接收端的中心点位于同一中心轴线上,这是因为,测试光的光轴位于光耦合器1的输出端的中心点处,各个光学部件的中心点统一能够确保测试光的投射路径不产生偏移与变化,影响后续的测试步骤。Both the first lens 2 and the second lens 3 are aspheric convex lenses, and the aperture of the first lens 2 is larger than the light field diameter of the test light, and the aperture of the second lens 3 is larger than the light field diameter of the collimated test light . The optical coupler 1 is a device for generating laser beams. The optical coupler 1 can be a fiber coupler or other types of optical coupling devices, as long as the input light is guaranteed to be incident on the first lens 2 in parallel. The central point of the output end of the optical coupler 1, the central point of the first lens 2, the central point of the second lens 3, and the central point of the receiving end of the beam quality analyzer 4 are located on the same central axis, because the light of the test light The axis is located at the central point of the output end of the optical coupler 1 , and the uniform central point of each optical component can ensure that the projected path of the test light does not shift or change, which will affect the subsequent test steps.

光束质量分析仪4是用于对激光束进行测量的设备,可以是SP620光束质量分析仪。光束质量分析仪4可收集激光束的光束图像,光束图像包括光束中心位置,光束峰值强度位置,光束发散度,椭圆度,光束强度均匀性,高斯拟合,基于用户选择的峰值/总能量百分比而形成不同的光束直径/宽度等,在本实施例中,采用光束质量分析仪4获取远场光分布图。远场光斑一般是指距离激光发射点瑞利距离以外的位置探测得到的横向光功率分布图案,我们这里使用第二透镜3对准直光进行缩束,CCD探测到的是经过聚焦后的远场光分布图案,并对其进行后续灰度提取处理。The beam quality analyzer 4 is a device for measuring the laser beam, which may be an SP620 beam quality analyzer. The beam profiler 4 can collect the beam image of the laser beam, the beam image includes beam center position, beam peak intensity position, beam divergence, ellipticity, beam intensity uniformity, Gaussian fitting, based on user-selected peak/total energy percentage To form different beam diameters/widths, etc., in this embodiment, the beam quality analyzer 4 is used to obtain the far-field light distribution diagram. The far-field spot generally refers to the lateral optical power distribution pattern detected at a position other than the Rayleigh distance from the laser emission point. Here we use the second lens 3 to shrink the collimated light, and what the CCD detects is the focused far field. field light distribution pattern, and perform subsequent grayscale extraction processing on it.

远场光分布图通过光束质量分析仪4不同位置处接收光耦合器1经两次透镜透射后的光束获得,不同位置的远场光分布图不相同。光束质量分析仪4通过滑块52与滑槽51活动连接,滑槽51锁固在光学平台上,光学平台为专门用于研究光时放置测试设备的平台,具有较高的平面度,保证各个仪器中的光路处于同一平面内。不同位置指代在光路投射方向上的不同位置,具体如图1所示,因此,滑槽51的槽向轴线与中心轴线位于同一竖直平面内,光束质量分析仪4在滑槽51内滑动时得以接收到不同位置处的远场光分布图,通过设置滑槽51能保证光束质量分析仪4的接收端的中心点在移动过程中始终保持在一个中心轴线上,减小所采集的远场光分布图的误差。The far-field light distribution diagram is obtained by receiving the light beam transmitted through the lens twice by the optical coupler 1 at different positions of the beam quality analyzer 4 , and the far-field light distribution diagram at different positions is different. The beam quality analyzer 4 is movably connected with the chute 51 through the slider 52, and the chute 51 is locked on the optical platform. The optical platform is a platform specially used for placing test equipment when studying light, and has a high flatness, ensuring that each The light paths in the instrument are in the same plane. Different positions refer to different positions in the projection direction of the optical path, as shown in Figure 1 specifically, therefore, the groove axis and the central axis of the chute 51 are located in the same vertical plane, and the beam quality analyzer 4 slides in the chute 51 The far-field light distribution diagrams at different positions can be received at the same time, and the central point of the receiving end of the beam quality analyzer 4 can be guaranteed to remain on a central axis during the movement process by setting the chute 51, reducing the far-field light collected. The error of the light distribution map.

通过在不同位置获取不同的远场光分布图,再根据多张远场光分布图计算出角功率变化率,利用角功率变化率对光耦合器1件中发生的模式转换过程进行定量评估,无需分析内部切面,从而为光耦合器1件的光束整形能力提供一个定量评估标准,也为光耦合器1件输出模式的控制提供了更多参考信息。By obtaining different far-field light distribution diagrams at different positions, and then calculating the angular power change rate based on multiple far-field light distribution diagrams, the angular power change rate is used to quantitatively evaluate the mode conversion process in one optical coupler. There is no need to analyze the internal section, so as to provide a quantitative evaluation standard for the beam shaping ability of the optical coupler, and also provide more reference information for the control of the output mode of the optical coupler.

