CN104597552B - Polarizer of high polarization extinction ratio and preparation method thereof and test device - Google Patents
Polarizer of high polarization extinction ratio and preparation method thereof and test device Download PDFInfo
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- CN104597552B CN104597552B CN201510088214.3A CN201510088214A CN104597552B CN 104597552 B CN104597552 B CN 104597552B CN 201510088214 A CN201510088214 A CN 201510088214A CN 104597552 B CN104597552 B CN 104597552B
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- 230000010287 polarization Effects 0.000 title claims abstract description 63
- 230000008033 biological extinction Effects 0.000 title claims abstract description 59
- 238000012360 testing method Methods 0.000 title claims abstract description 27
- 238000002360 preparation method Methods 0.000 title claims description 6
- 239000013078 crystal Substances 0.000 claims abstract description 122
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims abstract description 93
- 239000000835 fiber Substances 0.000 claims abstract description 66
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910052744 lithium Inorganic materials 0.000 claims abstract description 38
- 230000000903 blocking effect Effects 0.000 claims abstract description 25
- 238000000034 method Methods 0.000 claims abstract description 23
- 239000011159 matrix material Substances 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 22
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 6
- 238000000137 annealing Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000005711 Benzoic acid Substances 0.000 claims description 3
- 235000010233 benzoic acid Nutrition 0.000 claims description 3
- 230000003139 buffering effect Effects 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 238000011161 development Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 229940031993 lithium benzoate Drugs 0.000 claims description 3
- LDJNSLOKTFFLSL-UHFFFAOYSA-M lithium;benzoate Chemical compound [Li+].[O-]C(=O)C1=CC=CC=C1 LDJNSLOKTFFLSL-UHFFFAOYSA-M 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000001259 photo etching Methods 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 2
- 238000007654 immersion Methods 0.000 claims 1
- 239000010955 niobium Substances 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- 238000009738 saturating Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 7
- 238000005516 engineering process Methods 0.000 description 5
- 239000002253 acid Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 2
- 239000013598 vector Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3033—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid
- G02B5/3041—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid comprising multiple thin layers, e.g. multilayer stacks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optical Integrated Circuits (AREA)
Abstract
A kind of polarizer of high polarization extinction ratio, the matrix of the polarizer uses the lithium niobate crystal chip cut by lithium columbate crystal；The lithium niobate crystal chip is sheet-like structure, and the positive and negative of lithium niobate crystal chip are each provided with a fiber waveguide area, and the sectional dimension in Liang Ge fiber waveguides area is identical, position is just right；Region overlay beyond the lithium niobate crystal chip surface fiber waveguide area has light blocking film layer；The Y Z of lithium niobate crystal chip surface and lithium columbate crystal are tangential or X Z are tangentially parallel.The method have the benefit that：There is provided a kind of new polarizer for being used to replace existing ahrens prism in polarization extinction ratio test device, the measurement upper limit of polarization extinction ratio test device is got a promotion, improve the performance of polarization extinction ratio test device.
Description
Technical field
The present invention relates to a kind of polarization extinction ratio measuring technology, more particularly to a kind of high polarization extinction ratio polarizer and its
Preparation method and test device.
Background technology
With continuing to develop for laser polarization light technology, polarizing device is in light sensing, optoelectronic information processing and optic communication neck
The application in domain is more and more extensive.Polarization extinction ratio is to evaluate the good and bad topmost performance indications of polarizing device performance, quick, accurate
The polarization extinction ratio of measurement polarizing device be one of laser polarization light technology application field urgent problem to be solved.
Rotation analyzer method be tests polarization extinction ratio in the prior art technical way, its principle as shown in figure 1,
Input optical interface, collimation lens, ahrens prism and photodetector to set with optical axis by arrangement mode in figure, electric rotating machine
Control ahrens prism rotation makes two mutually orthogonal polarized components in incident beam be incident to photoelectricity alternately through ahrens prism
In detector, the luminous power P of two mutually orthogonal polarized components is obtained after signal processing circuitmaxAnd Pmin, foundation formula ER=
10×lg（Pmax/Pmin）The polarization extinction ratio of incident light can be calculated；The problem of existing be：In the prior art, before being used for
The polarization extinction ratio highest for stating the ahrens prism itself of rotation analyzer method is only capable of reaching 55dB, and because light path is inevitable
There is rigging error, therefore the maximum polarization extinction ratio that the polarization extinction ratio test device based on foregoing ahrens prism can be measured
Typically also to be less than 55dB, the measurement upper limit that this allows for polarization extinction ratio test device is relatively low, far from meeting modern precision
To the requirement of the accurate measurement of polarization extinction ratio in optical system.
