CN102141734B - Gravity compensator and micropositioner adopting same - Google Patents
Gravity compensator and micropositioner adopting same Download PDFInfo
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- CN102141734B CN102141734B CN 201010102422 CN201010102422A CN102141734B CN 102141734 B CN102141734 B CN 102141734B CN 201010102422 CN201010102422 CN 201010102422 CN 201010102422 A CN201010102422 A CN 201010102422A CN 102141734 B CN102141734 B CN 102141734B
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Abstract
The invention relates to a gravity compensator which is used for carrying out vertical gravity compensation to a supported object. The gravity compensator comprises a connecting mechanism, a vertical driving mechanism and a suspension device, wherein the connecting mechanism is connected with the gravity compensator and the supported object, thereby carrying out transmission between the gravity compensator and the supported object; the vertical driving mechanism is connected with the connecting mechanism and used for driving the connecting mechanism to carrying out vertical motion, thereby carrying out vertical compensation to the supported object; and the suspension device is connected with the vertical driving mechanism and leads the vertical driving mechanism to be suspended on a bearing base part so as to lead the vertical driving mechanism to correspondingly move on the bearing base part according to the movement of the supported object. As the suspension device is connected with the bearing base part, the gravity compensator can carrying out motion along with the motion of the supported object to carry out real-time balance to gravity, so that the supported object is in a suspension state, in this case, the motion efficiency and the performance of the supported object are greatly improved.
Description
Technical field
The present invention relates to gravity-compensated device, relate in particular to the gravity-compensated device that is applied to lithographic equipment.
Background technology
Photoetching refers to the figure on a series of mask plates is transferred to complex techniques process on the silicon chip equivalent layer successively by exposure system.In lithographic equipment, work stage is responsible for the precise motion of silicon chip, generally adopts thick microposition mode, and namely the coarse motion platform of large stroke is realized length apart from coarse positioning, and micropositioner is then realized nano level accurate location.The effect of micropositioner is the carrying silicon chip, aims at and the leveling and focusing job task to vertical six degree of freedom accurate adjustment and location silicon chip being finished by level.
In the precise motion equipment of micropositioner and so on, object gravity is larger on the impact of motion, need to take measures to compensate.In the lithographic equipment, generally adopt the combination of gravity compensator+vertical motor, the gravity of the special balance drive object of gravity compensator, the most common with gas-powered, also have by magnetic suspension or spring driven, vertical motor then is responsible for driving object and is made catenary motion, carries out decoupling zero control.
The open date is that 2002-1-8, publication number are the United States Patent (USP) of US6337484, with level and the separately control of catenary motion of micropositioner.Gravity compensator is adopted in vertical driving, comprises a cylinder and a Z-direction long-range navigation thatch (Lorentz) motor, the two parallel connection, three groups altogether.Cylinder provides stable static force, balance micropositioner gravity, and long-range navigation thatch motor provides dynamic force, drives the micropositioner catenary motion.Design level and rotation air-bearing make it have X, Y, Rx, Ry, Rz direction degree of freedom in the gravity compensator, do decoupling motion by long-range navigation thatch motor-driven object with respect to lower floor's object.This gravity compensator structure relative complex, gas circuit is more, and seal request is higher, and is higher to the pneumatically supported rigidity requirement of side direction during to acceleration and deceleration in level.A plurality of gravity compensator layouts can not be eliminated gravity fully on the impact of level and catenary motion in addition.
The open date is that 2009-7-8, publication number are that the CN101477316 Chinese patent has adopted high-pressure fluid path and bellows structure, has invented the gravity compensator of a kind of level and vertical decoupling zero, is used for balancing gravity, drives micropositioner by separation motor again.This gravity compensator structure is very complicated, and design difficulty is large, and can't follow the micropositioner real time kinematics.
For above problem, the present invention proposes a kind of improved gravity compensator.
Summary of the invention
Because the defects of prior art, technical matters to be solved by this invention provides a kind of improved gravity compensator.
