CN103968776B - A kind of new equipment for aspherics mould On-machine Test - Google Patents
A kind of new equipment for aspherics mould On-machine Test Download PDFInfo
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- CN103968776B CN103968776B CN201410009017.3A CN201410009017A CN103968776B CN 103968776 B CN103968776 B CN 103968776B CN 201410009017 A CN201410009017 A CN 201410009017A CN 103968776 B CN103968776 B CN 103968776B
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Abstract
A kind of new equipment for aspherics mould On-machine Test, it includes：One laser, two beam-expanding systems, shrink beam system, one piece of spectroscope, convertible lens, two blocks of optical flats, circular wedge, high bandwidth acousto-optic deflection device, two spaces wave filter, two pieces of speculums, radio-frequency power amplifier, Direct Digital Frequency Synthesizers, CCD and computer of four angle of wedge very littles.In the apparatus, Direct Digital Frequency Synthesizers and CCD are connected with computer, and by computer controls.The present invention adjusts Direct Digital Frequency Synthesizers frequency control word by computer program makes interference fringe high speed frequency conversion, and carries out fringe skeletons using multifrequency time series phase unwrapping package method；The speed of its striped frequency conversion reaches tens nanoseconds/frame, therefore can realize the face shape On-machine Test of aspherics mould.
Description
【Technical field】
The present invention is a kind of three-dimensional measuring apparatus based on optical interference techniques, more particularly to a kind of to be used for aspherical light
Learn the new equipment of mould On-machine Test.
【Background technology】
Current all kinds of camera lenses are towards short, small, light, thin and height as matter direction is developed, and the use of non-spherical lens turns into and pushes away
Move the leading force of this trend development.The batch micro operations of plastic aspheric lenes (bore is in below 100mm) are mainly using essence
Close injection molding technology, and the batch micro operations of glass aspheric lenses (bore is in below 50mm) mainly use hot compression molding skill
Art, the manufacture of this two classes non-spherical lens is dependent on the processing of ultraprecise mould, and the machining accuracy of mould and efficiency are systems
The technical bottleneck that about aspherical lens are produced.How the machining accuracy and efficiency of mould is improved, before one of them is important
Carry be exactly possess high efficiency, it is high-precision in machine side shape detection means.Lens die typically requires face shape machining accuracy in sub-micro
Rice magnitude, or even nanometer scale, this requires that the certainty of measurement of face shape is higher；Simultaneously because often processing is big in manufacturing at the scene
Take measurements and variform aspherical module, this is accomplished by a kind of flexibly quick measuring system to realize polytype mould
The measurement of face shape, the flexibility of its measurement and measuring speed should be able to meet the requirement of on-machine measurement；Due to being high-acruracy survey, must
So can noise vibrated influence, the influence of low-frequency vibration is far longer than dither, on-machine measurement requirement in actual measurement
Measuring system is insensitive to general low-frequency vibration.During the Ultra-precision Turning of lens die, hot moulding or note are reached
The surface figure accuracy being moulded required by type is, it is necessary to carry out repeatedly compensation processing, and the acquisition of compensation rate is needed by meeting above-mentioned bar
The on-machine measurement device of part realizes, therefore, outstanding will complete ultraprecise mould processing and thoroughly in machine surface shape measurement method
The key point of mirror shaping.Contact Two-dimensional on-machine measurement method increasingly lag behind mould processing demand, research high efficiency,
High accuracy three-dimensional on-machine measurement method has been to be badly in need of in the industry.
