CN103367535A - Tool and method for processing groove of thin film solar cell, and groove processing device - Google Patents
Tool and method for processing groove of thin film solar cell, and groove processing device Download PDFInfo
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- CN103367535A CN103367535A CN2013101055100A CN201310105510A CN103367535A CN 103367535 A CN103367535 A CN 103367535A CN 2013101055100 A CN2013101055100 A CN 2013101055100A CN 201310105510 A CN201310105510 A CN 201310105510A CN 103367535 A CN103367535 A CN 103367535A
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- 239000010409 thin film Substances 0.000 title claims abstract description 59
- 238000012545 processing Methods 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title abstract description 20
- 238000003754 machining Methods 0.000 claims description 64
- 239000010408 film Substances 0.000 claims description 21
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000003672 processing method Methods 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 206010009691 Clubbing Diseases 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 33
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000005755 formation reaction Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 229910052951 chalcopyrite Inorganic materials 0.000 description 3
- -1 chalcopyrite compound Chemical class 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000002346 layers by function Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000006748 scratching Methods 0.000 description 3
- 230000002393 scratching effect Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000224 chemical solution deposition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C3/00—Milling particular work; Special milling operations; Machines therefor
- B23C3/28—Grooving workpieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention relates to a tool and a method for processing a groove of a thin film solar cell, and a groove processing device. The tool for processing a groove of an integrated thin film solar cell is provided, and the tool has good yield. The groove processing tool is used to perform groove processing on a thin film of a solar cell. The groove processing tool is formed by a clubbed body and a conical scalariform point region on a front end of the body. The point region is provided with a bottom of the point region, and a side surface of the point region which extends from the bottom of the point region towards the body. A point is formed by a corner, and the corner is formed by the bottom of the point region and the side surface of the point region. The tool becomes thin from the bottom of the point region to the body.
Description
Technical field
The present invention relates to a kind of groove machining tool that uses when making thin film solar cell and use groove processing method and the grooving apparatus of groove machining tool.
Background technology
At thin film solar cell, be generally the integrated-type structure that is in series with a plurality of unit born of the same parents at substrate.As an example of thin film solar cell, for being that the manufacture method of thin film solar cell describes with the chalcopyrite compound semiconductor as the chalcopyrite compound of light absorbing zone.In addition, chalcopyrite compound is except CIGS (Cu (In, Ga) Se
2) in addition, also comprise CIGSS (Cu (In, Ga) (Se, S)
2), CIS (CuInS
2) etc.
Fig. 7 (a)～7 (c) is the schematic diagram that shows the manufacture process of CIGS thin film solar cell.At first, shown in Fig. 7 (a), on the insulated substrate 1 by formations such as soda-lime glasss (SLG), behind the Mo electrode layer 2 of sputtering method formation as the lower electrode of positive side, light absorbing zone is formed front thin film solar cell substrate delineate processing with the separatory groove S of formation lower electrode.
Afterwards, shown in Fig. 7 (b), on Mo electrode layer 2, form the light absorbing zone 3 that is consisted of by compound semiconductor (CIGS) film by vapour deposition method, sputtering method etc., be formed for the heterozygous resilient coating 4 that is consisted of by ZnS film etc. by CBD method (chemical bath deposition) thereon, form the insulating barrier 5 that is consisted of by ZnO film thereon.Then, to the thin film solar cell substrate of transparent electrode layer before forming, leave both positions of set a distance from the separatory groove S of lower electrode toward transverse direction, be processed to form the groove M1 that the electrode Contact spare that arrives Mo electrode layer 2 is used by delineation.
Then, shown in Fig. 7 (c), on insulating barrier 5, form the transparent electrode layer 6 as upper electrode that is consisted of by the ZnO:Al film, as the solar cell substrate of each required functional layer of the generating that possesses the opto-electronic conversion utilized, be processed to form the groove M2 that the electrode separation of the Mo electrode layer 2 that arrives the bottom is used by delineation.
In the manufacture process of above-mentioned integrated thin film solar cells, carry out the technology that groove is processed as the groove M1 and the M2 that electrode separation are used by delineation, use laser grooving and scribing method and mechanical scratching method.
The laser grooving and scribing method, for example patent documentation 1 discloses, and irradiation makes the Nd:YAG crystallization excite the laser of transmission by continuous discharge lamps such as arc lamps, forms whereby the groove that electrode separation is used.The method, the thin film solar cell substrate after light absorbing zone formed forms the situation of groove, has the deteriorated worry of light transfer characteristic that makes light absorbing zone 3 when delineation because of the heat of laser.