请参阅图1,在一些实施例中,第一透镜2的中心点与光耦合器1的输出端的距离在第一预设范围D1内。第一预设范围D1为根据第一透镜2的具体口径尺寸以及光耦合器1发出的测试光的光场直径综合计算以及测试后确定的范围,在第一预设范围D1内,测试光的光损耗较小,且受环境影响因素较小,保证测试光最终的测量精确度。Referring to FIG. 1 , in some embodiments, the distance between the center point of the first lens 2 and the output end of the optical coupler 1 is within a first preset range D1 . The first preset range D1 is a comprehensive calculation based on the specific aperture size of the first lens 2 and the light field diameter of the test light emitted by the optical coupler 1 and the range determined after the test. Within the first preset range D1, the test light The optical loss is small, and it is less affected by environmental factors, which ensures the final measurement accuracy of the test light.

请参阅图1,在一些实施例中,滑槽51的外侧壁上还设有多个刻度线,相邻的两个刻度线的间距沿光路传播方向按照第一预设梯度逐渐增大,刻度线用于标记光束质量分析仪4在滑槽51中的位置。Please refer to FIG. 1. In some embodiments, a plurality of scale marks are provided on the outer wall of the chute 51, and the distance between two adjacent scale marks gradually increases along the propagation direction of the optical path according to the first preset gradient. The lines are used to mark the position of the beam profiler 4 in the chute 51 .

光束质量分析仪4需要获取不同位置处的远场光分布图,为便于区分,需要对远场光分布图进行位置标记。因此,在滑槽51上设置刻度511,用于标记不同位置。具体的标记方式为:依照光路输出方向,将刻度511依次记为:第一刻度、第二刻度、第三刻度……,其中,第一刻度与第二刻度之间的间距记为第一间距A1;第二刻度与第三刻度之间的间距记为第二间距A2,以此类推。以五个刻度为例,结合图1进行理解:五个刻度对应有四个间距,沿光路输出方向依次记为第一间距A1、第二间距A2、第三间距A3以及第四间距A4;第一间距A1小于第二间距A2,第二间距A2小于第三间距A3,第三间距A3小于第四间距A4,此为按照第一预设梯度逐渐增大。第一预设梯度具体的变化值根据实验需求设定,在本实施例中,第一间距A1设定为l,第二间距A2设定为1.5 l,第三间距A3设定为2.5 l,第四间距A4设定为3.5 l,其中l为单位距离,单位距离可根据实际的检测装置的尺寸进行确定。The beam quality analyzer 4 needs to obtain the far-field light distribution diagrams at different positions, and for the convenience of distinguishing, it is necessary to mark the far-field light distribution diagrams. Therefore, a scale 511 is provided on the chute 51 for marking different positions. The specific marking method is: according to the output direction of the optical path, the scale 511 is recorded as: the first scale, the second scale, the third scale..., wherein the distance between the first scale and the second scale is recorded as the first scale An interval A1; the interval between the second scale and the third scale is recorded as the second interval A2, and so on. Take five scales as an example, and understand it in conjunction with Figure 1: the five scales correspond to four intervals, which are sequentially recorded as the first interval A1, the second interval A2, the third interval A3, and the fourth interval A4 along the output direction of the optical path; The first interval A1 is smaller than the second interval A2, the second interval A2 is smaller than the third interval A3, and the third interval A3 is smaller than the fourth interval A4, which gradually increases according to the first preset gradient. The specific change value of the first preset gradient is set according to the experimental requirements. In this embodiment, the first distance A1 is set to l , the second distance A2 is set to 1.5 l , and the third distance A3 is set to 2.5 l . The fourth distance A4 is set to 3.5 l , wherein l is a unit distance, and the unit distance can be determined according to the actual size of the detection device.

通过设定刻度511,便于对光束质量分析仪4的测定位置进行标记,进而便于不同位置处的远场光分布图进行记录以及调取,避免混同,也便于后续对不同位置处的远场光分布图进行数值计算。By setting the scale 511, it is convenient to mark the measurement position of the beam quality analyzer 4, and then it is convenient to record and retrieve the far-field light distribution diagrams at different positions, avoid confusion, and facilitate subsequent far-field light distribution at different positions. Distribution plots for numerical calculations.

请参阅图1,在一些实施例中,光耦合器1的输出端与滑槽51上距离最近的刻度线之间的距离在第二预设范围D2内;和/或,距离光耦合器1的输出端最远的一侧的刻度线与第二透镜3之间距离为第二透镜的焦距D3。Please refer to FIG. 1 , in some embodiments, the distance between the output end of the optical coupler 1 and the nearest scale mark on the chute 51 is within the second preset range D2; and/or, the distance between the output end of the optical coupler 1 The distance between the scale mark on the farthest side of the output end of the output terminal and the second lens 3 is the focal length D3 of the second lens.

滑槽51上距离最近的刻度线为第一刻度,光耦合器1的输出端与第一刻度之间的距离在第二预设范围D2内,第二预设距离为根据整个光耦合器1检测装置的光路分布(包括光耦合器1输出端与第一透镜2之间的距离,第二透镜3与第一透镜2之间的距离、光束质量分析仪4与第二透镜3之间的距离)以及光耦合器1发出的测试光的光场直径综合计算以及测试后确定的范围,在第二预设范围D2内,测试光的光损耗较小,保证测试光最终的测量精确度,降低环境干扰对测量结果的影响。The nearest scale mark on the chute 51 is the first scale, the distance between the output end of the optical coupler 1 and the first scale is within the second preset range D2, and the second preset distance is based on the entire optical coupling Optical path distribution of the detector 1 detection device (including the distance between the output end of the optical coupler 1 and the first lens 2, the distance between the second lens 3 and the first lens 2, the distance between the beam quality analyzer 4 and the second lens 3 The distance between) and the comprehensive calculation of the optical field diameter of the test light emitted by the optical coupler 1 and the range determined after the test. In the second preset range D2, the optical loss of the test light is small, ensuring that the final measurement of the test light is accurate To reduce the impact of environmental interference on the measurement results.

