JP2001021048A - Gate valve having lamp actuator mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce vibration or impacts, to prolong an operation life, and to reduce the generation of dusts. SOLUTION: A valve 10 includes a valve housing 12 having a fluid conduit 14 and a valve seat part 16, a sealing plate assembly 30 provided with a sealing plate having a slope for guiding the sealing plate between retreating and closing positions, an actuator assembly 32 for moving the sealing plate between the retreating and closing positions, and a device for pressing the sealing plate toward the retreating position. The actuator assembly 32 includes an actuator element, and a roller element provided in the actuator element. The roller element is engaged with the slope of the sealing plate, moved along the slope following the movement of the actuator element with respect to the sealing plate, and the sealing plate is moved between the retreating and closing positions. The slope has a contour for providing a not sudden but smooth movement between the retreating and closing positions.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a valve structure, and more particularly to a gate valve structure characterized by low vibration and impact, a long operating life, and low dust generation.

[0002]

BACKGROUND OF THE INVENTION A conventional gate valve structure includes a valve housing having a fluid conduit and a valve seat, a sealing plate movable between an open position and a closed position within the fluid conduit, and an open and closed position. An actuator mechanism for moving the sealing plate to and from the position. The sealing plate is adapted to engage the valve seat in the closed position to seal the fluid conduit. The sealing plate may move from a closed position to a retracted position and move linearly to an open position.

[0003] Gate valves and related valve structures such as slot valves are used in a wide variety of applications. Various applications involve liquids, gases, and vacuums. Some applications involve frequent cycling between the open and closed positions and require a long operating life and low dust generation. One example of such an application is in equipment for vacuum processing semiconductor wafers. 2. Description of the Related Art With the miniaturization of the shape and size of semiconductor devices and the increase in circuit density, semiconductor wafers have become increasingly sensitive to dust contamination. Components within the vacuum chamber of the processing chamber, such as gate valves in vacuum lines, are potential sources of dust contamination. In addition, the failure of the gate valve may necessitate the need to stop part or all of the semiconductor manufacturing line, which adversely affects productivity. Therefore, long operating life and low dust generation are important characteristics of the gate valve.

[0004] Another problem related to the gate valve is noise, impact, and vibration generated when the valve is opened and closed. Noise, shock and vibration can impair or disrupt the operation of delicate devices near the gate valve. In addition, it has been observed that the charcoal vibrates and separates from the inside of the cryogenic vacuum pump due to the impact generated by the operation of the conventional gate valve. Therefore, it is desired to suppress noise, shock, and vibration generated by the gate valve.

A gate valve having a linearly movable sealing plate was disclosed on October 4, 1977 by Schertle.
r. U.S. Pat. No. 4,052,036. The sealing plate and the opposing plate are urged toward the actuator by a leaf spring. The actuator carries a series of balls that engage the recesses in the sealing plate and the opposing plate. When the sealing plate and the opposing plate reach the stop position, the actuator continues to move, pushing the ball out of the recess and moving the sealing plate and the opposing plate toward the closed position. When the ball is pushed out of the recess, the transition occurs sharply, mechanically impacting the system, causing dust contamination and wear.

[0006] All of the known conventional gate valve constructions generate noise, vibration and shock, limit operating life,
There are one or more disadvantages, including high dust generation. Therefore, there is a need for an improved gate valve structure.

[0007]

SUMMARY OF THE INVENTION According to a first aspect of the present invention, a valve is provided. The valve includes a valve housing having a fluid conduit and forming a valve seat, and a sealing plate having a ramp for guiding the sealing plate between a retracted position and a closed position. A sealing plate assembly, and an actuator assembly for moving the sealing plate between a retracted position in which the sealing plate is retracted from the valve seat and a closed position in which the sealing plate is in sealing engagement with the valve seat. And a device for biasing the sealing plate toward the retracted position. The actuator assembly includes an actuator element and a roller element provided on the actuator element. The roller element engages the inclined surface of the sealing plate and moves along the inclined surface with movement of the actuator element relative to the sealing plate to move the sealing plate between a retracted position and a closed position. .
The ramp is contoured to provide a smooth transition between the retracted position and the closed position.

