CN103777618A - Method for controlling instruction execution of semiconductor technology - Google Patents
Method for controlling instruction execution of semiconductor technology Download PDFInfo
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- CN103777618A CN103777618A CN201410058368.3A CN201410058368A CN103777618A CN 103777618 A CN103777618 A CN 103777618A CN 201410058368 A CN201410058368 A CN 201410058368A CN 103777618 A CN103777618 A CN 103777618A
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Abstract
The invention discloses a method for controlling instruction execution of a semiconductor technology. The method includes the steps of establishing instruction objects corresponding to instructions and state objects corresponding to the instructions, wherein instruction information of the instructions corresponding to the instruction objects is stored in the instruction objects, and state information of the instructions corresponding to the state objects is stored in the state objects and comprises instruction completion conditions and instruction execution states; receiving the instructions sent by an upper computer, controlling a semiconductor device to execute the instructions according to the instruction information stored in the instruction objects corresponding to the instructions, updating the instruction execution states in the state objects when the instruction completion conditions stored in the state objects corresponding to the instructions are met, and when the instruction execution states are updated, outputting the updated instruction execution states to the upper computer. According to the method, multithreading execution of the instructions and feedback of the execution states can be achieved.
Description
Technical field
The present invention relates to semiconductor manufacturing equipment control technology field, the control method that particularly a kind of instruction is carried out.
Background technology
At present, the communication in semiconductor technology between host computer and slave computer sends instruction by host computer to slave computer, and slave computer is realized to host computer return state.The method that common driving instruction is carried out adopts sequential organization design, can only carry out an instruction at every turn or return to a state, after completing an instruction, then reads the command information of next instruction.In addition, all command information and status informations are all preserved in driver module, have caused the driver response time long, and efficiency is lower, and the configuration of command information and status information simultaneously can only be revised in driver, very loaded down with trivial details, is unfavorable for expansion.
Summary of the invention
Fundamental purpose of the present invention aims to provide a kind of control method that can realize in the instruction execution of asynchronous driving.
For reaching above-mentioned purpose, the invention provides the control method that a kind of instruction is carried out, for controlling in semiconductor processes that semiconductor equipment is carried out the host computer instruction of sending and to described host computer feedback command executing state, the control method that described instruction is carried out comprises: each instruction is created to corresponding instruction object, store the command information of its corresponding instruction in described instruction object; Each instruction is created to corresponding status object, store the status information of its corresponding instruction in described status object, described status information comprises that instruction completes condition and instruction executing state; Receive the instruction that described host computer sends; Carry out this instruction according to semiconductor equipment described in the command information control of storing in instruction object corresponding to this instruction, and complete the whether satisfied instruction executing state of upgrading in this status object of condition according to the instruction of storing in status object corresponding to this instruction; In the time that the instruction executing state of status object corresponding to described instruction is upgraded, export the described instruction executing state of upgrading to described host computer.
Preferably, described command information comprises instruction title, instruction executive condition, instruction execution step, instruction executive address; Described status information also comprises Status Name, and state is the title of new tunnel more, state-detection address.
Preferably, when the control method that described instruction is carried out is also included in the instruction of storing in status object corresponding to this instruction and completes condition and meet, upgrade instruction executing state in this status object and by described state more new tunnel export described host computer to; When the instruction of storing in status object corresponding to this instruction completes condition and do not meet in the given time, the instruction executing state of upgrading in this status object is that instruction is carried out unsuccessfully, and this instruction is carried out to failed information exports described host computer to.
Preferably, the control method that described instruction is carried out also comprises the variate-value that reads described state-detection address, judges that described instruction completes condition and meets in the time that the variate-value of described state-detection address meets the variation of setting; In the time that not meeting the variation of described setting within the described schedule time, the variate-value of described state-detection address judges that described instruction completes condition and do not meet within the described schedule time.
Preferably, the control method that described instruction is carried out is also included in configuration file and configures the command information of whole instructions and the status information of whole described instructions, and described in each, the corresponding instruction object of instruction and status object create according to described configuration file.
