CN103180923A - Retaining jig, handling jig, set of retaining jigs, and adhered material retaining device - Google Patents
Retaining jig, handling jig, set of retaining jigs, and adhered material retaining device Download PDFInfo
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- CN103180923A CN103180923A CN2011800509181A CN201180050918A CN103180923A CN 103180923 A CN103180923 A CN 103180923A CN 2011800509181 A CN2011800509181 A CN 2011800509181A CN 201180050918 A CN201180050918 A CN 201180050918A CN 103180923 A CN103180923 A CN 103180923A
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- 239000000463 material Substances 0.000 title abstract description 38
- 238000012423 maintenance Methods 0.000 claims description 128
- 238000000034 method Methods 0.000 claims description 59
- 238000012545 processing Methods 0.000 claims description 22
- 230000000717 retained effect Effects 0.000 abstract 2
- 239000003990 capacitor Substances 0.000 description 40
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 34
- 239000002245 particle Substances 0.000 description 21
- 239000011248 coating agent Substances 0.000 description 16
- 238000000576 coating method Methods 0.000 description 16
- 229920001971 elastomer Polymers 0.000 description 16
- 230000033001 locomotion Effects 0.000 description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 239000000853 adhesive Substances 0.000 description 15
- 230000001070 adhesive effect Effects 0.000 description 15
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 239000000377 silicon dioxide Substances 0.000 description 15
- 239000005060 rubber Substances 0.000 description 14
- 239000013536 elastomeric material Substances 0.000 description 11
- 239000000203 mixture Substances 0.000 description 11
- 238000007790 scraping Methods 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 8
- -1 polytetrafluoroethylene Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- HCOLPNRPCMFHOH-UHFFFAOYSA-N Prodigiosin Natural products CCCCCC1C=C(C=C/2N=C(C=C2OC)c3ccc[nH]3)N=C1C HCOLPNRPCMFHOH-UHFFFAOYSA-N 0.000 description 7
- 230000006378 damage Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 238000012856 packing Methods 0.000 description 7
- TWFGRJUTAULJPZ-USZBIXTISA-N prodigiosin Chemical compound N1=C(C)C(CCCCC)=C\C1=C/C1=NC(C=2[N]C=CC=2)=C[C]1OC TWFGRJUTAULJPZ-USZBIXTISA-N 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 229920002379 silicone rubber Polymers 0.000 description 5
- 238000007259 addition reaction Methods 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 238000007598 dipping method Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 230000037452 priming Effects 0.000 description 4
- 239000004698 Polyethylene Substances 0.000 description 3
- 208000027418 Wounds and injury Diseases 0.000 description 3
- 208000014674 injury Diseases 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000010023 transfer printing Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910002012 Aerosil® Inorganic materials 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 150000002221 fluorine Chemical class 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 150000001451 organic peroxides Chemical class 0.000 description 2
- 150000002978 peroxides Chemical class 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 238000004901 spalling Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 230000002459 sustained effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- 239000002174 Styrene-butadiene Substances 0.000 description 1
- 241000278713 Theora Species 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000005030 aluminium foil Substances 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- MTAZNLWOLGHBHU-UHFFFAOYSA-N butadiene-styrene rubber Chemical compound C=CC=C.C=CC1=CC=CC=C1 MTAZNLWOLGHBHU-UHFFFAOYSA-N 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000006071 cream Substances 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000011115 styrene butadiene Substances 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G2/00—Details of capacitors not covered by a single one of groups H01G4/00-H01G11/00
- H01G2/02—Mountings
- H01G2/04—Mountings specially adapted for mounting on a chassis
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Laminated Bodies (AREA)
- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
- Adhesives Or Adhesive Processes (AREA)
Abstract
The present invention treats as a problem the provision of a retaining jig, a handling jig, a set of retaining jigs, and a retaining device for adhered material, with which it is possible to easily detach almost all of the adhered materials which are adhesively retained regardless of it being possible for the adhered materials to be adhesively retained as desired. The invention of the present application which is intended to solve the problem relates to: a retaining jig (1) comprising a jig main body (2) and an elastic member (3) which is disposed on the obverse face of the main body (2) and which has a maximum roughness Ry (JIS B-0601-1994) of 1.0-6.0 [mu]m; a handling jig comprising the retaining jig (1) and a detaching tool; a set of retaining jigs comprising at least one retaining jig (1); and a retaining device for adhered material comprising the set of retaining jigs.
Description
Technical field
The present invention relates to keep fixture, process fixture, combination keeps fixture and by the adhesion holding device, more specifically, although relate to can according to anticipation adhesion keep by adhesion also can easily make the maintenance fixture that is almost all broken away from by adhesion that kept by adhesion, process fixture, combination keeps fixture and by the adhesion holding device.
Background technology
In the past, such as when making the miniature parts such as chip capacitor (chip capacitor) etc., use can remain in surperficial maintenance fixture with adhesions such as parts with the miniature parts that can make this small parts etc.For example, the maintenance fixture that patent documentation 1 is put down in writing is characterised in that, " surface element forms by having adhesive rubber elastic material at least, can utilize its adhesion strength and connect airtight on this elastomeric material surface keep miniature parts " (with reference to the technical scheme 1 of patent documentation 1).In order to use such maintenance fixture to make miniature parts etc., miniature parts is as being remained in adhesion by adhesion under the state that keeps fixture by to supplies such as various manufacturing processes.And, will remain in the miniature parts made under the state that keeps fixture etc. from keeping fixture to take off in adhesion.
As the method from keeping fixture to take off miniature parts etc., such as there being following method: the miniature parts scraping parts such as scraper are slided on the elastomeric material surface, and the miniature parts that will be kept by adhesion thus etc. takes off.As such method, following record is specifically arranged in patent documentation 2: " a kind of processing method of electronic component possesses following operation: keep the operation of a plurality of electronic components by the mode of adhesion at this adhesion coating with supporting mass and electronic component spare keeper of the adhesion coating of a face that is formed at supporting mass; The electronic component that is held in above-mentioned adhesion coating is implemented the operation of predetermined processing; And the operation that makes adhesion coating depression and make blade relatively move electronic component is broken away from from adhesion coating towards the adhesion coating surface direction under this state by the front end that utilizes above-mentioned blade." (with reference to technical scheme 4 etc.）。
In the method that patent documentation 2 is put down in writing, shown in Figure 3 as patent documentation 2, owing to being that mode by " utilizing the front end of blade make the adhesion coating depression and blade is relatively moved towards the adhesion coating surface direction " makes electronic component 2 tilt and break away from, so set if inappropriate the size of electronic component, the etat lacunaire of adhesion coating, the adhesion strength of adhesion coating, the translational speed of blade etc., make sometimes the electronic unit overturning and again be adhered to the adhesion coating surface, can't take off this electronic component from adhesion coating according to anticipation.
In addition, as other method, following record is arranged in patent documentation 3: " a kind of processing method of electronic component is characterized in that, comprises the following steps: preparation has sticky material layer, non-adhesion part or adhesion strength less than the step of the holding unit of the low sticky limit part of sticky material layer; The sticky material layer that is adhered to above-mentioned holding unit by an end face that makes electronic component keeps the step of this electronic component; And make the scraping unit along the surface of above-mentioned sticky material layer and move towards the direction that makes above-mentioned non-adhesion part or above-mentioned low sticky limit part towards trend moving direction end, thus from the step of sticky material layer scraping electronic component " (with reference to technical scheme 8 etc.）。As the method that patent documentation 3 is put down in writing, even if miniature parts scraping parts are slided on the elastomeric material surface, sometimes also can overturning by adhesion and again be adhered to the adhesion coating surface, thus can't easily take off miniature parts.
Particularly tend to gradually in recent years miniaturization due to miniature parts etc., so the size of miniature parts etc. becomes less, just more easily produce the problem of adhesion again such as miniature parts as described above.
