CN103303676B - A kind of automation equipment picking and placeing large scale liquid crystal substrate - Google Patents
A kind of automation equipment picking and placeing large scale liquid crystal substrate Download PDFInfo
- Publication number
- CN103303676B CN103303676B CN201310241086.2A CN201310241086A CN103303676B CN 103303676 B CN103303676 B CN 103303676B CN 201310241086 A CN201310241086 A CN 201310241086A CN 103303676 B CN103303676 B CN 103303676B
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- pallet
- cushion rubber
- card casket
- substrate
- station
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- 239000000758 substrate Substances 0.000 title claims abstract description 124
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 34
- 229920001971 elastomer Polymers 0.000 claims abstract description 118
- 239000005060 rubber Substances 0.000 claims abstract description 118
- 239000013078 crystal Substances 0.000 claims abstract description 73
- 239000007788 liquid Substances 0.000 claims abstract description 73
- 238000003825 pressing Methods 0.000 claims description 45
- 230000003028 elevating effect Effects 0.000 claims description 10
- 238000010521 absorption reaction Methods 0.000 claims description 5
- 238000007667 floating Methods 0.000 claims description 5
- 238000007598 dipping method Methods 0.000 claims description 3
- 238000013467 fragmentation Methods 0.000 abstract description 5
- 238000006062 fragmentation reaction Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 17
- 238000000034 method Methods 0.000 description 17
- 238000000354 decomposition reaction Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 241000252254 Catostomidae Species 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Liquid Crystal (AREA)
Abstract
The embodiment of the invention discloses a kind of automation equipment picking and placeing large scale liquid crystal substrate, comprising: card casket lifting module, card casket push-and-pull module, cushion rubber pick and place module and substrate lifting body.According to embodiments of the invention, can automatically pick and place large scale liquid crystal substrate, thus save manpower, promote production capacity, reduce the generation of the fragmentation situation of crystal liquid substrate.
Description
Technical field
The present invention relates to thin film transistor (ThinFilmTransistor, TFT) technology, particularly a kind of automation equipment picking and placeing large scale liquid crystal substrate.
Background technology
In recent years, the demand of market to more than 55 cun large scale liquid crystal substrates is increasing.But; because large size panel size is large; thickness is thin; when needs transport large size panel at a distance; such as test demand or the far apart situation of front and back process apparatus, need trans-regional, across floor, across, across factory's conveyance, conveyance instrument smoothness planeness that is poor or ground when moving is poor and cause vibrations of jolting; if protect bad, very easily cause panel ruptures.
Current manufacturing line generally adopt tool (as pallet) place large scale liquid crystal substrate, but, if by manually crystal liquid substrate being put into pallet, or take out from pallet, operating process is very difficult, not only needs to expend a lot of time and a lot of manpowers, and careless slightly, will crystal liquid substrate be damaged, therefore how realize safety and pick and place large scale liquid crystal substrate and become a technical matters anxious to be resolved.
Summary of the invention
Technical matters to be solved by this invention is, provides a kind of automation equipment picking and placeing large scale liquid crystal substrate, can safely and automatically pick and place or carry large scale liquid crystal substrate.
In order to solve the problems of the technologies described above, the one side of embodiments of the invention provides a kind of automation equipment picking and placeing large scale liquid crystal substrate, comprising:
Card casket lifting module, its inside is provided with the card casket for the multiple pallet of stacked placement, and described pallet level can skid off or slip into described card casket;
Card casket push-and-pull module, be positioned at and just skid off on an operator's station in direction to the pallet of described card casket lifting module, it for adsorbing a pallet in described card casket, and drives described pallet to slip into or skid off, and described pallet is moved between described operator's station and described card casket;
Cushion rubber picks and places module, be positioned at described operator's station side, be provided with cushion rubber fetching device, described cushion rubber fetching device can move to above described operator's station, take out for the second cushion rubber pallet be arranged on operator's station is covered on crystal liquid substrate, or the second cushion rubber to be positioned in described pallet on crystal liquid substrate;
Substrate lifting body, be positioned at below described operator's station, at least comprise multiple can the jacking pin of above-below direction movement, be positioned at the pallet on operator's station described in described jacking pin can penetrate, and be held in the bottom of the crystal liquid substrate in described pallet, described crystal liquid substrate is separated with described pallet.
Wherein, described card casket lifting module specifically comprises:
Lifting module frame, it is at least provided with opening in side;
Card casket, be arranged at described lifting module machine frame inside, its two lateral walls is provided with the strut member of band first roller, described in be placed with crystal liquid substrate pallet can be positioned on described strut member, described pallet can slip into or skid off described card casket relative to described strut member;
Elevating drive mechanism, is fixed on bottom described lifting module frame, for supporting described card casket, and drives described card casket up-and-down movement to adjust the position of described card casket.
Wherein, described elevating drive mechanism includes a lifting table, the card casket horizontal alignment cylinder for adjusting described card casket level attitude is provided with in four ends of described lifting table, and in the place that lifting table contacts with card casket, be evenly provided with multiple floating support device for adjusting described card casket upright position.
Wherein, described pallet is the box body of upper opening, and be provided with multiple jacking pin via hole bottom it, the jacking pin of substrate lifting body passes; One side is provided with at least one magnetic attracting device, for described card casket push-and-pull module absorption;
Described pallet is placed with crystal liquid substrate, is provided with the first cushion rubber between described crystal liquid substrate and described pallet, bottom described first cushion rubber, relevant position is also provided with multiple jacking pin via hole; The top of described crystal liquid substrate is coated with described second cushion rubber.
Wherein, described card casket push-and-pull module comprises:
Be arranged at the slide unit of the frame top both sides of described operator's station, be provided with the second roller, slide thereon for pallet;
Magnetic chuck, for adsorbing the magnetic attracting device on described pallet side wall when being energized;
Magnetic chuck telescopic cylinder, for driving described magnetic chuck to move, the pallet adsorbed to make it slides on described slide unit.
Wherein, described substrate lifting body comprises:
Jacking pin adapter plate, it is provided with multiple jacking pin;
Jacking cylinder, is arranged at the downside of described jacking pin adapter plate, and itself and described operator's station frame fix, and is elevated for driving described jacking pin adapter plate;
Multiple jacking guide pillar, is arranged at the downside of described jacking pin adapter plate, matches with the guide pin bushing be arranged in described operator's station frame, and described jacking pin adapter plate is flexibly connected with between described operator's station frame.
Wherein, described cushion rubber picks and places module and comprises:
Pick and place module frame, wherein can deposit multiple second cushion rubber;
Cushion rubber fetching device, the top of module frame is picked and placeed described in being arranged at, this cushion rubber fetching device can move to the top of operator's station, pick and place module frame for being taken out to be put in by second cushion rubber on the pallet crystal liquid substrate top be arranged on operator's station, or the second cushion rubber taking-up picked and placeed in module frame is positioned on the crystal liquid substrate in described pallet;
Picking and placeing module lifting mechanism, described in being fixedly installed on, pick and place the bottom of module frame, for supporting the second cushion rubber picking and placeing and deposit in module frame, and the lifting of described second cushion rubber can be driven, to adjust the position of described second cushion rubber.
Wherein, described cushion rubber fetching device comprises further:
Sliding support, it matches with the linear slide rail on an erection support, to move between described picking and placeing above module frame and described operator's station, wherein, described erection support is arranged at the both sides that cushion rubber picks and places module top, and extend to the top of described operator's station, and be provided with a linear slide rail on each erection support;
Linear motor, moves on described linear slide rail for driving described sliding support;
Pressing plate, it is flexibly connected with described sliding support, and is arranged under described sliding support, and it is for locating and compress the pallet be positioned on described operator's station;
Suction disc, it is flexibly connected with described pressing plate, is positioned at below described pressing plate, picks and places the second cushion rubber in module frame for the second cushion rubber in adsorbing tray or absorption.
Wherein, described pressing plate is formed with locating plate in four sides, for positioning pallet and compressing, being fixed with a pressing plate cylinder at the middle part of described pressing plate, carrying out dipping and heaving for driving described pressing plate;
Described suction disc comprises many pressing plate grooves, described pressing plate groove is the trough body structure under shed, on described pressing plate groove, interval arranges multiple sucker for adsorbing the second cushion rubber, described suction disc is also provided with at least one suction disc cylinder, for driving the lifting of described suction disc and controlling the opening and closing of described sucker.
Wherein, comprise further:
Substrate fetching device, it comprises a cross bar and is arranged at the multiple parallel supporting blade on described cross bar, and wherein, described multiple supporting blade is roughly in the same plane, and the one side that each supporting blade contacts with crystal liquid substrate is provided with multiple bumper ring.
Implement the embodiment of the present invention, there is following beneficial effect:
According to embodiments of the invention, liquid crystal panel automatically can be moved between card casket and process work bench, and safety is good;
It is placed in pallet by being rotated by crystal liquid substrate, and adopts the first cushion rubber and the second cushion rubber to fix, and can ensure the safety of liquid crystal panel in transportation;
When taking out crystal liquid substrate from pallet, play crystal liquid substrate by the jacking needle holder on lifting body, can hold in the palm very reposefully and get crystal liquid substrate, and substrate fetching device adopts the mode of bottom pick, further can reduce the damage to crystal liquid substrate;
The present invention can save manpower, promotes automatization level (lifting of stay in grade type), promotes production capacity, reduces fragmentation.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is according to a kind of principle of work schematic diagram picking and placeing the automation equipment of large scale liquid crystal face substrate of the present invention;
Fig. 2 is according to a kind of package assembly schematic diagram picked and placeed in automation equipment embodiment of large scale liquid crystal face substrate of the present invention;
Fig. 3 is the integral structure schematic diagram of card casket lifting module in Fig. 2;
Fig. 4 is the STRUCTURE DECOMPOSITION schematic diagram of card casket lifting module in Fig. 3;
Fig. 5 is the partial result schematic diagram that card casket is positioned on elevating drive mechanism;
Fig. 6 is the STRUCTURE DECOMPOSITION schematic diagram of card casket in Fig. 4;
Fig. 7 is the enlarged drawing of the local A in Fig. 6;
Fig. 8 is the STRUCTURE DECOMPOSITION schematic diagram of pallet in Fig. 6;
Fig. 9 is the structural representation being positioned at card casket push-and-pull module on operator's station and substrate lifting body in one embodiment of the invention;
Figure 10 is the lateral plan of operator's station in one embodiment of the invention;
Figure 11 is that in one embodiment of the invention, cushion rubber picks and places module captures cushion rubber view from operator's station;
Figure 12 is the cushion rubber fetching device integral structure schematic diagram in one embodiment of the invention;
Figure 13 is the structural representation of sliding support in Figure 12;
Figure 14 is the structural representation of Figure 12 center platen;
Figure 15 is the structural representation of suction disc in Figure 12;
Figure 16 be Figure 11 A-A to cross-sectional schematic;
Figure 17 is the enlarged drawing of the local B in Figure 16;
Figure 18 is the structural representation that in one embodiment of the invention, cushion rubber picks and places the lifting mechanism of module;
Figure 19 is the effect schematic diagram place lifting mechanism in one embodiment of the invention in frame after;
Figure 20 is the structural representation of the substrate fetching device in one embodiment of the invention.