Preferably, when receive described host computer send multiple instruction time, carry out those instructions according to semiconductor equipment described in the command information control of storing in instruction object corresponding to those instructions, and the instruction of storing according to status object corresponding to those instructions completes the whether satisfied instruction executing state of upgrading in those status objects of condition simultaneously.
The control device that the present invention also provides a kind of instruction to carry out, for controlling in semiconductor processes that semiconductor equipment is carried out instruction that host computer sends and to described host computer feedback command executing state.The control device that described instruction is carried out comprises: Object Creation module, receiver module, control module and output module.Wherein Object Creation module is used for each instruction to create corresponding instruction object, and instruction described in each is created to corresponding status object; In wherein said instruction object, store the command information of its corresponding instruction, store the status information of its corresponding instruction in described status object, described status information comprises that instruction completes condition and instruction executing state; Receiver module is for receiving the instruction that described host computer sends; Control module is connected with described receiver module, Object Creation module, carry out this instruction according to semiconductor equipment described in the command information control of storing in the corresponding instruction object of the instruction of this reception, and complete the whether satisfied instruction executing state of upgrading in this status object of condition according to the instruction of storing in status object corresponding to this instruction; In the time that the instruction executing state in described status object is upgraded, described control module triggers described output module and exports the described instruction executing state of upgrading to described host computer.
Preferably, described command information comprises instruction title, instruction executive condition, instruction execution step, instruction executive address; In described output module, there is more new tunnel of state, by described state more new tunnel by upgrade described instruction executing state export described host computer to, described status information also comprises Status Name, described state is the title of new tunnel more, state-detection address.
Preferably, when the instruction that described control module is stored in status object corresponding to this instruction completes condition and meets, upgrade instruction executing state in this status object and by described state more new tunnel export described host computer to; It is that instruction is carried out unsuccessfully that the instruction of storing in status object corresponding to this instruction completes the instruction executing state of upgrading in this status object when condition does not meet in the given time, and this instruction is carried out to failed information exports described host computer to.
Preferably, the control module that described instruction is carried out also comprises detection module, for reading the variate-value of described state-detection address; In the time that the variate-value of described state-detection address meets the variation of setting, described control module judges that described instruction completes condition and meets; Described in the time that the variate-value of described state-detection address does not change within the described schedule time, control module judges that it is to meet that described instruction completes condition within the described schedule time.
Preferably, the control device that described instruction is carried out also comprises configuration file, wherein configure the command information of whole described instructions and the status information of whole described instructions, described Object Creation module creates the corresponding instruction object of instruction and status object described in each according to described configuration file.
Preferably, in the time that described receiver module receives multiple instruction that described host computer sends, described control module is carried out those instructions according to semiconductor equipment described in the command information control of storing in instruction object corresponding to those instructions simultaneously, and the condition that completes of the instruction of storing at status object corresponding to those instructions is upgraded the instruction executing state in those status objects while meeting.
Control method and device that instruction proposed by the invention is carried out, by creating independent instruction object and status object for each instruction, execution and the state renewal that can realize different instruction are independent of each other, thereby can realize the asynchronous driving that instruction is carried out.On the other hand, for the status object of each instruction, in the time that completing condition and meet, the instruction of its storage carries out again the renewal of instruction executing state, real-time and simultaneity that executing state is upgraded were so both guaranteed, also avoid same executing state repeatedly to upgrade, affected the work efficiency of control device.
Accompanying drawing explanation
Fig. 1 is the calcspar of the control device of instruction execution of the present invention;
Fig. 2 is the process flow diagram of the control method of instruction execution of the present invention;
Fig. 3 is the schematic diagram of one embodiment of the invention instruction execution controller configuration file;
Fig. 4 is the process flow diagram that in one embodiment of the invention instruction execution control method, instruction is carried out;
Fig. 5 is the process flow diagram that the executing state of instruction in one embodiment of the invention instruction execution control method is upgraded.
Embodiment
For making content of the present invention more clear understandable, below in conjunction with Figure of description, content of the present invention is described further.Certainly the present invention is not limited to this specific embodiment, and the known general replacement of those skilled in the art is also encompassed in protection scope of the present invention.