One of first technology is (referring to paper " On-Machine Measurement of Aspherical Surface
Profile non-spherical surface profiles on-machine measurement ", author：Arai Yoshikazu,Gao Wei,Shimizu Hiroki,
Kiyono Satoshi and Kuriyagawa Tsunemoto, magazine name：Nanotechnology and Precision
Engineering, 2 (3), 210-216 pages, 2004) the three of spherical mold surface each point is measured using contact type probe
Dimensional coordinate values, although this measuring method principle is simple, measurement efficiency is low, before measurements the phase, need in advance find center
Summit, measures by reference point of summit, and the speed and precision of measurement have much relations with the error for confirming summit, and visit
In use for some time, the abrasion of gauge head causes measurement error bigger than normal to pin, need to change gauge head；This method can only Measurement die
Two-dimensional section profile, it is impossible to obtain three-dimensional information, be difficult to the on-machine measurement of non-rotational symmetric aspherical module；Meanwhile,
In terms of the mould of measurement unlike material, gauge head easily scratches die surface or is scratched by die surface contact method.These shortcomings
All seriously govern contact method further applying in terms of mould on-machine measurement.
The two of first technology are (referring to books " freeform optics are designed and advanced manufacturing technology ", author：Li Rongbin, Du
Snow, Zhang Zhihui, The Hong Kong Polytechnic University industry and be Jin optics manufacturing center of elder generation of System engineering sciences system publication, 2005) utilize atom
Between mutually exclusive power principle develop atomic force e measurement technology, and for the surface shape measurement of aspherical lens module.This method
Contact type measurement is fallen within itself, simply gauge head contact force is very small, can carry out reciprocating type mobile acquisition in die surface
Three-dimensional information, but efficiency is still very low when larger mould 3 d shape is measured；The similar scanning sonde method of its shortcoming, such as gauge head
The error for causing, needs to find culminating point, etc. before measurement；Furthermore, its price is very expensive.Current this measuring system is only limitted to
Disembark measurement.
The three of first technology are (referring to paper " The 3D measurement and analysis of aspheric
Surfaces aspherical three-dimensional measurement and analysis ", author：McBride,J.W.,NPL Engineering Measurement
Awareness Network Meeting:High Accuracy Freeform Measurement of Optical and
Orthopaedic Surfaces,Loughborough,UK,pp.39,2009；Paper：“Testing Aspheric
Surfaces:The Simple Method With a Circular aspherical tests of Stop：Simple circular diaphragm method ", author：
Andrianto Handojo and Hans J.Frankena, periodical：Applied Optics,37(25),5969-5973,
1998；Paper " Null Hartmann test for the fabrication process of large aspheric
Zero hartman test in the large-scale manufacturings of surfaces ", author：Ho-Soon Yang,Yun-Woo Lee,Jae-
Bong Song, and In-Won Lee, periodical：Opt.Express, 13 (6), 1839-1847,2005) mainly using non-dry
Relate to method carries out measurement of disembarking to large-scale aspherical mirror, and certainty of measurement is not high, be not suitable for aspheric optical lens mould in machine
Measurement.
The four of first technology are (referring to paper：“Computer Generated Hologram：Null Lens Test of
Aspheric Wavefronts calculate holographic：The null lens test on aspherical corrugated ", author：J C Wyant and P K O’
Neill, periodical：Appl.Opt, 13 (12), 2762-2765,1974；And paper " Dynamic null lens for
Aspheric testing using a membrane mirror make dynamic null lens and realize aspherical inspection using thin membrance mirror
Survey ", author：C.Pruss, H.J.Tiziani, periodical：Optics Communications,233(1-3),15–19,2004
Year；And paper " carrying out Aspherical-surface testing using curved surface computed hologram ", author：Lu Zhenwu, Liu Hua, Li Fengyou, periodical：Optics
Precision engineering, 12 (6), 555-559,2004 year) aspherical measurement is realized using zero-compensation lens and calculating holographic interferometry,
Although compensating interferometer method certainty of measurement is very high, the surface testing requirement of mould processing can be met, compensating interferometer method is required for root
Corresponding null lens, film eyeglass or computed hologram are made according to measured aspherical feature, this greatly reduces measurement
Flexibility, and minimum bore or high-precision computed hologram make extremely difficult, and cost is very high.It is non-in processing different type
During the lens die of sphere, the measurement scheme of compensating interferometer method needs to change, redesign and make, and such efficiency is too low, it is impossible to
For on-machine measurement.
