CN109576643A - A kind of TiSiVN multicomponent complex gradient cutter coat and preparation method thereof - Google Patents
A kind of TiSiVN multicomponent complex gradient cutter coat and preparation method thereof Download PDFInfo
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- CN109576643A CN109576643A CN201811610617.XA CN201811610617A CN109576643A CN 109576643 A CN109576643 A CN 109576643A CN 201811610617 A CN201811610617 A CN 201811610617A CN 109576643 A CN109576643 A CN 109576643A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 37
- 238000000576 coating method Methods 0.000 claims abstract description 82
- 239000011248 coating agent Substances 0.000 claims abstract description 78
- 239000010410 layer Substances 0.000 claims abstract description 29
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 21
- 239000002346 layers by function Substances 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 239000011159 matrix material Substances 0.000 claims description 64
- 238000007747 plating Methods 0.000 claims description 22
- 239000011230 binding agent Substances 0.000 claims description 15
- KRQUFUKTQHISJB-YYADALCUSA-N 2-[(E)-N-[2-(4-chlorophenoxy)propoxy]-C-propylcarbonimidoyl]-3-hydroxy-5-(thian-3-yl)cyclohex-2-en-1-one Chemical compound CCC\C(=N/OCC(C)OC1=CC=C(Cl)C=C1)C1=C(O)CC(CC1=O)C1CCCSC1 KRQUFUKTQHISJB-YYADALCUSA-N 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 8
- 238000010849 ion bombardment Methods 0.000 claims description 6
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 4
- 238000003475 lamination Methods 0.000 claims description 3
- 238000010276 construction Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910008482 TiSiN Inorganic materials 0.000 abstract description 20
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 abstract description 20
- 238000005260 corrosion Methods 0.000 abstract description 8
- 230000007797 corrosion Effects 0.000 abstract description 8
- 230000035939 shock Effects 0.000 abstract description 8
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 2
- 229910052723 transition metal Inorganic materials 0.000 abstract description 2
- -1 transition metal nitride Chemical class 0.000 abstract description 2
- 239000002131 composite material Substances 0.000 abstract 2
- 239000011247 coating layer Substances 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 21
- 238000000034 method Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 6
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 238000010792 warming Methods 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 229910010037 TiAlN Inorganic materials 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005188 flotation Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002028 premature Effects 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010257 thawing Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
一种TiSiVN多组元复合梯度刀具涂层及其制备方法，涉及刀具涂层领域,该刀具涂层包括依次沉积于刀具基体表面的TiN结合层、TiSiVN梯度层和TiSiVN功能层,所述TiSiVN梯度层为不同V含量叠层结构，V含量随着涂层叠层增加而增加,所述TiSiVN多组元复合梯度刀具涂层总厚度为1‑10um，本发明在TiSiN涂层中加入V元素可改善TiSiN涂层结构，提高其耐磨性、耐腐蚀性以及抗热震性能，同时，在TiSiVN涂层中，通过生成的Si3N4包覆纳米晶过渡金属氮化物(TiN），大大细化了晶粒以及增加了涂层硬度，选用TiN作为打底层能提高打底层与基体的结合力，同时与TiSiVN涂层有更好的适应性，有效降低因为涂层间材料不匹配而造成的内应力增大问题。
A TiSiVN multi-component composite gradient tool coating and a preparation method thereof, relate to the field of tool coating, the tool coating comprises a TiN bonding layer, a TiSiVN gradient layer and a TiSiVN functional layer sequentially deposited on the surface of a tool substrate, the TiSiVN gradient layer The layer is a layered structure with different V contents, and the V content increases with the increase of the coating layer. The total thickness of the TiSiVN multi-component composite gradient tool coating is 1-10um. Improve the structure of TiSiN coating, improve its wear resistance, corrosion resistance and thermal shock resistance. At the same time, in the TiSiVN coating, the nanocrystalline transition metal nitride (TiN) is coated by the generated Si3N4, which greatly refines the crystallinity. Grain and increase the hardness of the coating, the use of TiN as the primer can improve the bonding force between the primer and the substrate, and at the same time, it has better adaptability with the TiSiVN coating, effectively reducing the internal stress caused by the mismatch between the coatings. big problem.