The content of the invention
The problem of in background technology, the present invention proposes a kind of polarizer of high polarization extinction ratio, and its innovation is：
The matrix of the polarizer uses the lithium niobate crystal chip cut by lithium columbate crystal；The lithium niobate crystal chip is laminated structure
Body, the positive and negative of lithium niobate crystal chip are each provided with a fiber waveguide area, and the sectional dimension in Liang Ge fiber waveguides area is identical, position is just right；
Region overlay beyond the lithium niobate crystal chip surface fiber waveguide area has light blocking film layer；Lithium niobate crystal chip surface and lithium columbate crystal
Y-Z it is tangential or X-Z is tangentially parallel.
As described in the background art, existing polarization extinction ratio test device, due to being limited to the polarization of ahrens prism
The extinction ratio upper limit, it is impossible to measured to higher polarization extinction ratio, then inventor's consideration searching is a kind of itself possesses very high
The device of polarization extinction ratio substitutes ahrens prism, further to expand the measurement upper limit of polarization extinction ratio test device, therefore,
Inventor has carried out substantial amounts of exploration, and has finally drawn the solution of the present invention；The present invention principle be：Can based on existing theory
Know, the lithium niobate fiber waveguide itself that annealed proton exchange process makes has very high polarization extinction ratio, and by light wave
Lead crosstalk of the region evaporation light blocking film layer isolation radiation mode to guided mode beyond chip end face waveguide core area, its polarization extinction ratio
More than 80dB is can reach, but is limited to conventional thinking, annealed proton friendship is only applied in fiber optic system in the prior art
Change the high polarization extinction ratio of lithium niobate fiber waveguide this characteristic；Inventor find ahrens prism substitute when find, niobic acid
The high polarization extinction ratio characteristic of lithium chip of light waveguide and effect of the ahrens prism played in polarization extinction ratio test device are very
Agree with, then inventor has made intensive studies to this, and in order that lithium niobate fiber waveguide chip adapts to polarization extinction ratio test
The demand of device, have devised a kind of polarizer of new construction, and this polarizer so plays a role：Referring to Fig. 4, in niobic acid
Produce behind fiber waveguide area, will increase along the refractive index of lithium columbate crystal Z tangential polarization light vectors in fiber waveguide area on lithium chip
Plus, and will reduce along tangential and the tangential Polarization Vectors of X the refractive indexes of lithium columbate crystal Y, therefore only along lithium columbate crystal Z
Tangential polarised light can encourage stable guided mode onwards transmission in fiber waveguide, and along crystal X is tangential and the tangential polarizations of Y
Light then forms radiation mode into the region beyond fiber waveguide area and stopped by light blocking film layer, therefore by fiber waveguide area to passing through inside
Only included along polarised light tangential lithium columbate crystal Z in the light wave penetrated（The big plane of lithium niobate crystal chip respectively with lithium columbate crystal
X-Z is tangential and during Y-Z tangentially parallel, principle is identical, and the difference of the two only has certain influence to technique, can be situated between in addition hereinafter
Continue）；Ahrens prism in polarization extinction ratio test device is replaced with after foregoing polarizer, the height with reference to lithium niobate fiber waveguide is inclined
Extinction ratio of shaking property, you can allow the measurement upper limit of polarization extinction ratio test device significantly to be extended, improve its performance.
Preferably, the thickness of the lithium niobate crystal chip is 1 ~ 10mm.
Preferably, the section in the fiber waveguide area is circle, a diameter of 4 ~ 100mm in the fiber waveguide area；The niobic acid
Lithium chip is shaped as the disc concentric with fiber waveguide area.
Preferably, the fiber waveguide area is made using annealed proton exchange process.The technique step of annealed proton exchange process
Rapid and technological parameter is same as the prior art.
