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CN115327717B - Optical path coupling method and optical path coupling device for multi-channel light receiving component - Google Patents

Optical path coupling method and optical path coupling device for multi-channel light receiving component Download PDF

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Publication number
CN115327717B
CN115327717B CN202211235414.3A CN202211235414A CN115327717B CN 115327717 B CN115327717 B CN 115327717B CN 202211235414 A CN202211235414 A CN 202211235414A CN 115327717 B CN115327717 B CN 115327717B
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China
Prior art keywords
optical
array lens
optical splitter
optical path
array
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CN115327717A (en
Inventor
侯炳泽
兴孝林
朱宪德
王志文
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Dalian Youxinguang Technology Co ltd
Wuhan Qianxi Technology Co ltd
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Dalian Youxun Technology Co ltd
Wuhan Qianxi Technology Co ltd
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Priority to CN202211235414.3A priority Critical patent/CN115327717B/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4287Optical modules with tapping or launching means through the surface of the waveguide
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4286Optical modules with optical power monitoring

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

The present disclosure relates to an optical path coupling method and an optical path coupling apparatus for a multi-channel light receiving module. The method comprises the following steps: providing a reference plane in the envelope (50); performing a first adjustment based on the reference plane, the first adjustment comprising adjusting a first attitude of the optical splitter (10) and the array lens (20) such that the plurality of optical signal channels (CH 1-CH 4) of the optical splitter are aligned with respective lenses (22) of the array lens (20); and after the first adjustment, performing a second adjustment, the second adjustment comprising synchronously moving the optical splitter (10) and the array lens (20) to adjust a second attitude of the optical splitter (10) and the array lens (20) such that the output light split by the optical splitter (10) and focused by the array lens (20) is vertically coupled to the optical coupling faces of the respective ones of the array probe chips (30). Therefore, the optical path coupling efficiency of the multi-channel light receiving component can be greatly improved.

Description

Optical path coupling method and optical path coupling device for multi-channel light receiving component
Technical Field
The present disclosure relates to the field of optical fiber communications, and in particular, to an optical path coupling method and an optical path coupling apparatus for a multi-channel optical receiving module.
Background
With the development of 5G and the Internet of things, the construction and use amount of a communication network and a data center is increased, and the requirement of the network on the speed is gradually improved. The two methods for increasing the speed are available, one method is to directly adopt a single chip with high bandwidth, which has the advantages of small structure and low power consumption of an optical device, but the requirement of the current network on the speed is far higher than the development speed of the optical chip, and the single high-speed chip does not reach the commercial stage in the fields of high speed 100G, 200G and 400G.
In view of the above, a scheme of adopting a multi-channel optical chip array is proposed, in which a multi-channel optical chip array device is packaged in one device, so that the bottleneck of the chip is broken through. However, how to implement the coupling of the multi-channel optical chip array to ensure the coupling efficiency of the multi-channel optical chip array is a technical problem to be solved in the art.
Disclosure of Invention
According to an example embodiment of the present disclosure, a light emitting receiving component and an optical path coupling method for a light emitting receiving component are proposed, which solve or at least partially solve one or more of the above-mentioned problems.
In a first aspect of the present disclosure, an optical path coupling method for a multi-channel light receiving module is provided. The optical receiving assembly comprises a tube shell, and an optical splitter, an array lens and an array detector chip which are arranged in the tube shell, wherein the optical splitter is suitable for splitting a received collimated light signal into a plurality of optical signal channels, the array lens comprises a plurality of lenses which are respectively coupled with the optical signal channels, and the array detector chip comprises a plurality of detector chips which are suitable for respectively coupling with optical signals transmitted through the plurality of lenses. The method comprises the following steps: providing a reference plane extending in an optical axis direction of the light receiving element in the package; performing a first adjustment based on the reference plane, the first adjustment comprising adjusting a first pose of the optical splitter and the array lens such that the plurality of optical signal channels of the optical splitter are aligned with respective lenses of the array lens; and after the first adjustment, performing a second adjustment, the second adjustment comprising moving the optical splitter and the array lens synchronously to adjust a second attitude of the optical splitter and the array lens such that output light split by the optical splitter and focused by the array lens is vertically coupled to the optical coupling faces of the respective ones of the array detector chips.
