CN103968776A - Novel on-machine detection device for aspheric optical molds - Google Patents
Novel on-machine detection device for aspheric optical molds Download PDFInfo
- Publication number
- CN103968776A CN103968776A CN201410009017.3A CN201410009017A CN103968776A CN 103968776 A CN103968776 A CN 103968776A CN 201410009017 A CN201410009017 A CN 201410009017A CN 103968776 A CN103968776 A CN 103968776A
- Authority
- CN
- China
- Prior art keywords
- wedge
- light path
- optical
- frequency
- mould
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 58
- 238000001514 detection method Methods 0.000 title abstract description 7
- 238000012360 testing method Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 7
- 230000000694 effects Effects 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 26
- 238000006243 chemical reaction Methods 0.000 abstract description 7
- 238000004590 computer program Methods 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 47
- 238000005516 engineering process Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000003754 machining Methods 0.000 description 8
- 238000010008 shearing Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 238000000691 measurement method Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004422 calculation algorithm Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 235000014698 Brassica juncea var multisecta Nutrition 0.000 description 1
- 101100042630 Caenorhabditis elegans sin-3 gene Proteins 0.000 description 1
- 241000251184 Rajiformes Species 0.000 description 1
- 206010044565 Tremor Diseases 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000001932 seasonal effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
A novel on-machine detection device for aspheric optical molds comprises a laser, two beam expanding systems, a beam reduction system, a beam splitter, a conversion lens, two optical flat plates, four small-wedge-angle round optical wedges, a high-bandwidth acousto-optic deflector, two spatial filters, two reflectors, a radio-frequency power amplifier, a DDS (direct digital synthesizer), a CCD (charge coupled device) and a computer. Both the DDS and the CCD are connected with the computer and are controlled via the computer. The frequency control word of the DDS is regulated through computer programs to allow the interference fringe to vary in frequency at high speed; fringe patterns are processed by a multi-frequency time series phase unwrapping method; the speed of fringe frequency variation is up to dozens of nanoseconds per frame, and surface shape on-machine detection can be achieved for aspheric optical molds accordingly.
Description
[technical field]
The present invention is a kind of three-dimensional measuring apparatus based on optical interference techniques, particularly relate to a kind of for aspherics mould the new equipment at machine testing.
[background technology]
Current all kinds of camera lens is towards short, little, light, thin and high picture element future development, and the use of non-spherical lens becomes the leading force that promotes this trend development.The batch manufacture of plastic aspheric lenes (bore is below 100mm) mainly adopts Precise Injection Moulding Technique, and the batch manufacture of glass aspheric lenses (bore is below 50mm) mainly adopts hot compression molding technology, the manufacture of this two classes non-spherical lens all relies on the processing of ultraprecise mould, and the machining precision of mould and efficiency are the technical bottlenecks that restriction aspherical lens is produced.How to improve machining precision and the efficiency of mould, one of them important prerequisite has high-level efficiency, high-precision in machine side shape detection means exactly.Lens die General Requirements face shape machining precision is in sub-micrometer scale, even nanometer scale, and this just requires the measuring accuracy of face shape higher; Often process the different aspherical module of a large amount of size and dimensions due in manufacturing at the scene simultaneously, this just needs, and a kind of measuring system is to realize the measurement of polytype die face shape fast flexibly, and the dirigibility of its measurement and measuring speed should be able to meet the requirement of on-machine measurement; Owing to being high-acruracy survey, will inevitably be subject to the impact of vibration noise, the impact of actual measurement medium and low frequency vibration is far longer than dither, and on-machine measurement requires measuring system insensitive to general low-frequency vibration.In the ultraprecise process of lens die, reach the desired surface figure accuracy of hot moulding or injection mo(u)lding, need to repeatedly compensate processing, and obtaining of compensation rate need to realize by the on-machine measurement device that meets above-mentioned condition, therefore, outstanding at machine surface shape measurement method by the key point that has been ultraprecise Mould Machining and lens moulding.Contact Two-dimensional on-machine measurement method more and more lags behind the demand of Mould Machining, and research high-level efficiency, high accuracy three-dimensional on-machine measurement method have been to be badly in need of in the industry.