The mechanical scratching method, for example patent documentation 2 and 3 announcements are to be that the blade tip of groove machining tool of the metal needle (pin) etc. of tapered both applies constant-pressure and makes it press on substrate and movement to front end, whereby the technology of the separatory groove of machined electrode.
Patent documentation 1: Japanese kokai publication hei 11-312815 communique
Patent documentation 2: Japanese kokai publication hei 2002-94089 communique
Patent documentation 3: Japanese kokai publication hei 2004-115356 communique
Because the defective that above-mentioned existing thin film solar cell and manufacture process thereof exist, the inventor is based on being engaged in for many years abundant practical experience and professional knowledge of this type of product design manufacturing, and the utilization of cooperation scientific principle, positive research and innovation in addition, to founding a kind of groove machining tool, method and grooving apparatus of new thin film solar cell, can improve general existing thin film solar cell and manufacture process thereof, make it have more practicality.Through constantly research, design, and through after repeatedly studying sample and improvement, finally create the present invention who has practical value.
Summary of the invention
In the mechanical scratching method that patent documentation 2 and 3 discloses, though the shape of the blade tip of groove machining tool is the needle-like of taper, strictly speaking, for the contact area that makes the part that is crimped on thin film solar cell becomes wide, front end approximate horizontal ground cuts off to be the plane.That is as shown in Figure 8, fore-end is that the circular cone of taper is trapezoidal.The film (the up and down various functional layers of two electrodes or light absorbing zone etc.) and the while that the groove machining tool 8 ' of this kind shape are pressed on the groove that should form the thin film solar cell substrate relatively move toward Y-direction along the delineation preset lines, carry out whereby groove processing.
By the trapezoidal groove machining tool of circular cone that uses the fore-end taper, can more stably carry out groove processing.On the other hand, film can significantly be peeled off brokenly, and the part that need not remove also is removed, and has the performance of solar cell and the problem points that productive rate reduces.
Therefore, the object of the present invention is to provide a kind of to the various functional layer processing groove of the light absorbing zone of thin film solar cell substrate or electrode film etc. the time, productive rate properties of product good and that can suppress photoelectric conversion efficiency etc. reduce ground processing thin film solar cell the groove machining tool and use groove processing method and the grooving apparatus of this groove machining tool.
The object of the invention to solve the technical problems realizes by the following technical solutions.The groove machining tool of a kind of thin film solar cell that proposes according to the present invention wherein is made of bar-shaped body and the blade tip zone that is formed on the circular cone scalariform of body front end; The blade tip zone have the bottom surface with from the bottom surface towards the side that body extends; Bight by bottom surface and side formation consists of blade tip; Form from the bottom surface towards body with attenuating.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The groove machining tool of aforesaid thin film solar cell, wherein the width of bottom surface is more than the 30 μ m, below the 100 μ m.
The groove machining tool of aforesaid thin film solar cell, the angle of the blade tip that wherein forms by bottom surface and side be more than 65 °, 85 ° less than.
The groove machining tool of aforesaid thin film solar cell, wherein this groove machining tool is to form with superhard alloy or diamond.
The object of the invention to solve the technical problems also realizes by the following technical solutions.The groove processing method of a kind of thin film solar cell that proposes according to the present invention, it is the delineation preset lines along thin film solar cell, press and make simultaneously this thin film solar cell and groove machining tool to relatively move with the blade tip of groove machining tool, form the delineation line at the film of this thin film solar cell, the bottom surface of the groove machining tool of the thin film solar cell of arbitrary claim in the claim 1 to 4 is pressed on the surface of film of this thin film solar cell to carry out this groove processing.
The object of the invention to solve the technical problems also realizes in addition by the following technical solutions.According to a kind of grooving apparatus that the present invention proposes, wherein possess the groove machining tool of the thin film solar cell of arbitrary claim in the claim 1 to 4, in order to the platform that loads thin film solar cell, and press on the engraving head that carries out groove processing under the state on surface of film of this solar cell in the bottom surface with this groove machining tool.
The present invention compared with prior art has obvious advantage and beneficial effect.By technique scheme, groove machining tool, method and the grooving apparatus of thin film solar cell of the present invention can reach suitable technological progress and practicality, and has the extensive value on the industry, and it has following advantages at least:
In order to solve above-mentioned problem, the groove machining tool that thin film solar cell of the present invention is used is made of bar-shaped body and the blade tip zone that is formed on the circular cone scalariform of body front end; The blade tip zone have the bottom surface with from the bottom surface towards the side that body extends; Bight by bottom surface and side formation consists of blade tip; Form from the bottom surface towards body with attenuating.
Again, in order to solve above-mentioned problem, the groove processing method of thin film solar cell of the present invention, it is the delineation preset lines along the thin film solar cell substrate, press and make simultaneously solar cell substrate and groove machining tool to relatively move with the blade tip of groove machining tool, form the delineation line at the film of solar cell substrate, use groove machining tool of the present invention, the bottom surface of groove machining tool is pressed on the surface of thin film solar cell substrate to carry out groove processing.
Moreover, in order to solve above-mentioned problem, the grooving apparatus of thin film solar cell of the present invention, possess groove machining tool of the present invention, in order to the platform that loads solar cell substrate, and press on the engraving head of delineating under the state on surface of this thin film solar cell substrate in the bottom surface with the groove machining tool.
According to groove machining tool of the present invention, because the blade tip zone forms towards body from the bottom surface that presses on the thin film solar cell substrate with attenuating, therefore the film after removing from substrate is discharged toward base side swimmingly, and the impact of the film after can not removed can form film and peel off less delineation line.
Whereby, the life-span of instrument is elongated, and distortion is also few, therefore can delineate accurately for a long time processing.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of specification, and for above and other purpose of the present invention, feature and advantage can be become apparent, below especially exemplified by preferred embodiment, and the cooperation accompanying drawing, be described in detail as follows.
Description of drawings
Fig. 1 is the stereogram of an example that shows the grooving apparatus of integrated thin film solar cells of the present invention.
Fig. 2 is the stereogram of groove machining tool of the present invention.
Fig. 3 is the bottom surface enlarged drawing of above-mentioned groove machining tool.
Fig. 4 is the enlarged drawing in the blade tip zone of groove machining tool of the present invention.
Fig. 5 is the figure that shows the embodiment of the machining state that has known groove machining tool now.
Fig. 6 is the figure of embodiment that shows the machining state of groove machining tool of the present invention.
Fig. 7 (a)～Fig. 7 (c) is the schematic diagram of manufacture process that shows the thin film solar cell of general CIGS.
Fig. 8 is the stereogram that shows an embodiment who has known groove machining tool now.
[main element symbol description]
W: solar cell substrate 7: engraving head
8: groove machining tool 81: body
82: blade tip zone 83: the bottom surface in blade tip zone
84: the side 85 in blade tip zone: blade tip
Embodiment
Reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, groove machining tool and its embodiment of grooving apparatus, structure, processing method, step, feature and the effect thereof of the thin film solar cell that foundation the present invention is proposed are described in detail as follows.
Below, of the present invention in detail according to the graphic detailed description that shows example.
Fig. 1 is the stereogram that the integrated thin film solar cells of demonstration use groove machining tool of the present invention is used the example of scoring device.Scoring device possesses can be toward horizontal direction (Y-direction) mobile and can 90 degree in horizontal plane and the platform 18 of angle θ rotation, and platform 18 forms in fact the maintenance means of solar cell substrate W.
With the support column 20 of the both sides that arrange across platform 18,20 with bridge section 19 toward guide rod 21 formations of directions X extension be set as across platform 18 on.Keeping tool supporting mass 23 is to be mounted to move along the guiding element 22 that is formed on guide rod 21, moves toward directions X by the rotation of motor 24.
Keeping tool supporting mass 23 to be provided with engraving head 7, be provided with maintenance tool 9 in the bottom of engraving head 7, this maintenance tool 9 keeps the film surface that loads the solar cell substrate W on platform 18 is delineated the groove machining tool 8 of processing.
Can be respectively equipped with video camera 10,11 toward the pedestal 12,13 that directions X and Y-direction move again.Pedestal 12,13 moves along the guiding element 15 that extends toward directions X on supporting station 14.Video camera 10,11 can be moving up and down with manual operation, the focus of capable of regulating photography.The image displays of taking with video camera 10,11 are at display 16,17.
Be provided with the alignment mark in order to ad-hoc location on the surface that is positioned in the solar cell substrate W on the platform 18, take alignment marks by video camera 10,11, adjust whereby the position of solar cell substrate W.Particularly, the alignment mark on the surface of the solar cell substrate W that supports by video camera 10,11 shooting platforms 18, the position of specific alignment mark.Direction skew during according to the surface mounting of the position probing solar cell substrate W of the specific alignment mark that goes out is by making the set angle of platform 18 rotations to revise skew.
Then, when platform 18 both moves determining deviation toward Y-directions, engraving head 7 is descended, press at the blade tip of groove machining tool 8 under the state on surface of solar cell substrate W, move toward directions X, along directions X processing is delineated on the surface of solar cell substrate W.The surface of solar cell substrate W is delineated the situation of processing along Y-direction, make platform 18 90-degree rotations, carry out action same as described above.
Fig. 2, Fig. 3 and Fig. 4 are the schematic diagrames that is presented at the groove machining tool 8 of the present invention's use.Fig. 2 is the stereogram from beneath, and Fig. 3 is the enlarged drawing of observing the bottom surface of groove machining tool 8 from bottom surface side, and Fig. 4 is the enlarged drawing in the blade tip zone of from the side side observation groove machining tool 8.This groove machining tool 8 in fact by as to the cylindrical body 81 of the installation portion of engraving head 7 with consist of in the blade tip zone 82 that its leading section forms, with the hard material manufacturing of superhard alloy or diamond etc.Blade tip zone 82 is made of towards the side 84 in the blade tip zone that body 81 rises the bottom surface 83 in the blade tip zone of circle and outer rim from the bottom surface 83 in blade tip zone.The bight that forms by the side 84 in the bottom surface 83 in blade tip zone and blade tip zone becomes blade tip 85.
The width W of the bottom surface 83 in blade tip zone is preferably 50～80 μ m, but cooperates the groove width of the delineation that requires to can be 30～100 μ m.Again, the height H of the side 84 in the effective depth in blade tip zone 82 that is blade tip zone is preferably 10 μ m～230 μ m degree.Again, the bottom surface 83 in blade tip zone is preferably 65 °～85 ° with the angle in the 84 formed bights, side in blade tip zone.Moreover the diameter of cylindrical body 81 is that 2～4mm degree gets final product.In addition, the body 81 of groove machining tool 8 is not limited to cylindric, forms with section quadrangle or polygonal and also can.
The situation of using above-mentioned groove machining tool 8 to process under the state and the surperficial parallel state with respect to solar cell substrate W of the moving direction of instrument, is installed on engraving head 7 in the bottom surface 83 in the blade tip zone in blade tip zone 82.
According to the present invention, blade tip zone 82 forms towards body 81 from the bottom surface 83 in the blade tip zone that presses on thin film solar cell substrate W with attenuating, therefore the film after removing from substrate is discharged toward base side swimmingly, and the impact of the film after can not removed can form film and peel off less delineation line.
Fig. 5 be more in the past the formed delineation line of groove machining tool and the image data of the formed delineation line of groove machining tool of the present invention.Fig. 5 shows the delineation line that uses existing known groove machining tool to form, and Fig. 6 shows the delineation line that uses groove machining tool of the present invention to form.Using groove machining tool of the present invention to form the situation of delineation line, with existing known comparing, can form significantly certain width and beautiful delineation line.
In addition, in above-described embodiment, by making engraving head 7 move to carry out delineation processing toward directions X, but as long as engraving head 7 can relatively move with solar cell substrate W, therefore under the fixing state of solar cell substrate W, make engraving head 7 toward directions Xs or Y-direction also move can, engraving head 7 is moved and solar cell substrate W is moved toward directions X or Y-direction also can.
The present invention is applicable to the employed groove machining tool of the manufacturing of thin film solar cell, groove processing method and grooving apparatus.
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, although the present invention discloses as above with preferred embodiment, yet be not to limit the present invention, any those skilled in the art, within not breaking away from the technical solution of the present invention scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be the content that does not break away from technical solution of the present invention, any simple modification that foundation technical spirit of the present invention is done above embodiment, equivalent variations and modification all still belong in the scope of technical solution of the present invention.
Claims (6)
1. the groove machining tool of a thin film solar cell is characterized in that being made of bar-shaped body and the blade tip zone that is formed on the circular cone scalariform of body front end;
The blade tip zone have the bottom surface with from the bottom surface towards the side that body extends;
Bight by bottom surface and side formation consists of blade tip;
Form from the bottom surface towards body with attenuating.
2. according to claim 1 the groove machining tool of thin film solar cell, it is characterized in that wherein the width of bottom surface be 30 μ m above, below the 100 μ m.
3. according to claim 1 the groove machining tool of thin film solar cell, the angle that it is characterized in that wherein the blade tip that forms by bottom surface and side be more than 65 °, 85 ° less than.
4. according to claim 1 the groove machining tool of thin film solar cell is characterized in that wherein this groove machining tool is to form with superhard alloy or diamond.
5. the groove processing method of a thin film solar cell, it is the delineation preset lines along thin film solar cell, press and make simultaneously this thin film solar cell and groove machining tool to relatively move with the blade tip of groove machining tool, form the delineation line at the film of this thin film solar cell, it is characterized in that: the bottom surface of the groove machining tool of the thin film solar cell of arbitrary claim in the claim 1 to 4 is pressed on the surface of film of this thin film solar cell to carry out this groove processing.
6. grooving apparatus, it is characterized in that possessing the groove machining tool of the thin film solar cell of arbitrary claim in the claim 1 to 4, in order to the platform that loads thin film solar cell, and press on the engraving head that carries out groove processing under the state on surface of film of this solar cell in the bottom surface with this groove machining tool.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012081865A JP5804999B2 (en) | 2012-03-30 | 2012-03-30 | Groove machining tool, groove machining method and groove machining apparatus for thin-film solar cell using the same |
| JP2012-081865 | 2012-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103367535A true CN103367535A (en) | 2013-10-23 |
| CN103367535B CN103367535B (en) | 2016-05-25 |
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ID=49368481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310105510.0A Expired - Fee Related CN103367535B (en) | 2012-03-30 | 2013-03-28 | Groove machining tool, method and the grooving apparatus of thin film solar cell |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5804999B2 (en) |
| KR (1) | KR101512705B1 (en) |
| CN (1) | CN103367535B (en) |
| TW (1) | TWI498295B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104952971A (en) * | 2014-03-28 | 2015-09-30 | 三星钻石工业股份有限公司 | Groove processing tool and scoring device with same |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6406006B2 (en) * | 2014-03-28 | 2018-10-17 | 三星ダイヤモンド工業株式会社 | Grooving tool and scribing device equipped with the groove machining tool |
| JP6332618B2 (en) * | 2014-04-24 | 2018-05-30 | 三星ダイヤモンド工業株式会社 | Scribing cutter wheel and scribing device |
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| KR20050115793A (en) * | 2004-06-05 | 2005-12-08 | 주식회사 대흥케미칼 | Multi-cutting bite for machine tool |
| JP2009119543A (en) * | 2007-11-13 | 2009-06-04 | Toshiba Corp | Fine machining tool, manufacturing method of the fine machining tool, precision device, and manufacturing method of the precision device |
| CN101859811A (en) * | 2009-04-01 | 2010-10-13 | 三星钻石工业股份有限公司 | Manufacturing unit for integrated thin film solar cells |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4083390A (en) * | 1972-09-22 | 1978-04-11 | R.E. Ingham & Co., Limited | Grooving of sheet material |
| JPH03161209A (en) * | 1989-11-17 | 1991-07-11 | Fujitsu Ltd | Working of taper hole and working device thereof |
| JP2000315809A (en) * | 1999-03-04 | 2000-11-14 | Matsushita Electric Ind Co Ltd | Fabrication of integrated thin film solar cell and patterning system |
| JP2002033498A (en) * | 2000-07-17 | 2002-01-31 | Matsushita Electric Ind Co Ltd | Manufacturing method for integrated thin-film solar cell and patterning apparatus |
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- 2013-03-21 KR KR1020130030249A patent/KR101512705B1/en not_active IP Right Cessation
- 2013-03-28 CN CN201310105510.0A patent/CN103367535B/en not_active Expired - Fee Related
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| CN104952971A (en) * | 2014-03-28 | 2015-09-30 | 三星钻石工业股份有限公司 | Groove processing tool and scoring device with same |
| CN104952971B (en) * | 2014-03-28 | 2017-09-19 | 三星钻石工业股份有限公司 | Groove processing instrument and the scoring device for being provided with the groove processing instrument |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130111328A (en) | 2013-10-10 |
| JP2013211465A (en) | 2013-10-10 |
| CN103367535B (en) | 2016-05-25 |
| JP5804999B2 (en) | 2015-11-04 |
| TW201339114A (en) | 2013-10-01 |
| TWI498295B (en) | 2015-09-01 |
| KR101512705B1 (en) | 2015-04-16 |
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