Preferably, the lithium niobate crystal chip surface is tangentially parallel with the Y-Z of lithium columbate crystal.Why select Y-Z tangential,
Be because：The surface of lithium niobate crystal chip be oriented to X-Z it is tangential when, lithium niobate crystal chip is vulnerable to matter in annealed proton exchange process
Son exchanges the corrosiveness of liquation, and the optical waveguide loss of formation is bigger than normal, and stability is bad.
Preferably, the light blocking film layer uses titanium film.
Implement for the ease of those skilled in the art, the invention also discloses the making of the polarizer of foregoing high polarization extinction ratio
Method, following steps for manufacturing polarizer：
1）Lithium columbate crystal is cut into the lithium niobate crystal chip of laminated structure；Lithium niobate crystal chip surface and lithium columbate crystal
Y-Z is tangential or X-Z is tangentially parallel；
2）In lithium niobate crystal chip surface deposition metallic diaphragm, light blocking film layer is formed；
3）One circular operating space is respectively set in the front and back of lithium niobate crystal chip, two operating space diameters are identical, position
Put relative, a diameter of 4 ~ 100mm of operating space；Using photoetching, development or etching process, the light blocking film in the range of operating space is removed
Layer；
4）Lithium niobate crystal chip is immersed and fully exchanged in proton source liquation, lithium niobate crystal chip is then inserted into annealing furnace
Middle annealing；In process conditions, mode of operation and annealing process when the composition of foregoing proton source liquation, content, proton exchange
Various parameters condition using selection process of the prior art carry out；
After machining, the positive and negative of lithium niobate crystal chip respectively form a fiber waveguide area, lithium niobate crystal chip surface fiber waveguide area
Region in addition is covered by light blocking film layer.
Preferably, step 1）In, the lithium niobate crystal chip cut out is shaped as the disc concentric with fiber waveguide area, niobic acid
The thickness of lithium chip is 1 ~ 10mm, and lithium niobate crystal chip surface is tangentially parallel with the Y-Z of lithium columbate crystal；Step 2）In, the gold
Category film layer uses titanium film；Step 3）In, the buffering proton source liquation that proton source liquation is constituted using benzoic acid and lithium benzoate。
Based on aforementioned schemes, the invention also discloses a kind of polarization extinction ratio test device of high polarization extinction ratio, it is created
Newly it is：The polarization extinction ratio test device by input optical interface, two pieces of collimation lenses, polarizer, fixture, electric rotating machine,
Photodetector and signal processing circuit composition；
The matrix of the polarizer uses the lithium niobate crystal chip cut by lithium columbate crystal；The lithium niobate crystal chip is
Sheet-like structure, the positive and negative of lithium niobate crystal chip are each provided with a fiber waveguide area, and the section in the fiber waveguide area is circle, two
The sectional dimension in individual fiber waveguide area is identical, position is just right；Region overlay beyond the lithium niobate crystal chip surface fiber waveguide area has
Light blocking film layer；A diameter of 4 ~ 100mm in the fiber waveguide area；The Y-Z of lithium niobate crystal chip surface and lithium columbate crystal is tangential or X-Z
It is tangential parallel；The optical axis of the axial line formation polarizer in the fiber waveguide area；
Optical interface, collimation lens, polarizer and photodetector is inputted to set with optical axis, wherein, polarizer is placed in two pieces
Between collimation lens, input optical interface and photodetector is respectively arranged at the outside of two pieces of collimation lenses；
Polarizer is connected by fixture and electric rotating machine, electric rotating machine can drive polarizer using the optical axis of polarizer as
Rotary shaft is rotated；The output section of photodetector is electrically connected with signal processing circuit.
Preferably, thickness of the lithium niobate crystal chip on fiber waveguide area axial direction is 1 ~ 10mm；The lithium niobate crystal chip
It is shaped as the disc concentric with fiber waveguide area；The fiber waveguide area is made using annealed proton exchange process；The lithium niobate
Wafer surface is tangentially parallel with the Y-Z of lithium columbate crystal；The light blocking film layer uses titanium film.
The method have the benefit that：It is used to replace existing polarisation in polarization extinction ratio test device there is provided one kind
The new polarizer of prism, makes the measurement upper limit of polarization extinction ratio test device get a promotion, and improves polarization extinction ratio test dress
The performance put.