Formerly one of technology is (referring to paper " On-Machine Measurement ofAspherical Surface Profile non-spherical surface profile on-machine measurement ", author: AraiYoshikazu, Gao Wei, Shimizu Hiroki, Kiyono Satoshi andKuriyagawa Tsunemoto, magazine name: Nanotechnology and PrecisionEngineering, 2 (3), 210-216 page, 2004) adopt contact type probe to measure the D coordinates value of aspherical module surface each point, although this measuring method principle is simple, but it is low to measure efficiency, measuring early stage, need find in advance culminating point, taking summit as reference point is measured, the speed of measuring and the error on precision and confirmation summit have much relations, and probe in use for some time, the wearing and tearing of gauge head cause measuring error bigger than normal, need to change gauge head, this method can only Measurement die two-dimensional section profile, cannot obtain three-dimensional information, be difficult to the on-machine measurement of non-rotating symmetrical aspherical module, meanwhile, contact method is aspect the mould of measurement unlike material, and gauge head easily scratches die surface or scratched by die surface.These shortcomings are all seriously restricting the further application of contact method aspect mould on-machine measurement.
Formerly two of technology (referring to books " freeform optics design and advanced manufacturing technology ", author: Li Rongbin, Du Xue, Zhang Zhi's brightness, the industry Ji Xi System of The Hong Kong Polytechnic University engineering science Xi Xian Jin optics manufacturing center publishes, 2005) utilize between atom repulsive force principle mutually to develop atomic force measuring technique, and for the surface shape measurement of aspherical lens module.This method also belongs to contact type measurement in itself, and just gauge head contact force is very little, can carry out reciprocating type mobile at die surface and obtain three-dimensional information, but efficiency is still very low in the time measuring larger mould 3 d shape; The similar scan-probe method of its shortcoming, as the error that gauge head causes, needs to find culminating point before measurement, etc.; Moreover its price is very expensive.At present this measuring system measurement that only limits to disembark.
Formerly three of technology (referring to paper " the The3D measurement and analysis aspheric three-dimensional measurement of ofaspheric surfaces and analysis "; author: McBride; J.W.; NPL Engineering Measurement Awareness Network Meeting:HighAccuracy Freeform Measurement of Optical and OrthopaedicSurfaces; Loughborough; UK, pp.39,2009; Paper: " Testing AsphericSurfaces:Simple Method With a Circular Stop aspheric surface test: simple circular diaphragm method "; author: Andrianto Handojo and Hans J.Frankena; periodical: Applied Optics; 37 (25); 5969-5973,1998; Paper " zero hartman test in the large-scale manufacturing of Null Hartmanntest for the fabrication process of large aspheric surfaces ", author: Ho-Soon Yang, Yun-Woo Lee, Jae-Bong Song, and In-Won Lee, periodical: Opt.Express, 13 (6), 1839-1847,2005) mainly adopt non-interference technique to the measurement of disembarking of large-scale aspheric mirror, measuring accuracy is not high, is not suitable for the on-machine measurement of aspheric optical lens mould.
Formerly four of technology (referring to paper: " Computer Generated Hologram:NullLens Test of Aspheric Wavefronts calculation holographic: the null lens test on aspheric surface corrugated ", author: J C Wyant and P K O ' Neill, periodical: Appl.Opt, 13 (12), 2762-2765,1974, and paper " Dynamic null lens for aspheric testingusing a membrane mirror adopts thin membrance mirror to make dynamic zero lens and realizes aspheric surface detection ", author: C.Pruss, H.J.Tiziani, periodical: Optics Communications, 233 (1-3), 15 – 19,2004 years, and paper " utilizes curved surface computed hologram to carry out aspheric surface detection ", author: Lu Zhenwu, Liu Hua, Li Fengyou, periodical: optical precision engineering, 12 (6), 555-559, 2004) adopt zero-compensation lens and calculation holographic interferometric method to realize aspheric measurement, although compensating interferometer method measuring accuracy is very high, can meet the face shape testing requirement of Mould Machining, but compensating interferometer method all needs to make corresponding null lens according to measured aspheric surface feature, film eyeglass or computed hologram, this greatly reduces the dirigibility of measurement, and minimum bore or high-precision computed hologram are made very difficult, cost is very high.In the time of the dissimilar aspheric lens die of processing, the measurement scheme of compensating interferometer method needs to change, redesigns and makes, and efficiency is too low like this, cannot be used for on-machine measurement.