Detailed description of the invention
Below with reference to the accompanying drawings the preferred embodiments of the present invention are described.
As shown in Figure 1, show a kind of principle of work schematic diagram picking and placeing the automation equipment of large scale liquid crystal face substrate of the present invention, therefrom can find out, this automation equipment comprises:
Card casket lifting module 1, its inside is provided with the card casket for the multiple pallet of stacked placement, and this pallet level can skid off or slip into card casket;
Operator's station 2, it just skids off direction to the pallet of described card casket lifting module 1, and this operator's station is provided with card casket push-and-pull module 3, it for adsorbing a pallet in card casket, and drives this pallet to slip into or skid off, and this pallet is moved between operator's station and card casket; In addition, below this operator's station, be also provided with substrate lifting body 4, this substrate lifting body 4 for the steady jacking of crystal liquid substrate of the pallet that will be arranged on operator's station 2, by this pallet of disengaging;
Cushion rubber picks and places module 5, be positioned at operator's station 2 side, be provided with cushion rubber fetching device 6, this cushion rubber fetching device 6 can move to above operator's station 2, take out for the cushion rubber pallet be arranged on operator's station 2 is covered on crystal liquid substrate, or cushion rubber is positioned on this crystal liquid substrate;
In addition, also comprise a substrate fetching device 7, this substrate fetching device 7 is after substrate lifting body 4 is by crystal liquid substrate jacking, the pallet be arranged on operator's station can be moved into, and the crystal liquid substrate held in this pallet being moved in process work bench 8, or processed for process work bench 8 place good crystal liquid substrate is returned to the pallet be arranged on operator's station 2.
As shown in Figure 2, be according to a kind of package assembly schematic diagram picked and placeed in automation equipment embodiment of large scale liquid crystal face substrate of the present invention.Therefrom can find out, card casket lifting module 1 is just right with operator's station 2, and cushion rubber picks and places the side that module 5 is positioned at operator's station 2.Card casket can shift between card casket lifting module 1 and operator's station 2, and cushion rubber can pick and place between module 5 at operator's station 2 and cushion rubber and shifts.
Following general 3 to accompanying drawing 20 by reference to the accompanying drawings, is described in detail to all parts that the present invention picks and places in automation equipment embodiment of large scale liquid crystal face substrate.
As shown in Figure 3, be the integral structure schematic diagram that in Fig. 2, card casket is elevated module 1.Therefrom can find out, this card casket lifting module 1 specifically comprises:
Lifting module frame 10, it is framed structure, and at least side is provided with opening;
Card casket 12, be arranged at lifting module frame 10 inner, its inside is placed with multiple pallet 121;
Elevating drive mechanism 14, is fixed on the bottom of lifting module frame 10, and for support card casket 12, and energy driver card casket 12 up-and-down movement is to adjust the position of this card casket 12.
Again incorporated by reference to shown in Fig. 4, it is the STRUCTURE DECOMPOSITION figure of card casket lifting module 1 in Fig. 3, therefrom can find out, card casket 12 is similar drawer basket structure, it at least one pallet 121 comprising card casket framework 120 and be placed therein, pallet 121 for placing crystal liquid substrate, wherein, pallet 121 can slip into or skid off card casket framework 120, and each pallet 121 side is outwardly provided with at least one magnetic attracting device 1217.
And elevating drive mechanism 14 includes a lifting table 144, it is for support card casket 12, these lifting table 144 both sides are connected with feed screw nut 149, be arranged at the first motor 142 of bottom by driving adapter shaft 142, by the effect of deflector 145, screw mandrel 147 is rotated, thus drive moving up and down of feed screw nut 149, lifting table 144 is moved up and down along the slide rail (not shown) in slide rail bearing 150, such as in one embodiment, first motor 142 rotates forward, then lifting table 144 rises, and the first motor 142 reverses, then lifting table 144 declines.
Again incorporated by reference to shown in accompanying drawing 5, it is the partial result schematic diagram that card casket 12 is positioned on elevating drive mechanism 14.In order to make card casket 12 in horizontal or vertical direction position accurately, elevating drive mechanism 14 is also provided with the device can finely tuned card casket 12 level attitude and upright position.Particularly, four ends of lifting table 144 are provided with card casket horizontal alignment cylinder 148, it is for holding four base angles of card casket 12, and by cylinder be used for adjust the level attitude residing for card casket 12; In addition, in the place that lifting table 144 contacts with card casket framework 120, be evenly provided with multiple floating support device 146, by this floating support device 146, can finely tune the upright position of card casket 12.
