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CN103743553B - The dual channel optical performance testing device of a kind of integrated waveguide manipulator and polarization crosstalk identification thereof and processing method - Google Patents

The dual channel optical performance testing device of a kind of integrated waveguide manipulator and polarization crosstalk identification thereof and processing method Download PDF

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CN103743553B
CN103743553B CN201310744466.8A CN201310744466A CN103743553B CN 103743553 B CN103743553 B CN 103743553B CN 201310744466 A CN201310744466 A CN 201310744466A CN 103743553 B CN103743553 B CN 103743553B
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optical fiber
waveguide
fiber
integrated waveguide
polarization
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CN103743553A (en
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杨军
苑勇贵
吴冰
彭峰
苑立波
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Harbin Engineering University
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Harbin Engineering University
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Abstract

Present invention design belongs to optics field of measuring technique, is specifically related to the dual channel optical performance testing device of a kind of integrated waveguide manipulator and polarization crosstalk identification thereof and processing method.The present invention includes the detection of high polarization-stable degree wide spectrum light source, integrated waveguide manipulator to be measured, light path demodulating equipment, polarization crosstalk and recording equipment.This device simplifies system structure, enriches test function, reduces cost, improves testing efficiency, can be widely applied to the quantitative test of the optical property of more than 80dB integrated waveguide device.

Description

The dual channel optical performance testing device of a kind of integrated waveguide manipulator and polarization string thereof Sound identification and processing method
Technical field
Present invention design belongs to optics field of measuring technique, is specifically related to the bilateral of a kind of integrated waveguide manipulator Road optical performance test device and polarization crosstalk identification thereof and processing method.
Background technology
Fiber optical gyroscope is commonly called as " Y waveguide ", and general employing Lithium metaniobate material is as substrate, and it is by single mode light wave Lead, beam splitter, photomodulator and optical polarizator have carried out highly integrated, are composition interference optical fiber top (FOG) and light The core devices of fiber current mutual inductor, decides the certainty of measurement of optical fiber sensing system, stability, volume and cost.
The Important Parameters of Y waveguide device specifically includes that waveguide chip extinction ratio, tail optical fiber cross-talk, output channel optical path difference, on State the temperature characterisitic etc. of parameter.How the optical property to Y waveguide device carries out test accurate, comprehensive is that high performance device grinds One run in system and production very stubborn problem.The chip of the Y waveguide used in micron order optical fibre gyro in high precision disappears Light ratio requires to reach more than 80dB.Such as, Hua Yong, Shu Ping of No.44 Inst., China Electronical Science and Technology Group Co. et al. carries A kind of method (CN 201310185490.2) improving extinction ratio of Y-waveguide chip for fiber-optic gyroscope gone out, it is already possible to realize More than 80dB Y waveguide device.And conventional polarization property detecting instrument extinction ratio tester, the U.S. that resolution is the highest The Model4810 type polarization extinction ratio measuring instrument that dBm Optics company develops also only has 72dB;Remaining U.S. General The ERM102 type of Photonics company, the ER2200 type of Fiberpro company of Korea S, the PEM-330 type of Santec company of Japan High Extinction Ratio all can only achieve about 50dB.
Y waveguide device is made up of a few part such as input optical fibre, waveguide chip and output optical fibre, modulator electrode etc., includes at least One input channel and two output channels.The complexity of structure requires to decore outside sheet extinction ratio, remaining chip the most two-fold Penetrate, the loss of tail optical fiber cross-talk, Insertion Loss, output channel optical path difference, and the performance such as the temperature characterisitic of above-mentioned parameter, voltage characteristic is also It it is the parameter that must measure.
Early 1990s, France Herve Lefevre et al. (US 4893931) makes public for the first time and does based on white light Relating to the OCDP system of principle, it uses super-radiance light emitting diode (SLD) and space interference light path measurement structure.France Photonetics company have developed 125 and WIN-P 400 two kinds of model OCDP test systems of WIN-P according to this patent, mainly Polarization characteristic analysis for shorter (500m) and longer (1600m) polarization maintaining optical fibre.Its main performance is polarization crosstalk sensitivity Be 70dB for-70dB, dynamic range, after through improvement, sensitivity and dynamic range rise to-80dB and 80dB respectively.But it is right Measurement in High Extinction Ratio Y waveguide also shows slightly not enough.
Alfred Healy of U.S. Fibersense Technology Corporation company in 2002 et al. is open The coupling process (US6870628) of the input/output optical fiber of a kind of integrated waveguide chip, utilizes white light interferometry method to realize The measurement of the coupling cross-talk of waveguide chip input/output optical fiber;Yi little Su, Xiao Wen etc. of BJ University of Aeronautics & Astronautics in 2004 People discloses a kind of optical fibre gyro integrated optical modulator on-line testing method and test device (CN thereof 200410003424.X), it is possible to achieve the measurement of the optical parametrics such as the loss of device, splitting ratio;Beijing Aviation space flight in 2007 Yi little Su, Xu little Bin of university et al. disclose a kind of Y waveguide chip and polarization maintaining optical fibre online to shaft device and the most countershaft Method (CN 200710064176.3), utilizes interferometric spectrometry to achieve waveguide chip and waveguide input/output optical fiber string equally The measurement of sound.But the measurement problem without reference to waveguide chip extinction ratio.
2011, University Of Tianjin Zhang Hongxia et al. disclose a kind of polarization extinction ratio of optical polarizer detection method and Detection device (CN 201110052231.3), same employing space interference light path is as the core apparatus of OCDP, by detection coupling The stiffness of coupling of chalaza, derives polarization extinction ratio.This device is applicable to polarization maintaining optical fibre, polarization-maintaining fiber coupler, polariser etc. Multiple optical polarization device.Compared with the scheme of Herve Lefevre et al., technical performance and index are close.
In the same year, Yao Xiaotian of AM General photoelectricity company (General Photonics Corporation) et al. is open A kind of in the polarization maintaining optical fibre and optical birefringence material all-fiber of distributed polarization crosstalk measurement measure system (US 20110277552, Measuring Distributed Polarization Crosstalk in Polarization Maintaining Fiber and Optical Birefringent Material), utilize and increased before light path correlator Optical path delay device, suppresses quantity and the amplitude of spuious white light interference signal during polarization crosstalk measurement.The method can be by all-fiber The polarization crosstalk sensitivity of measurement system brings up to-95dB, but dynamic range is maintained at 75dB.