The five of first technology are (referring to paper：“Automated Interferometric System for Aspheric
The automatic interference system of the aspherical tests of Surface Testing ", author：T.Kanou, Proc.SPIE, 680, p.71,
1986；And paper " Lateral-shearing interferometer using square prisms for optical
Testing of aspheric lenses carry out non-spherical lens measurement using cubic prism shearing interferometers ", author：
Seung-Woo Kim, Woo-Jong Cho and Byoung-Chang Kim, periodical：Meas.Sci.Technol.,9,
1129-1136,1998；And paper：“System optimization of radial shearing
Interferometer for aspheric testing radial-shear interferometers carry out the system optimization of aspherical test ", make
Person：Dong Liu,Yongying Yang and Yibing Shen,Junmiao Weng,Yongmo Zhuo,Proc.SPIE,
6834,68340U, 2008；And paper " Aspheric surface testing by a phase-shifting
Shearing interferometer phase shifts shearing interferometers carry out aspherical test ", author：Gao Hong,Xin
Qiming, Huang Kaixiang and Parks Robert E., periodical：Advanced Optical Manufacturing
And Testing IV ofSPIE, 145-149,1994) shear interference technology is described for realizing aspherical measurement.
Shear interference technology is not required to canonical reference face, can to a certain extent meet the aspherical face of different type by adjusting shearing displacement
Shape is measured, and flexibility is very strong, it has also become the study hotspot in non-spherical measuring field.But current study limitation is in dry using shearing
Interferometer carries out aspherical measurement of disembarking, use it for the on-machine measurement of aspherical module there is a problem in that：1st, essence is measured
Degree is relatively low, also needs to consider more error components when using it for on-machine measurement, and such as lathe vibration in itself, air pressure is unstable and machine
Vibration, foundation vibration that bed oil circuit causes etc., its certainty of measurement cannot meet the requirement of mould processing；2nd, current shearing is done
Relate to that commercial measurement efficiency is low, i.e., the aspherical module inspection of different bores, different faces shape, different aspherical degrees cannot be realized in machine
Survey；3rd, current shear interference is based on lateral shear, but the interference pattern that lateral shear is obtained can not reflect tested mould
Whole face shapes, will recover whole face shapes and also need to successively gather two groups of mutually orthogonal interference patterns, and this can be largely effected on surveys in machine
The efficiency of amount.
【The content of the invention】
To overcome the shortcoming of above-mentioned prior art, the present invention to propose a kind of for aspherics die face shape on-machine measurement
New equipment.
The technical scheme of present invention solution technical problem is to provide a kind of for the new of aspherics mould On-machine Test
Device, it includes a laser, and the direction that horizontally advances for producing laser along laser sequentially sets optical beam-expanding system, light splitting
Mirror, focusing convertible lens, tested aspherical module；The laser forms the first vertical optical path after again passing by dichroic mirror,
First vertical optical path place the first optical flat, laser pass through after the first optical flat formation two horizontal optical paths, under
The first wedge, the second wedge are sequentially set along laser direction of advance in face light path a；Along laser direction of advance in light path b above
Successively place the 3rd wedge, the 4th wedge；A high bandwidth acousto-optic deflection device is placed after the second wedge and the 4th wedge, the acousto-optic
The laser of the modulated multi-wavelength of deflector, its bandwidth is at least 40MHz, and diffraction efficiency is more than 60%；Light path a is equal with light path b
By acousto-optic deflection device and withAngle outgoing, the angle of emergenceIt is equal toAcousto-optic deflection device connects with radio-frequency power amplifier
Connect, radio-frequency power amplifier is connected with Direct Digital Frequency Synthesizers, the frequency-tuning range of the Direct Digital Frequency Synthesizers
More than 40MHz, and Direct Digital Frequency Synthesizers are connected with computer, and by computer controls；Respectively in light path a and b, position
After acousto-optic deflection device, according to beam projecting angle placement space wave filter and speculum, put in a light paths after speculum
Beam-expanding system is put, shrink beam system is placed in b light paths, the second optical flat, light are placed again after beam-expanding system and shrink beam system
Road a and b is placed in second vertical optical path by forming the second vertical optical path after the second optical flat along laser direction of advance
CCD, CCD are connected with computer.Preferably, the beam-expanding system and shrink beam system are made up of identical lens, it is ensured that thus
The light path a for causing is identical with the optical path difference of light path b, and its beam size is fine-tuning.