第二透镜的焦距D3是一个定值,第二透镜的焦距D3可以通过对实际实验时采用的第二透镜的焦距D3进行测定获得。当距离光耦合器1的输出端最远的一侧的刻度线与第二透镜3之间距离为第二透镜的焦距D3时,能够确保光束质量分析仪4在获取最远的一张远场光分布图时依然为清晰的图案,从而便于后续对不同的远场光分布图进行计算。The focal length D3 of the second lens is a constant value, and the focal length D3 of the second lens can be obtained by measuring the focal length D3 of the second lens used in actual experiments. When the distance between the scale mark on the side farthest from the output end of the optical coupler 1 and the second lens 3 is the focal length D3 of the second lens, it can be ensured that the beam quality analyzer 4 obtains the farthest far field The light distribution diagram is still a clear pattern, which facilitates the subsequent calculation of different far-field light distribution diagrams.

请参阅图1,在一些实施例中,检测装置还包括法兰固定平台6以及法兰接头,光耦合器1的输出端通过法兰接头固定在法兰固定平台6上。法兰固定平台6为具有一通光孔的平板,光耦合器1通过法兰接头锁附在法兰固定平台6上,测试光通过通光孔投射至第一透镜2处。其中,法兰固定平台6具备与单边SNA-1法兰接头匹配的螺纹孔,用以保证测试光能够平直入射准直透镜。Please refer to FIG. 1 , in some embodiments, the detection device further includes a flange fixing platform 6 and a flange joint, and the output end of the optical coupler 1 is fixed on the flange fixing platform 6 through the flange joint. The flange fixing platform 6 is a flat plate with a light hole, the optical coupler 1 is locked on the flange fixing platform 6 through the flange joint, and the test light is projected to the first lens 2 through the light hole. Wherein, the flange fixing platform 6 has a threaded hole matching the single-sided SNA-1 flange joint, so as to ensure that the test light can be incident on the collimating lens flatly.

请参阅图2,在第二方面,本发明还提供一种光耦合器件的检测方法,应用于第一方面所述的光耦合器件的检测装置,方法包括以下步骤:Please refer to Fig. 2, in the second aspect, the present invention also provides a detection method of an optical coupling device, which is applied to the detection device of the optical coupling device described in the first aspect, and the method includes the following steps:

S1、光耦合器的输出端发出测试光;S1. The output end of the optocoupler emits test light;

S2、第一透镜对测试光进行准直;S2. The first lens collimates the test light;

S3、第二透镜对经过准直后的测试光进行收束;S3. The second lens converges the collimated test light;

S4、光束质量分析仪获取收束后的测试光在不同光路位置处的远场光分布图,并将多张不同光路位置处的远场光分布图发送至处理单元;S4. The beam quality analyzer acquires far-field light distribution diagrams of the converged test light at different optical path positions, and sends multiple far-field light distribution diagrams at different optical path positions to the processing unit;

S5、处理单元对多张不同光路位置处的远场光分布图进行计算,得到测试光在远场传播中的角功率变化率。S5. The processing unit calculates a plurality of far-field light distribution maps at different optical path positions to obtain the angular power change rate of the test light in the far-field propagation.

光耦合器1发出的测试光是发散的,开始相邻的两条光线传播后会相离越来越远。因此,需要增加第一透镜2对测试光进行准直,准直表示保持相邻的两条光线之间是平行的。收束在本实施例中,具体表示使用凸透镜将准直后的激光聚焦,从而在凸透镜焦距处得到艾里斑的过程。这里探测远场光斑的位置都在第一透镜2的焦距内,即在艾里斑位置与第一透镜2之间。使得进入光束质量分析仪4时测试光的远场光分布图更加清晰准确。The test light emitted by the optical coupler 1 is divergent, and two adjacent light rays will be farther and farther apart after propagating. Therefore, it is necessary to add the first lens 2 to collimate the test light, and collimation means keeping two adjacent light rays parallel. Convergence In this embodiment, it specifically refers to the process of using a convex lens to focus the collimated laser light so as to obtain the Airy disk at the focal length of the convex lens. Here, the positions for detecting far-field light spots are all within the focal length of the first lens 2 , that is, between the position of the Airy disk and the first lens 2 . This makes the far-field light distribution diagram of the test light clearer and more accurate when it enters the beam quality analyzer 4 .