2012, this seminar proposed polarization crosstalk based on all-fiber light path and measures test device (CN201210379406.6) and improve optics polarization crosstalk measurement performance method (CN201210379407.0), adopt Clap the technical scheme of noise with all-fiber light path and suppression, greatly suppress noise amplitude, make the sensitivity that polarization crosstalk is measured More than-the 95dB improved, dynamic range can be maintained at 95dB accordingly simultaneously, reduces the volume of test system simultaneously, increases Measurement stability.Feature measurement for High Extinction Ratio Y waveguide device is laid a good foundation.
Traditional view is thought: the optical property of two outfans of Y waveguide such as chip extinction ratio, linear birefrigence is consistent 's.But the research of actual test shows: be limited to material and the processing technology of Y waveguide, and the optical property of two output channels may Having different, this has the biggest meaning for the processing technology and parameter analyzing waveguide;Survey based on white light interference The Y waveguide of amount principle measures system, only possesses single pass power of test, needs to Y waveguide two output channels to survey During amount, it is necessary to be measured at twice;Particularly at external environment parameters (such as temperature etc.) or application parameter (such as waveguide chip Electrode on-load voltage etc.) change time, twice single channel is measured and a dual pathways is measured simultaneously, in extraneous loading environment and survey When the amount time there are differences, cannot be fully equivalent.Therefore, for the parameter of Y waveguide device difference output channel, such as: ripple Lead absolute value and the difference value of the optical characteristics such as chip extinction ratio, linear birefrigence, insertion loss, tail optical fiber cross-talk, have very Great real value.But test apparatus and method are also not involved with Y waveguide device difference output channel optical at present Energy and the comprehensive of diversity thereof test and assessment.
The dual channel optical performance that the invention provides a kind of Y waveguide device tests device simultaneously, and its design philosophy is: base In all-fiber light channel structure, the demodulated interferential instrument of two set functional independences is respectively used to two output channels of Y waveguide device, profit With symmetry principle, by the organic composite of test apparatus structure and simplification, by the concordance to light path and device parameters Set, it is achieved that comprehensive measurement of the optical property parameter of Y waveguide device.The feature of device comprises two functional independences, light paths The demodulated interferential instrument that structure and parameter is identical, they are connected to two output channels of waveguide modulator, and share same One light path scanning device, it is particularly suitable under loading the ambient parameter load such as temperature, to Y waveguide device output channel optics Performance change and the evaluation of discordance and analysis, it is possible to achieve the waveguide chip between integrated waveguide device two output channel disappears Measure while the absolute value of the optical parameters such as light ratio, linear birefrigence, insertion loss, tail optical fiber cross-talk and difference value.There is survey The advantages such as parameter is comprehensive, certainty of measurement is high, good stability in examination, and light channel structure is simple, had both reduced system cost, had improve again survey Examination efficiency, save testing cost, can be widely applied to the determining of optical property of more than 80dB High Extinction Ratio integrated waveguide device Measure examination.
Summary of the invention
It is an object of the invention to provide the dual channel optical performance testing device of a kind of integrated waveguide manipulator, the present invention Purpose also reside in polarization crosstalk identification and the place of the dual channel optical performance testing device that a kind of integrated waveguide manipulator is provided Reason method.
The object of the present invention is achieved like this:
A kind of dual channel optical performance testing device of integrated waveguide manipulator, including high polarization-stable degree wide spectrum light source, The detection of integrated waveguide manipulator to be measured, light path demodulating equipment, polarization crosstalk and recording equipment:
First output channel and second output channel of integrated waveguide manipulator to be measured are connected to light path demodulating equipment The first demodulated interferential instrument and the second demodulated interferential instrument;Polarization crosstalk detection is simultaneously connected with the first demodulated interferential instrument with recording equipment With the second demodulated interferential instrument, opto-electronic conversion and signal processing unit are to the first differential detector in the first demodulated interferential instrument and the The white light interference signal of the second differential detector output in two (FBG) demodulators carries out processing and record simultaneously;Control computer to utilize The polarization crosstalk identification of built-in integrated waveguide manipulator to be measured and processing method, defeated to the first of integrated waveguide manipulator to be measured Go out the waveguide chip extinction ratio between passage and the second output channel, linear birefrigence, insertion loss, the absolute value of tail optical fiber cross-talk enter Row is measured, is stored and show, the performance difference when external environment parameters or application parameter change is compared and shown.
First demodulated interferential instrument and the second demodulated interferential instrument: the first demodulated interferential instrument is by the first optical fiber analyzer and the 1st First end of × 2 fiber couplers connects, the of the second end of the one 2 × 2nd fiber coupler and the 22 × 2nd fiber coupler 4th end of one end connection, the 3rd end of the one 2 × 2nd fiber coupler and the 22 × 2nd fiber coupler is by the first fiber optic loop The connection of shape device, the 4th end of the one 2 × 2nd fiber coupler and a DFB light source connect, and the other end of the first optical fiber circulator is even Connect the first fiber collimating lenses, the second end of the 22 × 2nd fiber coupler and three-terminal link the first differential detector;
The composition of the second demodulated interferential instrument and the first demodulated interferential instrument is identical, respectively by the second optical fiber analyzer, the 3rd 2 × 2 fiber couplers, the 42 × 2nd fiber coupler, the second optical fiber circulator, the second fiber collimating lenses, the second difference detecting Device, the 2nd DFB light source composition.
High polarization-stable degree wide spectrum light source, is connected to the first photodetector by the first outfan of fiber coupler; By the second outfan after fibre optic isolater, it is connected to the optical fiber polarizer.
Integrated waveguide manipulator to be measured with the annexation of high polarization-stable degree wide spectrum light source and light path demodulating equipment is:
The output polarization maintaining optical fibre of the optical fiber polarizer protects inclined tail optical fiber pair with the input of integrated waveguide manipulator input channel to be measured Shaft angle degree is 0~45 °;
First output channel of integrated waveguide manipulator to be measured, the output of the second output channel protect inclined tail optical fiber and the first demodulation The countershaft angle of inclined tail optical fiber is protected in the input of interferometer and the first optical fiber analyzer of the second demodulated interferential instrument, the second optical fiber analyzer It is respectively 0~45 °.