Brief description of the drawings
Fig. 1, existing polarization extinction ratio test device principle schematic；
Fig. 2, polarizer of the present invention big planar structure schematic diagram；
Fig. 3, polarizer of the present invention shaft section structural representation；
Fig. 4, polarizer of the present invention are polarized principle schematic（In figure X, Y and Z represent respectively the X of lithium columbate crystal it is tangential,
Y is tangential and Z is tangential）；
Fig. 5, polarization extinction ratio test device based on the present invention program principle schematic；
The corresponding title of the mark of each in figure is respectively：Lithium niobate crystal chip 1, fiber waveguide area 2, light blocking film layer 3, input light
Interface 4, two pieces of collimation lenses 5, electric rotating machine 6, photodetector 7, signal processing circuit 8, ahrens prism 9, the present invention it is inclined
Shake piece 10.
Embodiment
A kind of polarizer of high polarization extinction ratio, its innovation is：The matrix of the polarizer 10 is used by lithium niobate crystal
The lithium niobate crystal chip 1 of body cutting；The lithium niobate crystal chip 1 is sheet-like structure, and the positive and negative of lithium niobate crystal chip 1 are respectively set
It is equipped with a fiber waveguide area 2, the sectional dimension in Liang Ge fiber waveguides area 2 is identical, position is just right；The surface light wave of lithium niobate crystal chip 1
Leading the region overlay beyond area 2 has light blocking film layer 3；The Y-Z of the surface of lithium niobate crystal chip 1 and lithium columbate crystal is tangential or X-Z is tangential
It is parallel.
Further, the thickness of the lithium niobate crystal chip 1 is 1 ~ 10mm.
Further, the section in the fiber waveguide area 2 is circle, a diameter of 4 ~ 100mm in the fiber waveguide area 2；It is described
Lithium niobate crystal chip 1 is shaped as the disc concentric with fiber waveguide area 2.
Further, the fiber waveguide area 2 is made using annealed proton exchange process.
Further, the surface of lithium niobate crystal chip 1 is tangentially parallel with the Y-Z of lithium columbate crystal.
Further, the light blocking film layer 3 uses titanium film.
A kind of polarizer preparation method of high polarization extinction ratio, its innovation is：Following steps for manufacturing polarizer 10：
1）Lithium columbate crystal is cut into the lithium niobate crystal chip 1 of laminated structure；The surface of lithium niobate crystal chip 1 and lithium columbate crystal
Y-Z it is tangential or X-Z is tangentially parallel；
2）In the surface deposition metallic diaphragm of lithium niobate crystal chip 1, light blocking film layer 3 is formed；
3）One circular operating space is respectively set in the front and back of lithium niobate crystal chip 1, two operating space diameters are identical, position
Put relative, a diameter of 4 ~ 100mm of operating space；Using photoetching, development or etching process, the light blocking film in the range of operating space is removed
Layer 3；
4）Lithium niobate crystal chip 1 is immersed in proton source liquation and fully exchanged, lithium niobate crystal chip 1 is then inserted into annealing
Annealed in stove；
After machining, the positive and negative of lithium niobate crystal chip 1 respectively form a fiber waveguide area 2, the surface light wave of lithium niobate crystal chip 1
The region beyond area 2 is led to be covered by light blocking film layer 3.
Further, step 1）In, the lithium niobate crystal chip 1 that cuts out is shaped as the disc concentric with fiber waveguide area 2,
The thickness of lithium niobate crystal chip 1 is 1 ~ 10mm, and the surface of lithium niobate crystal chip 1 is tangentially parallel with the Y-Z of lithium columbate crystal；Step 2）In,
The metallic diaphragm uses titanium film；Step 3）In, the buffering proton source that proton source liquation is constituted using benzoic acid and lithium benzoate
Liquation.