光束质量分析仪4依次在不同位置获取不同的远场光分布图,并将远场光分布图发送至处理单元,通过处理单元对远场光分布图进行计算,从而得出测试光在远场传播中的角功率变化率。作为一优选的实施例,光束质量分析仪4在不等距的位置处进行远场光分布图采集,能够增加结果的准确性。通过多次不等距的远场光分布图采集并绘制对应的远场光分布拟合曲线,再进行第一计算、第二计算获得角功率变化率,则这一计算结果具有更小的性能表征误差。The beam quality analyzer 4 sequentially obtains different far-field light distribution diagrams at different positions, and sends the far-field light distribution diagrams to the processing unit, and calculates the far-field light distribution diagrams through the processing unit, so as to obtain the test light in the far-field Rate of change of angular power in propagation. As a preferred embodiment, the beam quality analyzer 4 collects the far-field light distribution diagram at positions that are not equidistant, which can increase the accuracy of the results. Collect and draw the corresponding far-field light distribution fitting curve through multiple unequal distance far-field light distribution maps, and then perform the first calculation and the second calculation to obtain the angular power change rate, then this calculation result has smaller performance representation error.

通过在不同位置获取不同的远场光分布图,再根据多张远场光分布图计算出角功率变化率,利用角功率变化率对光耦合器1件中发生的模式转换过程进行定量评估,定量评估具体包括通过CCD获取不同位置处的远场光斑,对光斑进行灰度处理后求解角功率分布方差(按公式(1)计算)数值。计算多个位置处的角功率分布方差,除以距离差,计算角功率分布方差随距离的变化率,得到的参数可以表征光耦合器件中发生的模式转换过程,数值越大,则高阶模占比越高,而且模式更不稳定,即该光耦合器件实现光耦合得到基模光的能力越差。无需分析内部切面,内部切面具体表示光耦合器件内部不同位置。无需分析内部切面即不需要在光耦合器件内部不同位置处探测光场分布来分析光耦合过程,直接通过远场光场角功率分布方差变化率就可以表征这一过程发生的程度。变化率越大,该光耦合器件进行光耦合得到基模光的能力越差。从而为光耦合器1件的光束整形能力提供一个定量评估标准,也为光耦合器1件输出模式的控制提供了更多参考信息。By obtaining different far-field light distribution diagrams at different positions, and then calculating the angular power change rate based on multiple far-field light distribution diagrams, the angular power change rate is used to quantitatively evaluate the mode conversion process in one optical coupler. Quantitative evaluation specifically includes obtaining the far-field spots at different positions through the CCD, and calculating the variance of the angular power distribution (calculated according to formula (1)) after performing grayscale processing on the spots. Calculate the variance of the angular power distribution at multiple positions, divide it by the distance difference, and calculate the rate of change of the variance of the angular power distribution with the distance. The obtained parameters can represent the mode conversion process that occurs in the optical coupling device. The larger the value, the higher the proportion of the higher-order mode The higher the value is, the more unstable the mode is, that is, the poorer the ability of the optical coupling device to achieve optical coupling to obtain fundamental mode light. There is no need to analyze internal cut planes, which specifically represent different positions inside the optocoupler device. There is no need to analyze the internal section, that is, it is not necessary to detect the optical field distribution at different positions inside the optical coupling device to analyze the optical coupling process, and the degree of this process can be characterized directly by the variance change rate of the far-field optical field angular power distribution. The greater the rate of change, the worse the ability of the optical coupling device to perform optical coupling to obtain fundamental mode light. So as to provide a quantitative evaluation standard for the beam shaping ability of the optical coupler, and also provide more reference information for the control of the output mode of the optical coupler.

请参阅图3、在一些实施例中,处理单元对多张不同光路位置处的远场光分布图进行计算,得到测试光在远场传播中的角功率变化率,具体包括以下步骤:Please refer to FIG. 3. In some embodiments, the processing unit calculates the far-field light distribution diagrams at different optical path positions to obtain the angular power change rate of the test light in the far-field propagation, which specifically includes the following steps:

S51、获取远场光分布图;S51. Obtain a far-field light distribution map;

S52、对远场光分布图进行图像灰度处理,获得全图灰度值分布矩阵;S52. Perform image grayscale processing on the far-field light distribution map to obtain a distribution matrix of grayscale values in the entire image;

S53、对全图灰度值分布矩阵进行第一计算,获得角功率分布方差;S53. Perform a first calculation on the gray value distribution matrix of the whole image to obtain a variance of angular power distribution;

S54、利用角功率分布方差进行第二计算,获得角功率变化率。S54. Perform a second calculation using the angular power distribution variance to obtain the angular power change rate.

图像灰度处理具体包括:通过预设程序对远场光分布图进行16位灰度处理,提取全图灰度值分布矩阵,全图灰度值分布矩阵大小一般不超过软件拟合的光功率分布正方形光圈的范围;全图灰度值分布矩阵边缘中出现大量重复数据时,需要进行去除。在全图灰度值分布矩阵中提取L个有效灰度数值,用于第一计算,在此处应注意的是,有效灰度数值的数目L并不等于整个全图灰度值分布矩阵中的灰度数值的数目,并且有效灰度数值的取值范围一般不超过灰度矩阵中软件拟合的光功率分布圆形光圈的范围。需要说明的是,如果角功率分布方差的变化率明显低于测试光在同一波长同一功率下的的正常数据,则需要缩小有效灰度数值的取值范围进行再次计算。Image grayscale processing specifically includes: performing 16-bit grayscale processing on the far-field light distribution map through a preset program, and extracting the gray value distribution matrix of the entire image. The size of the gray value distribution matrix of the entire image generally does not exceed the optical power fitted by the software Distribute the range of the square aperture; when there is a large amount of repeated data in the edge of the gray value distribution matrix of the whole image, it needs to be removed. Extract L effective gray values from the gray value distribution matrix of the whole image for the first calculation. It should be noted here that the number L of effective gray values is not equal to that in the gray value distribution matrix of the entire image The number of grayscale values, and the range of effective grayscale values generally does not exceed the range of the optical power distribution circular aperture fitted by the software in the grayscale matrix. It should be noted that if the change rate of the variance of the angular power distribution is significantly lower than the normal data of the test light at the same wavelength and the same power, it is necessary to narrow the value range of the effective gray value for recalculation.