Patent documentation 1: Japanese JP 07-93247 communique
Patent documentation 2: TOHKEMY 2003-77772 communique
Patent documentation 3: TOHKEMY 2004-193366 communique
Summary of the invention
The object of the invention is to, although provide can adhere according to anticipation keep by adhesion also can easily make the maintenance fixture that is almost all broken away from by adhesion that adhesion keeps, process fixture, combination keeps fixture and by the adhesion holding device.
the present application people finds, being pressed on elastomeric element by adhesion, it is adhered and keep and press the maintenance fixture that is made its disengaging by adhesion towards the side, if existing technology general knowledge is not for making adhesion keep being kept by adhesion by smooth can't the adhesion according to anticipation of the adherence apparent height of adhesion, make the surface on adherence surface have to a certain degree roughness if violate above-mentioned technology general knowledge, even if make by adhesion and adherence Surface Contact, if keep this by adhesion but it is not pressed can't adhere securely, however, if but will be pressed on the adherence surface by adhesion, embodying keep by adhesion thereby can adhere with the almost identical adhesion strength in smooth adherence surface, and all broken away from by adhesion by pressing towards the side by just can easily being made almost according to anticipation by adhesion of adhesion maintenance, the inventor is based on as above new discovery and completed the present application.
Like this, the present application people finds, if make the surface on adherence surface have to a certain degree roughness, can with high level obtain simultaneously when pressing by adhesion high adhesion strength and by the detachment of adhesion, thereby the high detachment that performance can't obtain in the adjustment of the simple adhesion strength on adherence surface, the inventor has completed the present application based on as above new discovery.
Maintenance fixture of the present invention as the first method that is used for solving above-mentioned problem is characterised in that, constitutes to possess: jig main body; And elastomeric element, this elastomeric element is arranged at the surface of above-mentioned jig main body, and its maximal roughness Ry(JIS B0601-1994) be 1.0 μ m～6.0 μ m.
The preferred example of this maintenance fixture is, the concavo-convex equispaced Sm(JIS B0601-1994 of above-mentioned elastomeric element) be 5.0 μ m～15.0 μ m.
Processing fixture of the present invention as the second method that is used for solving above-mentioned problem is characterised in that, constitutes to possess: maintenance fixture involved in the present invention; And release piece, this release piece relatively moves and makes by being broken away from by adhesion that adhesion keeps along the surface of the elastomeric element of above-mentioned maintenance fixture.
Keep fixture to be characterised in that as the combination of the present invention for the third method that solves above-mentioned problem, possess: first keeps fixture, and this first maintenance fixture constitutes the first elastomeric element that possesses the first jig main body and be arranged at the surface of above-mentioned the first jig main body; And second keep fixture, this the second maintenance fixture constitutes the second elastomeric element that comprises the second jig main body and be arranged at the surface of above-mentioned the second jig main body, it is maintenance fixture involved in the present invention that above-mentioned the first maintenance fixture and above-mentioned second keeps at least one party of fixture, and above-mentioned the second elastomeric element has the adhesion strength greater than the adhesion strength of above-mentioned the first elastomeric element.
This combination keeps the preferred example of fixture to be, above-mentioned the second maintenance fixture is maintenance fixture involved in the present invention.
As being characterised in that by the adhesion holding device for the of the present invention of cubic method that solves above-mentioned problem, possessing combination involved in the present invention and keep fixture.
The effect of invention
The surface and the maximal roughness Ry that possess jig main body and be arranged at this jig main body due to maintenance fixture involved in the present invention are the elastomeric element of 1.0 μ m～6.0 μ m, if so will be pressed on elastomeric element by adhesion, connected airtight by the surface of the contact-making surface of adhesion and elastomeric element and make and remained in elastomeric element by adhesion adhesion, on the other hand, if press by adhesion towards the side, by the surfacial spalling of the contact-making surface of adhesion from elastomeric element, break away from from elastomeric element thereby make by adhesion.
In addition, processing fixture involved in the present invention possesses maintenance fixture involved in the present invention, combination involved in the present invention keeps fixture to possess at least one maintenance fixture involved in the present invention, and the combination involved in the present invention that possessed by the adhesion holding device involved in the present invention keeps fixture.
Therefore, according to the present invention, although can provide can adhere according to anticipation keep by adhesion also can easily make the maintenance fixture that is almost all broken away from by adhesion that adhesion keeps, process fixture, combination keeps fixture and by the adhesion holding device.
Description of drawings
Fig. 1 is the concise and to the point stereogram that illustrates as the maintenance fixture of an example of maintenance fixture involved in the present invention.
Fig. 2 is the concise and to the point front view that illustrates as the processing fixture of an example of processing fixture involved in the present invention.
Fig. 3 illustrates as combination involved in the present invention to keep the combination of an example of fixture to keep the sketch of fixture.
Fig. 4 be illustrate as involved in the present invention by an example of adhesion holding device by the brief description figure of adhesion holding device.
Fig. 5 is illustrated in as involved in the present invention being utilized first to keep fixture and the brief description figure of the state that keeps the chip capacitor main body of dangling in the adhesion holding device by an example of adhesion holding device.
Fig. 6 is illustrated in to dangle as the chip capacitor main body that will be formed with electrode in the adhesion holding device by an example of adhesion holding device involved in the present invention to remain in the first brief description figure that keeps the state of fixture.
Fig. 7 is illustrated in as involved in the present invention to be remained in the first chip capacitor main body that keeps fixture by dangling in the adhesion holding device towards the second brief description figure that keeps the state that fixture presses by an example of adhesion holding device.
Fig. 8 is illustrated in as involved in the present invention will electrode be set and the chip capacitor that forms dangles and remains in the second brief description figure that keeps the state of fixture by an example of adhesion holding device in the both ends application in the adhesion holding device.
Embodiment
For adhesion remain in maintenance fixture involved in the present invention, process fixture, combination keeps fixture and by the adhesion holding device by adhesion, listed can make need by adhesion remain in above-mentioned these devices by adhesion by the adhesion parts, use parts and small electronic component with parts etc. such as having enumerated small appliance with parts, small-sized machine member.In addition, owing to also being comprised in the manufacture process of adhesion by conveying operation of adhesion etc., so also comprised by adhesion itself such as small appliance, small-sized machine member and small electronic component etc. by adhesion.Therefore, in the present invention, need not clearly to distinguish by adhesion and by the adhesion parts.These by adhesion in, as be fit to by adhesion remain in maintenance fixture involved in the present invention, process fixture, combination keeps fixture and by the adhesion holding device by adhesion, can enumerate small electronic component and/or small electronic component with parts etc.As small electronic component and small electronic component parts, for example can enumerate capacitance sheet (sometimes also referred to as chip capacitor.), the finished product such as inductance sheet, resistor disc, FPC, wafer or unfinished work etc. and/or can make these having the prism of flange or cylinder, both ends such as prism or cylinder, an end and have the prism of flange or cylinder etc. by adhesion.
Maintenance fixture involved in the present invention constitutes the elastomeric element that possesses jig main body and have the adherence surface of maximal roughness Ry in above-mentioned scope, can will be remained in by the adhesion adhesion adherence surface of elastomeric element according to anticipation, on the other hand, can easily adhesion be remained in being taken off by adhesion of elastomeric element where necessary.In order to be remained in maintenance fixture involved in the present invention by the adhesion adhesion, will be pressed on by adhesion the adherence surface of elastomeric element.So, for the adherence surface by the elastomeric element that is pressed by the contact-making surface of adhesion, for example has the mountain peak part generation strain of above-mentioned maximal roughness Ry and the mountain valley part becomes smooth, the adherence of this elastomeric element surface with connected airtight by the contact-making surface of adhesion, will be remained in elastomeric element by the adhesion adhesion thus.On the other hand, in order to be remained in being taken off by adhesion of maintenance fixture involved in the present invention by adhesion, press from the side by adhesion so that should be tilted by adhesion.So the mountain peak part that strain occured is restored and is made the adherence surface have maximal roughness Ry in above-mentioned scope,, is made thus by adhesion to break away from elastomeric element easily from the surfacial spalling of elastomeric element by the contact-making surface of adhesion.Like this, according to the technology general knowledge of prior art as can be known, if smooth can't the adhesion of adherence apparent height kept by adhesion, and it is opposite with above-mentioned technology general knowledge in the present invention, when the adherence surface of elastomeric element has maximal roughness Ry in above-mentioned scope, high adhesion strength in the time of can obtaining simultaneously to press by adhesion with high level and by the detachment of adhesion, its result, although can according to anticipation to the maintenance of being adhered by adhesion, also can easily make almost all to be broken away from by adhesion.