Fig. 1 is the calcspar of the control device of the instruction execution of semiconductor technology of the present invention; Fig. 2 is the process flow diagram of the control method of the instruction execution of semiconductor technology of the present invention, below with reference to Fig. 1 and Fig. 2, instruction execution controller of the present invention and control method is described.
Instruction execution controller of the present invention is for receiving from the instruction of host computer in semiconductor processes, controls that semiconductor equipment is carried out instruction and to host computer feedback command executing state.This control device is arranged in slave computer, and application DeviceNet technology is connected with host computer and semiconductor equipment, and this control device also can be called DeviceNet driver module.The type of drive of DeviceNet driver module of the prior art for single-threaded realization, it can only be carried out an instruction at every turn or return to a state after starting, and so carrys out order and carries out.And control device of the present invention can be realized the asynchronous driving of multithreading.Please refer to Fig. 1 and Fig. 2, control device comprises Object Creation module 10, receiver module 20, control module 30 and output module 40.In the time will carrying out instruction execution control, first Object Creation module 10 is carried out step S1, and each instruction is created to corresponding instruction object, and each instruction is created to corresponding status object.In instruction object, storing the command information of its corresponding instruction, storing the status information of its corresponding instruction in status object, the status information here comprises that instruction completes condition and instruction executing state.Then, receiver module 20 carries out step S2, receives the instruction of being sent by host computer.Control module 30 is connected with Object Creation module 10 with receiver module 20, and the command information of storing in the corresponding instruction object of its instruction receiving according to receiver module 20 is controlled semiconductor equipment and carried out this instruction; In addition the instruction that, control module 30 is also stored in status object corresponding to this instruction completes upgrades the instruction executing state (step S3) in this status object when condition meets.In the time that the instruction executing state in this status object is upgraded, control module 30 triggers output module 40 and exports the instruction executing state of renewal to host computer (step S4).In the present invention, in the time that instruction executing state is upgraded, fed back to host computer, so both guaranteed real-time and simultaneity that instruction executing state is upgraded, also improved the work efficiency of control device.On the other hand, do not meet all the time in the given time if the instruction of storing in the corresponding status object of the instruction that receiver module 20 receives completes condition, control module 30 can be carried out this instruction failed information exchange and crosses output module 40 and export host computer to so.
The command information that each instruction object is stored comprises instruction title, instruction executive condition, instruction execution step, the relevant informations such as instruction executive address, and the status information that each status object is stored is except instruction completes condition and instruction executing state, also comprise Status Name, state is title and the state-detection address etc. of new tunnel more, wherein state-detection address is connected with each sensor, for obtaining the state of sensor.State more new tunnel is the passage that in transport module, the instruction executing state of renewal is exported to host computer.Preferably, instruction completes condition can comprise multiple conditions, between these conditions, has logical relation, as logical and relation or logical OR relation.In each condition, require the state variation of a corresponding sensor to meet setting, that is to say that the variate-value of corresponding state-detection address meets the variation of setting.Therefore, control device also comprises a detection module 50, detects the variate-value of address, to obtain sensor states for reading state.If detection module 50 reads the variate-value of state-detection address corresponding to a certain condition while meeting the variation that this condition sets, as being changed to " 1 " from " 0 ", this condition meets so.Complete condition for the instruction with multiple conditions, if multiple condition is logical and while being related to, must each condition all meet, it is just satisfied that instruction completes condition; And if multiple condition is logical OR while being related to, any condition meets, instruction completes condition and is satisfied.When control module 30 decision instructions complete condition and meet, update instruction executing state.Therefore,, in the time detecting that satisfactory variation occurs the variate-value of corresponding address, the executing state of this instruction just can be upgraded, and can avoid thus same state repeatedly to upgrade.On the other hand, if the variate-value of state-detection address corresponding to a certain condition does not meet the variation that this condition is set in the given time all the time, this condition does not meet so, cause instruction complete condition also meet, now control module 30 by the state by output module more new tunnel output order carry out failed information to host computer.
In addition, control device also comprises configuration file, has configured the command information of whole instructions and the status information of whole instructions in this configuration file, and Object Creation module 10 creates the corresponding instruction object of each instruction and status object according to this configuration file.Figure 3 shows that one embodiment of the invention configuration file is the form record command information of an instruction Clamp and the schematic diagram of status information with XML form.Whole instructions that in the present embodiment, host computer sends are all with this form storage.The wherein information of CmdInfo presentation directives, what IOObject was corresponding is the module under instruction, ChannelName is the tunnel name that sends instruction, CmdName is instruction title, UpdateChannelName is the more title of new tunnel of command status, CmdStep is instruction execution step, such as Clamp instruction need to just can complete by four steps, in each step Step, comprise the specific address that step is carried out, and each step has corresponding executive condition Condition, FinishedCondition is that instruction completes condition.Certainly, in other embodiments, configuration file also can be with the form recording instruction information of extended formatting and the status information of instruction, and the present invention is not limited.
Fig. 4 and Fig. 5 are the instruction execution of instruction execution and the process flow diagram of instruction executing state renewal of the present invention's one specific embodiment.
As shown in Figure 4, in the time carrying out instruction execution, control device starts the thread of carrying out this instruction after receiving an instruction (as Clamp instruction) immediately, then obtain its corresponding instruction object by the parameter information (as the title of instruction, ID etc.) of instruction, if this instruction object exists, continue to obtain command informations all in instruction object, comprise instruction execution step, instruction completes condition, and executive address etc., if instruction object is sky, finish this thread.After control module is obtained instruction execution step from command information, carry out each step by controlling semiconductor equipment by the order of execution step, before performing step each time, control module can first judge that whether current state meets the condition of carrying out this step, if met, carries out this step by the executive address of this step; If do not met, wait for until condition is carried out while meeting again, if the time of waiting for has exceeded the time of setting, illustrate that the executive condition of this step does not meet, this step cannot be carried out, and finishes the thread of this instruction.After current step executes, can control module judge whether that all execution steps are all finished, if complete, illustrate that this instruction is complete, if also need in steps to carry out, continue to proceed to the execution of next step.The present embodiment is to describe as an example of an instruction example, and in fact in the time that control device receives multiple instruction, thread that can corresponding these instructions of parallel starting, realizes multithreading and carry out.
The process flow diagram upgrading please continue to refer to the instruction executing state shown in Fig. 5, take Clamp instruction as example equally, in the time that this instruction starts to carry out, control module is obtained corresponding status object according to this instruction, and obtain the condition that completes of this instruction by status object, then detection module starts to detect the variate-value of relevant state-detection address, and in the time that the variate-value of state-detection address all meets the variation of setting, declarative instruction completes condition and meets.Control module is update instruction executing state, and by the more new tunnel instruction executing state that upwards machine feedback in position is upgraded of state of output module.On the other hand, if the variate-value of the state-detection address of detecting in the given time never meets the variation of setting, declarative instruction completes condition and cannot meet, now control module by by state more new tunnel upwards a position machine output order carry out failed information.The present embodiment describes as an example of an instruction Clmap example, in fact, in the time that control device receives multiple instruction, can upgrade the executing state of these instructions concurrently, realizes the executing state of multithreading and upgrades.
In sum, control method and device that instruction is carried out, by creating independent instruction object and status object for each instruction, execution and the state renewal that can realize different instruction are independent of each other, thereby can realize the asynchronous driving that instruction is carried out.On the other hand, for the status object of each instruction, in the time that completing condition and meet, the instruction of its storage carries out again the renewal of instruction executing state, real-time and simultaneity that executing state is upgraded were so both guaranteed, also avoid same executing state repeatedly to upgrade, affected the work efficiency of control device.
Although the present invention discloses as above with preferred embodiment; so described many embodiment only give an example for convenience of explanation; not in order to limit the present invention; those skilled in the art can do some changes and retouching without departing from the spirit and scope of the present invention, and the protection domain that the present invention advocates should be as the criterion with described in claims.
Claims (12)
1. the control method that instruction is carried out, carries out the host computer instruction of sending and to described host computer feedback command executing state, it is characterized in that for control semiconductor equipment in semiconductor processes, and described control method comprises:
Each instruction is created to corresponding instruction object, in described instruction object, store the command information of its corresponding instruction;
Each instruction is created to corresponding status object, store the status information of its corresponding instruction in described status object, described status information comprises that instruction completes condition and instruction executing state;
Receive the instruction that described host computer sends;
Carry out this instruction according to semiconductor equipment described in the command information control of storing in instruction object corresponding to this instruction, and the instruction of storing completes and when condition meets, upgrades the instruction executing state in this status object in status object corresponding to this instruction;
In the time that the instruction executing state of status object corresponding to described instruction is upgraded, export the described instruction executing state of upgrading to described host computer.
2. the control method that instruction according to claim 1 is carried out, is characterized in that, described command information comprises instruction title, instruction executive condition, instruction execution step, instruction executive address; Described status information also comprises Status Name, and state is the title of new tunnel more, state-detection address.
3. the control method that instruction according to claim 2 is carried out, is characterized in that, also comprises:
When the instruction of storing in status object corresponding to this instruction completes condition and do not meet in the given time, this instruction is carried out to failed information and export described host computer to.
4. the control method that instruction according to claim 3 is carried out, is characterized in that, also comprises, reads the variate-value of described state-detection address, judges that described instruction completes condition and meets in the time that the variate-value of described state-detection address meets the variation of setting; In the time that not meeting the variation of described setting within the described schedule time, the variate-value of described state-detection address judges that described instruction completes condition and do not meet within the described schedule time.
5. the control method that instruction according to claim 1 is carried out, it is characterized in that, also comprise, in configuration file, configure the command information of whole instructions and the status information of whole described instructions, described in each, the corresponding instruction object of instruction and status object create according to described configuration file.
6. the control method that instruction according to claim 1 is carried out, it is characterized in that, when receive described host computer send multiple instruction time, carry out those instructions according to semiconductor equipment described in the command information control of storing in instruction object corresponding to those instructions, and the instruction of storing according to status object corresponding to those instructions completes the whether satisfied instruction executing state of upgrading in those status objects of condition simultaneously.
7. the control device that instruction is carried out, carries out the host computer instruction of sending and to described host computer feedback command executing state, it is characterized in that for control semiconductor equipment in semiconductor processes, and described control device comprises:
Object Creation module, for each instruction being created to corresponding instruction object, and creates corresponding status object to instruction described in each; In wherein said instruction object, store the command information of its corresponding instruction, store the status information of its corresponding instruction in described status object, described status information comprises that instruction completes condition and instruction executing state;
Receiver module, the instruction of sending for receiving described host computer;
Control module, be connected with described receiver module, Object Creation module, carry out this instruction according to semiconductor equipment described in the command information control of storing in the corresponding instruction object of the instruction of this reception, and the instruction of storing is when completing condition and meeting and upgrade the instruction executing state in this status object in status object corresponding to this instruction; And
Output module, in the time that the instruction executing state in described status object is upgraded, described control module triggers described output module and exports the described instruction executing state of upgrading to described host computer.
8. the control device that instruction according to claim 7 is carried out, is characterized in that, described command information comprises instruction title, instruction executive condition, instruction execution step, instruction executive address; In described output module, there is more new tunnel of state, by described state more new tunnel by upgrade described instruction executing state export described host computer to, described status information also comprises Status Name, described state is the title of new tunnel more, state-detection address.
9. the control device that instruction according to claim 8 is carried out, it is characterized in that, when the instruction that described control module is stored in status object corresponding to this instruction completes condition and does not meet in the given time, by this instruction carry out failed information exchange cross described state more new tunnel export described host computer to.
10. the control device that instruction according to claim 9 is carried out, is characterized in that, also comprises detection module, for reading the variate-value of described state-detection address; In the time that the variate-value of described state-detection address meets the variation of setting, described control module judges that described instruction completes condition and meets; Described in the time that the variate-value of described state-detection address does not change within the described schedule time, control module judges that it is to meet that described instruction completes condition within the described schedule time.
The control device that 11. instructions according to claim 7 are carried out, it is characterized in that, also comprise configuration file, wherein configure the command information of whole described instructions and the status information of whole described instructions, described Object Creation module creates the corresponding instruction object of instruction and status object described in each according to described configuration file.
The control device that 12. instructions according to claim 7 are carried out, it is characterized in that, in the time that described receiver module receives multiple instruction that described host computer sends, described control module is carried out those instructions according to semiconductor equipment described in the command information control of storing in instruction object corresponding to those instructions simultaneously, and the condition that completes of the instruction of storing at status object corresponding to those instructions is upgraded the instruction executing state in those status objects while meeting.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106625674A (en) * | 2016-12-29 | 2017-05-10 | 北京光年无限科技有限公司 | Command processing method for robot and robot |
| CN110320825A (en) * | 2018-03-28 | 2019-10-11 | 北京京东尚科信息技术有限公司 | A kind of method and apparatus counting equipment state |
| CN111190659A (en) * | 2019-12-09 | 2020-05-22 | 航天信息股份有限公司 | Communication method and device for upper computer and transmission mechanism, electronic equipment and medium |
| CN111781913A (en) * | 2020-06-24 | 2020-10-16 | 北京北方华创微电子装备有限公司 | Semiconductor device control system and system monitoring method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6845280B1 (en) * | 2002-11-26 | 2005-01-18 | Advanced Micro Devices, Inc. | Work in progress management program interface |
| CN1288516C (en) * | 2001-10-31 | 2006-12-06 | 布鲁克斯自动控制公司 | A device and method for communicating data in a process control system |
| CN1937505A (en) * | 2006-02-09 | 2007-03-28 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Etchingmachine cluster controller and process module controller communication system and method |
| CN102566527A (en) * | 2010-12-30 | 2012-07-11 | 中国科学院沈阳自动化研究所 | Method for realizing transmission control platformization of semiconductor manufacturing equipment front end module |
| CN102662362A (en) * | 2012-04-17 | 2012-09-12 | 清华大学 | Universal control system for integrated circuit manufacturing equipment |
-
2014
- 2014-02-20 CN CN201410058368.3A patent/CN103777618B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1288516C (en) * | 2001-10-31 | 2006-12-06 | 布鲁克斯自动控制公司 | A device and method for communicating data in a process control system |
| US6845280B1 (en) * | 2002-11-26 | 2005-01-18 | Advanced Micro Devices, Inc. | Work in progress management program interface |
| CN1937505A (en) * | 2006-02-09 | 2007-03-28 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Etchingmachine cluster controller and process module controller communication system and method |
| CN102566527A (en) * | 2010-12-30 | 2012-07-11 | 中国科学院沈阳自动化研究所 | Method for realizing transmission control platformization of semiconductor manufacturing equipment front end module |
| CN102662362A (en) * | 2012-04-17 | 2012-09-12 | 清华大学 | Universal control system for integrated circuit manufacturing equipment |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106625674A (en) * | 2016-12-29 | 2017-05-10 | 北京光年无限科技有限公司 | Command processing method for robot and robot |
| CN106625674B (en) * | 2016-12-29 | 2019-09-27 | 北京光年无限科技有限公司 | A kind of command processing method and robot for robot |
| CN110320825A (en) * | 2018-03-28 | 2019-10-11 | 北京京东尚科信息技术有限公司 | A kind of method and apparatus counting equipment state |
| CN111190659A (en) * | 2019-12-09 | 2020-05-22 | 航天信息股份有限公司 | Communication method and device for upper computer and transmission mechanism, electronic equipment and medium |
| CN111190659B (en) * | 2019-12-09 | 2023-05-30 | 航天信息股份有限公司 | Communication method and device of upper computer and transmission mechanism, electronic equipment and medium |
| CN111781913A (en) * | 2020-06-24 | 2020-10-16 | 北京北方华创微电子装备有限公司 | Semiconductor device control system and system monitoring method |
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