As shown in Figure 6, it is the STRUCTURE DECOMPOSITION schematic diagram of card casket 12 in the present invention, for the ease of seeing the structure of card casket 12 inside clearly, card casket framework 120 in the figure eliminates top cover, and illustrate only a pallet 121, when being understandable that, in the application of reality, this card casket framework 120 can be provided with top cover, and can place multiple pallet 121 in card casket framework 120.Partial enlarged drawing in the lump in composition graphs 7.In the present embodiment, the two lateral walls of card casket framework 120 is provided with at least one group of strut member 1204, and pallet 121 is positioned on strut member 1204.Pallet 121 can slide on strut member 1204, such as, slips into or skid off card casket framework 120 relative to this strut member 1204.Pallet 121 adopts rigidity hard material, for crystal liquid substrate disposed therein provides flat support face, and increases the strong point to crystal liquid substrate panel, can reduce Oscillation Amplitude in the process of moving, and effectively prevents crystal liquid substrate to be out of shape or fragmentation.Simultaneously, relative sliding between pallet 121 and strut member 1204 have employed the pull principle of drawer, pallet 121 is positioned on strut member 1204, first pallet 121 is pulled, pallet 121 is made to skid off card casket framework 120, crystal liquid substrate is placed on after in pallet 121, promote pallet 121, pallet 121 is made to slip into card casket framework 120, so, crystal liquid substrate being positioned in pallet 121 or when it is taken out from pallet 121, only need push-and-pull pallet 121, pallet 121 exerts a force, drive crystal liquid substrate to slip into by pallet 121 or skid off card casket framework 120, such operation can not cause external force to crystal liquid substrate, can effectively avoid when placing or take out crystal liquid substrate, because exerting a force, the improper situation of crystal liquid substrate fragmentation that causes occurs.Wherein, by adsorbing the magnetic attracting device 1217 be arranged on each pallet 121 sidewall and applying to drive, namely can this pallet 121 of push-and-pull.In order to make pallet 121 steadily turnover card casket framework 120, strut member 1204 of the present invention is provided with multiple first roller 1202.And the rear side (opposite side relative with the side of opening) of card casket framework 120 is provided with positive stop strip 1206.
As shown in Figure 8, be the STRUCTURE DECOMPOSITION schematic diagram of pallet 121 in this Fig. 6.In the present embodiment, pallet 121 is the box body of upper opening, and the bottom of pallet 121 is provided with the first cushion rubber 1214, and crystal liquid substrate 1212 is positioned on the first cushion rubber 1214 bottom pallet 121.First cushion rubber 1214 can adopt the material of such as dustless foam, and it can provide buffering to the bottom/of crystal liquid substrate 1212 and sidepiece, to protect crystal liquid substrate 1212 in the process of moving.Be understandable that, in one embodiment, this first cushion rubber 1214 can comprise bottom bumper pad and sidewall cushion rubber particularly.
In addition; pallet 121 also can comprise the second cushion rubber 1210 being positioned at top; second cushion rubber 1210 also adopts dustless foam; when on the first cushion rubber 1214 that crystal liquid substrate 1212 is positioned over the bottom of pallet 121; second cushion rubber 1210 is positioned over above crystal liquid substrate 1212; crystal liquid substrate 1212 is clamped, to provide omnibearing protection to crystal liquid substrate 1212 together with the first cushion rubber 1214 of bottom.
Wherein, the correspondence position on pallet 121 and the first cushion rubber 1214 is provided with multiple corresponding jacking pin via hole 1218.
As shown in Figure 9, the structural representation being positioned at card casket push-and-pull module 3 on operator's station and substrate lifting body 4 is shown in one embodiment of the invention.Therefrom can find out, this card casket push-and-pull module 3 comprises:
Be arranged at the slide unit 30 of both sides, operator's station frame 20 top, above-mentioned slide unit 30 be provided with multiple second roller 32, slide thereon for pallet 121;
Magnetic chuck 34, the magnetic attracting device 1217 on adsorbing tray 121 sidewall after powered up;
Magnetic chuck telescopic cylinder 36, for driving magnetic chuck 34 to move, the pallet 121 adsorbed to make it slides on slide unit 30.
By this card casket push-and-pull module 3, can adsorbing tray 121, and draw it and skid off from card casket 12 and slide at slide unit 3, thus pallet 121 can be positioned over the top of operator's station frame 20.Otherwise, also pallet 121 can be pushed into card casket 12 above operator's station frame 20.
In the lump in conjunction with shown in Figure 10, figure 10 illustrates the lateral plan of operator's station 2.Below card casket push-and-pull module 3, be also provided with substrate lifting body 4, this its plate lifting machine structure 4 comprises:
Jacking pin adapter plate 40, it is provided with multiple jacking pin 42;
Jacking cylinder 44, is arranged at the downside of jacking pin adapter plate 40, and itself and operator's station frame 20 fix, and for driving jacking pin adapter plate 40 to be elevated, particularly, promoting jacking pin adapter plate 40 rise or decline by a cylinder conductive post 46;
In addition, also comprise multiple jacking guide pillar 48, be arranged at the downside of jacking pin adapter plate 40, match with the guide pin bushing be arranged in operator's station frame 20, jacking pin adapter plate 40 is flexibly connected with between operator's station frame 20, only move at above-below direction to limit jacking pin adapter plate 40, and can not move in the horizontal direction.
Wherein, when jacking pin adapter plate 40 is risen by driving, the jacking pin 34 be installed on it, can through the jacking pin via hole 1218 in pallet 121 and the first cushion rubber 1214, be resisted against the bottom of crystal liquid substrate 1214, and this crystal liquid substrate 1214 pulsation-free is held up, make crystal liquid substrate 1214 depart from this pallet 121.
Following general 11 to Figure 20 by reference to the accompanying drawings, illustrates that the cushion rubber in the embodiment of the present invention picks and places the detailed construction of module 5.