The polarization crosstalk identification of the dual channel optical performance testing device of a kind of integrated waveguide manipulator and processing method:
1) length l of inclined tail optical fiber is protected in detection inputW-,, it may be judged whether meet:
SW-i=lW-i×Δnf>Sripple
In formula: Δ nfFor protecting inclined tail optical fiber linear birefrigence, SrippleLight path maximum for light source Secondary coherence peak;
2) as being unsatisfactory for, then an elongated segment polarization maintaining optical fibre l is weldedf-i, countershaft angle is 0 °-0 °, measures and record prolongation light Fine lf-iLength and theoretical light path Sf-i, it is judged that:
Sf-i=lf-i×Δnf>Sripple
3) length l of waveguide chip is measuredW
4) the first output channel tail optical fiber, length l of the second output channel tail optical fiber are measuredW-o-1、lW-o-2, it is judged that:
SW-o-1=lW-o-1×ΔnfAnd SW-o-2=lW-o-1×Δnf>SW=lW×ΔnW
In formula: Δ nWThe linear birefrigence of waveguide chip;
5) such as length l of output channel tail optical fiberW-o-1、lW-o-2Be unsatisfactory for step 4) condition, then the first output channel, Second output channel is respectively welded the extended fiber l that two segment length are identicalf-o-1、lf-o-2, its countershaft angle is 0 °-0 °, its length It is required to meet:
Sf-o-1=lf-o-1×ΔnfAnd Sf-o-2=lf-o-1×Δnf>SW=lW×ΔnW, measure and record extended fiber lf-o-1、lf-o-2
6) being connected with wide spectrum light source and light path demodulating equipment by integrated waveguide manipulator to be measured, it inputs and right with export Shaft angle degree is respectively θ1=45 °, θ2=45 °;
7) start white light interferometer, obtain two width distributed polarization strings of the first output channel, the second output channel simultaneously Sound measurement result curve;
8) geometrical length of the device each several part measured is utilized, including: inclined tail optical fiber length l is protected in inputW-i, input prolong Long polarization maintaining optical fibre length lf-i, waveguide chip length lW, the first output channel, the second output channel tail optical fiber length lW-o-1、lW-o-2、 Length l of output extended fiberf-o-1、lf-o-2;Calculate its optical path delay amount, and to be arranged in order according to size be two row:
The first row correspondence first wave guide output channel: Sf-i、(Sf-i+SW-i)、Sf-o-1、(Sf-o-1+SW-o-1)、(Sf-o-1+ SW-o-1+Sf-i+SW-i+SW-1)
Second row correspondence second waveguide output channel: Sf-i、(Sf-i+SW-i)、Sf-o-2、(Sf-o-2+SW-o-2)、(Sf-o-2+ SW-o-2+Sf-i+SW-i+SW-2)
9) contrast with theoretical formula, determine the polarization crosstalk characteristic peak that the first output channel is measured, particularly as follows:
(1) waveguide input extended fiber and waveguide input the polarization crosstalk ρ of tail optical fiberf-i
(2) waveguide input tail optical fiber and the polarization crosstalk ρ of waveguide chipW-i
(3) output extended fiber and the polarization crosstalk ρ of the first output channel waveguide output tail optical fiberf-o-1
(4) first output channel waveguide output tail optical fibers and the polarization crosstalk ρ of waveguide chipW-o-1
(5) polarization crosstalk of the Y waveguide chip that first passage is measured
Determine the polarization crosstalk characteristic peak that the second output channel (2C) is measured, particularly as follows:
(1) waveguide input extended fiber and waveguide input the polarization crosstalk ρ of tail optical fiber (21)f-i
(2) waveguide input tail optical fiber (21) and the polarization crosstalk ρ of waveguide chip (2D)W-i
(3) output extended fiber and the polarization crosstalk ρ of the second output channel waveguide output tail optical fiberf-o-2
(4) second output channel waveguide output tail optical fibers and the polarization crosstalk ρ of waveguide chip (2D)W-o-2
(5) polarization crosstalk of the Y waveguide chip that second channel is measured
10) contrast polarization crosstalkWith polarization crosstalkPolarization crosstalk ρW-o-2With polarization crosstalk ρW-o-1
11) according to the polarization maintaining fiber pigtail calculated and birefringence n of waveguide chip actual measurementf、ΔnW;I(0)out1/I (0)out2Represent the insertion loss ratio that waveguide device first, second output channel is measured;
12) when external environment parameters or application parameter change, step 7 is re-executed), the optical parametric to Y waveguide Measuring, the parameter that can measure also includes the changes in optical properties of two output channels, including input/output optical fiber and ripple Lead the coupling cross-talk variation with temperature of chip;The chip extinction ratio of waveguide two output channel is with the change of applied voltage.
The beneficial effects of the present invention is:
(1) as the comprehensive test device of a kind of Y waveguide device optical performance, it is possible to the optical parametric of measurement is most, The most comprehensive, including the waveguide chip extinction ratio between Y waveguide device two output channel, linear birefrigence, tail optical fiber cross-talk, insertion Loss, and the conforming measurement of output channel, single pass can obtain the measurement of numerous parameter, and testing efficiency is high, stable Property is good, affected by environment little;
(2) the completely self-contained two set demodulated interferential instrument of function are used, can to the optical characteristics of two output channels simultaneously Measure, it is possible to achieve different waveguide output channel at ambient parameter (such as temperature etc.) or application parameter (such as waveguide chip Electrode on-load voltage etc.) when loading, the optical property change of Y waveguide device and the evaluation of discordance and analysis, both improved Testing efficiency, has saved again testing cost;
(3) full same light path design (including light channel structure and component parameters), shares same light path scanning device, reduces system Construction cost, the measurement discordance improve test speed, reducing between passage;
(4) use all-fiber light path, have that volume is little, certainty of measurement is high, temperature stability and an anti-vibration good stability etc..