Preferably, first optical flat and the second optical flat are equal-sized cuboid, front and rear mirror polish, material
K9 glass is, two plate centers distance is 6-8 times of slab-thickness.
Preferably, first wedge, the second wedge, the 3rd wedge and the 4th wedge is size and material is identical
Circular wedge, the first wedge, the second wedge are coaxially disposed within a light paths, staggered relatively without angle of wedge face and leave minimum gap, are adopted
Make their synchronous in the same direction/reversely pivotings with electric device；The 3rd wedge, the 4th wedge are placed on b light in the same fashion
Lu Zhong, pivoting during operation；First wedge and the second wedge form a wedge pair, equally, the 3rd wedge and the 4th wedge
Also a wedge pair is formed, effect is Bragg diffraction Angle Position of the fine adjustment light beam to acousto-optic deflection device.
The present invention adjusts DDS frequencies for the new equipment of aspherics die face shape on-machine measurement by computer program
Control word makes interference fringe high speed frequency conversion, and carries out fringe skeletons using multifrequency time series phase unwrapping package method；Its
The speed of line frequency conversion reaches tens nanoseconds/frame, therefore can realize the face shape On-machine Test of aspherics mould.The present invention is by footpath
It is combined with striped converter technique to shear interference, the aspherics mould of multiple caliber can be quickly measured in machine, and to flat
Face and sphere are equally applicable, and anti-machine vibration ability is stronger, the on-machine measurement in achievable process, and its time series
Striped frequency conversion function is highly effective to measuring the die surface containing manufacturing deficiency.Therefore the present invention is used for aspherics die face
The new equipment of shape on-machine measurement can be arranged on lathe the On-machine Test for carrying out aspherical module processing, using in time series
High speed frequency conversion strip extraction phase and then die face shape three-dimensional measurement is realized, it is to the non-of the discontinuity zones such as manufacturing deficiency
Spherical mould measurement is largely effective.The device uses aplanatism structure, and anti-vibration, noise immune are strong, are adapted to each of different bores
Plant the measurement of face shape (including aspherical, sphere and plane etc.).
【Brief description of the drawings】
Fig. 1 is structural representation of the present invention for the new equipment of aspherics die face shape on-machine measurement.
【Specific embodiment】
Fig. 1 is referred to, the present invention includes laser 1 for the new equipment 100 of aspherics die face shape on-machine measurement,
The direction that horizontally advances for producing laser along laser 1 sequentially sets optical beam-expanding system 2, spectroscope 3, focusing convertible lens 4, quilt
Survey aspherical module 5；The laser is again passed by after spectroscope 3 reflects and forms the first vertical optical path, is placed in the vertical optical path
First optical flat 6, laser is advanced in light path a below by forming two horizontal optical paths after the first optical flat 6 along laser
Direction sequentially sets the first wedge 7, the second wedge 8；In light path b above along laser direction of advance successively place the 3rd wedge 9,
4th wedge 10；A high bandwidth acousto-optic deflection device 11 is placed after wedge 8 and wedge 10, light path a and light path b is inclined by acousto-optic
Turn device 11, acousto-optic deflection device 11 is connected with radio-frequency power amplifier 12, radio-frequency power amplifier 12 and direct digital synthesis technique
Device DDS13 is connected, and DDS13 is connected with computer 20, and is controlled by computer 20；Respectively in light path a and b, positioned at acousto-optic
After deflector 11, according to beam projecting angle placement space wave filter 14 and speculum 15, in a light paths after speculum 15
Beam-expanding system 16 is placed, shrink beam system 17 is placed in b light paths, place the second optical flat 18 again behind 16 and 17；Light path a with
B places CCD 19 in the vertical optical path by forming the second vertical optical path after the second optical flat 18 along laser direction of advance,
CCD19 is connected with computer 20.
