CN102147234A - Laser triangulation sensor - Google Patents
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- CN102147234A CN102147234A CN 201110004063 CN201110004063A CN102147234A CN 102147234 A CN102147234 A CN 102147234A CN 201110004063 CN201110004063 CN 201110004063 CN 201110004063 A CN201110004063 A CN 201110004063A CN 102147234 A CN102147234 A CN 102147234A
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Abstract
The invention discloses a laser triangulation sensor in the technical field of optical measurement. The laser triangulation sensor comprises a laser, a transmitting lens group, a receiving lens group, a photosensitive device and a signal processing device, wherein the laser, the transmitting lens group and a measured target are linearly arranged at the transmitting end; the receiving lens group and the photosensitive device are arranged at the reflecting end; the receiving lens group and the photosensitive device are arranged at the same side of the laser and the transmitting lens group and are located in the same plane with the laser and the transmitting lens group; and the signal processing device is connected with the photosensitive device for receiving electric signals. In the invention, non-axisymmetrical lenses are added in the receiving lens group, so that nonlinearity of the laser triangulation sensor is corrected in principle, and the problem of nonuniform resolution is solved.
Description
Technical field
What the present invention relates to is a kind of sensor of field of optical measuring technologies, specifically is a kind of Laser Triangulation Sensor.
Background technology
Based on the displacement transducer of laser triangulation principle, have noncontact, high precision, wide range, highly reliable, measured target do not had an excellent properties such as harsh requirement.In traditional laser triangulation method, the position of laser facula imaging on photosensitive device becomes nonlinear relationship with the displacement of object.Particularly under the bigger situation of measurement range, non-linear particularly serious.In design in the past, the non-linear modification method that adopts has several: look-up table, with laser facula on photosensitive device image space and the relation of ohject displacement demarcate in advance, according to certain intervals, make a tables of data, in measuring process, after obtaining the position of laser facula at photosensitive device, only need find the interval of corresponding ohject displacement in the relevant position, try to achieve ohject displacement according to specific formula according to this table; Equation is derived by principle, obtains ohject displacement and the laser facula funtcional relationship at the image space of photosensitive device, in measuring process, calculates ohject displacement according to formula; The circuit compensation method is utilized the structure of circuit, directly carries out hardware and calculates the ohject displacement signal that obtains simulating.
These methods respectively have quality, though the energy correcting nonlinear, the degree of revising is very limited.This is that laser facula never enters the focus lamp group with the reflection of object plane position because the optical system of traditional laser triangulation displacement transducer is to adopt permanent focus version.Because the lens imaging rule, the some enlargement ratio nearer apart from lens is bigger, and the some enlargement ratio far away apart from lens is less, and promptly as mobile phase same distance on photosensitive device, corresponding measured target is very little in near-end displacement, and very big in far-end displacement.Therefore form measure non-linear.Therefore, the displacement result that the non-linear modification method of above-mentioned conventional laser range of triangle method records still exists residual non-linear, and promptly still there is non-uniformity problem in resolving power in range ability.
Through the retrieval of prior art is found, relate in the prior art for the laser triangulation displacement sensor structure and carried out many research and improvement comprises: the Chinese invention patent application of Chinese patent literature CN1332358 discloses a kind of trigonometric laser measuirng head.This gauge head can be measured the surface at strong reflection free form surface body form and big pitch angle, and has reduced the cost of side head to a certain extent, can also provide the surface normal direction of measured point simultaneously; The Chinese utility application of Chinese patent literature CN2653435 discloses a kind of collapsible laser triangulation device.This device has reduced instrument size greatly by the method for emission folded optical path, can obtain higher position resolution under limited volume simultaneously; The Chinese invention patent application of Chinese patent application numbers 200810070652.7 discloses a kind of from axle rotation symmetric form laser triangulation displacement transducer.This device becomes an annulus by improved optical texture with the hot spot imaging of testee, offsets the error that object plane tilts to bring, and improves accuracy of detection, can detect the curved surface that classic methods such as inclination, step are difficult to detect simultaneously.But above-mentioned technology all relates to the defective that resolution is inhomogeneous and can't correct.
Summary of the invention
The present invention is directed to the prior art above shortcomings, a kind of Laser Triangulation Sensor is provided, partly added non-rotational symmetry eyeglass in reception mirror group, revised the non-linear of Laser Triangulation Sensor from principle, thereby solved the uneven problem of resolving power.