According to an aspect of the present invention, provide a kind of gravity compensator, it is to being subjected to supporting object to carry out vertical gravity compensation.Described gravity compensator comprises: bindiny mechanism, and it connects described gravity compensator and describedly is subjected to supporting object, thereby carries out transmission between them; Be connected to the vertical driving mechanism of described bindiny mechanism, described vertical driving mechanism drives described bindiny mechanism and carries out catenary motion, thereby the described supporting object that is subjected to is carried out vertical compensation; Be connected to the levitation device of described vertical driving mechanism, described levitation device so that described vertical driving mechanism float on the carrying base portion so that described vertical mechanism can do corresponding mobile according to the described movement that is subjected to supporting object at described carrying base portion.
Among some embodiment, described gravity compensator also comprises the level that is connected to described vertical driving mechanism to driving mechanism, with drive described gravity compensator do level to motion, thereby to described be subjected to supporting object carry out level to compensation.
Among some embodiment, described bindiny mechanism is the spherical linkage that comprises hinge outer cover, hinge screw and the spherical air-bearing bearing between them, and described spherical linkage has Rx, Ry, Rz three degree of freedom.
Among some embodiment, described vertical driving mechanism is voice coil motor.
Among some embodiment, described vertical driving mechanism is the cylinder that contains air-bearing.
Among some embodiment, described level is long-range navigation thatch motor to driving mechanism, and the mover of described motor is fixed on the described vertical driving mechanism by connecting link, and its stator is connected with fixed part.
Among some embodiment, described levitation device is that gas suspension or magnet suspend.
According to a further aspect in the invention, provide a kind of 6-freedom micro-motion platform, having comprised: horizontal drive motor, the mover of described horizontal drive motor are fixed on the described micropositioner, and its stator is fixed on the plummer of described micropositioner; Vertical drive motor, the mover of described vertical drive motor are fixed on the described micropositioner, and its stator is fixed on the described plummer; Reach as the aforementioned gravity compensator.
Among some embodiment, described micropositioner only comprises a described gravity compensator, and described gravity compensator be positioned at described micropositioner barycenter under.
Among some embodiment, between the mover of described horizontal drive motor and the stator in the gap of X, Y, Z, Rx, Ry, Rz six direction greater than the stroke of the above micropositioner of correspondence direction; And, between described vertical drive motor mover and the stator in the gap of X, Y, Z, Rx, Ry, Rz six direction greater than the stroke of the above micropositioner of correspondence direction, so that the tangential movement of described micropositioner and catenary motion are full decoupled.
Owing to adopt levitation device to be connected with the carrying base portion according to gravity compensator of the present invention, therefore can move along with the motion that is subjected to supporting object, gravity is carried out Real-time Balancing, make supporting object be in suspended state, thereby the sport efficiency of supporting object and performance are improved greatly.
The present invention also provides a kind of 6-freedom micro-motion platform, adopts an aforementioned gravity compensator, is placed under the micropositioner barycenter, and the decoupling performance of micropositioner motion is improved greatly.Drive the micropositioner motion and comprise horizontal drive motor and vertical drive motor, between the mover of all motors and the stator in the gap of X, Y, Z, Rx, Ry, Rz six direction greater than the stroke of the above micropositioner of correspondence direction, so tangential movement and catenary motion are full decoupled, its effect is better than the layout of three gravity compensators.
Description of drawings
Reference is description and the accompanying drawing of preferred embodiment hereinafter, can understand best the present invention and purpose and advantage, wherein:
Fig. 1 is the cut-open view of gravity compensator 1;
Fig. 2 is the cut-open view of gravity compensator 1 ';
Fig. 3 is the cut-open view of gravity compensator 2;
Fig. 4 is the cut-open view of gravity compensator 2 ';
Fig. 5 is the cut-open view of micropositioner 201;
Fig. 6 is the vertical view of micropositioner 201;
Fig. 7 is the cut-open view of the micropositioner of employing gravity compensator 2 '.
Embodiment
Referring to the accompanying drawing of the embodiment of the invention, hereinafter the present invention will be described in more detail.Yet the present invention can realize with many different forms, and should not be construed as the restriction of the embodiment that is subjected in this proposition.On the contrary, it is abundant and complete open in order to reach proposing these embodiment, and makes those skilled in the art understand scope of the present invention fully.