在第一计算获得角功率分布方差后,将多个角功率分布方差进行第二计算,获得角功率变化率。通过上述方法步骤,能够很好的描述光耦合器1件的模式转换性能,表征光耦合器1件的模式整形潜力,降低光耦合器1性能优化难度,为提高光耦合器1件模式转化效率提供更多可能。After the angular power distribution variance is obtained through the first calculation, a second calculation is performed on the plurality of angular power distribution variances to obtain the angular power change rate. Through the above method steps, the mode conversion performance of an optocoupler can be well described, the mode shaping potential of an optocoupler can be characterized, the difficulty of optimizing the performance of an optocoupler can be reduced, and the mode conversion efficiency of an optocoupler can be improved. Provide more possibilities.

上述步骤得出的角功率变化率会优于通过简单平均值求解得出的角功率变化率。The rate of change of angular power obtained by the above steps will be better than the rate of change of angular power obtained by simple average solution.

在一些实施例中,第一计算由公式(1)得到,公式(1)如下:In some embodiments, the first calculation is obtained by formula (1), which is as follows:

Figure 457350DEST_PATH_IMAGE011
(1)
Figure 457350DEST_PATH_IMAGE011
(1)

其中,

Figure 416079DEST_PATH_IMAGE012
为角功率分布方差,
Figure 477575DEST_PATH_IMAGE003
为不同位置(i)处的远场光分布图的角功率分布方差,
Figure 558664DEST_PATH_IMAGE007
为读取出的灰度矩阵中的数值元素,
Figure 705612DEST_PATH_IMAGE013
为读取出的灰度矩阵中的数值元素平均值,
Figure 405714DEST_PATH_IMAGE006
为灰度值
Figure 321718DEST_PATH_IMAGE014
在灰度矩阵中出现的概率,L为灰度矩阵中元素数目。in,
Figure 416079DEST_PATH_IMAGE012
is the variance of the angular power distribution,
Figure 477575DEST_PATH_IMAGE003
is the angular power distribution variance of the far-field light distribution pattern at different positions (i),
Figure 558664DEST_PATH_IMAGE007
is the numerical element in the read grayscale matrix,
Figure 705612DEST_PATH_IMAGE013
is the average value of the numerical elements in the read grayscale matrix,
Figure 405714DEST_PATH_IMAGE006
is the gray value
Figure 321718DEST_PATH_IMAGE014
The probability of appearing in the grayscale matrix, L is the number of elements in the grayscale matrix.

在一些实施例中,第二计算由公式(2)得到,公式(2)如下:In some embodiments, the second calculation is obtained by formula (2), which is as follows:

Figure 511391DEST_PATH_IMAGE008
(2)
Figure 511391DEST_PATH_IMAGE008
(2)

其中,

Figure 207951DEST_PATH_IMAGE009
为所求输出光在远场传播中的角功率变化率,l、1.5 l、2.5 l、3.5 l为沿光路方向不同位置所对应的相邻刻度线之间的间距,其中l为预设单位距离,
Figure 508482DEST_PATH_IMAGE010
不同位置(i)处的远场光分布图的角功率分布方差。in,
Figure 207951DEST_PATH_IMAGE009
is the angular power change rate of the output light in the far-field propagation, l , 1.5 l , 2.5 l , and 3.5 l are the distances between adjacent scale marks corresponding to different positions along the optical path direction, where l is the preset unit distance,
Figure 508482DEST_PATH_IMAGE010
Angular power distribution variance of the far-field light profile at different positions (i).

具体实施例:Specific examples:

采用具有3x1的光子灯笼的光耦合器产生测试光,所产生的测试光为976nm的激光,光耦合器件输出的光是稳定的光模式,功率抖动不超过±0.1%。第一透镜为焦距小于30mm的非球面凸透镜,例如,第一透镜的焦距可以为25mm或者为20mm;第一透镜对光耦合器件输出光进行准直,光耦合器通过法兰接头设置在法兰固定平台上,法兰固定平台使用的是带SNA-1法兰配套螺纹孔的光纤耦合器固定平台,其中光耦合器的输出端位于第一透镜的焦点位置。The test light is generated by an optocoupler with a 3x1 photon lantern, which is a 976nm laser. The light output by the optocoupler is a stable optical mode, and the power jitter does not exceed ±0.1%. The first lens is an aspheric convex lens with a focal length less than 30mm. For example, the focal length of the first lens can be 25mm or 20mm; the first lens collimates the output light of the optical coupling device, and the optical coupler is arranged on the flange through a flange joint. On the fixed platform, the flange fixed platform uses a fiber coupler fixed platform with SNA-1 flange matching threaded holes, where the output end of the optical coupler is located at the focus position of the first lens.

