CN103245807A - Probe unit structure and manufacturing method thereof - Google Patents
Probe unit structure and manufacturing method thereof Download PDFInfo
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- CN103245807A CN103245807A CN2012100309976A CN201210030997A CN103245807A CN 103245807 A CN103245807 A CN 103245807A CN 2012100309976 A CN2012100309976 A CN 2012100309976A CN 201210030997 A CN201210030997 A CN 201210030997A CN 103245807 A CN103245807 A CN 103245807A
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- 239000000523 sample Substances 0.000 title claims abstract description 146
- 238000004519 manufacturing process Methods 0.000 title abstract description 3
- 239000000758 substrate Substances 0.000 claims abstract description 219
- 238000009422 external insulation Methods 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 15
- 230000000630 rising effect Effects 0.000 claims description 12
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 238000004026 adhesive bonding Methods 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 abstract 3
- 125000006850 spacer group Chemical group 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000007689 inspection Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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Abstract
The invention discloses a probe unit structure and a manufacturing method thereof, wherein the probe unit structure comprises a first positioning substrate, a second positioning substrate, a contact probe and a spacer, wherein the first positioning substrate is provided with a first pin hole; the second positioning substrate is provided with a second pinhole, the first positioning substrate and the second positioning substrate are mutually overlapped during assembly, and a space is formed between the first positioning substrate and the second positioning substrate by a lifting tool; the contact probe is connected with the first needle penetrating hole and the second needle penetrating hole in a penetrating way; the spacer is provided with a containing chamber for containing the contact probe through the space; the first positioning substrate slides relative to the second positioning substrate to make the first needle-penetrating hole and the second needle-penetrating hole generate deviation, so that two ends of the contact probe are clamped and positioned by the first positioning substrate and the second positioning substrate respectively. Thus, the probe unit can be easily manufactured even when the diameter of the contact probe is reduced.
Description
Technical field
The present invention relates to a kind of for detection of probe structure, relate in particular to a kind of probe unit structure and preparation method thereof.
Background technology
When SIC (semiconductor integrated circuit) such as manufacturing IC chip, namely can carry out the inspection of electric characteristics in order to detect defective products; Particularly, when carrying out the detection of SIC (semiconductor integrated circuit) or liquid crystal panel etc., can learn in the Wiring pattern of the SIC (semiconductor integrated circuit) that checks object whether electrical short circuit or broken string are arranged; Simultaneously, in order to seek to check that object and outgoing inspection with the electric connection between the signal processing apparatus of signal, can adopt the probe unit of accommodating a plurality of electric conductivity contact probes, to electrically connect with checking object and signal processing apparatus respectively.
Traditional probe unit, extremely shown in Figure 2 as Fig. 1, it mainly comprises on corresponding one location substrate 10 and locatees substrate 20 once, make location substrate 10 and 20 of following location substrates be separated with a fixed component 30 of a distance and wear a contact probe 40 of locating substrate 10 and following location substrate 20, wherein go up location substrate 10 and be provided with hole slot 101 on, following location substrate 20 is provided with the corresponding hole slot once 201 of going up hole slot 101, this contact probe 40 is plugged in hole slot 101 earlier and is positioned at location substrate 10, refill and set location substrate 20, make contact probe 40 corresponding hole slots 201 up and down plug the location.By this, to reach the position of restriction contact probe 40.
Yet in recent years, SIC (semiconductor integrated circuit) has showing in highly integrated, miniaturization makes progress, with regard to probe unit, in order to be cooperated this Progress in technique, also can make each contact probe each other apart from stricturization simultaneously the thin footpathization of the diameter of each contact probe; But, the diameter of above-mentioned contact probe 40 is more little down, hole slot 201 also can be more and more littler under last hole slot 101 reached, the contraposition between the hole slot 201 produces a little error to make hole slot 101 reach down, and then after causing contact probe 40 to be positioned location substrate 10, but can't wear and be positioned down location substrate 20, this moment, assembling namely can damage contact probe 40 by force; Therefore, during the reduced of contact probe 40, existing probe unit has great difficulty with combination and can't break through making.