[0008] In one embodiment, the roller element is a ball. In another embodiment, the roller element is a cylindrical roller. The sealing plate may include a plurality of inclined surfaces, and the actuator assembly may include:
It may include a corresponding plurality of roller elements that respectively engage the inclined surfaces. The profile of the inclined surface in the roller element movement direction may have a constant gradient or may have various gradients. Also, the contour of the inclined surface in the roller element moving direction has a large gradient near the retreat position,
The gradient may be small near the closed position. Further, the contour of the inclined surface in the roller element moving direction may have a convex radius portion. In yet another embodiment, the contour of the inclined surface in the roller element moving direction includes a linear portion. In still another embodiment, the contour of the inclined surface in the roller element moving direction may be piecewise linear or piecewise curved. It is preferable that the contour of the inclined surface in the direction orthogonal to the roller element moving direction has a shape that matches the shape of the roller element for low wear and low dust contamination. The portion of the inclined surface corresponding to the closed position of the sealing plate is set back (re) from the surface of the sealing plate.
preferably).

In some valve configurations, the inclined surface causes the actuator element to move linearly with respect to the sealing plate. In another valve configuration, the inclined surface causes the actuator element to rotate relative to the sealing plate. The sealing plate assembly may further include an opposing plate having one or more inclined surfaces, and the actuator assembly may include a roller element that engages the opposing plate inclined surface. The sealing plate and the opposing plate are located on both sides of the actuator element and are biased toward the retracted position by one or more springs. As the actuator element moves relative to the sealing plate and the opposing plate, the roller element moves along the inclined surface, moving the sealing plate between the retracted position and the closed position.

[0010]

DETAILED DESCRIPTION For a better understanding of the present invention, reference is made to the accompanying drawings, which are incorporated herein by reference. A first embodiment of a gate valve incorporating features of the present invention is shown in FIGS. 1 to 7C,
Similar parts have the same reference numbers. Gate valve 1
0 comprises a valve housing 12 having a fluid conduit 14 for the passage of gas or liquid. If the gate valve is applied in a vacuum, the gas pressure is low. The valve housing 12 forms a valve seat 16 which engages a sealing plate as described below. Fluid conduit 14 is generally cylindrical, square, rectangular, or any other suitable shape, and valve seat 16 is in the form of a surface surrounding fluid conduit 14.

The gate valve 10 further includes a sealing plate assembly 30 and an actuator assembly 32, and includes a valve actuator 3 such as an air cylinder.
4 may be provided. Actuator assembly 32
Under the control of the valve actuator 34, the sealing plate assembly 30 moves between the open position shown in FIG. 1, the retracted position shown in FIGS. 2 and 5, and the closed position shown in FIGS. Can be moved. In the open position,
The sealing plate assembly 30 has been moved away from the valve seat 16 and the fluid conduit 14 to allow the passage of liquid or gas. In the retracted position, the sealing plate assembly 30 is aligned within the fluid conduit 14 with respect to the fluid conduit 14 but is spaced from the valve seat 16. In the closed position, the sealing plate assembly 30 moves from the retracted position and sealingly engages the valve seat 16, thereby sealing the fluid conduit 14. In another configuration, actuator 34 is replaced with a handle or other suitable device for manual operation of the gate valve.

The actuator assembly 32 includes a shaft 40 connected at one end to the valve actuator 34 via a shaft seal 42. The other end of the shaft 40 is connected to the actuator element 44. 5 and 6, the actuator element 44 has openings 46 and 48 for receiving a roller element such as a ball 50. As shown in FIG. As described below, the balls 50 cooperate with the inclined surface on the sealing plate assembly to move the sealing plate assembly 30 between the retracted position and the closed position.