The present invention is achieved by the following technical solutions, the present invention includes: laser instrument, transmitting mirror group, reception mirror group, photosensitive device and signal processing apparatus, wherein: laser instrument, transmitting mirror group and measured target are arranged at transmitting terminal with line spread, receive mirror group and photosensitive device and be arranged at reflection end, reception mirror group and photosensitive device are positioned at the homonymy of laser instrument and transmitting mirror group and are within the same plane with laser instrument and transmitting mirror group, and signal processing apparatus is connected with photosensitive device to receive electric signal.
Described reception mirror group comprises: optical filter, non-axial symmetrical lens, condenser lens and rotational symmetry lens, wherein: before optical filter, non-axial symmetrical lens, condenser lens and rotational symmetry lens are set in turn in photosensitive device.
Described optical filter is a bandpass filter, and effect is to reduce the influence of surround lighting to the light activated element signal, under laser and surround lighting contrast condition with higher, can omit, and the logical frequency of its band is generally determined by the frequency of laser.
Described non-axial symmetrical lens is various non-axial symmetrical lens, and as the polygon refractive prism, eyeglass quantity is a slice or some.Effect is the different optical path difference of hot spot generation to different positions, and then the generation virtual image more approaching apart from the axial distance of lens, make that the enlargement ratio of each position correspondence is approaching greatly, reach and adjust the uneven purpose of resolution that these parts are core devices of the present invention.
Described condenser lens comprises a slice or some bobbin symmetrical mirrors and non-axial symmetrical lens, and wherein the rotational symmetry mirror is spherical mirror or aspheric mirror; Non-axial symmetrical lens can be but be not limited to cylindrical mirror.The purpose that adds non-axial symmetrical lens is to add the problem of the image quality decline that brings to obtain better image quality in order to revise the front non-axial symmetrical lens.Through the virtual image adjustment through this group lens can than good quality be imaged onto on the photosensitive device.
Described photosensitive device is the charge-coupled image sensor or the position sensitive detector of single line form or multi-thread form.Single line form data volume is less, but antijamming capability is less; Multi-thread mode has stronger antijamming capability because quantity of information is comprehensively abundant more, and the measurement result precision is also higher.
Described signal processing apparatus comprises: signal condition unit, analog digital converting unit, processor, wherein: the signal condition unit is connected with photosensitive device to receive electric signal, its output terminal is exported corresponding digital signal with analog digital converting unit with the output photosensitive device, and processor obtains the testee surface displacement to above-mentioned signal Processing.
The present invention measures in the following manner: at first the laser facula signal from the measured target surface at first passes through optical filter, and the veiling glare of other frequency spectrum of filtering is to the monochromatic light that keeps narrower frequency spectrum.Then, this monochromatic light signal is by non-axial symmetrical lens, and its non-linear obtaining is corrected, and forms the virtual image.This virtual image is imaged on the photosensitive device after by condenser lens and rotational symmetry lens, and photosensitive device is exported corresponding electric signal.
Compared with prior art, the invention has the beneficial effects as follows: the first, in conventional laser three angular displacement sensor optical systems, add the nonlinear optical element refractive prism, fundamentally improved the non-linear of measuring system, strengthen the longitudinal focusing of hot spot imaging simultaneously, improved bearing accuracy; The second, increase the cylinder prism in original focus lamp group back, effectively improve the hot spot image quality, improve hot spot imaging signal intensity, improve signal to noise ratio (S/N ratio).The 3rd, adopt the multiple wire system photosensitive device, utilize photosensitive device in not collinear upper difference of putting signal, pass through information fusion, not only can weaken photosensitive device itself and make the inhomogeneous positioning error that causes, the transversal displacement and the fluctuation that exist in the time of also can reducing the change of hot spot image space, thus measuring accuracy improved greatly.
Description of drawings
Fig. 1 is a Laser Triangulation Sensor structural representation of the present invention.
Fig. 2 is a prism citation form synoptic diagram of the present invention.
Fig. 3 is Laser Triangulation Sensor testee of the present invention displacement and image space corresponding relation synoptic diagram.
Fig. 4 is photosensitive device received signal and synthetic synoptic diagram thereof.
Embodiment
Below embodiments of the invention are elaborated, present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As Fig. 1-shown in Figure 2, present embodiment comprises: housing 1, laser instrument 2, transmitting mirror group 3, reception mirror group 4, photosensitive device 5 and signal processing apparatus 6, wherein: laser instrument 2, transmitting mirror group 3 and measured target 7 are arranged at transmitting terminal with line spread, receive mirror group 4 and photosensitive device 5 and be arranged at reflection end, reception mirror group 4 and photosensitive device 5 are positioned at the homonymy of laser instrument 2 and transmitting mirror group 3 and are within the same plane with laser instrument 2 and transmitting mirror group 3, and signal processing apparatus 6 is connected with photosensitive device 5 to receive electric signal.