Summary of the invention
A purpose of the present invention is to provide a kind of probe unit structure and preparation method thereof, and it is to utilize under the thin footpathization of diameter of contact probe, is made into probe unit still simple and easyly.
To achieve the above object, the invention provides a kind of probe unit structure, comprising:
A kind of probe unit structure comprises:
One first location substrate is provided with a plurality of first hole of threading a needle;
One second location substrate, to should first location substrate configuration, this second location substrate is provided with the hole of threading a needle, a plurality of second of the hole of should a plurality of first threading a needle;
A plurality of contact probes, the two ends of each this contact probe are connected to respectively this first thread a needle hole and this second hole of threading a needle respectively respectively; And
One distance piece is connected between this first location substrate and this second location substrate, and this distance piece is provided with a room of ccontaining these a plurality of contact probes;
Wherein, this first location substrate this second location sliding displacement of substrate relatively is moving, thereby make this a plurality of first thread a needle hole and hole of should a plurality of second threading a needle produce the off normal relation, pressed from both sides the location of pulling by this first location substrate and this second location substrate respectively with the two ends that make each this contact probe.
To achieve the above object, the present invention also provides a kind of method for making of probe unit, and its step comprises:
A) this second location substrate is configured in this substrate top, first location, and makes each this contact probe penetrate respectively this first thread a needle hole and this second hole of threading a needle respectively;
B) provide a rising instrument, this rising instrument is risen this second location substrate, makes between this first location substrate and this second location substrate to be formed with a spacing;
C) this distance piece is inserted this spacing and being folded between this first location substrate and this second location substrate, make between this first location substrate and this second location substrate to be formed with this room, and make the two ends of each this contact probe be connected to respectively this first thread a needle hole and this second hole of threading a needle respectively respectively;
D) provide a plurality of bolting elements, this second location substrate by this bolting element respectively with locking at this distance piece;
E) provide a plurality of lock members, this first location substrate by this lock member respectively with locking at this distance piece; And
F) should temporarily get loose by a plurality of lock members, this second location sliding displacement of substrate is moving relatively from this first location substrate, thereby make this a plurality of first thread a needle hole and hole of should a plurality of second threading a needle produce the off normal relation, pressed from both sides the location of pulling by this first location substrate and this second location substrate respectively with the two ends that make each this contact probe.
The present invention also has following effect:
The present invention utilizes the contact probe of the thin footpathization of diameter to be easier to bend under stressed, make the sliding displacement of the relative second location substrate of the first location substrate moving, thereby make first hole of threading a needle, hole and second of threading a needle produce the off normal relation, produced distortion by the first location substrate and the second location substrate compacting respectively with the two ends that make each contact probe, thereby each contact probe is fixed between the first location substrate and the second location substrate by clip, and then the thin footpathization of the diameter that reaches contact probe down, is made into probe unit and still has effect simple and easy and with low cost.
In addition, the two ends of each contact probe are produced distortion by the first location substrate and the second location substrate compacting respectively, contact probe loose contact or come off with the location contact probe and when avoiding detecting, and then improve the stability in use of probe unit structure of the present invention.
Again, the first location substrate and the second location substrate are stacked mutually when making, and make the first location substrate and second location be formed with spacing between the substrate by the rising instrument, distance piece is inserted spacing again and is folded in the first location substrate and second and locatees between the substrate, to be formed with the room of ccontaining each contact probe; Compare existingly, probe unit structure of the present invention has more step with combination and simply reaches assembling and be easy to characteristics making.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
The combination synoptic diagram of this existing probe unit of Fig. 1;
The partial enlarged drawing of this existing probe unit of Fig. 2;
The exploded perspective view of Fig. 3 probe unit structure of the present invention;
The schematic perspective view of Fig. 4 contact probe of the present invention;
The combination synoptic diagram of Fig. 5 probe unit structure of the present invention;
The cross-sectional schematic of Fig. 6 probe unit structure of the present invention;
The flow chart of steps of Fig. 7 probe unit method for making of the present invention;
The synoptic diagram of instrument is put in Fig. 8 A the present invention first location substrate, the second location substrate and contact probe desire placement first;
Fig. 8 B rising instrument of the present invention is desired to wear first and is put the side view cutaway drawing that instrument and first is located substrate;
Fig. 8 C the present invention instrument that raises has been risen the side view cutaway drawing of the second location substrate;
Fig. 8 D the present invention half space bar desires to insert and put the synoptic diagram into the first location substrate and the second location substrate;
Fig. 8 E the present invention second puts the synoptic diagram that instrument desires to be fixed on the second location substrate and distance piece;
Fig. 8 F the present invention second puts the side view cutaway drawing that instrument has been fixed on the second location substrate and distance piece;
Fig. 8 G the present invention first location substrate overturn is arranged on the side view cutaway drawing of substrate top, second location;
The side view cutaway drawing that instrument and second is put instrument is put in Fig. 8 H desire dismounting first of the present invention;
Fig. 8 I the present invention first location substrate is desired the side view cutaway drawing of the sliding position of substrate, relative second location;
Fig. 8 J the present invention first desires the side view cutaway drawing of off normal configuration at the hole of threading a needle, hole and second of threading a needle;
Fig. 8 K the present invention first hole and second hole side view cutaway drawing of off normal configuration of threading a needle of threading a needle;
Fig. 8 L the present invention first location substrate has been fixed on the side view cutaway drawing of distance piece and the second location substrate;
The use view of Fig. 9 probe unit structure of the present invention.
Wherein, Reference numeral
Prior art
10... last location substrate
101 ... big hole slot
102 ... little hole slot
20 ... following location substrate
30 ... fixed component
40 ... contact probe
The present invention
1 ... the first location substrate
11 ... insulcrete in first
111 ... lockhole
12 ... the first external insulation plate
121 ... bury the hole underground
13 ... first hole of threading a needle
2 ... the second location substrate
21 ... insulcrete in second
211 ... lockhole
22 ... the second external insulation plate
221 ... bury the hole underground
23 ... second hole of threading a needle
3 ... contact probe
31 ... test section
32 ... teat
4 ... distance piece
41 ... room
42 ... half space bar
421 ... the U-shaped tank
5 ... bolting element
51 ... head
6 ... lock member
61 ... head
100 ... first puts instrument
200 ... the rising instrument
300 ... second puts instrument
400 ... signal processing apparatus
S ... spacing
Embodiment
Relevant detailed description of the present invention and technology contents are described as follows conjunction with figs., yet appended accompanying drawing purposes as an illustration only is not for limitation the present invention.
Please refer to Fig. 3 to shown in Figure 6, the invention provides a kind of probe unit structure and preparation method thereof, this probe unit structure mainly comprises one first location substrate 1, one second location substrate 2, a plurality of contact probe 3 and a distance piece 4.
The first location substrate 1 comprises one first external insulation plate, 12, the first interior insulcretes 11 of insulcrete 11 and gluing insulcrete 11 in first in one first and the first external insulation plate 12 and is provided with a plurality of first hole 13 of threading a needle jointly; Again, insulcrete 11 is provided with a plurality of lockhole 111, the first external insulation plates 12 and is provided with a plurality of holes 121 of burying underground that should a plurality of lockholes 111 in first.
1 configuration of the second location substrate, the 2 corresponding first location substrates, the second location substrate 2 comprises one second external insulation plate, 22, the second interior insulcretes 21 of insulcrete 21 and gluing insulcrete 21 in second in one second and the second external insulation plate 22 and is provided with jointly the hole 23 of threading a needle, many second of the hole 13 of should a plurality of first threading a needle; Again, insulcrete 21 is provided with a plurality of lockhole 211, the second external insulation plates 22 and is provided with a plurality of holes 221 of burying underground that should a plurality of lockholes 211 in second.