Refer now to Fig. 1 according to an embodiment of the invention gravity compensator 1 is described.Fig. 1 is the cut-open view of gravity compensator 1.As shown in Figure 1,101 for being subjected to supporting object, and its below is to being subjected to supporting object 101 to carry out the gravity compensator 1 of gravity compensation.The body of gravity compensator 1 is connected with being subjected to supporting object 101 by spherical linkage 102, thereby carries out transmission between them.Spherical linkage 102 comprises hinge outer cover 102a and the hinge screw 102b that is smoothly connected each other, can rotate around any direction thus and has Rx, Ry, Rz three degree of freedom.Spherical linkage 102 is the example of bindiny mechanism.
When the barycenter 101a that is subjected to supporting object 101 with respect to himself made Plane Rotation motion (Rz direction) or banking motion (Rx, Ry direction), barycenter 101a was not mobile in the space, and correspondingly the position of gravity in the space do not change.This moment, gravity compensator 1 was not done any movement, only changed itself and the angle that is subjected to supporting object 101 by spherical linkage 102.When supporting object 101 is done X, Y, Z translation motion, the position of barycenter 101a in the space will change, and gravity position also will change.Gravity compensator 1 must be followed supporting object 101 and done corresponding motion this moment, with guarantee balancing force that gravity compensator 1 produces all the time with supporting object 101 gravitational equilibriums, i.e. equal and opposite in direction and opposite direction.For X, Y-direction, gravity compensator 1 relies on its bottom levitation device 105 and the constraint of carrying base portion, can follow at an easy rate supporting object 101 and do translation motion.For the Z direction, the movable information of supporting object 101 need to be passed to voice coil motor 103 in advance, so that gravity compensator 1 is synchronized with the movement with supporting object 101, realize gravity enforcement compensation.Can realize being synchronized with the movement by the known feedforward control of industry, be not repeated herein.
Refer now to Fig. 2 according to another embodiment of the present invention gravity compensator 1 ' is described.Fig. 2 is the cut-open view of gravity compensator 1 '.In the present embodiment, gravity compensator 1 ' is basic identical with the structure of gravity compensator 1, and institute's difference is that gravity compensator 1 ' comprises that also level is to driving mechanism.Thus, in the following drawings, identical or corresponding label refers to identical or corresponding element among Fig. 1, and has saved these detailed descriptions identical or respective element.
Gravity compensator 1 ' comprises that also level is to driving mechanism.In the present embodiment, long-range navigation thatch motor 107 as level to driving mechanism.The mover 107b of long-range navigation thatch motor 107 is fixed on the vertical driving mechanism of gravity compensator 1 by connecting link 106, and its stator 107a is fixed on the assemble mechanism 108, and assemble mechanism 108 is connected with fixed part by supporting mechanism 109.The special gravity compensators that drive of long-range navigation thatch motor 107 are done surface level X, Y, Rz motion, thus to described be subjected to supporting object carry out level to compensation.The barycenter of gravity compensator 1 ' is in the driving plane of long-range navigation thatch motor 107.
When the barycenter 101a that is subjected to supporting object 101 with respect to himself made Plane Rotation motion (Rz direction) or banking motion (Rx, Ry direction), barycenter 101a was not mobile in the space, and correspondingly the position of gravity in the space do not change.This moment, gravity compensator 1 ' was not done any movement, only changed itself and the angle that is subjected to supporting object 101 by spherical linkage 102.When supporting object 101 is done X, Y, Z translation motion, the position of barycenter 101a in the space will change, and gravity position also will change.Gravity compensator 1 ' must be followed supporting object 101 and done corresponding motion this moment, with guarantee balancing force that gravity compensator 1 ' produces all the time with supporting object 101 gravitational equilibriums, i.e. equal and opposite in direction and opposite direction.In order to realize synchronously, the movable information (X, Y, Z direction) of supporting object 101 need to be passed to voice coil motor 103 (Z direction) and long-range navigation thatch motor 107 (X, Y-direction) in advance, so that gravity compensator 1 ' is synchronized with the movement with supporting object 101, realize the gravity real-Time Compensation.
When gravity compensator only comprised vertical driving mechanism, only motion compensated other direction X, Y, Rx, the described motion that is subjected to supporting object of the equal passive adaptation of Ry, Rz to Z-direction.When gravity compensator also comprised the plane driving mechanism, ACTIVE CONTROL comprised X, Y, three directions of Z, other Rx, Ry, Rz passive adaptation so.
