CN103367535B - Groove machining tool, method and the grooving apparatus of thin film solar cell - Google Patents
Groove machining tool, method and the grooving apparatus of thin film solar cell Download PDFInfo
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- CN103367535B CN103367535B CN201310105510.0A CN201310105510A CN103367535B CN 103367535 B CN103367535 B CN 103367535B CN 201310105510 A CN201310105510 A CN 201310105510A CN 103367535 B CN103367535 B CN 103367535B
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- 238000003754 machining Methods 0.000 title claims abstract description 64
- 239000010409 thin film Substances 0.000 title claims abstract description 57
- 238000000034 method Methods 0.000 title abstract description 20
- 239000010408 film Substances 0.000 claims abstract description 25
- 238000012545 processing Methods 0.000 claims abstract description 17
- 238000003672 processing method Methods 0.000 claims description 5
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 230000010354 integration Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 30
- 239000010410 layer Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 239000002346 layers by function Substances 0.000 description 3
- 238000006748 scratching Methods 0.000 description 3
- 230000002393 scratching effect Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052951 chalcopyrite Inorganic materials 0.000 description 2
- -1 chalcopyrite compound Chemical class 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- 238000012546 transfer Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C3/00—Milling particular work; Special milling operations; Machines therefor
- B23C3/28—Grooving workpieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention relates to groove machining tool, method and the grooving apparatus of thin film solar cell. A kind of groove machining tool of solar cell of can productive rate good manufacturing integration type thin film solar cell is provided. Use groove machining tool to carry out groove processing to the film of thin film solar cell, this groove machining tool, is made up of bar-shaped body and the blade tip region of the circular cone scalariform that is formed on body front end; Blade tip region has the side in the bottom surface in blade tip region and the blade tip region of extending towards body from the bottom surface in blade tip region; Bight by the bottom surface in blade tip region and the formation of the side in blade tip region forms blade tip; Attenuate and form towards body from the bottom surface in blade tip region. Technical scheme provided by the invention can make the life-span of groove machining tool elongated effectively, and distortion is also few, therefore can delineate accurately for a long time processing.
Description
Technical field
The present invention relates to a kind of groove machining tool using while manufacturing thin film solar cell and use groove processingThe groove processing method of instrument and grooving apparatus.
Background technology
At thin film solar cell, be generally the integrated-type structure that is in series with multiple unit born of the same parents on substrate.As an example of thin film solar cell, for the Huang as light absorbing zone by chalcopyrite compound semiconductorCopper mine compound is that the manufacture method of thin film solar cell describes. In addition, chalcopyrite compound,Except CIGS (Cu (In, Ga) Se2) in addition, also comprise CIGSS (Cu (In, Ga) (Se, S)2)、CIS(CuInS2) etc.
Fig. 7 (a)～7 (c) is the schematic diagram that shows the manufacture process of CIGS thin film solar cell. First,As shown in Fig. 7 (a), on the insulated substrate 1 being formed by soda-lime glass (SLG) etc., by sputtering method shapeBecome after the Mo electrode layer 2 of lower electrode of the positive side of conduct the film sun electricity before light absorbing zone is formedPond substrate is delineated processing to form the separatory groove S of lower electrode.
Afterwards, as shown in Fig. 7 (b), on Mo electrode layer 2 by vapour deposition method, sputtering method etc. form byThe light absorbing zone 3 that compound semiconductor (CIGS) film forms, thereon by CBD method (chemical bathSedimentation) be formed for the heterozygous cushion 4 being formed by ZnS film etc., form thereon byThe insulating barrier 5 that ZnO film forms. Then, the thin film solar cell substrate before transparent electrode layer is formed,Leaving both positions of set a distance from the separatory groove S of lower electrode toward transverse direction, by delineation processingThe groove M1 that the electrode Contact part of formation arrival Mo electrode layer 2 is used.
Then,, as shown in Fig. 7 (c), on insulating barrier 5, form the work being formed by ZnO:Al filmFor the transparent electrode layer 6 of upper electrode, as the required each functional layer of the generating that possesses the opto-electronic conversion utilizedSolar cell substrate, by delineation be processed to form arrive bottom Mo electrode layer 2 electrode separation useGroove M2.
In the manufacture process of above-mentioned integrated thin film solar cells, as by delineation, electrode separation being usedGroove M1 and the M2 technology of carrying out groove processing, use laser grooving and scribing method and mechanical scratching method.
Laser grooving and scribing method, for example patent documentation 1 discloses, and irradiates by continuous discharge lamps such as arc lampsMake Nd:YAG crystallization excite the laser of transmission, form whereby the groove that electrode separation is used. The method is rightThin film solar cell substrate after light absorbing zone forms forms the situation of groove, has in the time of delineation because of laserHeat make the deteriorated worry of light transfer characteristic of light absorbing zone 3.
Mechanical scratching method, for example 2 and 3 of patent documentations disclose, and are the metals that is tapered to front endThe blade tip of the groove machining tool of pin (pin) etc. both applies constant-pressure and makes it press on substrate and movement, borrowsThe technology of the separatory groove of this machined electrode.
Patent documentation 1: Japanese kokai publication hei 11-312815 communique
Patent documentation 2: Japanese kokai publication hei 2002-94089 communique
Patent documentation 3: Japanese kokai publication hei 2004-115356 communique
Because the defect that above-mentioned existing thin film solar cell and manufacture process thereof exist, the inventorBased on practical experience and the professional knowledge being engaged in this type of product design manufacture and enriching for many years, and coordinate scientific principleUtilization, actively research and innovation in addition, to founding a kind of groove processing work of new thin film solar cellTool, method and grooving apparatus, can improve general existing thin film solar cell and manufacture process thereof,Make it have more practicality. Through constantly research, design, and through repeatedly studying sample and improvementAfter, finally create the present invention who has practical value.
Summary of the invention
In the mechanical scratching method that patent documentation 2 and 3 discloses, though the shape of the blade tip of groove machining toolFor tapering needle-like, but strictly speaking, in order to make the contact-making surface of the part that is crimped on thin film solar cellLong-pending change extensively, front end approximate horizontal ground cuts off to be plane. That is as shown in Figure 8, fore-end isTapering circular cone is trapezoidal. The groove machining tool 8 ' of this kind of shape is pressed on and should form thin film solar cellThe film (the various functional layers of upper and lower two electrodes or light absorbing zone etc.) of the groove of substrate while are along delineationPreset lines relatively moves toward Y-direction, carries out whereby groove processing.
By using the tapering trapezoidal groove machining tool of circular cone of fore-end, can more stably carry out grooveProcessing. On the other hand, film can significantly be peeled off brokenly, and the part that need not remove is also removed,Have the performance of solar cell and the problem points that productive rate reduces.
Therefore, the object of the present invention is to provide a kind of at the light absorbing zone to thin film solar cell substrateOr when the various functional layer working groove of electrode film etc., productive rate is good and can suppress the product of photoelectric transformation efficiency etc.Product performance reduces the groove machining tool of the thin film solar cell of processing and uses the groove of this groove machining toolProcessing method and grooving apparatus.
The object of the invention to solve the technical problems realizes by the following technical solutions. FoundationA kind of groove machining tool of thin film solar cell that the present invention proposes, wherein by bar-shaped body and formBlade tip region in the circular cone scalariform of body front end forms; Blade tip region have Yu Cong bottom surface, bottom surface towardsThe side that body extends; Bight by bottom surface and side formation forms blade tip; From bottom surface towards bodyAttenuate and form.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The groove machining tool of aforesaid thin film solar cell, wherein the width of bottom surface be 30 μ m above,Below 100 μ m.
The groove machining tool of aforesaid thin film solar cell, the blade tip wherein forming by bottom surface and sideAngle be 65 ° above, 85 ° less than.
The groove machining tool of aforesaid thin film solar cell, wherein this groove machining tool is with superhard alloyOr diamond forms.
The object of the invention to solve the technical problems also realizes by the following technical solutions. According to thisThe groove processing method of a kind of thin film solar cell that invention proposes is the delineation along thin film solar cellPreset lines, presses and makes simultaneously this thin film solar cell and groove machining tool with the blade tip of groove machining toolRelatively move, form delineation line at the film of this thin film solar cell, will in claim 1 to 4, appointThe bottom surface of the groove machining tool of the thin film solar cell of one claim presses on this thin film solar cellThe surface of film is to carry out this groove processing.
The object of the invention to solve the technical problems also realizes in addition by the following technical solutions. Comply withA kind of grooving apparatus proposing according to the present invention, wherein possesses arbitrary right in claim 1 to 4 and wantsThe groove machining tool of the thin film solar cell of asking, in order to load the platform of thin film solar cell and willThe bottom surface of this groove machining tool presses under the surperficial state of film of this solar cell carries out groove processingEngraving head.
The present invention compared with prior art has obvious advantage and beneficial effect. By above-mentioned technical sideCase, groove machining tool, method and the grooving apparatus of thin film solar cell of the present invention can reach suitableTechnological progress and practicality, and there is the extensive value in industry, it at least has following excellentPoint:
In order to solve above-mentioned problem, the groove machining tool that thin film solar cell of the present invention is used, by bar-shapedBody be formed on body front end circular cone scalariform blade tip region form; Blade tip region has bottom surfaceWith the side of extending towards body from bottom surface; Bight by bottom surface and side formation forms blade tip; FromBottom surface attenuates and forms towards body.
Again, in order to solve above-mentioned problem, the groove processing method of thin film solar cell of the present invention, is edgeThe delineation preset lines of thin film solar cell substrate, press and make too simultaneously with the blade tip of groove machining toolSun cell substrates and groove machining tool relatively move, and form delineation line at the film of solar cell substrate,Use groove machining tool of the present invention, the bottom surface of groove machining tool is pressed on to thin film solar cell substrateSurface to carry out groove processing.
Moreover, in order to solve above-mentioned problem, the grooving apparatus of thin film solar cell of the present invention, toolFor groove machining tool of the present invention, in order to load the platform of solar cell substrate and groove is being processed to workThe bottom surface of tool presses on the engraving head of delineating under the surperficial state of this thin film solar cell substrate.
According to groove machining tool of the present invention, because blade tip region is from pressing on thin film solar cell substrateBottom surface attenuate and form towards body, therefore the film from substrate is removed is swimmingly toward base side rowGo out, the impact of the film after can not removed, can form film and peel off less delineation line.
Whereby, the life-span of instrument is elongated, and distortion is also few, therefore can delineate accurately for a long timeProcessing.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, of the present invention in order to better understandTechnological means, and can being implemented according to the content of description, and for allow of the present invention above-mentioned andOther objects, feature and advantage can become apparent, below especially exemplified by preferred embodiment, and coordinate attachedFigure, is described in detail as follows.
Brief description of the drawings
Fig. 1 is an example that shows the grooving apparatus of integrated thin film solar cells of the present inventionStereogram.
Fig. 2 is the stereogram of groove machining tool of the present invention.
Fig. 3 is the bottom surface enlarged drawing of above-mentioned groove machining tool.
Fig. 4 is the enlarged drawing in the blade tip region of groove machining tool of the present invention.
Fig. 5 is the figure that shows the embodiment of the machining state of existing known groove machining tool.
Fig. 6 is the figure that shows the embodiment of the machining state of groove machining tool of the present invention.
Fig. 7 (a)～Fig. 7 (c) is the signal that shows the manufacture process of the thin film solar cell of general CIGSFigure.
Fig. 8 is the stereogram that shows an embodiment of existing known groove machining tool.
[main element symbol description]
W: solar cell substrate 7: engraving head
8: groove machining tool 81: body
82: blade tip region 83: the bottom surface in blade tip region
84: the side 85 in blade tip region: blade tip
Detailed description of the invention
Technological means and the merit taked for reaching predetermined goal of the invention for further setting forth the present inventionEffect, below in conjunction with accompanying drawing and preferred embodiment, adds the groove of the thin film solar cell proposing according to the present inventionIts detailed description of the invention of work instrument and grooving apparatus, structure, processing method, step, feature andEffect, is described in detail as follows.
Below, of the present invention in detail according to the graphic detailed description that shows example.
Fig. 1 is the integrated thin film solar cells delineation dress that shows use groove machining tool of the present inventionThe stereogram of the example of putting. Scoring device possesses can be toward horizontal direction (Y-direction) movement and in levelCan 90 in face the platform 18 of degree and angle θ rotation, platform 18 forms in fact solar cell substrate WMaintenance means.
With the support column 20,20 of both sides and the guide rod 21 of past directions X extension that arrange across platform 18The bridge portion 19 forming is set as across on platform 18. Keeping tool supporting mass 23 is that be mounted to can be along shapeBecome to move at the guiding element 22 of guide rod 21, move toward directions X by the rotation of motor 24.
Keeping tool supporting mass 23 to be provided with engraving head 7, be provided with in the bottom of engraving head 7 and keep tool 9,This maintenance tool 9 keeps the film surface to loading the solar cell substrate W on platform 18 to delineateThe groove machining tool 8 of processing.
Be respectively equipped with video camera 10,11 at the pedestal 12,13 that can move toward directions X and Y-direction again.Pedestal 12,13 moves along the guiding element 15 extending toward directions X on supporting station 14. Video camera 10,11 can be moving up and down with manual operation, the focus of capable of regulating photography. The shadow of taking with video camera 10,11Picture is presented at display 16,17.
Be provided with the aligning in order to ad-hoc location on the surface that is positioned in the solar cell substrate W on platform 18Mark, takes alignment mark by video camera 10,11, adjusts whereby the position of solar cell substrate W.Particularly, the table of the solar cell substrate W supporting by video camera 10,11 shooting platforms 18The alignment mark of face, the position of specific alignment mark. According to specific go out the position probing of alignment markThe direction skew in surface when mounting of solar cell substrate W, by make platform 18 rotate set angle withRevise skew.
Then,, in the time that platform 18 both moves determining deviation toward Y-direction, engraving head 7 is declined, at grooveThe blade tip of machining tool 8 presses under the surperficial state of solar cell substrate W, moves toward directions X,Along directions X, processing is delineated in the surface of solar cell substrate W. Along Y-direction to sun electricityThe situation of processing is delineated on the surface of pond substrate W, makes platform 18 90-degree rotations, carries out with above-mentionedIdentical action.
Fig. 2, Fig. 3 and Fig. 4 are the schematic diagrames that is presented at the groove machining tool 8 of the present invention's use. Fig. 2Be the stereogram from beneath, Fig. 3 is the amplification of observing the bottom surface of groove machining tool 8 from bottom surface sideFigure, Fig. 4 is the enlarged drawing in the blade tip region of the groove of side observation from the side machining tool 8. This groove processing workTool 8 is in fact by the cylindrical body 81 of the installation portion as to engraving head 7 and in its leading section oneThe blade tip region 82 that ground forms forms, with the hard material manufacture of superhard alloy or diamond etc. Blade tipRegion 82 by the bottom surface 83 in circular blade tip region with the outer rim of the bottom surface 83 from blade tip region towards thisThe side 84 in the blade tip region that body 81 rises forms. By the bottom surface 83 and blade tip region in blade tip regionThe bight that forms, side 84 become blade tip 85.
The width W of the bottom surface 83 in blade tip region is preferably 50～80 μ m, but coordinates the groove of the delineation requiringWide 30～100 μ m that can be. Again, the side 84 in the effective depth in blade tip region 82 that is blade tip regionHeight H be preferably 10 μ m～230 μ m degree. Again, the bottom surface 83 and blade tip region in blade tip regionThe angle in the bight that forms, side 84 be preferably 65 °～85 °. Moreover, cylindrical body 81Diameter is 2～4mm degree. In addition, the body 81 of groove machining tool 8 is not limited to cylindric,Form and also can with section quadrangle or polygonal.
The situation that uses above-mentioned groove machining tool 8 to process, in the blade tip region in blade tip region 82Bottom surface 83 is along the state of the moving direction of instrument and parallel with respect to the surface of solar cell substrate WUnder state, be installed on engraving head 7.
According to the present invention, blade tip region 82 is from pressing on the blade tip region of thin film solar cell substrate WBottom surface 83 attenuates and forms towards body 81, and therefore the film from substrate is removed is swimmingly toward bodySide is discharged, and the impact of the film after can not removed, can form film and peel off less delineation line.
Fig. 5 is delineation line and the groove machining tool of the present invention that groove machining tool more in the past formsThe image data of the delineation line forming. Fig. 5 shows to use existing known groove machining tool to formDelineation line, Fig. 6 shows the delineation line that uses groove machining tool of the present invention to form. Using thisThe groove machining tool of invention forms the situation of delineation line, with existing known comparing, can form significantlyCertain width and beautiful delineation line.
In addition, in above-described embodiment, by making engraving head 7 move to carry out delineation processing toward directions X,But as long as engraving head 7 can relatively move with solar cell substrate W, therefore at solar cell substrate WUnder fixing state, make engraving head 7 toward directions X or Y-direction also move can, do not make engraving head 7 moveAnd only make solar cell substrate W move and also can toward directions X or Y-direction.
Groove machining tool, groove processing side that the present invention uses applicable to the manufacture of thin film solar cellMethod and grooving apparatus.
The above, be only preferred embodiment of the present invention, not the present invention made to any formOn restriction, although the present invention disclose as above with preferred embodiment, but not in order to limit thisBright, any those skilled in the art, are not departing within the scope of technical solution of the present invention, when canUtilize the technology contents of above-mentioned announcement to make a little change or be modified to the equivalent embodiment of equivalent variations,In every case be the content that does not depart from technical solution of the present invention, foundation technical spirit of the present invention is to above enforcementExample any simple modification, equivalent variations and the modification done, all still belong to the model of technical solution of the present inventionIn enclosing.
Claims (6)
1. one kind is moved and is removed by edge delineation preset lines under the state that presses on thin film solar cellThe groove machining tool of the film of described thin film solar cell, is characterized in that:
Formed by bar-shaped body and the blade tip region of circular cone scalariform of the front end that is formed on described body;
Described blade tip region, has circular bottom surface and prolongs towards described body from the outer rim of described bottom surfaceThe side of stretching, and the bight that is formed as being formed by described bottom surface and described side forms blade tip, from describedBottom surface attenuates towards described body.
2. according to the groove machining tool of the thin film solar cell of claim 1, it is characterized in that wherein instituteThe width of stating bottom surface is more than 30 μ m and below 100 μ m.
3. according to the groove machining tool of the thin film solar cell of claim 1, it is characterized in that wherein byMore than the angle of the described blade tip that described bottom surface and described side form is 65 ° and less than 85 °.
4. according to the groove machining tool of the thin film solar cell of claim 1, wherein should it is characterized in thatGroove machining tool is to form with superhard alloy or diamond.
5. a groove processing method for thin film solar cell is predetermined along the delineation of thin film solar cellLine, presses and makes simultaneously described thin film solar cell and described groove processing work with the blade tip of groove machining toolTool relatively moves, and forms delineation line at the film of described thin film solar cell, it is characterized in that: will weighProfit require the thin film solar cell of arbitrary claim in 1 to 4 groove machining tool described bottom surface byBe pressed on the surface of film of described thin film solar cell to carry out this groove processing.
6. a grooving apparatus, is characterized in that possessing arbitrary claim in claim 1 to 4Thin film solar cell groove machining tool, in order to load the platform of thin film solar cell and by instituteThe bottom surface of stating groove machining tool presses under the surperficial state of film of this solar cell carries out groove processingEngraving head.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-081865 | 2012-03-30 | ||
| JP2012081865A JP5804999B2 (en) | 2012-03-30 | 2012-03-30 | Groove machining tool, groove machining method and groove machining apparatus for thin-film solar cell using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103367535A CN103367535A (en) | 2013-10-23 |
| CN103367535B true CN103367535B (en) | 2016-05-25 |
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| CN201310105510.0A Expired - Fee Related CN103367535B (en) | 2012-03-30 | 2013-03-28 | Groove machining tool, method and the grooving apparatus of thin film solar cell |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5804999B2 (en) |
| KR (1) | KR101512705B1 (en) |
| CN (1) | CN103367535B (en) |
| TW (1) | TWI498295B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6406006B2 (en) * | 2014-03-28 | 2018-10-17 | 三星ダイヤモンド工業株式会社 | Grooving tool and scribing device equipped with the groove machining tool |
| CN104952971B (en) * | 2014-03-28 | 2017-09-19 | 三星钻石工业股份有限公司 | Groove processing instrument and the scoring device for being provided with the groove processing instrument |
| JP6332618B2 (en) * | 2014-04-24 | 2018-05-30 | 三星ダイヤモンド工業株式会社 | Scribing cutter wheel and scribing device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101859811A (en) * | 2009-04-01 | 2010-10-13 | 三星钻石工业股份有限公司 | Manufacturing unit for integrated thin film solar cells |
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|---|---|---|---|---|
| US4083390A (en) * | 1972-09-22 | 1978-04-11 | R.E. Ingham & Co., Limited | Grooving of sheet material |
| JPH03161209A (en) * | 1989-11-17 | 1991-07-11 | Fujitsu Ltd | Working of taper hole and working device thereof |
| JP2000315809A (en) * | 1999-03-04 | 2000-11-14 | Matsushita Electric Ind Co Ltd | Fabrication of integrated thin film solar cell and patterning system |
| JP2002033498A (en) * | 2000-07-17 | 2002-01-31 | Matsushita Electric Ind Co Ltd | Manufacturing method for integrated thin-film solar cell and patterning apparatus |
| KR100633488B1 (en) * | 2001-11-08 | 2006-10-13 | 샤프 가부시키가이샤 | Method and device for parting glass substrate, and liquid crystal panel manufacturing device |
| JP3867230B2 (en) * | 2002-09-26 | 2007-01-10 | 本田技研工業株式会社 | Mechanical scribing device |
| KR20050115793A (en) * | 2004-06-05 | 2005-12-08 | 주식회사 대흥케미칼 | Multi-cutting bite for machine tool |
| JP4580325B2 (en) * | 2005-11-14 | 2010-11-10 | 本田技研工業株式会社 | Reamer, drill and processing method |
| JP2007245278A (en) * | 2006-03-15 | 2007-09-27 | Mitsubishi Materials Kobe Tools Corp | End mill |
| JP2009119543A (en) * | 2007-11-13 | 2009-06-04 | Toshiba Corp | Fine machining tool, manufacturing method of the fine machining tool, precision device, and manufacturing method of the precision device |
| JP2009255189A (en) * | 2008-04-14 | 2009-11-05 | Sodick Co Ltd | Tool changing system of machining center |
| JP2010199242A (en) * | 2009-02-24 | 2010-09-09 | Mitsuboshi Diamond Industrial Co Ltd | Method for manufacturing integrated thin-film solar cell |
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| TWI451587B (en) * | 2010-01-08 | 2014-09-01 | Mitsuboshi Diamond Ind Co Ltd | Groove machining tool for use with a thin-film solar cell |
| JP5369011B2 (en) * | 2010-01-27 | 2013-12-18 | 三星ダイヤモンド工業株式会社 | Grooving tool and method for grooving thin film solar cell using the same |
-
2012
- 2012-03-30 JP JP2012081865A patent/JP5804999B2/en not_active Expired - Fee Related
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2013
- 2013-03-08 TW TW102108199A patent/TWI498295B/en active
- 2013-03-21 KR KR1020130030249A patent/KR101512705B1/en not_active IP Right Cessation
- 2013-03-28 CN CN201310105510.0A patent/CN103367535B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101859811A (en) * | 2009-04-01 | 2010-10-13 | 三星钻石工业股份有限公司 | Manufacturing unit for integrated thin film solar cells |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI498295B (en) | 2015-09-01 |
| TW201339114A (en) | 2013-10-01 |
| CN103367535A (en) | 2013-10-23 |
| KR101512705B1 (en) | 2015-04-16 |
| JP5804999B2 (en) | 2015-11-04 |
| KR20130111328A (en) | 2013-10-10 |
| JP2013211465A (en) | 2013-10-10 |
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