Accompanying drawing explanation
Fig. 1 is the optical principle schematic diagram of the distributed polarization crosstalk measurement of optics;
Fig. 2 is interference signal amplitude and the light path corresponding relation schematic diagram of polarization crosstalk formation;
Fig. 3 is Y waveguide device dual channel optical performance testing device principle based on Mach-Zehnder demodulated interferential instrument Figure;
Fig. 4 is the polarization crosstalk process flow of the dual channel optical performance testing device of a kind of integrated waveguide manipulator Figure;
Fig. 5 is that waveguide tail optical fiber slow axis axle fast with waveguide chip is directed at, and when device 0 °~0 ° accesses test device, measurement obtains Cloth polarization crosstalk data (the polarization interference noise of measurement apparatus);
When Fig. 6 is the input 0 °~45 ° of Y waveguide device, output 45 °~0 ° access measurement apparatus, from the first output channel The distributed polarization cross-talk data (optical characteristics of Y waveguide device) that 2B measurement obtains;
When Fig. 7 is Y waveguide device 90 °~0 ° access test device, the cloth obtained from the first output channel 2C measurement is inclined Cross-talk of shaking data (the polarization interference noise of measurement apparatus);
Fig. 8 is that Y waveguide input tail optical fiber couples cross-talk variation with temperature with the power of waveguide chip;
Fig. 9 is that Y waveguide the first output channel tail optical fiber couples cross-talk variation with temperature with the power of waveguide chip;
Figure 10 is that Y waveguide the second output channel tail optical fiber couples cross-talk variation with temperature with the power of waveguide chip;
Figure 11 is the measurement data summary sheet of Y waveguide the first output channel 2B;
Figure 12 is the measurement data summary sheet of Y waveguide the second output channel 2C;
Figure 13 is the linear birefrigence of the measurement of Y waveguide the first output channel 2B;
Figure 14 is the linear birefrigence of Y waveguide the second output channel 2C.
Detailed description of the invention
The dual channel optical performance of a kind of Y waveguide device that the present invention proposes tests device, including high polarization-stable simultaneously Degree wide spectrum light source 1, integrated waveguide manipulator to be measured (Y waveguide) 2, light path demodulating equipment 3, polarization crosstalk detection and recording equipment 4, It is characterized in that:
1) the first and second output channels 2B of Y waveguide 2,2C are connected to the first, second of light path demodulating equipment 3 and solve Cadre enrolled among workers's interferometer 31,32;
2) light channel structure, element and the device parameters thereof of the first demodulated interferential instrument 31 and the second demodulated interferential instrument 32 are equal Identical, including the first interferometer 31 and the second interferometer 32 two-arm optical path difference and be connected optical fiber 300,320,302,322,304, 324;
3) fiber collimating lenses 306 in the first demodulated interferential instrument 31 and the fiber optic collimator in the second demodulated interferential instrument 32 are saturating Mirror 326 shares same light path scanning device 310;
4) polarization crosstalk detection is simultaneously connected with first, second demodulated interferential instrument 31,32 with recording equipment 4, opto-electronic conversion with Signal processing unit 41 exports white light interference signal to first, second differential detector 308 and 309,328 and 329, carries out simultaneously Process and record;
5) control computer 42 and utilize data identification and Processing Algorithm, except to Y waveguide 2 first, second output channel 2B, 2C Optical property measure, store and show outside, also will to output channel 2B, 2C poor performance the opposite sex, particularly load temperature Performance under the application conditions such as environmental condition and voltage such as degree compares and shows.
First, second described demodulated interferential instrument 31,32, is characterized in that:
1) the first demodulated interferential instrument 31 is respectively by the first optical fiber analyzer the 301, the one 2 × 2nd fiber coupler the 303, the 2nd 2 × 2 fiber coupler the 307, first optical fiber circulator the 305, first fiber collimating lenses the 306, first differential detectors 308,309, Oneth DFB light source 311 forms;
2) the second demodulated interferential instrument 32 is respectively by the second optical fiber analyzer the 321, the 32 × 2nd fiber coupler the 323, the 4th 2 × 2 fiber coupler the 327, second optical fiber circulator the 325, second fiber collimating lenses the 326, second differential detectors 328,329, 2nd DFB light source 331 forms;
3) light channel structure, element and the device parameters thereof of the first demodulated interferential instrument 31 and the second demodulated interferential instrument 32 are equal Identical, including the first interferometer 31 and the second interferometer 32 two-arm optical path difference size and be connected optical fiber 300 and 320,302 and 322, The length of 304 and 324;
Described high polarization-stable degree wide spectrum light source 1, is characterized in that: wide spectrum light source 11 passes through the first of fiber coupler 12 Outfan 13 is connected to the first photodetector 14;By the second outfan 15 after fibre optic isolater 16, it is connected to optical fiber The polarizer 17.
Described Y waveguide 2 and high polarization-stable degree wide spectrum light source 1 and the annexation of light path demodulating equipment 3, its feature It is:
1) the output polarization maintaining optical fibre 18 of the polarizer 17 protects the inclined countershaft angle of tail optical fiber 21 with the input of Y waveguide 2 input channel 2A It it is 0~45 °;
2) inclined tail optical fiber 22,23 and first, second demodulated interferential is protected in first, second output channel 2B of Y waveguide, the output of 2C First, second optical fiber analyzer 301,321 of instrument 31,32 input protect inclined tail optical fiber 300,320 countershaft angle be respectively 0~ 45°。
The optical parameter measurement method of described Y waveguide 2 device, is characterized in that:
1) length l of inclined tail optical fiber 21 is protected in inputW-iIt is required to meet following formula:
SW-i=lW-i×Δnf>Sripple (1)
In formula: Δ nF isProtect inclined tail optical fiber linear birefrigence, SrippleLight path maximum for light source 11 Secondary coherence peak.
2) as being unsatisfactory for, then an elongated segment polarization maintaining optical fibre l is weldedf-i, countershaft angle is 0 °-0 °, and length requirement is similar to (1) Formula, i.e. meets (2) formula, measures and record extended fiber lf-iLength and theoretical light path Sf-i
Sf-i=lf-i×Δnf>Sripple (2)
3) length l of waveguide chip 2D is measuredW
4) length l of waveguide first, second output channel tail optical fiber 21,22 is measuredW-o-1、lW-o-2, its length requirement is similar to (1) formula, i.e. satisfied (3) formula:
SW-o-1=lW-o-1×ΔnfAnd SW-o-2=lW-o-1×Δnf>SW=lW×ΔnW (3)
In formula: Δ nWThe linear birefrigence of waveguide chip.
