CN115327717B - Optical path coupling method and optical path coupling device for multi-channel light receiving component - Google Patents

Abstract

The present disclosure relates to an optical path coupling method and an optical path coupling device for a multi-channel light receiving assembly. The method includes: providing a reference plane in the package (50); based on the reference plane, performing a first adjustment, the first adjustment includes adjusting a first attitude of the optical splitter (10) and the array lens (20), so that the light split aligning the plurality of optical signal channels (CH1‑CH4) of the array lens (20) with the corresponding lenses (22) of the array lens (20); and after the first adjustment, performing a second adjustment comprising synchronously moving the optical splitter (10) and the array lens (20), to adjust the second posture of the optical splitter (10) and the array lens (20), so that the The output light is coupled vertically to the light coupling faces of corresponding detector chips of the array detector chip (30). Thus, the optical coupling efficiency of the multi-channel light receiving component can be greatly improved.

Description

Optical path coupling method and optical path coupling device for multi-channel light receiving component

technical field

The present disclosure mainly relates to the field of optical fiber communication, and particularly relates to an optical path coupling method and an optical path coupling device for multi-channel optical receiving components.

Background technique

With the development of 5G and the Internet of Things, the construction and use of communication networks and data centers have increased, and the network's requirements for speed are also gradually increasing. There are two ways to increase the rate. One is to directly use a high-bandwidth single chip. The advantage of this is that the structure of the optical device is small and the power consumption is also small. However, the current network's demand for speed is far greater than that of optical chips. In the field of high-speed 100G, 200G and 400G, a single high-speed chip has not yet reached the commercial stage.

In view of this, a scheme of using a multi-channel optical chip array is proposed, in which the multi-channel optical chip array device is packaged in one device, thus breaking through the bottleneck of the chip. However, how to realize the coupling of the multi-channel optical chip array to ensure the coupling efficiency of the multi-channel optical chip array is a technical problem to be solved urgently in this field.

Contents of the invention

According to example embodiments of the present disclosure, a light transmitting and receiving component and an optical path coupling method for the light transmitting and receiving component are proposed, which solve or at least partially solve one or more of the above-mentioned problems.

In a first aspect of the present disclosure, an optical path coupling method for a multi-channel light receiving component is provided. The light-receiving component includes a tube shell and an optical splitter, an array lens, and an array detector chip arranged in the tube shell, and the optical splitter is suitable for dividing the received collimated light signal into a plurality of optical signals The array lens includes a plurality of lenses respectively coupled to the optical signal channel, and the array detector chip includes a plurality of detector chips adapted to be respectively coupled to the optical signals passing through the plurality of lenses. The method includes: providing a reference plane extending along the optical axis direction of the light receiving component in the package; performing a first adjustment based on the reference plane, the first adjustment including adjusting the optical branch the first posture of the optical splitter and the array lens, so that the plurality of optical signal channels of the optical splitter are aligned with the corresponding lenses of the array lens; and after the first adjustment, perform a second adjustment, so The second adjustment includes synchronously moving the optical splitter and the array lens to adjust the second attitude of the optical splitter and the array lens, so that the optical splitter and the optical splitter pass through The output light focused by the array lens is vertically coupled to the light coupling surface of the corresponding detector chip of the array detector chip.

According to an embodiment of the present disclosure, the multiple optical signal channels of the optical splitter are aligned with the corresponding lenses of the array lens through the first adjustment and the optical splitter and the array lens are moved synchronously. By performing the second adjustment, the optical path coupling can be performed synchronously on multiple channels without performing optical path coupling on each channel independently, which significantly improves the optical path coupling efficiency.

In some embodiments, performing the first adjustment based on the reference plane may include: adjusting the optical axes of the optical splitter and the array lens, so that the optical axes of the corresponding optical signal channels of the optical splitter aligned with the optical axis of the corresponding lens of the array lens. Thus, the first attitude of the optical splitter and the array lens can be adjusted based on the position of the optical axis.

In some embodiments, adjusting the optical axis of the optical splitter and the array lens may include: suspending the optical splitter with a first jig; suspending the array lens with a second jig; and synchronously moving the The first jig and the second jig are used so that the optical splitter and the array lens are aligned along the optical axis using the reference plane. Thereby, the optical device can be held in a suspension manner and the alignment of the optical axis of the optical device can be achieved by synchronously moving the first jig and the second jig.

