CN101879794B - CrTiAlSiN nano composite coating, cutter deposited with same and preparation method thereof - Google Patents
CrTiAlSiN nano composite coating, cutter deposited with same and preparation method thereof Download PDFInfo
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- CN101879794B CN101879794B CN201010192207A CN201010192207A CN101879794B CN 101879794 B CN101879794 B CN 101879794B CN 201010192207 A CN201010192207 A CN 201010192207A CN 201010192207 A CN201010192207 A CN 201010192207A CN 101879794 B CN101879794 B CN 101879794B
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Abstract
The invention relates to a CrTiAlSiN nano composite coating, a cutter deposited with the same and a preparation method thereof. The composite coating comprises a bonding layer, a supporting layer and a main wear layer, wherein the bonding layer consists of Cr, the supporting layer consists of CrN, and the main wear layer is a CrSiN/TiAlSiN nano multilayered composite coating formed by alternating CrSiN layers and TiAlSiN layers or an nc-CrTiAlN/a-Si3N4 nanocrystalline composite coating formed by embedding nanocrystalline CrTiAlN into amorphous Si3N4. The bonding layer is deposited on a cutter matrix, and then the supporting layer and the main wear layer are deposited to obtain the cutter deposited with the coating. The obtained CrTiAlSiN nano composite coating has the advantages of high hardness, low friction coefficient and strong adhesive force; and the cutter deposited with the coating has higher surface hardness, stronger film-matrix adhesive force and good wear-resisting property and high temperature resistance.
Description
Technical field
The present invention relates to a kind of CrTiAlSiN nano-composite coating, deposit cutter of this coating and preparation method thereof, belong to the thin-film material field.
Background technology
The output of a current national number controlled machine and level of application have become one of important symbol of weighing an industrialization of the country degree and technical merit, also are the important means that improves a national comprehensive strength and strive power unexpectedly.Along with the rise of world's advanced technology is ripe with constantly, Numeric Control Technology is had higher requirement.Current Digit Control Machine Tool is constantly adopting newest fruits, develops towards directions such as high-speed and high-efficiency, high accuracy, high reliability and environmental protection.
With Aero-Space, auto industry is that the performance of the advanced manufacturing industry materials used of representative improves constantly, and the use of the tough material of lightweight day by day increases, and difficulty of processing increases day by day.Machining industry does not use cutting fluid to carry out in order to reduce cost and to protect environment, promoting gradually cutting or the lubricated near dry cutting technology of denier also make the machined difficulty of some material increase.
As Digit Control Machine Tool, the crucial cutter of CNC processing technology, its performance has decisive influence to efficient, precision, the surface quality of cut.Cutter material directly influences the serviceability of cutter, and unstability, damage and destruction in use appear in most of materials, and all is to begin from the surface.The face coat NC cutting tool; Especially the hard alloy cutter of face coat combines the characteristics of carbide matrix material intensity height, good toughness and the advantage that face coat hardness is high, wearability is good; Matrix material and coating material are had complementary advantages; The high rigidity advantage of cutter body material high strength and coating is fully used, efficiently solves surface failure mechanism, receive machining user's welcome.
The hard coat of tool surface requires: high rigidity, wear-resisting, heat-resisting, stable chemical performance, and with the matrix adhesion-tight etc.Use more suitability for industrialized production coating to mainly contain TiN, TiC coating, diamond coatings and TiAlN coating at present, compare with the various materials of needs processing, the coating kind is still very effective, but is difficult to all reach above-mentioned specification requirement.For example, TiN and substrate combinating strength are not high, and coating is prone to peel off, and hardness is also lower, and rete is prone to oxidation and ablated when cutting temperature is higher.The TiC coating has higher hardness and wear resistance, non-oxidizability, but its property is crisp, and not shock-resistant.Single coating all is difficult to satisfy the composite request of high-speed cutting to cutter coat, so often process multicomponent composite coating, is mixed with comparatively ideal cutter coat material.Processing object relates to ferrous metal, non-ferrous metal and various composite, new material in the actual production, cutting tool has been proposed increasingly high requirement, therefore; Need to reduce the internal stress of coating; Improve the toughness of coating, increase the thickness of coating, stop the diffusion of crackle; Reduce the novel high-performance superhard coating material of the different demands of cutter tipping, and design and develop corresponding coating manufacturing equipment and technology.