第二透镜的焦距为200mm,设置在第一透镜的后方(即光线透过第一透镜之后的输出方向),第二透镜用于对测试光进行放大,便于光束质量分析仪获得更清晰的光场分布图。光束质量分析仪采用型号为SP620的光束质量分析仪。光束质量分析仪用于远场光图案捕获,并传输无损的远场光分布图至处理单元,处理单元为电脑终端或其他计算机设备。SP620光束质量分析仪使用远场镜头,无放大,可以根据输出光功率增添滤光片以避免图案中的光饱和,保证远场光分布图质量。The focal length of the second lens is 200mm, and it is set behind the first lens (that is, the output direction of the light after passing through the first lens). The second lens is used to amplify the test light, so that the beam quality analyzer can obtain clearer light. field distribution map. The beam quality analyzer adopts the beam quality analyzer model SP620. The beam quality analyzer is used to capture the far-field light pattern, and transmit the lossless far-field light distribution map to the processing unit, which is a computer terminal or other computer equipment. The SP620 beam quality analyzer uses a far-field lens without magnification. Filters can be added according to the output light power to avoid light saturation in the pattern and ensure the quality of the far-field light distribution map.

滑槽为带标准刻度和凹槽的底板,两侧带有螺纹孔,可固定于光学平台上。其上凹槽用于光束质量分析仪的固定与滑动,从而保证光束质量分析仪的镜头中心始终位于第二透镜的中心轴上。其中,第一预设距离为30mm,第二预设距离为80mm,第二预设距离可以由实验进行验证,以得到稳定的能被CCD镜头(光束质量分析仪中的镜头)完全捕获的光横向模场的功率分布图案(即远场光分布图)为准,此处表示远场横模光斑,也可以表述为远场光在横向界面上功率分布状态,距离一般低于80mm。第一刻度到滑槽靠近光耦合器一端的端面距离为10mm,测试光经过第一透镜准直后输入第二透镜,经过第二透镜放大后输入到光束质量分析仪SP620的远场镜头,镜头捕获远场光输入电脑程序,用于后续处理。The chute is a base plate with standard scales and grooves, with threaded holes on both sides for fixing to an optical table. The upper groove is used for fixing and sliding of the beam quality analyzer, so as to ensure that the lens center of the beam quality analyzer is always located on the central axis of the second lens. Among them, the first preset distance is 30mm, the second preset distance is 80mm, and the second preset distance can be verified by experiments to obtain stable light that can be completely captured by the CCD lens (the lens in the beam quality analyzer) The power distribution pattern of the transverse mode field (that is, the far-field light distribution diagram) shall prevail. Here it represents the far-field transverse mode spot, or it may be expressed as the power distribution state of the far-field light on the transverse interface, and the distance is generally less than 80mm. The distance from the first scale to the end face of the chute close to the optical coupler is 10mm. The test light is collimated by the first lens and then input to the second lens. After being enlarged by the second lens, it is input to the far-field lens of beam quality analyzer SP620. The far-field light captured by the lens is fed into a computer program for subsequent processing.

其中,滑槽的相邻两个标准刻度之间的间距沿光路传播方向分别为l,1.5 l,2.5 l,3.5 l,更多的不等距刻度能够增加结果的可靠性。Among them, the distance between two adjacent standard scales of the chute along the propagation direction of the optical path is respectivelyl, 1.5l, 2.5 l, 3.5l, more non-equidistant scales can increase the reliability of the results.

SP620光束质量分析仪对采集的远场光分布图进行降噪处理,输入程序的远场光分布图为标准彩虹色,降噪使用的是光束质量分析仪自带的增益调整。通过处理单元的图像灰度处理与灰度矩阵提取,将远场光分布图使用python处理为16位灰度图,提取灰度值矩阵,得到16位灰度值。基于公式(1)的程序实现多幅图像的角功率分布方差求解。角功率分布方差使用灰度方差公式。基于公式(1)的第一计算结果以及公式(2)的第二计算获得角功率变化率。利用基于更多数据的曲线拟合进行角功率分布方差变化率求解效果优于简单平均值求解。用于分析角功率分布方差变化率的远场光分布图最远距离光耦合器的输出端不超过300mm。The SP620 beam quality analyzer performs noise reduction processing on the collected far-field light distribution diagram. The far-field light distribution diagram input into the program is the standard rainbow color, and the noise reduction uses the gain adjustment that comes with the beam quality analyzer. Through the image grayscale processing and grayscale matrix extraction of the processing unit, the far-field light distribution map is processed into a 16-bit grayscale image using python, and the grayscale value matrix is extracted to obtain a 16-bit grayscale value. The program based on formula (1) realizes the solution of angular power distribution variance of multiple images. The angular power distribution variance uses the grayscale variance formula. The angular power change rate is obtained based on the first calculation result of formula (1) and the second calculation of formula (2). Using curve fitting based on more data to solve the variance rate of angular power distribution is better than simple mean value. The far-field light distribution diagram used to analyze the variation rate of the variance of the angular power distribution The furthest distance from the output end of the optical coupler does not exceed 300mm.