Described housing 1 adopts aluminum alloy materials to make.
Described laser instrument 2 is the semiconductor laser 2 of output power at the above wavelength 650nm of 5mw.
Described reception mirror group 4 comprises: optical filter 8, non-axial symmetrical lens 9, condenser lens 10 and rotational symmetry lens 11, wherein: before optical filter 8, non-axial symmetrical lens 9, condenser lens 10 and rotational symmetry lens 11 are set in turn in photosensitive device 5.
Described photosensitive device 5 is a charge-coupled image sensor, adopts 5000 pixel device TCD1502 of Toshiba company.This device can convert the light signal on each pixel to a series of simulating signals.This device can be by one or more, and single line or multi-thread charge-coupled image sensor are formed.When detecting simultaneously, can obtain the picture of hot spot diverse location multi-thread, the precision and the stability of testing result improve greatly.As shown in Figure 4.
Described signal processing apparatus 6 comprises: signal condition unit, analog digital converting unit, digital signal processor, wherein: the signal condition unit is connected with photosensitive device 5 to receive electric signal, the output terminal of amplifying unit and analog digital converting unit are with the output digital signal, digital signal can obtain the testee surface displacement through digital signal processor processes.
Described optical filter 8 is a bandpass filter, and is corresponding with laser frequency, and the logical frequency of its band is 650 ± 5nm, can only allow the light of optical maser wavelength to pass through, and greatly reduces the interference of surround lighting to measuring.
Described non-axial symmetrical lens 9 is a polygon refractive prism 9, is made by well behaved light transmissive material, for example quartz, resin or plastics etc.The shape of refractive prism 9 can adopt square, triangle, trapezoidal or other forms.The drift angle size of refractive prism 9 depends on the optical axis included angle α of Laser Triangulation Sensor.
Described condenser lens 10 is some bobbin symmetrical mirrors, and this rotational symmetry mirror is spherical mirror or aspheric mirror.The effect of these group lens is that hot spot virtual image forming that non-axial symmetrical lens 9 is produced is on photosensitive device 5.
Described condenser lens 11 is made by quartz, resin or plastics.Effect is to correct because the problem that the image quality that the adding of non-axial symmetrical lens 9 brings reduces.Adopted the form of cylindrical mirror in this example.
As shown in Figure 3 and Figure 4, present embodiment is realized measuring in the following manner:
The first step, laser instrument 2 form the some light beam by transmitting mirror group 3 in measurement range.Light beam irradiates forms hot spot on testee.
Diffusing of second step, spot area by receiving mirror group 4 forms hot spot on photosensitive device 5 picture.Receiving mirror group 4 is key components of the present invention.It is as follows to receive the 4 various piece effects of mirror group: at first, light is mating plate 8 after filtration, has only with the approaching light of optical maser wavelength to allow to pass through, and all the other light are by filtering; Then, through non-axial symmetrical lens 9, to the laser signal generation refraction in various degree of diverse location, and then form the virtual image that departs from original position in various degree, these virtual images are approaching apart from axial distance, the enlargement ratio of condenser lens 10. Condenser lens 10,11 is with the sensitization position of these virtual image forming to photosensitive device 5.It may be noted that 9 pairs of image quality of non-axial symmetrical lens bring certain influence, need to add the influence that condenser lens 11 reduces this respect.Specific to this example, guarantee that photosensitive device 5 signal laser image spot are narrow as far as possible, can occur perpendicular to the width of the direction picture of line greatlyyer simultaneously, light energy distribution is too disperseed.Having added cylindrical mirror in this example guarantees that photosensitive device 5 signal laser image spot are tried one's best and reduces the vertical direction width narrow the time.
The 3rd step, photosensitive device 5 are converted to corresponding electric signal with light signal.Photosensitive device 5 can be single line or multi-thread device.Special be a plurality of single wire device, when one or more multi-thread device is formed, as shown in Figure 4, organize signals can obtain more when photosensitive device 5, reflected the feature of hot spot diverse location.By analysis, arrangement, can obtain the signal stable more, that precision is higher to many groups signal.Because the reception mirror group of mentioning in second step 4 is in vertical direction imaging wider width, for multi-thread device provides bigger implementation space.The electric signal of photosensitive device 5 enters digital signal processor through signal condition, analog digital converting unit.The digital signal of the photosensitive device 5 that digital signal processor processes obtains, and then can obtain the testee surface displacement.