Description
Technical field
The present invention relates to cutter coat fields, and in particular to a kind of TiSiVN multicomponent complex gradient cutter coat and its system
Preparation Method.
Background technique
One layer of hard is coated in tool surface using chemical vapor deposition (CVD) or physical vapour deposition (PVD) (PVD) method to apply
Layer is a kind of economical and practical effective way for improving material surface property.Hard coat is important as one of mechanical function film
Branch especially accounts for leading position using very extensively in machine tools in metal cutting.Hard coat can improve material
The surface property of material reduces the friction and wear with workpiece, effective to improve material surface hardness, toughness, wearability and high temperature
Stability increases substantially the service life of coating product.
TiSiN coating has good chemical stability, high thermohardening, good inoxidizability, high film/base junction
Resultant force and excellent wearability, are most wide one of the tool surfaces hard coats of current application range, are suitble to various dry cuttings
Occasion simultaneously gradually substitutes TiN coating.With the fast development of high-speed cutting, TiSiN coating is gradually difficult to meet modern cutter
The requirement of high-speed cutting, the research for TiSiN base multi-element coating were obtaining extensive concern both at home and abroad in recent years, were passing through
It is to promote TiSiN properties of coating to have efficacious prescriptions that doping microelement, which optimizes TiSiN coating structure and performance,
Method.
Wearability refers to the abrasion resistance properties of material, has much relations with coating texture, in TiSiN coating
V element, which is added, can improve TiSiN coating structure, improve its wearability, corrosion resistance and thermal shock resistance.Work as TiSiVN
When V content is lower in coating, with the increase of V content, coating hardness is reduced, and wearability ratio TiSiN coating is more excellent.V's
Addition refines TiSiN coated grains, and tissue is finer and close, can effectively prevent the failure of coating.Comparison is current on the market
TiAlN the most general, TiSiN, the coatings such as AlCrN, TiSiVN coating in addition to above-mentioned hardness, wearability increase with
It outside, is then its bright spot in the self-lubricating property of high temperature.In process, the precipitation of V can be combined generation with 02 in air
Barium oxide, the oxide have lower coefficient of friction, can be obviously improved the contact of cutter and cutting material in process
Condition, and longer time is maintained at high temperature, to reduce cutting temperature by reducing frictional force.Conventional TiAlN,
The coatings such as AlCrN are to generate the Al2O3 of the high temperature at high temperature thus the heat resistance for improving cutter.And TISiVN is then logical
It crosses reduction coefficient of friction and improves cutter heat resistance.In contrast, possess the coated cutting tool of self-lubricating property more in pyroprocess
It is suitable for high speed and dry or near dry cutting processing.
And in coating preparation process, meeting is added so that coating and matrix or prime coat generation containing V are biggish in the unexpected of V
Internal stress, so that coating fails in process.And for the laminated coating containing V, work in-process high temperature can melt
Change VN and greatly reduces the working durability of coating so that surface coating is swum on the VN layer of thawing.Therefore, gradient applies
Layer is the preferred plan for solving the problems, such as V coating binding force.Content is gradually increased V coating from the inside to surface, not only effectively increase with
The binding force of prime coat and matrix, and the flotation issue for melting in the middle part of coating at high temperature and occurring is largely avoided, while V can
To be constantly precipitated outward, so that V has coated cutting tool surface layer always, and is not obstructed and be precipitated by other coatings.For coating containing V
For, design gradient-structure is that the oxide for solving to have greasy property in its binding force and process is caused because of high temperature melt
The effective workaround of premature failure.