在本说明书的描述中,参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不必须针对的是相同的实施例或示例。而且,描述的具体特征、结构、材料或者特点可以在任一个或多个实施例或示例中以合适的方式结合。此外,在不相互矛盾的情况下,本领域的技术人员可以将本说明书中描述的不同实施例或示例以及不同实施例或示例的特征进行结合和组合。In the description of this specification, descriptions referring to the terms "one embodiment", "some embodiments", "example", "specific examples", or "some examples" mean that specific features described in connection with the embodiment or example , structure, material or characteristic is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the described specific features, structures, materials or characteristics may be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine different embodiments or examples and features of different embodiments or examples described in this specification without conflicting with each other.

尽管上面已经示出和描述了本发明的实施例,可以理解的是,上述实施例是示例性的,不能理解为对本发明的限制,本领域的普通技术人员在本发明的范围内可以对上述实施例进行变化、修改、替换和变型。Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention, those skilled in the art can make the above-mentioned The embodiments are subject to changes, modifications, substitutions and variations.

以上本发明的具体实施方式,并不构成对本发明保护范围的限定。任何根据本发明的技术构思所作出的各种其他相应的改变与变形,均应包含在本发明权利要求的保护范围内。The above specific implementation manners of the present invention do not constitute a limitation to the protection scope of the present invention. Any other corresponding changes and modifications made according to the technical concept of the present invention shall be included in the protection scope of the claims of the present invention.

Claims (9)