Claims (9)
1. Laser Triangulation Sensor, comprise: laser instrument, transmitting mirror group, reception mirror group, photosensitive device and signal processing apparatus, it is characterized in that: laser instrument, transmitting mirror group and measured target are arranged at transmitting terminal with line spread, receive mirror group and photosensitive device and be arranged at reflection end, reception mirror group and photosensitive device are positioned at the homonymy of laser instrument and transmitting mirror group and are within the same plane with laser instrument and transmitting mirror group, and signal processing apparatus is connected with photosensitive device to receive electric signal.
2. Laser Triangulation Sensor according to claim 1, it is characterized in that, described reception mirror group comprises: optical filter, non-axial symmetrical lens, condenser lens and rotational symmetry lens, wherein: before optical filter, non-axial symmetrical lens, condenser lens and rotational symmetry lens are set in turn in photosensitive device.
3. Laser Triangulation Sensor according to claim 1 is characterized in that, described optical filter is a bandpass filter.
4. Laser Triangulation Sensor according to claim 1 is characterized in that, described non-axial symmetrical lens is various non-axial symmetrical lens.
5. according to claim 1 or 4 described Laser Triangulation Sensor, it is characterized in that described non-axial symmetrical lens is the polygon refractive prism, eyeglass quantity is a slice or some.
6. Laser Triangulation Sensor according to claim 1 is characterized in that, described condenser lens comprises a slice or some bobbin symmetrical mirrors and non-axial symmetrical lens, and wherein: the rotational symmetry mirror is spherical mirror or aspheric mirror.
7. Laser Triangulation Sensor according to claim 6 is characterized in that, described non-axial symmetrical lens is a cylindrical mirror.
8. Laser Triangulation Sensor according to claim 1 is characterized in that, described photosensitive device is the charge-coupled image sensor or the position sensitive detector of single line form or multi-thread form.
9. Laser Triangulation Sensor according to claim 1, it is characterized in that, described signal processing apparatus comprises: signal condition unit, analog digital converting unit and processor, wherein: the signal condition unit is connected with photosensitive device to receive electric signal, its output terminal is exported corresponding digital signal with analog digital converting unit with the output photosensitive device, and processor obtains the testee surface displacement to above-mentioned signal Processing.
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102556116A (en) * | 2011-11-25 | 2012-07-11 | 上海交通大学 | System and method for detecting deficiency of railway fasteners on basis of laser and vision |
| CN102608079A (en) * | 2012-03-03 | 2012-07-25 | 南昌航空大学 | Detection method of long-distance laser induced plasma spectrum |
| CN103697822A (en) * | 2013-12-26 | 2014-04-02 | 北京信息科技大学 | Optical path system for optical triangulation probe |
| CN104422393A (en) * | 2013-08-27 | 2015-03-18 | 中国兵器工业第二0二研究所 | Laser sensor measuring displacement |
| EP2913631A1 (en) | 2014-02-27 | 2015-09-02 | Ricoh Company, Ltd. | Test apparatus and method |
| CN105444679A (en) * | 2015-11-14 | 2016-03-30 | 上海砺晟光电技术有限公司 | Symmetric laser displacement sensor capable of inhibiting laser drift and surface tilting |
| CN106352801A (en) * | 2016-10-17 | 2017-01-25 | 海伯森技术（深圳）有限公司 | Laser triangular displacement sensor and correction method of non-linear errors of laser triangular displacement sensor |
| CN106807648A (en) * | 2017-01-03 | 2017-06-09 | 李艳 | Optical, mechanical and electronic integration detects Mechanical Parts Size device |
| CN106871799A (en) * | 2017-04-10 | 2017-06-20 | 淮阴工学院 | A kind of full-automatic crops plant height measuring method and device |
| CN107084701A (en) * | 2017-05-04 | 2017-08-22 | 常州工学院 | A kind of high-speed, high precision wide scope technical grade laser triangular distance measuring apparatus based on FPGA and many CCD |