According to the embodiments of the present disclosure, the plurality of optical signal channels of the optical splitter are aligned with the respective lenses of the array lens by the first adjustment and the second adjustment is performed by synchronously moving the optical splitter and the array lens, whereby optical path coupling can be simultaneously performed for a plurality of channels without independently performing optical path coupling for each channel, significantly improving optical path coupling efficiency.
In some embodiments, performing a first adjustment based on the reference plane may include: adjusting the optical axes of the optical splitters and the array lenses such that the optical axes of the respective optical signal channels of the optical splitters and the respective lenses of the array lenses are aligned. Thereby, the first postures of the optical splitter and the array lens can be adjusted based on the position of the optical axis.
In some embodiments, adjusting the optical axes of the optical splitter and the array lens may include: suspending the optical splitter with a first clamp; suspending the array lens with a second clamp; and synchronously moving the first jig and the second jig so that the optical splitter and the array lens are aligned in the optical axis direction with the reference plane. Thereby, the optical device can be held in a suspended manner and the optical axis alignment of the optical device can be achieved by moving the first and second clamps synchronously.
In some embodiments, moving the first and second clamps may comprise: synchronously moving the first and second clamps to bring the respective edges of the optical splitter and the array lens against the reference plane. Thereby, the optical axis alignment of the optical splitter and the array lens can be achieved in a simple manner.
In some embodiments, providing a reference plane extending in the optical axis direction of the light receiving module in the package may include using an inner sidewall of the package as the reference plane. Thus, no additional reference plane needs to be provided, and the reference plane can be provided by the case.
In some embodiments, the first and second clamps may be vacuum nozzles to suspend the optical splitter and the array lens using vacuum suction.
In some embodiments, the method may further include providing an integral vacuum nozzle including a main body and first and second branch arms branching from the main body, the first branch arm forming the first clamp and the second branch arm forming the second clamp. Thereby, the synchronous movement of the optical splitter and the array lens can be implemented in a simple manner.
In some embodiments, performing a first adjustment based on the reference plane may include: and adjusting the heights of the optical splitters and the array lenses so that the optical path heights of the corresponding optical signal channels of the optical splitters are consistent with the optical path heights of the corresponding lenses of the array lenses.
In some embodiments, adjusting the height of the optical splitter and the array lens in the package may comprise: the first jig for holding the optical splitter and the second jig for holding the array lens are selected so that the optical path height of the optical splitter and the optical path height of the array lens coincide in a state where the optical splitter is held in the first jig and the array lens is held in the second jig.
In some embodiments, after the first adjustment, performing a second adjustment may include: providing a six-axis displacement stage, and synchronously moving the optical splitter and the array lens by using the six-axis displacement stage to determine the coupling position of the optical splitter and the array lens.
In a second aspect of the present disclosure, an optical path coupling apparatus for a multi-channel light receiving module is provided. The optical path coupling device includes: a reference plane extending in the optical axis direction of the light receiving element in the package; a first clamp configured to hold the optical splitter; a second holder configured to hold the array lens; a six-axis displacement stage comprising a carrier arm to which the first and second clamps are secured to synchronously change the spatial positions of the optical splitter and the array lens in accordance with adjustment of the six-axis displacement stage, wherein the six-axis displacement stage is configured to: performing a first adjustment to align the plurality of optical signal channels of the optical splitter with respective ones of the array lenses by moving the carrier arm based on the reference plane; and after the first adjustment, moving the carrying arm to perform a second adjustment, the second adjustment including moving the optical splitter and the array lens synchronously so that the output light split by the optical splitter and focused by the array lens is vertically coupled to the optical coupling faces of the respective detector chips of the array detector chip.