As shown in figure 11, it illustrates cushion rubber in one embodiment of the invention and pick and place module 5 captures cushion rubber view from operator's station.In the present embodiment, this cushion rubber picks and places module 5 and comprises:
Pick and place module frame 50, wherein can deposit multiple second cushion rubber 1210;
Cushion rubber fetching device 6, be arranged at the top that this picks and places module frame 50, this cushion rubber fetching device 6 can move to the top of operator's station 2, pick and place module frame 50 for being taken out to be put in by second cushion rubber 1210 on the pallet be arranged on operator's station 2 121 crystal liquid substrate top, or the second cushion rubber 1210 taking-up picked and placeed in module frame 50 is positioned on the crystal liquid substrate in this pallet 121;
Picking and placeing module lifting mechanism 52, be fixedly installed on the bottom picking and placeing module frame 50, for supporting the second cushion rubber picking and placeing and deposit in module frame 50, and the lifting of these the second cushion rubbers can be driven, to adjust the position of these the second cushion rubbers.
In the lump in conjunction with shown in Figure 12, Figure 12 is the integral structure schematic diagram of the cushion rubber fetching device 6 in the embodiment of the present invention.Therefrom can find out, this cushion rubber fetching device 6 comprises:
Sliding support 61, it is matched with the linear slide rail 53 on an erection support 51 by a plate 54, this sliding frame 61 can move between picking and placeing above module frame 50 and operator's station 2, wherein, this erection support 51 is arranged at the both sides that cushion rubber picks and places module 5 top, and extend to the top of operator's station 2, and be provided with linear slide rail 53 on each erection support 51; Wherein, this sliding support 61 drives by a linear motor (not shown), to move on linear slide rail 53;
Pressing plate 62, it is flexibly connected with this sliding support 61, and is arranged under this sliding support 61, and it is for locating and compress the pallet 121 be positioned on operator's station 2;
Suction disc 63, it is flexibly connected with this pressing plate 62, is positioned at below this pressing plate 62, for the second cushion rubber that the second cushion rubber 1210 in adsorbing tray 121 or absorption pick and place in module frame 50.
Following in conjunction with Figure 13 to Figure 16, the structure of this cushion rubber fetching device 6 is described in detail.
As shown in figure 13, be the structural representation of Figure 12 sliding support 61.In the present embodiment, this sliding support 61 is the framed structure of a square, and it is made up of some cross bars (plate) 611 and montant 610.It is provided with connecting panel 54 on the cross bar 611 at both ends, and this connecting panel 54 is for matching with the linear slide rail 53 on erection support 51; The middle part of this sliding support 61 is provided with cylinder via hole 613, and it is also provided with multiple first guide pillar hole 612.
As shown in figure 14, be the structural representation of Figure 12 center platen 62.In the present embodiment, this pressing plate 62 is framed structure, and it is formed with locating plate 621 in four sides, for positioning pallet 121 and compress.Being fixed with a pressing plate cylinder 624 at the middle part of this pressing plate, carrying out dipping and heaving for driving pressing plate 62.This pressing plate lift cylinder 624 is arranged in the cylinder via hole 613 in the middle part of sliding support 61, in addition, this pressing plate 62 is also provided with multiple first and leads village 622, it can wear the first guide pillar hole 612 corresponding on sliding support 61, and fix at upper end guide pin bushing, thus this pressing plate 62 is flexibly connected with sliding support 61.In addition, this pressing plate 62 is also provided with multiple second guide pillar hole 623.
As shown in figure 15, be the structural representation of suction disc in the present embodiment 63.In the present embodiment, this suction disc 63 is framed structure, and it comprises many pressing plate grooves 630, and this pressing plate groove 630 is the trough body structure under shed, and on this pressing plate groove 630, interval arranges multiple sucker 633, and wherein, these suckers 633 are for adsorption-buffering pad; This pressing plate groove 630 also arranges multiple second guide pillar 631, and this second guide pillar 631 matches with the second guide pillar hole 623 on pressing plate 62, is flexibly connected with pressing plate 62 to make suction disc 63; In addition, this suction disc 63 is also provided with at least one suction disc cylinder 632, for driving the lifting of suction disc 63 and controlling the opening and closing of sucker 633.
Again incorporated by reference to shown in Figure 16, its be Figure 11 A-A to cross-sectional schematic, come together to illustrate the principle of work of cushion rubber fetching device in the lump in conjunction with the partial enlarged drawing in Figure 17.Below, be described to get cushion rubber from the pallet 121 of operator's station 2;
When cushion rubber fetching device 6 works, first, linear motor driven sliding support 61 arrives work station (top of such as operator's station);
Now, pressing plate lift cylinder 624 drives pressing plate 62 to decline together with suction disc 63, the edge that the locating plate 621 of pressing plate 62 pushes down pallet 121 is spacing, can be shown in Figure 17, illustrated therein is the end that locating plate 621 presses position pallet 121 and the first cushion rubber 1214 simultaneously, to locate and to compress this pallet 121;
Then suction disc cylinder 632 drives suction disc 63 to decline, and sucker 633 vacuum is started, and the second cushion rubber 1210 is adsorbed by the sucker of suction disc 63;
Pressing plate lift cylinder 624 is retracted, and drives pressing plate 62 to rise to most significant bit together with suction disc 63;
What linear motor driven sliding support 61 arrived that cushion rubber picks and places module slows down die head station (namely picking and placeing the top of module frame 50);
Pressing plate lift cylinder 624 stretches out, and drives pressing plate 62 to decline together with suction disc 63, and removes the vacuum of sucker 623 by suction disc cylinder 632, allow the second cushion rubber 1210 put into and pick and place module frame 50;
Now need the entire lowering (falling head=cushion rubber thickness) controlling cushion rubber, be in sustained height all the time to make cushion rubber access position; Meanwhile, pressing plate lift cylinder 624 and suction disc cylinder 2 are retracted, and are reset to initial state, wait for next actuation cycle.