The sealing plate assembly 30 includes a sealing plate 60 and an opposing plate 62 arranged on both sides of the actuator element 44. An elastic ring 64 is provided in the groove of the sealing plate 60 to make the space between the valve seat 16 and the sealing plate 60 airtight when the valve is closed. The opposing plate 62 is separated from the valve housing 12 in the retracted position shown in FIG. 5, and is in the closed position shown in FIG.
2 is in contact. The sealing plate assembly 30 further includes a leaf spring 70 and a leaf spring 72 (FIG. 4).
One end of each of the leaf springs 70 and 72 is attached to the sealing plate 60, and the other end is attached to the opposing plate 62. The leaf springs 70 and 72 urge the sealing plate 60 and the opposing plate 62 in a direction approaching each other toward the retracted position. When the valve is closed, the leaf springs 70 and 72 are deformed as shown in FIG. 3, and generate a restoring force for returning the sealing plate 60 and the opposing plate 62 to the retracted position. It is understood that, within the scope of the present invention, disc springs, coil springs, and other suitable springs may be used.

The sealing plate 60 has an inclined surface 80 and an inclined surface 82. Similarly, the facing plate 62
Also, an inclined surface 84 and an inclined surface 86 are provided. Each inclined surface 80, 82, 84, 86 is provided on each plate in the form of a groove or a recess. Slopes 80, 82,
84 and 86 are positions and shapes that can be engaged with each ball 50. A preferred configuration of the inclined surface will be described in detail below. Each inclined surface has a deep end corresponding to the retracted position of the sealing plate 60 and the opposing plate 62, and a sealing plate 60.
And a shallow end corresponding to the closed position of the opposing plate 62.

In operation, the shaft 40 connects the sealing plate assembly 30 and the actuator assembly 32 with each other.
It is moved from the open position shown in FIG. 1 to the retracted position shown in FIGS. During this movement, the sealing plate 60 and the opposing plate 62 are urged against the actuator element 44 by the leaf springs 70, 72, and the ball 50 is moved to the respective inclined surfaces 80, as best shown in FIG. , 82,
84 and 86 are engaged with the deep ends. When the sealing plate assembly 30 reaches the retracted position, the sealing plate 60
Abuts on the valve housing 12 and stops moving. Due to the shaft 40, the actuator element 44 continues to move (to the right in FIG. 6). Sealing plate 60
And actuator element 4 for opposed plate 62
4 moves the ball 50 to the inclined surfaces 80, 82,
By moving toward the shallow end of the inclined surface along 84 and 86, the sealing plate 60 is displaced upward toward the valve seat 16 and the opposing plate 62 is displaced downward. In the closed position shown in FIG. 6, the ball 50 is located near the right end of each inclined surface, and holds the sealing plate 60 and the opposing plate 62 in the closed position.

FIGS. 7A to 7C show an example of the inclined surface 80. FIG. The inclined surfaces 82, 84, 86 may have the same configuration. As described above, the inclined surface 80 is formed by the sealing plate 60.
Are formed as grooves or recesses. The inclined surface 80
Deep end 110 corresponding to the retracted position of sealing plate 60
And a shallow end 112 corresponding to the closed position of the sealing plate 60.
And transition portion 1 connecting deep end portion 110 and shallow end portion 112
14 is provided. The inclined surface 80 is shaped to engage a roller element in the form of a ball. Deep end 11
0 has a bottom portion that is shaped to match the ball 50 (FIGS. 5 and 6). The shallow end 112 may be flat along the direction of movement of the ball 50, and may have a contour that matches the shape of the ball 50 along a direction perpendicular to the direction of movement of the ball 50, as shown in FIG. 7C. It may be. The transition 114 may be smoothly curved along the direction of movement between the deep end 110 and the shallow end 112, as shown in FIG.
As shown in FIG. 7, the contour may be such that it matches the shape of the ball 50 along a direction perpendicular to the direction of movement of the ball 50. In particular, the transition portion 114 may have a convex radius having a local gradient that increases near the deep end 110 and decreases near the shallow end 112. Thus, as the ball 50 moves from the deep end 110 to the shallow end 112 along the inclined surface 80, it moves more quickly to the closed position at the beginning of the transition 114, and then to the closed position. The speed becomes slower as approaching. In this way, the movement of the sealing plate 60 between the retracted position and the closed position is smooth, not sudden, and produces little or no impact or vibration. Further, since the inclined surface 80 is shaped in a direction orthogonal to the ball moving direction, the ball 50 moves along the arc when moving from the deep end 110 to the shallow end 112 or vice versa. Contact with. Contact along an arc rather than point contact disperses the contact force, thereby reducing wear and dust generation.

