CN102759489A - Multifunctional vacuum friction and wear testing machine - Google Patents
Multifunctional vacuum friction and wear testing machine Download PDFInfo
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- CN102759489A CN102759489A CN201110106243XA CN201110106243A CN102759489A CN 102759489 A CN102759489 A CN 102759489A CN 201110106243X A CN201110106243X A CN 201110106243XA CN 201110106243 A CN201110106243 A CN 201110106243A CN 102759489 A CN102759489 A CN 102759489A
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Abstract
The invention provides a multifunctional vacuum friction and wear testing machine, which not only can simulate special environmental atmospheres such as vacuum, radiation and corrosion, but also can conduct tribology tests in a relatively wide speed and load range by using various contact manners (ball-disc and pin-disc). The multifunctional vacuum friction and wear testing machine mainly comprises a vacuum system, a friction and wear system, a power transmission system, a control system, and the like, wherein the friction and wear system comprises a lever structure (22) used for fixing a test sample fixture (20) and capable of freely rotating in a horizontal direction and a vertical direction; the lever structure (22) comprises a cantilever beam (18) and a vertical arm (23) which are arranged in a perpendicular manner; the cantilever beam (18) is connected with the vertical arm (23) through a two degree of freedom bearing structure (17); positions of the cantilever beam (18) and the vertical arm (23) can be adjusted in the horizontal direction and the vertical direction through the control of a manipulator (15) and a hand wheel structure (13), so that the test sample fixture (20) can accurately move within two degrees of freedom; and a temperature sensor (2) and a pressure sensor (3) are mounted on the test sample fixture (20), so as to detect/monitor friction coefficients and temperature variations during the tribology tests.
Description
Technical field
The invention belongs to material and device performance field tests, be specifically related to the space environmental simulation factor effect (for example high vacuum environment) of a kind of ability and carry out friction material and the multifunctional vacuum friction wear testing machine of device performance test.
Background technology
Along with the development of hi-techs such as Aero-Space, many equipments such as spacecraft all run under the high vacuum environment (10
-5Pa～10
-7The Pa magnitude), the vacuum environment operating mode can be brought special friction problem.For example, lack oxygen and other atmospheric reaction thing in the vacuum, the oxide film of metal surface is removed in friction process soon; And be difficult to form new oxide film; Therefore, friction surface is in " exposing " state very soon, directly contact and serious adhesion takes place between fresh metal surface; Do not have the diffusion convection current of gas to come in time to take away frictional heat, the temperature of friction surface will raise rapidly, thereby change the physical property and the chemical stability of friction material; The liquid lubrication agent molecule in a vacuum can be with the volatilization of very big speed, causes the rapid loss of lubricant and makes lubrication failure.
Solve the lubricated difficult problem in the vacuum environment, develop various novel lubricating materials, must carry out a large amount of tribology experiments.Than the frictional wear experiment of equipping under the part actual condition, the environment of laboratory simulation test and operating mode factor are relatively easily controlled, and the test condition variation range is wide, and experimentation cost is lower, can obtain the data of comparison system at short notice.Therefore, in tribology research, laboratory simulation test has obtained using widely, and the exploitation of corresponding test equipment and technology seems extremely important.
The vacuum friction wear testing machine is to carry out the basic tool that tribology Design and lubricant are selected in the vacuum environment operating mode.Because the vacuum friction wear testing machine relates to the bigger gordian techniquies of difficulty such as vacuum acquisition, motive seal, live signal collection, the approved product that is used for the Research on wear and friction of material under the vacuum environment at present both at home and abroad is also very deficient.
Along with the vacuum friction problem more and more comes into one's own, the researchist of relevant unit once carried out the development of vacuum frictional testing machine both at home and abroad.
The Cui Zhouping of Beijing Machinery Industry management college and Tsing-Hua University, Liu Jiajun etc. had once developed MT-1 type vacuum friction wear testing machine; This machine can carry out the material friction Study on Wear under multiple conditions such as vacuum, inflation, heating and cooling, can provide from atmosphere to 6.7 * 10
-3The pressure environment of Pa, it can survey load and speed and temperature and vibration characteristics all has the adjustable extent of broad, and has introduced the area of computer aided data acquisition processing system, and measurement parameter is many, and repeatability and experimental precision are better.People such as the Song Baoyu of Harbin Institute of Technology have also developed SY-1 type vacuum friction wear testing machine; This machine mainly by placing four parts of frictional testing machine, vacuum system, test parameters measurement and instrument system, data acquisition processing system in the vacuum chamber to constitute, can provide 4 * 10
-3The pressure environment of Pa, speed is adjustable in the 0-2800r/min scope, and the material friction that can carry out vacuum, fills under the multiple conditions such as gas with various, heating and cooling is learned performance test.The subject matter of these equipment is that the vacuum tightness that can provide is too low; The aerospace high vacuum environment of can not the real simulation spacecraft etc. being worked; In addition, though equipment has been equipped with data acquisition system (DAS) and corresponding software, because of technical merit is at that time limit; Operation of equipment is safeguarded relative complex, and stability also has much room for improvement.
Switzerland CSM company has produced the vacuum friction wear testing machine of HVT, VTR two models and can provide 10
-5The high vacuum environment of handkerchief, and pumping high vacuum to 10
-5Handkerchief only needed less than 2 hours, and elementary vacuum only needs 10 minutes.Friction force and rate of wear can be through sensor and software kit accurately measurements and calculations automatically in the test process.The precision and the security of equipment are higher, operate also more convenient.But the present market price of this kind equipment is higher, and minimalist configuration is also more than 200,000 dollars, and buying and after sale service etc. are all not too convenient.
Summary of the invention
The present invention is optimized ultra-high vacuum system and multifunction friction wear testing machine integrated, successfully develops final vacuum and reaches 6 * 10
-6The multifunctional vacuum friction wear testing machine of Pa.This testing machine provides more infrastructure device through carrying out the friction-wear test under the multiple particular surroundings atmosphere such as vacuum, radiation, corrosion after the follow-up expansion in the hope of the tribology research for the simulation special operation condition.
The present invention relates to a kind of multifunctional vacuum friction wear testing machine, it mainly is made up of vacuum system, tribological wear system, power drive system, control system.Wherein vacuum system comprises: vacuum chamber (1), and at least one view window (4) in that the sidewall of vacuum chamber (1) is arranged is used to connect the vacuum pump flange (11) of vacuum pump, and a plurality of flanges of on top cover, arranging that are used for the configuration feature parts; Tribological wear system comprises: be used for fixing sample coupon jig (20) and the lever construction (22) that can rotate freely at level and vertical both direction; Be used for fixing the sample platform (7) of platter (6) down; Wherein go up sample friction ball or friction pin (5) and be fixed on the sample jig (20), and be arranged on temperature sensor (2) and the pressure transducer (3) on the sample jig (20); Power drive system comprises: servomotor (9), and servomotor (9) drives said sample platform (7) through magnetic fluid shaft coupling (10) and turning axle (8) and following platter (6) is rotated; Control system comprises: be used to measure the compound vacuum gauge of the vacuum tightness in the vacuum chamber (1), and the control system that is used to control the functional parts such as electric lift of molecular pump, mechanical pump, high-vacuum electromagnetic flapper valve, friction sample platform (7) rotation and lever construction (22).
Said sample jig (20) has a hollow bulb, and said temperature sensor (2) insert to be gone up sample pin or ball (5) with near frictional interface through hollow bulb.