| CN108286940A (en) * | 2018-03-23 | 2018-07-17 | 杭州电子科技大学 | A kind of laser feeler device and its application method that multrirange is integrated |
| CN108489417A (en) * | 2018-02-11 | 2018-09-04 | 杭州电子科技大学 | A kind of laser feeler device and its curved face measurement method that range is variable |
| CN109150305A (en) * | 2018-11-08 | 2019-01-04 | 徐州时空思维智能科技有限公司 | A kind of long distance laser communication device |
| CN109471120A (en) * | 2018-12-29 | 2019-03-15 | 上海兰宝传感科技股份有限公司 | Laser triangulation system and method |
| CN109470284A (en) * | 2018-12-13 | 2019-03-15 | 上海索迪龙自动化有限公司 | A kind of background inhibition photoelectric sensor |
| CN111830525A (en) * | 2020-07-28 | 2020-10-27 | 广东博智林机器人有限公司 | Laser triangle ranging system |
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| CN1332358A (en) * | 2001-07-02 | 2002-01-23 | 天津大学 | Trigonometric laser measuirng head |
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Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102556116A (en) * | 2011-11-25 | 2012-07-11 | 上海交通大学 | System and method for detecting deficiency of railway fasteners on basis of laser and vision |
| CN102556116B (en) * | 2011-11-25 | 2015-07-08 | 上海交通大学 | System and method for detecting deficiency of railway fasteners on basis of laser and vision |
| CN102608079B (en) * | 2012-03-03 | 2015-04-08 | 南昌航空大学 | Detection method of long-distance laser induced plasma spectrum |
| CN102608079A (en) * | 2012-03-03 | 2012-07-25 | 南昌航空大学 | Detection method of long-distance laser induced plasma spectrum |
| CN104422393B (en) * | 2013-08-27 | 2017-04-19 | 中国兵器工业第二0二研究所 | Laser sensor measuring displacement |
| CN104422393A (en) * | 2013-08-27 | 2015-03-18 | 中国兵器工业第二0二研究所 | Laser sensor measuring displacement |
| CN103697822A (en) * | 2013-12-26 | 2014-04-02 | 北京信息科技大学 | Optical path system for optical triangulation probe |
| EP2913631A1 (en) | 2014-02-27 | 2015-09-02 | Ricoh Company, Ltd. | Test apparatus and method |
| CN105444679A (en) * | 2015-11-14 | 2016-03-30 | 上海砺晟光电技术有限公司 | Symmetric laser displacement sensor capable of inhibiting laser drift and surface tilting |
| CN105444679B (en) * | 2015-11-14 | 2019-02-15 | 上海砺晟光电技术有限公司 | It can inhibit the inclined symmetrical laser displacement sensor of laser drift and surface |
| CN106352801A (en) * | 2016-10-17 | 2017-01-25 | 海伯森技术（深圳）有限公司 | Laser triangular displacement sensor and correction method of non-linear errors of laser triangular displacement sensor |
| CN106352801B (en) * | 2016-10-17 | 2018-03-02 | 海伯森技术（深圳）有限公司 | A kind of modification method of laser triangle displacement sensor and its nonlinearity erron |
| CN106807648A (en) * | 2017-01-03 | 2017-06-09 | 李艳 | Optical, mechanical and electronic integration detects Mechanical Parts Size device |
| CN106871799A (en) * | 2017-04-10 | 2017-06-20 | 淮阴工学院 | A kind of full-automatic crops plant height measuring method and device |
| CN107084701A (en) * | 2017-05-04 | 2017-08-22 | 常州工学院 | A kind of high-speed, high precision wide scope technical grade laser triangular distance measuring apparatus based on FPGA and many CCD |
| CN108489417A (en) * | 2018-02-11 | 2018-09-04 | 杭州电子科技大学 | A kind of laser feeler device and its curved face measurement method that range is variable |
| CN108286940A (en) * | 2018-03-23 | 2018-07-17 | 杭州电子科技大学 | A kind of laser feeler device and its application method that multrirange is integrated |
| CN109150305A (en) * | 2018-11-08 | 2019-01-04 | 徐州时空思维智能科技有限公司 | A kind of long distance laser communication device |
| CN109150305B (en) * | 2018-11-08 | 2024-02-02 | 徐州时空思维智能科技有限公司 | Remote laser communication device |
| CN109470284A (en) * | 2018-12-13 | 2019-03-15 | 上海索迪龙自动化有限公司 | A kind of background inhibition photoelectric sensor |
| CN109471120A (en) * | 2018-12-29 | 2019-03-15 | 上海兰宝传感科技股份有限公司 | Laser triangulation system and method |
| CN109471120B (en) * | 2018-12-29 | 2024-11-08 | 上海兰宝传感科技股份有限公司 | Laser triangulation ranging system and method |
| CN111830525A (en) * | 2020-07-28 | 2020-10-27 | 广东博智林机器人有限公司 | Laser triangle ranging system |
| CN111830525B (en) * | 2020-07-28 | 2023-04-07 | 广东博智林机器人有限公司 | Laser triangle ranging system |
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