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CN115421225A - Large-angle antireflection film, optical lens and imaging device - Google Patents

Large-angle antireflection film, optical lens and imaging device Download PDF

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Publication number
CN115421225A
CN115421225A CN202210971813.XA CN202210971813A CN115421225A CN 115421225 A CN115421225 A CN 115421225A CN 202210971813 A CN202210971813 A CN 202210971813A CN 115421225 A CN115421225 A CN 115421225A
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CN
China
Prior art keywords
layer
refractive index
antireflection film
film
optical
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Pending
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CN202210971813.XA
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Chinese (zh)
Inventor
金闯
蒋晓明
刘耀辉
张礼勋
周予坤
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Taicang Sidike New Material Science and Technology Co Ltd
Jiangsu Sidike New Materials Science and Technology Co Ltd
Original Assignee
Taicang Sidike New Material Science and Technology Co Ltd
Jiangsu Sidike New Materials Science and Technology Co Ltd
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Application filed by Taicang Sidike New Material Science and Technology Co Ltd, Jiangsu Sidike New Materials Science and Technology Co Ltd filed Critical Taicang Sidike New Material Science and Technology Co Ltd
Priority to CN202210971813.XA priority Critical patent/CN115421225A/en
Publication of CN115421225A publication Critical patent/CN115421225A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/111Anti-reflection coatings using layers comprising organic materials

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

The invention provides a large-angle antireflection film, which at least comprises a substrate layer, a functional layer and a non-traditional optical layer; wherein the non-conventional optical layer is an etching layer; the functional layer is composed of a plurality of first refractive index layers and a plurality of second refractive index layers which are alternately stacked, wherein the first refractive index layer is marked as H, and the second refractive index layer is marked as L; and the first refractive index layer and the second refractive index layer are arranged according to the sequence of (H-L) -n-or (L-H) -n-. The invention also provides an optical lens and an imaging device. The invention provides an antireflection film which can be prepared in a large area, and has the advantages of good repeatability, low cost, controllable size and good antireflection property.