Formerly five of technology (referring to paper: " the automatic interference system of Automated Interferometric System forAspheric Surface Testing aspheric surface test ", author: T.Kanou, Proc.SPIE, 680, p.71,1986; And paper " Lateral-shearinginterferometer using square prisms for optical testing of asphericlenses adopts cubic prism shearing interferometer to carry out non-spherical lens measurement "; author: Seung-Woo Kim; Woo-Jong Cho and Byoung-Chang Kim; periodical: Meas.Sci.Technol.; 9; 1129-1136,1998; And paper: " System optimizationof radial shearing interferometer for aspheric testing radial-shear interferometer carries out the system optimization of aspheric surface test "; author: Dong Liu; Yongying Yang andYibing Shen; Junmiao Weng; Yongmo Zhuo, Proc.SPIE, 6834; 68340U, 2008; And paper " Aspheric surface testing by aphase-shifting shearing interferometer phase shift shearing interferometer carries out aspheric surface test ", author: Gao Hong, Xin Qiming, Huang Kaixiang andParks Robert E., periodical: Advanced Optical Manufacturing and TestingIV of SPIE, 145-149,1994) introduce shear interference technology and be used for realizing aspheric measurement.Shear interference technology does not need canonical reference face, can be by regulating shearing displacement to meet to a certain extent dissimilar aspheric surface shape measurement, and dirigibility is very strong, has become the study hotspot in non-spherical measuring field.But current study limitation is in utilizing shearing interferometer to carry out the aspheric measurement of disembarking, also there are the following problems to use it for the on-machine measurement of aspherical module: 1, measuring accuracy is on the low side, while using it for on-machine measurement, also need to consider more error component, the vibration that causes as the vibration of lathe itself, air pressure shakiness and lathe oil circuit, foundation vibration etc., its measuring accuracy cannot meet the requirement of Mould Machining; 2, current shear interference commercial measurement efficiency is low, cannot realize different bores, the not aspherical module detection of coplanar shape, different aspherical degrees at machine; 3, current shear interference is taking lateral shear as main, but the interferogram that lateral shear obtains can not reflect whole face shapes of tested mould, recovering whole face shapes also needs successively to gather two groups of mutually orthogonal interferograms, and this can affect the efficiency of on-machine measurement greatly.
[summary of the invention]
For overcoming the shortcoming of above-mentioned prior art, the present invention proposes a kind of new equipment for aspherics die face shape on-machine measurement.
The technical scheme of technical solution problem of the present invention is: provide a kind of for aspherics mould the new equipment at machine testing, it comprises a laser instrument, it is characterized in that: along the lasing horizontal working direction of laser instrument, optical beam-expanding system, spectroscope, focusing convertible lens, tested aspherical module are sequentially set; Described laser forms the first vertical optical path again after spectroscope reflection, place the first optical flat at this vertical optical path, laser forms two horizontal optical path after by the first optical flat, along laser working direction, the first wedge, the second wedge is sequentially set below in light path a; In light path b, successively place the 3rd wedge, the 4th wedge along laser working direction in the above; After wedge and wedge, place a high bandwidth acoustooptic deflector, light path a and light path b are all by acoustooptic deflector, and acoustooptic deflector is connected with radio-frequency power amplifier, and radio-frequency power amplifier is connected with Direct Digital Frequency Synthesizers DDS, and DDS is connected with computing machine, and by computer control; Respectively in light path a and b, after being positioned at acoustooptic deflector, according to beam projecting angle placement space wave filter and catoptron, after catoptron, in a light path, place beam-expanding system, in b light path, place contracting beam system, after beam-expanding system and contracting beam system, place again the second optical flat; Light path a and b form the second vertical optical path after by the second optical flat, place CCD at this vertical optical path along laser working direction, and CCD is connected with computing machine.
Preferably, this beam-expanding system and contracting beam system are made up of identical lens, ensure that the light path a causing is thus identical with the optical path difference of light path b, and its beam size is fine-tuning.