5) as exported length l of tail optical fiber 21,22W-o-1、lW-o-2It is unsatisfactory for (3) formula, then in the one the second output channels respectively Weld the extended fiber l that two segment length are identicalf-o-1、lf-o-2, its countershaft angle is 0 °-0 °, and its length requirement is similar to (3) formula, i.e. Meet (4) formula, measure and record extended fiber lf-o-1、lf-o-2
Sf-o-1=lf-o-1×ΔnfAnd Sf-o-2=lf-o-1×Δnf>SW=lW×ΔnW (4)
6) being connected with light source 1 and light path demodulating equipment 3 by Y waveguide 2, its input and the countershaft angle with output are respectively θ1 =45 °, θ2=45 °;
7) start white light interferometer, obtain the two width distributed polarization cross-talks surveys of first, second output channel 2B, 2C simultaneously Amount result curve;
8) geometrical length of the device each several part measured is utilized, including: inclined tail optical fiber 21 length l is protected in inputW-i, input Extend polarization maintaining optical fibre length lf-i, waveguide chip 2D length lW, waveguide first, second output channel tail optical fiber 21,22 length lW-o-1、 lW-o-2, output extended fiber length lf-o-1、lf-o-2;Calculate its optical path delay amount, and to be arranged in order according to its size be two OK:
The first row (corresponding first wave guide output channel): Sf-i、(Sf-i+SW-i)、Sf-o-1、(Sf-o-1+SW-o-1)、(Sf-o-1+ SW-o-1+Sf-i+SW-i+SW-1)
Second row (corresponding second waveguide output channel): Sf-i、(Sf-i+SW-i)、Sf-o-2、(Sf-o-2+SW-o-2)、(Sf-o-2+ SW-o-2+Sf-i+SW-i+SW-2)
9) with contrasting with theoretical analysis result formula (7), the scope being likely to occur according to optical path delay amount, determine each The implication of polarization crosstalk peak value, including:
Determine the polarization crosstalk characteristic peak that the first output channel 2B is measured, particularly as follows:
(1) waveguide input extended fiber and waveguide input the polarization crosstalk ρ of tail optical fiber 21f-i
(2) the polarization crosstalk ρ of waveguide input tail optical fiber 21 and waveguide chip 2DW-i
(3) output extended fiber and the polarization crosstalk ρ of the first output channel waveguide output tail optical fiber 22f-o-1
(4) first output channel waveguide output tail optical fibers and the polarization crosstalk ρ of waveguide chip 2DW-o-1
(5) polarization crosstalk of the Y waveguide chip that first passage is measured
Determine the polarization crosstalk characteristic peak that the second output channel 2C is measured, particularly as follows:
(1) waveguide input extended fiber and waveguide input the polarization crosstalk ρ of tail optical fiber 21f-i
(2) the polarization crosstalk ρ of waveguide input tail optical fiber 21 and waveguide chip 2DW-i
(3) output extended fiber and the polarization crosstalk ρ of the second output channel waveguide output tail optical fiber 23f-o-2
(4) second output channel waveguide output tail optical fibers and the polarization crosstalk ρ of waveguide chip 2DW-o-2
(5) polarization crosstalk of the Y waveguide chip that second channel is measured
10) contrastWithρW-o-2With ρW-o-1, it is known that between Y waveguide 2 two output channels 2B, 2C in performance Inconsistent;
11) polarization maintaining fiber pigtail and birefringence n of waveguide chip actual measurement can be calculated according to formula (7) and (8)f、 ΔnW;I(0)out1/I(0)out2Represent the insertion loss ratio that waveguide device first, second output channel is measured;
12) become when external environment parameters (such as temperature etc.) or application parameter (such as the electrode on-load voltage etc. of waveguide chip) During change, come back to step 7), again the optical parametric of Y waveguide is measured, the parameter that can measure except above-mentioned steps to Outside going out, also include the changes in optical properties of two passages:
(1) input/output optical fiber and waveguide chip couple cross-talk variation with temperature;
(2) the chip extinction ratio of waveguide two output channel is with the change of applied voltage.
The present invention is that a kind of technology to optical coherence domain polarization test system (OCDP) based on white light interference theory changes Enter.The operation principle of OCDP is as it is shown in figure 1, as a example by the pad cross-talk performance test of polarization maintaining optical fibre, sent by wide spectrum light source High stable wide range polarized light 501 be injected into the slow axis (during fast axle, principle is identical) of polarization maintaining optical fibre 521 of certain length.Work as biography When losing the pad 511 in optical fiber 521, in slow axis, a part of light energy of flashlight will be coupled to orthogonal fast In axle, forming coupled light beam 503, remaining transmitting beam 502 is still transmitted along slow axis.When transmission another from optical fiber 521 of light During outer one end outgoing (transmission range is l), due to optical fiber exist linear birefrigence Δ n (such as: 5 × 10-4), make in slow axis An optical path difference Δ nl will be there is between transmission light 502 and the coupling light 503 in fast axle.Light beam 502 and 503 is by 45 ° of rotations The pad turned or union joint 512, and after the polarization of analyzer 531 polarizes, beam splitter 532 be divided evenly into respectively Two parts.As in figure 2 it is shown, formed reference beam by transmission light 601 and coupling light 602, transmit in the fixed arm of interferometer, warp Beam splitter 532 is returned to after crossing the reflection of stationary mirror 533;Scanning light beam is formed, equally by transmission light 603 and coupling light 604 Also returning to beam splitter 532 after the reflection of mobile mirror 534, two parts light converges in formation white light on detector 537 and does Relate to signal, be received and convert optical signals to the signal of telecommunication.This signal, after signal demodulating circuit 551 processes, is sent into and is surveyed In amount computer 552;Metering computer 552 to be the most also responsible for controlling mobile mirror 534 and realize light path scanning.
As illustrated in fig. 1 and 2, under the control of metering computer 552, the mobile mirror 534 of Michelson interferometer makes The optical path difference of interferometer two-arm, scans to-Δ nl through zero passage from Δ nl:
(1) when optical path difference is equal to Δ nl, scanning light beam couples light 604 and transmission light 601 light path in reference beam Mating, then produce white light interference signal, its peak amplitude isIt couples width with defect point The degree factor and the intensity of light source are directly proportional;
(2) when optical path difference is zero, reference beam 601,602 respectively with the transmission light 605 in scanning light beam, couple light 606 light paths mate, and produce white light interference signal respectively, and its peak amplitude is the intensity superposition of the two, and its amplitude is Imain ∝I0, it is directly proportional to light source input power.As shown in Figure 2, compared with previous white light interference signal, two white light interference letters Optical path difference between number peak value is just Δ nl.If it is known that the linear birefrigence Δ n of optics, then can be calculated scarce The position l that trapping spot occurs, and the power coupling size of defect point can be calculated by the ratio of interference signal peak strength ρ;
(3) when optical path difference is equal to-Δ nl, scanning light beam transmits light 607 and reference beam couples light 602 light path Mating, then produce white light interference signal, its peak amplitude isWhen it is Δ nl with optical path difference Identical.As figure shows, when being Δ nl with optical path difference compared with, this white light interference signal is symmetrical on light path therewith, identical in amplitude.