And cushion rubber to be taken out and the process in the pallet of operator's station 2 of being positioned over is contrary with above-mentioned steps from picking and placeing module frame 50, do not describe in detail at this.
As shown in figure 18, be that in one embodiment of the invention, cushion rubber picks and places the structural representation picking and placeing module lifting mechanism 52 in module.In the lump in conjunction with shown in the effect schematic diagram in Figure 19.This picks and places module lifting mechanism 52 and comprises a cushion rubber placement platform 520, for placing cushion rubber.This cushion rubber placement platform 520 is provided with the second motor (not shown) below, it is by driving adapter shaft 521, by the effect of cross deflector 522, adapter shaft 523 is rotated, by the effect of coupler 524 and turbine box 526, the scroll bar 526 being positioned at corner bottom cushion rubber placement platform 520 is rotated, under the effect of multiple scroll bar 526, cushion rubber placement platform 520 can be made to rise or decline, such as in one embodiment, second motor rotates forward, then cushion rubber placement platform 520 rises, and the second motor reversion, then cushion rubber placement platform 520 declines.
As shown in figure 20, be the structural representation of substrate fetching device 7 in one embodiment of the invention.In this embodiment, this substrate fetching device 7 comprises a cross bar 70 and is arranged at the multiple parallel supporting blade 72 on cross bar 70, wherein, multiple supporting blade 72 is roughly in the same plane, and the one side that each supporting blade 72 contacts with crystal liquid substrate 1212 is provided with multiple bumper ring 74.
According to above-mentioned to the introduction about the construction picking and placeing the automation equipment of large scale liquid crystal panel of the present invention, large scale liquid crystal panel easily and safely can be transferred between card casket and process work bench by the automation equipment picking and placeing large scale liquid crystal panel of the present invention.
In a kind of application scenarios, from card casket, take out crystal liquid substrate, and be passed to process work bench and process, roughly workflow is as follows for it:
Card casket 12 is positioned in lifting module frame 10, horizontal direction location is carried out by the card casket 12 horizontal alignment cylinder 148 in elevating drive mechanism 14, and carry out vertical direction location in conjunction with floating support device 146, make certain pallet 121 in card casket 12 be in suitable position;
The magnetic chuck 34 of card casket push-and-pull module 3 magnetic attracting device 1217 after powered up on adsorbing tray 121 sidewall, and this pallet 121 is pulled out from card casket 12, make it slide out to the top of operator's station 2;
Cushion rubber picks and places above the flat movable operating platform 2 of cushion rubber fetching device 6 of module 5, the second cushion rubber 1210 on pallet 2 is taken out and is put in pick and place in module 5 frame, and detailed process refers to description above;
Substrate lifting body 4 will be arranged in crystal liquid substrate 1212 jacking of the pallet 12 of operator's station 2, depart from pallet 121;
Substrate fetching device 7 stretches in the space between crystal liquid substrate 1212 and pallet 121, is taken out by crystal liquid substrate 1212 and delivers to process work bench 8.
In Another application scene, by the crystal liquid substrate processed in process work bench process, move back in card casket, roughly workflow is as follows for it:
Worked-out crystal liquid substrate takes out by substrate fetching device 7 from process work bench 8, is put on the jacking pin 42 of lifting body 4 jacking;
Lifting body 4 declines, and is positioned over by crystal liquid substrate on the first cushion rubber 1214 of lower floor in pallet 121;
Cushion rubber takes out from picking and placeing module frame 50 by the cushion rubber fetching device 6 that cushion rubber picks and places module 5, and moves to above operator's station 2, and to be put in pallet 121 above crystal liquid substrate 1212;
The pallet 121 that placed crystal liquid substrate 1212 and the first cushion rubber 1214 pushes back in card casket 12 by card casket push-and-pull module 3.
Implement the embodiment of the present invention, there is following beneficial effect:
In summary it can be seen that a kind of automation equipment picking and placeing large scale liquid crystal panel that the embodiment of the present invention provides liquid crystal panel automatically can be moved between card casket and process work bench, and safety is good;
It is placed in pallet by being rotated by crystal liquid substrate, and adopts the first cushion rubber and the second cushion rubber to fix, and can ensure the safety of liquid crystal panel in transportation;
When taking out crystal liquid substrate from pallet, play crystal liquid substrate by the jacking needle holder on lifting body, can hold in the palm very reposefully and get crystal liquid substrate, and substrate fetching device adopts the mode of bottom pick, further can reduce the damage to crystal liquid substrate;
The present invention can save manpower, promotes automatization level (lifting of stay in grade type), promotes production capacity, reduces fragmentation.
Above disclosedly be only present pre-ferred embodiments, certainly can not limit the interest field of the present invention with this, therefore equivalent variations, still belongs to the scope that the present invention is contained.