The ramps guiding the sealing plate 60 and the opposing plate 62 between the retracted position and the closed position can have various shapes within the scope of the present invention.
Generally, the inclined surface is shaped so that movement to the retracted position and the closed position and movement between them can be performed relatively smoothly without being abrupt. The slope may have a profile perpendicular to the direction of roller element movement to match the shape of balls, rollers, and other roller elements to reduce wear and dust generation. Preferably, the shallow end of the inclined surface on which the roller element rests in the closed position of the valve is recessed from the surface of the sealing plate and has a contour perpendicular to the direction of movement. As a result, compared to conventional valves, noise and mechanical shock are reduced, dust contamination is reduced, and the operating life of the valve is extended.

8A to 8C show a second example of the inclined surface. The inclined surface 120 is configured for operation using a cylindrical roller instead of a ball. Therefore, the inclined surface 12
0 has a contour that matches the shape of the roller. Slope 1
20 is a deep end 13 corresponding to the retracted position of the sealing plate.
0 and shallow end 132 corresponding to the closed position of the sealing plate
And a transition 134 between the deep end 130 and the shallow end 132
And The contours in the roller movement direction are shown in FIGS.
May be the same as the contour of the inclined surface 80 described above.
However, as shown in FIG. 8C, the inclined surface 120 may have a flat contour in a direction perpendicular to the roller moving direction, and may accommodate a cylindrical roller.

FIG. 9 shows a third example of the inclined surface. Slope 1
40 is a deep end 15 corresponding to the retracted position of the sealing plate.
0 and shallow end 152 corresponding to the closed position of the sealing plate
And a transition 154 between the deep end 150 and the shallow end 152
And In the configuration of FIG. 9, the outline of the transition section 154 is
It is a linear slope with a constant gradient. The inclined surface 140 conforms to the shape of the ball as shown in FIG. 7C in the direction orthogonal to the roller element moving direction, or as shown in FIG.
As shown in C, the contour may match the shape of the cylindrical roller. Preferably, the shallow end 152 is recessed from the surface of the encapsulation plate and is adapted to shape its bottom surface.

FIG. 10 shows a fourth example of the inclined surface. The inclined surface 160 is provided at the deep end 1 corresponding to the retracted position of the sealing plate.
70 and a shallow end 17 corresponding to the closed position of the sealing plate
2 and the transition 17 between the deep end 170 and the shallow end 172
And 4. In the configuration of FIG.
The above linear or curved intermittent contour, for example,
Contours 180 and 182 are provided. Bends 180, 18
2 meet along line 184. Thus, transition portion 174 may be segmentally linear or segmentally curved between deep end 170 and shallow end 172 along the direction of roller element movement, or It may be a mixture of a shape and a curve. Preferably, the intersection of the surfaces does not cause a sudden change in the speed or direction of the roller element. Regarding the direction orthogonal to the roller element movement direction, the inclined surface 16 may have a shape matching the ball as shown in FIG. 7C or a shape matching the cylindrical roller as shown in FIG. 8C.

A second embodiment of the gate valve according to the present invention is shown in FIGS. Gate valve 210
Includes a valve housing 212 having a fluid conduit 214 and a valve seat 216. Gate valve 21
0 further comprises a sealing plate assembly 230 and an actuator assembly 232. The actuator assembly 232 includes a shaft 240 connected at one end to an actuator (not shown) and at the other end to an actuator element 244 via a connection 242. Actuator element 244 includes
Opening 2 for receiving a roller element such as ball 250
46 are provided.