With the development of high speed machining and all kinds of high-performance difficult-to-machine materials, metal cutting tool performance is proposed
Increasingly higher demands do not require nothing more than its hardness with higher, wear-resisting, impact resistance, more require its with higher resistance to
High-temperature behavior, to meet higher and higher requirement of engineering.For the rigors being adapted under the conditions of high-speed cutting to coating performance,
It is necessary to design and prepare a kind of nano-composite coating cutter with more high rigidity and wearability.
Summary of the invention
A kind of compound ladder of TiSiVN multicomponent is provided it is an object of the invention to avoid shortcoming in the prior art
Cutter coat is spent, which is added V element in TiSiN coating can improve TiSiN coating structure, improve it from profit
Slip, wearability, corrosion resistance and thermal shock resistance.
Another object of the present invention is to avoid shortcoming in the prior art and to provide a kind of TiSiVN multicomponent multiple
The preparation method of gradient cutter coating is closed, the preparation method is easy to operate, and it is low in cost, it is easy application.
The purpose of the present invention is achieved through the following technical solutions: providing a kind of TiSiVN multicomponent complex gradient cutter painting
Layer, TiN binder course, TiSiVN gradient layer and TiSiVN functional layer including being sequentially deposited to tool matrix surface are described
TiSiVN gradient layer is different V content laminated construction, and V content increases, the TiSiVN multicomponent as coating stack increases
Complex gradient cutter coat overall thickness is 1-10um.
Wherein, the TiN binder course with a thickness of 0.1-1um, each lamination of TiSiVN gradient layer with a thickness of 0.1-
1um, the number of plies of lamination is 1-10 layers, with a thickness of 0.1-6um, the TiSiVN functional layer with a thickness of 0.5-3um.
Wherein, the TiN binder course, with atomic percentage, the N of Ti and 35%-65% including 35%-65%.
Wherein, the TiSiVN gradient layer, with atomic percentage, the N of the Ti including 35%-55%, 35%-65%,
The Si of the V of 0.1%-10%, 0.1%-10%.
Wherein, the TiSiVN functional layer, with atomic percentage, the N of the Ti including 35%-55%, 35%-65%,
The Si of the V of 0.1%-10%, 0.1%-10%.
In addition, also providing a kind of preparation method of above-mentioned TiSiVN multicomponent complex gradient cutter coat, including following
Step:
S1: tool matrix cleaning: carrying out ultrasonic cleaning to tool matrix and remove surface moisture, then that tool matrix is equal
Even clamping is incorporated to furnace on coating apparatus pivoted frame, and it is 0.01Pa hereinafter, opening simultaneously heater heating that vacuum chamber, which is evacuated to vacuum degree,
To 300-550 DEG C；
S2: aura cleaning and Ti ion bombardment: being passed through gas is Ar, and furnace chamber vacuum degree is 0.01-1Pa, and matrix adds the back bias voltage to be
300-1000V, carries out aura and cleans 5-35min, then adjusts substrate negative voltage to 50-300V, opens cr target, adjustment target electricity
Stream is 100-350A, with cr high-energy ionic bombardment matrix 1-10min with activated matrix surface；
S3: preparation TiN binder course: target Ti, being passed through gas is N2, and adjustment plating film pressure is 1-5Pa, tool matrix negative bias
Voltage is 50-400V, target current 100-400A;
S4: preparation TiSiVN gradient layer: target is TiSiV and Ti, and being passed through gas is N2, and adjustment plating film pressure is 1-5Pa, is adjusted
Whole tool matrix negative bias voltage is 30-200V, and arc ource electric current is 200-400A；
S5: preparation TiSiVN functional layer: target TiSiV, being passed through gas is N2, and adjustment plating film pressure is 1-5Pa, adjusts knife
Tool matrix negative bias voltage is 30-200V, and arc ource electric current is 200-400A;
S6: closing arc power, is down to room temperature to vacuum room temperature, opens vacuum chamber and takes out matrix, is formed in matrix surface
Coating, as Thermal Conductivity Varying With Temperature cutter coat.
Wherein, in step sl, the pivoted frame revolution speed is 2-8rpm, and pivoted frame rotational velocity is 5-15rpm.
Wherein, in step s3, the material of the TiN binder course is TiN.
Wherein, in step s 4, adjustment plating film pressure is 3Pa, and adjustment tool matrix negative bias voltage is 100V, arc ource electric current
For 300A.
Wherein, in step s 5, adjustment plating film pressure is 3Pa, and adjustment tool matrix negative bias voltage is 100V, arc ource electric current
For 300A.
Compared with the existing technology, the beneficial effect of TiSiVN multicomponent complex gradient cutter coat of the invention include with
Under:
(1) in TiSiN coating be added V element can improve TiSiN coating structure, improve its wearability, corrosion resistance with
And thermal shock resistance.
(2) TiSiN coating is added as microcomponent in V, can significantly improve coating abrasion performance, meanwhile, in TiSiVN coating
In, nanocrystalline transition metal nitride (TiN) is coated by the Si3N4 of generation, crystal grain has been refined significantly and has increased coating
Hardness.
(3) it selects TiN that can improve the binding force of prime coat and matrix as prime coat, while having more preferably with TiSiVN coating
Adaptability, be effectively reduced because apply interlayer materials mismatch and caused by internal stress increase problem.
(4) it by designing gradient layer between prime coat and functional layer, is effectively reduced due to V a large amount of in multicomponent functional layer
Addition caused by different interlayer internal stress increase, improve coating stability, show during the cutting process higher
Wearability and service life.Gradient layer structure avoids barium oxide and melts at high temperature and the problem of premature failure.V coating from
In be gradually increased to outer content, largely avoid the flotation issue for melting in the middle part of coating at high temperature and occurring, while V can not
Disconnected to be precipitated outward, so that V has coated cutting tool surface layer always, lubricant layer can be present in coated cutting tool surface always, guarantee coating
Play greasy property.
Compared with the existing technology, preparation method of the invention the utility model has the advantages that the preparation method is easy to operate, it is at low cost
It is honest and clean, it is easy application.
Detailed description of the invention
Invention is described further using attached drawing, but the embodiments in the accompanying drawings do not constitute any limitation to the present invention,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to the following drawings
Its attached drawing.
Fig. 1 is the structural schematic diagram of cutter coat of the invention；
Fig. 2 is TiSiVN gradient coating sectional view prepared by the present invention；
Fig. 3 is cutting experiment comparison diagram of the invention；
In figure, 1- tool matrix, 2-TiN binder course, 3-TiSiVN gradient layer, 4-TiSiVN functional layer.
Specific embodiment
Specific implementation of the invention is described further below in conjunction with drawings and examples, but the invention is not limited to
This.
Embodiment one:
A kind of preparation method of TiSiVN multicomponent complex gradient cutter coat, steps are as follows:
S1: ultrasonic cleaning is carried out to tool matrix 1 and removes surface moisture, then by the uniform clamping of tool matrix 1 in coating
Furnace is incorporated on equipment pivoted frame, adjusting pivoted frame revolution speed revolving speed is 5rpm, and pivoted frame rotational velocity is 5rpm, and vacuum chamber is evacuated to background
Vacuum 0.01Pa is warming up to 550 DEG C hereinafter, opening simultaneously heater;
S2: carry out aura cleaning and Ti ion bombardment: being passed through gas is Ar gas, and furnace chamber vacuum degree is 0.1 Pa, and matrix adds negative bias
300V is pressed, aura is carried out and cleans 20min: and then adjustment substrate negative voltage opens Ti target, adjustment target current is 100- to 50V
350A, with Ti high-energy ionic bombardment matrix 10min with activated matrix surface；
S3: preparation TiN binder course 2: target Ti, being passed through gas is N2, and adjustment plating film pressure is 3Pa, tool matrix 1 negative bias electricity
Pressure is 200V, target current 200A;
S4: preparation TiSiVN gradient layer 3: target is TiSiV and Ti, and being passed through gas is N2, and adjustment plating film pressure is 3Pa, adjustment
1 negative bias voltage of tool matrix is 60V, and arc ource electric current is 250A；
S5: preparation TiSiVN functional layer 4: target TiSiV, being passed through gas is N2, and adjustment plating film pressure is 2Pa, adjusts cutter
1 negative bias voltage of matrix is 100V, and arc ource electric current is 250A.