Refer now to Fig. 3 explanation gravity compensator 2 according to yet another embodiment of the invention.Fig. 3 is the cut-open view of gravity compensator 2.In the present embodiment, gravity compensator 2 is basic identical with the structure of gravity compensator 1 ', and institute's difference is, adopts cylinder as vertical driving mechanism.Thus, in the following drawings, identical or corresponding label refers to identical or corresponding element among Fig. 1-2, and has saved these detailed descriptions identical or respective element.
In the gravity compensator 2, spherical linkage 202 can rotate around any direction, has Rx, Ry, Rz three degree of freedom, between hinge outer cover 202a and the hinge screw 202b spherical air-bearing bearing 203 is arranged, and realizes without the friction rotation.
The cylinder 204 that is used as vertical driving mechanism is positioned under the spherical linkage 202 and with it and is connected.Cylinder 204 comprises piston 204a, outer cover 204b, interior pressure chamber 204c.Cylinder piston 204a can be along the Z-direction back and forth movement, between itself and the cylinder clothing 204b air-bearing 205 is arranged, and can make piston 204a without frictional movement.Outer cover 204b is connected to levitation device 105.Pressure gas from the source of the gas (not shown) enters pressure chamber 204c in the cylinder, moves up and down but regulate pushing piston 204a by pressure.Pressure gas among the 204c enters internal piston gas circuit main channel 206 simultaneously, enter respectively in spherical air-bearing bearing 203 and the side direction air-bearing 205 by gas circuit branch 207 again, air supporting pressure is provided, makes between 202a and the 202b without rubbing between rotation and 204a and the 204b without frictional movement.
The function of levitation device 105 and plane compensation motor 107 and the corresponding component of structure and gravity compensator 1 ' are identical.Particularly, the levitation device 105 of gravity compensator 2 adopts the gas suspension mode, is gas foot 105.The six-freedom degree of gravity compensator 2 is all made frictionless motion by air supporting like this.
Similarly, when being subjected to supporting object 101 to do X, Y, Z translation motion, 101 movable information (X, Y, Z direction) need to be passed to cylinder 204 (Z direction) and long-range navigation thatch motor 107 (X, Y-direction) in advance, make feedforward control, so that gravity compensator 2 is synchronized with the movement with supporting object 101, realize gravity enforcement compensation.Cylinder 204 need to have higher response speed, and pressure is accurately adjustable.
Refer now to Fig. 4 according to another embodiment of the present invention gravity compensator 2 ' is described.Fig. 4 is the cut-open view of gravity compensator 2 '.In the present embodiment, gravity compensator 2 ' is basic identical with the structure of gravity compensator 2, and institute's difference is that gravity compensator 2 ' does not comprise long-range navigation thatch motor 107.
When being subjected to supporting object 101 to do X, Y-direction tangential movement, because gas foot 105 retrains in the bottom, the integral body of gravity compensator 2 ' relies on the acting force of spherical air-bearing bearing 203 and side direction air-bearing 205, can follow be synchronized with the movement by supporting object 101.
Refer now to Fig. 5 explanation according to the micropositioner 201 of employing gravity compensator 2 of the present invention.Fig. 5 is the cut-open view of micropositioner 201.Micropositioner 201 is single layer structure, barycenter 201a.Plummer 200 is responsible for supporting micropositioner 201, gravity compensator 2 and related driving device.Described gravity compensator 2 is structure among Fig. 3, be positioned at micropositioner barycenter 201a under, be responsible for the gravity of balance micropositioner 201.Gravity compensator 2 is connected with micropositioner 201 by spherical linkage 202, and its gas foot 105 floats on the plummer 200, and its horizontal drive mechanism long-range navigation thatch motor 107 is fixed on the plummer 200 by assemble mechanism 108 and supporting mechanism 109.