In some embodiments, moving the first jig and the second jig may include: synchronously moving the first jig and the second jig to align the optical splitter and the corresponding edge of the array lens against the datum plane. Thereby, alignment of the optical axes of the optical splitter and the array lens can be achieved in a simple manner.

In some embodiments, providing a reference plane extending along the optical axis direction of the light receiving component in the package may include using an inner sidewall of the package as the reference plane. Therefore, there is no need to set an additional reference plane, and the tube shell can be used to provide a reference plane.

In some embodiments, the first jig and the second jig may be vacuum nozzles, so as to suspend the optical splitter and the array lens by vacuum suction.

In some embodiments, the method may further include providing an integral vacuum nozzle comprising a main body and first and second branch arms branching from the main body, the first branch An arm forms said first clamp and said second branch arm forms said second clamp. Thereby, a synchronized movement of the optical splitter and the array lens can be implemented in a simple manner.

In some embodiments, performing the first adjustment based on the reference plane may include: adjusting the heights of the optical splitter and the array lens, so that the optical path heights of the corresponding optical signal channels of the optical splitter and The optical path heights of the corresponding lenses of the array lens are consistent.

In some embodiments, adjusting the heights of the optical splitter and the array lens in the package may include: selecting a first fixture for holding the optical splitter and a first fixture for holding the array the second fixture of the lens, so that the optical path height of the optical splitter and the The optical paths of the array lenses are highly consistent.

In some embodiments, after the first adjustment, performing the second adjustment may include: providing a six-axis translation stage, and using the six-axis translation stage to synchronously move the optical splitter and the array lens , to determine the coupling position of the optical splitter and the array lens.

In a second aspect of the present disclosure, an optical path coupling device for a multi-channel light receiving assembly is provided. The optical path coupling device includes: a reference plane extending along the optical axis of the light-receiving component in the package; a first clamp configured to hold the optical splitter; a second clamp configured to hold the optical splitter the array lens; a six-axis translation stage including a carrying arm, the first fixture and the second fixture are fixed to the carrying arm to change the light synchronously according to the adjustment of the six-axis translation stage The spatial position of the splitter and the array lens, wherein the six-axis translation stage is configured to: move the carrying arm based on the reference plane to perform a first adjustment, so that a plurality of optical splitters aligning optical signal paths with corresponding lenses of the array lens; and after the first adjustment, moving the carrier arm to perform a second adjustment, the second adjustment comprising synchronously moving the optical splitter and The array lens is such that the output light branched by the optical splitter and focused by the array lens is vertically coupled to the optical coupling surface of the corresponding detector chip of the array detector chip.

In some embodiments, the optical path coupling device may further include a vacuum nozzle, the vacuum nozzle includes a main body, a first branch arm and a second branch arm branched from the main body, the first branch arm forms the first A clamp, said second branch arm forming said second clamp.

It should be understood that what is described in the Summary of the Invention is not intended to limit the key or important features of the embodiments of the present disclosure, nor is it intended to limit the scope of the present disclosure. Other features of the present disclosure will be readily understood through the following description.

Description of drawings

The above and other features, advantages and aspects of the various embodiments of the present disclosure will become more apparent with reference to the following detailed description when taken in conjunction with the accompanying drawings. In the drawings, the same or similar reference numerals denote the same or similar elements.

Fig. 1 shows a schematic top view of the overall structure of a multi-channel light receiving assembly according to an embodiment of the present disclosure.

Fig. 2 shows a schematic diagram of an optical path of a multi-channel light receiving component according to an embodiment of the present disclosure.

Fig. 3 shows a flowchart of an optical path coupling method for a multi-channel light receiving assembly according to an embodiment of the present disclosure.

Fig. 4 shows a schematic diagram of adjusting an optical splitter and an array lens based on a reference plane.

Fig. 5 shows a flow chart of an optical path coupling method for a multi-channel light receiving assembly according to an embodiment of the present disclosure.

Fig. 6 shows an overall schematic diagram of an optical path coupling device for a multi-channel light receiving assembly according to an embodiment of the present disclosure.

Fig. 7 shows a partial detailed view of an optical path coupling device for a multi-channel light receiving assembly according to an embodiment of the present disclosure.

Figure 8 shows a perspective view of a nozzle for a vacuum according to one embodiment of the present disclosure.

FIG. 9 shows a schematic diagram for a vacuum nozzle according to another embodiment of the present disclosure.

Detailed ways

Preferred embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although preferred embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure can be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

As used herein, the term "comprise" and its variants mean open inclusion, ie "including but not limited to". The term "or" means "and/or" unless otherwise stated. The term "based on" means "based at least in part on". The terms "one example embodiment" and "one embodiment" mean "at least one example embodiment." The term "another embodiment" means "at least one further embodiment". The terms "upper", "lower", "front", "rear" and other words indicating placement or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the principles of the present disclosure, rather than indicating or implying References to elements must have a particular orientation, be constructed, or operate in a particular orientation, and thus should not be construed as limiting the disclosure.

The light receiving component includes a plurality of channels, and for each optical channel, the multi-channel signal from the optical splitter passes through the corresponding lens of the array lens, and then is coupled to the corresponding detector chip of the array detector chip. For a qualified multi-channel optical receiving component, the coupling performance of the optical device on each optical channel must meet the predetermined requirements. Light-receiving components are high-precision instruments, for example, deviations of tens or several microns may affect performance. Any movement of either the optical splitter or the array lens will affect the coupling performance of the channel. In this case, how to efficiently realize multi-channel optical coupling is a crucial link in the manufacturing process of the light-receiving component. According to an embodiment of the present disclosure, an optical path coupling method is provided, which can significantly improve the optical path coupling efficiency. An optical path coupling method for a multi-channel light receiving assembly and an optical path coupling device for a multi-channel light receiving assembly according to embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings.

FIG. 1 shows an overall schematic diagram of a multi-channel light receiving component 100 according to an embodiment of the present disclosure. As shown in FIG. 1 , the multi-channel light receiving assembly 100 includes a package 50 and optical devices arranged in the package. The multi-channel light-receiving assembly 100 may include: an adapter 40 adapted to be connected with an optical fiber, the light from the light source enters the multi-channel light-receiving assembly 100 via the adapter; an optical splitter 10 configured to split the received light into multiple an optical path; an integrated array lens 20, which may include multiple lenses, for focusing light from multiple optical paths; and an array detector chip 30, configured to receive the focused light to detect optical signals. These components may be accommodated in the package 50 of the multi-channel light receiving module 100 . In the illustrated embodiment, a portion of the package has been cut away to show these components for clarity.

FIG. 2 shows a schematic diagram of an optical path of a multi-channel light receiving component according to an embodiment of the present disclosure. As shown in FIG. 2 , the multi-channel light receiving component 100 includes an optical splitter 10 , an array lens 20 and an array detector chip 30 . The optical splitter 10 is configured to split the received collimated optical signal into multiple optical signals. The array lens 20 includes a plurality of lenses 22 respectively coupled to the multiple optical signals. The array detector chip 30 is configured as a plurality of detector chips (not shown in the figure) respectively coupled with the multi-channel optical signals passing through the plurality of lenses 22 . The detector chip is configured to convert the optical signal into an electrical signal.

In the multi-channel light-receiving assembly 100 shown in FIG. 2 , the multi-channel optical signals from the optical splitter 10 are coupled to the corresponding detector chips of the array detector chip 30 through the corresponding lenses 22 of the array lens 20, wherein one optical path constitutes a channel. It is very difficult to implement optical coupling of multiple chips by using an array lens. The reason is that the array lens 20 moves as a whole, any adjustment of one optical path will bring changes in the coupling values of other optical paths, and if the array lens 20 is adjusted blindly, the efficiency will be low.

In the embodiment shown in FIG. 2, the multi-channel light receiving assembly 100 is shown as 4 channels. The optical splitter 10 has five optical ports, one light inlet port 12 on the left, and four optical outlet ports 14 on the right side, and the light coming out from the optical splitter 10 output port is parallel light. The array lens 20 includes a frame, and 4 lenses are integrated on the frame. The 4 paths of parallel light coming out of the optical splitter 10 enter the 4 lenses of the array lens 20 and become converged light to irradiate the 4 chips of the array detector chip 30 . It should be understood that the above-mentioned 4-channel light receiving component 100 is only an exemplary embodiment of the light receiving component 100 , and the light receiving component 100 may include other numbers of light channels. In the following embodiments, the four-channel optical receiving assembly 100 will be used as an example for illustration, and it should be understood that this is only for the purpose of illustration, and the optical path coupling according to the embodiments of the present disclosure can be similarly implemented for other numbers of channels. method.

FIG. 3 shows a schematic block diagram of an optical path coupling method 200 for a multi-channel optical receiving assembly according to an embodiment of the present disclosure.

At block 202, a reference plane is provided. The reference plane is set to extend in a direction along the optical axis of the light receiving assembly. In the case of coupling for the optical splitter 10 and the array lens 20 , the reference plane is configured to be parallel to the light propagation axis between the optical splitter 10 and the array lens 20 .

At block 204, based on the reference plane, a first adjustment is performed. The first adjustment may include adjusting the first attitude of the optical splitter 10 and the array lens 20 so that the plurality of optical signal channels CH1 - CH4 of the optical splitter are aligned with the corresponding lenses 22 of the array lens 20 .

At block 206, after the first adjustment, a second adjustment is performed. The second adjustment may include synchronously moving the optical splitter 10 and the array lens 20 to adjust the second attitude of the optical splitter 10 and the array lens 20, so that The output light is coupled vertically to the light coupling facets of the corresponding detector chips of the array detector chips 30 .

According to the optical path coupling method for a multi-channel light receiving assembly according to the embodiment of the present disclosure, since the multiple optical signal channels CH1-CH4 of the optical splitter are first aligned with the corresponding lens 22 of the array lens 20, and then the light On the premise that the multiple optical signal channels CH1-CH4 of the splitter are aligned with the corresponding lens 22 of the array lens 20, the optical splitter 10 and the array lens 20 are moved synchronously, thereby enabling multiple optical signal channels CH1-CH4 Synchronous coupling without complex and cumbersome coupling process for each optical signal channel. In this case, it can be ensured that the optical path heights and angles of the optical splitter and the array lens are always consistent during the second adjustment process, which saves the complicated process in the existing coupling process. The step of finding the parallelism and the distance between the optical paths can easily couple to the qualified response current, which greatly improves the coupling efficiency of the optical path.

In some embodiments, performing the first adjustment based on the reference plane includes: adjusting the optical axes of the optical splitter 10 and the array lens 20, so that the optical axes of the corresponding optical signal channels CH1-CH4 of the optical splitter 10 and the array lens The optical axes of the corresponding lenses 22 of 20 are aligned.

Fig. 4 shows a schematic top view of adjusting an optical splitter and an array lens based on a reference plane. As shown in FIG. 4 , the optical axis of the optical splitter 10 and the optical axis of the array lens 20 can be aligned by moving the optical splitter 10 and the array lens 20 towards the reference plane respectively, and by using the reference plane.

In some embodiments, as shown in FIG. 5 , the method 300 for adjusting the optical axis of the optical splitter 10 and the array lens 20 may include: at block 302, suspending the optical splitter 10 with a first clamp; at block 304 at block 306 , move the first and second jigs so that the optical splitter 10 and the array lens 20 are aligned along the optical axis using the reference plane. In this case, the splitter 10 and the array lens 20 can be held by suspension. Considering the narrow space inside the package of the multi-channel light-receiving assembly 100 , holding by suspension has the advantage of being easy to implement. In addition, the optical splitter 10 and the array lens 20 are held independently by two clamps, and the position adjustment of the optical splitter 10 and the array lens 20 can be realized conveniently.

In some embodiments, synchronously moving the first jig and the second jig may include: synchronously moving the first jig and the second jig to abut corresponding edges of the optical splitter 10 and the array lens 20 against the reference plane. In this case, the respective edges of the optical splitter 10 and the array lens 20 can be abutted against the reference plane by moving the first jig and the second jig holding the optical splitter 10 and the array lens 20 toward the reference plane. . Thus, the optical splitter 10 and the array lens 20 can be aligned in the optical axis direction. This adjustment method is especially suitable for the channel spacing of adjacent optical signal channels CH1 - CH4 of the optical splitter 10 to be equal to the lens spacing between adjacent lenses of the array lens 20 . In this case, with the respective edges of the optical splitter 10 and the array lens 20 aligned against the reference plane, the optical axes of the optical splitter 10 and the array lens 20 are also aligned.

In some embodiments, providing a reference plane in the package extending along the direction of the optical axis of the light receiving assembly includes using an inner sidewall of the package as the reference plane. In this case, no additional additional arrangement components are required to provide the datum plane. It should be understood that this is only exemplary, and the surface of any other suitable component may be used to provide as the reference surface as long as the surface of the component is parallel to the optical axis direction. In other embodiments, the datum plane may also be provided by providing additional components.

In some embodiments, the first fixture may include a vacuum nozzle. Similarly, the second clamp can also be a vacuum nozzle. Thus, the optical splitter 10 and the array lens 20 can be suspended by vacuum suction. Thereby, the optical device can be conveniently held. In some embodiments, the first and second clamps can be achieved by an integral vacuum nozzle. The integral vacuum nozzle includes a main body and first and second branch arms branching from the main body, the first branch arm forming a first clamp and the second branch arm forming a second clamp. In the case of using an integrated vacuum nozzle, the synchronous movement of the optical splitter 10 and the array lens 20 can be realized conveniently. It should be understood that this is exemplary only. In other embodiments, the first gripper and the second gripper may be provided independently and each driven independently.

In some embodiments, in the optical path coupling method, performing the first adjustment based on the reference plane includes: adjusting the heights of the optical splitter 10 and the array lens 20, so that the corresponding optical signal channels CH1-CH4 of the optical splitter 10 The optical path height is consistent with the optical path height of the corresponding lens 22 of the array lens 20 .

In some embodiments, adjusting the heights of the optical splitter 10 and the array lens 20 in the package may include: selecting a first jig for holding the optical splitter 10 and a second jig for holding the array lens 20 . The dimensions of the first jig and the second jig are set to: the optical path height and the array lens of the optical splitter 10 are held in the first jig and the array lens 20 is kept in the second jig in the optical splitter 10 The optical paths of 20 are highly consistent. In this case, the selection and/or size adjustment of the first jig and the second jig can ensure that the optical path height of the optical splitter 10 is consistent with the optical path height of the array lens 20 .

In some embodiments, after the first adjustment, performing the second adjustment may include: providing a six-axis translation stage, using a six-axis translation stage to move the optical splitter 10 and the array lens 20 synchronously to determine the optical split The coupling position of the device 10 and the array lens 20. Since the optical splitter 10 and the array lens 20 are moved synchronously, a plurality of optical channels of the optical splitter 10 and the array lens 20 are coupled synchronously, compared with the traditional method of coupling independently for each channel, significantly The optical coupling efficiency is improved.

FIG. 6 and FIG. 7 respectively show schematic diagrams of an optical coupling device for a multi-channel light receiving assembly according to an embodiment of the present disclosure. As shown in FIG. 6 and FIG. 7 , the optical coupling device 400 may include a six-axis translation stage 410 and a supporting platform 450 for supporting the package. The six-axis translation stage 410 can include a carrying arm 412 that can be configured to carry a fixture for holding optical devices to be coupled within the multi-channel light receiving assembly. The support table 450 may fixedly hold the multi-channel light receiving assembly 100 . The optical path coupling of the optical device to be coupled can be realized by adjusting the adjustment knobs of the six-axis translation stage 410 .

As shown in FIG. 6 , the first fixture 430 is configured to hold the optical splitter 10 ; the second fixture 440 is configured to hold the array lens 20 . In some embodiments, as shown in FIG. 6 , the optical path coupling device 200 may include a vacuum nozzle 420, the vacuum nozzle 420 includes a main body 480 and a first branch arm and a second branch arm branched from the main body, the first branch arm forms The first clamp 430 and the second branch arm form a second clamp 440 . In this case, holding of the optical splitter 10 and the array lens 20 may be achieved via the vacuum nozzle 420 . A vacuum nozzle 420 is used to hold the optical splitter 10 and the array lens 20 , and the optical splitter 10 and the array lens 20 can be moved synchronously through the movement of the vacuum nozzle 420 . In this case, only one six-axis translation stage needs to be provided to realize the synchronous coupling of the multi-channel light receiving assembly 100, instead of multiple sets of six-axis translation stages.

As shown in FIGS. 6 and 7 , the six-axis translation stage may include a carrying arm 412 to which the vacuum nozzle 420 is fixed. The spatial positions of the optical splitter 10 and the array lens 20 can be changed synchronously according to the adjustment of the six-axis translation stage.