The two ends of each contact probe 3 are connected to each first hole 13 and each second hole 23 of threading a needle of threading a needle respectively, each contact probe 3 one end has a test section 31 other ends and has a teat 32, test section 31 via each first thread a needle hole 13 be exposed to first the location substrate 1, teat 32 via each second thread a needle hole 23 clips in second the location substrate 2.
Distance piece 4 is connected between the first location substrate 1 and the second location substrate 2, is described in detail as follows, and the first interior insulcrete 11 is interposed between distance piece 4 and the first external insulation plate 12, and the second interior insulcrete 21 is interposed between distance piece 4 and the second external insulation plate 22; Distance piece 4 comprises 2 half space bars 42 of symmetry combination, 2 half space bars 42 are folded between the first location substrate 1 and the second location substrate 2, each half space bar 42 is provided with the room 41 that a U-shaped tank 421, two U-shaped tanks 421 are formed with ccontaining these a plurality of contact probes 3.
Wherein, the 2 sliding displacements of the first location substrate, the 1 relative second location substrate are moving, thereby make this a plurality of first thread a needle hole 13 and hole 23 of should a plurality of second threading a needle produce off normals and concern, pressed from both sides the location of pulling by the first location substrate 1 and the second location substrate 2 respectively with the two ends that make each contact probe 3, be described in detail as follows, the two ends of each contact probe 3 are produced distortion by the first location substrate 1 and 2 compactings of the second location substrate respectively, thereby each contact probe 3 is fixed between the first location substrate 1 and the second location substrate 2 by clip.
The present invention also comprises a plurality of bolting elements 5, each bolting element 5 has a head 51, the outside peripheral dimension of each head 51 is buried the aperture size in hole 221 underground less than each, with second interior insulcrete 21 corresponding distance pieces 4 lockings, each head 51 is embedded in and respectively buries hole 221 underground each bolting element 5 via each lockhole 211.
The present invention also comprises a plurality of lock members 6, each lock member 6 has a head 61, the outside peripheral dimension of each head 61 is buried the aperture size in hole 121 underground less than each, with first interior insulcrete 11 corresponding distance pieces 4 lockings, each head 61 is embedded in and respectively buries hole 121 underground each lock member 6 via each lockhole 111.
The combination of probe unit structure of the present invention, it is to utilize the first location substrate 1 to be provided with each first hole 13 of threading a needle; 1 configuration of the corresponding first location substrates of the second location substrate 2, the second location substrate 2 are provided with corresponding each first each second hole 23 of threading a needle of threading a needle hole 13; The two ends of each contact probe 3 are connected to each first hole 13 and each second hole 23 of threading a needle of threading a needle respectively; Distance piece 4 is folded between the first location substrate 1 and the second location substrate 2; Wherein, the 2 sliding displacements of the first location substrate, the 1 relative second location substrate are moving, thereby make this a plurality of first thread a needle hole 13 and hole 23 of should a plurality of second threading a needle produce off normals and concern, pressed from both sides the location of pulling by the first location substrate 1 and the second location substrate 2 respectively with the two ends that make each contact probe 3, be described in detail as follows, the two ends of each contact probe 3 are produced distortion by the first location substrate 1 and 2 compactings of the second location substrate respectively, thereby each contact probe 3 is fixed between the first location substrate 1 and the second location substrate 2 by clip.
By this, because probe unit is that the conjunction with semiconductors integrated circuit is in progress highly integrated, miniaturization, also can be with the thin footpathization of the diameter of each contact probe, but during the reduced of contact probe, cause probe unit great difficulty is arranged and can't to break through making and make up; Compare down, the present invention utilizes the contact probe 3 of the thin footpathization of diameter to be easier to bend under stressed, make the 2 sliding displacements of the first location substrate, the 1 relative second location substrate moving, thereby this a plurality of first hole 13 and this a plurality of second hole 23 of threading a needle of threading a needle is disposed with off normal, produced distortion by the first location substrate 1 and 2 compactings of the second location substrate respectively with the two ends that make each contact probe 3, thereby each contact probe 3 is fixed between the first location substrate 1 and the second location substrate 2 by clip, and then the thin footpathization of the diameter that reaches contact probe 3 down, is made into probe unit and still has effect simple and easy and with low cost.
Please refer to shown in Fig. 7 and Fig. 8 A to Fig. 8 L method for making step of above-mentioned probe unit structure.
Shown in the step a and Fig. 8 A of Fig. 7, at first, provide one first to put instrument 100, one first location substrate 1, one second location substrate 2 and a plurality of contact probe 3, first puts instrument 100 locatees the first location substrate 1 in regular turn, second location substrate 2 and a plurality of contact probe 3, the first location substrate 1 is provided with a plurality of first hole 13 of threading a needle, the second location substrate 2 is provided with the hole 23 of threading a needle, a plurality of second of the hole 13 of should a plurality of first threading a needle, the second location substrate 2 is configured in the top of the first location substrate 1, and each contact probe 3 penetrates each first hole 13 and each second hole 23 of threading a needle of threading a needle; Wherein, each contact probe 3 one end has a test section 31 other ends and has a teat 32, test section 31 via each first thread a needle hole 13 be exposed to first the location substrate 1, teat 32 via each second thread a needle hole 23 clips in second the location substrate 2; Be described in detail as follows, first puts instrument 100 makes the second location substrate, 2 location be arranged on substrate 1 top, first location; Moreover, each contact probe 3 penetrates each and first threads a needle hole 13 and each second when threading a needle hole 23, first puts instrument 100 can provide a space, make each contact probe 3 thread a needle hole 23 and be contained in first and put in the instrument 100 via each first hole 13 and each second of threading a needle, cause each teat 32 via each second thread a needle hole 23 with clip in the second location substrate 2, and then locate the position of each contact probe 3.
Shown in the step b and Fig. 8 A to Fig. 8 C of Fig. 7, in addition, provide a rising instrument 200, rising instrument 200 is risen the second location substrate 2 from first below of putting instrument 100, make between the first location substrate 1 and the second location substrate 2 to be formed with an interval S.
Shown in the step c and Fig. 8 D of Fig. 7, a distance piece 4 is provided, this distance piece 4 is divided into 2 half space bars 42 of symmetry combination, and each half space bar 42 is provided with a U-shaped tank 421, the two U-shaped tanks 421 common rooms 41 that form; Again 2 half space bars 42 are inserted in the interval S, allow 2 half space bars 42 be combined into distance piece 4 simultaneously, to allow distance piece 4 be folded between the first location substrate 1 and the second location substrate 2, and make the first location substrate 1 and second location be formed with the room 41 of ccontaining this a plurality of contact probes 3 between the substrate 2, and make the two ends of each contact probe 3 be connected to each first thread a needle hole 13 and second hole 23 of threading a needle respectively respectively.
Shown in the steps d and Fig. 8 D of Fig. 7, again, provide a plurality of bolting elements, the second location substrate 2 via this bolting element 5 respectively with locking at distance piece 4; Be described in detail as follows, the second location substrate 2 comprises one second external insulation plate 22 of one second interior insulcrete 21 and gluing insulcrete 21 in second, insulcrete 21 is interposed between distance piece 4 and the second external insulation plate 22 in second, and insulcrete 21 and the second external insulation plate 22 are provided with this a plurality of second hole 23 of threading a needle jointly in second; Each bolting element 5 has a head 51, insulcrete 21 is provided with a plurality of lockholes 211 in second, the second external insulation plate 22 is provided with a plurality of holes 221 of burying underground of corresponding each lockhole 211, each buries the aperture size in hole 221 underground greater than the outside peripheral dimension of each head 51, each bolting element 5, is embedded in each head 51 and respectively buries hole 221 underground these second interior insulcrete 21 corresponding distance pieces 4 lockings via each lockhole 211.