With reference to accompanying drawing, the maintenance fixture as an example of maintenance fixture involved in the present invention is described.As shown in Figure 1, this maintenance fixture 1 possesses jig main body 2 and elastomeric element 3, and this elastomeric element 3 is arranged at the surface of jig main body 2 and has the adherence surface that can keep being adhered by adhesion.
As shown in Figure 1, jig main body 2 supporting elastomeric elements 3 described later.As long as this jig main body 2 has level and smooth surface, as long as can support elastomeric element 3, can form various forms based on various design alterations.For example, as shown in Figure 1, this jig main body 2 has the plate-like sheet greater than the size of elastomeric element 3, and near the ora terminalis from elastomeric element 3 its ora terminalis is outstanding.This jig main body 2 also can form size and the roughly the same square plate-like sheet of elastomeric element 3.
Jig main body 2 is as long as formed by the material that can support elastomeric element 3, such as listing the resin film such as metal forming, polyester, polytetrafluoroethylene, polyimides, polyphenylene sulfide, polyamide, Merlon, polystyrene, polypropylene, polyethylene and the polyvinyl chloride such as the metal thin plate such as stainless steel and aluminium, aluminium foil and Copper Foil or resin plate etc.And then jig main body 2 also can be made as stacked multilayer chip material and the duplexer that forms.
Keep by adhesion with being adhered by the Surface Contact of adhesion due to the adherence by elastomeric element 3 surface, keep by the adhesion strength of adhesion so have to adhere.Particularly, elastomeric element 3 can have 1g/mm usually
2～60g/mm
2Adhesion strength, also can have 7g/mm
2～60g/mm
2Adhesion strength.The adhesion strength of elastomeric element 3 is values of utilizing following " SHIN-ETSU HANTOTAI's polymeric method " to be measured.In the method, prepare following load-measuring device, this load-measuring device possesses: elastomeric element 3 (is for example carried out the fixing absorption fixation device of level, trade name: magnechuck, KET-1530B, powerful (KANETEC) (strain) of Japan made) or vacuum attraction chuck (chuck plate) etc.; And the cylinder that forms diameter 10mm is installed and the digital display dynamometer (trade name: ZP-50N of the contact made by stainless steel (SUS304) at the measurement section end, reach (IMADA) (strain) manufacturing according to dream), elastomeric element 3 is fixed on the absorption fixation device or vacuum attraction chuck of this load-measuring device, and measurement environment is set as 21 ± 1 ℃, humidity 50 ± 5%.Next, the above-mentioned contact that is installed in above-mentioned load-measuring device is descended until with till the measured position of elastomeric element 3 contacts with the speed of 20mm/min, then, with the load of regulation and perpendicular to the mode of measured section, this contact is pressed on measured position and continued for 3 seconds.Herein, the load with afore mentioned rules is set as 25g/mm
2Next, pull above-mentioned contact to make it to separate with measured position with the speed of 180mm/min, read this moment and pull separation load by what above-mentioned digital display dynamometer was measured gained.Plurality of positions at measured position is carried out this operation, and a plurality of the pulling of obtaining separated load and carried out arithmetic average, and then with the arithmetic mean that the obtains adhesion strength as elastomeric element 3.
The maximal roughness Ry(JIS B0601-1994 on the adherence surface of elastomeric element 3) be 1.0 μ m～6.0 μ m.if the maximal roughness Ry deficiency of elastomeric element 3 1.0 μ m, the mountain peak part that has maximal roughness is too small, with excessively connected airtight and cause being worsened by the detachment of adhesion by the contact-making surface of adhesion, on the other hand, if the maximal roughness Ry of elastomeric element 3 surpasses 6.0 μ m, the mountain peak part that has maximal roughness is excessive, even press by adhesion and make mountain peak part generation strain, the flatness on adherence surface is variation also, so can't keep by adhesion with high adhesion strength adhesion, thereby, no matter excessive or too small, all can't obtain simultaneously high adhesion strength and by the detachment of adhesion with high level.Thereby in order to obtain simultaneously high adhesion strength with higher level and to be reached purpose of the present invention by the detachment of adhesion, preferred maximal roughness Ry is 1.0 μ m～5.0 μ m, is particularly preferably 2.0 μ m～4.0 μ m.Maximal roughness Ry is that the adherence surface is not to the maximal roughness Ry under the state that keeps of being adhered by adhesion, according to JIS B0601-1994, at least 3 positions, place are measured under the condition of cutoff (cut-off) 0.8mm, measurement length 2.4mm etc., and obtained their arithmetic mean.Can adjust maximal roughness Ry by method described later etc.
Concavo-convex equispaced Sm(JIS B0601-1994 for the adherence surface of elastomeric element 3) for, be preferably 5.0 μ m～15.0 μ m, be more preferably 5.0 μ m～11.0 μ m, be particularly preferably 6.0 μ m～11.0 μ m.If the concavo-convex equispaced Sm on adherence surface is in above-mentioned scope, the interval between mountain peak part and mountain peak part (perhaps mountain valley part and mountain valley part) becomes required interval, so the flatness on the adherence surface that is affected because of the strain of mountain peak part further improves, and can reach well purpose of the present invention.The concavo-convex equispaced Sm on adherence surface be on the adherence surface not to the concavo-convex equispaced Sm under the state that keeps of being adhered by adhesion, be to measure according to the method for measurement that JIS B0601-1994 puts down in writing basically.At this moment, the cutoff wavelength is 0.8mm, and evaluation length is 2.4mm, and the cutoff kind is Gaussian Profile, and is the arithmetic mean of at least 3.Can adjust by method described later etc. the concavo-convex equispaced Sm on adherence surface.
In order to reach well purpose of the present invention, for the center line average roughness Ra(JIS B0601-1994 on the adherence surface of elastomeric element 3) for, be preferably 0.1 μ m～0.5 μ m, be particularly preferably 0.2 μ m～0.4 μ m.The center line average roughness Ra on adherence surface is not to the center line average roughness Ra under the state that keeps of being adhered by adhesion on the adherence surface, according to JIS B0601-1994 and at cutoff 0.8mm, measure under the condition of length 2.4mm etc. measuring at least 3 positions, place, and calculate their arithmetic mean.Can adjust by method described later etc. the center line average roughness Ra on adherence surface.
In order to reach well purpose of the present invention, for 10 mean roughness Rz(JIS B0601-1994 on the adherence surface of elastomeric element 3) for, be preferably 1.0 μ m～5.0 μ m, be particularly preferably 2.0 μ m～4.0 μ m.10 mean roughness Rz on adherence surface are that the adherence surface is not to 10 mean roughness Rz under the state that keeps of being adhered by adhesion, according to JIS B0601-1994 and at cutoff 0.8mm, measure under the condition of length 2.4mm etc. measuring at least 3 positions, place, and calculate their arithmetic mean.Can adjust by method described later etc. 10 mean roughness Rz on adherence surface.
Can adjust respectively by following method maximal roughness Ry, concavo-convex equispaced Sm, center line average roughness Ra and 10 mean roughness Rz on the adherence surface of elastomeric element 3.For example, can enumerate following method, namely, to the adherence surface of elastomeric element 3 carry out known roughening treatment such as blasting treatment etc. surface treatment method, with having the mould that carried out the die cavity inner surface after the surface treatment in known roughening treatment, elastomeric element 3 is carried out the method etc. that the method for moulding, the adhesive material that makes elastomeric element 3 or form elastomeric element 3 contain shot-like particle.
The adhesive material that makes elastomeric element 3 or formation elastomeric element 3 is contained the method for shot-like particle (hereinafter referred to as method for coarsening surface of the present invention.) be briefly described.The shot-like particle that uses in method for coarsening surface involved in the present invention so long as particle gets final product, is not particularly limited its shape, material etc., such as enumerating known granular filler etc.