Fig. 6 is the vertical view of micropositioner 201.As shown in Figure 6, respectively three of horizontal drive motor 300 and vertical drive motor 400, horizontal electric mover 301a, 301b, 301c are L-type and distribute, vertical electric mover 401a, 401b, 401c are equilateral triangle and distribute, level and vertical driving center overlap with micropositioner barycenter 201a, make barycenter and drive.Three horizontal drive motor combination can make micropositioner 201 do X, Y, the motion of Rz direction, and three vertical drive motor combinations can make micropositioner 201 do Z, Rx, the motion of Ry direction.Gravity compensator 2 should be synchronized with the movement with micropositioner 201.
Refer now to Fig. 7 explanation according to the micropositioner of employing gravity compensator 2 ' of the present invention.Fig. 7 is the cut-open view of the micropositioner of employing gravity compensator 2 '.In the present embodiment, the structure of described micropositioner and micropositioner 201 are basic identical, and institute's difference is, adopts gravity compensator 2 ' to replace gravity compensator 2.Thus, identical or corresponding label refers to identical or corresponding element among Fig. 1-6, and has saved these detailed descriptions identical or respective element.
Micropositioner embodiment described above take aforesaid gravity compensator 2 and 2 ' as example, illustrates the micropositioner that adopts gravity compensator of the present invention.Yet aforesaid gravity compensator 1 and 1 ' can be applicable to micropositioner equally.
Can see that from Fig. 5-7 micropositioner is connected without any mechanism with following plummer 200, without the decoupling zero plate, without the decoupling zero flexible block, can vibration isolation, can realize again tangential movement and catenary motion decoupling zero.
The present invention has following advantage.
(1) owing to adopts levitation device to be connected with the carrying base portion according to gravity compensator of the present invention, therefore can move along with the motion that is subjected to supporting object, gravity is carried out Real-time Balancing, make supporting object be in suspended state, thereby the sport efficiency of supporting object and performance are improved greatly.
(2) owing to adopt levitation device, gravity compensator and floated on the carrying base portion by supporting object can reduce friction of motion, and simultaneously also effectively vibration isolation is eliminated external vibration to being subjected to the interference of supporting object, improves the exercise performance that is subjected to supporting object.
(3) gravity compensator of the present invention comprises that also level is to driving mechanism, do surface level X, Y, Rz motion with special driving gravity compensator, carry out the ACTIVE CONTROL of X, Y, three directions of Z with vertical driving mechanism, thereby can compensate the supporting object that is subjected to of six-freedom motion.
(4) can be along with the motion campaign that is subjected to supporting object owing to gravity compensator of the present invention, therefore adopt the micropositioner of gravity compensator of the present invention only to need a gravity compensator that is placed under the micropositioner barycenter, need not the decoupling zero flexible block.The decoupling performance of micropositioner motion is greatly improved.
(5) adopt gravity compensator of the present invention, the gap between appropriate design level and vertical drive motor mover and the stator can make level and catenary motion full decoupled again.Micropositioner system (comprising individual layer micropositioner, gravity compensator, level and vertical electric mover) is fully contactless with following plummer (the horizontal drive motor stator that comprises the vertical motor stator of level, gravity compensator), both eliminate the resistances such as friction force, also isolated the vibration that plummer brings.Level and vertical drive motor power output all as the power of micropositioner motion, need not to compensate any resistance, and the control effect is very good.
Claims (9)
1. gravity compensator, it is characterized in that being subjected to supporting object to carry out vertical gravity compensation, comprising:
Bindiny mechanism, it connects described gravity compensator and describedly is subjected to supporting object, thereby carries out transmission between them;
Be connected to the vertical driving mechanism of described bindiny mechanism, described vertical driving mechanism drives described bindiny mechanism and carries out catenary motion, thereby the described supporting object that is subjected to is carried out vertical compensation;
Be connected to the levitation device of described vertical driving mechanism, described levitation device so that described vertical driving mechanism float on the carrying base portion so that described vertical driving mechanism can be done corresponding mobile according to the described movement that is subjected to supporting object at described carrying base portion;
Described bindiny mechanism is the spherical linkage that comprises hinge outer cover, hinge screw and the spherical air-bearing bearing between them, and described spherical linkage has Rx, Ry, Rz three degree of freedom.
2. gravity compensator as claimed in claim 1, it is characterized in that, described gravity compensator also comprises the level that is connected to described vertical driving mechanism to driving mechanism, with drive described gravity compensator do level to motion, thereby to described be subjected to supporting object carry out level to compensation.