For prepared coating structure as shown in Figure 1, overall thickness is 5 um, section is as shown in Fig. 2, and comparison cutting effect is as schemed
Shown in 3, it is known that TiSiVN gradient coating prepared by the present embodiment is being cut compared with single layer TiSiVN coating, TiSiN coating
Better wearability, corrosion resistance and thermal shock resistance can be obtained in the process.
Embodiment two:
A kind of preparation method of TiSiVN multicomponent complex gradient cutter coat, steps are as follows:
S1: ultrasonic cleaning is carried out to tool matrix 1 and removes surface moisture, then by the uniform clamping of tool matrix 1 in coating
Furnace is incorporated on equipment pivoted frame, adjusting pivoted frame revolution speed revolving speed is 5rpm, and pivoted frame rotational velocity is 5rpm, and vacuum chamber is evacuated to background
Vacuum 0.01Pa is warming up to 400 DEG C hereinafter, opening simultaneously heater；
S2: carry out aura cleaning and Ti ion bombardment: being passed through gas is Ar gas, and furnace chamber vacuum degree is 0.1Pa, and matrix adds back bias voltage
300V carries out aura and cleans 20min: and then adjustment substrate negative voltage opens Ti target to 50V, adjustment target current is 150A, with
Ti high-energy ionic bombards matrix 10min with activated matrix surface；
S3: preparation TiN binder course 2: target Ti, being passed through gas is N2, and adjustment plating film pressure is 4Pa, tool matrix 1 negative bias electricity
Pressure is 180V, target current 250A;
S4: preparation TiSiVN gradient layer 3: target is TiSiV and Ti, and being passed through gas is N2, and adjustment plating film pressure is 4Pa, adjustment
1 negative bias voltage of tool matrix is 100V, and arc ource electric current is 300A；
S5: preparation TiSiVN functional layer 4: target TiSiV, being passed through gas is N2, and adjustment plating film pressure is 2.5Pa, adjusts knife
Having 1 negative bias voltage of matrix is 100V, arc ource electric current 100A.
For prepared coating structure as shown in Figure 1, overall thickness is 1um, coating cross sections are as shown in Fig. 2, compare cutting effect
As shown in Figure 3, it is known that TiSiVN gradient coating prepared by the present embodiment compared with single layer TiSiVN coating, TiSiN coating,
Better wearability, corrosion resistance and thermal shock resistance can be obtained in cutting process.
Embodiment three:
A kind of preparation method of TiSiVN multicomponent complex gradient cutter coat, steps are as follows:
S1: ultrasonic cleaning is carried out to tool matrix 1 and removes surface moisture, then by the uniform clamping of tool matrix 1 in coating
Furnace is incorporated on equipment pivoted frame, adjusting pivoted frame revolution speed revolving speed is 5rpm, and pivoted frame rotational velocity is 5rpm, and vacuum chamber is evacuated to background
Vacuum 0.01Pa is warming up to 500 DEG C hereinafter, opening simultaneously heater；
S2: carry out aura cleaning and Ti ion bombardment: being passed through gas is Ar gas, and furnace chamber vacuum degree is 0.1Pa, and matrix adds back bias voltage
For 300V, carries out aura and clean 20min；Then adjustment substrate negative voltage opens Ti target to 50V, and adjustment target current is 100A,
With Ti high-energy ionic bombardment matrix 5min with activated matrix surface；
S3: preparation TiN binder course 2: target Ti, being passed through gas is N2, and adjustment plating film pressure is 1.5Pa, 1 negative bias of tool matrix
Voltage is 200V, target current 150A;
S4: preparation TiSiVN gradient layer 3: target is TiSiV and Ti, and being passed through gas is N2, and adjustment plating film pressure is 2.5Pa, is adjusted
Whole 1 negative bias voltage of tool matrix is 150V, and arc ource electric current is 200A；
S5: preparation TiSiVN functional layer 4: target TiSiV, being passed through gas is N2, and adjustment plating film pressure is 2.5Pa, adjusts knife
Tool 1 negative bias voltage of matrix is 150V, and arc ource electric current is 350A.
For prepared coating structure as shown in Figure 1, overall thickness is 10um, section is as shown in Fig. 2, and comparison cutting effect is as schemed
Shown in 3, it is known that TiSiVN gradient coating prepared by the present embodiment is being cut compared with single layer TiSiVN coating, TiSiN coating
Better wearability, corrosion resistance and thermal shock resistance can be obtained in the process.
Example IV:
A kind of preparation method of TiSiVN multicomponent complex gradient cutter coat, steps are as follows:
S1: ultrasonic cleaning is carried out to tool matrix 1 and removes surface moisture, then by the uniform clamping of tool matrix 1 in coating
Furnace is incorporated on equipment pivoted frame, adjusting pivoted frame revolution speed revolving speed is 5rpm, and pivoted frame rotational velocity 5rpm, it is true that vacuum chamber is evacuated to background
Empty 0.01Pa is warming up to 500 DEG C hereinafter, opening simultaneously heater；
S2: carrying out aura cleaning and Ti ion bombardment, and being passed through gas is Ar gas, and furnace chamber vacuum degree is 0.1Pa, and matrix adds back bias voltage
For 300V, carries out aura and clean 20min；Then adjustment substrate negative voltage opens Ti target to 50V, and adjustment target current is 100A,
With Ti high-energy ionic bombardment matrix 10min with activated matrix surface；
S3: preparation TiN binder course 2: target Ti, being passed through gas is N2, and adjustment plating film pressure is 3.5Pa, 1 negative bias of tool matrix
Voltage is 80V, target current 120A;
S4: preparation TiSiVN gradient layer 3: target is TiSiV and Ti, and being passed through gas is N2, and adjustment plating film pressure is 3Pa, adjustment
1 negative bias voltage of tool matrix is 100V, and arc ource electric current is 300A；
S5: preparation TiSiVN functional layer 4: target TiSiV, being passed through gas is N2, and adjustment plating film pressure is 3Pa, adjusts cutter
1 negative bias voltage of matrix is 100V, and arc ource electric current is 300A.
For prepared coating structure as shown in Figure 1, overall thickness is 8um, coating cross sections are as shown in Fig. 2, compare cutting effect
As shown in Figure 3, it is known that TiSiVN gradient coating prepared by the present embodiment compared with single layer TiSiVN coating, TiSiN coating,
Better wearability, corrosion resistance and thermal shock resistance can be obtained in cutting process.
Finally it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than the present invention is protected
The limitation of range is protected, although explaining in detail referring to preferred embodiment to the present invention, those skilled in the art are answered
Work as understanding, it can be with modification or equivalent replacement of the technical solution of the present invention are made, without departing from the reality of technical solution of the present invention
Matter and range.
Claims (10)
1. a kind of TiSiVN multicomponent complex gradient cutter coat, it is characterised in that: including being sequentially deposited to tool matrix surface
TiN binder course, TiSiVN gradient layer and TiSiVN functional layer, the TiSiVN gradient layer be different V content laminated construction, V
Content increases as coating stack increases, and the TiSiVN multicomponent complex gradient cutter coat overall thickness is 1-10um.
2. a kind of TiSiVN multicomponent complex gradient cutter coat according to claim 1, it is characterised in that: the TiN
Binder course with a thickness of 0.1-1um, each laminated thickness of TiSiVN gradient layer is 0.1-1um, and the lamination number of plies is 1-10 layers, thickness
For 0.1-6um, the TiSiVN functional layer is with a thickness of 0.5-3um.
3. a kind of TiSiVN multicomponent complex gradient cutter coat according to claim 1, it is characterised in that: the TiN
Binder course, with atomic percentage, the N of Ti and 35%-65% including 35%-65%.
4. a kind of TiSiVN multicomponent complex gradient cutter coat according to claim 1, it is characterised in that: described
TiSiVN gradient layer, with atomic percentage, the V of the N of the Ti including 35%-55%, 35%-65%, 0.1%-10%, 0.1%-
10% Si.
5. a kind of TiSiVN multicomponent complex gradient cutter coat according to claim 1, it is characterised in that: described
TiSiVN functional layer, with atomic percentage, the V of the N of the Ti including 35%-55%, 35%-65%, 0.1%-10%, 0.1%-
10% Si.
6. a kind of preparation method of the described in any item TiSiVN multicomponent complex gradient cutter coats of claim 1-5, special
Sign is: the following steps are included:
S1: tool matrix cleaning: carrying out ultrasonic cleaning to tool matrix and remove surface moisture, then that tool matrix is equal
Even clamping is incorporated to furnace on coating apparatus pivoted frame, and it is 0.01Pa hereinafter, opening simultaneously heater heating that vacuum chamber, which is evacuated to vacuum degree,
To 300-550 DEG C；
S2: aura cleaning and Ti ion bombardment: being passed through gas is Ar, and furnace chamber vacuum degree is 0.01-1Pa, and matrix adds back bias voltage
300-1000V, carries out aura and cleans 5-35min, then adjusts substrate negative voltage to 50-300V, opens cr target, adjustment target electricity
Stream is 100-350A, with cr high-energy ionic bombardment matrix 1-10min with activated matrix surface；
S3: preparation TiN binder course: target Ti, being passed through gas is N2, and adjustment plating film pressure is 1-5Pa, tool matrix negative bias
Voltage is 50-400V, target current 100-400A;
S4: preparation TiSiVN gradient layer: target is TiSiV and Ti, and being passed through gas is N2, and adjustment plating film pressure is 1-5Pa, is adjusted
Whole tool matrix negative bias voltage is 30-200V, and arc ource electric current is 200-400A；
S5: preparation TiSiVN functional layer: target TiSiV, being passed through gas is N2, and adjustment plating film pressure is 1-5Pa, adjusts knife
Tool matrix negative bias voltage is 30-200V, and arc ource electric current is 200-400A;
S6: closing arc power, is down to room temperature to vacuum room temperature, opens vacuum chamber and takes out matrix, is formed in matrix surface
Coating, as Thermal Conductivity Varying With Temperature cutter coat.
7. preparation method according to claim 6, it is characterised in that: in step sl, the pivoted frame revolution speed is 2-
8rpm, pivoted frame rotational velocity are 5-15rpm.
8. preparation method according to claim 6, it is characterised in that: in step s3, the material of the TiN binder course is
TiN。
9. preparation method according to claim 6, it is characterised in that: in step s 4, adjustment plating film pressure is 3Pa, is adjusted
Whole tool matrix negative bias voltage is 100V, and arc ource electric current is 300A.
10. preparation method according to claim 6, it is characterised in that: in step s 5, adjustment plating film pressure is 3Pa, is adjusted
Whole tool matrix negative bias voltage is 100V, and arc ource electric current is 300A.
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| CN113529080A (en) * | 2021-07-19 | 2021-10-22 | 厦门鸿鹭联创工具有限公司 | Coating for PCB micro milling cutter |
| CN114220982A (en) * | 2022-02-21 | 2022-03-22 | 艾瑞森表面技术（苏州）股份有限公司 | Film layer, bipolar plate and preparation method |
| CN115446359A (en) * | 2022-10-11 | 2022-12-09 | 哈尔滨理工大学 | High-hardness coating hard alloy cutter and machining method thereof |
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