Claims (10)
1. pick and place an automation equipment for large scale liquid crystal substrate, it is characterized in that, comprising:
Card casket lifting module (1), its inside is provided with the card casket (12) for the multiple pallet of stacked placement (121), and described pallet (121) level can skid off or slip into described card casket (12);
Card casket push-and-pull module (3), be positioned at and just skid off on an operator's station (2) in direction to the pallet of described card casket lifting module (1), it is for adsorbing a pallet (121) in described card casket (12), and drive described pallet (121) to slip into or skid off, described pallet (121) is moved between described operator's station (2) and described card casket (12);
Cushion rubber picks and places module (5), be positioned at described operator's station (2) side, be provided with cushion rubber fetching device (6), described cushion rubber fetching device (6) can move to described operator's station (2) top, take out for the second cushion rubber (1210) pallet (121) be arranged on operator's station (2) is covered on crystal liquid substrate (1212), or the second cushion rubber (1210) is positioned on the middle crystal liquid substrate (1212) of described pallet (121);
Substrate lifting body (4), be positioned at described operator's station (2) below, at least comprise multiple can the jacking pin (42) of above-below direction movement, the pallet (121) on operator's station (2) is positioned at described in described jacking pin (42) can penetrate, and be held in the bottom of the crystal liquid substrate (1212) in described pallet (121), described crystal liquid substrate (1212) is separated with described pallet (121).
2. pick and place the automation equipment of large scale liquid crystal substrate as claimed in claim 1, it is characterized in that, described card casket lifting module (1) specifically comprises:
Lifting module frame (10), it is at least provided with opening in side;
Card casket (12), be arranged at described lifting module frame (10) inner, its two lateral walls is provided with the strut member (1204) of band first roller (1202), the described pallet (121) being placed with crystal liquid substrate (1212) can be positioned on described strut member (1204), and described pallet (121) can slip into or skid off described card casket (12) relative to described strut member (1204);
Elevating drive mechanism (14), being fixed on described lifting module frame (10) bottom, for supporting described card casket (12), and driving described card casket (12) up-and-down movement to adjust the position of described card casket (12).
3. pick and place the automation equipment of large scale liquid crystal substrate as claimed in claim 2, it is characterized in that, described elevating drive mechanism (14) includes a lifting table (144), card casket horizontal alignment cylinder (148) for adjusting described card casket (12) level attitude is provided with in four ends of described lifting table (144), and in the place that lifting table (144) contacts with card casket (12), be evenly provided with multiple floating support device (146) for adjusting described card casket (12) upright position.
4. pick and place the automation equipment of large scale liquid crystal substrate as claimed in claim 3, it is characterized in that, the box body that described pallet (121) is upper opening, is provided with multiple jacking pin via hole (1218) bottom it, the jacking pin (42) of substrate lifting body (4) passes; One side is provided with at least one magnetic attracting device (1217), for described card casket push-and-pull module (3) absorption;
Described pallet (121) is placed with crystal liquid substrate (1212), between described crystal liquid substrate (1212) and described pallet (121), be provided with the first cushion rubber (1214), relevant position, described first cushion rubber (1214) bottom is also provided with multiple jacking pin via hole (1218); The top of described crystal liquid substrate (1212) is coated with described second cushion rubber (1210).
5. pick and place the automation equipment of large scale liquid crystal substrate as claimed in claim 4, it is characterized in that, described card casket push-and-pull module (3) comprising:
Be arranged at the slide unit (30) of frame (20) both sides, top of described operator's station (2), be provided with the second roller (32), slide thereon for pallet (121);
Magnetic chuck (34), for adsorbing the magnetic attracting device (1217) on described pallet (121) sidewall when being energized;
Magnetic chuck telescopic cylinder (36), for driving described magnetic chuck (34) mobile, the pallet (121) adsorbed to make it is in the upper slip of described slide unit (30).
6. pick and place the automation equipment of large scale liquid crystal substrate as claimed in claim 1, it is characterized in that, described substrate lifting body (4) comprising:
Jacking pin adapter plate (40), it is provided with multiple jacking pin (42);
Jacking cylinder (44), is arranged at the downside of described jacking pin adapter plate (40), and itself and described operator's station frame (20) fix, and is elevated for driving described jacking pin adapter plate (40);
Multiple jacking guide pillar (48), is arranged at the downside of described jacking pin adapter plate (40), matches with the guide pin bushing be arranged on described operator's station frame (20), makes to be flexibly connected between described jacking pin adapter plate (40) with described operator's station frame (20).
7. pick and place the automation equipment of large scale liquid crystal substrate as claimed in claim 1, it is characterized in that, described cushion rubber picks and places module (5) and comprising:
Pick and place module frame (50), wherein can deposit multiple second cushion rubber (1210);
Cushion rubber fetching device (6), the top of module frame (50) is picked and placeed described in being arranged at, this cushion rubber fetching device (6) can move to the top of operator's station (2), pick and place module frame (50) for being taken out to be put in by second cushion rubber (1210) on pallet (121) crystal liquid substrate (1212) top be arranged on operator's station (2), or the second cushion rubber (1210) taking-up that will pick and place in module frame (50) is positioned on the crystal liquid substrate (1212) in described pallet (121);
Pick and place module lifting mechanism (52), the bottom of module frame (50) is picked and placeed described in being fixedly installed on, the second cushion rubber (1210) deposited in module frame (50) is picked and placeed for supporting, and the lifting of described second cushion rubber (1210) can be driven, to adjust the position of described second cushion rubber (1210).