The operation method of the optical path coupling device according to the embodiment of the present disclosure will be described below with reference to FIG. 6 and FIG. 7 . After the package 50 is fixed to the supporting platform 250 , the optical splitter 10 and the array lens 20 can be suspended and held by the vacuum nozzle 420 . In the optical path coupling method, the optical splitter 10 and the array lens 20 may be moved toward the reference plane. In particular, the side edges of the optical splitter 10 and the array lens 20 can be brought into contact with the reference plane, so as to adjust the first attitude of the optical splitter 10 and the array lens 20 . Through this attitude adjustment, the multiple optical signal channels CH1 - CH4 of the optical splitter 10 are aligned with the corresponding lenses 22 of the array lens 20 . Through this process, the optical axes of the multiple optical signal channels CH1 - CH4 of the optical splitter 10 can be aligned with the optical axes of the corresponding lenses 22 of the array lens 20 .

After the multiple optical signal channels CH1-CH4 of the optical splitter 10 are aligned with the corresponding lenses 22 of the array lens 20, the optical splitter 10 and the array lens 20 can be moved synchronously by adjusting the six-axis translation stage. Thus, the second postures of the optical splitter 10 and the array lens 20 are adjusted. During the second attitude adjustment process, the output light split by the optical splitter 10 and focused by the array lens 20 is vertically coupled to the optical coupling surface of the corresponding detector chip of the array detector chip 30 . Thus, multi-channel optical path coupling between the optical splitter 10 and the array lens 20 can be realized. According to the method of the embodiment of the present disclosure, since the optical path components are located on the same suction nozzle of the same six-axis translation stage, the height and angle of the optical path of the components can be guaranteed to be consistent, which saves the complicated parallelism and optical path in the existing coupling process Pitch steps can be easily coupled to qualified response currents, greatly improving production efficiency.

8 and 9 illustrate vacuum nozzles according to embodiments of the present disclosure, respectively. In the embodiment of the vacuum nozzle 200 shown in FIG. 8, the first clamp 430 and the second clamp 440 may have the same optical axis height. This is especially suitable for the case where the optical splitter 10 and the array lens 20 have the same height. In the embodiment of the vacuum nozzle 200' shown in FIG. 9, the first clamp 430' and the second clamp 440' may have the same optical axis height. This is especially suitable for situations where the optical splitter 10 and the array lens 20 have different heights. In the optical path coupling method for multi-channel light-receiving components, the user can select different sizes of the first fixture 430 and the second fixture 440 according to needs, so that the optical splitter 10 held by the first fixture 430 and the second fixture The optical axes of the array lenses 20 held by 440 are at the same height. This can also significantly improve the coupling efficiency of the optical path. In other embodiments, the vacuum nozzle may be configured with an adjustable optical axis height. It should be understood that the vacuum nozzle of the illustrated embodiment is only exemplary, and the vacuum nozzle may include any other embodiment as long as it can reliably absorb the optical device.

In addition, while operations are depicted in a particular order, this should be understood to require that such operations be performed in the particular order shown, or in sequential order, or that all illustrated operations should be performed to achieve desirable results. Under certain circumstances, multitasking and parallel processing may be advantageous. Likewise, while the above discussion contains several specific implementation details, these should not be construed as limitations on the scope of the disclosure. Certain features that are described in the context of separate embodiments can also be implemented in combination in a single implementation. Conversely, various features that are described in the context of a single implementation can also be implemented in multiple implementations separately or in any suitable subcombination.

Although the subject matter has been described in language specific to structural features and/or methodological acts, it is to be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are merely example forms of implementing the claims.

Claims (12)

1. An optical path coupling method for a multi-channel light receiving module, the light receiving module comprising a package (50) and an optical splitter (10), an array lens (20) and an array detector chip (30) arranged within the package (50), the optical splitter (10) being adapted to split a received collimated light signal into a plurality of light signal channels (CH 1-CH 4), the array lens (20) comprising a plurality of lenses (22) respectively coupled to the light signal channels (CH 1-CH 4), the array detector chip (30) comprising a plurality of detector chips adapted to respectively couple light signals transmitted through the plurality of lenses (22), the method comprising:

providing a reference plane extending in an optical axis direction of the light receiving component in the package (50);

performing a first adjustment based on the reference plane, the first adjustment comprising adjusting a first attitude of the optical splitter (10) and the array lens (20) such that the plurality of optical signal channels (CH 1-CH 4) of the optical splitter are aligned with respective lenses (22) of the array lens (20); and

after the first adjustment, a second adjustment is performed, which includes synchronously moving the optical splitter (10) and the array lens (20) to adjust a second attitude of the optical splitter (10) and the array lens (20) such that the output light split by the optical splitter (10) and focused by the array lens (20) is vertically coupled to the optical coupling faces of the respective detector chips of the array detector chip (30).

2. The optical path coupling method according to claim 1, wherein performing the first adjustment based on the reference plane comprises:

adjusting the optical axes of the optical splitters (10) and the array lens (20) such that the optical axes of the respective optical signal channels (CH 1-CH 4) of the optical splitters (10) and the respective lenses (22) of the array lens (20) are aligned.

3. The optical path coupling method according to claim 2, wherein adjusting the optical axes of the optical splitter (10) and the array lens (20) comprises:

suspending the optical splitter (10) with a first clamp;

suspending the array lens (20) with a second clamp; and

moving the first and second jigs so that the optical splitter (10) and the array lens (20) are aligned in the optical axis direction with the reference plane.

4. The optical path coupling method according to claim 3, wherein moving the first and second clamps comprises:

moving the first and second clamps synchronously to bring respective edges of the optical splitter (10) and the array lens (20) against the reference plane.

5. The optical path coupling method according to claim 4, wherein providing a reference plane extending in the optical axis direction of the light receiving element in the package (50) includes using an inner sidewall of the package (50) as the reference plane.

6. The optical path coupling method according to any one of claims 3 to 5, wherein the first and second jigs are vacuum nozzles to suspend the optical splitter (10) and the array lens (20) by vacuum suction.

7. The method according to claim 6, further comprising providing an integral vacuum nozzle including a main body and first and second branch arms branching from the main body, the first branch arm forming the first clamp and the second branch arm forming the second clamp.

8. The optical path coupling method according to any one of claims 1 to 5 and 7, wherein performing a first adjustment based on the reference plane comprises:

the heights of the optical splitters (10) and the array lenses (20) are adjusted so that the optical path heights of the respective optical signal channels (CH 1-CH 4) of the optical splitters (10) and the optical path heights of the respective lenses (22) of the array lenses (20) are consistent.

9. The optical path coupling method according to claim 8, wherein adjusting the heights of the optical splitter (10) and the array lens (20) in the package (50) comprises:

selecting a first jig for holding the optical splitter (10) and a second jig for holding the array lens (20) so that the optical path height of the optical splitter (10) and the optical path height of the array lens (20) coincide in a state where the optical splitter (10) is held in the first jig and the array lens (20) is held in the second jig.

10. The optical path coupling method of any of claims 1-5, 7 and 9, wherein performing a second adjustment after the first adjustment comprises:

providing a six-axis displacement stage, and synchronously moving the optical splitter (10) and the array lens (20) by using the six-axis displacement stage to determine the coupling positions of the optical splitter (10) and the array lens (20).

11. An optical path coupling device for a multi-channel light receiving module, the light receiving module comprising a package (50) and an optical splitter (10), an array lens (20) and an array detector chip (30) arranged within the package (50), the optical splitter (10) being adapted to split a received collimated light signal into a plurality of light signal channels (CH 1-CH 4), the array lens (20) comprising a plurality of lenses (22) respectively coupled with the light signal channels (CH 1-CH 4), the array detector chip (30) comprising a plurality of detector chips adapted to respectively coupled with light signals transmitted through the plurality of lenses (22), the optical path coupling device comprising:

a reference plane extending in the optical axis direction of the light receiving module in the package (50);

a first clamp (430) configured to hold the optical splitter (10);

a second holder (440) configured to hold the array lens (20);

a six-axis displacement stage (410) comprising a carrier arm (412) to which the first clamp (430) and the second clamp (440) are fixed to synchronously change the spatial position of the optical splitter (10) and the array lens (20) according to the adjustment of the six-axis displacement stage,

wherein the six-axis displacement stage is configured to:

performing a first adjustment to align a plurality of optical signal channels (CH 1-CH 4) of the optical splitter with respective lenses (22) of the array lens (20) by moving the carrier arm based on the reference plane; and

after the first adjustment, moving the carrying arm to perform a second adjustment, the second adjustment comprising moving the optical splitter (10) and the array lens (20) synchronously such that the output light split by the optical splitter (10) and focused by the array lens (20) is vertically coupled to the optical coupling faces of the respective detector chips of the array detector chip (30).

12. The optical path coupling apparatus according to claim 11, wherein the optical path coupling apparatus further comprises a vacuum nozzle (420), the vacuum nozzle (420) comprising a main body portion and a first branch arm and a second branch arm branching from the main body portion, the first branch arm forming the first clamp (430), the second branch arm forming the second clamp (440).

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