The sealing plate assembly 230 may include a sealing plate 260 and a facing plate 262. An elastic ring 264 is mounted on the sealing plate 260 to ensure the sealing engagement between the sealing plate 260 and the valve seat 216. The sealing plate 260 and the opposing plate 262 may be biased toward the retracted position against the actuator element 244 by a spring (not shown). The sealing plate 260 and the opposing plate 262 are provided with an inclined surface 280 having a position and a shape to be engaged with the ball 250. In the embodiment of FIGS. 11 and 12, the ramp 280 is shaped to cause the actuator element 244 to rotate relative to the sealing plate 260, as best shown in FIG. The sealing plate 260 includes a yoke 270
The yoke is mounted on the shaft 24.
Limiting the sealing plate 260 to rotational movement in response to a zero linear movement.

In operation, the linear movement of the shaft 240 is translated into a rotational movement of the actuator element 244 relative to the sealing plate 260, so that the ball 250 moves along the inclined surface 280, thereby
Numeral 60 moves toward and away from the closed position of the valve.
When the valve is in the open position, the entire assembly, including the actuator assembly 232 and the sealing plate assembly 230, may move to a lower portion of the valve housing 212. The shape of the inclined surface 280 may be any of the shapes described above.

While what has been shown and described as presently preferred embodiments of this invention has been described, various changes and modifications can be made without departing from the scope of the invention as defined by the appended claims. Will be apparent to those skilled in the art.

[Brief description of the drawings]

FIG. 1 is a cross-sectional side view of a first embodiment of a gate valve according to the present invention, showing a state in an open position.

FIG. 2 is a cross-sectional side view of the valve of FIG. 1, showing the valve in a retracted position.

FIG. 3 is a cross-sectional side view of the valve of FIG. 1 in a closed position.

FIG. 4 is a cross-sectional top view of the valve of FIG. 1;

FIG. 5 is an enlarged partial cross-sectional view of the valve of FIG. 1, showing the valve in a retracted position.

FIG. 6 is an enlarged partial cross-sectional view of the valve of FIG. 1 in a closed position.

FIGS. 7A to 7C show an inclined surface in which the contour in the moving direction is curved, and the contour orthogonal to the roller element moving direction is also curved.

FIGS. 8A to 8C show inclined surfaces in which the contour in the moving direction is curved and the contour orthogonal to the roller element moving direction is flat.

FIG. 9 shows an inclined surface having a linear contour in the roller element moving direction.

FIG. 10 shows an inclined surface in which the contour in the roller element moving direction is linearly fragmented.

FIG. 11 is a second view of the gate valve according to the present invention.
FIG. 4 is a cross-sectional side view of the embodiment of FIG.

FIG. 12 is a schematic top view of the valve of FIG. 11;

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Vaclav Misrivek 112, Farwell Road, Tingsboro, 01879, Massachusetts, USA F-term (reference) 3H053 AA21 AA22 AA35 BA04 BC03 BD10

Claims (25)