The laser 1 is mainly semiconductor laser, several different wavelength can be used, based on 514nm wavelength.
The convertible lens 4 is condenser lens, and it can be lens combination, and its placement location is focus and tested aspherical top
The focus of point curved surface overlaps.The convertible lens 4 can be directed to the tested aspherical module of different bores and be changed.
The beam-expanding system 16 and shrink beam system 17 are made up of identical lens, it is ensured that the light path a and light for thus causing
The optical path difference of road b is identical, and its beam size is fine-tuning.
The optical flat 18 of first optical flat 6 and second is equal-sized cuboid, and front and rear mirror polish, material is
K9 glass, two plate center distances can be adjusted specifically, generally 6-8 times of slab-thickness.Two optical flats formed light path a with
The thickness d of centre distance Δ S and the first optical flat 6 between b0With surface normal before incident ray and the first optical flat 6
Angle theta is relevant, i.e.,
45 ° of the general value of angle theta, n is flat board refractive index.
First wedge 7, the second wedge 8, the 3rd wedge 9 and the 4th wedge 10 are size and the identical circle of material
Wedge, the first wedge wedge 7, the second wedge 8 are coaxially disposed within a light paths, staggered relatively without angle of wedge face and leave minimum gap,
Using electric device make they synchronously lead to/reversely around axle o1-o2Rotate；In the same fashion the 3rd wedge 9, the 4th wedge 10
It is placed in b light paths, around axle o during operation3-o4Rotate；First wedge 7 and the second wedge 8 form a wedge pair, equally, the 3rd
The wedge 10 of wedge 9 and the 4th also forms a wedge pair, and effect is that fine adjustment light beam spreads out to Prague of acousto-optic deflection device 11
Firing angle position.θ is respectively when two wedges relatively rotate angle around optical axis1And θ2When, light deviation angle δ is
Wherein α is the wedge angle of wedge, generally less than 1 °.
The laser of the modulated multi-wavelength of acousto-optic deflection device 11, its bandwidth is at least 40MHz, to make the interference fringe can
Conversion multi-frequency, its diffraction efficiency is more than 60%, so has enough light intensity to form interference fringe.According to acoustooptical effect principle,
When incident ray is with Bragg angle θBWhen inciding acousto-optic deflection device 11, diffraction light energy concentrates on 0 grade and one-level (± 1 grade) is spread out
Penetrate in light, filter 0 grade and one of one-level light, can obtain single light beam, its beam deflection angleEqual to Bragg angle θB, it is
Wherein n is the refractive index of acousto-optic medium, vsIt is the velocity of sound, fsIt is frequency of sound wave.
The frequency-tuning range of Direct Digital Frequency Synthesizers DDS13 is more than 40MHz, with the frequency of compatible acousto-optic deflection device
Rate bandwidth, DDS13 output sinusoidal analog signal frequency F be
N is frequency control word, and f is clock frequency, and t is the digit of phase accumulator.The tuning period of DDS13 is generally to be received
Second-time.Frequency of sound wave f in acousto-optic deflection device 11sOutput frequency F equal to DDS13, therefore light passes through acousto-optic deflection device
The deflection angle of 11 rear stage diffracted raysFor
Therefore, changing frequency control word N by computer can just change emergent ray angle, thus change interference fringe
Frequency.And fringe frequency f0With the angle of emergenceBetween relation be represented by
Wherein λ is optical wavelength, the angle of emergenceVery little,
Amplified by beam-expanding system 2 by the laser of the outgoing of laser 1, reach tested non-by spectroscope 3 and convertible lens 4
Spherical mould 5, and reflected by the surface of mould 5, light beam now carries face shape information, and it is again by convertible lens 4
Incide on spectroscope 3, and by 3 reflections, two beam a and b be divided into by the first optical flat 6, light beam a by front surface reflection simultaneously
By the first wedge 7, the second wedge 8, change incidence angle is Bragg angle θB, by acousto-optic deflection device 11；Another light beam b is by light
Surface is reflected through the 3rd wedge 9, the 4th wedge 10 after learning flat board 6, and the same incidence angle that changes is Bragg angle θB, by acousto-optic
Deflector 11.By the two-beam line after acousto-optic deflection device 11 withAngle outgoing, remaining is filtered by spatial filter 14
Diffracted ray (another first-order diffraction light and zero order diffracted light), reflected mirror 15, then pass through beam-expanding system 16 and shrink beam system respectively
System 17 changes radial direction bore, forms radial shear interference, records in CCD19 stripe pattern by after the second optical flat 18
On, carry out face shape finally by computer software and recover and evaluation.