3. gravity compensator as claimed in claim 1, described vertical driving mechanism is voice coil motor.
4. gravity compensator as claimed in claim 1, described vertical driving mechanism is the cylinder that contains air-bearing.
5. gravity compensator as claimed in claim 2, described level is long-range navigation thatch motor to driving mechanism, the mover of described motor is fixed on the described vertical driving mechanism by connecting link, and its stator is connected with fixed part.
6. such as each described gravity compensator of claim 1 to 5, described levitation device is that gas suspension or magnet suspend.
7. a 6-freedom micro-motion platform is characterized in that, comprising:
Horizontal drive motor, the mover of described horizontal drive motor are fixed on the described micropositioner, and its stator is fixed on the plummer of described micropositioner;
Vertical drive motor, the mover of described vertical drive motor are fixed on the described micropositioner, and its stator is fixed on the described plummer; And
Such as each described gravity compensator of aforementioned claim.
8. micropositioner as claimed in claim 7 is characterized in that, described micropositioner only comprises a described gravity compensator, and described gravity compensator be positioned at described micropositioner barycenter under.
9. micropositioner as claimed in claim 7 is characterized in that, between the mover of described horizontal drive motor and the stator in the gap of X, Y, Z, Rx, Ry, Rz six direction greater than the stroke of the above micropositioner of correspondence direction; And, between described vertical drive motor mover and the stator in the gap of X, Y, Z, Rx, Ry, Rz six direction greater than the stroke of the above micropositioner of correspondence direction, so that the tangential movement of described micropositioner and catenary motion are full decoupled.
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| DE102015225537B4 (en) * | 2015-12-17 | 2019-11-14 | Carl Zeiss Smt Gmbh | Device for aligning a component, actuating device and projection exposure device |
| CN108023460A (en) * | 2018-02-02 | 2018-05-11 | 上海莫戈纳机电科技有限公司 | Linear electric machine |
| CN108896409B (en) * | 2018-06-12 | 2020-11-10 | 河海大学 | Suspension type horizontal three-point bending test system and test method for testing material I-type fracture |
| CN114995525B (en) * | 2022-08-01 | 2022-12-13 | 上海隐冠半导体技术有限公司 | Motion platform and energy storage state adjusting method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6337484B1 (en) * | 1998-07-17 | 2002-01-08 | Asm Lithography, B.V. | Positioning device and lithographic projection apparatus comprising such a device |
| CN101082775A (en) * | 2007-06-29 | 2007-12-05 | 上海微电子装备有限公司 | Vertically delicate adjusting and gravity force compensating mechanism and photo-etching machine |
| CN101349870A (en) * | 2008-08-07 | 2009-01-21 | 上海微电子装备有限公司 | Two-freedom degree electric machine actuating mechanism and corresponding six-freedom degree micromotion platform |
| CN101477316A (en) * | 2009-01-22 | 2009-07-08 | 上海微电子装备有限公司 | Gravity compensator |
| CN101581347A (en) * | 2009-06-23 | 2009-11-18 | 上海微电子装备有限公司 | Vibration reduction support device and photoetching machine using same |
-
2010
- 2010-01-28 CN CN 201010102422 patent/CN102141734B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6337484B1 (en) * | 1998-07-17 | 2002-01-08 | Asm Lithography, B.V. | Positioning device and lithographic projection apparatus comprising such a device |
| CN101082775A (en) * | 2007-06-29 | 2007-12-05 | 上海微电子装备有限公司 | Vertically delicate adjusting and gravity force compensating mechanism and photo-etching machine |
| CN101349870A (en) * | 2008-08-07 | 2009-01-21 | 上海微电子装备有限公司 | Two-freedom degree electric machine actuating mechanism and corresponding six-freedom degree micromotion platform |
| CN101477316A (en) * | 2009-01-22 | 2009-07-08 | 上海微电子装备有限公司 | Gravity compensator |
| CN101581347A (en) * | 2009-06-23 | 2009-11-18 | 上海微电子装备有限公司 | Vibration reduction support device and photoetching machine using same |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2000-120765A 2000.04.25 |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |