CN114963234B - Ignition device of semiconductor process equipment and semiconductor process equipment - Google Patents
Ignition device of semiconductor process equipment and semiconductor process equipment Download PDFInfo
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- CN114963234B CN114963234B CN202210747806.1A CN202210747806A CN114963234B CN 114963234 B CN114963234 B CN 114963234B CN 202210747806 A CN202210747806 A CN 202210747806A CN 114963234 B CN114963234 B CN 114963234B
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- inlet pipe
- gas inlet
- air inlet
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- 238000000034 method Methods 0.000 title claims abstract description 24
- 230000008569 process Effects 0.000 title claims abstract description 24
- 239000004065 semiconductor Substances 0.000 title claims abstract description 22
- 230000000903 blocking effect Effects 0.000 claims abstract description 130
- 230000007704 transition Effects 0.000 claims abstract description 111
- 230000007246 mechanism Effects 0.000 claims abstract description 49
- 238000006243 chemical reaction Methods 0.000 claims abstract description 27
- 230000003750 conditioning effect Effects 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 23
- 230000001105 regulatory effect Effects 0.000 claims description 19
- 230000013011 mating Effects 0.000 claims description 14
- 230000000694 effects Effects 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 36
- 239000002245 particle Substances 0.000 abstract description 6
- 239000007789 gas Substances 0.000 description 161
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 11
- 238000007789 sealing Methods 0.000 description 10
- 239000001257 hydrogen Substances 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 238000002485 combustion reaction Methods 0.000 description 7
- 230000009471 action Effects 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000004321 preservation Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23Q—IGNITION; EXTINGUISHING-DEVICES
- F23Q7/00—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs
- F23Q7/06—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs structurally associated with fluid-fuel burners
- F23Q7/10—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs structurally associated with fluid-fuel burners for gaseous fuel, e.g. in welding appliances
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/36—Hydrogen production from non-carbon containing sources, e.g. by water electrolysis
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
Abstract
The application discloses an ignition device of semiconductor process equipment and the semiconductor process equipment, wherein the ignition device comprises an ignition chamber, an air inlet transition pipe, an adjusting gas inlet pipe and a blocking mechanism, wherein the adjusting gas inlet pipe is used for introducing adjusting gas, the air inlet end of the air inlet transition pipe is communicated with an air outlet of the ignition chamber, the adjusting gas inlet pipe is connected with the air inlet transition pipe, the blocking mechanism is at least partially arranged in the air inlet transition pipe, the blocking mechanism is an adjustable blocking mechanism, and the blocking mechanism is used for enabling the adjusting gas inlet pipe to be communicated with or blocked from the air inlet transition pipe. According to the scheme, the problem that particles exceed standards due to the fact that condensed water condensed after high-temperature vapor in the air inlet transition pipe enters the adjusting gas inlet pipe is blown into the reaction chamber can be solved.
Description
Technical Field
The application belongs to the technical field of semiconductors, and particularly relates to an ignition device of semiconductor process equipment and the semiconductor process equipment.
Background
In the field of semiconductor processing, the ignition device can realize the combustion of hydrogen and oxygen, thereby providing pure high-temperature vapor for the reaction chamber. Along with the improvement of process requirements, a film layer with thinner thickness and more uniform film quality needs to be grown on the surface of the wafer, and therefore, a proper amount of adjusting gas such as nitrogen can be introduced in the combustion process to adjust the proportion of water vapor.
Taking nitrogen gas as an example, the current ignition device mainly comprises an ignition chamber, a hydrogen gas inlet pipe, an oxygen gas inlet pipe and an air inlet transition pipe, wherein the hydrogen gas inlet pipe, the oxygen gas inlet pipe and the air inlet transition pipe are communicated with the ignition chamber, the ignition chamber is communicated with the reaction chamber through the air inlet transition pipe, the air inlet transition pipe is provided with an air inlet pipe for adjusting the nitrogen gas, the hydrogen gas and the oxygen gas respectively enter the ignition chamber through the hydrogen gas inlet pipe and the oxygen gas inlet pipe, the water vapor is generated by combustion under the high temperature condition, the water vapor is discharged from the ignition chamber and enters the air inlet transition pipe, and the nitrogen gas entering the air inlet transition pipe through the air inlet pipe is mixed with the water vapor and then enters the reaction chamber.
When the nitrogen is not required to be introduced into the adjusting gas inlet pipe, high-temperature steam entering the air inlet transition pipe flows to a region with lower temperature along the adjusting gas inlet pipe when the adjusting gas inlet pipe passes through the adjusting gas inlet pipe, the temperature of the part of the high-temperature steam is reduced and then is condensed into condensed water, and when the nitrogen is introduced into the adjusting gas inlet pipe again, the condensed water is blown into the reaction chamber, so that the problem of exceeding standard of particles is caused.
Disclosure of Invention
The embodiment of the application aims to provide an ignition device of semiconductor process equipment and the semiconductor process equipment, which can solve the problem that condensed water condensed after high-temperature vapor in an air inlet transition pipe enters an adjusting gas inlet pipe is blown into a reaction chamber to cause exceeding of particles.
In order to solve the technical problems, the application is realized as follows:
In a first aspect, an embodiment of the present application provides an ignition device for a semiconductor process apparatus, including an ignition chamber, an air inlet transition pipe, an adjusting gas inlet pipe, and a plugging mechanism, where the adjusting gas inlet pipe is used for introducing adjusting gas,
The air inlet end of the air inlet transition pipe is communicated with the air outlet of the ignition chamber, the adjusting gas inlet pipe is connected with the air inlet transition pipe,
The blocking mechanism is at least partially arranged in the air inlet transition pipe, the blocking mechanism is an adjustable blocking mechanism, and the blocking mechanism is used for enabling the adjusting gas inlet pipe to be communicated with or separated from the air inlet transition pipe.
In a second aspect, an embodiment of the present application provides a semiconductor process apparatus, including a reaction chamber and the ignition device described above, where the ignition chamber is in communication with the reaction chamber through the air inlet transition pipe.
In the embodiment of the application, the blocking mechanism is arranged on the air inlet transition pipe, and when the air inlet pipe does not need to be filled with air, the blocking mechanism blocks the air inlet pipe, so that the air in the air inlet transition pipe is prevented from entering the air inlet pipe, and condensed water can be prevented from forming in the air inlet pipe or at other parts communicated with the air inlet pipe. When the gas inlet pipe is regulated to be required to be filled with gas into the gas inlet transition pipe, the plugging mechanism is regulated so that the gas inlet pipe is communicated with the gas inlet transition pipe, and the gas in the gas inlet pipe can enter the gas inlet transition pipe. Therefore, the ignition device provided by the embodiment of the application can block the adjusting gas inlet pipe when the adjusting gas inlet pipe is not ventilated, so that condensed water is prevented from being generated when gas in the air inlet transition pipe enters the adjusting gas inlet pipe, and condensed water is not carried in the gas which is introduced into the reaction chamber when the adjusting gas inlet pipe is ventilated again, thereby solving the problem that the condensed water condensed after the high-temperature vapor in the air inlet transition pipe enters the adjusting gas inlet pipe is blown into the reaction chamber to cause the exceeding of the standard of particles.
Drawings
FIG. 1 is a schematic diagram of a semiconductor processing apparatus according to an embodiment of the present application;
FIG. 2 is a schematic view of a part of an ignition device according to an embodiment of the present application;
fig. 3 is a schematic structural diagram of a plugging mechanism according to an embodiment of the present application.
Reference numerals illustrate:
100-ignition chamber, 110-inlet end, 120-outlet, 200-inlet transition pipe, 210-mounting hole, 300-adjusting gas inlet pipe, 310-mating surface, 400-plugging mechanism, 410-plugging member, 411-plugging end, 412-main body rod, 420-elastic resetting member, 430-seat, 431-guiding hole, 432-groove, 440-sealing member, 510-heater, 520-hydrogen inlet pipe, 530-oxygen inlet pipe, 540-heat preservation layer, 550-cooling mechanism, 600-heating belt, 610-first heating part, 620-second heating part, 700-reaction chamber.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
The terms first, second and the like in the description and in the claims, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged, as appropriate, such that embodiments of the present application may be implemented in sequences other than those illustrated or described herein, and that the objects identified by "first," "second," etc. are generally of a type, and are not limited to the number of objects, such as the first object may be one or more. Furthermore, in the description and claims, "and/or" means at least one of the connected objects, and the character "/", generally means that the associated object is an "or" relationship.
The ignition device of the semiconductor process equipment and the semiconductor process equipment provided by the embodiment of the application are described in detail below through specific embodiments and application scenes thereof with reference to the accompanying drawings.
As shown in fig. 1 to 3, an embodiment of the present application discloses an ignition device of a semiconductor process apparatus, which can provide water vapor to a reaction chamber 700 of the semiconductor process apparatus, and the surface of a wafer in the reaction chamber 700 can generate an oxide film under the action of the water vapor. The ignition device may include an ignition chamber 100, an intake transition duct 200, a regulated gas intake duct 300, and a plugging mechanism 400.
The ignition chamber 100 may provide a location for combustion of gases, the ignition chamber 100 being provided with an inlet end 110 and an outlet 120, the inlet end 110 being configured to allow hydrogen and oxygen to enter the ignition chamber 100, the outlet 120 being configured to allow water vapor generated by combustion to exit the ignition chamber 100. The ignition device may further include a heater 510, a hydrogen inlet pipe 520 and an oxygen inlet pipe 530, wherein the heater 510 wraps the inlet end 110 of the ignition chamber 100, one end of the oxygen inlet pipe 530 is connected with the inlet end 110 and extends into the inlet end 110, and one end of the hydrogen inlet pipe 520 extends into the oxygen inlet pipe 530 and extends into the inlet end 110. The oxygen in the oxygen inlet pipe 530 and the hydrogen in the hydrogen inlet pipe 520 may be heated by the heater 510, and the oxygen and the hydrogen are mixed in the ignition chamber 100, thereby being combusted under high temperature conditions to generate high temperature water vapor. Further, the ignition device further comprises a heat preservation layer 540, and the heat preservation layer 540 can wrap the ignition chamber 100, so that heat preservation of the ignition chamber 100 is realized, stable temperature conditions are provided for hydrogen combustion, and meanwhile, high temperature of the ignition chamber 100 can be prevented from influencing the surrounding environment. Further, the ignition device further comprises a cooling mechanism 550, wherein the cooling mechanism 550 wraps the insulating layer 540, thereby further isolating heat generated in the combustion process and preventing the high temperature of the ignition chamber 100 from affecting the surrounding environment.
The air inlet end of the air inlet transition pipe 200 is communicated with the air outlet 120 of the ignition chamber 100, the air outlet end of the air inlet transition pipe 200 is communicated with the reaction chamber 700, and the water vapor generated in the ignition chamber 100 can enter the air inlet transition pipe 200 through the air outlet 120, and the water vapor in the air inlet transition pipe 200 further enters the reaction chamber 700 to participate in the process reaction in the reaction chamber 700. The adjusting gas inlet pipe 300 is connected with the air inlet transition pipe 200, that is, the adjusting gas inlet pipe 300 can be communicated with the air inlet transition pipe 200, the adjusting gas inlet pipe 300 is used for introducing an adjusting gas, and the adjusting gas can be nitrogen or other gas capable of adjusting the water vapor ratio. Alternatively, the conditioning gas inlet pipe 300 may be directly connected to the inlet transition pipe 200, or may be indirectly connected to the inlet transition pipe, and the conditioning gas inlet pipe and the inlet transition pipe may be parallel to each other or may intersect each other.
The plugging mechanism 400 is at least partially disposed within the intake transition duct 200, i.e., the plugging mechanism 400 is located between the firing chamber 100 and the reaction chamber 700. The blocking mechanism 400 is an adjustable blocking mechanism, and the blocking mechanism 400 is used for enabling the adjusting gas inlet pipe 300 to be communicated with or blocked from the gas inlet transition pipe 200. Specifically, when the blocking mechanism 400 blocks the adjusting gas inlet pipe 300, the adjusting gas inlet pipe 300 is blocked from the inlet transition pipe 200, i.e., the two are not communicated; when the blocking mechanism 400 no longer blocks the tuning gas inlet pipe 300, the tuning gas inlet pipe 300 communicates with the inlet transition pipe 200.
Alternatively, the purpose of blocking the regulated gas inlet pipe 300 and communicating the regulated gas inlet pipe 300 with the inlet transition pipe 200 may be achieved by adjusting the position of at least a portion of the blocking mechanism 400 with respect to the regulated gas inlet pipe 300, or the purpose of blocking the regulated gas inlet pipe 300 and communicating the regulated gas inlet pipe 300 with the inlet transition pipe 200 may be achieved by introducing gas into the regulated gas inlet pipe 300 through the blocking mechanism 400, which may block the gas in the inlet transition pipe 200 from entering the regulated gas inlet pipe 300, i.e., by adjusting the flow rate of this portion of gas.
In the embodiment of the present application, the blocking mechanism 400 is disposed on the air inlet transition pipe 200, and when the air inlet pipe 300 does not need to be introduced into the air inlet transition pipe 200, the blocking mechanism 400 blocks the air inlet pipe 300, thereby preventing the air in the air inlet transition pipe 200 from entering the air inlet pipe 300, and preventing condensed water from forming in the air inlet pipe 300 or at other parts communicated with the air inlet pipe 300. When the adjusting gas inlet pipe 300 needs to introduce gas into the gas inlet transition pipe 200, the plugging mechanism 400 is adjusted so that the adjusting gas inlet pipe 300 is communicated with the gas inlet transition pipe 200, and the gas in the adjusting gas inlet pipe 300 can enter the gas inlet transition pipe 200. Therefore, the ignition device provided by the embodiment of the application can block the adjusting gas inlet pipe 300 when the adjusting gas inlet pipe 300 is not ventilated, so that the gas in the gas inlet transition pipe 200 is prevented from entering the adjusting gas inlet pipe 300 to generate condensed water, and the condensed water is not carried in the gas which is introduced into the reaction chamber when the adjusting gas inlet pipe 300 is ventilated again, so that the problem that the condensed water condensed after the high-temperature vapor in the gas inlet transition pipe enters the adjusting gas inlet pipe is blown into the reaction chamber to cause the exceeding of the standard of particles is solved.
In an alternative embodiment, the plugging mechanism 400 includes a plugging member 410, the plugging member 410 being at least partially positioned within the inlet transition duct 200, the plugging member 410 having a first end being a plugging end 411, the plugging end 411 being adapted to plug the regulated gas inlet duct 300. The blocking piece 410 can move between a first position and a second position, and the blocking end 411 blocks the adjusting gas inlet pipe 300 to block the adjusting gas inlet pipe 300 and the inlet transition pipe 200 when the blocking piece 410 is at the first position, and the adjusting gas inlet pipe 300 is not communicated with the inlet transition pipe 200; with the blocking member 410 in the second position, the blocking end 411 is separated from the tuning gas inlet pipe 300 so that the tuning gas inlet pipe 300 is in communication with the inlet transition pipe 200, and at this time, the tuning gas in the tuning gas inlet pipe 300 may enter the inlet transition pipe 200 and enter the reaction chamber 700 together with the water vapor. Alternatively, the blocking end 411 may block the outlet end of the conditioning gas inlet pipe 300, for example the blocking end 411 may sealingly engage the end face of the outlet end. Further, the outlet end of the adjusting gas inlet pipe 300 may extend to the inner surface of the gas inlet transition pipe 200, and the outlet end may be flush with the inner surface, or may protrude relative to the inner surface, so that the matching position of the plugging end 411 and the outlet end is closer to the inner cavity of the gas inlet transition pipe 200, and under the high temperature effect of the gas in the gas inlet transition pipe 200, the temperature of the matching position of the plugging end 411 and the outlet end is higher, so that the water vapor is not easy to condense, and the problem that the particles of the reaction chamber exceed the standard due to the fact that the water vapor is blown into the reaction chamber after being condensed is more reliably prevented.
When the conditioning gas inlet pipe 300 does not need to introduce gas into the gas inlet transition pipe 200, the blocking piece 410 is at the first position, and at this time, the blocking end 411 of the blocking piece 410 blocks the conditioning gas inlet pipe 300, so as to prevent the gas in the gas inlet transition pipe 200 from entering the conditioning gas inlet pipe 300, and thus, it is possible to prevent condensed water from forming in the conditioning gas inlet pipe 300 or at other parts communicating with the conditioning gas inlet pipe 300. When the adjusting gas inlet pipe 300 needs to introduce gas into the gas inlet transition pipe 200, the blocking piece 410 is at the second position, and at this time, the blocking end 411 of the blocking piece 410 is separated from the adjusting gas inlet pipe 300, so that the adjusting gas inlet pipe 300 is communicated with the gas inlet transition pipe 200, and the gas in the adjusting gas inlet pipe 300 can enter the gas inlet transition pipe 200. In this embodiment, the position of the blocking member 410 is easier to control, so that the position adjustment of the blocking member 410 is more convenient, and the blocking member 410 can reliably block the adjusting gas inlet pipe 300, so that the blocking effect is better.
Optionally, the ignition device may further include a driving mechanism, where the driving mechanism may be connected to the plugging member 410 to drive the plugging member 410 between the first position and the second position, and the driving mechanism may specifically include a driving motor or other components capable of outputting power. In another embodiment, the plugging mechanism 400 further includes an elastic restoring member 420, and the second end of the plugging member 410 is connected to the air intake transition duct 200 through the elastic restoring member 420. Alternatively, the elastic restoring member 420 may be a spring, or may be another member that can be elastically deformed when subjected to a force and recover the deformation when not subjected to a force, which is not limited in the embodiment of the present application. The adjusting gas introduced into the adjusting gas inlet pipe 300 applies an impact force to the blocking end 411 of the blocking piece 410, and the impact force can overcome the pre-pressure applied by the elastic reset piece 420, so as to push the blocking end 411 of the blocking piece 410, so that the blocking end 411 is far away from the adjusting gas inlet pipe 300 and does not block the adjusting gas inlet pipe 300 any more, and therefore the blocking piece 410 can be driven to move by the adjusting gas, namely, the blocking piece 410 moves from the first position to the second position under the impact action of the adjusting gas introduced into the adjusting gas inlet pipe 300. In the process of driving the blocking piece 410 to move by the adjusting gas, the elastic reset piece 420 is elastically deformed, when the adjusting gas is not introduced into the adjusting gas inlet pipe 300, the blocking piece 410 is not impacted any more, and at the moment, the elastic reset piece 420 is restored to deform, so that the blocking piece 410 is driven to move reversely, namely, the blocking piece 410 moves from the second position to the first position under the action of the elastic reset piece 420.
When the blocking piece 410 is driven to move by the adjusting gas and the elastic reset piece 420, the position of the blocking piece 410 can be changed according to whether the adjusting gas exists in the adjusting gas inlet pipe 300, so that the position of the blocking piece 410 does not need to be adjusted correspondingly by strictly monitoring the air inlet state of the adjusting gas inlet pipe 300, the embodiment enables the control of the ignition device to be simpler, the position change of the blocking piece 410 is more sensitive, the adjusting gas inlet pipe 300 can be blocked in a shorter time, the effect of preventing condensate water is better, the adjusting gas inlet pipe 300 and the air inlet transition pipe 200 are conducted in a shorter time, and unstable factors caused by the fact that the adjusting gas cannot enter the air inlet transition pipe 200 and is accumulated in the adjusting gas inlet pipe 300 are avoided. In addition, the embodiment does not need to additionally provide a driving mechanism, so that the excessive driving mechanism is prevented from being arranged on the air inlet transition pipe 200 to cause easy deformation of the air inlet transition pipe 200, and the cost of the ignition device can be reduced.
The blocking piece 410 may be directly disposed on the wall of the air inlet transition pipe 200, but the wall of the air inlet transition pipe 200 is thinner, so that the blocking piece 410 is not convenient to install. For this reason, in another embodiment, the plugging mechanism 400 further includes a base 430, the wall of the air inlet transition pipe 200 is provided with a mounting hole 210, the base 430 is disposed in the mounting hole 210, and the base 430 is disposed opposite to the adjusting air inlet pipe 300, so that the base 430 and the adjusting air inlet pipe 300 are distributed more compactly, and the size of the plugging member 410 moving therebetween can be set smaller, its weight is smaller, and it is easier to be pushed by the adjusting air. At least a portion of the housing 430 is located outside the intake transition duct 200, and the blocking member 410 may be coupled to the housing 430, thereby achieving the installation of the blocking member 410. Since at least a portion of the body 430 is located outside the intake transition duct 200, the body 430 is relatively large in size, thereby providing a larger installation space for the blocking member 410 to facilitate installation of the blocking member 410.
The movement of the blocking member 410 may be either a movement or a rotation, or a combination of movement and rotation, and the embodiment of the present application is not limited thereto. In contrast, when the blocking member 410 adopts the movement form, the movement space required is smaller, and the gas flow in the gas inlet transition pipe 200 is less likely to be blocked.
When the blocking member 410 adopts a rotation motion, the blocking member 410 may be hinged with the base 430. When the blocking member 410 adopts the moving mode, the seat 430 is provided with a guide hole 431, and the blocking member 410 is slidably engaged with the guide hole 431, so that the blocking member 410 can move relative to the seat 430 under the guide of the guide hole 431. The elastic restoring member 420 may be disposed in the guide hole 431, one end of the elastic restoring member 420 is connected to the second end of the blocking member 410, and the other end of the elastic restoring member 420 is connected to the bottom wall of the guide hole 431, where the bottom wall faces the opening end of the guide hole 431. Alternatively, the extending direction of the elastic restoring member 420 may be parallel to the extending direction of the guiding hole 431, and the direction of the force applied by the blocking member 410 to the elastic restoring member 420 is the extending direction of the elastic restoring member 420, so that the elastic restoring member 420 is not easy to deform laterally, and the blocking member 410 is driven to move more reliably.
The guide hole 431 may provide a guide function for the movement of the blocking member 410, so that the blocking member 410 can be moved between the first position and the second position more precisely.
Because water vapor exists in the air intake transition pipe 200, the water vapor easily reaches and stays at the position of the elastic restoring member 420 through the gap between the blocking member 410 and the hole wall of the guide hole 431, and thus the elastic restoring member 420 is easily corroded. To solve this problem, the plugging mechanism 400 further includes a sealing member 440, wherein the sealing member 440 is disposed between the wall of the guide hole 431 and the plugging member 410 to seal a gap between the plugging member 410 and the wall of the guide hole 431, thereby preventing water vapor from reaching the position of the elastic restoring member 420 through the gap, so that the elastic restoring member 420 is not easily corroded. Alternatively, the seal 440 may be a sealing ring, which may surround the blocking member 410, thereby improving the sealing effect. The hole wall of the guide hole 431 may be provided with a groove 432, the sealing ring is disposed in the groove 432, and the groove 432 may accommodate the sealing ring, so that a gap between the hole wall of the guide hole 431 and the sealing member 410 may be properly reduced to improve the guiding effect of the guide hole 431, and at the same time, water vapor may not easily enter the gap.
In order to prevent condensation of water vapor in the air intake transition pipe 200, the ignition device further comprises a heating belt 600, the heating belt 600 comprises a first heating part 610 and a second heating part 620 connected with each other, the first heating part 610 wraps the air intake transition pipe 200, the second heating part 620 wraps a part of the seat body 430 located outside the air intake transition pipe 200, in other words, the first heating part 610 is sleeved on the outer surface of the air intake transition pipe 200, and the second heating part 620 is sleeved on the outer surface of a part of the seat body 430 located outside the air intake transition pipe 200. The first heating part 610 mainly heats the air intake transition duct 200, and the second heating part 620 mainly heats a portion of the seat body 430 located outside the air intake transition duct 200, which can more comprehensively cover the air intake transition duct 200 and a portion of the seat body 430 located outside the air intake transition duct 200, thereby more reliably preventing condensation of water vapor when flowing in the air intake transition duct 200.
Alternatively, the first heating part 610 and the second heating part 620 may be of a split type structure or of a two-piece structure, thereby simplifying the structure of the heating belt 600 and facilitating the installation of the heating belt 600.
As described above, the seat 430 and the conditioning gas inlet pipe 300 are disposed opposite to each other, alternatively, the seat 430 is located below the conditioning gas inlet pipe 300 or the seat 430 is located above the conditioning gas inlet pipe 300. When the seat 430 is located above the conditioning gas inlet pipe 300, it means that most of the blocking piece 410 is located above the conditioning gas inlet pipe 300, and the blocking piece 410 can be more reliably kept in a state of blocking the conditioning gas inlet pipe 300 under the action of gravity, so that water vapor is more reliably prevented from entering the conditioning gas inlet pipe 300. Meanwhile, since the blocking member 410 can be used to block the adjusting gas inlet pipe 300, the force required to be applied by the elastic restoring member 420 can be properly reduced, the size of the elastic restoring member 420 can be properly reduced, and the overall size of the blocking mechanism 400 can be reduced accordingly, so that the gas inlet transition pipe 200 is not easily bent.
Alternatively, the guide hole 431 may be disposed obliquely with respect to the vertical direction, or the extending direction of the guide hole 431 is the vertical direction, so that the blocking piece 410 moves in the vertical direction. In the latter embodiment, the structures of the blocking member 410, the base 430, the guide hole 431, etc. may be disposed in the vertical direction, so that the installation of the blocking member 410, the base 430, etc. and the processing of the guide hole 431 are easier to achieve. In addition, the plugging member 410 is not easily attached to the wall of the guide hole 431 under the action of gravity, so that when the plugging member 410 moves, the abrasion between the plugging member 410 and the wall of the guide hole 431 is small, so that the gap between the plugging member 410 and the wall of the guide hole 431 is not easily enlarged, and therefore, water vapor is not easily introduced into the gap.
Further, the adjustment gas inlet pipe 300 may be disposed obliquely with respect to the vertical direction, or the adjustment gas inlet pipe 300 may extend in the vertical direction, in which case the direction in which the force of the adjustment gas in the adjustment gas inlet pipe 300 is applied to the blocking piece 410 is parallel to the moving direction of the blocking piece 410, in other words, the force of the adjustment gas applied to the blocking piece 410 has no component but is used to drive the blocking piece 410 to move entirely, so that the blocking piece 410 can be driven to move to the second position more easily.
Alternatively, the blocking end 411 of the blocking member 410 may have a block-shaped structure having a rectangular, triangular, or the like shape. In another embodiment, the plugging end 411 is a spherical end, the end of the adjusting gas inlet pipe 300 is provided with a mating surface 310, and the plugging end 411 abuts against the mating surface 310 when the plugging member 410 is in the first position. At this time, even if the blocking member 410 is inclined by the gas, the spherical blocking end 411 can be reliably abutted against the mating surface 310, so that the position accuracy requirement of the blocking member 410 is suitably lowered, and the blocking mechanism 400 is more conveniently mounted on the intake transition duct 200.
The mating surface 310 may be a stepped surface, or the mating surface 310 may be a spherical surface, and a larger contact area may be formed between the spherical surface and the plugging end 411, thereby improving the plugging effect. In another embodiment, the mating surface 310 is a circular table with a gradually increasing cross-sectional area in the direction of the inlet of the regulated gas inlet pipe 300. The rounded surface is easier to process and the cross-sectional area thereof is gradually changed, so that stress concentration is less likely to occur, and the size of the end of the mating surface 310 facing the sealing member 410 is larger, which is more convenient for the sealing member 410 to abut against the mating surface 310.
In an alternative embodiment, the blocking member 410 includes a body shaft 412 and a blocking end 411, the blocking end 411 being disposed at one end of the body shaft 412, the blocking end 411 having a width greater than the width of the body shaft 412, where the width is a dimension in a direction perpendicular to the direction of extension of the body shaft 412. In this embodiment, the different positions of the plugging member 410 have different sizes, and the larger plugging end 411 can increase the contact area between the plugging end 411 and the adjusting gas inlet pipe 300, so as to improve the plugging reliability, and the smaller main rod 412 can reduce the resistance of the plugging member 410 to the gas in the gas inlet transition pipe 200, so that compared with the embodiment in which the plugging member 410 adopts a rod-shaped structure with equal cross-section, the plugging member 410 comprising the main rod 412 and the plugging end 411 has good plugging effect and is not easy to generate excessive resistance to the gas in the gas inlet transition pipe 200.
Alternatively, the body shaft 412 may have a rod-like structure with a uniform cross-sectional size, thereby simplifying the structure of the blocking member 410.
At least a portion of the blocking end 411 may be located outside the regulated gas inlet pipe 300 with the blocking member 410 in the first position, but in order to further reduce the resistance of the blocking member 410 to the gas in the gas inlet transition pipe 200, the blocking end 411 is located inside the regulated gas inlet pipe 300 with the blocking member 410 in the first position. That is, in the case where the blocking end 411 blocks the adjusting gas inlet pipe 300, the entire blocking end 411 does not protrude from the adjusting gas inlet pipe 300, so that the blocking end 411 does not generate additional resistance, and the gas in the gas inlet transition pipe 200 can more smoothly pass through the position where the blocking piece 410 is located. In addition, the end of the conditioning gas inlet pipe 300 may apply a lateral limiting force to the blocking piece 410, and when the blocking end 411 blocks the conditioning gas inlet pipe 300, the blocking piece 410 is not easily moved by the gas in the gas inlet transition pipe 200, thereby improving blocking reliability.
Alternatively, the conditioning gas inlet pipe 300 is provided with a mating surface 310, which mating surface 310 may be concave, thereby forming a concave space for accommodating the plugging end 411. Since the adjusting gas inlet pipe 300 has a certain wall thickness, the recessed mating surface 310 can be formed to have a desired accommodating space without providing other components, and thus the structure and the processing process of the adjusting gas inlet pipe 300 can be simplified.
The embodiment of the application also discloses a semiconductor process device, which comprises a reaction chamber 700 and the ignition device in any embodiment, wherein the ignition chamber 100 is communicated with the reaction chamber 700 through an air inlet transition pipe 200.
The embodiments of the present application have been described above with reference to the accompanying drawings, but the present application is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those having ordinary skill in the art without departing from the spirit of the present application and the scope of the claims, which are to be protected by the present application.
Claims (11)
1. An ignition device of semiconductor process equipment is characterized by comprising an ignition chamber (100), an air inlet transition pipe (200), a regulating air inlet pipe (300) and a blocking mechanism (400), wherein the regulating air inlet pipe (300) is used for introducing regulating air,
The air inlet end of the air inlet transition pipe (200) is communicated with the air outlet (120) of the ignition chamber (100), the adjusting air inlet pipe (300) is connected with the air inlet transition pipe (200),
The blocking mechanism (400) is at least partially arranged in the air inlet transition pipe (200), the blocking mechanism (400) is an adjustable blocking mechanism, and the blocking mechanism (400) is used for enabling the adjusting air inlet pipe (300) to be communicated with or blocked from the air inlet transition pipe (200);
The plugging mechanism (400) comprises a plugging piece (410), an elastic reset piece (420) and a base body (430), wherein a mounting hole (210) is formed in the pipe wall of the air inlet transition pipe (200), the base body (430) is arranged in the mounting hole (210), the base body (430) and the adjusting air inlet pipe (300) are oppositely arranged, at least one part of the base body (430) is positioned outside the air inlet transition pipe (200), the base body (430) is provided with a guide hole (431), the plugging piece (410) is in sliding fit with the guide hole (431), the elastic reset piece (420) is arranged in the guide hole (431), a first end of the plugging piece (410) is a plugging end (411), a second end of the plugging piece (410) is opposite to the plugging end (411), one end of the elastic reset piece (420) is connected with the second end of the plugging piece (410), and the other end of the elastic reset piece (420) is connected with the bottom wall of the guide hole (431);
the extending direction of the guide hole (431) enables the blocking piece (410) to move in the extending direction of the adjusting gas inlet pipe (300), and the extending direction of the inlet transition pipe (200) is perpendicular to the extending direction of the adjusting gas inlet pipe (300).
2. The ignition device of claim 1, wherein said closure member (410) is at least partially located within said intake transition duct (200), said closure member (410) being movable between a first position and a second position,
-Said blocking end (411) blocks said conditioning gas inlet duct (300) to block said conditioning gas inlet duct (300) and said inlet transition duct (200) with said blocking piece (410) in said first position; with the closure (410) in the second position, the closure end (411) is separated from the conditioning gas inlet pipe (300) such that the conditioning gas inlet pipe (300) communicates with the inlet transition pipe (200).
3. The ignition device according to claim 2, characterized in that the second end of the blocking piece (410) is connected to the inlet transition pipe (200) by means of the elastic return piece (420), the blocking piece (410) being moved from the first position to the second position under the impact of the conditioning gas introduced in the conditioning gas inlet pipe (300), the blocking piece (410) being moved from the second position to the first position under the effect of the elastic return piece (420).
4. The ignition device of claim 1, wherein the plugging mechanism (400) further comprises a seal (440), the seal (440) being disposed between the bore wall of the pilot bore (431) and the plug (410) to seal a gap between the plug (410) and the bore wall of the pilot bore (431).
5. The ignition device of claim 1, further comprising a heating belt (600), the heating belt (600) comprising a first heating portion (610) and a second heating portion (620) connected, the first heating portion (610) wrapping the intake transition duct (200), the second heating portion (620) wrapping a portion of the base body (430) located outside the intake transition duct (200).
6. The ignition device of claim 1, wherein the seat (430) is located above the regulated gas inlet pipe (300).
7. The ignition device according to claim 1, wherein the extending direction of the guide hole (431) is a vertical direction so that the blocking member (410) moves in the vertical direction, and the regulated gas inlet pipe (300) extends in the vertical direction.
8. The ignition device according to claim 2, characterized in that the blocking end (411) is a spherical end, the end of the conditioning gas inlet pipe (300) being provided with a mating surface (310), the blocking end (411) abutting against the mating surface (310) with the blocking piece (410) in the first position.
9. The ignition device of claim 8, wherein the mating surface (310) is spherical; or the matching surface (310) is a round table surface, and the cross section area of the round table surface is gradually increased in the air inlet direction of the adjusting air inlet pipe (300).
10. The ignition device according to claim 2, wherein the blocking member (410) includes a body bar (412) and the blocking end (411), the blocking end (411) being provided at one end of the body bar (412), the blocking end (411) having a width larger than a width of the body bar (412), the width being a dimension in a direction perpendicular to an extending direction of the body bar (412).
11. A semiconductor process apparatus comprising a reaction chamber (700) and an ignition device according to any one of claims 1 to 10, the ignition chamber (100) being in communication with the reaction chamber (700) through the inlet transition duct (200).
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| CN202210747806.1A CN114963234B (en) | 2022-06-29 | 2022-06-29 | Ignition device of semiconductor process equipment and semiconductor process equipment |
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| CN202210747806.1A CN114963234B (en) | 2022-06-29 | 2022-06-29 | Ignition device of semiconductor process equipment and semiconductor process equipment |
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| CN116832575B (en) * | 2023-07-31 | 2024-05-10 | 河南平煤神马聚碳材料有限责任公司 | PSA adsorption equipment for polycarbonate production |
| CN120006277A (en) * | 2023-11-15 | 2025-05-16 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and ignition chamber thereof |
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