Description

Large-angle antireflection film, optical lens and imaging device
Technical Field
The invention relates to the field of antireflection films, in particular to a large-angle antireflection film, an optical lens and an imaging device.
Background
Antireflection films are applied to the surfaces of optical members such as lenses, prisms, etc., and the main purpose is to improve the transmittance of an optical element composed of a plurality of lenses, and in particular, to make the brightness of an image and an improved optical instrument easily visible by suppressing reflection in the visible spectrum. However, the conventional antireflection film is often designed based on front-side incidence, and as the incident angle changes, the antireflection effect decreases and the transmittance gradually decreases along with the polarization effect of light, and for various optical behaviors such as imaging and recognition, the larger the angle is, the more serious the influence is. Therefore, in order to improve the optical behaviors such as imaging effect and optical recognition accuracy, it is necessary to ensure the antireflection behavior of the antireflection film at a wide angle.
Therefore, the structure of the existing anti-reflection film needs to be improved, and a novel anti-reflection film is designed to meet the requirement.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a high-angle antireflection film, which at least comprises a substrate layer, a functional layer and a non-traditional optical layer; wherein the non-traditional optical layer is an etching layer; the functional layer is composed of a plurality of first refractive index layers and a plurality of second refractive index layers which are alternately stacked, wherein the first refractive index layer is marked as H, and the second refractive index layer is marked as L; the first refractive index layer and the second refractive index layer are arranged according to the sequence of (H-L) -n-or (L-H) -n-; wherein n is the number of alternation of H and L or L and H.
Preferably, the base layer is constructed from at least one of the following materials:
polyethylene naphthalate, polyethylene terephthalate, cellulose triacetate, cyclic olefin copolymers, cyclic olefin polymers, polycarbonates.
Preferably, the film layer material of the non-traditional optical layer is made of Si and SiO in different proportions 2 And Al 2 O 3 And (3) combining the components.
Preferably, the film material of the first refractive index film layer in the functional layer is TiO 2 、Nb 2 O 5 、Ta 2 O 5 And at least of SiNxOne kind of the method.
Preferably, the film material of the second refractive index film layer in the functional layer is SiO 2 、Al 2 O 3 、SiO、MgF 2 At least one of (1).
Preferably, the refractive index n2 at 550nm of the first refractive index film layer satisfies: n3 is more than or equal to 2.0 and less than or equal to 3.2; the refractive index n3 of the second refractive index film layer at 550nm satisfies: n2 is more than 0 and less than or equal to 1.56.
Preferably, the refractive index n1 at 550nm of the non-conventional optical layer satisfies 1.12 < n1 ≦ 1.25; in the range of 420-680nm, the single-side reflectivity at the incidence angle of 8 degrees is less than 0.5 percent, and the single-side reflectivity at the incidence angle of 60 degrees is less than 2.5 percent.
The second object of the invention is to provide an optical lens, wherein the high-angle antireflection film is attached to at least one side of the optical lens.
A third object of the present invention is to provide an imaging device, which is constituted by an optical module, further comprising an optical lens according to claim 8.
Preferably, the optical lens has a reflectivity R at 420nm to 680nm that satisfies the following condition: the single-sided reflectivity is less than 0.4% when the light enters at 8 degrees, and the single-sided reflectivity when the light enters at 60 degrees is less than 1.7%.
Compared with the prior art, the invention has the beneficial effects that: the invention provides a large-angle antireflection film, which at least comprises a substrate layer, a functional layer and a non-traditional optical layer; wherein the non-conventional optical layer is an etch layer; the functional layer is composed of a plurality of first refractive index layers and a plurality of second refractive index layers which are alternately laminated, and the first refractive index layers and the second refractive index layers are arranged according to the sequence of (H-L) -n-or (L-H) -n-. The invention also provides an optical lens and an imaging device. According to the invention, the nano coating with extremely excellent broadband and wide-angle antireflection characteristics is obtained in various modes of constructing the porous loose film layer to obtain a material with a specific refractive index, etching and processing a three-dimensional periodic nano structure and the like. In addition, the invention lays a foundation for searching an antireflection film surface processing technology which can be prepared in a large area, has good repeatability, low cost, controllable size and good antireflection property and practical application.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to make the technical solutions of the present invention practical in accordance with the contents of the specification, the following detailed description is given of preferred embodiments of the present invention with reference to the accompanying drawings. The detailed description of the present invention is given in detail by the following examples and the accompanying drawings.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a schematic diagram of a non-conventional optical coating according to the present invention;
FIG. 2 is a spectral plot of a non-conventional optical coating of the present invention;
FIG. 3 is a schematic diagram of a structure of a middle-large angle antireflection film according to an embodiment of the present invention;
FIG. 4 is a spectroscopic spectrum of a large-angle antireflection film according to an embodiment of the present invention;
fig. 5 is a schematic view of a large-angle antireflection film according to a second embodiment of the present invention;
fig. 6 is a spectral spectrum of the large-angle ar film in the second embodiment of the present invention.
In the figure: 10. a large-angle antireflection film;
11. a base layer; 12. a functional layer; 121. a first refractive index layer; 122. a second refractive index layer; 13. a non-conventional optical layer.
Detailed Description
The foregoing and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings, wherein like reference characters designate like parts throughout the several views. In the drawings, the shape and size may be exaggerated for clarity, and the same reference numerals will be used throughout the drawings to designate the same or similar components. In the following description, terms such as center, thickness, height, length, front, back, rear, left, right, top, bottom, upper, lower, and the like are used based on the orientation or positional relationship shown in the drawings. In particular, "height" corresponds to the dimension from top to bottom, "width" corresponds to the dimension from left to right, and "depth" corresponds to the dimension from front to back. These relative terms are for convenience of description and are not generally intended to require a particular orientation. Terms concerning attachments, coupling and the like (e.g., "connected" and "attached") refer to a relationship wherein structures are secured or attached, either directly or indirectly, to one another through intervening structures, as well as both movable or rigid attachments or relationships, unless expressly described otherwise.
The present invention is further described with reference to the accompanying drawings and the detailed description, and it should be noted that, in the case of no conflict, any combination between the embodiments or technical features described below may form a new embodiment.