Preferably, this first optical flat and the second optical flat are equal-sized rectangular parallelepiped, front-back polishing, and material is K9 glass, and the 6-8 that two dull and stereotyped centre distances are slab-thickness is doubly.
Preferably, this first wedge, the second wedge, the 3rd wedge and the 4th wedge are the identical circular wedge of size and material, the first wedge wedge, the second wedge are coaxially placed in a light path, staggered relatively and leave minimum gap without angle of wedge face, adopt electric device make they in the same way synchronously/oppositely sway; With the same manner, the 3rd wedge, the 4th wedge are placed in b light path, when operation, sway; The first wedge and the second wedge form a wedge pair, and same, the 3rd wedge and the 4th wedge also form a wedge pair, and effect is the Bragg diffraction angle position of minute adjustment light beam to acoustooptic deflector.
Preferably, this acoustooptic deflector can be modulated multi-wavelength's laser, and its bandwidth is at least 40MHz, and diffraction efficiency is greater than 60%;
Preferably, the frequency-tuning range of this Direct Digital Frequency Synthesizers is greater than 40MHz.
The present invention regulates DDS frequency control word to make the frequency conversion of interference fringe high speed for the new equipment of aspherics die face shape on-machine measurement by computer program, and adopts multifrequency time series phase unwrapping package method to carry out bar graph processing; The speed of its striped frequency conversion reaches tens nanoseconds/frame, therefore can realize the face shape of aspherics mould at machine testing.The present invention combines radial shear interference with striped converter technique, can be at the aspherics mould of machine Quick Measurement multiple caliber, and applicable equally to plane and sphere, anti-machine vibration ability is stronger, can realize the on-machine measurement in process, and its seasonal effect in time series striped frequency conversion function is very effective to measuring the die surface that contains manufacturing deficiency.Therefore the present invention for the new equipment of aspherics die face shape on-machine measurement can be arranged on lathe, carry out aspherical module processing at machine testing, utilize high speed frequency conversion strip extraction phase place and then realize die face shape three-dimensional measurement in time series, it measures very effective to the aspherical module with discontinuity zones such as manufacturing deficiencies.This device adopts aplanatism structure, and anti-vibration, noise ability are strong, are applicable to the measurement of various the shapes (comprising aspheric surface, sphere and plane etc.) of different bores.
[brief description of the drawings]
Fig. 1 is the structural representation of the present invention for the new equipment of aspherics die face shape on-machine measurement.
[embodiment]
Refer to Fig. 1, the present invention comprises laser instrument 1 for the new equipment 100 of aspherics die face shape on-machine measurement, optical beam-expanding system 2, spectroscope 3 is sequentially set, focuses on convertible lens 4, tested aspherical module 5 along the lasing horizontal working direction of laser instrument 1; Described laser forms the first vertical optical path again after spectroscope 3 reflections, place the first optical flat 6 at this vertical optical path, laser, by two horizontal optical path of the rear formation of the first optical flat 6, sequentially arranges the first wedge 7, the second wedge 8 along laser working direction in light path a below; In light path b, successively place the 3rd wedge 9, the 4th wedge 10 along laser working direction in the above; At wedge 8 and the rear placement one high bandwidth acoustooptic deflector 11 of wedge 10, light path a and light path b are all by acoustooptic deflector 11, acoustooptic deflector 11 is connected with radio-frequency power amplifier 12, radio-frequency power amplifier 12 is connected with Direct Digital Frequency Synthesizers DDS13, and DDS13 is connected with computing machine 20, and controlled by computing machine 20; Respectively in light path a and b, after being positioned at acoustooptic deflector 11, according to beam projecting angle placement space wave filter 14 and catoptron 15, after catoptron 15, in a light path, place beam-expanding system 16, in b light path, place contracting beam system 17, after 16 and 17, place again the second optical flat 18; Light path a and b, by rear formation the second vertical optical path of the second optical flat 18, place CCD19 at this vertical optical path along laser working direction, and CCD19 is connected with computing machine 20.
This laser instrument 1 is mainly semiconductor laser, can adopt several different wavelength, taking 514nm wavelength as main.