Be that the inorganic filler such as packing material is as the shot-like particle that satisfies said reference such as enumerating silica.Be packing material as silica, such as the silicon dioxide that synthesizes by wet method of silicon dioxide, precipitated silica and the silica gel etc. that synthesize by dry method that can enumerate aerosil, fused silica etc.Wherein, preferred aerosil, precipitated silica.
No matter whether shot-like particle is that silica is packing material, but the viewpoint from being difficult to condense and roughly disperse equably elastomeric element 3 preferably utilizes organic substance with the surface coverage of shot-like particle.Although the organic substance that shot-like particle is covered can be low-molecular-weight organic compound, the viewpoint of the dispersiveness during from mixing is considered and preferred organic resin.As organic resin, such as listing polyethylene, polypropylene, polystyrene, polyester fiber, fluororesin (such as polytetrafluoroethylene), polyimides, polyphenylene sulfide, polyamide, Merlon etc.Wherein, preferably bring into play the organic resin of high-fire resistance and durability.Cover shot-like particle as such organic substance, be coated with poly silicon dioxide etc. such as enumerating.
No matter whether shot-like particle is that silica is packing material, but from the viewpoint that this shot-like particle is roughly disperseed elastomeric element 3 equably and can be in above-mentioned scope at least the maximal roughness Ry in maximal roughness Ry, concavo-convex equispaced Sm, center line average roughness Ra and 10 mean roughness Rz be adjusted, preferred its average grain diameter is 3 μ m～30 μ m, be more preferably 3 μ m～20 μ m, be particularly preferably 5 μ m～10 μ m.The method of measurement of average grain diameter is according to aggregate particle size d50(laser method).
No matter whether shot-like particle is that silica is packing material, but from the viewpoint that this shot-like particle is roughly disperseed elastomeric element 3 equably and can be in above-mentioned scope at least the maximal roughness Ry in maximal roughness Ry, concavo-convex equispaced Sm, center line average roughness Ra and 10 mean roughness Rz be adjusted, with respect to the rubber that forms elastomeric element 3 or 100 mass parts of resin, preferably contain the shot-like particle of 1～25 mass parts in elastomeric element 3, particularly preferably in containing the shot-like particle of 3～25 mass parts in elastomeric element 3.In addition, to contain this shot-like particle in elastomeric element 3 in order making, can to enumerate the method etc. of the adhesive material that forms elastomeric element 3 being added shot-like particle.
Hardness (JISK6253(A type Du sieve hardometer) for the adherence surface of elastomeric element 3) for, be preferably 5～50, be particularly preferably 30～50.If the adherence surface is in the scope of above-mentioned hardness, when being pressed on the adherence surface by adhesion, it being adhered maintenance, particularly strain easily occurs in the mountain peak part on adherence surface, make the planarization more of adherence surface, thereby can connect airtight more securely with by the contact-making surface of adhesion, and can prevent by the damage of adhesion and breakage etc.In addition, content that can be by shot-like particle etc. is adjusted the hardness of elastomeric element 3.
Preferred resilient members 3 has the thickness about 0.05mm～5mm.If the not enough 0.05mm of the thickness of this elastomeric element 3, the mechanical strength of elastomeric element 3 reduces, the durability of elastomeric element 3 is not enough, on the other hand, if the thickness of this elastomeric element 3 surpasses 5mm, elastomeric element 3 is difficult to carry out strain, sometimes can't easily take off by adhesion from elastomeric element 3.
As long as the adhesion strength by adhesive phase or priming coat, elastomeric element 3 or setting tool etc. and elastomeric element 3 is fixed in the surface of jig main body 2, in keeping fixture 1, by adhesive phase or priming coat, elastomeric element 3 is fixed in the surface of jig main body 2.
As long as the solidfied material by the adhesive material that can bring into play above-mentioned adhesion strength or this adhesive material forms elastomeric element 3, as sticky material, such as can enumerate fluorine-type resin or fluorine class rubber, contain fluorine-type resin or fluorine based composition, silicones or the silicon rubber of fluorine class rubber, various elastomers such as the silicon composition that contains silicones or silicon rubber, polyurethanes elastomer, natural rubber, styrene-butadiene copolymerization rubber etc.Wherein, preferred silicon rubber and/or contain addition reaction curing type adherence silicon composition and the peroxide curing type adherence silicon composition of silicon rubber.As above-mentioned addition reaction curing type adherence silicon composition, the contain silicon raw rubber (a), crosslinking component (b), adhesion strength improving agent (c), catalyst (d), silica that for example can enumerate that TOHKEMY 2008-091659 communique puts down in writing are the adherence composition of packing material (e).As above-mentioned peroxide curing type adherence silicon composition, the contain silicon raw rubber (a), adhesion strength improving agent (c), silica that for example can enumerate that TOHKEMY 2008-091659 communique puts down in writing are the adherence composition of packing material (e), organic peroxide (f).Adhesive material is solidified under suitable condition.In addition, make it to be in above-mentioned scope in order to utilize method for coarsening surface involved in the present invention to adjust maximal roughness Ry, make these adhesive material contain the shot-like particle of ormal weight.
For keeping fixture 1, because the adherence surface of elastomeric element 3 has maximal roughness Ry in above-mentioned scope, so as mentioned above, high adhesion strength in the time of can obtaining simultaneously reciprocal characteristic that is press by adhesion and by the detachment of adhesion, thus purpose of the present invention can be reached well.In addition, keep the whole surface on the adherence surface of fixture 1 to have adherence, in case of necessity can be easily to maintenance of being adhered by adhesion, so need not accurately being positioned by the adhesion holding position of adhesion, productivity and operability be excellence extremely.
Processing fixture involved in the present invention is described.Processing fixture involved in the present invention possesses: maintenance fixture involved in the present invention; And release piece, this release piece relatively moves so that by being broken away from by adhesion that adhesion keeps along the surface of the elastomeric element of this maintenance fixture.Processing fixture involved in the present invention is preferred for following situation, such as in order to be made, carry, to take in by adhesion or inspection etc. and temporary transient adhesion keeps above-mentioned a plurality of by adhesion a plurality of, and then take off by adhesion keep by adhesion.The maintenance fixture of processing fixture involved in the present invention keeps fixture 1 etc. such as enumerating as mentioned above.
As long as the release piece of processing fixture involved in the present invention has following execution mode, namely, surface along the elastomeric element that keeps fixture relatively moves with respect to the maintenance fixture, make thus by adhesion and remain in being broken away from by adhesion of this maintenance fixture, for example can suitably enumerate have following by the release piece of impact portions, this by impact portions can collide by adhesion remain in keep fixture by adhesion and press this by adhesion.As such release piece, can be for example its front end as the blade of the triangular prism shape of the above-mentioned overturning configuration of being brought into play function by impact portions, in addition, can also be itself as the above-mentioned wire rod of being brought into play function by impact portions etc.The release piece of processing fixture involved in the present invention preferably relatively moves with non-contacting state to relatively move with the state of the Surface Contact of the elastomeric element that keeps fixture or non-contacting state.
To process fixture 4 as example, to using processing fixture involved in the present invention to an example of the processing method processed by adhesion (below, be sometimes referred to as a kind of method of operation.) describe.Thereby this a kind of method of operation has the disengaging operation that release piece is relatively moved along the adherence surface of the maintenance fixture 1 that keeps being adhered by adhesion take off by adhesion, preferably have with pressed on by adhesion the elastomeric element 3 that keeps fixture 1 the adherence surface and to this maintenance operation of being adhered and keeping by adhesion.That is, this a kind of method of operation is the method for being taken off by adhesion that keeps and will be adhered and keep being adhered by adhesion.
Above-mentioned adhesion operation be with pressed on by adhesion elastomeric element 3 adherence surface and to this operation of being adhered and keeping by adhesion.In order to be remained the state of erecting by adhesion at the maintenance fixture 1 of processing fixture 4, make a plurality of patterns that are arranged as regulation under state that erected by adhesion on elastomeric element 3, and its bottom surface is being pressed on the adherence surface of the elastomeric element 3 that keeps fixture 1.So by the surface crimping of the bottom surface of adhesion and adherence, as mentioned above, the mountain peak part generation strain of elastomeric element 3 and make the adherence surface become smooth utilizes the adhesion strength on adherence surface to be remained in elastomeric element 3 with a plurality of by the adhesion adhesion.As the method that keeps being adhered by adhesion in this mode, such as enumerating method that TOHKEMY 2008-091659 communique puts down in writing etc.Particularly, if will have than by the thin thickness of the axial length of adhesion and be formed with and put plate for a plurality of vertical establishings that set the hole of being passed through by adhesion and load under the state of elastomeric element 3, to be inserted into by adhesion and set the hole, next use such as smooth plate-shaped member etc. and press this by the free end of adhesion towards elastomeric element 3, elastomeric element 3 is remained in by adhesion by adhesion.
In this a kind of method of operation, for being remained in, adhesion is held being taken off by adhesion of fixture 1, thereby being relatively moved along the adherence surface that keeps fixtures 1, presses by adhesion towards the side release piece 5.Particularly, in non-contacting mode, release piece 5 is disposed at the adherence near surface that keeps fixture 1.At this moment, though release piece 5 not with the Surface Contact that keeps fixture 1, break away from so long as maintenance fixture involved in the present invention just can make by adhesion according to anticipation.Make the movement of relatively advancing along the adherence surface of the release piece 5 that configures in this mode, even also it is towards by the adhesion side shifting.So, the front end of release piece 5 with by the side butt of adhesion, press by adhesion towards above-mentioned direction that is side and make its inclination, the mountain peak part of strain is restored, make the maximal roughness Ry in the above-mentioned scope of adherence surface formation, thereby make by the adherence sur-face peeling of the contact-making surface of adhesion from elastomeric element 3.Like this, by being broken away from from the elastomeric element 3 that keeps fixture 1 by adhesion that release piece 5 is pressed.Like this, utilize processing fixture 4 and can make by almost all being broken away from by adhesion that adhesion keeps.
in addition, the method that patent documentation 2 is put down in writing is the method for " utilizing the front end of blade make the adhesion coating depression and blade is relatively moved along the adhesion coating surface direction ", in addition, the method that patent documentation 3 is put down in writing be " make the scraping unit along the surface of above-mentioned sticky material layer and towards the direction that makes above-mentioned non-adhesion part or above-mentioned low sticky limit partly tend to the moving direction end move and from the method for sticky material layer scraping electronic component ", yet, even if miniature parts scraping parts are slided on the elastomeric material surface, sometimes also can overturning by adhesion and again be adhered to the adhesion coating surface, thereby can't easily take off miniature parts.In addition, if the scraping parts are slided on the elastomeric material surface, if particularly in order taking off reliably by adhesion, scraping parts brute force to be pressed on the elastomeric material surface and it to be slided on this elastomeric material surface or the scraping parts are slided on the elastomeric material surface swimmingly, sometimes because of miniature parts scraping parts to elastomeric material surface injury, damage.On the other hand, the maintenance fixture involved in the present invention that possesses the detachment excellence due to processing fixture involved in the present invention, even therefore by the adhesion overturning, adherence is surperficial just can not occured again to adhere as long as it is not pressed on by brute force, can make and almost all easily broken away from and do not occur again to adhere from elastomeric element 3 by adhesion by what adhesion kept, also need not to make release piece 5 to slide on the adherence surface, also need not release piece 5 is pressed on this adherence surface.Therefore, handle clip prodigiosin involved in the present invention enough highly prevents by release piece the elastomeric element injury, especially prevents adherence surface injury.
Like this, maintenance fixture involved in the present invention and handle clip prodigiosin involved in the present invention enough according to anticipation to a plurality of by adhesion maintenances of adhering, and can easily make by adhesion and remain in almost all being broken away from by adhesion of maintenance fixture.Therefore, maintenance fixture involved in the present invention and processing fixture involved in the present invention be applicable to such as by the manufacturing process of adhesion, dispersion by recovery of adhesion etc.
Keep fixture to describe with reference to accompanying drawing to combination involved in the present invention.Combination involved in the present invention keeps fixture to possess: first keeps fixture, and it constitutes the first elastomeric element that comprises the first jig main body and be arranged at the surface of above-mentioned the first jig main body; And second keep fixture, it constitutes the second elastomeric element that comprises the second jig main body and be arranged at the surface of above-mentioned the second jig main body, it is maintenance fixture involved in the present invention that the first maintenance fixture and second keeps at least one party in fixture, and the second elastomeric element has the adhesion strength greater than the adhesion strength of the first elastomeric element.Keep in fixture in combination involved in the present invention, it is maintenance fixture involved in the present invention that preferred the first maintenance fixture and second keeps second in fixture to keep fixture, and particularly preferably first keeps fixture and second to keep the both sides of fixture to be maintenance fixture involved in the present invention.Keep in fixture in combination involved in the present invention, except the adhesion strength difference, first keeps fixture and second to keep other structure of fixture basic identical.Combination involved in the present invention keeps fixture to be preferred for following situation, namely, such as in order to be implemented successively the processing of regulation in order by the both ends of adhesion and to make by adhesion etc. a plurality of, after the maintenance fixture of being transferred to the opposing party by adhesion of the maintenance fixture that adhesion is remained in a side, with being taken off by adhesion after shifting.
As shown in Figure 3, keep the combination of an example of fixture to keep fixture 6 to possess as combination involved in the present invention: first keeps fixture 1A, and it constitutes the surface that comprises the first jig main body 2A and be arranged at this first jig main body 2A and can be to the first elastomeric element 3A that is adhered by adhesion and keep; And second keep fixture 1B, and it constitutes the surface that comprises the second jig main body 2B and be arranged at this second jig main body 2B and can be to the second elastomeric element 3B that is adhered by adhesion and keep.First keeps fixture 1A and second to keep fixture 1B basic identical with the structure that keeps fixture 1.
In first kept fixture 1A and the second maintenance fixture 1B, the first elastomeric element 3A and the second elastomeric element 3B had and can to the adhesion strength of being adhered by adhesion and keeping, usually can have 1g/mm
2～60g/mm
2Adhesion strength (according to above-mentioned " SHIN-ETSU HANTOTAI's polymeric method "), also can have 7g/mm
2～60g/mm
2Adhesion strength.
And the second elastomeric element 3B of the second maintenance fixture 1B has the adhesion strength greater than the adhesion strength of the first elastomeric element 3A.The first elastomeric element 3A and the second elastomeric element 3B have the relation of such adhesion strength, can will be transferred to the second elastomeric element 3B of the second maintenance fixture 1B from the first elastomeric element 3A of the first maintenance fixture 1A by adhesion thus.From can be swimmingly will being transferred to the second elastomeric element 3B and viewpoint that it is come off from the first elastomeric element 3A by adhesion, for the difference of the adhesion strength (above-mentioned " SHIN-ETSU HANTOTAI's polymeric method ") of the first elastomeric element 3A and the second elastomeric element 3B, be preferably 15g/mm
2～43g/mm
2, be more preferably 18g/mm
2～35g/mm
2, be particularly preferably 20g/mm
2～30g/mm
2Can adjust the first elastomeric element 3A and 3B adhesion strength separately by the content of adhesion strength improving agent and the content of shot-like particle etc.
Keep in fixture 6 in combination, first keeps fixture 1A and second to keep fixture 1B all to be set as keeps fixture 1, in other words, first keeps the first elastomeric element 3A and second of fixture 1A to keep the second elastomeric element 3B of fixture 1B all to have the interior maximal roughness Ry of above-mentioned scope.If first keeps fixture 1A and second to keep fixture 1B to keep fixture 1, can be according to anticipation to a plurality of by the adhesion maintenance of adhering, and can almost all be adhered the state that erects that keeps and keep the first elastomeric element 3A of fixture 1A to keep the second elastomeric element 3B of fixture 1B to shift to second from first with it by adhesion what kept by adhesion.
To involved in the present invention being described by the adhesion holding device.The combination involved in the present invention that possessed by the adhesion holding device involved in the present invention keeps fixture.With reference to accompanying drawing to as being described by the adhesion holding device by an example of adhesion holding device involved in the present invention.As shown in Figure 4, be to possess to comprise that the first maintenance fixture 1A and second keeps the combination of fixture 1B to keep fixture by adhesion holding device 10, can keep being adhered by adhesion and can will be kept fixture 1A to transfer to the device of the second maintenance fixture 1B from first by adhesion.The combination that is possessed by adhesion holding device 10 keeps fixture and combination to keep the structure of fixture 6 identical.
As shown in Figure 4, constituted by adhesion holding device 10, first keep fixture 1A and second keep fixture 1B can be arranged so that the first elastomeric element 3A and the second elastomeric element 3B opposite each other.Thus, for example can keep and erect state ground and adhesion is remained in first keep being transferred to by adhesion of fixture 1A second to keep fixture 1B.The first elastomeric element 3A like this and the configuration of the second elastomeric element 3B can realize by the shift mechanism that is made of mechanical structure, also can be by manually realizing.
As shown in Figure 4, the face side that is not formed with the first elastomeric element 3A of jig main body 2A is fixed in support unit 14, this support unit 14 is arranged at from keeping fixture shift unit 12 towards the end of the supporting arm 13 of below extension, keeps fixture shift unit 12 thereby keep fixture 1A to be supported on first.
This maintenance fixture shift unit 12 is installed on track 11, constitutes to move in the horizontal direction and supporting arm 13 is moved along the vertical direction along this track 11.Therefore, be supported in first of this maintenance fixture shift unit 12 and keep that fixture 1A can along continuous straight runs and above-below direction move freely by keeping fixture shift unit 12.Namely, having dangles keeps being kept fixture 1A for example can be shifted into dipping bath with the top of conductive paste or be transplanted on dipping bath from this position with the position of the top of the second maintenance fixture 1B for example, the suitable position beyond the top of conductive paste by first of the first elastomeric element 3A of adhesion, and can keep fixture 1B to descend towards second, and make to be become by adhesion and be held in the second the second elastomeric element 3B that keeps fixture 1B, then make first to keep fixture 1A to keep fixture 1B to rise from second.
And then this maintenance fixture shift unit 12 constitutes and can be rotated motion around axle by axle centered by track 11.If keep fixture shift unit 12 to be rotated motion in this mode, can keep the state of fixture 1A change into according to anticipation utilizing the first elastomeric element 3A to dangle keeping by the state of adhesion and utilize the first elastomeric element 3A to erect arranging and keeping by the state of adhesion with first.
In addition, as shown in Figure 4, the face side that is not formed with the second elastomeric element 3B of the second jig main body 2B is fixed in support unit 18, this support unit 18 is arranged at from keeping fixture shift unit 16 towards the end of the supporting arm 17 of top extension, keeps fixture shift unit 16 thereby keep fixture 1B to be supported on second.
This maintenance fixture shift unit 16 is installed on and track 11 track 15 of quadrature roughly, basically forms in the mode same with keeping fixture shift unit 12.Therefore, be supported in second of this maintenance fixture shift unit 16 and keep that fixture 1B can along continuous straight runs and above-below direction move freely by keeping fixture shift unit 16, and this second keeps fixture 1B to be rotated motion around axle by axle centered by track 15.
Keep fixture shift unit 12 and keep the motion of fixture shift unit 16 not to be specially limited, for example can enumerate following motion, this motion possesses: produce the driver element of actuating force, for example motor; And the output of this motor is delivered to track 11 or 15 and the transfer unit of supporting arm 13 or 17, such as gear, wire rod etc.This motion can by controls such as common personal computers, also can manually be controlled.
This is constituted by adhesion holding device 10, first keep fixture 1A and second keep fixture 1B can be configured to make near the position that track 11 and track 15 intersect the first elastomeric element 3A and the second elastomeric element 3B opposite each other.Thus, can keep being transferred to by adhesion of fixture 1A second to keep fixture 1B with remained in first by adhesion.
Next, to using this method of being made forming electrode as small electronic component with the chip capacitor main body of one of parts by adhesion holding device 10 as the chip capacitor of small electronic component to describe, simultaneously this effect by adhesion holding device 10 is described.As shown in Figure 5, this chip capacitor main body 7 forms four prisms cylinder, and for example, as shown in Figure 8, chip capacitor 9 constitutes at the both ends of this chip capacitor main body 7 and is formed with respectively electrode 8.
To form electrode 8 in order using by adhesion holding device 10 in chip capacitor main body 7, at first 7 adhesions of chip capacitor main body to be remained in the first elastomeric element 3A.Particularly, make and keep fixture shift unit 12 axle centered by track 11 to be rotated motion around axle, thereby keep fixture 1A to be configured so that the first elastomeric element 3A is positioned at the top with first, for example, as mentioned above, use above-mentioned vertical establishing to put plate chip capacitor main body 7 is pressed on the first elastomeric element 3A.So, become smooth thereby the first elastomeric element 3A carries out strain because of chip capacitor main body 7, and then 7 adhesions of chip capacitor main body remained in the first elastomeric element 3A.
After the maintenance of chip capacitor main body 7 being adhered in this mode, as shown in Figure 5, keep fixture shift unit 12 axle centered by track 11 to be rotated motion around axle if make, form a plurality of chip capacitor main bodys 7 and dangled and remain in the state of the first elastomeric element 3A.Next, make and keep the fixture shift unit 12(not shown) not shown along track 11() move in the horizontal direction, a plurality of chip capacitor main bodys 7 that making dangles keeps are moved horizontally to dipping bath with the top of conductive paste (not shown), make supporting arm 13 move to make the bottom of chip capacitor main body 7 to be impregnated into dipping bath with in conductive paste towards the below.Make supporting arm 13 towards the top motion after a moment, make the conductive paste that is coated on chip capacitor main body 7 dry.So, as shown in Figure 6, form the electrode 8 of big or small approximate equality in the bottom of each chip capacitor main body 7 that remains in the first elastomeric element 3A of dangling.At this moment, owing to will being remained in the first elastomeric element 3A by the adhesion adhesion according to anticipation, so when mentioning among impregnated in conductive paste and from conductive paste, can not come off or tilt from the first elastomeric element 3A by adhesion.
Next, make and keep fixture shift unit 12 to move in the horizontal direction along track 11, make first to keep fixture 1A to be moved horizontally to the second top that keeps fixture 1B, as shown in Figure 7, make first to keep fixture 1A to keep fixture 1B to descend towards second by making supporting arm 13 towards the below motion.Make first to keep fixture 1A further to descend, the bottom that makes adhesion remain in the chip capacitor main body 7 of the first maintenance fixture 1A is crimped on the second elastomeric element 3B of the second maintenance fixture 2A.So, thereby the second elastomeric element 3B becomes smooth because strain occurs chip capacitor main body 7, performance is than the first large adhesion strength of elastomeric element 3A, and chip capacitor main body 7 and the second elastomeric element 3B that making so utilize larger adhesion strength adheres remains in the first elastomeric element 3A are bonding.Next, if by making supporting arm 13 make first to keep fixture 1A to rise towards the top motion, the second elastomeric element 3B embodies the adhesion strength of expectation and the second elastomeric element 3B and has adhesion strength greater than the adhesion strength of the first elastomeric element 3A, thereby chip capacitor main body 7 is adhered to the second elastomeric element 3B securely via electrode 8, and chip capacitor main body 7 residues in hardly the first elastomeric element 3A of the first maintenance fixture 1A but breaks away from this first elastomeric element 3A.Like this, can keep fixture 1A keep fixture 1B to shift a plurality of chip capacitor main bodys 7 and they are come off or overturning to second from first according to anticipation.
Next, make to keep the fixture shift unit 16(not shown) not shown by track 15() centered by axle be rotated motion around axle, remain in the second state that keeps fixture 1B thereby form chip capacitor main body 7 is dangled.Then, identical with aforesaid way, the bottom coated with conductive cream of the chip capacitor main body 7 that is kept by dangling at quilt also makes its dry electrode 8 that forms.
Like this, as shown in Figure 8, be formed with at chip capacitor main body 7 both ends separately size almost the chip capacitor 9 of impartial electrode 8 remain in the second the second elastomeric element 3B that keeps fixture 1B with the state adhesion of dangling.And, for example utilize and keep release piece 5 that the adherence surface of fixture 1B relatively moves to press towards the side by adhesion along second remaining in this second chip capacitor 9 that keeps fixture 1B, thereby the second elastomeric element 3B after the generation strain is restored, and makes above-mentioned chip capacitor 9 easily break away from and fall from the second elastomeric element 3B.
Like this, the related combination of the application of the invention keeps fixture 6 and by the adhesion holding device, can be according to anticipation once with a plurality of maintenance fixtures of a side that remained in the state adhesion that erects by adhesion, and in the time being shifted by the maintenance fixture of adhesion from a side maintenance fixture to the opposing party, can effectively prevent by adhesion residual or overturning on a side maintenance fixture, can be in the situation that to keep erecting state constant with a plurality of maintenance fixtures of the opposing party of being transferred to from a side maintenance fixture by adhesion.That is, if use combination involved in the present invention to keep fixture and by the adhesion holding device, can be with good productivity ratio manufacturing by adhesion.
Maintenance fixture involved in the present invention, processing fixture, combination keep fixture and are not limited to above-mentioned example by the adhesion holding device, can carry out various changes in the scope of the purpose that can reach the present application.For example, although form the adherence surface on the whole surface of above-mentioned maintenance fixture 1 Elastic parts 3, in the present invention as long as at least a portion on the surface of elastomeric element self forms the adherence surface.
Although jig main body 2 and elastomeric element 3 all form rectangle in above-mentioned maintenance fixture 1, as long as but jig main body and elastomeric element form and are fit to the shape that miniature parts is made, can be according to by the shape of adhesion, be formed shape arbitrarily by the shape of adhesion holding device, manufacturing process, operability etc.For example, the retaining clip prodigiosin is enough enumerated the plate body of the polygons such as square, rectangle, pentagon, hexagon, circle, ellipse, unsetting or shape that above-mentioned these combination of shapes are formed etc.In addition, a side's who is not formed with elastomeric element 3 of jig main body 2 face side can be flat shape, can be also the three-dimensional shapes such as semicircle cylindrical shell.
Although above-mentioned maintenance fixture 1 possesses the jig main body 2 of the discoid body that is square, in the present invention, keep fixture to form support unit in the part of elastomeric element.In addition, this support unit and elastomeric element can form by the material with bendability.
Although above-mentioned maintenance fixture 1 forms square discoid body, in the present invention, the retaining clip prodigiosin is enough suitably forms the forms such as plate body, plates, elongate body of endless belt-shaped, heavy wall according to purposes etc.For example, form endless belt-shaped maintenance fixture except its integral body forms endless belt-shaped, other structure forms basically identical with above-mentioned maintenance fixture 1.Therefore, this maintenance fixture comprises and forms endless belt-shaped support unit and build up endless belt-shaped elastomeric element at the superficial layer of support unit.
Although constituting, above-mentioned processing fixture 4 possesses the fixture of maintenance and release piece, but in the present invention, process fixture and also can possess these members parts or member in addition, for example can possess by the driver element of the storage member of adhesion, release piece, in addition, can also possess vertical establishing that TOHKEMY 2008-091659 communique puts down in writing put plate such as above-mentioned vertical establishing put plate and will be inserted into vertical establishing put plate set the hole kept pressing plate that fixture presses etc. by adhesion towards first.
Keep fixture 1A and second to keep fixture 1B although keep possessing in fixture 6 first in combinations thereof, but in the present invention, except the first maintenance fixture and second keeps fixture, combination keeps fixture can also possess other parts or member, keeps fixture, above-mentioned release piece etc. such as possessing the 3rd.
Although possess first in by adhesion holding device 10 and keep fixture 1A and second to keep fixture 1B above-mentioned, but in the present invention, except the first maintenance fixture and second keeps fixture, can also be possessed other parts or member by the adhesion holding device, keep fixture, above-mentioned release piece etc. such as possessing the 3rd.
In addition, combinations thereof keep fixture 6 and above-mentioned by adhesion holding device 10 in, the first elastomeric element 3A and the second elastomeric element 3B can be formed by identical adhesive material, also can be formed by different adhesive material.
And then although show greatly the right angle and cross one another above-mentioned being adapted to by adhesion holding device 10 middle orbits 11 and track 15, track and track also can be provided so almost parallel in the present invention.
In addition, although keep fixture shift unit 12 and 16 to constitute and can be rotated motion around axle by axle centered by track 11 and 15 above-mentioned in by adhesion holding device 10, these keep fixture shift units also can constitute can't be rotated motion.In this case, can to being remained in first of the first elastomeric element, the adhesion of chip capacitor main body keep fixture support at maintenance fixture shift unit, and also can be by from keeping the fixture shift unit to take off, the chip capacitor adhesion being remained in the second maintenance fixture of the second elastomeric element and chip capacitor is taken off from the second elastomeric element.
Embodiment
(embodiment 1)
The length that cuts out a limit from corrosion resistant plate (SUS304 makes, and thickness is 0.5mm) is the foursquare discoid body of 120mm.After utilizing acetone to carry out ungrease treatment to a side's of this discoid body surface, appropriate silicon rubber is bonding with priming paint (trade name " X-33-156-20 ", Shin-Etsu Chemial Co., Ltd makes) be coated on elastomeric element and form the zone (one the length on limit is the square of 110mm, this foursquare center is consistent with the center of discoid body), carry out drying in the environment of 23 ℃, thereby form priming coat (thickness is 3 μ m).Make jig main body 2 in this mode.
As the adhesive material that forms elastomeric element 3, the addition reaction curing type adherence silicon composition of having prepared to have following component.
The rubber composition (trade name " X-34-632A/B ", Shin-Etsu Chemial Co., Ltd makes) that contains silicon raw rubber (a), crosslinking component (b), adhesion strength improving agent (c), catalyst (d) is 90 mass parts
Utilizing the silica that polyethylene is 10 μ m with the average grain diameter of surface coverage is 10 mass parts (the conversion content when silicon raw rubber (a) is 100 mass parts (the conversion content of record in the first table) is 13 mass parts)
The jig main body 2 of making is accommodated in metal die, to form the ready addition reaction curing type adherence silicon composition of formed die cavity on the zone (the length on limit is that 110mm, thickness are the cube of 0.8mm) cast at its elastomeric element, carry out Transfer molding under 120 ℃, the condition of 10MPa, next, make its further curing under the condition of 200 ℃, 4 hours, thereby form elastomeric element 3 and made maintenance fixture 1 on the surface of jig main body 2.
(embodiment 2)
Except the average grain diameter with above-mentioned silica changed to 6 μ m, other condition and step were basically identical with embodiment 1, and had made thus maintenance fixture 1.
(embodiment 3～5)
Except the content with above-mentioned silica changes to respectively 3 mass parts (the conversion content when silicon raw rubber (a) is 100 mass parts is 4 mass parts), 7 mass parts (the conversion content when silicon raw rubber (a) is 100 mass parts is 9 mass parts) and 14 mass parts (the conversion content when silicon raw rubber (a) is 100 mass parts is 18 mass parts), other condition and step are basically identical with embodiment 1, and have made thus maintenance fixture 1.
(comparative example 1 and 2)
Except the content with above-mentioned silica changed to 0 mass parts and 21 mass parts (the conversion content when silicon raw rubber (a) is 100 mass parts is 27 mass parts), other condition and step were basically identical with embodiment 1, and have made thus the maintenance fixture.
The measurement of surface (adherence)
Based on above-mentioned method of measurement, the maximal roughness Ry on the adherence surface of the maintenance fixture made respectively in each embodiment and each comparative example, concavo-convex equispaced Sm, adhesion strength and hardness are measured respectively, its result of measuring gained is as shown in the first table.
(adherence evaluation)
To approximately 25,000 rectangular-shaped being arranged in the same way by adhesion (vertical 0.3mm * horizontal 0.3mm * high 0.6mm), the adherence surface of the elastomeric element of the maintenance fixture that will make respectively in each embodiment and each comparative example presses on each by the end face of adhesion (vertical 0.3mm * horizontal 0.3mm), and to being estimated by the tacky state of adhesion.Its result, the retaining clip prodigiosin of embodiment 1～5 are enough adhered and are kept most by adhesion, and particularly embodiment 3 and 4 retaining clip prodigiosin are enough adhered and kept most by adhesion.On the other hand, comparative example 1 and 2 maintenance fixture can't be adhered and be kept most by adhesion.
(detachment evaluation)
With above-mentioned adherence estimate basic identical, with about 25,000 rectangular-shaped elastomeric elements of the maintenance fixture of making respectively in each embodiment and each comparative example that remained in the erectility adhesion by adhesion (vertical 0.3mm * horizontal 0.3mm * high 0.6mm).In addition, comparative example 1 and 2 maintenance fixture press on this elastomeric element securely by adhesion and the maintenance of forcibly adhering.Like this, after will being remained the state of erecting by the adhesion adhesion, thereby so that the discontiguous mode of elastomeric element and adherence surface makes the blade of polyformaldehyde system along mobile being struck off by adhesion in adherence surface.Its result, the retaining clip prodigiosin of embodiment 1～5 enough make the whole of adhesion maintenance be broken away from by adhesion and elastomeric element 3 is sustained damage, and demonstrate out very high detachment.On the other hand, comparative example 1 and 2 maintenance fixture, if particularly the maintenance fixture of comparative example 1 blade that do not make polyformaldehyde system is with the adherence Surface Contact or be pressed against mobile can't making by being broken away from by adhesion that adhesion keeps under the state on adherence surface, and temporary transient break away from again be adhered to sometimes the adherence surface by adhesion, its detachment is abundant not.
(transfer printing evaluation)
(difference of the adhesion strength of elastomeric element is 22g/mm for the maintenance fixture that utilization is made in embodiment 3 and the maintenance fixture of making in embodiment 5
2) carried out being tested by the transfer printing of adhesion.Particularly, with above-mentioned adherence estimate basic identical, with about 25,000 rectangular-shaped elastomeric elements of the maintenance fixture of making in embodiment 5 that remained in to erect the state adhesion by adhesion (vertical 0.3mm * horizontal 0.3mm * high 0.6mm).Next, make the elastomeric element of the maintenance fixture of making in embodiment 3 be positioned at embodiment 5 the maintenance fixture above and steadily descend.The elastomeric element of the maintenance fixture of embodiment 3 is contacted with a plurality of rectangular-shaped upper end by adhesion that surface at the elastomeric element of the maintenance fixture of embodiment 5 erects setting.Next, after having gone through again 3 seconds after contact, the maintenance fixture that makes embodiment 3 rises towards the top and its maintenance fixture from embodiment 5 is broken away from the speed of 180mm/min..Maintenance fixture to the embodiment 3 after breaking away from is observed the rectangular-shaped hold mode by adhesion, result shows: residue in maintenance fixture rectangular-shaped by 0.5% of the lazy weight integral body of adhesion of embodiment 5, demonstrate very high transfer printing.
Table 1
Utilize possibility on industry
Maintenance fixture involved in the present invention, process fixture, combination and keep fixture and can be applicable to miniature parts etc. is made, carries, taken in by adhesion or the occasion of inspection etc. by the adhesion holding device.
The explanation of Reference numeral
1 ... keep fixture; 1A ... first keeps fixture; 1B ... second keeps fixture; 2 ... jig main body; 2A ... the first jig main body; 2B ... the second jig main body; 3 ... elastomeric element; 3A ... the first elastomeric element; 3B ... the second elastomeric element; 4 ... process fixture; 5 ... release piece; 6 ... combination keeps fixture; 7 ... the chip capacitor main body; 8 ... electrode; 9 ... chip capacitor; 10 ... by the adhesion holding device; 11,15 ... track; 12,16 ... keep the fixture shift unit; 13,17 ... supporting arm; 14,18 ... support unit.
Claims (6)
1. one kind keeps fixture, it is characterized in that,
Described maintenance fixture constitutes to be possessed:
Jig main body; And
Elastomeric element, this elastomeric element is arranged at the surface of described jig main body, and its maximal roughness Ry(JIS B0601-1994) be 1.0 μ m～6.0 μ m.
2. maintenance fixture according to claim 1, is characterized in that,
The concavo-convex equispaced Sm(JIS B0601-1994 of described elastomeric element) be 5.0 μ m～15.0 μ m.
3. process fixture for one kind, it is characterized in that,
Described processing fixture constitutes to be possessed:
The described maintenance fixture of claim 1 or 2; And
Release piece, this release piece relatively moves and makes by being broken away from by adhesion that adhesion keeps along the surface of the elastomeric element of described maintenance fixture.
4. a combination keeps fixture, it is characterized in that,
Described combination keeps fixture to possess:
First keeps fixture, and this first maintenance fixture constitutes the first elastomeric element that possesses the first jig main body and be arranged at the surface of described the first jig main body; And
Second keeps fixture, and this second maintenance fixture constitutes the second elastomeric element that possesses the second jig main body and be arranged at the surface of described the second jig main body,
It is the described maintenance fixture of claim 1 or 2 that described the first maintenance fixture and described second keeps at least one party of fixture, and,
Described the second elastomeric element has the adhesion strength greater than the adhesion strength of described the first elastomeric element.
5. combination according to claim 4 keeps fixture, it is characterized in that,
Described the second maintenance fixture is the described maintenance fixture of claim 1 or 2.
6. one kind by the adhesion holding device, it is characterized in that,
Described possessed the described combination maintenance of claim 4 or 5 fixture by the adhesion holding device.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010251007 | 2010-11-09 | ||
| JP2010-251007 | 2010-11-09 | ||
| PCT/JP2011/005727 WO2012063405A1 (en) | 2010-11-09 | 2011-10-13 | Retaining jig, handling jig, set of retaining jigs, and adhered material retaining device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103180923A true CN103180923A (en) | 2013-06-26 |
| CN103180923B CN103180923B (en) | 2016-12-07 |
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| CN201180050918.1A Active CN103180923B (en) | 2010-11-09 | 2011-10-13 | Fixture, process fixture, combination is kept to keep fixture and by adhesion holding means |
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| Country | Link |
|---|---|
| JP (1) | JP5936230B2 (en) |
| KR (1) | KR101853806B1 (en) |
| CN (1) | CN103180923B (en) |
| TW (1) | TWI556274B (en) |
| WO (1) | WO2012063405A1 (en) |
Cited By (1)
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|---|---|---|---|---|
| CN105321734A (en) * | 2014-07-28 | 2016-02-10 | 黄武 | Production method of micro part slice |
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| JP6135150B2 (en) * | 2013-01-25 | 2017-05-31 | Tdk株式会社 | Removal method of electronic parts |
| JP6000182B2 (en) * | 2013-04-01 | 2016-09-28 | 日本ゼオン株式会社 | Method for producing sheet for lithium ion secondary battery electrode |
| JP2018078132A (en) * | 2016-11-07 | 2018-05-17 | 信越ポリマー株式会社 | Holding jig for precision part, and method for manufacturing the same |
| JP7156755B2 (en) * | 2018-04-18 | 2022-10-19 | 信越ポリマー株式会社 | Adhesive substrate and method for separating objects from the adhesive substrate |
| JP7180828B2 (en) * | 2018-10-31 | 2022-11-30 | 信越ポリマー株式会社 | holding jig |
| JP2022104308A (en) | 2020-12-28 | 2022-07-08 | エルジー ディスプレイ カンパニー リミテッド | Transmission system, transmission cable, transmission method, and display device |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201243172A (en) | 2012-11-01 |
| WO2012063405A1 (en) | 2012-05-18 |
| KR20140053814A (en) | 2014-05-08 |
| JP5936230B2 (en) | 2016-06-22 |
| CN103180923B (en) | 2016-12-07 |
| JPWO2012063405A1 (en) | 2014-05-12 |
| KR101853806B1 (en) | 2018-05-04 |
| TWI556274B (en) | 2016-11-01 |
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