Polarization crosstalk ρ can be Δ nl according to optical path difference or polarization crosstalk signal amplitude I of-Δ nl acquisitioncoupling, with And optical path difference obtains transmission optical signal magnitude I when being zeromainIt is calculated:
I c o u p l i n g I m a i n = ρ ( 1 - ρ ) - - - ( 5 )
Owing to general polarization crosstalk is much smaller than 1, therefore (1) formula is changed to:
I c o u p l i n g I m a i n = ρ - - - ( 6 )
In order to obtain the optical characteristics of two output channels of Y waveguide device simultaneously, its test device is as shown in Figure 3.When Y ripple Lead the alignment angle of device 2 and wide spectrum light source 1 and light path demodulating equipment 3 be 0 °~45 °, 45 °~0 ° on time, polarization crosstalk is examined Survey amplitude and the optical path delay amount of the white light interference signal of the first and second output channels 2B with recording equipment 4 acquisition, 2C, all Meet (3) formula to represent:
I ( S o u t 1 ) o u t 1 I ( 0 ) o u t 1 = R ( S o u t 1 ) + ρ f - i R ( S o u t 1 ± S f - i ) + ρ W - i R [ S o u t 1 ± ( S f - i + S W - i ) ] + ρ f - o - 1 R ( S o u t 1 ± S f - o - 1 ) + ρ W - o - 1 R [ S o u t 1 ± ( S f - o - 1 + S W - o - 1 ) ] + ϵ c h i p 1 R [ S o u t 1 ± ( S f - i + S W - i + S f - o - 1 + S W - o - 1 + S E - 1 ) ] I ( S o u t 2 ) I ( 0 ) o u t 2 = R ( S o u t 2 ) + ρ f - i R ( S o u t 2 ± S f - i ) + ρ W - i R [ S o u t 2 ± ( S f - i + S W - i - 2 ) ] + ρ f - o R ( S o u t 2 ± S f - o - 2 ) + ρ W - o R [ S o u t 2 ± ( S f - o - 2 + S W - o - 2 ) ] + ϵ c h i p 2 R [ S o u t 2 ± ( S f - i + S W - i - 2 + S f - o - 2 + S W - o - 2 + S W 2 ) ]
In formula: I (Sout1)、I(Sout2) it is expressed as the first differential detector (308,309) and the second differential detector All white light interference signal amplitude sums that (328,329) detect;Sout1、Sout2Represent first, second demodulated interferential instrument respectively 31, the light path delayed sweep amount of 32, I (0)out1、I(0)out2When optical path difference is zero respectively, represent the maximum peak of white light interference signal Value amplitude;R (S) is the normalization self-coherence function of wide spectrum light source, R (0)=1, the white light interference Peak signal amplitude of transmission light, Optical path difference is zero;R (S)=0 (S > S0Time, S0Coherence length for wide spectrum light source);Sf-i、Sf-o-1、Sf-o-2、SW-i、SW-o-1、 SW-o-2、SW-1、SW-2Respectively input extended fiber, the first output channel extended fiber, the second output channel extended fiber, waveguide Input tail optical fiber, waveguide the first output channel tail optical fiber, waveguide the second output channel tail optical fiber, the first output channel waveguide light path, Optical path delay amount corresponding to second output channel waveguide light path, when slow axis light path is ahead of fast axial light journey, above-mentioned prolongs Late amount be defined as+;When slow axis light path lags behind fast axial light journey, above-mentioned retardation is defined as-, each optical path delay amount can depend on Secondary it is expressed as:
Sf-i=lf-i×Δnf
SW-i=lW-i×Δnf
Sf-o-1=lf-o-1×Δnf
Sf-o-2=lf-o-2×Δnf
(8)
SW-o-1=lW-o-1×Δnf
SW-o-2=lW-o-2×Δnf
SW-1=lW-1×ΔnW
SW-2=lW-2×ΔnW
In formula, lf-i、lf-o-1、lf-o-2、lW-i、lW-o-1、lW-o-2、lW-1、lW-2Respectively input extended fiber, the first output Passage extended fiber, the second output channel extended fiber, waveguide input tail optical fiber, waveguide the first output channel tail optical fiber, waveguide second Output channel tail optical fiber, the first output channel waveguide chip, the length of the second output channel waveguide chip, Δ nf、ΔnWIt is respectively and protects The fine linear birefrigence with waveguide chip of polarisation;ρf-i、ρf-o-1、ρf-o-2It is respectively waveguide input extended fiber and inputs tail with waveguide Extended fiber fine, the first output channel exports tail optical fiber with waveguide output tail optical fiber, the extended fiber of the second output channel with waveguide Solder joint polarization crosstalk power factor, ρW-i、ρW-o-1、ρW-o-2It is respectively waveguide input, the first output tail optical fiber, the second output tail optical fiber With the polarization crosstalk power factor of waveguide chip,It is respectively the Y waveguide chip polarization of first, second channel measurement Cross-talk (inverse of extinction ratio).
From (7), (8) formula, if it is known that input, first output, second output extended fiber, input, first output, Second output waveguide tail optical fiber and the length of waveguide chip, scanned by the light path of light path demodulating equipment 3 and polarization crosstalk detects Collection with the white light interference signal amplitude of recording equipment 4 and process, optical path delay amount be 0, ± Sf-i、±Sf-o-1、± Sf-o-2、±(Sf-i+SW-i)、±(Sf-o-1+SW-o-1)、±(Sf-o-2+SW-o-2)、±(Sf-o-1+SW-o-1+Sf-i+SW-i+SW-1)、± (Sf-o-2+SW-o-2+Sf-i+SW-i+SW-2) place, the peak value of white light interference signal can be obtained respectively, the most corresponding ρ of its amplitudef-i、 ρf-o-1、ρf-o-2、ρW-i、ρW-o-1、ρW-o-2Deng optical parametric.
For clearly demonstrating device and the measurement that integrated waveguide manipulator (Y waveguide) dual output passage of the present invention is measured simultaneously Method, the invention will be further described with accompanying drawing in conjunction with the embodiments, but should not limit the scope of the invention with this.