In some embodiments, the optical path coupling apparatus may further include a vacuum nozzle including a main body and a first branch arm and a second branch arm branched from the main body, the first branch arm forming the first clamp, the second branch arm forming the second clamp.
It should be understood that the statements herein reciting aspects are not intended to limit the critical or essential features of the embodiments of the present disclosure, nor are they intended to limit the scope of the present disclosure. Other features of the present disclosure will become apparent from the following description.
Drawings
The above and other features, advantages and aspects of various embodiments of the present disclosure will become more apparent by referring to the following detailed description when taken in conjunction with the accompanying drawings. In the drawings, like or similar reference characters designate like or similar elements.
Fig. 1 shows a schematic top view of the overall structure of a multi-channel light receiving assembly according to an embodiment of the present disclosure.
Fig. 2 shows a multi-channel light receiving component optical path schematic in accordance with an embodiment of the present disclosure.
Fig. 3 shows a flow chart of an optical path coupling method for a multi-channel light receiving assembly according to an embodiment of the present disclosure.
Fig. 4 shows a schematic diagram of adjusting an optical splitter and an array lens based on a reference plane.
Fig. 5 shows a flow chart of an optical path coupling method for a multi-channel light receiving assembly according to an embodiment of the present disclosure.
Fig. 6 shows an overall schematic diagram of an optical path coupling apparatus for a multi-channel light receiving module according to an embodiment of the present disclosure.
Fig. 7 shows a partial detailed view of an optical path coupling apparatus for a multi-channel light receiving module according to an embodiment of the present disclosure.
Fig. 8 illustrates a perspective view for a vacuum nozzle according to one embodiment of the present disclosure.
Fig. 9 shows a schematic view for a vacuum nozzle according to another embodiment of the present disclosure.
Detailed Description
Preferred embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
The term "including" and variations thereof as used herein is intended to be open-ended, i.e., "including but not limited to". Unless specifically stated otherwise, the term "or" means "and/or". The term "based on" means "based at least in part on". The terms "one example embodiment" and "one embodiment" mean "at least one example embodiment". The term "another embodiment" means "at least one additional embodiment". The terms "upper," "lower," "front," "rear," and the like, refer to placement or positional relationships based on the orientation or positional relationship shown in the drawings, merely for convenience in describing the principles of the disclosure, and do not indicate or imply that the referenced elements must be in a particular orientation, constructed or operated in a particular orientation, and therefore should not be taken as limiting the disclosure.
The light receiving assembly includes a plurality of channels, and for each optical path channel, the multiplexed signals from the optical splitter are transmitted through a respective lens of the array lens and then coupled to a respective detector chip of the array detector chips. For a qualified multi-channel light receiving module, the coupling performance of the optical device on each optical path channel must meet predetermined requirements. The light receiving element belongs to a high precision instrument, for example, deviations in the order of tens or microns may have an impact on performance. Any movement of either the optical splitter or the array lens will affect the coupling performance of the channels. In this case, how to efficiently realize the multi-channel optical path coupling is a crucial link in the manufacturing process of the light receiving module. According to the embodiment of the disclosure, an optical path coupling method is provided, which can significantly improve the optical path coupling efficiency. An optical path coupling method for a multi-channel light receiving module and an optical path coupling apparatus for a multi-channel light receiving module according to embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.
Fig. 1 shows an overall schematic diagram of a multi-channel light receiving assembly 100 according to an embodiment of the present disclosure. As shown in fig. 1, the multi-channel light receiving module 100 includes a package 50 and optics disposed within the package. The multi-channel light receiving module 100 may include: an adapter 40 adapted to be connected with an optical fiber, light from a light source entering the multi-channel light receiving module 100 via the adapter; an optical splitter 10 configured to split received light into a plurality of optical paths; an integral array lens 20, which may include a plurality of lenses, for focusing light from a plurality of light paths; and an array detector chip 30 configured to receive the focused light to detect the optical signal. These components may be housed in the package 50 of the multi-channel light receiving module 100. In the illustrated embodiment, a portion of the cartridge is removed to show these components for clarity.