The anti-reflection film in the prior art mainly has two problems: firstly, the anti-reflection film at the present stage is designed and manufactured only aiming at small angles; secondly, no clear and effective large-angle antireflection film structure and processing method exist at present. The invention is different from the traditional multilayer antireflection film, and the micro-nano structure film layer is not limited by the rigorous requirements of material refractive index and coating precision. The design of the antireflection film is combined with the theory of a graded refractive index structure, and the large-angle antireflection film is designed. And preparing a large-angle antireflection film structure by adopting a wet etching method according to an antireflection mechanism of the graded-index structure. In addition, a novel multilayer film and a microstructure surface composite structure antireflection film are provided, an optimal film system structure is simulated from theoretical simulation, and finally, a large-angle novel antireflection film meeting design requirements is successfully prepared through experimental verification and process improvement. Specifically, a material with a specific refractive index is obtained by constructing a porous loose film layer; the nano coating with extremely excellent wide-band and wide-angle antireflection characteristics is realized by various modes such as etching processing of a multi-dimensional nano structure and the like.
The antireflection film includes at least: a base layer 11, a functional layer 12 and a non-conventional optical layer 13; wherein the non-conventional optical layer 13 is an etch layer (the non-conventional optical layer 13 needs to use H) 3 PO 4 And etching to obtain the non-traditional optical film with a nearly honeycomb shape. ) (ii) a The functional layer 12 is composed of a plurality of first refractive index layers 121 and a plurality of second refractive index layers 122 which are alternately stacked, wherein the first refractive index layers are marked as H, and the second refractive index layers are marked as L; and the first and second refractive index layers 121 and 122 are arranged in the order of (H-L) -n-or (L-H) -n-; wherein n is the number of alternation of H and L or L and H. The large-angle antireflection film provided by the invention can be directly attached to the surfaces of modules in different shapes, so that the antireflection effect under the condition of multiple angles is achieved.
In some embodiments, the base layer 11 is constructed from at least one of the following materials:
and polymer resin materials such as polyethylene naphthalate (PEN), polyethylene terephthalate (PET), triacetylcellulose (TAC), cycloolefin Copolymer (COP), cycloolefin polymer (COC), and Polycarbonate (PC).
In some embodiments, the film layer material of the non-conventional optical layer 13 is made of Si, siO in different ratios 2 And Al 2 O 3 And (3) combining the components.
In some embodiments, the film material of the first refractive index film layer 121 in the functional layer 12 is TiO 2 、Nb 2 O 5 、Ta 2 O 5 And SiNx.
In some embodiments, the film material of the second refractive index film layer 122 in the functional layer 12 is SiO 2 、Al 2 O 3 、SiO、MgF 2 At least one of (1).
In some embodiments, the refractive index n2 at 550nm of the first refractive index film layer 121 satisfies: n3 is more than or equal to 2.0 and less than or equal to 3.2; the refractive index n3 of the second refractive index film layer 122 at 550nm satisfies: n2 is more than 0 and less than or equal to 1.56.
In some embodiments, the refractive index n1 at 550nm of the non-conventional optical layer 13 satisfies 1.12 < n1 ≦ 1.25; in the range of 420-680nm, the single-side reflectivity at the incidence angle of 8 degrees is less than 0.5 percent, and the single-side reflectivity at the incidence angle of 60 degrees is less than 2.5 percent.
The invention also relates to an optical lens, wherein the large-angle antireflection film is attached to at least one side of the optical lens.
The invention also relates to an imaging device, which consists of an optical module, wherein the optical module also comprises the optical lens.
In some embodiments, the optical lens has a reflectance R at 420nm to 680nm that satisfies the following condition: the single-sided reflectivity is less than 0.4% when the light enters at 8 degrees, and the single-sided reflectivity when the light enters at 60 degrees is less than 1.7%.
The structure of the non-conventional optical layer 13 of the present invention is schematically shown in fig. 1, which is a film structure, and the coiled material of the substrate layer 11 is polyethylene terephthalate (PET); the membrane structure is: siAlOx is mainly a mixture of SiO2 and Al2O3 in the film material of the second refractive index layer.
It should be understood that the refractive index here is a refractive index at a wavelength of 550 nm. The physical thickness of the film layer is 100-150nm; this film layer exhibited a certain degree of antireflection effect in the visible light region, and as shown in fig. 2, rave =0.4% on one side and Rave =2.6% at an incident angle of 60 ° on a visible light side in a wavelength range of 400 to 700 nm.
Example one
As shown in fig. 3, a large angle antireflection film 10 includes a substrate layer 11 and a three-layer film structure, wherein a coiled material of the substrate layer 11 is polyethylene terephthalate (PET); the three-layer film structure includes: starting from one side of the base layer 11, the first layer is a first refractive index layer 121, the second layer is a second refractive index layer 122, the first refractive index layer 121 and the second refractive index layer 122 are stacked in sequence, and the third layer is a non-conventional optical layer 13. Wherein the material used for the first refractive index layer 121 is Nb 2 O 5 Or TiO 2 (ii) a The material used for the second refractive index layer 122 is MgF 2 Or SiO 2 . The physical thickness ratio of each film layer of the three-layer film system structure is 1:20:21 in nm of thickness; the thickness of the first film layer is 3-5 nm, the thickness of the second film layer is 100-110 nm, and the thickness of the third film layer is 110-125 nm.
An optical lens, at least one side of the optical lens is adhered with a large-angle antireflection film. The large-angle antireflection film of the embodiment enables light rays to achieve a good antireflection effect in a visible light region, and particularly, as shown in fig. 4, in a 400-700nm waveband, rave =1.65% at an incident angle of 60 °.
It should be understood that the refractive index herein refers to the refractive index at a wavelength of 550 nm.
Example two
As shown in fig. 5, a large-angle antireflection film 10 includes a substrate layer 11 and a six-layer film structure, wherein a coiled material of the substrate layer 11 is polyethylene terephthalate (PET); the six-layer film structure comprises: the first to fifth layers are formed by stacking a first refractive index layer 121 and a second refractive index layer 122 in this order from one side of the base layer 11, and the sixth layer is the non-conventional optical layer 13. Wherein the material used for the first refractive index layer 121 is Nb 2 O 5 Or TiO 2 (ii) a The material used for the second refractive index layer 122 is MgF 2 Or SiO 2 . The physical thickness ratio of each film layer of the six-layer film system structure is 15; first film layer, nb 2 O 5 The thickness of the layer is 10-15 nm, the second film layer is SiO 2 The thickness of the layer is 25-30 nm, and Nb of the third film layer 2 O 5 The thickness of the layer is 95-105 nm, and the fourth film layer is SiO 2 The thickness of the layer is 30-35 nm, and Nb of the fifth film layer 2 O 5 The thickness of the layer is 10-15 nm, and the thickness of the non-traditional optical layer of the sixth film layer is 120-135 nm.
An optical lens, at least one side of the optical lens is adhered with a large-angle antireflection film. The large-angle antireflection film of the embodiment enables light rays to achieve a good antireflection effect in a visible light region, and specifically, as shown in fig. 6, at a wavelength of 400 to 700nm, rave =1.2% at an incident angle of 60 °.
It should be understood that the refractive index herein refers to the refractive index at a wavelength of 550 nm.
While embodiments of the invention have been disclosed above, it is not limited to the applications listed in the description and the embodiments, which are fully applicable in all kinds of fields of adaptation of the invention, and further modifications can be easily implemented by those skilled in the art, so that the invention is not limited to the specific details and the examples shown herein, without departing from the general concept defined by the claims and the scope of equivalents.