[Claims] A valve housing having a fluid conduit defining a valve seat; and a sealing plate having an inclined surface for guiding the sealing plate between a retracted position and a closed position. A sealing plate assembly having a contour such that a surface provides a smooth transition between a retracted position and a closed position; and a retracted position and the sealing plate having the sealing plate retracted from a valve seat. An actuator assembly for moving said sealing plate between a closed position for sealing engagement with a valve seat, comprising: an actuator element; and a roller element provided on the actuator element;
The roller element is engaged with the inclined surface, and moves along the inclined surface with movement of the actuator element with respect to the sealing plate to move the sealing plate between a retracted position and a closed position. A valve comprising: an actuator assembly for moving; and a device for biasing the sealing plate toward a retracted position. 2. The valve according to claim 1, wherein said roller element is a ball. 3. The valve according to claim 1, wherein said roller element is a cylindrical roller. 4. The valve of claim 1, wherein said sealing plate includes a plurality of ramps, and said actuator assembly includes a corresponding plurality of roller elements respectively engaging said ramps. 5. The valve according to claim 1, wherein the slope of the inclined surface in the roller element moving direction has a large gradient near the retreat position and a small gradient near the closed position. 6. The valve according to claim 1, wherein the contour of the inclined surface in the roller element moving direction includes a convex radius portion. 7. The valve according to claim 1, wherein the contour of the inclined surface in the roller element moving direction includes a linear portion. 8. The valve according to claim 1, wherein the contour of the inclined surface in the roller element moving direction includes a fragmentary linear portion. 9. The valve according to claim 1, wherein the contour of the inclined surface in the roller element moving direction includes a fragmentary curved portion. 10. The method according to claim 1, wherein the contour of the inclined surface in the roller element moving direction has a portion corresponding to a closed position of the sealing plate, and this portion is recessed from the surface of the sealing plate. The described valve. 11. The valve according to claim 1, wherein the contour of the inclined surface in the roller element moving direction includes various slope portions. 12. The valve according to claim 1, wherein the inclined surface linearly moves the actuator element with respect to the sealing plate. 13. The valve according to claim 1, wherein said inclined surface rotates said actuator element relative to said sealing plate. 14. The valve of claim 1, wherein said device for biasing said sealing plate includes one or more springs. 15. The valve according to claim 1, wherein said device for biasing said sealing plate includes one or more leaf springs. 16. The valve of claim 1, wherein said actuator assembly moves said sealing plate between a retracted position and an open position. 17. The valve according to claim 1, wherein the shape of the inclined surface in a direction orthogonal to the roller element moving direction matches the shape of the roller element. 18. The method according to claim 18, wherein the inclined surface has a deep end corresponding to a retracted position of the sealing plate, a shallow end corresponding to a closed position of the sealing plate, and a portion between the deep end and the shallow end. 2. The valve of claim 1 including a transition portion. 19. An opposing plate having a fluid conduit and defining a valve seat, a sealing plate having a plurality of sealing plate slopes, and an opposing plate having a plurality of opposing plate slopes. The sealing plate slope and the opposed plate slope guide the sealing plate and the opposed plate between the retracted position and the closed position, respectively, and provide a non-smooth smooth movement between the retracted position and the closed position. An opposed plate having such a contour, an open position, a retracted position in which the sealing plate is retracted from the valve seat, and a closed position in which the sealing plate is sealingly engaged with the valve seat. An actuator assembly for moving said sealing plate and said opposing plate, said actuator assembly being provided on said actuator element A roller element, wherein the roller element is engaged with the sealing plate inclined surface and the opposed plate inclined surface, and the sealing plate inclined with movement of the actuator element with respect to the sealing plate and the opposed plate. An actuator assembly for moving the sealing plate between a retracted position and a closed position by moving the sealing plate between a retracted position and a closed position; and biasing the sealing plate and the opposed plate toward the retracted position. And one or more springs. 20. The device according to claim 1, wherein said roller element is a ball.
10. The valve according to 9. 21. The valve according to claim 19, wherein the profile of each inclined surface in the roller element moving direction has a large gradient near the retreat position and a small gradient near the closed position. 22. The valve according to claim 19, wherein the contour of each of the inclined surfaces in the roller element moving direction includes a convex radius portion. 23. The valve according to claim 19, wherein the shape of each of the inclined surfaces in a direction orthogonal to the moving direction of the roller element matches the shape of the roller element. 24. A contour of each of said inclined surfaces in a roller element moving direction has a portion corresponding to a closed position of a sealing plate,
24. The valve according to claim 23, wherein the portion is recessed from a surface of the sealing plate. 25. Each of the inclined surfaces has a deep end corresponding to a retracted position of a sealing plate, a shallow end corresponding to a closed position of the sealing plate, and a deep end corresponding to the closed end of the sealing plate. 20. The valve of claim 19, including a non-abrupt, relatively smooth transition between them.