Said lever construction (22) comprises semi-girder (18) and the vertical arm (23) that is vertical setting; Semi-girder (18) is connected through two-freedom bearing arrangement (17) with vertical arm (23); Last sample jig (20) is arranged on an end of semi-girder (18); 2/3rds places are provided with scale pan (19) at cantilever fine strain of millet (18) and bearing arrangement (17) middle part, are provided with counterweight (16) at the other end of semi-girder (18).
Said multifunctional vacuum friction wear testing machine also comprises mechanical arm (15) and handwheel (13); The level that said semi-girder (18) can carry out through mechanical arm (15) control and the rotation of vertical direction; Said vertical arm (23) is positioned on the high precision displacement platform (12); Said high precision displacement platform (12) can carry out accurately moving of horizontal direction through handwheel (13) control; Accurate control through mechanical arm (15) and handwheel (13); The position of rubbing wear contact point also can accurately be regulated in the position that can control semi-girder (18), therefore can on a sample, carry out the repeatedly test of differentiated friction radius under the situation of not exitting and vacuumizing again, and this makes test period and cost consumption reduce greatly;
Said mechanical arm (15) and handwheel (13) are installed on the shell of vacuum chamber (1) through dynamic sealing device (14) respectively with connecting.
Said multifunctional vacuum friction wear testing machine also comprises data acquisition processing system; Said data acquisition processing system comprises: the data collecting card (25) that is used to receive the signal of temperature sensor (2) and pressure transducer (3); Data collecting card (25) is sent to computing machine (26) with the signal that collects, and by supporting software systems the data that collected is carried out analyzing and processing, demonstration in real time, formation curve and experiment form.Said kinetic control system comprises software systems, single-chip microcomputer and servo-drive system, realizes the adjusting to kinematic parameters such as sliding speed, direction in the friction test process through kinetic control system.
Said multifunctional vacuum friction abrasion testing machine comprises high speed direct connection mechanical pump and the turbomolecular pump that is connected with vacuum chamber (1) through vacuum pump flange (11) respectively; Through successively starting said high speed direct connection mechanical pump and turbomolecular pump, can make in the vacuum chamber (1) to reach 6 * 10
-6The vacuum tightness of Pa.The magnetic fluid shaft coupling (10) of said power drive system is realized reliable motive seal through coupling flange and vacuum chamber (1) butt joint, and its slip is less than 1 * 10
-10Pam
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-1
The basic function of testing machine according to the invention is space high vacuum environment simulation and tribological property test.Be assembled in the environmental simulation system multifunctional tribology performance test module is integrated, wherein the tribology tester module can make an experiment with the multiple way of contact in the travelling speed of broad and load range; And can carry out environmental damage effect study and tribological property test to solid lubricant (standard specimen) and friction component (typical parts such as bearing, gear) respectively through rational frock design.
Compare similar testing machine, this testing machine has following distinguishing feature:
The first, vacuum-chamber dimensions design and vacuum unit are equipped with rationally, can provide 6 * 10
-6The final vacuum of Pa, and the pumpdown time is shorter, and the test period is short;
Second; Can outside vacuum chamber, accurately regulate the friction pair contacting points position; Therefore can on a sample, carry out the repeatedly test of differentiated friction radius under the situation of not exitting and vacuumizing again, this makes test period and cost consumption reduce greatly;
The 3rd, this equipment can be in the speed of broad and load range be simulated the operating condition of various typical friction parts with multiple relative motion mode.Equipment is just considered extendibility and multifunctionality at the beginning of design, just can carry out multiple space tribology and environmental simulation test through rational frock and test method design.
The 4th, the testing machine operating maintenance is convenient, test data accurately and reliably, and the complete machine cost is low.
Description of drawings
Fig. 1: multifunctional vacuum friction wear testing machine structural representation of the present invention;
Fig. 2: the structural representation of the tribological wear system part of multifunctional vacuum friction wear testing machine of the present invention;
Fig. 3: the structural representation of the last sample jig of multifunctional vacuum friction wear testing machine of the present invention;
Fig. 4: the data acquisition system (DAS) workflow synoptic diagram of multifunctional vacuum friction wear testing machine of the present invention.
Reference numeral: (1) vacuum chamber; (2) temperature sensor; (3) pressure transducer; (4) view window; (5) friction ball; (6) platter under; (7) sample platform; (8) turning axle; (9) servomotor; (10) magnetic fluid shaft coupling; (11) vacuum pump flange; (12) high precision displacement platform; (13) handwheel; (14) dynamic sealing device; (15) mechanical arm; (16) counterweight; (17) two-freedom bearing arrangement; (18) semi-girder; (19) counterweight; (20) friction ball jig or friction pin; (21) spare interface; (22) lever construction; (23) vertical arm; (24) modulate circuit; (25) data centralized procurement card; (26) computing machine.
Embodiment
Testing machine of the present invention is made up of major parts such as vacuum system, tribological wear system, power drive system, control system, data acquisition processing systems.Fig. 1 is the structural representation of vacuum friction wear testing machine of the present invention.As shown in Figure 1; The vacuum system of said testing machine comprises: vacuum chamber (1); At at least one view window (4) that the sidewall of vacuum chamber (1) is arranged, be used to connect the vacuum pump flange (11) of vacuum pump, spare interface (21); And a plurality of flanges that are used for the configuration feature parts, for example be used to the flange that disposes vacuum measurement parts, installation vacuum illuminating lamp, is equipped with mechanical arm, venting etc.; Tribological wear system comprises: be used for fixing sample coupon jig (20) and the lever construction (22) that can rotate freely at level and vertical both direction.Be used for fixing the sample platform (7) of sample coupon (6) down.Wherein go up sample friction ball or friction pin (5) and be fixed on the sample jig (20), temperature sensor (2) is arranged on sample jig (20) inside, and pressure transducer (3) is arranged on the sample jig (20).Said lever construction (22) comprises semi-girder (18) and the vertical arm (23) that is vertical setting, and semi-girder (18) is connected through two-freedom bearing arrangement (17) with vertical arm (23).Sample jig (20) is arranged on an end of semi-girder (18); In cantilever fine strain of millet (18) and bearing arrangement (17), be provided with scale pan (19); The other end at semi-girder (18) is provided with counterweight (16), and said semi-girder (18) can be through mechanical arm (15) control the carrying out rotation of level and vertical two directions.Vertically arm (23) is positioned on the high precision displacement platform (12); Said high precision displacement platform (12) can carry out accurately moving on the horizontal direction through handwheel (13) control; Accurate control through mechanical arm (15) and handwheel (13); Can control the position of semi-girder (18), and realize the accurate adjusting of rubbing contact point position.Wherein mechanical arm (15) and handwheel (13) are installed on the shell of vacuum chamber (1) through dynamic sealing device (14) respectively with connecting; Power drive system comprises: servomotor (9), and servomotor (9) drives said sample platform (7) through magnetic fluid shaft coupling (10) and turning axle (8) and rotates; Control system comprises: be used to measure the compound vacuum gauge of the vacuum tightness in the vacuum chamber (1), and the control system that is used to control the functional parts such as electric lift of molecular pump, mechanical pump, high-vacuum electromagnetic flapper valve, friction sample platform (7) rotation and lever construction (18); Data acquisition processing system comprises: the data collecting card (25) that is used to receive the signal of said temperature sensor (2) and pressure transducer (3); Data collecting card (25) is sent to computing machine (26) with the signal that collects, and by supporting software systems the data that collected is carried out analyzing and processing, demonstration in real time, formation curve and experiment form.
To each major part of multifunctional vacuum friction wear testing machine of the present invention be specified respectively below:
1, vacuum system
Vacuum chamber 1 is designed to vertical type cylinder shape, and the vacuum chamber side wall cloth is put 2 of view windows, and wherein one is used for observing the andfrictional conditions between the sample up and down, and an other displacement that is used for observing frictional position adjustment platform is promptly observed the finely divided scale on the displacement platform.Arrange two of pressure transducer and temperature sensor interface flanges.Arrange 6 of CF35 flanges, 1 is used for installing the vacuum indoor illumination, and stop valve is taken out on 1 installation side, and 2 are used for vacuum measurement, and all the other 2 subsequent use.Be equipped with 1 of mechanical arm flange, be equipped with one of displacement adjustment platform handwheel driving mechanism sealed interface flange.Arrange 1 of venting CF16 flange.1 of vacuum chamber backplane CF200 vacuum suction flange.1 of magnetic fluid driving flange.Displacement adjustment platform threaded mounting hole is some.Friction semi-girder placing rack threaded mounting hole is some.
Vacuum chamber upper end cover part can be mentioned through Motorized lift device, so that the adjustment of the clamping of sample and level of friction position, the chemical polishing of vacuum chamber inside surface, outside surface blasting treatment.
Require to determine the concrete configuration of vacuum system according to vacuum-chamber dimensions and the final vacuum of design: adopt elementary mechanical pump+turbomolecular pump formation oil-free vacuum unit.Movable upper end cover adopts the fluororubber sealing, and system's leak rate is lower than 5 * 10
-10Pam
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-1, this cover system has higher pumping speed, from the atmosphere to the final vacuum, is no more than 1 hour.
2, tribological wear system
This testing machine adopts ball-dish sliding contacting mode, also can sample jig (20) on the column type of sample ball in the clamping directly be replaced by the fixed cylinder pin and can the rubbing contact mode be switched to pin-dish mode.Last sample ball (5) is the 9Cr18 standard rolling bearing steel ball of
; Following platter (6) is diameter 40-50mm; The disk of thickness 8-10mm; Last sample ball is fixed on can be on the lever construction (22) (the about 240mm of length) that level and vertical both direction rotate freely; Last sample ball places the dish top and is in relative static conditions in the friction process, and following platter is fixed on the sample platform (7) and along with platform horizontally rotates together.
Load mode is that counterweight loads, and the various counterweight (19) that is equipped with 1-20N is some, and maximum load weight is 30N.The fixing entire mechanism that goes up sample ball and counterweight is placed on the precision displacement platform (12), can move forward and backward 25mm in the horizontal direction, and vertical direction moves up and down 15mm, and figure is as shown in Figure 2 for the tribological wear system part-structure.
The inner hollow position of the jig (20) of sample ball is installed armoured thermocouple (2) and pressure transducer (3) is set on last sample jig (20) on fixing; In order to gather temperature variation and the friction force in the friction process, the structure of last sample jig (20) is as shown in Figure 3.
3, power drive system
In order in the velocity range of broad, accurately to simulate the secondary andfrictional conditions of multiple typical motion, select the power input system of high performance servomotor for use as this testing machine.
Because of maximum radius of turn in the friction test process is 25mm, maximum load is 30N, and when friction factor was got maximal value 1, it was 25 * 10 that calculating can get the peak torque T that possibly occur in the friction process
-3M * 30N * 1=0.75Nm can instead push away motor power demand P=n * T/9549=3000rpm * 0.75Nm/9549=0.236kW.In order to guarantee the safe and reliable of system, selecting nominal torque for use is 1.3Nm, rated speed 3000rpm, the MHMD042P1U of the Panasonic type servomotor of power 400W.
In order to realize the transmission inside and outside the vacuum chamber, ad hoc meter has been equipped with the magnetic fluid shaft coupling, realizes reliable motive seal through coupling flange and vacuum chamber butt joint, and slip is merely 1 * 10
-10Pam
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-1
4, control system
Testing machine is wanted operate as normal, and each subsystem must be moved according to designated parameters, and carries out interactive adjustment according to the real-time feedback signal.
In extraction gas process, carry out vacuum measurement, and come the corresponding vacuum pump of opening and closing according to current vacuum tightness with ZDF5227 type digital display compound vacuum gauge (containing vacuum gauge);
Be equipped with a control power supply, functional parts such as major control molecular pump, mechanical pump, high-vacuum electromagnetic flapper valve, the rotation of friction sample stage, electric lift.Give external power supply such as power supplies such as molecular pump power source, digital display compound vacuum gauge power supply.
Be equipped with a central dispense water station and water-pressure relay each subsystem is supplied water, warning is provided when hydraulic pressure is not enough.
Through the various test parameterss of obtaining in real time, grasp trystate, by supporting software and hardware process of the test is controlled alternately, to guarantee the safe operation and the accuracy of experimental results of equipment.
5, data acquisition processing system
Mainly investigate the vacuum tribological property of solid lubricant because of this testing machine, so friction factor is an important indicator, friction temperature is higher in the vacuum environment in addition, so the output data of this testing machine is mainly two of friction factor and friction temperatures.Under the coordinative role of software and hardware; Experimental data is after modulate circuit (24) modulation treatment; Import computing machine (26) into by data collecting card (25); And by data analysis processing, in real time demonstration, formation curve and the experiment form of supporting software systems, and the inquiry of historical data and the printing of test figure can be provided to gained.The workflow of data acquisition processing system is as shown in Figure 4.
Opened the vacuum chamber loam cake by Motorized lift device before each on-test; With mechanical arm (15) whole semi-girder (18) is pushed open and is placed on the respective holder, will descend platter (6) to be fixed on the rotation platform (7), unload sample jig (20); The friction ball (5) of packing into inserts temperature sensor (2); On semi-girder, hang up the counterweight (19) of required weight; Close the vacuum chamber loam cake, start high speed direct connection mechanical pump and reach 10
-1The low vacuum of Pa, starting turbomolecular pump subsequently, to reach required vacuum tightness (the highest by 6 * 10
-6Pa); Open total control computer, the test period of this test of software systems input through special use, sample title and numbering, environmental stress, working time, motor speed etc.; Prize semi-girder (18) with mechanical arm (15) on one side, through view window (4) observe on one side, make the thimble of pressure transducer (3) closely contact with pressure bearing head; Click the START button on the software interface; Make servomotor (9) respond setting speed rapidly; Is the relative motion of friction ball (5) and following platter (6) through magnetic coupling (10) and turning axle (8) with the movement conversion of motor, reaches auto stop after the fixed time.In the friction-wear test process; Last sample ball vertically contacts with following platter under the normal load effect; Accurately measure through pressure transducer (3) with the fricative tangent direction friction power of ball when following sample rotates, and convert and obtain friction factor, friction can produce heat and make the rising of ball specimen temperature; Thermopair (temperature-sensitive point is apart from the about 1.5mm of frictional interface) the occurrence temperature variation of passing the sample jig and inserting friction ball; Can be similar to the actual temperature of learning frictional interface through thermal conduction study calculating, experimental data is imported computing machine (26) into by data collecting card (25) after modulate circuit (24) modulation treatment; And by data analysis processing, in real time demonstration, formation curve and the experiment form of supporting software systems, and the inquiry of historical data and the printing of test figure can be provided to gained.
Though the present invention is described with reference to a plurality of embodiment; But the present invention is not limited to the foregoing description; Be to be understood that those skilled in the art can carry out the suitable new embodiment that is combined to form to the parts that relate in the foregoing description, various tangible modification of on the basis that does not break away from the principle of the invention, carrying out and variation all should fall within protection scope of the present invention.
Claims (8)
1. multifunctional vacuum friction wear testing machine, it mainly is made up of vacuum system, tribological wear system, power drive system, control system,
Wherein vacuum system comprises: vacuum chamber (1), at least one view window (4) that the sidewall of vacuum chamber (1) is arranged, be used to connect the vacuum pump flange (11) of vacuum pump, and a plurality of flanges of the configuration feature parts of on top cover, arranging;
Tribological wear system comprises: be used for fixing sample coupon jig (20) and the lever construction (22) that can rotate freely at level and vertical both direction; Be used for fixing the sample platform (7) of platter (6) down; Wherein go up sample friction ball or friction pin (5) and be fixed on the sample jig (20), and be arranged on temperature sensor (2) and the pressure transducer (3) on the sample jig (20);
Power drive system comprises: servomotor (9), and servomotor (9) drives said sample platform (7) through magnetic fluid shaft coupling (10) and turning axle (8) and following platter (6) is rotated;
Control system comprises: be used to measure the compound vacuum gauge of the vacuum tightness in the vacuum chamber (1), and the control system that is used to control the functional parts such as electric lift of molecular pump, mechanical pump, high-vacuum electromagnetic flapper valve, friction sample platform (7) rotation and lever construction (22).
2. vacuum friction wear testing machine as claimed in claim 1 is characterized in that, said sample jig (20) has a hollow bulb, and said temperature sensor (2) insert to be gone up sample friction ball or friction pin (5) with near frictional interface through hollow bulb.
3. multifunctional vacuum friction wear testing machine as claimed in claim 2; It is characterized in that; Said lever construction (22) comprises semi-girder (18) and the vertical arm (23) that is vertical setting, and semi-girder (18) is connected through two-freedom bearing arrangement (17) with vertical arm (23), and sample jig (20) is arranged on an end of semi-girder (18); 2/3rds places are provided with scale pan (19) between cantilever fine strain of millet (18) and bearing arrangement (17), are provided with counterweight (16) at the other end of semi-girder (18).
4. multifunctional vacuum friction wear testing machine as claimed in claim 3; It is characterized in that; Also comprise mechanical arm (15) and handwheel (13), said semi-girder (18) can carry out level and the vertically rotation of both direction through mechanical arm (15) control, and said vertical arm (23) is positioned on the high precision displacement platform (12); Said high precision displacement platform (12) can carry out accurately moving of horizontal direction through handwheel (13) control; To regulate the position of rubbing contact point,, can control the position of semi-girder (18) and accurately regulate the position of sample contact point up and down through the accurate control of mechanical arm (15) and handwheel (13).
5. multifunctional vacuum friction wear testing machine as claimed in claim 4 is characterized in that, said mechanical arm (15) and handwheel (13) are installed on the shell of vacuum chamber (1) through dynamic sealing device (14) respectively with connecting.
6. like the described multifunctional vacuum friction wear testing machine of one of claim 1 to 5; It is characterized in that; Said vacuum friction wear testing machine also comprises data acquisition processing system and kinetic control system; Said data acquisition processing system comprises: the data collecting card (25) that is used to receive the signal of temperature sensor (2) and pressure transducer (3); Data collecting card (25) is sent to computing machine (26) with the signal that collects, and by supporting software systems the data that collected is carried out analyzing and processing, demonstration in real time, formation curve and experiment form, and said kinetic control system comprises software systems, single-chip microcomputer and servo-drive system.
7. vacuum friction wear testing machine as claimed in claim 6; It is characterized in that; Said vacuum friction abrasion testing machine comprises high speed direct connection mechanical pump and the turbomolecular pump that is connected with vacuum chamber (1) through vacuum pump flange (11) respectively; Through successively starting said high speed direct connection mechanical pump and turbomolecular pump, can make in the vacuum chamber (1) to reach 6 * 10
-6The vacuum tightness of Pa.
8. multifunctional vacuum friction wear testing machine as claimed in claim 7 is characterized in that, the magnetic fluid shaft coupling (10) of said power drive system is realized reliable motive seal through coupling flange and vacuum chamber (1) butt joint, and its slip is less than 1 * 10
-10Pam
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