Acousto-optic deflection device 11 is connected with radio-frequency power amplifier 12, DDS13, because the signal from DDS13 out is weaker, because
This strengthens frequency signal using power amplifier 12.Light a and b are changed by the frequency control word N of computer change DDS13
The angle of emergenceSo as to change fringe frequency, because the time of DDS13 frequencies change only needed for tens nanoseconds, therefore interference fringe
Frequency transformation can just be completed within the extremely short time, can gather the interference fringe of multigroup different frequency temporally Phase- un- wrapping
Method recovers final continuous phase.Assuming that the frequency change of striped presses 2NThe carrying out of (N=0,1,2 ...), first passes through phase shift side
The other method such as method or Fourier transformation solves the wrapped phase figure φ after every set stripe measurementw(m, n, t), then ask two it is adjacent not
The Phase Unwrapping Algorithm difference and the discontinuous number of 2 π of identical point in the bar graph of same frequency, assuming that meeting celestial agriculture sampling on time shaft
On the premise of theorem, final continuous phase can be obtained after the Phase Unwrapping Algorithm difference of the different frequency bar graph that adds up, thus
The every phase value for obtaining is independent of each other, therefore this measurement result is not influenceed by tested die surface defect, with stronger
Noise immunity.
Described ccd detector has IMAQ speed higher, and acquisition frame rate is no less than 60fps.
In the apparatus, the real-time of measurement is realized by the frequency conversion of striped high speed, and frequency conversion function is by DDS frequencies
Control word is realized.Equipments overall structure is aplanatism structure, and the influence to vibrating is insensitive, and measurement higher can be kept to imitate
Rate.This experimental provision not only measurable multiple caliber it is aspherical, it is equally applicable to plane and sphere, be capable of achieving aspherics
Mould processing in machine surface testing.
Presently preferred embodiments of the present invention is the foregoing is only, is not intended to limit the invention, it is all in original of the invention
Any modification made within then, equivalent and improvement are in protection scope of the present invention.
Claims (4)
1. a kind of new equipment for aspherics mould On-machine Test, it includes a laser, it is characterised in that：Along laser
Device produces the direction that horizontally advances of laser sequentially to set optical beam-expanding system, spectroscope, focus on convertible lens, tested aspheric face mould
Tool；The laser forms the first vertical optical path after again passing by dichroic mirror, and the first optics is placed in first vertical optical path
Flat board, laser is sequentially set in light path a below by forming two horizontal optical paths after the first optical flat along laser direction of advance
Put the first wedge, the second wedge；In light path b above the 3rd wedge, the 4th wedge are successively placed along laser direction of advance；
A high bandwidth acousto-optic deflection device is placed after two wedges and the 4th wedge, the laser of the modulated multi-wavelength of the acousto-optic deflection device, its
Bandwidth is at least 40MHz, and diffraction efficiency is more than 60%；Light path a and light path b passes through acousto-optic deflection device and with θ angle outgoing,
Output angle θ is equal to sin θ, and acousto-optic deflection device is connected with radio-frequency power amplifier, and radio-frequency power amplifier is closed with Direct Digital frequency
Grow up to be a useful person connected, the frequency-tuning range of the Direct Digital Frequency Synthesizers is more than 40MHz, and Direct Digital Frequency Synthesizers and meter
Calculation machine is connected, and by computer controls；Respectively in light path a and b, after acousto-optic deflection device, according to beam projecting angle
Placement space wave filter and speculum, beam-expanding system is placed in a light paths after speculum, and shrink beam system is placed in b light paths,
Place the second optical flat again after beam-expanding system and shrink beam system, light path a and b hangs down by forming second after the second optical flat
Straight light path, CCD is placed in second vertical optical path along laser direction of advance, and CCD is connected with computer.