Shown in the step e and Fig. 8 E to Fig. 8 G of Fig. 7, wherein, the present invention also is included in a step e ' before the e step, wherein provide one second to put instrument 300 in the e ' step, second puts solid and contact this a plurality of contact probes 3, the first of the corresponding second location substrates of instrument 300 2 dresses puts instrument 100 and second and puts instrument 300 and insert and put the first location substrate 1, second jointly and locate substrate 2, this a plurality of contact probes 3 and distance piece 4; This second puts instrument 300 purposes and makes the first location substrate 1 put instrument 300 via second to overturn to be arranged on substrate 2 tops, second location, and second puts instrument 300 and prevent that each contact probe 3 from coming off in each first hole 13 and each second hole 23 of threading a needle of threading a needle; Therefore, second puts instrument 300 dresses admittedly behind the second location substrate 2, and upset makes the first location substrate 1 be arranged on the top of the second location substrate 2 again, can throw off rising instrument 200, to carry out following steps.
Moreover, provide a plurality of lock members 6, the first to put instrument 100 and be provided with a plurality of through holes, each lock member 6 utilizes first through hole of putting instrument 100, with 1 locking of the first location substrate on distance piece 4; Be described in detail as follows, the first location substrate 1 comprises one first external insulation plate 12 of one first interior insulcrete 11 and gluing insulcrete 11 in first, insulcrete 11 is interposed between distance piece 4 and the first external insulation plate 12 in first, and insulcrete 11 and the first external insulation plate 12 are provided with this a plurality of first hole 13 of threading a needle jointly in first; Each lock member 6 has a head 61, this first interior insulcrete 11 is provided with a plurality of lockholes 111, the first external insulation plate 12 is provided with a plurality of holes 121 of burying underground of corresponding each lockhole 111, each buries the aperture size in hole 121 underground greater than the outside peripheral dimension of each head 61, each lock member 6 is locked in distance piece 4 via each lockhole 111 with the first interior insulcrete 11, and each head 61 is embedded in and respectively buries hole 121 underground.
Shown in the step f and Fig. 8 H to Fig. 8 L of Fig. 7, utilize 200 dismountings first of rising instrument to put instrument 100, this moment first, location substrate 1 and the second location substrate 2 were respectively via lock member 6 and bolting element 5 corresponding distance piece 4 lockings; At last, should temporarily get loose by a plurality of lock members 6, moving from the 2 sliding displacements of the first location substrate, the 1 relative second location substrate, thereby make this a plurality of first thread a needle hole 13 and hole 23 of should a plurality of second threading a needle produce off normals and concern, pressed from both sides the location of pulling by the first location substrate 1 and the second location substrate 2 respectively with the two ends that make each contact probe 3, be described in detail as follows, the two ends of each contact probe 3 are produced distortion by the first location substrate 1 and 2 compactings of the second location substrate respectively, thereby each contact probe 3 is fixed between the first location substrate 1 and the second location substrate 2 by clip, dismantle second again and put instrument 300, namely finish the probe unit structure.
So, by above-mentioned contexture, can obtain probe unit structure of the present invention and preparation method thereof.By this, the first location substrate 1 and the second location substrate 2 are stacked mutually when making, and make the first location substrate 1 and second location be formed with interval S between the substrate 2 by rising instrument 200, distance piece 4 is inserted interval S again and is folded in the first location substrate 1 and second and locatees between the substrate 2, with the room 41 that is formed with ccontaining each contact probe 3; Compare existing, probe unit structure of the present invention make with combination on also have step and simply reach assembling and be easy to characteristics.