Embodiment 1 waveguide measuring device based on Mach-Zehnder demodulated interferential instrument
Device measurement apparatus is as it is shown on figure 3, the device of white light interferometric device selects as follows with parameter:
(1) centre wavelength 1550nm of wideband light source 11, half spectral width are more than 2mW, light source light more than 45nm, fiber power Spectrum ripple < 0.05dB (peak amplitude is about-60dB), the light path scope 4~7mm at relevant peak;Half spectrum width of DFB light source 311 Degree is more than 1mW less than 50MHz, fiber power;
(2) 2/98 fiber coupler 12 operation wavelengths 1550nm, splitting ratio 2:98;
(3) fibre optic isolater 16 operation wavelength 1550nm, insertion loss 0.8dB, isolation > 35dB;
(4) the optical fiber polarizer 17, the operation wavelength of first, second optical fiber analyzer 301,321 is 1550nm, and extinction ratio is 30dB, insertion loss is less than 1dB;
The parameter of (5) first, second, third, fourth fiber couplers 303,307,323,337 is identical, and operation wavelength is 1310/1550nm, splitting ratio 50:50;
(6) first, second fiber optical circulators 305,325 are three-port circulator, and insertion loss 1dB, return loss is more than 55dB;
The operation wavelength of (7) first, second collimating lens 306,326 is 1550nm, it and light path scanning device 310 (reflection Rate is more than 92%) between light path scanning distance about between 0~200mm change, average insertion loss is 2.0dB, damage Within consumption fluctuation ± 0.2dB, and when light path scanning device 310 is approximately in 100mm position, first, second demodulated interferential instrument 31, The two-arm optical path difference of 32 is about zero;
The light-sensitive material of (8) first, second differential detectors 308 and 309,328 and 329 is InGaAs, optical detection model Enclosing is 1100~1700nm, and responsiveness is more than 0.85;
(9) selecting Y waveguide device 2 to be measured, its operation wavelength is 1550nm, and waveguide tail optical fiber slow axis is fast with waveguide chip Axle is directed at, waveguide chip length 20mm.
The work process of measurement apparatus is as follows:
The output light of wide spectrum light source 11 is through light splitting, the isolation of fibre optic isolater 16 and the polarizer 17 of fiber coupler 12 Polarization after become line polarisation, more partially input 45 ° of countershaft solder joints of tail optical fiber 21 through protecting protecting of inclined output optical fibre 18 and Y waveguide 2, Light energy is evenly injected in the fast and slow axis of waveguide chip 2D to be measured;Optical signal is first divided into two bundles, transmits respectively at 2B With in 2C, due to the existence of the extinction ratio of Y waveguide, waveguide slow axis transmits flashlight and obtains greater attenuation, and fast axle transmits Light is slightly decayed (corresponding insertion loss), and fast and slow axis transmission light is together logical from the first output channel 2B and first output of Y waveguide Road 2C exports, injects in tail optical fiber 22 and 23, respectively through 45 ° of solder joints of tail optical fiber 300 and 320, respectively at the first analyzer 301 Mix with in the second analyzer 321, and be injected separately in the first demodulated interferential instrument 31 and the second demodulated interferential instrument 32.
As a example by the first demodulated interferential instrument 31, the flashlight exported from the slow axis of Y waveguide 2 and the flashlight of fast axle output Uniformly be divided into 2 bundles by 303, a branch of transmission is in the fixed arm that optical fiber 304 forms, and the most a branch of transmission is by first annular device 305, in the scan arm of first collimator 306 and light path scanning device 310 composition.Sweep when light path scanning device 310 motion realizes light path When retouching, the optical path difference produced between fixed arm and the scan arm of the first demodulated interferential instrument 31 is fast with Y waveguide 2, slow axis exports light When optical path difference matches, the first differential detector 308 and 309 will export white light interference signal, white light interference peak value and waveguide core Sheet extinction ratio is inversely proportional to, the length of the light path scan position correspondence waveguide chip that its peak value is corresponding.Above-mentioned measurement process obtains From the optical property of the Y waveguide 2 that the first output channel is measured.
Second demodulated interferential instrument 32 and the first demodulated interferential instrument share same light path scanning device 310.Therefore, scan when light path When device 310 works, the second demodulated interferential instrument 32 obtains the optical of the Y waveguide 2 from the first output channel measurement the most simultaneously Energy.
The dual pathways of embodiment 2 tail optical fiber slow axis and the Y waveguide device of the fast axle of waveguide chip is measured simultaneously
The measurement apparatus figure of Y waveguide device as it is shown on figure 3, optical property measurement procedure as shown in Figure 4.
(1) from step 701, Y waveguide input tail optical fiber length l is measuredW-iIt it is 1.53 meters;
(2) from step 702, tail optical fiber l is inputtedW-iTheoretical light path (Δ nfBy 5 × 10-4Meter) SW-i=0.765mm;And Sripple=4~7mm, it is seen then that input extended fiber have to be welded;
(3) understand according to step 703, connect extended fiber lf-iLength at least want 7 × 10-3/5×10-4=14 meters, real Border chooses 15 meters;
(4) understand according to step 704, measure a length of 20mm of waveguide chip, its theoretical light path (Δ nWBy 8 × 10-2 Meter) SW-o=1.6mm, corresponding output tail optical fiber length lW-o=1.6 × 10-3/5×10-4=3.2 meters;
(5) understand according to step 705, measure tail optical fiber length l of first, second output channelW-o-1、lW-o-1Be 1.72 meters, 1.78 rice;
(6) according to step 706~707, the light path S of output tail optical fiberW-o-1、SW-o-1It is respectively less than SW, it is seen then that have to prolong Long output optical fibre, welds extended fiber lf-oAt least want 3.2 meters, actual choose 5.6 meters;
(7) owing to being to measure first, by Y waveguide input/output tail optical fiber and light source 1 and light path demodulating equipment 3 to shaft angle Degree is adjusted to 0 °-0 °, starts and measures, it is thus achieved that such as the measurement result of Fig. 5,81 are expressed as the interference main peak measured, and it is to measure width Degree and light path position reference point;82 (82 '), 83 (83 ') are the spuious interference peaks of measurement apparatus 3 light path;84 (84 ') are light source light The spectrum high-order that causes of ripple is concerned with peak;85 (85 ') are the polarization crosstalk Noise Background of measurement apparatus 3, represent the survey of measurement apparatus The amount limit;
(8) from step 708~709, adjust input/output angle respectively 0 °-45 °, 45 °-0 ° and be again started up surveying Electricity testing device, it is possible to obtain Y waveguide the first output channel 2B as shown in Figure 6, Figure 7, the measurement result of the second output channel 2C;
(9) from step 710~711, according to optical fiber and waveguide chip length, the light path amount of each several part is calculated, side by side Sequence, it is thus achieved that 8A~8E (8A '~8E ' respectively 8A~8E symmetrical), 9A~9E (9A '~9E ' 9A~9E respectively symmetrical) each 10 spies Levy peak, and determined the implication of each polarization crosstalk peak value and concrete amplitude by formula (7), as is illustrated by figs. 11 and 12;
(10) from step 712, the first output channel and the second output channel measure the extinction ratio of waveguide chip respectively Being respectively 55.2 ± 0.2dB and 52.3 ± 0.2dB, its difference is 2.9dB;
(11) from step 713~714, it is respectively l according to input/output extended fiber lengthf-i=15.00 meters, lf-o-1=lf-o-2=5.60 meters, input/output tail optical fiber is respectively lW-i=1.53 meters, lW-o-1=1.72 meters, lW-o-1=1.78 meters, The a length of 20mm of waveguide chip, and the linear birefrigence of optical fiber and waveguide can be calculated according to (7), (8) formula and refer to Figure 13 And Figure 14;
(12) according to test data, from the maximum of the white light interference signal peak that first, second output channel obtains Value I (0)out1、I(0)out2It is respectively 2.8dBV, 3.9dBV, it is known that two passage insertion loss difference 1.1dB.