8. pick and place the automation equipment of large scale liquid crystal substrate as claimed in claim 7, it is characterized in that, described cushion rubber fetching device (6) comprises further:
Sliding support (61), it matches with the linear slide rail (53) on an erection support (51), to move described picking and placeing between module frame (50) and described operator's station (2) top, wherein, described erection support (51) is arranged at the both sides that cushion rubber picks and places module (5) top, and extend to the top of described operator's station (2), and be provided with a linear slide rail (53) on each erection support (51);
Linear motor, for driving described sliding support (61) upper mobile at described linear slide rail (53);
Pressing plate (62), it is flexibly connected with described sliding support (61), and is arranged under described sliding support (61), and it is for location and compress the pallet (121) be positioned on described operator's station (2);
Suction disc (63), it is flexibly connected with described pressing plate (62), is positioned at described pressing plate (62) below, for the second cushion rubber (1210) that the second cushion rubber (1210) in adsorbing tray (121) or absorption pick and place in module frame (50).
9. pick and place the automation equipment of large scale liquid crystal substrate as claimed in claim 8, it is characterized in that,
Described pressing plate (62) is formed with locating plate (621) in four sides, for positioning pallet (121) and compress, being fixed with a pressing plate cylinder (624) at the middle part of described pressing plate (62), carrying out dipping and heaving for driving described pressing plate (62);
Described suction disc (63) comprises many pressing plate grooves (630), described pressing plate groove (630) is the trough body structure under shed, at the upper interval of described pressing plate groove (630), multiple sucker (633) for adsorbing the second cushion rubber (1210) is set, described suction disc (63) is also provided with at least one suction disc cylinder (632), for driving the lifting of described suction disc (63) and controlling the opening and closing of described sucker (633).
10. the automation equipment picking and placeing large scale liquid crystal substrate as described in any one of claim 1-9, is characterized in that, comprise further:
Substrate fetching device (7), it comprises a cross bar (70) and is arranged at the multiple parallel supporting blade (72) on described cross bar (70), wherein, described multiple supporting blade (72) is roughly in the same plane, and the one side that each supporting blade (72) contacts with crystal liquid substrate (1212) is provided with multiple bumper ring (74).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310241086.2A CN103303676B (en) | 2013-06-18 | 2013-06-18 | A kind of automation equipment picking and placeing large scale liquid crystal substrate |
| PCT/CN2013/077808 WO2014201706A1 (en) | 2013-06-18 | 2013-06-24 | Automation device for picking and placing liquid crystal substrate of large size |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310241086.2A CN103303676B (en) | 2013-06-18 | 2013-06-18 | A kind of automation equipment picking and placeing large scale liquid crystal substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103303676A CN103303676A (en) | 2013-09-18 |
| CN103303676B true CN103303676B (en) | 2015-11-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310241086.2A Expired - Fee Related CN103303676B (en) | 2013-06-18 | 2013-06-18 | A kind of automation equipment picking and placeing large scale liquid crystal substrate |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN103303676B (en) |
| WO (1) | WO2014201706A1 (en) |
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| CN103496845B (en) * | 2013-09-25 | 2016-06-29 | 深圳市华星光电技术有限公司 | Feeding system and substrate cut machine for substrate processing |
| CN104370103B (en) * | 2014-11-19 | 2016-08-24 | 苏州赛腾精密电子股份有限公司 | Multilayer charging tray feeding machanism |
| CN104495401B (en) * | 2014-12-13 | 2016-05-18 | 歌尔声学股份有限公司 | Material automatic handling device |
| TWI664130B (en) * | 2016-01-29 | 2019-07-01 | 旺矽科技股份有限公司 | Wafer cassette |
| CN106044090A (en) * | 2016-07-21 | 2016-10-26 | 广西泰昌鸿科技有限公司 | Novel slide rail jacking mechanism |
| CN106629053B (en) * | 2016-09-20 | 2019-09-27 | 信义玻璃(天津)有限公司 | A kind of method of thousand layer frames and adjustment glass transmission order |
| CN107458987A (en) * | 2017-08-02 | 2017-12-12 | 芜湖昊葛金自动化科技有限公司 | A kind of liquid crystal panel lifts transfer device |
| CN109051824A (en) * | 2018-09-17 | 2018-12-21 | 江苏佳芬斯泰自动化科技有限公司 | A kind of casement automatic docking device |
| CN112393977A (en) * | 2019-08-15 | 2021-02-23 | 优苈国际有限公司 | Main shaft testing device |
| CN110775435A (en) * | 2019-09-28 | 2020-02-11 | 浙江雅市晶科技有限公司 | Vertical glass containing cassette system |
| CN110735595A (en) * | 2019-09-28 | 2020-01-31 | 浙江雅市晶科技有限公司 | curtain of cassettes with magnetic control switches |
| CN110745567B (en) * | 2019-10-30 | 2021-03-23 | 苏州精濑光电有限公司 | Stacking device |
| CN111266237A (en) * | 2020-04-10 | 2020-06-12 | 山东交通职业学院 | Spraying device for automobile surface machining |
| CN112809725B (en) * | 2020-12-30 | 2022-04-01 | 创维集团智能装备有限公司 | Injection molding assembly line positioning and grabbing equipment |
| CN114348329A (en) * | 2021-04-28 | 2022-04-15 | 成都通德药业有限公司 | Aseptic production transfer system of potassium dehydroandrographolide succinate for injection |
| CN113828613A (en) * | 2021-08-27 | 2021-12-24 | 芜湖东旭光电装备技术有限公司 | Glass abandonment system |
| CN114005775A (en) * | 2021-10-29 | 2022-02-01 | 德鸿半导体设备(浙江)有限公司 | Substrate processing system and method |
| CN116788848B (en) * | 2023-07-11 | 2023-11-28 | 安徽创显电子科技有限公司 | Liquid crystal display module transfer mechanism and processing equipment |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2014201706A1 (en) | 2014-12-24 |
| CN103303676A (en) | 2013-09-18 |
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