As shown in Figure 9, the use state of probe unit structure of the present invention, wherein, the test section 31 correspondence proving objects contact of contact probe 3 one ends, and the other end of feeler inspection pin 3, an end respective signal treating apparatus 400 that namely has teat 32 electrically connects, and makes probe unit check object and signal processing apparatus 400 to electrically connect respectively, checks the electric connection between the signal processing apparatus 400 of signal of object and outgoing inspection to reach.In addition, the two ends of each contact probe 3 are produced distortion by the first location substrate 1 and 2 compactings of the second location substrate respectively; By this, location contact probe 3, contact probe 3 loose contacts or come off when avoiding detecting, and then improve the stability in use of probe unit structure of the present invention.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (19)
1. a probe unit structure is characterized in that, comprising:
One first location substrate is provided with a plurality of first hole of threading a needle;
One second location substrate, to should first location substrate configuration, this second location substrate is provided with the hole of threading a needle, a plurality of second of the hole of should a plurality of first threading a needle;
A plurality of contact probes, the two ends of each this contact probe are connected to respectively this first thread a needle hole and this second hole of threading a needle respectively respectively; And
One distance piece is connected between this first location substrate and this second location substrate, and this distance piece is provided with a room of ccontaining these a plurality of contact probes;
Wherein, this first location substrate this second location sliding displacement of substrate relatively is moving, thereby make this a plurality of first thread a needle hole and hole of should a plurality of second threading a needle produce the off normal relation, pressed from both sides the location of pulling by this first location substrate and this second location substrate respectively with the two ends that make each this contact probe.
2. probe unit structure according to claim 1, it is characterized in that, the two ends of each this contact probe are produced distortion by this first location substrate and this second location substrate compacting respectively, thereby each this contact probe is fixed between this first location substrate and this second location substrate by clip.
3. probe unit structure according to claim 1, it is characterized in that, each this contact probe one end has a test section other end and has a teat, this test section via respectively this first thread a needle the hole be exposed to this first the location substrate, this teat via respectively this second thread a needle the hole clip in this second the location substrate.
4. probe unit structure according to claim 1, it is characterized in that, this distance piece comprises 2 half space bars of symmetry combination, this 2 half space bar is folded between this first location substrate and this second location substrate, each this half space bar is provided with a U-shaped tank, and this two U-shapeds tank forms this room.
5. probe unit structure according to claim 1, it is characterized in that, this first location substrate comprises insulcrete and gluing in one first in one first external insulation plate of this insulcrete in first, this in first insulcrete be interposed between this distance piece and this first external insulation plate, this in first insulcrete and this first external insulation plate be provided with this a plurality of first hole of threading a needle jointly.
6. probe unit structure according to claim 5, it is characterized in that, also comprise a plurality of lock members, each this lock member has a head, this in first insulcrete be provided with a plurality of lockholes, this first external insulation plate is provided with a plurality of holes of burying underground that should a plurality of lockholes, each buries the aperture size in hole underground greater than the outside peripheral dimension of each this head, respectively insulcrete is to should the distance piece locking in first with this via this lockhole respectively for this lock member, and respectively this head is embedded in that respectively this buries the hole underground.
7. probe unit structure according to claim 1, it is characterized in that, this second location substrate comprises insulcrete and gluing in one second in one second external insulation plate of this insulcrete in second, this in second insulcrete be interposed between this distance piece and this second external insulation plate, this in second insulcrete and this second external insulation plate be provided with this a plurality of second hole of threading a needle jointly.
8. probe unit structure according to claim 7, it is characterized in that, also comprise a plurality of bolting elements, each this bolting element has a head, this in second insulcrete be provided with a plurality of lockholes, this second external insulation plate is provided with a plurality of holes of burying underground that should a plurality of lockholes, each buries the aperture size in hole underground greater than the outside peripheral dimension of each this head, respectively insulcrete is to should the distance piece locking in second with this via this lockhole respectively for this bolting element, and respectively this head is embedded in that respectively this buries the hole underground.