The measurement that embodiment 3 Y waveguide device two output channel varies with temperature
The measurement apparatus of Y waveguide device remains unchanged as it is shown on figure 3, be in place of the difference of embodiment 2, connects other one Connect the Y waveguide to be measured 2 with wide spectrum light source 1 and light path demodulating equipment 3 to be placed in temperature-controlled cabinet, change to 80 DEG C from-50 DEG C and change Temperature, according to measurement procedure as shown in Figure 4 and data analysing method, simultaneously from the first Measurement channel and the second Measurement channel Obtain the various optics variation with temperature amounts of Y waveguide device.
Result of the test shows: input/output tail optical fiber is very sensitive to temperature, such as Fig. 8 with the Coupling point cross-talk of waveguide chip ~shown in 10, respectively Y waveguide input tail optical fiber, the first output channel tail optical fiber, the second output channel tail optical fiber and the merit of waveguide chip Rate coupling cross-talk variation with temperature.It can be seen that three changes not consistent, waveguide input tail optical fiber cross-talk and first Output channel tail optical fiber cross-talk changes greatly (more than 20dB), and the second output channel tail optical fiber cross-talk changes less (within 10dB). The size of cross-talk variable quantity, minimum cross-talk point temperature etc. relevant with optical fiber, the material of waveguide junction and technique.Therefore, logical Cross the analysis that first, second output channel cross-talk is varied with temperature curve, to Y waveguide material and the selection of technique with optimize tool There is the biggest directive significance.

Claims (4)

1. a dual channel optical performance testing device for integrated waveguide manipulator, including high polarization-stable degree wide spectrum light source (1), Integrated waveguide manipulator (2) to be measured, light path demodulating equipment (3), polarization crosstalk detection and recording equipment (4), is characterized in that:
First output channel and second output channel of integrated waveguide manipulator (2) to be measured are connected to light path demodulating equipment (3) the first demodulated interferential instrument and the second demodulated interferential instrument;Polarization crosstalk detection is simultaneously connected with the first demodulation with recording equipment (4) Interferometer and the second demodulated interferential instrument, opto-electronic conversion and signal processing unit (41) are to the first difference in the first demodulated interferential instrument The white light interference signal of the second differential detector output in detector and the second demodulated interferential instrument carries out processing and record simultaneously; Control computer (42) and utilize polarization crosstalk identification and the processing method of built-in integrated waveguide manipulator (2) to be measured, to be measured Waveguide chip extinction ratio between the first output channel of integrated waveguide manipulator (2) and the second output channel, linear birefrigence, insert Enter loss, the absolute value of tail optical fiber cross-talk measure, store and show, to external environment parameters or application parameter change time Performance difference compares and shows.
The dual channel optical performance testing device of a kind of integrated waveguide manipulator the most according to claim 1, its feature exists In: the first described demodulated interferential instrument and the second demodulated interferential instrument: the first demodulated interferential instrument (31) is by the first optical fiber analyzer (301) the first end with the one 2 × 2nd fiber coupler (303) be connected, second end and the 2nd 2 of the one 2 × 2nd fiber coupler First end connection, the 3rd end of the one 2 × 2nd fiber coupler and the 22 × 2nd fiber coupler of × 2 fiber couplers (307) (307) the 4th end is by the first optical fiber circulator (305) connection, the 4th end of the one 2 × 2nd fiber coupler and a DFB Light source (311) connects, and the other end of the first optical fiber circulator (305) connects the first fiber collimating lenses (306), the 22 × 2nd light Second end of fine bonder (307) and three-terminal link the first differential detector;
Second demodulated interferential instrument (32) is identical with the composition of the first demodulated interferential instrument, respectively by the second optical fiber analyzer (321), 32 × 2 fiber couplers (323), the 42 × 2nd fiber coupler (327), the second optical fiber circulator (325), the second optical fiber are accurate Straight lens (326), the second differential detector, the 2nd DFB light source (331) composition.
The dual channel optical performance testing device of a kind of integrated waveguide manipulator the most according to claim 1 and 2, its feature It is: described high polarization-stable degree wide spectrum light source (1), is connected to by first outfan (13) of fiber coupler (12) One photodetector (14);By the second outfan (15) after fibre optic isolater (16), it is connected to the optical fiber polarizer (17).
The dual channel optical performance testing device of a kind of integrated waveguide manipulator the most according to claim 3, its feature exists In: described integrated waveguide manipulator (2) to be measured and high polarization-stable degree wide spectrum light source (1) and the company of light path demodulating equipment (3) The relation of connecing is:
The output polarization maintaining optical fibre (18) of the optical fiber polarizer (17) and the input of integrated waveguide manipulator (2) input channel (2A) to be measured Protecting inclined tail optical fiber (21) countershaft angle is 0~45 °;
Inclined tail optical fiber and first is protected in first output channel (2B) of integrated waveguide manipulator to be measured, the output of the second output channel (2C) The countershaft of inclined tail optical fiber is protected in the input of demodulated interferential instrument and the first optical fiber analyzer of the second demodulated interferential instrument, the second optical fiber analyzer Angle is respectively 0~45 °.
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