Summary of the invention
The objective of the invention is to remedy the deficiency of above-mentioned prior art, for processing industry provides a kind of CrTiAlSiN nano-composite coating, deposits cutter of this coating and preparation method thereof.
Realize that the technical scheme that the object of the invention adopted is:
A kind of CrTiAlSiN nano-composite coating; Comprise tack coat, supporting layer and main wearing layer, supporting layer is attached to above the tack coat, and main wearing layer is attached to above the supporting layer; Tack coat is Cr; Supporting layer is CrN, and main wearing layer is the CrSiN/TiAlSiN nano laminated coating that alternately is made up of CrSiN layer and TiAlSiN layer, or is embedded in amorphous Si by nanocrystalline CrTiAlN
3N
4Nc-CrTiAlN/a-Si
3N
4Nanocrystalline composite coating.
A kind of cutter that deposits above-mentioned CrTiAlSiN nano-composite coating comprises tool matrix at least, and the tack coat of CrTiAlSiN nano-composite coating is deposited on the tool matrix.
A kind of preparation method who deposits the cutter of above-mentioned CrTiAlSiN nano-composite coating may further comprise the steps: the tool matrix clamping of surface cleaning is carried out the aura cleaning on work rest; After aura cleans and finishes, in Ar compression ring border, vacuum 1.5 * 10
-2～2.5 * 10
-2Pa, 300～400 ℃ ,-600～-the 900V bias condition under, open multi sphere Cr target and on tool matrix, deposit the Cr tack coat; Then nitrogen environment, vacuum 1.5～3.0Pa, 300～400 ℃ ,-150～-the 500V bias condition under, deposition CrN supporting layer on the Cr tack coat; Under nitrogen environment, feed the SiH of 200～600sccm
4And/or open magnetron sputtering column Si target, vacuum 3.0～5.0Pa, 300～400 ℃, bias voltage-150～-the 400V condition under, open the TiAl target, deposition CrTiAlSiN master wearing layer on the CrN supporting layer; After deposition finishes, cool off naturally, obtain depositing the cutter of CrTiAiSiN nano-composite coating.
The above adhesive layer thickness is 50～100 nanometers, and supporting layer thickness is 100～200 nanometers, and main wearing layer thickness is 1.7～2.85 microns; Said cutter is a hard alloy cutter.
When the revolution speed of work rest is 2～7 rev/mins; Main wearing layer is the CrSiN/TiAlSiN nanometer multilayer composite coating that CrSiN layer and TiAlSiN layer alternately constitute; When the revolution speed of work rest was 8～13 rev/mins, main wearing layer was that nanocrystalline CrTiAlN is embedded in amorphous Si
3N
4Nc-CrTiAlN/a-Si
3N
4Nanocrystalline composite coating.
In the above CrSiN/TiAlSiN nanometer multilayer composite coating, every layer of CrSiN thickness is 3～10 nanometers, and every layer of TiAlSiN thickness is 2～5 nanometers; Said nc-CrTiAlN/a-Si
3N
4In the nanocrystalline composite coating, nanocrystalline 5～15 nanometers that are of a size of of CrTiAlN.
The present invention is directed to existing hard coat technology of preparing and performance defect; And the limitation of depositing system self; Prepare the CrTiAlSiN nano-composite coating at hyperfine carbide tool surface; Obtain Cr, Ti, Al through multi sphere vapor deposition Cr target and TiAl alloys target, and the acquisition of Si can realize: (1) SiH through following 3 kinds of approach
4Gas ionization; (2) magnetron sputtering column Si target; (3) adopt SiH simultaneously
4Gas ionization and magnetron sputtering column Si target.Film plating process of the present invention makes the CrTiAlSiN nano-composite coating have very high case hardness on the one hand; Use through Cr tack coat and CrN supporting layer reduces the coating internal stress significantly on the other hand; Improved Bond Strength of Coating; Overcome high, the poor adhesive force of the coating internal stress that conventional hard coat technology of preparing causes, and shortcoming such as multi sphere bulky grain problem.Therefore, the present invention has following advantage:
CrTiAlSiN nano-composite coating of the present invention is owing to have Cr tack coat and CrN supporting layer, thereby stronger adhesive force is arranged; Common TiAlN and CrTiAlN coating since with the difference of tool matrix material lattice constant, have certain internal stress, penetrability appears when rete is thicker easily, the present invention mixes Si, forms amorphous Si
3N
4, the internal stress of rete is effectively discharged, thereby further improve adhesive force of coatings.The revolution speed decision coating structure of work rest; Difference according to the work rest revolution speed; The main wearing layer that forms by CrSiN layer and TiAlSiN layer alternately constitute, space periodic (being the thickness that individual layer CrSiN adds individual layer TiAlSiN) is for the superlattices of 5-15 nanometer replace composite coating, is that the nanocrystalline CrTiAlN of 5-15 nanometer is embedded in amorphous Si by crystallite dimension perhaps
3N
4Nanocrystalline composite coating, make film-Ji adhesion further improve.On the other hand; According to Theoretical Calculation; Superlattices coating or nanocrystalline coating compound on nanoscale have the hardness above the component coating, and the hardness of main each component of wearing layer all can reach more than the 30GPa, so the hardness of gained CrTiAlSiN nano-composite coating is near 40GPa.
In sum; Gained CrTiAlSiN nano-composite coating of the present invention has the characteristics of high rigidity (35GPa), low-friction coefficient (0.3), good adhesive force (greater than 70N), resistance to elevated temperatures good (above 1000 ℃); Show very big advantage at surface abrasion resistance aspect the lubricated and high temperature resistance with the ultra-fine cemented carbide cutter of this production of coatings; Can effectively solve the fretting wear problem of carbide surface, bring huge economic and social benefit.
Description of drawings
Fig. 1 deposits the preparation facilities sketch map of the cutter of CrTiAlSiN nano-composite coating for the present invention;
Fig. 2 is the transmission electron microscope picture of the CrSiN/TiAlSiN nanometer multilayer composite coating of the present invention's preparation;
Fig. 3 is the nc-CrTiAlN/a-Si of the present invention's preparation
3N
4The transmission electron microscope picture of nanocrystalline composite coating;
Fig. 4 is the adhesive force test curve figure of CrTiAlSiN nano-composite coating sample of the present invention;
Fig. 5 is that the hardness of CrTiAlSiN nano-composite coating of the present invention is with SiH
4The change curve of flow;
Fig. 6 is the The friction coefficient SiH of CrTiAlSiN nano-composite coating of the present invention
4Flow changing curve figure;
Among Fig. 1,1. pumped vacuum systems; 2. vacuum chamber; 3. heater; 4. multi sphere Cr target; 5. multi sphere TiAl target; 6. magnetron sputtering column Si target; 7. work rest; 8. DLT feed channel; 9. fire door.
The specific embodiment
Through accompanying drawing and specific embodiment the present invention is further described below, but protection content of the present invention is not limited to following examples.
As shown in Figure 1, the device that the present invention is used for preparing the cutter that deposits the CrTiAlSiN nano-composite coating comprises pumped vacuum systems 1, vacuum chamber 2, heater 3, multi sphere Cr target 4, multi sphere TiAl target 5, magnetron sputtering column Si target 6, work rest 7, DLT feed channel 8 and recirculating cooling water system.Pumped vacuum systems 1 is made up of a diffusion pump, a lobe pump and two mechanical pumps, is used for keeping the vacuum in plated film chamber, and base vacuum can reach 7 * 10
-4Pa; Vacuum chamber 2 links to each other with pumped vacuum systems 1, and its inwall is fixed with heater 3, is used for bake out and coating process and heats up; Multi sphere Cr target 4 alternately is distributed in around the furnace wall of vacuum chamber 2 with multi sphere TiAl target 5; Supply power by 0～168A high-frequency inverter-type power supply; Utilize the Metal Cr ion of height ionization, the bombardment surface of the work improves the adhesive force between coating and the workpiece; Workpiece bias is provided by the 30kW direct current pulse power source, and bias voltage can be regulated in 0～1000V scope continuously; Magnetron sputtering column Si target 6 is positioned at the central authorities of vacuum chamber 2, and its diameter is 100～200mm, is driven by the 500W radio-frequency power supply, is used to the Si atom that provides coating required.Between multi sphere Cr target 4, multi sphere TiAl target 5 and the magnetron sputtering column Si target 6 is the space of 500～750mm; This space is the coating deposition region; Be provided with several work rests 7 around the magnetron sputtering column Si target 6, be distributed in the periphery of magnetron sputtering column Si target 6 in the form of a ring, workpiece is contained on the work rest 7; The used workpiece of the embodiment of the invention is a hard alloy cutter; Work rest carries out Three dimensional rotation, and promptly work rest is around the revolution of body of heater central shaft, the rotation of work rest and the rotation of workpiece, to guarantee the uniformity of plated film; DLT feed channel 8 is distributed in fire door 9 both sides of vacuum chamber 2, Ar, N
2And SiH
4Gas gets in the vacuum chamber 2 through DLT feed channel 8 respectively by mass flowmenter control; Recirculating cooling water system is provided by the two-way circulatory system; Be the 5kW cooling-water machine; One the tunnel links to each other with the diffusion pump cooling line of pumped vacuum systems 1 is used for cooling off diffusion pump; Another road links to each other with multi sphere Cr target 4, multi sphere TiAl target 5 and magnetron sputtering column Si target 6 through the water pipe on the target body, is used for cooling off the target part.The temperature of cooling water is controlled at 15 ℃, can effectively reduce and control the target material surface temperature, reduces nano-composite coating surface particles degree greatly.
Embodiment 1
At first, hard alloy cutter is cleaned up, clamping begins to vacuumize on work rest, when vacuum is higher than 5 * 10
-3During Pa, the beginning bake out, temperature is controlled at 300 ℃, 3 rev/mins of work rest revolution speeds.When vacuum 5 * 10
-3During Pa, feed Ar gas, temperature is controlled at 300 ℃, opens grid bias power supply, and bias voltage is controlled at-800V, and the tool matrix aura was cleaned 30 minutes.After aura cleaned and finishes, vacuum was adjusted to 2 * 10
-2Pa, bias voltage remain on-800V, and temperature is controlled at 300 ℃, open the Cr target, and to tool matrix bombardment 10 minutes, obtaining thickness was the Cr tack coat of 70 nanometers; After bombardment finishes, be-200V, close Ar gas passage, feed N bias adjustment
2Gas is adjusted to 2.0Pa with vacuum, 300 ℃ of temperature, and deposition is 10 minutes on the Cr tack coat, and obtaining thickness is the CrN supporting layer of 200 nanometers.After CrN supporting layer deposition finishes, feed the SiH of 400sccm
4, through regulating N
2Flow at 3.3Pa, keeps bias voltage-200V, 300 ℃ of temperature with vacuum degree control; Open the TiAl target; Deposition is 40 minutes on the CrN supporting layer, obtains thickness and be CrTiAlSiN master's wearing layer of 2 microns, and this main wearing layer is the CrSiN/TiAlSiN nanometer multilayer composite coating that alternately is made up of CrSiN layer and TiAlSiN layer; Every layer of CrSiN thickness is 5～5.3 nanometers, and every layer of TiAlSiN thickness is 3～3.3 nanometers.After deposition finishes, take out cutter after naturally cooling to room temperature, promptly obtain depositing the hard alloy cutter of CrTiAlSiN nano-composite coating, its resistance to elevated temperatures is above 1000 ℃.
Embodiment 2
Hard alloy cutter is cleaned up, and clamping begins to vacuumize on work rest, when vacuum is higher than 5 * 10
-3During Pa, the beginning bake out, temperature is controlled at 370 ℃, and keeping the work rest revolution speed is 9 rev/mins, when vacuum 5 * 10
-3During Pa, feed Ar gas, temperature is controlled at 370 ℃, opens grid bias power supply, and bias voltage is controlled at-800V, tool matrix is carried out aura clean, and the aura time is 40 minutes.After aura cleans and finishes, in vacuum 1.5 * 10
-2Pa, 370 ℃ of temperature ,-the 800V bias voltage under, open the Cr target, to tool matrix bombardment 15 minutes, obtain the Cr tack coat of 100 nanometer thickness; After bombardment finishes, close Ar gas passage, feed N
2Gas is adjusted to 2.0Pa with vacuum, regulates bias voltage to be-250V, and temperature is controlled at 370 ℃, and deposition is 5 minutes on the Cr tack coat, obtains the CrN supporting layer of 100 nanometer thickness.After CrN supporting layer deposition finishes, regulate N
2At 5Pa, temperature is controlled at 370 ℃ with vacuum degree control, keeps bias voltage be-250V, opens TiAl target and Si target, on the CrN supporting layer, deposits 45 minutes, obtains thickness and be 2 microns main wearing layer, and this main wearing layer is to be embedded in amorphous Si by nanocrystalline CrTiAlN
3N
4Nc-CrTiAlN/a-Si
3N
4Nanocrystalline composite coating, nanocrystalline CrTiAlN is of a size of 8～15 nanometers.After deposition finishes, take out cutter after naturally cooling to room temperature, promptly obtain depositing the hard alloy cutter of CrTiAlSiN nano-composite coating, its resistance to elevated temperatures is above 1000 ℃.
Embodiment 3
Hard alloy cutter is cleaned up, and clamping begins to vacuumize on work rest, when vacuum is higher than 5 * 10
-3During Pa, the beginning bake out, temperature is controlled at 350 ℃, and keeping the work rest revolution speed is 11 rev/mins, when vacuum 5 * 10
-3During Pa, feed Ar gas, temperature is controlled at 350 ℃, opens grid bias power supply, and bias voltage is controlled at-800V, cutter is carried out aura clean 45 minutes aura time.After aura cleaned and finishes, vacuum was adjusted to 2.2 * 10
-2Pa, temperature is controlled at 350 ℃, bias voltage and remains on-900V, opens the Cr target, to tool matrix bombardment 15 minutes, obtains the Cr tack coat of 80 nanometer thickness; After bombardment finished, bias voltage dropped to-200V, and the Ar gas that breaks feeds N
2Gas is adjusted to 2.0Pa with vacuum, and temperature is controlled at 350 ℃, and deposition is 10 minutes on the Cr tack coat, obtains the CrN supporting layer of 200 nanometer thickness.After CrN supporting layer deposition finishes, feed the SiH of 240sccm
4, through regulating N
2With vacuum degree control at 3.3Pa, 350 ℃ of temperature, bias voltage-200V opens TiAl target and Si target and on the CrN supporting layer, deposits 40 minutes, obtains thickness and be CrTiAlSiN master's wearing layer of 2.1 microns, this main wearing layer is to be embedded in amorphous Si by nanocrystalline CrTiAlN
3N
4Nc-CrTiAlN/a-Si
3N
4Nanocrystalline composite coating, nanocrystalline CrTiAlN is of a size of 5～8 nanometers.After deposition finishes, take out cutter after naturally cooling to room temperature, promptly obtain depositing the hard alloy cutter of CrTiAlSiN nano-composite coating, its resistance to elevated temperatures is above 1000 ℃.
Fig. 2 can obviously find out that main wearing layer is the nanometer multilayer composite construction that is made up of laminated coating for the present invention is 2～7 rev/mins of transmission electron microscope pictures of the CrSiN/TiAlSiN nanometer multilayer composite coating of preparation down at the revolution speed of work rest from figure.
Fig. 3 is 8～13 rev/mins of nc-CrTiAlN/a-Si of preparation down for the present invention at the revolution speed of work rest
3N
4The nanocrystalline composite coating transmission electron microscope picture can find out obviously that it is nanocrystalline mosaic texture from figure.
Fig. 4 is the adhesion chart of CrTiAlSiN nano-composite coating of the present invention, as can be seen from the figure is increased to 70N when above when loading force, concussion continuously just occurs, the signal of sounding, and the adhesive force that the CrTiAlSiN nano-composite coating is described is greater than 70N.
Fig. 5 is that the hardness of CrTiAlSiN nano-composite coating of the present invention is with SiH
4The change curve of flow, along with the SiH4 flow increases, coating hardness improves gradually, at SiH
4The hardness of CrTiAlSiN coating reached maximum when flow was 400sccm.
Fig. 6 is the The friction coefficient SiH of CrTiAlSiN nano-composite coating of the present invention
4The curve map of changes in flow rate, as can be seen from the figure, along with SiH
4The increase of flow, coefficient of friction increases gradually, and the initial period speedup is very fast, but with SiH
4Flow further strengthens and speedup slows down, and reaches stable coefficient of friction (0.3), shows that the maximum friction coefficient has only 0.3, and the CrTiAlSiN nano-composite coating is the lower superhard coating of a kind of coefficient of friction.
Claims (5)
1. CrTiAlSiN nano-composite coating, it is characterized in that: this composite coating comprises tack coat, supporting layer and main wearing layer, adhesive layer thickness is 50 ~ 100 nanometers; Supporting layer thickness is 100 ~ 200 nanometers; Main wearing layer thickness is 1.7 ~ 2.85 microns, and supporting layer is attached to above the tack coat, and main wearing layer is attached to above the supporting layer; Tack coat is Cr; Supporting layer is CrN, and main wearing layer is the CrSiN/TiAlSiN nanometer multilayer composite coating that alternately is made up of CrSiN layer and TiAlSiN layer, or is embedded in amorphous Si by nanocrystalline CrTiAlN
3N
4Nc-CrTiAlN/a-Si
3N
4Nanocrystalline composite coating, in the said CrSiN/TiAlSiN nanometer multilayer composite coating, every layer of CrSiN thickness is 3 ~ 10 nanometers, every layer of TiAlSiN thickness is 2 ~ 5 nanometers; Said nc-CrTiAlN/a-Si
3N
4In the nanocrystalline composite coating, nanocrystalline 5 ~ 15 nanometers that are of a size of of CrTiAlN.
2. one kind deposits the cutter of CrTiAlSiN nano-composite coating according to claim 1, comprises tool matrix at least, and it is characterized in that: the tack coat of CrTiAlSiN nano-composite coating is deposited on the tool matrix.
3. according to the said cutter that deposits the CrTiAlSiN nano-composite coating of claim 2, it is characterized in that: said cutter is a hard alloy cutter.
4. the said preparation method who deposits the cutter of CrTiAlSiN nano-composite coating of claim 2 is characterized in that may further comprise the steps: the tool matrix clamping of surface cleaning is carried out the aura cleaning on work rest; After aura cleans and finishes, in Ar compression ring border, vacuum 1.5 * 10
-2~ 2.5 * 10
-2Pa, 300 ~ 400 ℃ ,-600 ~-the 900V bias condition under, open multi sphere Cr target and on tool matrix, deposit the Cr tack coat; Then nitrogen environment, vacuum 1.5 ~ 3.0Pa, 300 ~ 400 ℃ ,-150 ~-the 500V bias condition under, deposition CrN supporting layer on the Cr tack coat; Under nitrogen environment, feed the SiH of 200 ~ 600sccm
4And/or unlatching magnetron sputtering column Si target; Vacuum 3.0 ~ 5.0Pa, 300 ~ 400 ℃, bias voltage-150 ~-the 400V condition under; Open the TiAl target, deposition CrTiAlSiN master wearing layer on the CrN supporting layer, adhesive layer thickness is 50 ~ 100 nanometers; Supporting layer thickness is 100 ~ 200 nanometers, and main wearing layer thickness is 1.7 ~ 2.85 microns; When the revolution speed of work rest is 2 ~ 7 rev/mins; Main wearing layer is the CrSiN/TiAlSiN nanometer multilayer composite coating that CrSiN layer and TiAlSiN layer alternately constitute; When the revolution speed of work rest was 8 ~ 13 rev/mins, main wearing layer was that nanocrystalline CrTiAlN is embedded in amorphous Si
3N
4Nc-CrTiAlN/a-Si
3N
4Nanocrystalline composite coating, in the said CrSiN/TiAlSiN nanometer multilayer composite coating, every layer of CrSiN thickness is 3 ~ 10 nanometers, every layer of TiAlSiN thickness is 2 ~ 5 nanometers; Said nc-CrTiAlN/a-Si
3N
4In the nanocrystalline composite coating, nanocrystalline 5 ~ 15 nanometers that are of a size of of CrTiAlN; After deposition finishes, cool off naturally, obtain depositing the cutter of CrTiAlSiN nano-composite coating.
5. according to the said preparation method who deposits the cutter of CrTiAlSiN nano-composite coating of claim 4, it is characterized in that: said cutter is a hard alloy cutter.
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|---|---|---|---|
| CN201010192207A CN101879794B (en) | 2010-05-31 | 2010-05-31 | CrTiAlSiN nano composite coating, cutter deposited with same and preparation method thereof |
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| CN101879794B true CN101879794B (en) | 2012-10-17 |
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| CN1470350A (en) * | 2002-07-11 | 2004-01-28 | ס�ѵ�����ҵ��ʽ���� | Coating tool |
| CN1997766A (en) * | 2004-05-19 | 2007-07-11 | Tdy工业公司 | Al2O3 ceramic tools with diffusion bonding enhanced layer |
| CN101100963A (en) * | 2006-07-06 | 2008-01-09 | 帝国活塞环株式会社 | Piston ring for internal combustion engines |
| CN101323945A (en) * | 2008-07-25 | 2008-12-17 | 西南大学 | Hard film containing stress relaxation layer and method for preparing the same |
| CN101428492A (en) * | 2007-11-08 | 2009-05-13 | 森巨科技材料股份有限公司 | Method for manufacturing construction composite panel with sedimentary deposit |
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| JP2005186184A (en) * | 2003-12-25 | 2005-07-14 | Ion Engineering Research Institute Corp | Tool for dry machining |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1470350A (en) * | 2002-07-11 | 2004-01-28 | ס�ѵ�����ҵ��ʽ���� | Coating tool |
| CN1997766A (en) * | 2004-05-19 | 2007-07-11 | Tdy工业公司 | Al2O3 ceramic tools with diffusion bonding enhanced layer |
| CN101100963A (en) * | 2006-07-06 | 2008-01-09 | 帝国活塞环株式会社 | Piston ring for internal combustion engines |
| CN101428492A (en) * | 2007-11-08 | 2009-05-13 | 森巨科技材料股份有限公司 | Method for manufacturing construction composite panel with sedimentary deposit |
| CN101323945A (en) * | 2008-07-25 | 2008-12-17 | 西南大学 | Hard film containing stress relaxation layer and method for preparing the same |
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| JP特开2005-186184A 2005.07.14 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103212729A (en) * | 2013-04-17 | 2013-07-24 | 重庆市硅酸盐研究所 | Numerical control cutting tool with CrAlTiN superlattice coating and manufacturing method thereof |
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