9. method for making for preparing as probe unit according to claim 1 is characterized in that step comprises:
A) this second location substrate is configured in this substrate top, first location, and makes each this contact probe penetrate respectively this first thread a needle hole and this second hole of threading a needle respectively;
B) provide a rising instrument, this rising instrument is risen this second location substrate, makes between this first location substrate and this second location substrate to be formed with a spacing;
C) this distance piece is inserted this spacing and being folded between this first location substrate and this second location substrate, make between this first location substrate and this second location substrate to be formed with this room, and make the two ends of each this contact probe be connected to respectively this first thread a needle hole and this second hole of threading a needle respectively respectively;
D) provide a plurality of bolting elements, this second location substrate by this bolting element respectively with locking at this distance piece;
E) provide a plurality of lock members, this first location substrate by this lock member respectively with locking at this distance piece; And
F) should temporarily get loose by a plurality of lock members, this second location sliding displacement of substrate is moving relatively from this first location substrate, thereby make this a plurality of first thread a needle hole and hole of should a plurality of second threading a needle produce the off normal relation, pressed from both sides the location of pulling by this first location substrate and this second location substrate respectively with the two ends that make each this contact probe.
10. the method for making of probe unit according to claim 9, it is characterized in that, also provide one first to put instrument in a step, this first is put this second location substrate of tool positioned and is arranged on this substrate top, first location, and this first is put each this contact probe of tool positioned and be arranged in respectively this first thread a needle hole and this second hole of threading a needle respectively.
11. the method for making of probe unit according to claim 10, it is characterized in that, each this contact probe one end has a test section other end and has a teat, this test section via respectively this first thread a needle the hole be exposed to this first the location substrate, this teat via respectively this second thread a needle the hole clip in this second the location substrate.
12. the method for making of probe unit according to claim 9 is characterized in that, this distance piece is divided into 2 half space bars of symmetry combination in the c step, makes this 2 half space bar insert this spacing.
13. the method for making of probe unit according to claim 12 is characterized in that, each this half space bar is provided with a U-shaped tank, and this two U-shapeds tank forms this room.
14. the method for making of probe unit according to claim 9, it is characterized in that, this second location substrate comprises insulcrete and gluing in one second in one second external insulation plate of this insulcrete in second in the d step, this in second insulcrete be interposed between this distance piece and this second external insulation plate, this in second insulcrete and this second external insulation plate be provided with this a plurality of second hole of threading a needle jointly.
15. the method for making of probe unit according to claim 14, it is characterized in that, each this bolting element has a head, this second interior insulcrete is provided with a plurality of lockholes, this second external insulation plate is provided with a plurality of holes of burying underground that should a plurality of lockholes, each buries the aperture size in hole underground greater than the outside peripheral dimension of each this head, respectively this bolting element via this lockhole respectively with this in second insulcrete make respectively this head be embedded in that respectively this buries the hole underground to should the distance piece locking.
16. the method for making of probe unit according to claim 9, it is characterized in that, also be included in an e step step e ' before, wherein provide one second to put instrument in the e ' step, this first location substrate second is put instrument and is overturn to be arranged on this substrate top, second location via this, and this second is put instrument and prevent that these a plurality of contact probes from coming off in respectively this first thread a needle hole and this second hole of threading a needle respectively.
17. the method for making of probe unit according to claim 9, it is characterized in that, this first location substrate comprises insulcrete and gluing in one first in one first external insulation plate of this insulcrete in first in the e step, this in first insulcrete be interposed between this distance piece and this first external insulation plate, this in first insulcrete and this first external insulation plate be provided with this a plurality of first hole of threading a needle jointly.
18. the method for making of probe unit according to claim 17, it is characterized in that, each this lock member has a head, this first interior insulcrete is provided with a plurality of lockholes, this first external insulation plate is provided with a plurality of holes of burying underground that should a plurality of lockholes, each buries the aperture size in hole underground greater than the outside peripheral dimension of each this head, respectively this lock member via this lockhole respectively with this in first insulcrete be locked in this distance piece and this second location substrate, respectively this head is embedded in that respectively this buries the hole underground.
19. the method for making of probe unit according to claim 9, it is characterized in that, the two ends of each this contact probe are produced distortion by this first location substrate and this second location substrate compacting respectively in the f step, thereby each this contact probe is fixed between this first location substrate and this second location substrate by clip.
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CN110537100A (en) * | 2017-04-12 | 2019-12-03 | 日本麦可罗尼克斯股份有限公司 | Electrical connection device |
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