Fig. 2 shows a schematic optical path diagram of a multi-channel light receiving assembly of an embodiment of the present disclosure. As shown in fig. 2, the multi-channel light receiving module 100 includes an optical splitter 10, an array lens 20, and an array detector chip 30. The optical splitter 10 is configured to split the received collimated optical signal into multiple optical signals. The array lens 20 includes a plurality of lenses 22 respectively coupled to the plurality of optical signals. The array detector chip 30 is configured as a plurality of detector chips (not shown) that are respectively coupled to the plurality of optical signals transmitted through the plurality of lenses 22. The detector chip is configured to convert the optical signal into an electrical signal.
In the multi-channel light receiving module 100 shown in fig. 2, the multiple optical signals from the optical splitter 10 are coupled to respective ones of the array probe chips 30 via respective lenses 22 of the array lens 20, wherein one optical path constitutes one channel. The technical difficulty in optically coupling a plurality of chips by using an array lens is very high. The reason is that the array lens 20 is moved as a whole, and any adjustment of one optical path will bring about a change in the coupling values of the other optical paths, which will result in inefficiency if the array lens 20 is adjusted blindly.
In the embodiment shown in fig. 2, the multi-channel light receiving assembly 100 is shown as 4 channels. The optical splitter 10 has 5 optical ports, the left side is an optical input port 12, the right side is 4 optical output ports 14, and light output from the optical output port of the optical splitter 10 is parallel light. The array lens 20 includes a frame, and 4 lenses are integrated on the frame. The 4 paths of parallel light coming out of the optical splitter 10 enter 4 lenses of the array lens 20 and then become converged light to irradiate onto 4 chips of the array detector chip 30. It should be understood that the 4-channel light receiving assembly 100 described above is merely an exemplary embodiment of the light receiving assembly 100, and that the light receiving assembly 100 may include other numbers of light channels. In the following embodiments, the four-channel light receiving module 100 will be described as an example, and it should be understood that this is for illustrative purposes only, and the optical path coupling method according to the embodiments of the present disclosure may be similarly implemented for other numbers of channels.
Fig. 3 shows a schematic block diagram of an optical path coupling method 200 for a multi-channel light receiving assembly according to an embodiment of the present disclosure.
At block 202, a reference plane is provided. The reference plane is provided to extend in the direction along the optical axis of the light receiving member. In the case of coupling for the optical splitter 10 and the array lens 20, the reference plane is arranged parallel to the optical propagation axis between the optical splitter 10 and the array lens 20.
At block 204, a first adjustment is performed based on the reference plane. The first adjustment may include adjusting the first attitude of the optical splitter 10 and the array lens 20 such that the plurality of optical signal channels CH1-CH4 of the optical splitter are aligned with the respective lenses 22 of the array lens 20.
At block 206, after the first adjustment, a second adjustment is performed. The second adjustment may include synchronously moving the optical splitter 10 and the array lens 20 to adjust the second postures of the optical splitter 10 and the array lens 20 such that the output light split by the optical splitter 10 and focused by the array lens 20 is vertically coupled to the light coupling surfaces of the respective ones of the array probe chips 30.
According to the optical path coupling method for a multi-channel optical receiving module of the embodiment of the present disclosure, since the plurality of optical signal channels CH1 to CH4 of the optical splitter are first aligned with the respective lenses 22 of the array lens 20 and then the optical splitter 10 and the array lens 20 are synchronously moved on the premise that the plurality of optical signal channels CH1 to CH4 of the optical splitter are aligned with the respective lenses 22 of the array lens 20, it is possible to achieve synchronous coupling of the plurality of optical signal channels CH1 to CH4 without performing a complicated and cumbersome coupling process for each optical signal channel. In this case, it can be ensured that the heights and angles of the optical paths of the optical splitter and the array lens are always consistent in the process of performing the second adjustment, so that the complicated steps of leveling and spacing between the optical paths in the existing coupling process are omitted, the optical splitter and the array lens can be easily coupled to qualified response currents, and the optical path coupling efficiency is greatly improved.