2. the new equipment for aspherics mould On-machine Test according to claim 1, it is characterised in that：This is expanded
System and shrink beam system are made up of identical lens, it is ensured that the light path a for thus causing is identical with the optical path difference of light path b, its
Beam size is fine-tuning.
3. the new equipment for aspherics mould On-machine Test according to claim 1, it is characterised in that：This first
Optical flat and the second optical flat are equal-sized cuboid, and front and rear mirror polish, material is K9 glass, two plate centers
Distance is 6-8 times of slab-thickness.
4. the new equipment for aspherics mould On-machine Test according to claim 1, it is characterised in that：This first
Wedge, the second wedge, the 3rd wedge and the 4th wedge are size and the identical circular wedge of material, the first wedge,
Two wedges are coaxially disposed within a light paths, staggered relatively without angle of wedge face and leave minimum gap, make them synchronous using electric device
In the same direction/reversely pivoting；The 3rd wedge, the 4th wedge are placed in b light paths in the same fashion, pivoting during operation；
First wedge and the second wedge form a wedge pair, and equally, the 3rd wedge and the 4th wedge also form a wedge pair, effect
It is Bragg diffraction Angle Position of the fine adjustment light beam to acousto-optic deflection device.
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| CN201410009017.3A CN103968776B (en) | 2013-01-08 | 2014-01-08 | A kind of new equipment for aspherics mould On-machine Test |
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| CN201410009017.3A CN103968776B (en) | 2013-01-08 | 2014-01-08 | A kind of new equipment for aspherics mould On-machine Test |
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| CN106152972A (en) * | 2016-08-11 | 2016-11-23 | 广西师范大学 | A kind of phase-shift type optical projection three-dimension measuring system and method |
| CN106595473A (en) * | 2016-09-29 | 2017-04-26 | 浙江科技学院（浙江中德科技促进中心） | In-site measurement system of aspheric die and measurement method and measurement examination method of system |
| CN112268520B (en) * | 2020-09-30 | 2022-04-08 | 西安理工大学 | Non-contact flexible measurement method for gear tooth surface shape error |
| CN113933029B (en) * | 2021-10-15 | 2024-06-14 | 中国工程物理研究院激光聚变研究中心 | Processing detection system and manufacturing method for off-axis aspheric element |
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| US6842255B2 (en) * | 2001-04-09 | 2005-01-11 | Canon Kabushiki Kaisha | Interferometer and interferance measurement method |
| CN2526783Y (en) * | 2002-02-01 | 2002-12-18 | 西安工业学院 | Optical measurer for non-spherical surface shape |
| CN1280604C (en) * | 2003-10-08 | 2006-10-18 | 南京师范大学 | Small-sized on-line radical shear interferometer and its aspheric surface measuring method |
| CN100494887C (en) * | 2006-05-22 | 2009-06-03 | 北京航空航天大学 | Sinusoidal fringe structural light projector based on acousto-optic deflection device |
| CN101270975B (en) * | 2008-05-16 | 2010-12-22 | 湖南大学 | Combined interference device for aspheric surface measurement |
| CN102636131A (en) * | 2012-05-09 | 2012-08-15 | 丹阳市民杰光学仪器有限公司 | In-situ measurement device for processing miniature aspheric surface |
| CN203993372U (en) * | 2013-01-08 | 2014-12-10 | 浙江科技学院 | A kind of aspherical module on-machine measurement device based on acousto-optic modulation |
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