A kind of polarization extinction ratio test device of high polarization extinction ratio, its innovation is：The polarization extinction ratio test dress
Put by input optical interface 4, two pieces of collimation lenses 5, polarizer 10, fixture, electric rotating machine 6, photodetector 7 and signal transacting electricity
Road 8 is constituted；
The matrix of the polarizer 10 uses the lithium niobate crystal chip 1 cut by lithium columbate crystal；The lithium niobate crystal
Piece 1 is sheet-like structure, and the positive and negative of lithium niobate crystal chip 1 are each provided with a fiber waveguide area 2, and the section in the fiber waveguide area 2 is
Circle, the sectional dimension in Liang Ge fiber waveguides area 2 is identical, position is just right；Beyond the surface fiber waveguide area 2 of lithium niobate crystal chip 1
Region overlay has light blocking film layer 3；A diameter of 4 ~ 100mm in the fiber waveguide area 2；The surface of lithium niobate crystal chip 1 and lithium columbate crystal
Y-Z it is tangential or X-Z is tangentially parallel；The optical axis of the axial line formation polarizer 10 in the fiber waveguide area 2；
Optical interface 4, collimation lens 5, polarizer 10 and photodetector 7 is inputted to set with optical axis, wherein, polarizer 10 is put
Between two pieces of collimation lenses 5, input optical interface 4 and photodetector 7 is respectively arranged at the outside of two pieces of collimation lenses 5；
Polarizer 10 is connected by fixture with electric rotating machine 6, and electric rotating machine 6 can drive polarizer 10 with polarizer 10
Optical axis be rotary shaft rotate；The output section of photodetector 7 is electrically connected with signal processing circuit 8.
Further, thickness of the lithium niobate crystal chip 1 on the axial direction of fiber waveguide area 2 is 1 ~ 10mm；The lithium niobate crystal
Piece 1 is shaped as the disc concentric with fiber waveguide area 2；The fiber waveguide area 2 is made using annealed proton exchange process；It is described
The surface of lithium niobate crystal chip 1 is tangentially parallel with the Y-Z of lithium columbate crystal；The light blocking film layer 3 uses titanium film.
Claims (10)
1. a kind of polarizer of high polarization extinction ratio, it is characterised in that：The polarizer（10）Matrix use by lithium niobate crystal
The lithium niobate crystal chip of body cutting（1）；The lithium niobate crystal chip（1）For sheet-like structure, lithium niobate crystal chip（1）It is positive and negative
Face is each provided with a fiber waveguide area（2）, Liang Ge fiber waveguides area（2）Sectional dimension is identical, position is just right；The lithium niobate crystal chip
（1）Surface fiber waveguide area（2）Region overlay in addition has light blocking film layer（3）；Lithium niobate crystal chip（1）Surface and lithium columbate crystal
Y-Z is tangential or X-Z is tangentially parallel.
2. the polarizer of high polarization extinction ratio according to claim 1, it is characterised in that：The lithium niobate crystal chip（1）'s
Thickness is 1 ~ 10mm.
3. the polarizer of high polarization extinction ratio according to claim 1, it is characterised in that：The fiber waveguide area（2）Cut
Face is circle, the fiber waveguide area（2）A diameter of 4 ~ 100mm；The lithium niobate crystal chip（1）Be shaped as and fiber waveguide area
（2）Concentric disc.
4. the polarizer of high polarization extinction ratio according to claim 1, it is characterised in that：The fiber waveguide area（2）Using
Annealed proton exchange process makes.
5. the polarizer of high polarization extinction ratio according to claim 1, it is characterised in that：The lithium niobate crystal chip（1）Table
Face is tangentially parallel with the Y-Z of lithium columbate crystal.
6. the polarizer of high polarization extinction ratio according to claim 1, it is characterised in that：The light blocking film layer（3）Using
Titanium film.
7. a kind of polarizer preparation method of high polarization extinction ratio, it is characterised in that：Following steps for manufacturing polarizer（10）：
1）Lithium columbate crystal is cut into the lithium niobate crystal chip of laminated structure（1）；Lithium niobate crystal chip（1）Surface and lithium columbate crystal
Y-Z it is tangential or X-Z is tangentially parallel；
2）In lithium niobate crystal chip（1）Surface deposition metallic diaphragm, forms light blocking film layer（3）；
3）In lithium niobate crystal chip（1）Front and back one circular operating space is respectively set, two operating space diameters are identical, position
Relatively, a diameter of 4 ~ 100mm of operating space；Using photoetching, development or etching process, the light blocking film layer in the range of operating space is removed
（3）；
4）By lithium niobate crystal chip（1）Fully exchanged in immersion proton source liquation, then by lithium niobate crystal chip（1）Insert annealing
Annealed in stove；
After machining, lithium niobate crystal chip（1）Positive and negative respectively formed a fiber waveguide area（2）, lithium niobate crystal chip（1）Surface light
Waveguide section（2）Region in addition is by light blocking film layer（3）Covered.
8. the polarizer preparation method of high polarization extinction ratio according to claim 7, it is characterised in that：Step 1）In, cut
The lithium niobate crystal chip cut out（1）Be shaped as and fiber waveguide area（2）Concentric disc, lithium niobate crystal chip（1）Thickness for 1 ~
10mm, lithium niobate crystal chip（1）Surface is tangentially parallel with the Y-Z of lithium columbate crystal；Step 2）In, the metallic diaphragm uses titanium
Film；Step 3）In, the buffering proton source liquation that proton source liquation is constituted using benzoic acid and lithium benzoate.
9. a kind of polarization extinction ratio test device of high polarization extinction ratio, it is characterised in that：The polarization extinction ratio test device
By input optical interface（4）, two pieces of collimation lenses（5）, polarizer（10）, fixture, electric rotating machine（6）, photodetector（7）And letter
Number process circuit（8）Composition；
The polarizer（10）Matrix use by lithium columbate crystal cut lithium niobate crystal chip（1）；The lithium niobate crystal
Piece（1）For sheet-like structure, lithium niobate crystal chip（1）Positive and negative be each provided with a fiber waveguide area（2）, the fiber waveguide area（2）
Section for circle, Liang Ge fiber waveguides area（2）Sectional dimension is identical, position is just right；The lithium niobate crystal chip（1）Surface light wave
Lead area（2）Region overlay in addition has light blocking film layer（3）；The fiber waveguide area（2）A diameter of 4 ~ 100mm；Lithium niobate crystal chip
（1）Surface and the Y-Z of lithium columbate crystal are tangential or X-Z is tangentially parallel；The fiber waveguide area（2）Axial line formation polarizer
（10）Optical axis；
Input optical interface（4）, collimation lens（5）, polarizer（10）And photodetector（7）Set with optical axis, wherein, polarizer
（10）It is placed in two pieces of collimation lenses（5）Between, input optical interface（4）And photodetector（7）It is respectively arranged at two pieces of collimations saturating
Mirror（5）Outside；
Polarizer（10）Pass through fixture and electric rotating machine（6）Drive connection, electric rotating machine（6）Polarizer can be driven（10）To polarize
Piece（10）Optical axis be rotary shaft rotate；Photodetector（7）Output section and signal processing circuit（8）Electrical connection.
10. the polarization extinction ratio test device of high polarization extinction ratio according to claim 9, it is characterised in that：The niobium
Sour lithium chip（1）In fiber waveguide area（2）Thickness on axial direction is 1 ~ 10mm；The lithium niobate crystal chip（1）Be shaped as and light wave
Lead area（2）Concentric disc；The fiber waveguide area（2）Made using annealed proton exchange process；The lithium niobate crystal chip（1）
Surface is tangentially parallel with the Y-Z of lithium columbate crystal；The light blocking film layer（3）Using titanium film.
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| JP2002082221A (en) * | 2000-09-06 | 2002-03-22 | National Institute Of Advanced Industrial & Technology | Polarization separating element |
| JP2005301248A (en) * | 2004-03-18 | 2005-10-27 | Fuji Photo Film Co Ltd | Polarizing plate having optical compensation film and liquid crystal display device using the same |
| CN103743553B (en) * | 2013-12-30 | 2016-09-14 | 哈尔滨工程大学 | The dual channel optical performance testing device of a kind of integrated waveguide manipulator and polarization crosstalk identification thereof and processing method |
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2015
- 2015-02-26 CN CN201510088214.3A patent/CN104597552B/en active Active
Non-Patent Citations (1)
| Title |
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| 高芯片偏振消光比铌酸锂多功能集成光学器件;华勇 等;《半导体光电》;20140430;第35卷(第2期);181-183 * |
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Effective date of registration: 20231213 Address after: No.23 Xiyong Avenue, Shapingba District, Chongqing 401332 Patentee after: CETC Chip Technology (Group) Co.,Ltd. Address before: 400060 No. 14 Yuanyuan Road, Nanan District, Chongqing Patentee before: CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION NO.44 Research Institute |