In some embodiments, performing the first adjustment based on the reference plane comprises: the optical axes of the optical splitter 10 and the array lens 20 are adjusted so that the optical axes of the respective optical signal channels CH1-CH4 of the optical splitter 10 and the optical axes of the respective lenses 22 of the array lens 20 are aligned.
Fig. 4 shows a schematic top view of the adjustment of the optical splitter and the array lens based on the reference plane. As shown in fig. 4, the optical axis of the optical splitter 10 and the optical axis of the array lens 20 can be aligned by moving the optical splitter 10 and the array lens 20 toward the reference surface, respectively, and by means of the reference surface.
In some embodiments, as shown in fig. 5, the method 300 of adjusting the optical axis of the optical splitter 10 and the array lens 20 may include: at block 302, the optical splitter 10 is suspended with a first clamp; at block 304, the array lens 20 is suspended with a second fixture; and at block 306, moving the first and second clamps so that the optical splitter 10 and the array lens 20 are aligned in the optical axis direction with the reference plane. In this case, the splitter 10 and the array lens 20 may be held by being suspended. The holding by suspension has an advantage of easy implementation in consideration of a small space within the package of the multi-channel light receiving module 100. In addition, by independently holding the optical splitter 10 and the array lens 20 by two jigs, the position adjustment of the optical splitter 10 and the array lens 20 can be easily achieved.
In some embodiments, moving the first clamp and the second clamp in synchronization may comprise: the first and second clamps are moved in synchronism to bring the respective edges of the optical splitter 10 and the array lens 20 against the reference plane. In this case, the respective edges of the optical splitter 10 and the array lens 20 may be abutted against the reference plane by moving the first and second clamps holding the optical splitter 10 and the array lens 20 toward the reference plane. Thereby, the optical splitter 10 and the array lens 20 can be aligned in the optical axis direction. This manner of adjustment is particularly suitable for the channel spacing between adjacent optical signal channels CH1-CH4 of the optical splitter 10 being equal to the lens spacing between adjacent lenses of the array lens 20. In this case, in the case where the respective edges of the optical splitter 10 and the array lens 20 are aligned against the reference plane, the optical axis of the optical splitter 10 and the optical axis of the array lens 20 are also aligned.
In some embodiments, providing the reference plane extending in the optical axis direction of the light receiving module in the package includes using an inner sidewall of the package as the reference plane. In this case, no additional setting member is required to provide the reference plane. It should be understood that this is merely exemplary, and that the surface of any other suitable component may be used as the reference surface as long as the surface of the component is parallel to the optical axis direction. In other embodiments, the reference plane may also be provided by providing additional components.
In some embodiments, the first fixture may comprise a vacuum nozzle. Similarly, the second fixture may also be a vacuum nozzle. Thus, the optical splitter 10 and the array lens 20 can be suspended by vacuum suction. Thereby, the optical device can be conveniently held. In some embodiments, the first and second clamps may be implemented by an integral vacuum nozzle. The integrated vacuum nozzle includes a main body and a first branch arm and a second branch arm branched from the main body, the first branch arm forming a first clamp, the second branch arm forming a second clamp. In the case of using an integral vacuum nozzle, it is convenient to achieve synchronous movement of the optical splitter 10 and the array lens 20. It should be understood that this is merely exemplary. In other embodiments, the first and second clamps may be independently disposed and each independently driven.
In some embodiments, in the optical path coupling method, performing the first adjustment based on the reference plane includes: the heights of the optical splitter 10 and the array lens 20 are adjusted so that the optical path heights of the respective optical signal channels CH1 to CH4 of the optical splitter 10 and the optical path heights of the respective lenses 22 of the array lens 20 coincide.
In some embodiments, adjusting the height of the optical splitter 10 and the array lens 20 in the package may include: a first jig for holding the optical splitter 10 and a second jig for holding the array lens 20 are selected. The first and second clamps are dimensioned to: in a state where the optical splitter 10 is held in the first jig and the array lens 20 is held in the second jig, the optical path height of the optical splitter 10 and the optical path height of the array lens 20 are matched. In this case, the optical path height of the optical splitter 10 and the optical path height of the array lens 20 can be ensured to be uniform by selection and/or adjustment of the size of the first jig and the second jig.
In some embodiments, after the first adjustment, performing a second adjustment may include: a six-axis displacement stage is provided, and the optical splitter 10 and the array lens 20 are synchronously moved by the six-axis displacement stage to determine the coupling position of the optical splitter 10 and the array lens 20. Since the optical splitter 10 and the array lens 20 are moved in synchronization, the optical channels of the optical splitter 10 and the array lens 20 are coupled in synchronization, and the optical path coupling efficiency is significantly improved compared to the conventional method of independently coupling for each channel.
Fig. 6 and 7 respectively show schematic diagrams of an optical path coupling apparatus for a multi-channel light receiving module according to an embodiment of the present disclosure. As shown in fig. 6 and 7, the optical path coupling apparatus 400 may include a six-axis displacement stage 410 and a support stage 450 for supporting a package. The six-axis displacement stage 410 may include a carrier arm 412, and the carrier arm 412 may be configured to carry a fixture for holding the optical device to be coupled within the multi-channel light receiving assembly. The support table 450 may fixedly hold the multi-channel light receiving module 100. The optical path coupling of the optical device to be coupled can be realized by adjusting each adjusting knob of the six-axis displacement table 410.
As shown in fig. 6, the first clamp 430 is configured to hold the optical splitter 10; the second holder 440 is configured to hold the array lens 20. In some embodiments, as shown in FIG. 6, the optical path coupling device 200 may include a vacuum nozzle 420, the vacuum nozzle 420 including a main body 480 and a first branch arm and a second branch arm branching from the main body, the first branch arm forming a first clamp 430 and the second branch arm forming a second clamp 440. In this case, the optical splitter 10 and the array lens 20 can be held via the vacuum nozzle 420. The optical splitter 10 and the array lens 20 are held by one vacuum nozzle 420, and the optical splitter 10 and the array lens 20 can be moved synchronously by the movement of the vacuum nozzle 420. In this case, only one six-axis stage needs to be provided to achieve the synchronous coupling of the multi-channel light-receiving module 100, and there is no need to provide plural sets of six-axis stages.
As shown in fig. 6 and 7, a six-axis translation stage may include a carrier arm 412 with a vacuum nozzle 420 secured to the carrier arm 412. The spatial positions of the optical splitter 10 and the array lens 20 can be synchronously changed according to the adjustment of the six-axis displacement stage.
An operation method of the optical path coupling apparatus according to the embodiment of the present disclosure is explained below with reference to fig. 6 and 7. After the cartridge 50 is fixed to the mount 250, the optical splitter 10 and the array lens 20 may be suspended and held by the vacuum nozzle 420, respectively. In the optical path coupling method, the optical splitter 10 and the array lens 20 may be moved toward the reference plane. In particular, the side edges of the optical splitter 10 and the array lens 20 may be brought into contact with the reference surface to adjust the first postures of the optical splitter 10 and the array lens 20. With this attitude adjustment, the plurality of optical signal channels CH1-CH4 of the optical splitter 10 are aligned with the respective lenses 22 of the array lens 20. Through this process, the optical axes of the plurality of optical signal channels CH1-CH4 of the optical splitter 10 can be aligned with the optical axes of the respective lenses 22 of the array lens 20.
After the plurality of optical signal channels CH1-CH4 of the optical splitter 10 are aligned with the respective lenses 22 of the array lens 20, the optical splitter 10 and the array lens 20 can be moved synchronously by adjusting the six-axis displacement stage. Thereby, the second postures of the optical splitter 10 and the array lens 20 are adjusted. In the second posture adjustment process, the output light branched by the optical splitter 10 and focused by the array lens 20 is vertically coupled to the optical coupling surfaces of the respective ones of the array probe chips 30. Thereby, multi-channel optical path coupling between the optical splitter 10 and the array lens 20 can be achieved. According to the method disclosed by the embodiment of the invention, because the light path components are positioned on the same suction nozzle of the same six-axis displacement table, the heights and angles of the light paths of the components can be ensured to be consistent, so that the complicated steps of leveling and spacing of the light paths in the existing coupling process are omitted, the components can be easily coupled to qualified response current, and the production efficiency is greatly improved.
Fig. 8 and 9 respectively illustrate a vacuum nozzle according to an embodiment of the present disclosure. In the embodiment of the vacuum nozzle 200 shown in fig. 8, the first and second fixtures 430 and 440 may have the same optical axis height. This is particularly suitable in the case where the optical splitter 10 and the array lens 20 have the same height. In the embodiment of the vacuum nozzle 200' shown in fig. 9, the first and second fixtures 430' and 440' may have the same optical axis height. This is particularly suitable in the case where the optical splitter 10 and the array lens 20 have different heights. In the optical path coupling method for a multi-channel light receiving module, a user may select the first jig 430 and the second jig 440 of different sizes as needed so that the optical axes of the optical splitter 10 held by the first jig 430 and the array lens 20 held by the second jig 440 are on the same height. This can also significantly improve the optical path coupling efficiency. In other embodiments, the vacuum nozzle may be configured with an adjustable optical axis height. It should be understood that the vacuum nozzle of the illustrated embodiment is merely exemplary, and the vacuum nozzle may include any other embodiments as long as it can reliably suck the optical device.
Further, while operations are depicted in a particular order, this should be understood as requiring that such operations be performed in the particular order shown or in sequential order, or that all illustrated operations be performed, to achieve desirable results. Under certain circumstances, multitasking and parallel processing may be advantageous. Likewise, while several specific implementation details are included in the above discussion, these should not be construed as limitations on the scope of the disclosure. Certain features that are described in the context of separate embodiments can also be implemented in combination in a single implementation. Conversely, various features that are described in the context of a single implementation can also be implemented in multiple implementations separately or in any suitable subcombination.
Although the subject matter has been described in language specific to structural features and/or methodological acts, it is to be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are disclosed as example forms of implementing the claims.

Claims (12)

1. An optical path coupling method for a multi-channel light receiving module, the light receiving module comprising a package (50) and an optical splitter (10), an array lens (20) and an array detector chip (30) arranged within the package (50), the optical splitter (10) being adapted to split a received collimated light signal into a plurality of light signal channels (CH 1-CH 4), the array lens (20) comprising a plurality of lenses (22) respectively coupled to the light signal channels (CH 1-CH 4), the array detector chip (30) comprising a plurality of detector chips adapted to respectively couple light signals transmitted through the plurality of lenses (22), the method comprising:
providing a reference plane extending in an optical axis direction of the light receiving component in the package (50);
performing a first adjustment based on the reference plane, the first adjustment comprising adjusting a first attitude of the optical splitter (10) and the array lens (20) such that the plurality of optical signal channels (CH 1-CH 4) of the optical splitter are aligned with respective lenses (22) of the array lens (20); and
after the first adjustment, a second adjustment is performed, which includes synchronously moving the optical splitter (10) and the array lens (20) to adjust a second attitude of the optical splitter (10) and the array lens (20) such that the output light split by the optical splitter (10) and focused by the array lens (20) is vertically coupled to the optical coupling faces of the respective detector chips of the array detector chip (30).
2. The optical path coupling method according to claim 1, wherein performing the first adjustment based on the reference plane comprises:
adjusting the optical axes of the optical splitters (10) and the array lens (20) such that the optical axes of the respective optical signal channels (CH 1-CH 4) of the optical splitters (10) and the respective lenses (22) of the array lens (20) are aligned.
3. The optical path coupling method according to claim 2, wherein adjusting the optical axes of the optical splitter (10) and the array lens (20) comprises:
suspending the optical splitter (10) with a first clamp;
suspending the array lens (20) with a second clamp; and
moving the first and second jigs so that the optical splitter (10) and the array lens (20) are aligned in the optical axis direction with the reference plane.
4. The optical path coupling method according to claim 3, wherein moving the first and second clamps comprises:
moving the first and second clamps synchronously to bring respective edges of the optical splitter (10) and the array lens (20) against the reference plane.
5. The optical path coupling method according to claim 4, wherein providing a reference plane extending in the optical axis direction of the light receiving element in the package (50) includes using an inner sidewall of the package (50) as the reference plane.
6. The optical path coupling method according to any one of claims 3 to 5, wherein the first and second jigs are vacuum nozzles to suspend the optical splitter (10) and the array lens (20) by vacuum suction.
7. The method according to claim 6, further comprising providing an integral vacuum nozzle including a main body and first and second branch arms branching from the main body, the first branch arm forming the first clamp and the second branch arm forming the second clamp.
8. The optical path coupling method according to any one of claims 1 to 5 and 7, wherein performing a first adjustment based on the reference plane comprises:
the heights of the optical splitters (10) and the array lenses (20) are adjusted so that the optical path heights of the respective optical signal channels (CH 1-CH 4) of the optical splitters (10) and the optical path heights of the respective lenses (22) of the array lenses (20) are consistent.
9. The optical path coupling method according to claim 8, wherein adjusting the heights of the optical splitter (10) and the array lens (20) in the package (50) comprises:
selecting a first jig for holding the optical splitter (10) and a second jig for holding the array lens (20) so that the optical path height of the optical splitter (10) and the optical path height of the array lens (20) coincide in a state where the optical splitter (10) is held in the first jig and the array lens (20) is held in the second jig.
10. The optical path coupling method of any of claims 1-5, 7 and 9, wherein performing a second adjustment after the first adjustment comprises:
providing a six-axis displacement stage, and synchronously moving the optical splitter (10) and the array lens (20) by using the six-axis displacement stage to determine the coupling positions of the optical splitter (10) and the array lens (20).
11. An optical path coupling device for a multi-channel light receiving module, the light receiving module comprising a package (50) and an optical splitter (10), an array lens (20) and an array detector chip (30) arranged within the package (50), the optical splitter (10) being adapted to split a received collimated light signal into a plurality of light signal channels (CH 1-CH 4), the array lens (20) comprising a plurality of lenses (22) respectively coupled with the light signal channels (CH 1-CH 4), the array detector chip (30) comprising a plurality of detector chips adapted to respectively coupled with light signals transmitted through the plurality of lenses (22), the optical path coupling device comprising:
a reference plane extending in the optical axis direction of the light receiving module in the package (50);
a first clamp (430) configured to hold the optical splitter (10);
a second holder (440) configured to hold the array lens (20);
a six-axis displacement stage (410) comprising a carrier arm (412) to which the first clamp (430) and the second clamp (440) are fixed to synchronously change the spatial position of the optical splitter (10) and the array lens (20) according to the adjustment of the six-axis displacement stage,
wherein the six-axis displacement stage is configured to:
performing a first adjustment to align a plurality of optical signal channels (CH 1-CH 4) of the optical splitter with respective lenses (22) of the array lens (20) by moving the carrier arm based on the reference plane; and
after the first adjustment, moving the carrying arm to perform a second adjustment, the second adjustment comprising moving the optical splitter (10) and the array lens (20) synchronously such that the output light split by the optical splitter (10) and focused by the array lens (20) is vertically coupled to the optical coupling faces of the respective detector chips of the array detector chip (30).
12. The optical path coupling apparatus according to claim 11, wherein the optical path coupling apparatus further comprises a vacuum nozzle (420), the vacuum nozzle (420) comprising a main body portion and a first branch arm and a second branch arm branching from the main body portion, the first branch arm forming the first clamp (430), the second branch arm forming the second clamp (440).
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