This convertible lens 4 is condenser lens, and it can be lens combination, and its placement location is that focus overlaps with the focus of tested aspheric surface summit curved surface.This convertible lens 4 can be changed for the tested aspherical module of different bores.
This beam-expanding system 16 and contracting beam system 17 are made up of identical lens, ensure that the light path a causing is thus identical with the optical path difference of light path b, and its beam size is fine-tuning.
This first optical flat 6 and the second optical flat 18 are equal-sized rectangular parallelepiped, front-back polishing, and material is K9 glass, and two dull and stereotyped centre distances can specifically be adjusted, and are generally the 6-8 of slab-thickness doubly.Centre distance Δ S between light path a and b that two optical flats form and the thickness d of the first optical flat 6
0relevant with the first optical flat 6 front surface normal angle θ with incident ray,
45 ° of the general values of angle theta, n is dull and stereotyped refractive index.
This first wedge 7, the second wedge 8, the 3rd wedge 9 and the 4th wedge 10 are the identical circular wedge of size and material, the first wedge wedge 7, the second wedge 8 are coaxially placed in a light path, staggered relatively and leave minimum gap without angle of wedge face, adopt electric device make they synchronously lead to/oppositely around axle o
1-o
2rotate; With the same manner, the 3rd wedge 9, the 4th wedge 10 are placed in b light path, when operation around axle o
3-o
4rotate; The first wedge 7 and the second wedge 8 form a wedge pair, and same, the 3rd wedge 9 and the 4th wedge 10 also form a wedge pair, and effect is the Bragg diffraction angle position of minute adjustment light beam to acoustooptic deflector 11.When relatively rotating angle around optical axis, two wedges are respectively θ
1and θ
2time, light angle of deviation δ is
Wherein α is the wedge angle of wedge, is generally less than 1 °.
This acoustooptic deflector 11 can be modulated multi-wavelength's laser, and its bandwidth is at least 40MHz, to make the convertible multi-frequency of interference fringe, its diffraction efficiency is greater than 60%, has so enough light intensity to form interference fringe.According to acoustooptic effect principle, when incident ray is with Bragg angle θ
bwhile inciding acoustooptic deflector 11, diffraction light concentration of energy is in 0 grade and one-level (± 1 grade) diffraction light, and 0 grade of filtering and one of them one-level light, can obtain single light beam, its beam deflection angle
equal Bragg angle θ
b, for
Wherein n is the refractive index of acousto-optic medium, v
sthe velocity of sound, f
sit is frequency of sound wave.
The frequency-tuning range of this Direct Digital Frequency Synthesizers DDS13 is greater than 40MHz, and with the frequency bandwidth of compatible acoustooptic deflector, the frequency F that DDS13 exports sinusoidal simulating signal is
N is frequency control word, and f is clock frequency, the figure place that t is phase accumulator.The tuning period of DDS13 is generally nanosecond order.Frequency of sound wave f in acoustooptic deflector 11
sequal the output frequency F of DDS13, therefore light is by the deflection angle of the rear first-order diffraction light of acoustooptic deflector 11
for
Therefore, change frequency control word N by computing machine and just can change emergent ray angle, change thus the frequency of interference fringe.And striped frequency f
0with emergence angle
between relation can be expressed as
Wherein λ is optical wavelength, emergence angle
it is very little,
Amplified through beam-expanding system 2 by laser instrument 1 emitting laser, arrive tested aspherical module 5 by spectroscope 3 and convertible lens 4, and returned by these mould 5 surface reflections, light beam now carries face shape information, it incides on spectroscope 3 by convertible lens 4 again, and by 3 reflections, is divided into two bundle a and b through the first optical flat 6, light beam a is by front surface reflection and by the first wedge 7, the second wedge 8, and changing incident angle is Bragg angle θ
b, by acoustooptic deflector 11; Another light beam b is by optical flat 6 rear surface reflections by the 3rd wedge 9, the 4th wedge 10, and changing equally incident angle is Bragg angle θ
b, by acoustooptic deflector 11.By the two-beam line after acoustooptic deflector 11 all with
angle outgoing, by all the other diffracted raies of spatial filter 14 filterings (another first-order diffraction light and zero order diffracted light), through catoptron 15, change radially bore by beam-expanding system 16 and contracting beam system 17 respectively again, form radial shear interference, upper by stripe pattern being recorded in after the second optical flat 18 to CCD19, finally carry out face shape by computer software and recover and evaluate.
Acoustooptic deflector 11 is connected with radio-frequency power amplifier 12, DDS13, due to from DDS13 signal out a little less than, therefore adopt power amplifier 12 to strengthen frequency signal.The frequency control word N that changes DDS13 by computing machine changes the emergence angle of light a and b
thereby change striped frequency, because the time of DDS13 frequency change only needed for tens nanoseconds, therefore the frequency transformation of interference fringe just can complete within the extremely short time, and the interference fringe that can gather many group different frequencies is recovered final continuous phase by time phase unwrapping package method.Suppose that the frequency change of striped is by 2
n(N=0,1,2 ...) carrying out, first solve the wrapped phase figure φ after every cover stripe measurement by the additive method such as phase shifting method or Fourier transform
w(m, n, t), ask again the discontinuous number of poor and 2 π of the Phase Unwrapping Algorithm of identical point in the bar graph of two adjacent different frequencies, meet under the prerequisite of celestial agriculture sampling theorem on time shaft in hypothesis, final continuous phase obtains after can be poor by the Phase Unwrapping Algorithm of cumulative different frequency bar graph, and the every some phase value obtaining is thus independent of each other, therefore this measurement result is not subject to the impact of tested die surface defect, has stronger noise immunity.
Described ccd detector has higher image acquisition speed, and acquisition frame rate is no less than 60fps.
In this device, the real-time of measurement is to realize by the frequency conversion of striped high speed, and frequency conversion function is to realize by DDS frequency control word.Equipments overall structure is aplanatism structure, insensitive on the impact of vibration, can keep higher measurement efficiency.This experimental provision not only can be measured the aspheric surface of multiple caliber, applicable equally to plane and sphere, can realize detecting machine side shape of aspherics Mould Machining.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments of doing within principle of the present invention, are equal to and replace and within improvement etc. all should comprise protection scope of the present invention.
Claims (6)
1. the new equipment at machine testing for aspherics mould, it comprises a laser instrument, it is characterized in that: along the lasing horizontal working direction of laser instrument, optical beam-expanding system, spectroscope, focusing convertible lens, tested aspherical module are sequentially set; Described laser forms the first vertical optical path again after spectroscope reflection, place the first optical flat at this vertical optical path, laser forms two horizontal optical path after by the first optical flat, along laser working direction, the first wedge, the second wedge is sequentially set below in light path a; In light path b, successively place the 3rd wedge, the 4th wedge along laser working direction in the above; After wedge and wedge, place a high bandwidth acoustooptic deflector, light path a and light path b are all by acoustooptic deflector, and acoustooptic deflector is connected with radio-frequency power amplifier, and radio-frequency power amplifier is connected with Direct Digital Frequency Synthesizers DDS, and DDS is connected with computing machine, and by computer control; Respectively in light path a and b, after being positioned at acoustooptic deflector, according to beam projecting angle placement space wave filter and catoptron, after catoptron, in a light path, place beam-expanding system, in b light path, place contracting beam system, after beam-expanding system and contracting beam system, place again the second optical flat; Light path a and b form the second vertical optical path after by the second optical flat, place CCD at this vertical optical path along laser working direction, and CCD is connected with computing machine.
According to claim 1 for aspherics mould the new equipment at machine testing, it is characterized in that: this beam-expanding system and contracting beam system are made up of identical lens, ensure that the light path a causing is thus identical with the optical path difference of light path b, its beam size is fine-tuning.
According to claim 1 for aspherics mould the new equipment at machine testing, it is characterized in that: this first optical flat and the second optical flat are equal-sized rectangular parallelepiped, front-back polishing, material is K9 glass, and the 6-8 that two dull and stereotyped centre distances are slab-thickness is doubly.
According to claim 1 for aspherics mould the new equipment at machine testing, it is characterized in that: this first wedge, the second wedge, the 3rd wedge and the 4th wedge are the identical circular wedge of size and material, the first wedge wedge, the second wedge are coaxially placed in a light path, staggered relatively and leave minimum gap without angle of wedge face, adopt electric device make they in the same way synchronously/oppositely sway; With the same manner, the 3rd wedge, the 4th wedge are placed in b light path, when operation, sway; The first wedge and the second wedge form a wedge pair, and same, the 3rd wedge and the 4th wedge also form a wedge pair, and effect is the Bragg diffraction angle position of minute adjustment light beam to acoustooptic deflector.
According to claim 1 for aspherics mould the new equipment at machine testing, it is characterized in that: this acoustooptic deflector can be modulated multi-wavelength's laser, its bandwidth is at least 40MHz, diffraction efficiency is greater than 60%;
6. according to claim 1ly put at the new equipment of machine testing for aspherics mould, it is characterized in that: the frequency-tuning range of this Direct Digital Frequency Synthesizers is greater than 40MHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410009017.3A CN103968776B (en) | 2013-01-08 | 2014-01-08 | A kind of new equipment for aspherics mould On-machine Test |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310007194.3 | 2013-01-08 | ||
| CN201310007194 | 2013-01-08 | ||
| CN2013100071943 | 2013-01-08 | ||
| CN201410009017.3A CN103968776B (en) | 2013-01-08 | 2014-01-08 | A kind of new equipment for aspherics mould On-machine Test |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103968776A true CN103968776A (en) | 2014-08-06 |
| CN103968776B CN103968776B (en) | 2017-07-07 |
Family
ID=51238578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410009017.3A Expired - Fee Related CN103968776B (en) | 2013-01-08 | 2014-01-08 | A kind of new equipment for aspherics mould On-machine Test |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103968776B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106152972A (en) * | 2016-08-11 | 2016-11-23 | 广西师范大学 | A kind of phase-shift type optical projection three-dimension measuring system and method |
| CN106595473A (en) * | 2016-09-29 | 2017-04-26 | 浙江科技学院（浙江中德科技促进中心） | In-site measurement system of aspheric die and measurement method and measurement examination method of system |
| CN112268520A (en) * | 2020-09-30 | 2021-01-26 | 西安理工大学 | Non-contact flexible measurement method for gear tooth surface shape error |
| CN113933029A (en) * | 2021-10-15 | 2022-01-14 | 中国工程物理研究院激光聚变研究中心 | Off-axis aspheric element processing detection system and manufacturing method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020176090A1 (en) * | 2001-04-09 | 2002-11-28 | Yumiko Ohsaki | Interferometer and interferance measurement method |
| CN2526783Y (en) * | 2002-02-01 | 2002-12-18 | 西安工业学院 | Optical measurer for non-spherical surface shape |
| CN1529120A (en) * | 2003-10-08 | 2004-09-15 | ����ʦ����ѧ | Small-sized on-line radical shear interferometer and its aspheric surface measuring method |
| CN1888818A (en) * | 2006-05-22 | 2007-01-03 | 北京航空航天大学 | Sinusoidal fringe structural optical projector based on acousto-optic deflection device |
| CN101270975A (en) * | 2008-05-16 | 2008-09-24 | 湖南大学 | Combined interference device for aspheric surface measurement |
| CN102636131A (en) * | 2012-05-09 | 2012-08-15 | 丹阳市民杰光学仪器有限公司 | In-situ measurement device for processing miniature aspheric surface |
| CN203993372U (en) * | 2013-01-08 | 2014-12-10 | 浙江科技学院 | A kind of aspherical module on-machine measurement device based on acousto-optic modulation |
-
2014
- 2014-01-08 CN CN201410009017.3A patent/CN103968776B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020176090A1 (en) * | 2001-04-09 | 2002-11-28 | Yumiko Ohsaki | Interferometer and interferance measurement method |
| CN2526783Y (en) * | 2002-02-01 | 2002-12-18 | 西安工业学院 | Optical measurer for non-spherical surface shape |
| CN1529120A (en) * | 2003-10-08 | 2004-09-15 | ����ʦ����ѧ | Small-sized on-line radical shear interferometer and its aspheric surface measuring method |
| CN1888818A (en) * | 2006-05-22 | 2007-01-03 | 北京航空航天大学 | Sinusoidal fringe structural optical projector based on acousto-optic deflection device |
| CN101270975A (en) * | 2008-05-16 | 2008-09-24 | 湖南大学 | Combined interference device for aspheric surface measurement |
| CN102636131A (en) * | 2012-05-09 | 2012-08-15 | 丹阳市民杰光学仪器有限公司 | In-situ measurement device for processing miniature aspheric surface |
| CN203993372U (en) * | 2013-01-08 | 2014-12-10 | 浙江科技学院 | A kind of aspherical module on-machine measurement device based on acousto-optic modulation |
Non-Patent Citations (2)
| Title |
|---|
| 朱勇建等: "两种非球面面形的光学测量方法研究", 《中国机械工程》 * |
| 朱勇建等: "非球面面形测量技术", 《激光与光电子学进展》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106152972A (en) * | 2016-08-11 | 2016-11-23 | 广西师范大学 | A kind of phase-shift type optical projection three-dimension measuring system and method |
| CN106595473A (en) * | 2016-09-29 | 2017-04-26 | 浙江科技学院（浙江中德科技促进中心） | In-site measurement system of aspheric die and measurement method and measurement examination method of system |
| CN112268520A (en) * | 2020-09-30 | 2021-01-26 | 西安理工大学 | Non-contact flexible measurement method for gear tooth surface shape error |
| CN113933029A (en) * | 2021-10-15 | 2022-01-14 | 中国工程物理研究院激光聚变研究中心 | Off-axis aspheric element processing detection system and manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103968776B (en) | 2017-07-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102589416B (en) | Wavelength scanning interferometer and method for aspheric measurement | |
| CN101270975B (en) | Combined interference device for aspheric surface measurement | |
| CN102589440B (en) | Continuous variable-angle digital holographic metrology method | |
| CN102289152B (en) | Optical system wave aberration detection device | |
| CN101324421A (en) | Synchronous phase-shifting Fizeau interferometer | |
| CN104655290A (en) | Fizeau dual-wavelength laser tuning phase-shifting interference testing device and testing method thereof | |
| CN104713494B (en) | The dual wavelength tuning interference testing device and method of Fourier transformation phase shift calibration | |
| CN102778210A (en) | Aspheric surface absolute detection method based on computer generated hologram | |
| CN103630086A (en) | Dual-wavelength simultaneous phase-shift interferometry method based on monochromatic CCD (couple charged device) | |
| CN102261985A (en) | Optical system wave aberration calibration apparatus and calibration method of using apparatus to test error | |
| CN103968776A (en) | Novel on-machine detection device for aspheric optical molds | |
| CN103968779A (en) | Super-resolution three-dimensional measurement microscope | |
| CN102297725B (en) | Device and method for detecting reference spherical wave deviation in visible point diffraction interferometer | |
| CN203993372U (en) | A kind of aspherical module on-machine measurement device based on acousto-optic modulation | |
| CN102914256A (en) | Synchronous phase shifting interference detection device based on orthogonal double grating and detection method | |
| CN103615993A (en) | Microstructure testing system and method based on off-axis microscopic interferometry | |
| CN109059787A (en) | A kind of sheet thickness distribution measurement method and system based on lateral shearing interference | |
| CN103557948A (en) | Optical system wavefront measurement device and method based on circular carrier frequency phase demodulation method | |
| CN201251428Y (en) | Synchronous phase-shifting fizeau interferometer | |
| CN103196387B (en) | Cylindrical surface type detection system and method | |
| CN102353342A (en) | Free-curved-surface-type detecting system | |
| CN104819780A (en) | Non-common-optical-path loop radial shear polarization phase shift interferometer | |
| CN103196390B (en) | Method for eliminating circle symmetric phase type calculation holographic substrate fringe pattern distortion | |
| CN108254086B (en) | Random optical fiber point diffraction measurement method | |
| CN103234478A (en) | Method for measuring surface shapes of objects by adopting multi-wavelength shearing interferometry |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Zhu Yongjian Inventor after: Cao Sheng Inventor after: Fan Yufeng Inventor after: Pan Weiqing Inventor before: Zhu Yongjian Inventor before: Pan Weiqing |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170707 |