1.一种光耦合器件的检测装置,其特征在于,包括光耦合器、第一透镜、第二透镜、光束质量分析仪、滑动组件以及处理单元;1. A detection device for an optical coupling device, comprising an optical coupler, a first lens, a second lens, a beam quality analyzer, a sliding assembly and a processing unit; 所述光耦合器具有输出端,所述光束质量分析仪具有接收端,所述滑动组件包括滑槽以及滑块,所述光束质量分析仪设置于所述滑块上,所述滑块可在所述滑槽内移动;The optical coupler has an output end, the beam quality analyzer has a receiving end, the sliding assembly includes a chute and a slider, the beam quality analyzer is arranged on the slider, and the slider can be Move in the chute; 所述光耦合器、第一透镜、第二透镜、光束质量分析仪沿光路方向依次设置,且所述光耦合器的输出端的中心点、第一透镜的中心点、第二透镜的中心点以及所述光束质量分析仪的接收端的中心点位于同一中心轴线上,所述滑槽的槽向轴线与所述中心轴线位于同一竖直平面内,所述处理单元与所述光束质量分析仪电连接;The optical coupler, the first lens, the second lens, and the beam quality analyzer are arranged in sequence along the optical path direction, and the center point of the output end of the optical coupler, the center point of the first lens, the center point of the second lens, and The center point of the receiving end of the beam quality analyzer is located on the same central axis, the trough axis of the chute is located in the same vertical plane as the central axis, and the processing unit is electrically connected to the beam quality analyzer ; 所述光耦合器用于产生测试光,所述测试光经由所述光耦合器的输出端发出;The optical coupler is used to generate test light, and the test light is emitted through the output end of the optical coupler; 所述第一透镜用于对所述测试光进行准直,所述第二透镜用于对经过准直后的测试光进行收束;The first lens is used to collimate the test light, and the second lens is used to converge the collimated test light; 所述光束质量分析仪用于获取收束后的所述测试光在不同光路位置处的远场光分布图,并将多张不同光路位置处的远场光分布图发送至处理单元;The beam quality analyzer is used to obtain far-field light distribution diagrams of the converged test light at different optical path positions, and send multiple far-field light distribution diagrams at different optical path positions to the processing unit; 所述处理单元用于对多张不同光路位置处的远场光分布图进行计算,得到所述测试光在传播中的远场横模图案角功率变化率。The processing unit is used to calculate the far-field light distribution diagrams at different positions of the optical path to obtain the angular power change rate of the far-field transverse mode pattern of the test light during propagation. 2.根据权利要求1所述的光耦合器件的检测装置,其特征在于,所述第一透镜的中心点与所述光耦合器的输出端的距离在第一预设范围内。2 . The detection device of an optical coupling device according to claim 1 , wherein the distance between the center point of the first lens and the output end of the optical coupler is within a first preset range. 3 . 3.根据权利要求1或2所述的光耦合器件的检测装置,其特征在于,所述滑槽的外侧壁上还设有多个刻度线,相邻的两个刻度线的间距沿光路传播方向按照第一预设梯度逐渐增大,所述刻度线用于标记所述光束质量分析仪在所述滑槽中的位置。3. The detection device of an optical coupling device according to claim 1 or 2, wherein a plurality of scale marks are also arranged on the outer wall of the chute, and the distance between two adjacent scale marks propagates along the optical path The direction gradually increases according to a first preset gradient, and the scale line is used to mark the position of the beam quality analyzer in the chute. 4.根据权利要求2所述的光耦合器件的检测装置,其特征在于,所述光耦合器的输出端与所述滑槽上距离最近的刻度线之间的距离在第二预设范围内;4. The detection device of an optical coupling device according to claim 2, wherein the distance between the output end of the optical coupler and the nearest scale mark on the chute is within a second preset range ; 和/或,距离所述光耦合器的输出端最远的一侧的刻度线与所述第二透镜之间距离为所述第二透镜的焦距。And/or, the distance between the scale line on the side farthest from the output end of the optical coupler and the second lens is the focal length of the second lens. 5.根据权利要求1所述的光耦合器件的检测装置,其特征在于,还包括法兰固定平台以及法兰接头,所述光耦合器的输出端通过法兰接头固定在所述法兰固定平台上。5. The detection device of an optical coupling device according to claim 1, further comprising a flange fixing platform and a flange joint, and the output end of the optical coupler is fixed on the flange by a flange joint. on the platform. 6.一种光耦合器件的检测方法,其特征在于,应用于权利要求1-5任一项所述的光耦合器件的检测装置,所述方法包括以下步骤:6. A detection method of an optical coupling device, characterized in that, it is applied to the detection device of the optical coupling device according to any one of claims 1-5, said method comprising the following steps: 光耦合器的输出端发出测试光;The output terminal of the optocoupler emits test light; 第一透镜对所述测试光进行准直;the first lens collimates the test light; 第二透镜对经过准直后的测试光进行收束;The second lens converges the collimated test light; 光束质量分析仪获取收束后的所述测试光在不同光路位置处的远场光分布图,并将多张不同光路位置处的远场光分布图发送至处理单元;The beam quality analyzer acquires far-field light distribution diagrams of the converged test light at different optical path positions, and sends multiple far-field light distribution diagrams at different optical path positions to the processing unit; 处理单元对多张不同光路位置处的远场光分布图进行计算,得到所述测试光在远场传播中的角功率变化率。The processing unit calculates the far-field light distribution diagrams at different positions of the optical path to obtain the angular power change rate of the test light in the far-field propagation. 7.根据权利要求6所述的光耦合器件的检测方法,其特征在于,所述处理单元对多张不同光路位置处的远场光分布图进行计算,得到所述测试光在远场传播中的角功率变化率,具体包括以下步骤:7. The detection method of an optical coupling device according to claim 6, wherein the processing unit calculates the far-field light distribution diagrams at different optical path positions to obtain the test light in the far-field propagation The rate of change of angular power, specifically includes the following steps: 获取所述远场光分布图;Obtain the far-field light distribution diagram; 对所述远场光分布图进行图像灰度处理,获得全图灰度值分布矩阵;performing image grayscale processing on the far-field light distribution map to obtain a gray value distribution matrix of the whole image; 对所述全图灰度值分布矩阵进行第一计算,获得角功率分布方差;performing a first calculation on the full-image gray value distribution matrix to obtain a variance of angular power distribution; 利用所述角功率分布方差进行第二计算,获得角功率变化率。The second calculation is performed by using the variance of the angular power distribution to obtain the rate of change of the angular power. 8.根据权利要求7所述的光耦合器件的检测方法,其特征在于,所述第一计算由公式(1)得到,所述公式(1)如下:8. The detection method of an optical coupling device according to claim 7, wherein the first calculation is obtained by formula (1), and the formula (1) is as follows:
Figure 466434DEST_PATH_IMAGE001
(1)
Figure 466434DEST_PATH_IMAGE001
(1)
其中,
Figure 937867DEST_PATH_IMAGE002
为角功率分布方差,
Figure 133356DEST_PATH_IMAGE003
为不同位置(i)处的远场光分布图的角功率分布方差,
Figure 563200DEST_PATH_IMAGE004
为读取出的灰度矩阵中的数值元素,
Figure 539247DEST_PATH_IMAGE005
为读取出的灰度矩阵中的数值元素平均值,
Figure 611108DEST_PATH_IMAGE006
为灰度值
Figure 989000DEST_PATH_IMAGE007
在灰度矩阵中出现的概率,L为灰度矩阵中元素数目。
in,
Figure 937867DEST_PATH_IMAGE002
is the variance of the angular power distribution,
Figure 133356DEST_PATH_IMAGE003
is the angular power distribution variance of the far-field light distribution pattern at different positions (i),
Figure 563200DEST_PATH_IMAGE004
is the numerical element in the read grayscale matrix,
Figure 539247DEST_PATH_IMAGE005
is the average value of the numerical elements in the read grayscale matrix,
Figure 611108DEST_PATH_IMAGE006
is the gray value
Figure 989000DEST_PATH_IMAGE007
The probability of appearing in the grayscale matrix, L is the number of elements in the grayscale matrix.
9.根据权利要求8所述的光耦合器件的检测方法,其特征在于,所述第二计算由公式(2)得到,所述公式(2)如下:9. The detection method of an optical coupling device according to claim 8, wherein the second calculation is obtained by formula (2), and the formula (2) is as follows:
Figure 324166DEST_PATH_IMAGE008
(2)
Figure 324166DEST_PATH_IMAGE008
(2)
其中,
Figure 475924DEST_PATH_IMAGE009
为所求输出光在远场传播中的角功率变化率,l、1.5l、2.5l、3.5l为沿光路方向不同位置所对应的相邻刻度线之间的间距,其中l为预设单位距离,
Figure 289159DEST_PATH_IMAGE010
为不同位置(i)处的远场光分布图的角功率分布方差。
in,
Figure 475924DEST_PATH_IMAGE009
is the angular power change rate of the output light in the far-field propagation, l , 1.5 l , 2.5 l , and 3.5 l are the distances between adjacent scale marks corresponding to different positions along the optical path direction, where l is the preset unit distance,
Figure 289159DEST_PATH_IMAGE010
is the angular power distribution variance of the far-field light distribution map at different positions (i).
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