Claims (10)

1. A large-angle antireflection film is characterized by at least comprising a substrate layer, a functional layer and a non-traditional optical layer; wherein the non-conventional optical layer is an etch layer; the functional layer is composed of a plurality of first refractive index layers and a plurality of second refractive index layers which are alternately stacked, wherein the first refractive index layer is marked as H, and the second refractive index layer is marked as L; the first refractive index layer and the second refractive index layer are arranged according to the sequence of (H-L) -n-or (L-H) -n-; wherein n is the number of alternation of H and L or L and H.
2. The high angle antireflection film of claim 1 wherein the base layer is comprised of at least one of the following materials:
polyethylene naphthalate, polyethylene terephthalate, cellulose triacetate, cyclic olefin copolymers, cyclic olefin polymers, polycarbonates.
3. The high angle antireflection film of claim 1 wherein the non-conventional optical layer has layers of materials consisting of Si, siO, in different ratios 2 And Al 2 O 3 And (3) combining the components.
4. The high angle antireflection film of claim 1 wherein the first refractive index film layer of the functional layer is a TiO film 2 、Nb 2 O 5 、Ta 2 O 5 And SiNx.
5. The high angle antireflection film of claim 1 or 4 wherein the layer material of the second refractive index layer of the functional layer is SiO 2 、Al 2 O 3 、SiO、MgF 2 At least one of (a).
6. The high angle antireflection film of claim 1 wherein the refractive index n2 at 550nm of the first refractive index film layer satisfies: n3 is more than or equal to 2.0 and less than or equal to 3.2; the refractive index n3 of the second refractive index film layer at 550nm satisfies the following condition: n2 is more than 0 and less than or equal to 1.56.
7. The high angle antireflection film of claim 1 wherein the refractive index n1 at 550nm of the non-conventional optical layer satisfies 1.12 < n1 ≦ 1.25; in the range of 420-680nm, the single-side reflectivity at the incidence angle of 8 degrees is less than 0.5 percent, and the single-side reflectivity at the incidence angle of 60 degrees is less than 2.5 percent.
8. An optical lens characterized in that at least one side of the optical lens is attached with the high angle antireflection film of claim 1.
9. An imaging device, said imaging device being formed by an optical module, wherein said optical module further comprises an optical lens according to claim 8.
10. An imaging device according to claim 9, wherein the reflectance R of the optical lens at 420nm to 680nm satisfies the following condition: the single-sided reflectivity is less than 0.4% when the light enters at 8 degrees, and the single-sided reflectivity when the light enters at 60 degrees is less than 1.7%.
CN202210971813.XA 2022-08-12 2022-08-12 Large-angle antireflection film, optical lens and imaging device Pending CN115421225A (en)

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CN103091979A (en) * 2013-01-09 2013-05-08 华中科技大学 Nanoimprint template as well as preparation method and application thereof
CN104846336A (en) * 2015-03-20 2015-08-19 哈尔滨工业大学深圳研究生院 Anti-reflective micro-nano structure of sapphire surface and preparation method thereof
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